CN218995849U - Light and dark field compatible light source and detection device - Google Patents
Light and dark field compatible light source and detection device Download PDFInfo
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- CN218995849U CN218995849U CN202223290056.4U CN202223290056U CN218995849U CN 218995849 U CN218995849 U CN 218995849U CN 202223290056 U CN202223290056 U CN 202223290056U CN 218995849 U CN218995849 U CN 218995849U
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Abstract
The utility model discloses a bright-dark field compatible light source and a detection device, wherein the bright-dark field compatible light source is characterized by comprising a light-emitting unit and a semi-transparent semi-reflecting unit, wherein one side of the semi-transparent semi-reflecting unit is provided with a bright field light spot station, and the other side of the semi-transparent semi-reflecting unit is provided with a dark field light spot station; the light emitted by the light emitting unit is emitted into the semi-transparent and semi-reflective unit, and the semi-transparent and semi-reflective unit comprises a bright field optical axis which is emitted to a bright field light spot station and a dark field optical axis which is emitted to a dark field light spot station; the included angle between the bright field optical axis and the vertical direction is smaller than the included angle between the dark field optical axis and the vertical direction. Through the arrangement, part of light rays emitted by the light-emitting unit can form bright field light spots at a high angle, and the other part of light rays can form dark field light spots at a low angle; therefore, the bright-dark field compatible light source can emit dark field light spots and bright field light spots at the same time, and only one light emitting unit is needed, so that the material cost is saved, and the cost of the detection device is reduced.
Description
Technical Field
The utility model relates to the technical field of light source structures, in particular to a bright-dark field compatible light source and a detection device.
Background
The light source is widely applied to the technical field of machine vision and is used for polishing a workpiece to be detected so as to highlight the surface characteristics of the workpiece to be detected, and a camera is convenient to acquire the image information of the workpiece to be detected; for different detection scenes, the light sources can be divided into a line scanning light source, a coaxial light source, a bright field light source, a dark field light source and the like.
In general, the surface defect characteristics of a workpiece to be detected are numerous in types; the detection device is generally provided with a dark field light source and a bright field light source, wherein the dark field light source and the bright field light source respectively project different light spots on the surface of the workpiece to be detected so as to facilitate the detection of the detection device; for example, as disclosed in patent document "CN217655026U", it is known that a dark field light source and a bright field light source are reflected by a reflecting mirror, respectively, so that a dark field light spot and a bright field light spot are formed on a workpiece to be measured. Obviously, at least two light sources are required to be arranged at the same time, namely, the detection device uses at least two light sources for forming dark field light spots and bright field light spots on a workpiece to be detected, so that the cost is high.
Therefore, it is necessary to develop a new light source structure to achieve the goal of compatible bright-dark field lighting at a lower cost.
Disclosure of Invention
The utility model aims to provide a bright-dark field compatible light source and a detection device, which are used for solving the problem that the cost is high due to the fact that the bright-dark field lighting is considered in the current light source structure.
To achieve the purpose, the utility model adopts the following technical scheme:
a bright-dark field compatible light source comprises a light-emitting unit and a semi-transparent and semi-reflective unit, wherein one side of the semi-transparent and semi-reflective unit is provided with a bright field light spot station, and the other side of the semi-transparent and semi-reflective unit is provided with a dark field light spot station;
the light emitted by the light emitting unit is emitted into the semi-transparent and semi-reflective unit, and the semi-transparent and semi-reflective unit comprises a bright field optical axis which is emitted to the bright field light spot station and a dark field optical axis which is emitted to the dark field light spot station;
the included angle between the bright field optical axis and the vertical direction is smaller than the included angle between the dark field optical axis and the vertical direction.
Optionally, the light emitting direction of the light emitting unit coincides with the bright field optical axis;
the light of the light-emitting unit passes through the half-transparent half-reflecting unit to extend to the bright field light spot station, and the light of the light-emitting unit is reflected by the half-transparent half-reflecting unit to the dark field light spot station.
Optionally, the light emitting direction of the light emitting unit coincides with the dark field optical axis;
the light of the light-emitting unit passes through the half-transparent half-reflecting unit to extend to the dark field light spot station, and the light of the light-emitting unit is reflected by the half-transparent half-reflecting unit to the bright field light spot station.
Optionally, a first supplementary light spot station is arranged between the bright field light spot station and the dark field light spot station;
the bright-dark field compatible light source further comprises a bright-field light splitting unit on the dark-field optical axis, and the bright-field light splitting unit is used for reflecting light on the dark-field optical axis to the first supplementary light spot station.
Optionally, a second supplementary light spot station is arranged between the bright field light spot station and the dark field light spot station;
the bright-dark field compatible light source further comprises a dark-field light splitting unit on the bright-field optical axis, and the dark-field light splitting unit is used for reflecting light on the bright-field optical axis to the second supplementary light spot station.
Optionally, the half-transmitting half-reflecting unit is a beam-splitting prism.
Optionally, a condensing rod is disposed on a side of the half-transparent half-reflective unit close to the bright field optical axis and a side of the half-transparent half-reflective unit close to the dark field optical axis.
The detection device comprises the bright-dark field compatible light source, a first camera is arranged above the bright-field light spot station, and a second camera is arranged above the dark-field light spot station.
Optionally, the workpiece to be measured is conveyed along the direction from the bright field light spot station to the dark field light spot station by the conveying assembly.
Compared with the prior art, the utility model has the following beneficial effects:
the utility model provides a light and dark field compatible light source and a detection device, which are provided by the utility model, through the arrangement of a light-emitting unit and a semi-transparent and semi-reflective unit, and simultaneously through making the included angle between an bright field optical axis and the vertical direction smaller than the included angle between a dark field optical axis and the vertical direction, a part of light rays emitted by the light-emitting unit can reach a bright field light spot station in a high-angle mode through the bright field optical axis to form bright field light spots; the other part of light rays emitted by the light-emitting unit can reach the dark field light spot station through the dark field optical axis in a low-angle mode to form dark field light spots; therefore, the bright-dark field compatible light source can emit dark field light spots and bright field light spots at the same time, and only one light emitting unit is needed, so that the material cost is saved, and the overall cost of the detection device is further reduced.
Drawings
In order to more clearly illustrate the embodiments of the utility model or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the utility model, and that other drawings can be obtained from these drawings without inventive faculty for a person skilled in the art.
The structures, proportions, sizes, etc. shown in the drawings are shown only in connection with the present disclosure, and are not intended to limit the scope of the utility model, since any modification, variation in proportions, or adjustment of the size, etc. of the structures, proportions, etc. should be considered as falling within the spirit and scope of the utility model, without affecting the effect or achievement of the objective.
FIG. 1 is a schematic diagram of the overall structure of a bright-dark field compatible light source according to an embodiment of the present utility model;
FIG. 2 is a schematic diagram of a first structure of a bright-dark field compatible light source according to an embodiment of the present utility model;
fig. 3 is a schematic diagram of a second structure of a bright-dark field compatible light source according to an embodiment of the present utility model.
Illustration of: 10. a light emitting unit; 20. a semi-transparent semi-reflective unit; 21. a bright field optical axis; 22. a dark field optical axis; 30. a bright field facula station; 40. a dark field flare station; 50. a light-gathering rod; 61. a first camera; 62. a second camera; 70. and (5) a workpiece to be tested.
Detailed Description
In order to make the objects, features and advantages of the present utility model more comprehensible, the technical solutions in the embodiments of the present utility model are described in detail below with reference to the accompanying drawings, and it is apparent that the embodiments described below are only some embodiments of the present utility model, but not all embodiments of the present utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "top", "bottom", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model. It is noted that when one component is referred to as being "connected" to another component, it can be directly connected to the other component or intervening components may also be present.
The technical scheme of the utility model is further described below by the specific embodiments with reference to the accompanying drawings.
Referring to fig. 1 to 3, fig. 1 is a schematic diagram of an overall structure of a bright-dark field compatible light source according to an embodiment of the present utility model, fig. 2 is a schematic diagram of a first structure of the bright-dark field compatible light source according to an embodiment of the present utility model, and fig. 3 is a schematic diagram of a second structure of the bright-dark field compatible light source according to an embodiment of the present utility model.
Example 1
The bright-dark field compatible light source provided by the embodiment is applied to a detection device and is used for polishing a workpiece 70 to be detected, and particularly, bright-field light spots and dark-field light spots can be simultaneously irradiated to the workpiece 70 to be detected; wherein, through improving the structure of bright and dark field compatible light source, make it can reduce the quantity of inside light source, and then reduce material cost.
As shown in fig. 1 to 3, the bright-dark field compatible light source of the present embodiment includes a light emitting unit 10 and a half-transmitting and half-reflecting unit 20, one side of the half-transmitting and half-reflecting unit 20 is provided with a bright field light spot station 30, and the other side of the half-transmitting and half-reflecting unit 20 is provided with a dark field light spot station 40; the light emitting unit 10 includes a light plate, on which a plurality of LED light beads are mounted along a line, so that light spots projected on the workpiece 70 to be measured are strip-shaped, and can cover the workpiece 70 to be measured in a width direction; the light emitted by the light emitting unit 10 is emitted into the half-transmitting and half-reflecting unit 20, and the half-transmitting and half-reflecting unit 20 comprises a bright field optical axis 21 which is emitted to the bright field light spot station 30 and a dark field optical axis 22 which is emitted to the dark field light spot station 40; the bright field optical axis 21 refers to a bright field optical path from the half mirror unit 20 to the bright field spot station 30, and the dark field optical axis 22 refers to a dark field optical path from the half mirror unit 20 to the dark field spot station 40, which indicates that after a part of the light emitting unit 10 reaches the half mirror unit 20, a part of the light can reach the bright field spot station 30 along the bright field optical path, and another part of the light reaches the half mirror unit 20, a part of the light can reach the dark field spot station 40 along the dark field optical path.
In this embodiment, as shown in fig. 2 to 3, the included angle between the bright-field optical axis 21 and the vertical direction is smaller than the included angle between the dark-field optical axis 22 and the vertical direction, in this embodiment, the included angle between the bright-field optical axis 21 and the vertical direction is 20 °, and the included angle between the dark-field optical axis 22 and the vertical direction is 70 °, that is, the included angle between the light-splitting surface of the half-transmitting half-reflecting unit 20 and the vertical direction is 20 °.
Specifically, the bright-dark field compatible light source of the embodiment is configured by the light emitting unit 10 and the semi-transparent and semi-reflective unit 20, and meanwhile, by making the included angle between the bright-field optical axis 21 and the vertical direction smaller than the included angle between the dark-field optical axis 22 and the vertical direction, a part of light emitted by the light emitting unit 10 can reach the bright-field light spot station 30 through the bright-field optical axis 21 in a high-angle form (the included angle between the light and the vertical direction is 20 °), so as to form a bright-field light spot; so that another part of light emitted by the light emitting unit 10 can reach the dark field spot station 40 through the dark field optical axis 22 in a low-angle form (the included angle between the light emitting unit and the vertical direction is 70 °), and a dark field spot is formed; therefore, the bright-dark field compatible light source of the embodiment can emit dark field light spots and bright field light spots at the same time, and only one light emitting unit 10 is needed, so that the material cost is saved, and the overall cost of the detection device is further reduced.
In a specific embodiment, as shown in fig. 1 and 2, the light emitting direction of the light emitting unit 10 coincides with the bright field optical axis 21; the light of the light emitting unit 10 passes through the half-transmitting and half-reflecting unit 20 to extend to the bright field spot station 30, and the light of the light emitting unit 10 is reflected by the half-transmitting and half-reflecting unit 20 to the dark field spot station 40. At this time, the bright field optical path: a light emitting unit 10-a light transmitting side of the half-transmitting half-reflecting unit 20-a bright field spot station 30; dark field optical path: light emitting unit 10-reflective side of half mirror unit 20-dark field spot station 40.
In another specific embodiment, the light emitting direction of the light emitting unit 10 coincides with the dark field optical axis 22; the light of the light emitting unit 10 passes through the half-transmitting and half-reflecting unit 20 to extend to the dark field spot station 40, and the light of the light emitting unit 10 is reflected by the half-transmitting and half-reflecting unit 20 to the bright field spot station 30. At this time, the bright field optical path: a light emitting unit 10-the reflective side of the half mirror unit 20-the bright field spot station 30; dark field optical path: light emitting unit 10-light transmitting side of half mirror unit 20-dark field spot station 40.
Further, on the basis of the above embodiment, a first supplementary spot station is provided between the bright field spot station 30 and the dark field spot station 40; the bright-dark field compatible light source further includes a bright-field light splitting unit on the dark-field optical axis 22, and the bright-field light splitting unit is configured to reflect light on the dark-field optical axis 22 to the first supplementary light spot station. The inclination angles of the light splitting surface of the bright field light splitting unit and the light splitting surface of the semi-transparent and semi-reflecting unit 20 are consistent, so that the spot irradiation angle at the first supplementary spot station is the same as that of the bright field spot station 30, and the angle is 20 degrees with the vertical direction.
Further, on the basis of the above embodiment, a second supplementary spot station is provided between the bright field spot station 30 and the dark field spot station 40; the bright-dark field compatible light source further includes a dark field light splitting unit on the bright-field optical axis 21, and the dark field light splitting unit is configured to reflect light on the bright-field optical axis 21 to the second supplementary light spot station. The inclination angles of the light splitting surface of the dark field light splitting unit and the light splitting surface of the half-transmitting and half-reflecting unit 20 are consistent, so that the spot irradiation angle at the second supplementary spot station is the same as that of the dark field spot station 40, and the angle is 70 degrees with the vertical direction.
Through the arrangement, the same light-emitting unit 10 can project more light spots, so that the detection requirements of different workpieces 70 to be detected are met.
In this embodiment, the half mirror unit 20 is a beam splitter prism. In other alternative embodiments, the half-transmitting and half-reflecting unit 20 may be another unit having both light transmittance and light reflectance, such as a light-splitting film.
Further, the light-gathering rod 50 is disposed on one side of the half-transmitting and half-reflecting unit 20 near the bright-field optical axis 21 and one side of the half-transmitting and half-reflecting unit 20 near the dark-field optical axis 22.
In summary, the bright-dark field compatible light source provided in this embodiment can simultaneously achieve bright-dark field lighting, and has the advantage of low cost.
Example two
The detection device provided in this embodiment includes the bright-dark field compatible light source in the first embodiment, the first camera 61 is disposed above the bright-field light spot station 30, and the second camera 62 is disposed above the dark-field light spot station 40. The bright field light source irradiates bright field light spots to the bright field light spot station 30, the first camera 61 acquires defect characteristics of the workpiece 70 to be measured at the bright field light spot station 30, emits dark field light spots to the dark field light spot station 40, and the second camera 62 acquires defect characteristics of the workpiece 70 to be measured at the dark field light spot station 40.
Further, the inspection apparatus also includes a transport assembly for transporting the workpiece 70 to be inspected in a direction from the bright field spot station 30 to the dark field spot station 40. The conveying assembly can be a conveying belt assembly, the motor of the conveying belt assembly drives the synchronous wheel to rotate, the synchronous wheel synchronously drives the synchronous belt to rotate, and the workpiece 70 to be measured can be placed on the synchronous belt to sequentially pass through the dark field facula station 40 and the bright field facula station 30; therefore, the conveying assembly can convey the workpiece 70 to be detected along the conveying direction, so that the workpiece 70 to be detected sequentially passes through the dark field light spot station 40 and the bright field light spot station 30, and surface characteristic defect detection is completed.
In the first embodiment, a specific structure and technical effects related to a bright-dark field compatible light source are described, and the detection device of the embodiment refers to the structure and has the technical effects as well; in summary, the detection device of the embodiment can simultaneously achieve bright and dark field lighting and has the advantage of low cost.
The above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.
Claims (9)
1. The light and dark field compatible light source is characterized by comprising a light emitting unit (10) and a semi-transparent and semi-reflective unit (20), wherein one side of the semi-transparent and semi-reflective unit (20) is provided with a light field light spot station (30), and the other side of the semi-transparent and semi-reflective unit (20) is provided with a dark field light spot station (40);
the light emitted by the light emitting unit (10) is emitted into the semi-transparent and semi-reflective unit (20), and the semi-transparent and semi-reflective unit (20) comprises a bright field optical axis (21) which is emitted to the bright field light spot station (30) and a dark field optical axis (22) which is emitted to the dark field light spot station (40);
the included angle between the bright field optical axis (21) and the vertical direction is smaller than the included angle between the dark field optical axis (22) and the vertical direction.
2. A bright-dark-field compatible light source according to claim 1, characterized in that the light-emitting direction of the light-emitting unit (10) coincides with the bright-field optical axis (21);
the light of the light-emitting unit (10) passes through the semi-transparent and semi-reflective unit (20) to extend to the bright field light spot station (30), and the light of the light-emitting unit (10) is reflected by the semi-transparent and semi-reflective unit (20) to the dark field light spot station (40).
3. A bright-dark-field compatible light source according to claim 1, characterized in that the light exit direction of the light emitting unit (10) coincides with the dark-field optical axis (22);
the light of the light-emitting unit (10) passes through the semi-transparent and semi-reflective unit (20) to extend to the dark field light spot station (40), and the light of the light-emitting unit (10) is reflected by the semi-transparent and semi-reflective unit (20) to the bright field light spot station (30).
4. A bright-dark-field compatible light source according to claim 1, characterized in that a first supplementary light spot station is arranged between the bright-field light spot station (30) and the dark-field light spot station (40);
the bright-dark field compatible light source further comprises a bright-field light splitting unit on the dark-field optical axis (22), and the bright-field light splitting unit is used for reflecting light on the dark-field optical axis (22) to the first supplementary light spot station.
5. A bright-dark-field compatible light source according to claim 1, characterized in that a second supplementary spot station is arranged between the bright-field spot station (30) and the dark-field spot station (40);
the bright-dark field compatible light source further comprises a dark field light splitting unit on the bright-field optical axis (21), and the dark field light splitting unit is used for reflecting light on the bright-field optical axis (21) to the second supplementary light spot station.
6. A bright-dark-field compatible light source according to claim 1, characterized in that the half-transmissive half-reflective unit (20) is a beam-splitting prism.
7. A bright-dark-field compatible light source according to claim 1, characterized in that the semi-transparent and semi-reflective unit (20) is provided with a light-collecting rod (50) on the side close to the bright-field optical axis (21) and on the side close to the dark-field optical axis (22) of the semi-transparent and semi-reflective unit (20).
8. A detection device comprising a bright-dark field compatible light source as claimed in any one of claims 1-7, a first camera (61) being arranged above the bright-field spot station (30), and a second camera (62) being arranged above the dark-field spot station (40).
9. A detection apparatus according to claim 8, further comprising a conveyor assembly for conveying the workpiece (70) to be detected in a direction from the bright field spot station (30) to the dark field spot station (40).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223290056.4U CN218995849U (en) | 2022-12-08 | 2022-12-08 | Light and dark field compatible light source and detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223290056.4U CN218995849U (en) | 2022-12-08 | 2022-12-08 | Light and dark field compatible light source and detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218995849U true CN218995849U (en) | 2023-05-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223290056.4U Active CN218995849U (en) | 2022-12-08 | 2022-12-08 | Light and dark field compatible light source and detection device |
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| CN (1) | CN218995849U (en) |
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- 2022-12-08 CN CN202223290056.4U patent/CN218995849U/en active Active
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