KR101123638B1 - Apparatus for detecting scratch and method adopting the same - Google Patents

Apparatus for detecting scratch and method adopting the same Download PDF

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KR101123638B1
KR101123638B1 KR1020090079016A KR20090079016A KR101123638B1 KR 101123638 B1 KR101123638 B1 KR 101123638B1 KR 1020090079016 A KR1020090079016 A KR 1020090079016A KR 20090079016 A KR20090079016 A KR 20090079016A KR 101123638 B1 KR101123638 B1 KR 101123638B1
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light
scratch
panel
reflected
inspected object
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KR20110021304A (en
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남인창
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주식회사 케이엔제이
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined

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  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
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  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

본 발명은 스크래치 검사장치 및 방법에 관한 것으로서, 보다 상세하게는 피검사체의 표면에 반사되는 광을 재반사시켜 검사에 이용할 수 있는 광량을 증폭시키는 스크래치 검사장치 및 방법에 관한 것이다. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scratch inspection apparatus and method, and more particularly, to a scratch inspection apparatus and method for amplifying the amount of light that can be used for inspection by rereflecting light reflected on a surface of an inspected object.

본 발명에 의한 스크래치 검사장치는 피검사체에 광을 조사하는 조명; 상기 피검사체의 표면에 있는 스크래치에 부딪혀 산란되는 광을 인식하는 카메라; 및 상기 피검사체의 표면에 부딪혀 반사되는 광을 재반사하는 반사미러;를 포함한다. Scratch inspection apparatus according to the present invention is an illumination for irradiating light to the inspected object; A camera that recognizes light scattered by hitting a scratch on the surface of the test object; And a reflection mirror reflecting light reflected from the surface of the test object.

패널. 스크래치. 광량. 미러. 반사. panel. scratch. Light quantity. mirror. reflect.

Description

스크래치 검사장치 및 방법{APPARATUS FOR DETECTING SCRATCH AND METHOD ADOPTING THE SAME}Scratch Tester and Method {APPARATUS FOR DETECTING SCRATCH AND METHOD ADOPTING THE SAME}

본 발명은 스크래치 검사장치 및 방법에 관한 것으로서, 보다 상세하게는 피검사체의 표면에 반사되는 광을 재반사시켜 검사에 이용할 수 있는 광량을 증폭시키는 스크래치 검사장치 및 방법에 관한 것이다. BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a scratch inspection apparatus and method, and more particularly, to a scratch inspection apparatus and method for amplifying the amount of light that can be used for inspection by rereflecting light reflected on a surface of an inspected object.

평판디스플레이 패널의 제조공정 중 패널의 표면상에 스크래치가 있는지를 검사하는 공정이 있다. There is a process of inspecting whether there is a scratch on the surface of the panel during the manufacturing process of the flat panel display panel.

일반적으로 스크래치 불량특성상 다크필드 조명법을 사용하는데, 도 1을 참조하여 종래 스크래치 검사장치(100)를 설명한다. 도시된 바와 같이, 패널(P)을 이송하는 롤러컨베이어(110)와, 상기 패널(P)에 광을 출사하는 조명(130)과, 상기 패널의 표면에 있는 스크래치에 의해 산란되는 광을 인식하는 카메라(120)로 구성된다. In general, a dark field illumination method is used in view of scratch failure characteristics, and the conventional scratch inspection apparatus 100 will be described with reference to FIG. 1. As shown, the roller conveyor 110 for transporting the panel P, the illumination 130 for emitting light to the panel P, and the light scattered by the scratch on the surface of the panel to recognize It consists of a camera 120.

도 2를 참조하면, 상기 조명(130)에서 출사되는 출사광(L0)의 광축은 수직선으로부터 소정 각도로 경사진 상태로 패널(P)의 표면에 조사된다. 또한 상기 카메라(120)는 패널(P)의 수직선 방향에 설치되어 반사광(L2)을 인식할 수 없다. 따라 서 패널(P)의 표면에 스크래치가 없다면 출사광(L0)은 패널에 의해 반사되어 반사광(L2)으로 나가기 때문에 카메라(120)는 어떠한 광도 인식하지 않게 된다. Referring to FIG. 2, the optical axis of the emission light L0 emitted from the illumination 130 is irradiated onto the surface of the panel P in a state inclined at a predetermined angle from a vertical line. In addition, the camera 120 is installed in the vertical line direction of the panel P, and thus cannot recognize the reflected light L2. Therefore, if there is no scratch on the surface of the panel P, the outgoing light L0 is reflected by the panel and exits to the reflected light L2, so that the camera 120 does not recognize any light.

이와 달리 패널(P)에 스크래치가 있다면 출사광(L0)은 패널(P)의 스크래치(S)에 부딪혀 산란하게 되고, 이러한 산란광(L1)을 카메라(120)가 인식하게 되는 것이다. 즉, 카메라(120)가 어떠한 광도 인식하지 못한다면, 그것은 스크래치(S)가 없다는 의미이고, 반대로 카메라(120)가 광(L1)을 인식한다면, 그것은 패널(P)에 스크래치(S)가 존재한다는 의미이다. On the other hand, if there is a scratch on the panel P, the outgoing light L0 will be scattered by hitting the scratch S of the panel P, and the scattered light L1 will be recognized by the camera 120. That is, if the camera 120 does not recognize any light, it means that there is no scratch S, on the contrary, if the camera 120 recognizes light L1, it means that there is a scratch S in the panel P. It means.

이와 같은 방법으로 패널의 스크래치 유무를 식별하는 경우, 광량이 클수록 스크래치 검사 성능이 좋아지지만, 현실적으로 광량을 늘리는 것은 한계가 있다. When the presence or absence of scratches on the panel is identified in this manner, the greater the amount of light, the better the scratch inspection performance. However, there is a limit in actually increasing the amount of light.

본 발명은 상술한 문제점을 해결하기 위하여 안출된 것으로서, 본 발명의 목적은 피검사체의 표면에 반사되는 광을 재반사시켜 검사에 이용할 수 있는 광량을 증폭시키는 스크래치 검사장치 및 방법을 제공함에 있다. SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a scratch inspection apparatus and method for amplifying the amount of light that can be used for inspection by rereflecting the light reflected on the surface of the inspected object.

위와 같은 기술적 과제를 해결하기 위하여 본 발명에 의한 스크래치 검사장치는 피검사체에 광을 조사하는 조명; 상기 피검사체의 표면에 있는 스크래치에 부딪혀 산란되는 광을 인식하는 카메라; 및 상기 피검사체의 표면에 부딪혀 반사되는 광을 재반사하는 반사미러;를 포함한다. In order to solve the above technical problem, the scratch inspection apparatus according to the present invention is illuminated to irradiate light on the inspected object; A camera that recognizes light scattered by hitting a scratch on the surface of the test object; And a reflection mirror reflecting light reflected from the surface of the test object.

또한 상기 반사미러는 상기 피검사체의 표면에 부딪혀 반사되는 광의 광축에 대하여 수직으로 설치되는 것이 바람직하다. In addition, the reflective mirror is preferably installed perpendicular to the optical axis of the light that hits the surface of the object to be reflected.

또한 상기 조명, 카메라 및 반사미러는 상기 피검사체의 상부 및 하부에 각각 구비되는 것이 바람직하다. In addition, the illumination, the camera and the reflection mirror is preferably provided on the upper and lower portions of the inspected object, respectively.

본 발명에 의한 스크래치 검사방법은 피검사체의 표면에 광을 조사한 후, 스크래치에 부딪혀 산란되는 광을 인식함으로써 스크래치 유무를 식별하는 스크래치 검사방법에 있어서, 상기 광이 피검사체의 표면에 부딪혀 반사되는 광을 재반사하여 광량을 증폭시키는 것을 특징으로 한다. The scratch inspection method according to the present invention is a scratch inspection method for identifying the presence or absence of scratches by irradiating light on the surface of the inspected object, and then scattered by hitting the scratch, the light that hits the surface of the inspected object and reflected It is characterized by amplifying the amount of light by reflecting again.

본 발명에 따르면, 피검사체의 표면에 반사되는 광을 재반사시켜 검사에 이 용하기 때문에 상대적으로 더 높은 광량을 얻을 수 있다. According to the present invention, since the light reflected on the surface of the inspected object is re-reflected and used for inspection, a relatively higher amount of light can be obtained.

따라서 스크래치가 더 잘 보이는 효과가 있다. Thus, scratches are more visible.

이하, 첨부된 도면을 참조하여 본 발명의 구성 및 작용을 설명한다. Hereinafter, with reference to the accompanying drawings will be described the configuration and operation of the present invention.

도 3을 참조하면, 본 발명에 의한 스크래치 검사장치(1)는 패널을 이송하는 롤러컨베이어(10)와, 조명(30a, 30b)과, 카메라(20a, 20b)와, 반사미러(40a, 40b)를 포함한다. Referring to FIG. 3, the scratch inspection apparatus 1 according to the present invention includes a roller conveyor 10 for conveying a panel, illuminations 30a and 30b, cameras 20a and 20b, and reflective mirrors 40a and 40b. ).

상기 조명(30a, 30b)은 출사광(L0)의 출사각이 수직선으로부터 소정각도로 경사지게 설치된다. The illuminations 30a and 30b are installed such that the emission angle of the emission light L0 is inclined at a predetermined angle from the vertical line.

상기 카메라(20a, 20b)는 출사광(L0)이 패널(P)에 반사되는 반사광(L2)이 입사되지 않는 위치에 설치된다. The cameras 20a and 20b are installed at positions where the reflected light L2 on which the exit light L0 is reflected on the panel P is not incident.

상기 반사미러(40a, 40b)는 상기 패널(P)의 표면에서 반사되는 광의 광축에 대하여 수직으로 설치된다. The reflection mirrors 40a and 40b are installed perpendicular to the optical axis of the light reflected from the surface of the panel P.

또한 상기 조명(30a, 30b), 카메라(20a, 20b) 및 반사미러(40a, 40b)는 상기 패널(P)의 상부 및 하부에 각각 1 세트씩 구비된다. In addition, the illumination (30a, 30b), the camera (20a, 20b) and the reflecting mirrors (40a, 40b) are provided in the upper and lower portions of the panel (P), respectively.

이하에서는 본 발명에 의한 스크래치 검사장치(1)의 작동상태 및 검사방법을 설명한다. Hereinafter, the operation state and inspection method of the scratch inspection apparatus 1 according to the present invention.

먼저, 롤러컨베이어(10)에 패널(P)을 로딩하여 이송하면서, 조명(30a, 30b)에서 광을 출사한다. 출사광(L0)은 패널(P)의 표면을 통해 반사되는데, 만약 패널(P)의 표면에 스크래치가 있다면 산란된다. First, light is emitted from the lights 30a and 30b while loading and transporting the panel P to the roller conveyor 10. The outgoing light L0 is reflected through the surface of the panel P, and if there is a scratch on the surface of the panel P, it is scattered.

이 때 산란되는 산란광(L1)을 카메라(20a, 20b)가 인식하여 스크래치를 식별하여 검사하는 것이다. 특히, 본 발명에 의하면 반사미러(40a, 40b)를 구비하여 반사광을 재반사시켜 재반사광(L3)이 다시 패널(P)로 출사하기 때문에 광량이 증폭되게 된다. 따라서 스크래치를 보다 확실하게 식별할 수 있게 되는 것이다. At this time, the scattered light L1 is recognized by the cameras 20a and 20b to identify and inspect the scratches. In particular, according to the present invention, since the reflection mirrors 40a and 40b are provided to reflect the reflected light again and the reflected light L3 is emitted to the panel P again, the amount of light is amplified. Therefore, scratches can be identified more reliably.

도 1은 종래 스크래치 검사장치를 나타낸 것이다. Figure 1 shows a conventional scratch inspection apparatus.

도 2는 도 1에 도시된 장치의 작동상태를 나타낸 것이다. FIG. 2 shows the operating state of the apparatus shown in FIG. 1.

도 3은 본 발명에 의한 스크래치 검사장치를 나타낸 것이다. Figure 3 shows a scratch inspection apparatus according to the present invention.

**도면의 주요부분에 대한 부호의 설명**DESCRIPTION OF REFERENCE NUMERALS

1: 검사장치 10: 롤러컨베이어1: Inspection Device 10: Roller Conveyor

20a, 20b: 카메라 30a,30b: 조명20a, 20b: camera 30a, 30b: lighting

40a,40b: 반사미러40a, 40b: reflective mirror

Claims (5)

피검사체에 광을 조사하되 출사광의 출사각이 상기 피검사체에 대하여 예각을 갖도록 설치되는 조명;Illuminating the irradiated light to be irradiated with the light to be emitted to have an acute angle with respect to the test object; 광축이 상기 피검사체와 수직을 이루도록 배치되어 상기 출사광이 상기 피검사체에 반사되는 반사광이 입사되지 않는 위치에 설치되어, 상기 피검사체의 표면에 있는 스크래치에 부딪혀 산란되는 광을 인식하는 카메라; 및 A camera which is arranged such that an optical axis is perpendicular to the inspected object so that the emitted light does not enter the reflected light reflected by the inspected object, and recognizes light scattered by hitting a scratch on the surface of the inspected object; And 상기 반사광의 광축에 대하여 수직으로 설치되어 상기 반사광을 재반사하는 반사미러;를 포함하며, And a reflection mirror installed perpendicular to the optical axis of the reflected light to re-reflect the reflected light. 상기 조명, 카메라 및 반사미러는 상기 피검사체의 상부 및 하부에 각각 구비되는 것을 특징으로 하는 스크래치 검사장치. And the illumination, camera and reflecting mirror are provided on the upper and lower portions of the inspected object, respectively. 삭제delete 삭제delete 삭제delete 삭제delete
KR1020090079016A 2009-08-26 2009-08-26 Apparatus for detecting scratch and method adopting the same KR101123638B1 (en)

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