CN218987710U

CN218987710U - Semiconductor wafer access manipulator device

Info

Publication number: CN218987710U
Application number: CN202223535800.2U
Authority: CN
Inventors: 沙伟中
Original assignee: Suzhou I Stock Intelligent Technology Co ltd
Current assignee: Suzhou I Stock Intelligent Technology Co ltd
Priority date: 2022-12-29
Filing date: 2022-12-29
Publication date: 2023-05-09
Anticipated expiration: 2032-12-29

Abstract

The utility model provides a semiconductor wafer storing and taking manipulator device which comprises a walking guide rail, wherein the walking guide rail controls the moving range of a whole mechanism in a bin body of an intelligent storage, after the whole mechanism moves to a corresponding place, a vertical sliding seat moves up and down to a corresponding height along the vertical guide rail, and a mounting plate moves a clamping jaw device to the front of a tray along a travel guide rail. The clamping jaw device comprises an air cylinder and a clamping block, wherein a push rod of the air cylinder pushes the clamping block to rotate along an axis and clamp a tray through a clamping piece. The transfer and clamping of the semiconductor wafer are realized through the mechanism. According to the utility model, the adjusting structure of the frame for storing the wafers is arranged, so that the manipulator is free from collision when storing the semiconductor wafers, and the storage efficiency and safety are improved.

Description

Semiconductor wafer access manipulator device

Technical Field

The utility model relates to the technical field of semiconductor wafer storage, in particular to a mechanism for accessing a semiconductor wafer.

Background

Semiconductor wafers are the base material for producing chips. Because of the precision and vulnerability of semiconductor wafer materials, very precise devices are required for transporting semiconductor wafers. Generally, an intelligent warehouse with a manipulator is used for transferring and storing semiconductor wafers.

For example, patent literature of semiconductor smart warehouse with publication number CN216003966, which is a double manipulator, discloses smart warehouse for storing semiconductors. In the background technology, the intelligent storage is also recorded, the manipulator is basically adopted to grasp in the process of material storage, and a single manipulator is required to firstly take or stock when in operation when the intelligent storage simultaneously needs to store and take materials in the process of simultaneously operating the material storage, then the next step is carried out, so that the storage efficiency is relatively low, and the operation radius of the manipulator is larger because some manipulators are arranged in the intelligent storage, so that the condition of manipulator operation interference is easy to occur.

The clamping jaw mechanism comprises a telescopic device, a pressing device and a rotating device, wherein the telescopic device is used for clamping materials and then stretching out and drawing back, the pressing device is used for fixing a material disc, and the rotating device is used for rotating the clamping materials. The telescopic device of the clamping jaw mechanism is used for controlling the clamping jaw to stretch and retract so as to reduce the rotation radius of the clamping jaw of the machine and reduce the occurrence of interference.

More specifically, the application further improves the mechanical arm device to clamp the tray of the wafer, and provides an adaptive frame body for storing the wafer so as to ensure that no collision occurs in the wafer transferring process.

Disclosure of Invention

In order to solve the technical problems, the utility model provides a semiconductor wafer access manipulator device, which aims to provide a manipulator device for clamping a tray for semiconductor wafers, and the manipulator is free from collision when the semiconductor wafers are stored by arranging an adjusting structure for a frame for storing the wafers, so that the storage efficiency and safety are improved.

A semiconductor wafer access robot apparatus includes,

the walking guide rail is provided with a transverse sliding seat which is adapted to the walking guide rail, and the sliding seat moves along the walking guide rail under the drive of a motor I;

the sliding seat is provided with mounting parts which are arranged side by side, the wide upper parts of the lower parts of the mounting parts are narrow to form a supporting structure, the mounting parts are provided with vertical guide rails, the vertical guide rails are provided with vertical sliding seats, the vertical sliding seats are fixedly connected with supporting brackets, the supporting brackets are provided with travel guide rails, the travel guide rails are provided with connecting bottom plates, and the connecting bottom plates are provided with clamping jaw devices;

the clamping jaw device is characterized in that an air cylinder is arranged on the connecting bottom plate, the connecting bottom plate is connected with the clamping jaw device guide rail, the air cylinder is arranged on the connecting bottom plate, a push rod of the air cylinder is connected with the clamping block, a through hole is formed in the middle of the clamping block, a shaft penetrates through the through hole, a clamping body is arranged at the front end of the clamping block, springs are arranged on two sides of the clamping block, the springs are connected with the connecting bottom plate, and a limiting block is arranged at the lower part of the connecting bottom plate.

Further, the method also comprises the steps of,

the device comprises a bottom plate and a frame body arranged on the bottom plate, wherein the frame body comprises a fixed seat fixed on the bottom plate, a plurality of arc-shaped grooves are formed in the fixed seat, and the arc-shaped grooves are detachably connected with the bottom plate through bolts;

the pushing mechanisms are arranged on two sides of the fixed seat and comprise pushing blocks, the pushing blocks are connected with pushing bolts, the pushing bolts rotate in or out of the pushing blocks, and the pushing rods are in contact with the fixed blocks arranged on the side surfaces of the fixed seat;

the frame body comprises two vertically arranged mounting frames, and the mounting frames are connected with the fixing seats through obliquely arranged supporting frames;

the mounting frame is provided with a plurality of storage grids for storing the semiconductor wafers.

Furthermore, the number of the walking guide rails is two, and the walking guide rails are arranged on the bottom plate side by side.

Further, a through hole is formed in the middle of the clamping block, a shaft penetrates through the through hole, a clamping body is arranged at the front end of the clamping block, springs are arranged on two sides of the clamping block, and the springs are connected with the connecting chassis.

Further, a second motor is arranged above the mounting portion and is used for driving the vertical sliding seat to move along the vertical guide rail.

Further, a motor III is arranged below the travel guide rail to drive the connecting bottom plate to move along the clamping jaw device guide rail.

The utility model provides a semiconductor wafer access manipulator device which has the beneficial effects that,

the intelligent storage device comprises a walking guide rail, wherein the walking guide rail controls the moving range of the whole mechanism in a bin body of the intelligent storage, and after the whole mechanism moves to a corresponding place, a vertical sliding seat moves up and down to a corresponding height along the vertical guide rail, and a mounting plate moves a clamping jaw device to the front of a tray along a travel guide rail. The clamping jaw device comprises an air cylinder and a clamping block, wherein a push rod of the air cylinder pushes the clamping block to rotate along an axis and clamp a tray through a clamping piece. The transfer and clamping of the semiconductor wafer are realized through the mechanism. Correspondingly, a storage grid is arranged on the mounting frame and is fixed on two mounting frames which are arranged in parallel through a transverse mounting plate. The fixing seat can rotate anticlockwise or clockwise along the track range preset by the arc-shaped groove. The rotary pushing is realized by combining a pushing block in the pushing mechanism and a bolt, wherein the bolt pushes a fixed block arranged on the fixed seat to push the fixed seat to rotate by rotating and stretching in the pushing block. The adjustment of fixing base sets up in the position of the mounting bracket on the fixing base and then adjusts the position of storage check, and then keeps the manipulator can not interfere with the draw-in groove of storage check.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below.

FIG. 1 is a schematic view of a tray structure for semiconductor wafers according to the present utility model;

FIG. 2 is a schematic diagram of a semiconductor wafer handling robot apparatus according to the present utility model;

FIG. 3 is a schematic diagram of a semiconductor wafer handling robot apparatus according to a second embodiment of the present utility model;

FIG. 4 is a schematic view of the structure of the mounting part of the present utility model;

FIG. 5 is a schematic view of a portion of a jaw apparatus according to the present utility model;

FIG. 6 is a schematic diagram of a portion of a jaw apparatus according to the present utility model;

FIG. 7 is a schematic view of the structure of the mounting frame of the present utility model;

FIG. 8 is a partial schematic view of the mounting bracket of the present utility model secured to a mounting bracket;

Detailed Description

The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.

Fig. 1 shows a tray structure for holding semiconductor wafer bodies. The semiconductor wafer access manipulator device shown in fig. 2 and 3 comprises a bottom plate 101 and a mounting frame 102 arranged on the bottom plate 101, wherein a walking guide rail 201 is arranged on the bottom plate 101, and a transverse sliding seat 202 is arranged on the walking guide rail 201 and is driven by a motor 203 to move along the walking guide rail 201.

As shown in fig. 4, the transverse sliding seat 202 is provided with mounting portions 203 arranged side by side, the lower part of each mounting portion 203 is wide, the upper part of each mounting portion is narrow to form a supporting structure, each mounting portion is provided with a vertical guide rail 204, each vertical guide rail 204 is provided with a vertical sliding seat 205, each vertical sliding seat 205 is fixedly connected with a supporting bracket 206, each supporting bracket 206 is provided with a travel guide rail 207, and each travel guide rail 207 is provided with a connecting bottom plate 301. The second motor 208 drives the vertical sliding seat 205 to move along the vertical guide rail 204.

As shown in fig. 5 and 6, the clamping jaw device comprises a connecting bottom plate 301, the connecting bottom plate 301 is connected with a clamping jaw device guide rail 302, a cylinder 303 is arranged on the connecting bottom plate 301, and a push rod of the cylinder 303 is connected with a clamping block 304. The middle part of clamp splice 304 is provided with the through-hole, and a axle 305 passes the through-hole, the front end of clamp splice 304 is provided with clamping piece body 306, the both sides of clamp splice 304 are provided with spring 307, spring 307 with connect bottom plate 301 is connected, connect the lower part of bottom plate and be provided with the stopper. A third motor 308 is arranged below the travel rail 207 to drive the connection base plate 301 along the jaw device rail 302.

As shown in fig. 7 and 8, a fixing base 104 is disposed on the bottom plate 101, four arc-shaped grooves 105 are disposed on the fixing base 104, the four arc-shaped grooves 105 are uniformly distributed on the fixing base 104, and the fixing base 104 is fixed on the bottom plate 101 through bolts passing through the arc-shaped grooves 105. And the fixing base 104 may be rotated clockwise or counterclockwise along the arc-shaped groove 105.

A fixed block 106 is arranged on one side of the fixed seat 104, a pushing block 107 is arranged at the position of the fixed block 106, a pushing bolt 108 is arranged in the pushing block 107, and the pushing bolt 108 rotates in or out of the pushing block 107. The pushing bolt 108 pushes the pushing block 107 in a pushing direction in a contact manner, and the same pushing block 107 structure is arranged on the other side of the fixed seat 105, so that opposite effects are exerted on the fixed seat 104.

Through the structural design of the pushing block 107, the pushing bolt 108 and the fixing block 106, the mounting frame 102 fixed on the fixing seat 104 can rotate on the bottom plate 101 to adjust the vertical plane where the mounting frame 102 is located.

During use, the structural design of the pushing block 107, the pushing bolt 108 and the fixing block 106 adjusts the position of the mounting frame 102 on the bottom plate 101, so that the vertical plane where the mounting frame 102 is located is kept vertical to the bottom plate 101. After the first motor 203 is started to drive the transverse sliding seat 202 to move to the designated position, the second motor 208 is started to drive the vertical sliding seat 205 to rise to the designated height, and the clamping jaw device corresponds to the corresponding storage grid position on the mounting frame 102. And a third motor 308 is started to drive the connecting bottom plate 301 to move along the clamping jaw device guide rail 302, the connecting bottom plate extends forwards, the cylinder 303 is started to drive the clamping block 304 to rotate around the shaft and then open, and the end part of the tray is penetrated into the clamping piece body 306 and clamped.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims

1. A semiconductor wafer access manipulator device is characterized by comprising,

the sliding seat is provided with mounting parts which are arranged side by side, the wide upper parts of the lower parts of the mounting parts are narrow to form a supporting structure, the mounting parts are provided with vertical guide rails, the vertical guide rails are provided with vertical sliding seats, and the vertical sliding seats are fixedly connected with supporting brackets;

the support bracket is provided with a travel guide rail, the travel guide rail is provided with a connecting bottom plate, and the connecting bottom plate is provided with a clamping jaw device;

the connecting bottom plate is provided with an air cylinder, a push rod of the air cylinder is connected with the clamping block, a through hole is formed in the middle of the clamping block, a shaft penetrates through the through hole, the front end of the clamping block is provided with a clamping sheet body, springs are arranged on two sides of the clamping block and connected with the connecting bottom plate, and a limiting block is arranged on the lower portion of the connecting bottom plate.

2. The semiconductor wafer access robot apparatus of claim 1, further comprising a base plate and a frame body disposed on the base plate, wherein the frame body comprises a fixing seat fixed on the base plate, a plurality of arc-shaped grooves are formed in the fixing seat, and the arc-shaped grooves are detachably connected with the base plate through bolts;

3. The semiconductor wafer handling device of claim 2, wherein the number of walking rails is two and is disposed side-by-side on the base plate.

4. The semiconductor wafer access robot apparatus of claim 1, wherein a second motor is disposed above the mounting portion, the second motor being configured to drive the vertical slide mount to move along the vertical guide rail.

5. A semiconductor wafer handling robot as recited in claim 4, wherein a motor three drive connection base moves along the jaw assembly rail below the travel rail.