CN218955401U - Drying device and silicon wafer processing equipment - Google Patents
Drying device and silicon wafer processing equipment Download PDFInfo
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- CN218955401U CN218955401U CN202223131644.3U CN202223131644U CN218955401U CN 218955401 U CN218955401 U CN 218955401U CN 202223131644 U CN202223131644 U CN 202223131644U CN 218955401 U CN218955401 U CN 218955401U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
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Abstract
The utility model discloses a drying device and silicon wafer processing equipment, and relates to the technical field of silicon wafer processing. The method specifically comprises the following steps: the drying box is used for drying the piece to be dried and is provided with a feed inlet and a discharge outlet; the return channel is arranged at the bottom of the drying box body and used for returning a bearing piece positioned at the discharge hole and used for bearing a piece to be dried to the feed hole; and the buffer storage channel is arranged between the drying box body and the return channel, and is used for storing the bearing piece which is output by the discharge port and is loaded with the piece to be dried when the subsequent procedure of the drying device is abnormal. Aims at realizing the back transmission of the bearing piece of the piece to be dried and improving the drying efficiency.
Description
Technical Field
The utility model relates to the technical field of silicon wafer processing, in particular to a drying device and silicon wafer processing equipment.
Background
When the solar photovoltaic cell is prepared, conductive paste is printed on the surface of a silicon wafer, and then the conductive paste is required to be dried and solidified.
At present, the drying and curing of the conductive paste on the silicon wafer are carried out by adopting a drying furnace, and the drying flow is as follows: the manipulator loads the silicon chip on the carrier, and the carrier loaded with the silicon chip enters the drying furnace through the feed inlet to be dried, and after the silicon chip is dried, the silicon chip is discharged from the discharge port, and after the silicon chip on the carrier is taken out by the manipulator, the carrier positioned at the discharge port is conveyed to the feed inlet through the basket returning channel arranged below the drying furnace, so that a complete drying process is realized.
The drying time of the drying furnace on the silicon wafer is a fixed value, so that the drying process has obvious rhythmicity. In the drying process, when the previous procedure and/or the subsequent procedure of the drying furnace are/is problematic, the silicon wafer can be accumulated in the drying furnace, and the direct stop of production can cause the damage or waste of the silicon wafer due to the higher temperature in the drying furnace.
In order to solve the above technical problems, a buffer channel is generally provided to buffer the dried workpiece in the drying oven, but the buffer channel does not have the function of returning the carrier of the dried workpiece.
How to realize the return of the bearing piece of the piece to be dried and improve the drying efficiency becomes a technical problem to be solved urgently.
Disclosure of Invention
The utility model mainly aims to provide a drying device and silicon wafer processing equipment, and aims to realize the return of a bearing piece of a piece to be dried and improve the drying efficiency.
In order to achieve the above object, the present utility model provides a drying apparatus comprising:
the drying box is used for drying the piece to be dried and is provided with a feed inlet and a discharge outlet;
the return channel is arranged at the bottom of the drying box body and used for returning a bearing piece positioned at the discharge hole and used for bearing a piece to be dried to the feed hole; and
and the buffer storage channel is arranged between the drying box body and the return channel, and is used for storing the bearing piece which is output by the discharge port and is loaded with the piece to be dried when the subsequent procedure of the drying device is abnormal.
In an embodiment of the present application, a conveying assembly for conveying the bearing member bearing the member to be dried from the feed inlet to the discharge outlet of the drying box is disposed in the drying box.
In one embodiment of the present application, the transfer assembly includes:
the two guide rails are arranged along the direction from the feed inlet to the discharge outlet;
at least two rotating shafts respectively penetrate through different guide rails along the width direction of the two guide rails and can rotate relative to the guide rails, and the positions of the rotating shafts on the two guide rails are in one-to-one correspondence; and
and the driving piece is used for driving the rotating shaft to rotate.
In an embodiment of the present application, the transfer assembly further comprises: two transmission shafts respectively provided with at least one first bevel gear;
one end of each rotating shaft, which is positioned at the outer side of the guide rail, is provided with a second bevel gear which can be meshed with the first bevel gear, and the driving piece drives the transmission shaft to rotate so as to drive the rotating shaft to rotate.
In an embodiment of the present application, the number of the first bevel gears on the transmission shaft is five, and the five first bevel gears are respectively meshed with different second bevel gears on the same guide rail in a one-to-one correspondence manner.
In an embodiment of the present application, the driving member is connected to the transmission shaft through a transmission belt.
In an embodiment of the present application, an air inlet and an air outlet are provided on the drying box, and a flow equalizing plate is provided at the air inlet and/or the air outlet.
In an embodiment of the present application, one end of each of the rotating shafts located inside the guide rail is provided with a limiting protrusion for limiting the bearing member.
In an embodiment of the present application, a position detecting member for detecting a position of the carrier is further disposed in the drying box.
The application also discloses silicon wafer processing equipment, which comprises the drying device.
Adopt above-mentioned technical scheme, through setting up passback passageway and buffer channel in the bottom of stoving box, convey the carrier of silicon chip to the feed inlet from the discharge gate of stoving box through passback passageway, realize that the carrier of silicon chip circulates between the discharge gate of stoving box to the feed inlet, need not manual intervention, improved drying device's drying efficiency. The bottom of the drying box body is also provided with a buffer channel, and the buffer channel is arranged, so that when the subsequent procedure of the drying device is abnormal, the load bearing piece with the drying piece is used for storing the output of the discharging hole of the drying box body, the buffer storage of the dried silicon wafer is realized, the adaptability of the drying device is improved, and meanwhile, the safety of the silicon wafer is also improved. Simple structure, convenient implementation
Drawings
The utility model will now be described in detail with reference to specific embodiments and accompanying drawings, in which:
fig. 1 is a front view of a first embodiment of the present utility model.
Fig. 2 is a side view of a first embodiment of the present utility model.
Fig. 3 is an enlarged schematic view of the structure at a in fig. 2.
Detailed Description
In order to make the objects, technical solutions and advantages of the present utility model more apparent, the present utility model will be described in detail with reference to the accompanying drawings and examples. It should be understood that the following specific examples are given by way of illustration only and are not intended to be limiting.
As shown in fig. 1 to 3, in order to achieve the above object, the present utility model provides a drying apparatus comprising:
the drying box body 10 is used for drying a piece to be dried, and a feed inlet and a discharge outlet are arranged on the drying box body 10;
the return channel 30 is arranged at the bottom of the drying box 10 and is used for returning a bearing piece 40 positioned at the discharge hole and used for bearing a piece to be dried to the feed hole; and
the buffer channel 20 is disposed between the drying box 10 and the return channel 30, and is used for storing the carrying member 40 loaded with the to-be-dried member and output from the discharge port when the subsequent process of the drying device is abnormal.
Specifically, a drying device includes: drying box 10, passback channel 30, buffering passageway 20.
The drying box 10 is made of a metal material, such as an aluminum alloy material, an alloy steel material, or the like. The drying box 10 made of metal material has the advantages of strong supporting capability, abrasion resistance, easy manufacture and the like. Of course, according to the design requirement, the drying box 10 can also be made of inorganic materials, and the drying box 10 made of inorganic materials has the advantages of low cost, easy manufacture, high temperature resistance and the like. Since the drying box 10 in the present application is mainly used for drying silicon wafers, there is a high requirement on the cleanliness of the drying box 10, so the drying box 10 in the present application is preferably made of a metal material. The workpiece to be dried refers to a silicon wafer. Therefore, the silicon wafer is used for replacing the piece to be dried.
The drying box 10 is of a rectangular structure, the drying box 10 is provided with a feed inlet and a discharge outlet, the feed inlet and the discharge outlet are arranged oppositely, the feeding of the drying box 10 is realized through the feed inlet, and the discharging of the silicon wafer which is dried in the drying box 10 is realized through the discharge outlet.
The return channel 30 is disposed at the bottom of the drying box 10, and is used for returning the carrier 40 at the discharge port to the feed port. The carrier 40 refers to a basket of flowers for loading silicon wafers.
The specific working flow is as follows: firstly, silicon wafers are loaded on flower baskets at the feed inlet of the drying box 10 through a manipulator, after the silicon wafers are completely loaded, the silicon wafers are sent into the drying box 10 for drying, after the silicon wafers are dried, the silicon wafers are sent out through the discharge outlet of the drying box 10, at the moment, the silicon wafers are taken down one by one from the flower baskets through the manipulator at the discharge outlet of the drying box 10, and at the moment, the flower baskets at the discharge outlet of the drying box 10 are in an empty basket state. Through setting up passback channel 30, will be located the feed inlet department of stoving box 10 of the basket of flowers of stoving box 10 discharge gate department, realize circulating between the discharge gate formula feed inlet of stoving box 10 of basket of flowers, need not artifical intervention, simple structure is convenient for implement. And simultaneously, the return channel 30 is arranged at the bottom of the drying box 10, so that the occupation of the horizontal space by the return channel 30 is reduced.
The buffer channel 20 is arranged between the drying box 10 and the return channel 30, and the drying box 10, the buffer channel 20 and the return channel 30 are sequentially stacked from top to bottom. The length of the buffer channel 20 is equal to the length of the return channel, and may be expressed as that the length of the buffer channel 20 is equal to the length of the drying box 10. When the subsequent process of the drying device is abnormal, the silicon wafer in the drying box 10 cannot be discharged according to a preset rhythm. Because the inside of the drying box 10 is in a high temperature state, the dried silicon wafer stays in the drying box 10 for a long time, and the silicon wafer is easy to crack and damage. Therefore, by arranging the buffer channel 20, when the subsequent procedure of the drying device is abnormal, the dried silicon wafer in the drying box 10 is stored into the buffer channel 20, so that the buffer of the dried silicon wafer is realized. The dried silicon wafer is prevented from being accumulated in the drying box 10 when the subsequent process of the drying device is abnormal. Simple structure and convenient implementation.
By adopting the technical scheme, the bottom of the drying box 10 is provided with the return channel 30 and the buffer channel 20, the carrier 40 of the silicon chip is conveyed to the feed inlet from the discharge port of the drying box 10 through the return channel 30, the carrier 40 of the silicon chip is circulated between the discharge port of the drying box 10 and the feed inlet, no manual intervention is needed, and the drying efficiency of the drying device is improved. The bottom of the drying box 10 is also provided with a buffer channel 20, and by setting the buffer channel 20, when the subsequent procedure of the drying device is abnormal, the bearing piece 40 with the drying piece is loaded and used for storing the output of the discharge hole of the drying box 10, so that the buffer of the dried silicon wafer is realized, the adaptability of the drying device is improved, and the safety of the silicon wafer is also improved.
Simple structure, convenient implementation
In an embodiment of the present application, a conveying assembly is disposed in the drying box 10 for conveying the carrier 40 carrying the to-be-dried objects from the feeding port to the discharging port of the drying box 10.
Specifically, be provided with the conveying subassembly in the stoving box 10, conveying subassembly is used for carrying the loading part 40 that waits to dry from the feed inlet of stoving box 10 to the discharge gate, realizes the automatic cycle of waiting to dry in the stoving box 10, has improved drying efficiency, simple structure, the implementation of being convenient for.
In one embodiment of the present application, the transfer assembly includes:
the two guide rails 65 are arranged along the direction from the feed inlet to the discharge outlet;
at least two rotating shafts 64 penetrating different guide rails 65 along the width direction of the two guide rails 65 and rotatable relative to the guide rails 65, the rotating shafts 64 on the two guide rails 65 being in one-to-one correspondence; and
and a driving member 61 for driving the rotation shaft 64 to rotate.
Specifically, the transfer assembly includes: two guide rails 65, at least two rotation shafts 64, and a driving member 61.
The two guide rails 65 are a first guide rail 65 and a second guide rail 65, and the first guide rail 65 and the second guide rail 65 are oppositely arranged and are positioned on the same horizontal level. The first guide rail 65 is disposed along a direction from a feed inlet to a discharge outlet of the drying box 10, and the second guide rail 65 is disposed along a direction from the feed inlet to the discharge outlet of the drying box 10. The guide rail 65 is made of a metal material such as an aluminum alloy material, an alloy steel material, or the like. The guide rail 65 made of metal material has the advantages of strong supporting capability, abrasion resistance and the like.
At least two rotation shafts 64, when the rotation shafts 64 are two, the two rotation shafts 64 are a first rotation shaft 64 and a second rotation shaft 64, the first rotation shaft 64 penetrates through the first guide rail 65, the second rotation shaft 64 penetrates through the second guide rail 65, the first rotation shaft 64 can rotate relative to the first guide rail 65, and the second rotation shaft 64 can rotate relative to the second guide rail 65. And the positions of the first guide rail 65 and the second guide rail 65 are in one-to-one correspondence.
The driving member 61 may be a servo motor or a stepping motor commonly used in the art. The rotation shaft 64 is driven to rotate by the driving member 61, and when the basket is placed on the rotation shaft 64, the basket can be driven to move from the feed port to the discharge port of the drying box 10 along with the rotation of the rotation shaft 64. Thereby realizing the movement of the basket loaded with the silicon wafer in the drying box 10.
By adopting the technical scheme, the stable transmission of the bearing piece 40 is realized by arranging the guide rail 65, the rotating shaft 64 and the driving piece 61 in mutual cooperation, and the structure is simple and convenient to implement.
In an embodiment of the present application, the transfer assembly further comprises: two drive shafts 63 each having at least one first bevel gear;
one end of each rotating shaft 64, which is located at the outer side of the guide rail 65, is provided with a second bevel gear which can be meshed with the first bevel gear, and the driving member 61 drives the transmission shaft 63 to rotate so as to drive the rotating shaft 64 to rotate.
Specifically, the transmission assembly further includes two transmission shafts 63, and the two transmission shafts 63 are a first transmission shaft 63 and a second transmission shaft 63, and at least one first bevel gear is disposed on the first transmission shaft 63. The second transmission shaft 63 is provided with at least one first bevel gear.
The end of the first rotating shaft 64, which is close to the outer side of the guide rail 65, is provided with a second bevel gear, and the end of the second rotating shaft 64, which is close to the outer side of the guide rail 65, is provided with a second bevel gear, and the second bevel gear and the first bevel gear can be meshed with each other to realize transmission.
The first bevel gear of the first transmission shaft 63 is intermeshed with the second bevel gear of the first rotation shaft 64, and the first bevel gear of the second transmission shaft 63 is intermeshed with the second bevel gear of the second rotation shaft 64. The driving piece 61 drives the transmission shaft 63 to rotate, so that the rotation shaft 64 is driven to rotate, synchronous rotation of the rotation shaft 64 can be realized, and the device is simple in structure and convenient to implement.
In an embodiment of the present application, the number of the first bevel gears on the transmission shaft 63 is five, and the five first bevel gears are respectively meshed with different second bevel gears on the same guide rail 65 in a one-to-one correspondence manner.
Specifically, the number of the first bevel gears on the transmission shaft 63 is five, and the five first bevel gears are respectively meshed with different second bevel gears on the same guide rail in a one-to-one correspondence manner.
The five rotating shafts 64 can be synchronously driven to rotate by one transmission shaft 63, and the structure is simple and convenient to implement.
In an embodiment of the present application, the driving member 61 is connected to the driving shaft 63 through a driving belt 62.
In an embodiment of the present application, the drying box 10 is provided with an air inlet and an air outlet, and the air inlet and/or the air outlet is provided with a flow equalizing plate 50.
Specifically, an air inlet and an air outlet are formed in the drying box 10, the air inlet of the drying box 10 is located on one side wall of the drying box 10, and the air outlet of the drying box 10 is opposite to the top of the drying box 10. The air inlet and the air outlet of the drying box 10 are provided with the flow equalizing plates 50, and the uniform distribution of hot air flow in the drying box 10 can be ensured by arranging the flow equalizing plates 50, so that the drying quality of the silicon wafers of the drying box 10 is improved. Simple structure and convenient implementation.
In an embodiment of the present application, a limiting protrusion for limiting the carrier 40 is disposed at an end of each rotating shaft 64 located inside the guide rail 65.
Specifically, each transmission shaft 63 is provided with a limiting protrusion, limiting of the running direction of the bearing piece 40 is achieved through the limiting protrusions, the bearing piece 40 is prevented from deflecting in the conveying process, and the device is simple in structure and convenient to implement.
In an embodiment of the present application, a position detecting member for detecting the position of the carrier 40 is further disposed in the drying box 10.
Specifically, a position detecting member for detecting the position of the bearing member 40 is further disposed in the drying box 10, and the position of the bearing member 40 in the drying box 10 is detected by the position detecting member, so that the drying process of the bearing member 40 is conveniently mastered. The position detecting member is a photoelectric sensor commonly used in the prior art, and is not described here in detail because it is the prior art. Simple structure and convenient implementation.
The application also discloses silicon wafer processing equipment, which comprises the drying device.
The foregoing description is only of the preferred embodiments of the present utility model and is not intended to limit the scope of the utility model, and all equivalent structural changes made by the description of the present utility model and the accompanying drawings or direct/indirect application in other related technical fields are included in the scope of the utility model.
Claims (10)
1. A drying apparatus, comprising:
the drying box is used for drying the piece to be dried and is provided with a feed inlet and a discharge outlet;
the return channel is arranged at the bottom of the drying box body and used for returning a bearing piece positioned at the discharge hole and used for bearing a piece to be dried to the feed hole; and
and the buffer storage channel is arranged between the drying box body and the return channel, and is used for storing the bearing piece which is output by the discharge port and is loaded with the piece to be dried when the subsequent procedure of the drying device is abnormal.
2. The drying apparatus of claim 1, wherein a transfer assembly is provided in the drying box for transferring the carrier carrying the items to be dried from the inlet to the outlet of the drying box.
3. The drying apparatus of claim 2, wherein the transfer assembly comprises:
the two guide rails are arranged along the direction from the feed inlet to the discharge outlet;
at least two rotating shafts respectively penetrate through different guide rails along the width direction of the two guide rails and can rotate relative to the guide rails, and the positions of the rotating shafts on the two guide rails are in one-to-one correspondence; and
and the driving piece is used for driving the rotating shaft to rotate.
4. The drying apparatus of claim 3, wherein the transfer assembly further comprises: two transmission shafts respectively provided with at least one first bevel gear;
one end of each rotating shaft, which is positioned at the outer side of the guide rail, is provided with a second bevel gear which can be meshed with the first bevel gear, and the driving piece drives the transmission shaft to rotate so as to drive the rotating shaft to rotate.
5. The drying apparatus according to claim 4, wherein the number of the first bevel gears on the transmission shaft is five, and the five first bevel gears are respectively engaged with different second bevel gears on the same guide rail in one-to-one correspondence.
6. The drying apparatus according to claim 4, wherein the driving member is connected to the driving shaft by a driving belt.
7. The drying apparatus according to claim 1, wherein the drying box is provided with an air inlet and an air outlet, and a flow equalizing plate is arranged at the air inlet and/or the air outlet.
8. The drying apparatus of claim 4, wherein one end of each of the rotating shafts located inside the guide rail is provided with a limit protrusion for limiting the carrier.
9. The drying apparatus of claim 1, wherein a position detecting member for detecting a position of the carrier is further provided in the drying box.
10. A silicon wafer processing apparatus comprising a drying device according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223131644.3U CN218955401U (en) | 2022-11-24 | 2022-11-24 | Drying device and silicon wafer processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223131644.3U CN218955401U (en) | 2022-11-24 | 2022-11-24 | Drying device and silicon wafer processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218955401U true CN218955401U (en) | 2023-05-02 |
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ID=86103167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223131644.3U Active CN218955401U (en) | 2022-11-24 | 2022-11-24 | Drying device and silicon wafer processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218955401U (en) |
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2022
- 2022-11-24 CN CN202223131644.3U patent/CN218955401U/en active Active
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