CN220420549U - Quartz boat diffusion lifting mechanism - Google Patents
Quartz boat diffusion lifting mechanism Download PDFInfo
- Publication number
- CN220420549U CN220420549U CN202321634954.9U CN202321634954U CN220420549U CN 220420549 U CN220420549 U CN 220420549U CN 202321634954 U CN202321634954 U CN 202321634954U CN 220420549 U CN220420549 U CN 220420549U
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- CN
- China
- Prior art keywords
- conveying
- conveying belt
- quartz boat
- lifting
- storage box
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000010453 quartz Substances 0.000 title claims abstract description 82
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 82
- 238000009792 diffusion process Methods 0.000 title claims abstract description 34
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 86
- 239000010703 silicon Substances 0.000 claims abstract description 86
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 84
- 235000012431 wafers Nutrition 0.000 claims abstract description 80
- 238000006073 displacement reaction Methods 0.000 claims abstract description 44
- 238000001179 sorption measurement Methods 0.000 claims abstract description 20
- 230000000712 assembly Effects 0.000 claims description 3
- 238000000429 assembly Methods 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 2
- 150000003376 silicon Chemical class 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to a quartz boat diffusion lifting mechanism, which comprises a cabinet body, wherein a storage mechanism for storing quartz boats and silicon wafers, a conveying mechanism for conveying the storage mechanism and a lifting mechanism for transferring the silicon wafers to the quartz boats are arranged on the cabinet body; the conveying mechanism comprises a conveying mechanism mounting frame, a conveying roller, a conveying belt I for conveying the silicon wafers and a conveying belt II for conveying the quartz boat; the lifting mechanism comprises a lifting mounting column, a horizontal displacement power mechanism, a lifting plate, a vertical displacement power mechanism, a bearing plate and a plurality of adsorption tubes; the silicon wafer collecting and storing mechanism can bear the silicon wafer and the quartz boat, the silicon wafer and the quartz boat are conveyed to the position right below the lifting mechanism through the conveying mechanism, the silicon wafer on the collecting and storing box I is adsorbed and transferred onto the quartz boat on the collecting and storing box II through the adsorption tube on the lifting mechanism, automatic taking and placing of the silicon wafer are completed, labor force for taking and placing the silicon wafer is reduced to a certain extent, manual work load is reduced, and productivity is improved.
Description
Technical Field
The utility model relates to the technical field of quartz boat diffusion process equipment, in particular to a quartz boat diffusion lifting mechanism.
Background
At present, when diffusion operation is carried out on a quartz boat, firstly, placing the silicon wafer for diffusion on the quartz boat, then placing the quartz boat loaded with the silicon wafer on a diffusion furnace conveyor belt of a diffusion furnace, then conveying the quartz boat loaded with the silicon wafer into the diffusion furnace by the diffusion furnace conveyor belt for diffusion operation, heating the silicon wafer on the quartz boat in the diffusion furnace, forming an oxide layer on the surface of the silicon wafer during heating, cooling and discharging after diffusion operation, taking out the diffused silicon wafer from the quartz boat, and putting the silicon wafer which is not subjected to diffusion treatment again; however, in actual production, the silicon wafers or quartz boats need to be purchased in advance, and after the silicon wafers and the quartz boats are transported to a factory, the silicon wafers or the quartz boats are further assembled and subjected to diffusion operation, so that the silicon wafers or the quartz boats to be installed are piled up on a workbench surface, and are messy in arrangement and difficult to count; and the silicon chip is generally put into quartz manually, so that the method has lower efficiency; therefore, before the diffusion process, before the quartz boat or the silicon wafers arrive at the factory, the quartz boat or the silicon wafers can be arranged in advance, and after the quartz boat or the silicon wafers arrive at the factory, only one article of the quartz boat or the silicon wafers is loaded/collected, so that the situation that the workbench surface stacks the silicon wafers or the quartz boat wantonly is avoided, and the silicon wafers are automatically loaded on the quartz boat.
Disclosure of Invention
The utility model aims to provide the quartz boat diffusion lifting mechanism which can arrange quartz boats or silicon wafers in advance before the quartz boats or silicon wafers do not arrive at a factory at the same time before a diffusion process, and can only load/collect one article of the quartz boats or silicon wafers after the quartz boats or the silicon wafers arrive at the factory, thereby not only avoiding the situation that the working table surface stacks the silicon wafers or the quartz boats wantonly, but also enabling the silicon wafers to be automatically loaded on the quartz boats.
The technical problem to be solved by the utility model is realized by the following technical scheme that the quartz boat diffusion lifting mechanism comprises a cabinet body, wherein a storage mechanism for storing a quartz boat and silicon wafers, a conveying mechanism for conveying the storage mechanism and a lifting mechanism for transferring the silicon wafers to the quartz boat are arranged on the cabinet body;
the conveying mechanism comprises a conveying mechanism mounting frame, a conveying roller, a conveying belt I for conveying the silicon wafers and a conveying belt II for conveying the quartz boat; the conveying mechanism mounting frame is fixedly arranged on the top surface of the cabinet body; the conveying roller is rotatably arranged on the conveying mechanism mounting frame; the conveying belt I and the conveying belt II are arranged on the peripheral surface of the conveying roller;
the storage mechanism comprises a storage box I arranged on a conveying belt I and a storage box II arranged on a conveying belt II; the storage box I is provided with a silicon wafer accommodating groove for accommodating silicon wafers; the storage box II is provided with a quartz boat accommodating groove for accommodating a quartz boat;
the conveying belt I and the conveying belt II are provided with limiting assemblies for limiting the storage box I and the storage box II in a blocking manner;
the lifting mechanism comprises a lifting mounting column, a horizontal displacement power mechanism, a lifting plate, a vertical displacement power mechanism, a bearing plate and a plurality of adsorption tubes; the lifting mounting column is fixedly arranged on the top surface of the cabinet body; the horizontal displacement power mechanism is horizontally arranged, and the mounting end of the horizontal displacement power mechanism is mounted on the top side wall of the lifting mounting column; the lifting plate is fixedly arranged on the telescopic end of the horizontal displacement power mechanism; the vertical displacement power mechanism is vertically arranged, and the mounting end of the vertical displacement power mechanism is fixedly arranged on the top surface of the lifting plate; the bearing plate is fixedly arranged on the telescopic end of the vertical displacement power mechanism; the adsorption tube is vertically arranged and fixed on the bearing plate, and is positioned right above the conveying mechanism.
Compared with the prior art, the utility model has the beneficial technical effects that:
(1) The silicon wafer collecting and storing mechanism can bear the silicon wafer and the quartz boat, the silicon wafer and the quartz boat are conveyed to the position right below the lifting mechanism through the conveying mechanism, the silicon wafer on the collecting and storing box I is adsorbed and transferred onto the quartz boat on the collecting and storing box II through the adsorption pipe on the lifting mechanism, automatic taking and storing of the silicon wafer are completed, labor force for taking and storing the silicon wafer is reduced to a certain extent, manual workload is reduced, and productivity is improved;
(2) The silicon wafer or quartz boat can be respectively stored and arranged in a centralized manner by the storage box I and the storage box II which are arranged on the conveying belt I and the conveying belt II, so that a large number of silicon wafers or quartz boats are stacked on a workbench when manual inserting is avoided, not only are the objects discharged irregularly and are not easy to count in number, but also the surface of the stacked silicon wafers or quartz boats is unnecessarily scratched due to extrusion.
Drawings
FIG. 1 is a schematic diagram of a front view structure of a silicon wafer according to the present utility model;
FIG. 2 is a schematic diagram of the front view structure of the present utility model when a silicon wafer is taken;
FIG. 3 is a schematic diagram of a front view structure of a silicon wafer according to the present utility model;
FIG. 4 is a schematic diagram of the front view structure of the present utility model when placing a silicon wafer;
FIG. 5 is a schematic diagram of the front view of FIG. 4;
fig. 6 is a schematic top view of the conveyor belt i and the conveyor belt ii.
In the figure: 1. a cabinet body; 2. a quartz boat; 3. a silicon wafer; 4. a conveyor mounting rack; 5. a conveying roller; 6. a conveying belt I; 7. a conveyor belt II; 8. a storage box I; 9. a storage box II; 10. lifting the mounting column; 11. a horizontal displacement power mechanism; 12. a vertical displacement power mechanism; 13. a carrying plate; 14. an adsorption tube; 15. a length limit bar; 16. a width limiting strip; 17. a riser; 18. a cross plate; 19. a slide block; 20. opening and closing a door; 21. and (5) supporting legs.
Detailed Description
Specific embodiments of the utility model will be further described below with reference to the accompanying drawings, in order to facilitate a further understanding of the utility model by those skilled in the art, without limiting the scope of the claims thereto.
1, referring to fig. 1-6, a quartz boat diffusion lifting mechanism comprises a cabinet body 1, wherein the cabinet body 1 is formed into a substantially square cabinet body 1, the size specification of the cabinet body can be selected according to the use requirement, and a storage mechanism for storing a quartz boat 2 and a silicon wafer 3, a conveying mechanism for conveying the storage mechanism and a lifting mechanism for conveying the silicon wafer 3 to the quartz boat 2 are arranged on the cabinet body 1;
the conveying mechanism comprises a conveying mechanism mounting frame 4, a conveying roller 5, a conveying belt I6 for conveying the silicon wafers 3 and a conveying belt II 7 for conveying the quartz boat 2; the conveying mechanism mounting frame 4 is fixedly arranged on the top surface of the cabinet body 1, the conveying mechanism mounting frame 4 is formed into a roughly square frame, and the conveying mechanism mounting frame is designed for supporting the conveying rollers 5, the conveying belt I6 and the conveying belt II 7; the conveying roller 5 is rotatably arranged on the conveying mechanism mounting frame 4, and the conveying roller 5 can be driven to rotate by a stepping motor; the conveying belt I6 and the conveying belt II 7 are arranged on the peripheral surface of the conveying roller 5, and the length/width of the conveying belt I6 and the conveying belt II 7 can be selected according to the use requirement;
the storage mechanism comprises a storage box I8 placed on a conveying belt I6 and a storage box II 9 placed on a conveying belt II 7; the storage box I8 is provided with a silicon wafer accommodating groove for accommodating the silicon wafer 3, the storage box I8 is formed into a square box body, and the silicon wafer accommodating groove is formed into the square groove body; the storage box II 9 is provided with a quartz boat accommodating groove for accommodating the quartz boat 2, the storage box II 9 is formed into a square box body, and the quartz boat accommodating groove is formed into the square groove body;
the conveying belt I6 and the conveying belt II 7 are provided with limiting assemblies for limiting the storage box I8 and the storage box II 9 in a blocking manner;
the lifting mechanism comprises a lifting mounting column 10, a horizontal displacement power mechanism 11, a lifting plate, a vertical displacement power mechanism 12, a bearing plate 13 and a plurality of adsorption pipes 14; the lifting mounting column 10 is fixedly arranged on the top surface of the cabinet body 1, and the lifting mounting column 10 is formed into a substantially cylindrical structure; the horizontal displacement power mechanism 11 is horizontally arranged, the mounting end of the horizontal displacement power mechanism is mounted on the top side wall of the lifting mounting column 10, and the horizontal displacement power mechanism 11 can be one of an air cylinder/an electric cylinder/a hydraulic cylinder and is not limited to the above; the lifting plate is fixedly arranged on the telescopic end of the horizontal displacement power mechanism 11; the vertical displacement power mechanism 12 is vertically arranged, the mounting end of the vertical displacement power mechanism is fixedly arranged on the top surface of the lifting plate, and the vertical displacement power mechanism 12 can be one of an air cylinder, an electric cylinder and a hydraulic cylinder and is not limited to the air cylinder, the electric cylinder and the hydraulic cylinder; the bearing plate 13 is fixedly arranged on the telescopic end of the vertical displacement power mechanism 12, and the bearing plate 13 is formed into a substantially square plate-shaped structure; the adsorption tubes 14 are vertically arranged and fixed on the bearing plate 13, the adsorption tubes 14 are located right above the conveying mechanism, a plurality of adsorption tubes 14 can be arranged side by side at equal intervals, the distance between every two adjacent adsorption tubes 14 is equal to the distance between every two adjacent silicon wafer accommodating grooves or between every two adjacent quartz boat accommodating grooves, and each time when the silicon wafers 3 are fetched and placed, the lower part of each adsorption tube 14 is right opposite to one silicon wafer accommodating groove or each quartz boat accommodating groove.
In embodiment 1, during the picking and placing of the silicon wafer 3, the conveying rollers 5 driving the conveying belts i 6 and ii 7 to move can be driven by the stepping motor, the conveying distances of the conveying belts i 6 and ii 7 are the same each time, and the telescopic distances of the telescopic ends of the vertical displacement power mechanism 12 and the telescopic ends of the horizontal displacement power mechanism 11 are rated distances each time during the picking and placing of the silicon wafer 3, so that the standardization of the picking and placing/lifting operation of the whole silicon wafer 3 is realized, the structural design is reasonable, the problems that the silicon wafer 3 and the quartz boat 2 are piled up on a workbench during the manual picking and placing of the silicon wafer 3 in the past, the workbench is messy and untidy, the number of the workbench is not easy to count and the like are greatly reduced.
Embodiment 2, a quartz boat diffusion lifting mechanism according to embodiment 1, wherein the limiting component comprises a plurality of groups of length limiting strips and a plurality of groups of width limiting strips;
each group of length limiting strips comprises two length limiting strips 15, the length limiting strips 15 are formed into a square strip structure, the two length limiting strips 15 are fixedly arranged on the conveying belt I6 and the conveying belt II 7 in front of and behind each other along the conveying direction of the conveying belt I6/the conveying belt II 7, and the distance between the two length limiting strips 15 of each group of length limiting strips 15 is equal to the length of the storage box I8/the storage box II 9;
each group of width limiting strips comprises two width limiting strips 16, the width limiting strips 16 are formed into a square strip structure, the two width limiting strips 16 are fixedly arranged on the conveying belt I6 and the conveying belt II 7 left and right along the conveying direction of the conveying belt I6/the conveying belt II 7, and the distance between the two width limiting strips 16 of each group of width limiting strips 16 is equal to the width of the storage box I8/the storage box II 9.
In embodiment 2, the design purpose of the length limiting strip 15 and the width limiting strip 16 is to limit the storage box i 8 or the storage box ii 9, so that before the operation of taking and placing the silicon wafer 3, the storage box i 8 or the storage box ii 9 carrying the silicon wafer 3 or the quartz boat 2 is only required to be placed between the length limiting strip 15 and the width limiting strip 16, and no additional measurement or alignment is required, thereby being fast and convenient.
Embodiment 3, a quartz boat diffusion lifting mechanism according to embodiment 1, wherein the lifting plate is composed of a vertical plate 17 and a horizontal plate 18, and the vertical plate 17 and the horizontal plate 18 are formed into a substantially square plate-shaped structure;
the vertical plate 17 is vertically arranged and fixed on the telescopic end of the horizontal displacement power mechanism 11;
the transverse plate 18 is horizontally arranged and vertically fixed on the top surface of the vertical plate 17, the mounting end of the vertical displacement power mechanism 12 is fixed on the top surface of the transverse plate 18, and a plurality of through holes which are convenient for the adsorption tube 14 to pass through are formed in the transverse plate 18, and the through holes can be round holes.
Embodiment 4, the quartz boat diffusion lifting mechanism of embodiment 3, wherein a sliding block 19 is fixedly arranged on the bottom surface of the transverse plate 18, a sliding rail for the sliding block 19 to move is fixedly arranged on the top surface of the lifting mounting column 10, the sliding block 19 and the sliding rail are formed into a substantially square structure, and the design purpose is to enable the lifting plate to be connected with the lifting mounting column 10 in a sliding fit manner, and the size specification of the lifting plate is selected according to the use requirement.
In example 5, the quartz boat diffusion lifting mechanism of example 1, the conveying belt i 6 and the conveying belt ii 7 are synchronously conveyed, and the conveying belt i 6 and the conveying belt ii 7 are mounted on the conveying roller 5.
In embodiment 6, in the quartz boat diffusing and lifting mechanism according to embodiment 1, the switch door 20 is installed on the side wall of the vertical face of the cabinet body 1.
Embodiment 7, embodiment 1 a quartz boat diffusion lifting mechanism, wherein a plurality of supporting legs 21 for supporting the cabinet 1 are fixedly installed on four corners of the bottom surface of the cabinet 1.
When the quartz boat diffusion lifting mechanism is used: firstly, placing a silicon wafer 3 or a quartz boat 2 in a factory in a storage box I8 and a storage box II 9 in advance, then placing the storage box I8 and the storage box II 9 on a conveying belt I6 or a conveying belt II 7, conveying the storage box I8 and the storage box II 9 to the position right below a lifting mechanism through the conveying belt I6 and the conveying belt II 7, driving a telescopic end of a vertical displacement power mechanism 12 to extend through an external power supply, enabling an adsorption tube 14 to descend and prop against the upper surface of the silicon wafer 3 in the storage box I8, pumping negative pressure to the adsorption tube 14 through an external vacuum system, enabling the adsorption tube 14 to adsorb the silicon wafer 3 on the adsorption tube 14, enabling a telescopic end of a vertical displacement power mechanism 12 to shrink, driving a telescopic end of a horizontal displacement power mechanism 11 to horizontally extend through the external power supply, enabling the vertical displacement power mechanism 12 to be positioned right above the conveying belt II 7, enabling the silicon wafer 3 to reach the quartz 2 in the storage box II 9 on the conveying belt II 7, enabling the telescopic end of the vertical displacement power mechanism 12 to sequentially stretch out, enabling the telescopic end of the vertical displacement power mechanism 12 to enable the silicon wafer 3 to be sequentially contracted with the telescopic end of the silicon wafer 3 to be placed in the storage box I8, and enabling the silicon wafer 3 to be sequentially contracted and placed in the storage box I to be in a state of the silicon wafer 3; in addition, in the period that silicon chip 3 got and put, the conveyer roll 5 that drive conveyer belt I6 and conveyer belt II 7 removed can be driven by step motor, and the conveying distance of conveyer belt I6 and conveyer belt II 7 is the same at every turn, and the flexible distance of the flexible end of vertical displacement power unit 12 and the flexible end of horizontal displacement power unit 11 is rated distance in the period of getting and putting silicon chip 3 at every turn, so that the operation of getting and putting/lifting of whole silicon chip 3 realizes the standardization, its structural design is reasonable, the workstation piles up full silicon chip 3 and quartz boat 2 in the period of the manual work of getting and putting silicon chip 3 in the past has greatly reduced, cause the workstation to be disordered and untidy, be difficult for count quantity scheduling problem.
Claims (7)
1. A quartz boat diffusion elevating system, its characterized in that: the quartz boat comprises a cabinet body, wherein a storage mechanism for storing quartz boats and silicon wafers, a conveying mechanism for conveying the storage mechanism and a lifting mechanism for transferring the silicon wafers to the quartz boats are arranged on the cabinet body;
the conveying mechanism comprises a conveying mechanism mounting frame, a conveying roller, a conveying belt I for conveying the silicon wafers and a conveying belt II for conveying the quartz boat; the conveying mechanism mounting frame is fixedly arranged on the top surface of the cabinet body; the conveying roller is rotatably arranged on the conveying mechanism mounting frame; the conveying belt I and the conveying belt II are arranged on the peripheral surface of the conveying roller;
the storage mechanism comprises a storage box I arranged on a conveying belt I and a storage box II arranged on a conveying belt II; the storage box I is provided with a silicon wafer accommodating groove for accommodating silicon wafers; the storage box II is provided with a quartz boat accommodating groove for accommodating a quartz boat;
the conveying belt I and the conveying belt II are provided with limiting assemblies for limiting the storage box I and the storage box II in a blocking manner;
the lifting mechanism comprises a lifting mounting column, a horizontal displacement power mechanism, a lifting plate, a vertical displacement power mechanism, a bearing plate and a plurality of adsorption tubes; the lifting mounting column is fixedly arranged on the top surface of the cabinet body; the horizontal displacement power mechanism is horizontally arranged, and the mounting end of the horizontal displacement power mechanism is mounted on the top side wall of the lifting mounting column; the lifting plate is fixedly arranged on the telescopic end of the horizontal displacement power mechanism; the vertical displacement power mechanism is vertically arranged, and the mounting end of the vertical displacement power mechanism is fixedly arranged on the top surface of the lifting plate; the bearing plate is fixedly arranged on the telescopic end of the vertical displacement power mechanism; the adsorption tube is vertically arranged and fixed on the bearing plate, and is positioned right above the conveying mechanism.
2. The quartz boat diffusion lift mechanism of claim 1 wherein: the limiting assembly comprises a plurality of groups of length limiting strips and a plurality of groups of width limiting strips;
each group of length limiting strips comprises two length limiting strips, the two length limiting strips are fixedly arranged on the conveying belt I and the conveying belt II in front of and behind the conveying direction of the conveying belt I/the conveying belt II, and the distance between the two length limiting strips of each group of length limiting strips is equal to the length of the storage box I/the storage box II;
each group of width limiting strips comprises two width limiting strips, the two width limiting strips are fixedly arranged on the conveying belt I and the conveying belt II left and right along the conveying direction of the conveying belt I/the conveying belt II, and the distance between the two width limiting strips of each group of width limiting strips is equal to the width of the storage box I/the storage box II.
3. The quartz boat diffusion lift mechanism of claim 1 wherein: the lifting plate consists of a vertical plate and a transverse plate;
the vertical plate is vertically arranged and fixed on the telescopic end of the horizontal displacement power mechanism;
the transverse plate is horizontally arranged and vertically fixed on the top surface of the vertical plate, the mounting end of the vertical displacement power mechanism is fixed on the top surface of the transverse plate, and a plurality of through holes which are convenient for the adsorption tube to pass through are formed in the transverse plate.
4. A quartz boat diffusion lift mechanism according to claim 3, wherein: the bottom surface of the transverse plate is fixedly provided with a sliding block, and the top surface of the lifting mounting column is fixedly provided with a sliding rail for the sliding block to move.
5. The quartz boat diffusion lift mechanism of claim 1 wherein: the conveying belt I and the conveying belt II are synchronously conveyed, and the conveying belt I and the conveying belt II are arranged on the conveying roller left and right.
6. The quartz boat diffusion lift mechanism of claim 1 wherein: the vertical side wall of the cabinet body is provided with a switch door.
7. The quartz boat diffusion lift mechanism of claim 1 wherein: a plurality of supporting legs for supporting the cabinet body are fixedly arranged on four corners of the bottom surface of the cabinet body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321634954.9U CN220420549U (en) | 2023-06-27 | 2023-06-27 | Quartz boat diffusion lifting mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321634954.9U CN220420549U (en) | 2023-06-27 | 2023-06-27 | Quartz boat diffusion lifting mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN220420549U true CN220420549U (en) | 2024-01-30 |
Family
ID=89656512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321634954.9U Active CN220420549U (en) | 2023-06-27 | 2023-06-27 | Quartz boat diffusion lifting mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN220420549U (en) |
-
2023
- 2023-06-27 CN CN202321634954.9U patent/CN220420549U/en active Active
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