CN218938773U - Multi-reference centering positioning equipment for photomask - Google Patents

Abstract

The utility model belongs to the technical field of liquid crystal panel production equipment, and particularly relates to multi-reference centering positioning equipment for a photomask, which comprises a clamping frame and a rotating base; the clamping frame comprises a bottom frame, a supporting plate, a longitudinal driving assembly, two clamping arms and a transverse driving assembly; the longitudinal driving assembly is arranged on the underframe, is connected with the supporting plate and drives the supporting plate to move up and down; the clamping arms are slidably arranged at two ends of the underframe; the transverse driving component is arranged on the underframe; the transverse driving component is connected with the clamping arm so as to drive the clamping arm to slide left and right; the rotary base comprises a base body and a rotary driving assembly; the base body is rotatably connected with the underframe; the rotary driving assembly is arranged on the base body; the rotary driving assembly is connected with the underframe and drives the underframe to rotate. The utility model can center and position the light cover with different sizes by taking the bottom edge as the reference or taking the center as the reference, thereby meeting the different reference centering and positioning requirements in the light cover production and processing process.

Description

Multi-reference centering positioning equipment for photomask

Technical Field

The utility model belongs to the technical field of liquid crystal panel production equipment, and particularly relates to multi-reference centering positioning equipment for a photomask.

Background

A photo mask is prepared from quartz glass as substrate, plating a layer of metal Cr and photosensitive resin on it to become a photosensitive material, exposing the designed circuit pattern on said photosensitive resin by electronic laser, developing the exposed region to form a circuit pattern on said metal Cr, forming a photo mask similar to the exposed film, and projection locating for IC, and photo etching. In the whole process of semiconductor manufacturing, photomask or photomask manufacturing is a key part of the process connection, is a part with highest manufacturing cost in the process, and is one of bottlenecks for limiting the minimum line width.

The photomask production and processing procedures mainly comprise: photolithography, development etching, automatic optical detection, optical repair, cleaning, film coating packaging and the like. The processing states of all process links are different, some processes need light covers to be processed in a horizontal posture, at the moment, light covers with different sizes need to be aligned in the center, some processes need light covers to be processed in a vertical posture, at the moment, light covers with different sizes need to be aligned in the bottom side, once a robot gripper for taking and placing the light covers grabs the light covers, the gripper and the light covers cannot move relatively to avoid scratches, in the state, when the light covers with different sizes circulate in all links with different datum flows, deviation is generated due to non-uniform datum, manual intervention is needed, however, the production efficiency is reduced due to manual intervention, and the risk of manual operation is increased due to repeated manual operation.

Therefore, it is necessary to design a mask multi-reference centering device.

Disclosure of Invention

The utility model aims to provide a multi-reference centering positioning device for a photomask, which aims to solve the technical problem that in the prior art, when different reference flows are transferred to each link by different reference flows, deviation is generated due to non-uniform references.

To achieve the above object, an embodiment of the present utility model provides a multi-reference centering positioning apparatus for a photomask, including: clamping frame and rotating base

The clamping frame comprises an underframe, a supporting plate, a longitudinal driving assembly, two clamping arms and a transverse driving assembly; the longitudinal driving assembly is connected with the underframe, is connected with the supporting plate and drives the supporting plate to move up and down; the clamping arms are slidably arranged at two ends of the underframe; the transverse driving component is arranged on the underframe; the transverse driving component is connected with the clamping arm so as to drive the clamping arm to slide left and right;

the rotary base comprises a base body and a rotary driving assembly; the base body is rotatably connected with the underframe; the rotary driving assembly is arranged on the base body; the rotary driving assembly is connected with the underframe and drives the underframe to rotate.

Optionally, the rotary driving assembly comprises a slewing bearing, a speed reducer and a servo motor; the slewing bearing is arranged at the upper end of the base body, is connected with the base body and is also connected with the underframe and the longitudinal driving assembly; the speed reducer is fixedly arranged in the base body and is connected with the slewing bearing; the servo motor is fixedly arranged in the base and connected with the speed reducer.

Optionally, the longitudinal driving assembly comprises an electric push rod and a cylindrical guide bearing; electric putter cylinder direction bearing electric putter with cylinder direction bearing all set up in the base is originally internal, electric putter with cylinder direction bearing all with slewing bearing connects, electric putter's top with the top of cylinder direction bearing all passes the chassis and with the backup pad is connected.

Optionally, the lateral drive assembly includes a lead screw motor; the screw rod motor is fixedly arranged on the underframe; and a nut of the screw rod motor is connected with the bottom end of the clamping arm.

Optionally, a plurality of clamping blocks are arranged on the side face of the clamping arm; the support plate is provided with a plurality of rollers.

Optionally, the side of arm lock with the backup pad all is provided with the photomask inductive sensor that is used for detecting whether clamping has the photomask.

Optionally, the underframe is provided with a limiting block.

Optionally, the longitudinal drive assembly is provided with a plurality of positive limit sensors, a plurality of negative limit sensors, and a plurality of zero point sensors.

Optionally, a plurality of ventilation grooves are formed in the side face of the base body.

Optionally, a plurality of supporting feet are arranged at the bottom of the base body.

The above technical solutions in the photomask multi-reference centering positioning device provided by the embodiments of the present utility model have at least one of the following technical effects: the rotary driving assembly drives the clamping frame to rotate, when the photomask rotates to a specified angle along with the clamping frame, the longitudinal driving adjusting assembly drives the supporting plate to move upwards, the transverse driving assembly drives the two clamping arms to move relatively close to each other, when the supporting plate moves upwards, the supporting plate is abutted to the bottom side of the photomask, and when the two clamping arms move relatively close to each other, the clamping arms are abutted to the side edges of the photomask, and finally the photomask is completely clamped and fixed through fixing the left side, the right side and the bottom side of the photomask. Because the backup pad with the arm lock is all movable adjustment, consequently regard as the benchmark or regard as the benchmark with the center for the base, the photomask multi-reference centering locating device of this application all can carry out centering location to the photomask of equidimension to satisfy the requirement of centering location processing with different benchmarks in the photomask production course of working.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of an overall structure of a multi-reference centering device for a photomask according to an embodiment of the present utility model;

FIG. 2 is a schematic perspective view of a mask multi-reference centering positioning apparatus according to an embodiment of the present utility model after a part of a base body is hidden;

FIG. 3 is a schematic view of another view angle of the mask multi-reference centering positioning device according to the embodiment of the present utility model after a part of the base body is hidden;

FIG. 4 is an enlarged schematic view of the structure shown at A in FIG. 1;

fig. 5 is an enlarged schematic view of the structure at B in fig. 1.

Wherein, each reference sign in the figure:

100. a clamping frame; 110. a chassis; 111. a limiting block; 120. a support plate; 121. a roller; 130. a longitudinal drive assembly; 131. an electric push rod; 132. a cylindrical guide bearing; 140. a clamp arm; 150. a lateral drive assembly; 151. a screw motor; 200. a rotating base; 210. a base body; 211. a ventilation groove; 212. supporting feet; 220. a rotary drive assembly; 221. a slewing bearing; 222. a speed reducer; 223. a servo motor; 300. clamping blocks; 400. a reticle sensor.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and intended to illustrate embodiments of the utility model and should not be construed as limiting the utility model.

In the description of the embodiments of the present utility model, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate description of the embodiments of the present utility model and simplify description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the embodiments of the present utility model, the meaning of "plurality" is two or more, unless explicitly defined otherwise.

In the embodiments of the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured" and the like are to be construed broadly and include, for example, either permanently connected, removably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the embodiments of the present utility model will be understood by those of ordinary skill in the art according to specific circumstances.

In some embodiments of the present utility model, as shown in FIGS. 1-2, a photomask multi-datum centering and locating apparatus is provided that includes a clamping frame 100 and a rotating base 200

The clamping frame 100 comprises a bottom frame 110, a supporting plate 120, a longitudinal driving assembly 130, two clamping arms 140 and a transverse driving assembly 150. The longitudinal driving assembly 130 is connected to the bottom frame 110, and the longitudinal driving assembly 130 is connected to the support plate 120 and drives the support plate 120 to move up and down. The clamping arms 140 are slidably disposed at both ends of the base frame 110. The lateral drive assembly 150 is mounted to the chassis 110. The lateral driving assembly 150 is connected to the clamp arm 140 to drive the clamp arm 140 to slide left and right.

The swivel base 200 includes a base body 210 and a swivel drive assembly 220. The base body 210 is rotatably coupled with the base frame 110. The rotary drive assembly 220 is mounted on the base body 210. The rotation driving assembly 220 is coupled to the base frame 110 and drives the base frame 110 to rotate. The longitudinal driving assembly 130 is disposed in the base body 210.

The rotation driving assembly 220 drives the clamping frame 100 to rotate, when the photomask rotates to a designated angle along with the clamping frame 100, the longitudinal driving adjusting assembly drives the supporting plate 120 to move upwards, the transverse driving assembly 150 drives the two clamping arms 140 to move relatively close to each other, when the supporting plate 120 moves upwards, the supporting plate 120 is abutted with the bottom side of the photomask, and when the two clamping arms 140 move relatively close to each other, the clamping arms 140 are abutted with the side edges of the photomask, and finally the photomask is completely clamped and fixed through fixing the left side, the right side and the bottom side of the photomask. Because the supporting plate 120 and the clamping arm 140 are both movably adjustable, the mask multi-reference centering positioning device can center and position masks with different sizes no matter the mask multi-reference centering positioning device uses the bottom edge as a reference or uses the center as a reference, thereby meeting the requirements of centering and positioning processing with different references in the mask production and processing process.

In other embodiments of the present utility model, as shown in fig. 2-3, the rotary drive assembly 220 includes a slewing bearing 221, a speed reducer 222, and a servo motor 223. The pivoting support 221 is mounted on the upper end of the base body 210, the pivoting support 221 is connected to the base body 210, and the pivoting support 221 is further connected to the chassis 110 and the longitudinal driving assembly 130. The speed reducer 222 is fixedly disposed in the base body 210 and is connected with the slewing bearing 221 through a gear transmission. The servo motor 223 is fixedly disposed in the base and connected to the speed reducer 222. Specifically, the pivoting support 221 rotates in the forward and reverse directions under the action of the servo motor 223 and the speed reducer 222, so as to drive the chassis 110 connected thereto to rotate in the forward and reverse directions. The mask rotates with the chassis 110 until it is rotated to a specific angle and then stops.

In other embodiments of the present utility model, as shown in fig. 1-3, the longitudinal drive assembly 130 includes an electric pushrod 131 and a cylindrical guide bearing 132. The electric push rod 131 and the cylindrical guide bearing 132 are both disposed in the base body 210. The slewing bearing 221 is a large bearing capable of bearing comprehensive loads, and can bear large axial and radial loads and overturning moment at the same time. The electric push rod 131 and the cylindrical guide bearing 132 are connected to the pivoting support 221, so that the pivoting support 221 rotates to rotate the electric push rod 131 and the cylindrical guide bearing 132. The top end of the electric push rod 131 and the top end of the cylindrical guide bearing 132 pass through the chassis 110 and are connected with the support plate 120, so that the support plate 120 can also rotate with the electric push rod 131 and the cylindrical guide bearing 132. Specifically, the electric pushrod 131 drives the support plate 120 to move up and down as a driving source. In this embodiment, there are two cylindrical guide bearings 132. The cylindrical guide bearings 132 are respectively disposed on two sides of the electric push rod 131. When the support plate 120 moves up and down, the cylindrical guide bearings 132 support both ends of the support plate 120, thereby making the support plate 120 more stable to slide up and down.

It should be understood that the electric push rod 131 is selected as a driving source to drive the support plate 120 to move up and down, and in other embodiments, an air cylinder or a screw motor may be selected as a driving source to drive the support plate 120 to move up and down.

In other embodiments of the present utility model, as shown in FIG. 2, the lateral drive assembly 150 includes a lead screw motor 151. The screw motor 151 is fixedly mounted on the bottom frame 110. The nut of the screw motor 151 is connected to the bottom end of the clamping arm 140. Specifically, the screw motor 151 drives the screw nut to move left and right, and the nut of the screw motor 151 drives the clamping arm 140 to be relatively close to each other, so as to clamp two side edges of the photomask.

In other embodiments of the present utility model, as shown in fig. 1 and 4, the side of the clamping arm 140 is provided with a plurality of clamping blocks 300. Specifically, in this embodiment, a groove for accommodating the side surface of the photomask is formed on the side surface of the clamping block 300. The supporting plate 120 is provided with a plurality of rollers 121, and specifically, a groove for accommodating the bottom of the photomask is formed on the side surface of the pulley.

In other embodiments of the present utility model, as shown in fig. 1, 4 and 5, the side of the clamping arm 140 and the supporting plate 120 are provided with a mask induction sensor 400 for detecting whether a mask is clamped. Specifically, the optical fiber sensor 400 is selected as an optical fiber sensor, and when the optical fiber sensor senses the optical fiber and reminds that the optical fiber cannot be clamped continuously through signal feedback and other modes when the optical fiber is clamped by the clamping frame 100.

Since the optical fiber sensor is a common sensor for detecting the presence or absence of an object, it is well known to those skilled in the art how to detect the presence or absence of an object and communicate signals with the outside, and thus the details thereof will not be described herein.

In other embodiments of the present utility model, as shown in fig. 1, the chassis 110 is provided with a stopper 111. Specifically, the limiting block 111 is disposed at an inner end of the chassis 110, and when the clamping arm 140 slides relatively close to each other, a lower end of the clamping arm 140 contacts with the limiting block 111. Due to the blocking effect of the limiting block 111, the clamping arm 140 cannot move forward continuously, so that the clamping arm 140 is prevented from being close to sliding and colliding.

In other embodiments of the present utility model, the longitudinal drive assembly 130 is provided with a plurality of positive limit sensors, a plurality of negative limit sensors, and a plurality of zero point sensors. The positive limit sensor and the negative limit sensor are used to define a movement limit position of the longitudinal driving assembly 130, thereby providing limit protection for the longitudinal driving assembly 130. The zero point sensor is used to define the position of the longitudinal drive assembly 130 when it is reset, thereby ensuring the accuracy of each reset of the longitudinal drive assembly 130.

In other embodiments of the present utility model, as shown in fig. 2, a plurality of ventilation slots 211 are formed on the side surface of the base body 210.

In other embodiments of the present utility model, as shown in fig. 2, a plurality of supporting feet 212 are provided at the bottom of the base body 210.

In another embodiment of the present utility model, the multi-reference centering positioning device for a photomask further includes an electronic control device (not shown), where the electronic control device is a technology of mature technology and technology shaping in the prior art, and may use a PLC or a computer according to actual production requirements. The electronic control device is electrically connected to the rotary drive assembly 220, the longitudinal drive assembly 130, the transverse drive assembly 150 and the sensors. Specifically, the operator inputs parameters such as the size of the photomask into the electronic control device in advance, and the electronic control device controls the rotation driving assembly 220, the longitudinal driving assembly 130 and the transverse driving assembly 150 to perform corresponding actions according to the input parameters, so that the photomask is centered according to the size of the photomask while the rotation of the photomask is completed. Since the electronic control device is well known in the art, how the electronic control device controls the rotation driving unit 220, the longitudinal driving unit 130, and the transverse driving unit 150 is well known and can be understood by those skilled in the art, and the present utility model is not described herein.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.

Claims (10)

1. The utility model provides a many benchmarks of light shade centering locating device which characterized in that includes:

a clamping frame; the clamping frame comprises an underframe, a supporting plate, a longitudinal driving assembly, two clamping arms and a transverse driving assembly; the longitudinal driving assembly is connected with the underframe, is connected with the supporting plate and drives the supporting plate to move up and down; the clamping arms are slidably arranged at two ends of the underframe; the transverse driving component is arranged on the underframe; the transverse driving component is connected with the clamping arm so as to drive the clamping arm to slide left and right;

a rotating base; the rotary base comprises a base body and a rotary driving assembly; the base body is rotatably connected with the underframe; the rotary driving assembly is arranged on the base body; the rotary driving assembly is connected with the underframe and drives the underframe to rotate.

2. The reticle multi-datum centering positioning apparatus of claim 1 wherein the rotary drive assembly comprises a slewing bearing, a speed reducer and a servo motor; the slewing bearing is arranged at the upper end of the base body, is connected with the base body and is also connected with the underframe and the longitudinal driving assembly; the speed reducer is fixedly arranged in the base body and is connected with the slewing bearing; the servo motor is fixedly arranged in the base and connected with the speed reducer.

3. The reticle multi-datum centering positioning apparatus of claim 2 wherein the longitudinal drive assembly comprises an electric pushrod and a cylindrical guide bearing; electric putter cylinder direction bearing electric putter with cylinder direction bearing all set up in the base is originally internal, electric putter with cylinder direction bearing all with slewing bearing connects, electric putter's top with the top of cylinder direction bearing all passes the chassis and with the backup pad is connected.

4. A reticle multi-datum centering positioning apparatus as claimed in claim 3 wherein said lateral drive assembly comprises a lead screw motor; the screw rod motor is fixedly arranged on the underframe; and a nut of the screw rod motor is connected with the bottom end of the clamping arm.

5. The photomask multi-reference centering device of any of claims 1-4, wherein the clip arms are provided with a plurality of clips on sides; the support plate is provided with a plurality of rollers.

6. The reticle multi-reference centering positioning device of claim 5 wherein the side of the clamp arm and the support plate are each provided with a reticle sensing sensor for detecting whether a reticle is clamped.

7. The reticle multi-datum centering device of claim 6 wherein the chassis is provided with a stop block.

8. The reticle multi-datum centering positioning apparatus of claim 1 wherein the longitudinal drive assembly is provided with a plurality of positive limit sensors, a plurality of negative limit sensors and a plurality of zero point sensors.

9. The photomask multi-reference centering device of claim 8, wherein the base body has a plurality of ventilation slots formed in a side surface thereof.

10. The reticle multi-datum centering positioning device of claim 9 wherein the base body is provided with a plurality of support feet at the bottom thereof.

Images