CN218908992U

CN218908992U - Reversible photomask clamping device

Info

Publication number: CN218908992U
Application number: CN202223197767.7U
Authority: CN
Inventors: 孙艳杰; 陈兵华
Original assignee: Shenzhen Yisheng Laser Intelligent Equipment Co ltd
Current assignee: Shenzhen Yisheng Laser Intelligent Equipment Co ltd
Priority date: 2022-11-30
Filing date: 2022-11-30
Publication date: 2023-04-25
Anticipated expiration: 2032-11-30

Abstract

The utility model belongs to the technical field of liquid crystal panel production equipment, and particularly relates to a reversible photomask clamping device which comprises a turnover platform and a driving piece; the middle part of the overturning platform is rotatably connected with the base; the overturning platform is used for clamping the photomask; the driving piece is fixedly arranged on the base; the driving piece is connected with the lower end face of the overturning platform; the driving piece drives the overturning platform to overturn for a certain angle. The overturning platform is used for clamping the photomask, and can be driven by the driving piece to overturn by a certain angle, so that the photomask can be horizontally clamped, the photomask can be in a horizontal state, and the overturning platform can be overturned, so that the photomask is in an inclined state, and meanwhile, the requirements of manual carrying and manipulator carrying are met.

Description

Reversible photomask clamping device

Technical Field

The utility model belongs to the technical field of liquid crystal panel production equipment, and particularly relates to a reversible photomask clamping device.

Background

A photo mask is prepared from quartz glass as substrate, plating a layer of metal Cr and photosensitive resin on it to become a photosensitive material, exposing the designed circuit pattern on said photosensitive resin by electronic laser, developing the exposed region to form a circuit pattern on said metal Cr, forming a photo mask similar to the exposed film, and projection locating for IC, and photo etching. In the whole process of semiconductor manufacturing, photomask or photomask manufacturing is a key part of the process connection, is a part with highest manufacturing cost in the process, and is one of bottlenecks for limiting the minimum line width.

The photomask production and processing procedures mainly comprise: photolithography, development etching, automatic optical detection, optical repair, cleaning, film coating packaging and the like. In the process switching, the photomask needs to be carried for a plurality of times; the present mask handling is mainly divided into manual handling and manipulator handling. The former is suitable for transporting a mask in a horizontal state, and the latter is more suitable for transporting a mask inclined at a certain angle. Most of the conventional reversible photomask clamping devices can only realize horizontal or vertical clamping of the photomask, and do not have the function of turning the photomask. The utility model patent application with the application number of CN201420766250.1 discloses a box opening mechanism and a clamping mechanism arranged on the box opening mechanism, and the clamping mechanism disclosed by the application is not provided with the function of overturning the photomask and can not meet different requirements of manual and mechanical hand carrying of the photomask simultaneously as can be seen from the drawing of the application.

Therefore, it is necessary to design a reversible mask holding device.

Disclosure of Invention

The utility model aims to provide a mask clamping device, which aims to solve the technical problems that a reversible mask clamping device in the prior art cannot have the functions of horizontally clamping and overturning a mask and cannot meet different requirements of manual and mechanical hand carrying of the mask.

In order to achieve the above-mentioned objective, an embodiment of the present utility model provides a reversible mask clamping device, including a base, including a flip platform and a driving member; wherein:

the middle part of the overturning platform is rotatably connected with the base; the overturning platform is used for clamping the photomask;

the driving piece is fixedly arranged on the base; the driving piece is connected with the lower end face of the overturning platform; the driving piece drives the overturning platform to overturn for a certain angle.

Optionally, the upper end surface of the overturning platform is slidably provided with a plurality of clamping jaws; the clamping jaw is used for clamping the photomask.

Optionally, the clamping jaw comprises a sliding block, a mounting plate, a clamping seat and a clamping column; the sliding block is slidably arranged on the overturning platform; the mounting plate is fixedly connected with the sliding block; the clamping seat is fixedly arranged on the outer side of the mounting plate; the clamping column is fixedly arranged on the inner side of the mounting plate.

Optionally, the clamping post comprises a bolt and a rubber ring; the bolt is in threaded connection with the mounting plate; the rubber ring is sleeved on the bolt.

Optionally, the driving member is a servo cylinder. The servo electric cylinder is fixedly arranged on the base; and an output shaft of the servo electric cylinder is connected with the lower end face of the overturning platform.

Optionally, the servo electric cylinder is obliquely arranged, and the included angle between the servo electric cylinder and the horizontal plane is 80 degrees.

Optionally, the overturning platform comprises a main platform and at least two supporting feet; one end of the supporting leg is connected with the main platform; the slider is slidably mounted on the leg.

Optionally, the total of four supporting legs is four, and the included angles between the supporting legs are 90 degrees.

Optionally, a plurality of energy absorbers are arranged on the main platform; the energy absorber comprises a spring and a butt joint; one end of the spring is fixedly connected with the main platform; the other end of the spring is connected with the abutting joint.

And an optical fiber sensor is arranged on the main platform.

The above technical solutions in the reversible mask clamping device provided by the embodiments of the present utility model have at least one of the following technical effects: the overturning platform is used for clamping the photomask, and can be driven by the driving piece to overturn by a certain angle, so that the photomask can be horizontally clamped, the photomask can be in a horizontal state, and the overturning platform can be overturned, so that the photomask is in an inclined state, and meanwhile, the requirements of manual carrying and manipulator carrying are met.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments or the description of the prior art will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a structure of a reversible mask holding device according to an embodiment of the present utility model;

FIG. 2 is a schematic perspective view of a reversible mask clamping device according to an embodiment of the present utility model;

fig. 3 is a partial cross-sectional view of a reversible reticle clamping device according to an embodiment of the utility model.

Wherein, each reference sign in the figure:

100. a base; 200. a turnover platform; 210. a main platform; 211. an energy absorber; 2111. a spring; 2112. a butt joint; 212. an optical fiber sensor; 220. a support leg; 300. a driving member; 400. a clamping jaw; 410. a slide block; 420. a mounting plate; 430. a clamping seat; 431. a bottom plate; 432. an L-shaped plate; 440. a clamping column; 441. a bolt; 442. a rubber ring; 500. a photomask.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and intended to illustrate embodiments of the utility model and should not be construed as limiting the utility model.

In the description of the embodiments of the present utility model, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate description of the embodiments of the present utility model and simplify description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the embodiments of the present utility model, the meaning of "plurality" is two or more, unless explicitly defined otherwise.

In the embodiments of the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured" and the like are to be construed broadly and include, for example, either permanently connected, removably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the embodiments of the present utility model will be understood by those of ordinary skill in the art according to specific circumstances.

In some embodiments of the present utility model, as shown in fig. 1-3, a reversible reticle clamping device is provided, comprising a base 100, including a flip platform 200 and a drive member 300.

Wherein the middle part of the flip platform 200 is rotatably connected with the base 100. The flip-up table 200 is used to hold a reticle 500.

The driving member 300 is fixedly mounted to the base 100. The driving member 300 is connected to the lower end surface of the flipping platform 200. The driving member 300 drives the flipping platform 200 to flip at a certain angle.

The overturning platform 200 is used for clamping the photomask 500, the overturning platform 200 is driven by the driving piece 300 to overturn for a certain angle, so that the photomask 500 can be clamped horizontally, the photomask 500 is in a horizontal state, the overturning platform 200 can be overturned, the photomask 500 is in an inclined state, and meanwhile, the requirements of manual carrying and manipulator carrying are met.

In other embodiments of the present utility model, as shown in FIG. 3, the actuator 300 is a servo cylinder. The servo cylinder is fixedly mounted to the base 100. An output shaft of the servo electric cylinder is connected with the lower end face of the overturning platform 200. Specifically, the servo motor is electrified, and the output shaft of the servo motor performs telescopic motion and drives the overturning platform 200 to overturn.

It should be understood that the servo cylinder is selected as the only embodiment for driving the turning platform 200 to turn, and in other embodiments, a cylinder or a screw motor may be selected as the driving member 300 for driving the turning platform 200.

In other embodiments of the present utility model, as shown in fig. 3, the servo cylinder is disposed obliquely, and the angle between the servo cylinder and the horizontal plane is 80 °.

In other embodiments of the present utility model, the upper end surface of the flipping platform 200 is slidably provided with a plurality of clamping jaws 400. The clamping jaw 400 is used to clamp the mask 500.

In other embodiments of the present utility model, as shown in fig. 1-2, the clamping jaw 400 includes a slider 410, a mounting plate 420, a clamping seat 430, and a clamping post 440. The slider 410 is slidably mounted on the flip platform 200. The mounting plate 420 is fixedly connected with the slider 410. The clamping seat 430 is fixedly mounted to the outside of the mounting plate 420. The clamping post 440 is fixedly mounted to the inside of the mounting plate 420. Specifically, the clamping jaw 400 includes a screw assembly (not shown) mounted inside the flipping stage 200. The screw assembly is connected with the slider 410, and drives the slider 410 to slide until the plurality of sliders 410 clamp the photomask 500 together. Meanwhile, the reversible mask clamping device disclosed by the application can adjust the distance between the clamping jaws 400 by sliding the clamping jaws 400, so that the device is suitable for clamping masks 500 with different sizes.

It should be noted that the screw assembly is a common transmission mechanism, and the composition and how to drive the slider 410 to slide should be known and understood by those skilled in the art, so the details will not be described herein.

In other embodiments of the present utility model, as shown in fig. 2, the clamping post 440 includes a bolt 441 and a rubber ring 442. The screw 441 is screw-coupled with the mounting plate 420. The rubber ring 442 is sleeved on the bolt 441, and the rubber ring 442 is fixed on the mounting plate 420 along with the bolt 441. When the mask 500 is clamped, the rubber ring 442 of each clamping column 440 abuts against the edge of the mask 500, and clamps the mask 500 together.

The clamping seat 430 is used for clamping the mask 500 box. The clamping seat 430 includes a bottom plate 431 and an L-shaped plate 432. The bottom plate 431 is fixedly mounted to the mounting plate 420. The L-shaped plate 432 is fixedly disposed on the bottom plate 431. When the clamping seat 430 clamps the mask 500 box, the bottom plate 431 supports the bottom of the mask 500 box, the L-shaped plates 432 are abutted against the side surfaces of the mask 500 box, and each L-shaped plate 432 jointly presses the mask 500 box.

In other embodiments of the present utility model, as shown in FIG. 2, the flip platform 200 includes a main platform 210 and at least two legs 220. One end of the leg 220 is connected to the main platform 210. The slider 410 is slidably mounted on the leg 220. When clamping the mask 500, the supporting legs mainly play a role of supporting the mask 500, and the slider 410 slides back and forth along the legs 220 to clamp the edge of the mask 500.

In other embodiments of the present utility model, the total number of the legs 220 is four, and the included angles between the legs 220 are all 90 °, so that the entire flip platform 200 has a positive cross shape, and each of the legs 220 has the leg 220 disposed opposite thereto. The forces of the oppositely disposed legs 220 to the mask 500 are all on the same straight line, and the mask 500 is more easily in a force balanced state, so as to be firmly clamped between the legs 220.

In other embodiments of the present utility model, as shown in FIG. 2, a plurality of energy absorbers 211 are provided on the main platform 210. The energy absorber 211 includes a spring 2111 and an abutment 2112. One end of the spring 2111 is fixedly connected with the main platform 210. The other end of the spring 2111 is connected to the abutment 2112. When the photomask 500 is clamped, the springs 2111 and the abutting joint 2112 are compressed under force, so that the photomask 500 is buffered and protected. When the overturning platform 200 overturns to drive the photomask 500 to incline, the friction force generated by the abutting joint 2112 abutting against the photomask 500 can also prevent the photomask 500 from falling off the overturning platform 200.

In other embodiments of the present utility model, as shown in fig. 2, a fiber optic sensor 212 is disposed on the main platform 210. The optical fiber sensor 212 can detect whether the overturning platform 200 clamps the photomask 500, and the manipulator or the clamping robot judges whether to clamp the photomask 500 according to the information fed back by the optical fiber sensor 212.

In another embodiment of the present utility model, the reversible mask holding device further includes an electronic control device (not shown), where the electronic control device is a technology of the prior art, and the technology is mature and the technology is formed, and may use a PLC or a computer according to actual production requirements. The electronic control device is electrically connected to the driving member 300 and the clamping jaw 400. Specifically, the operator inputs parameters such as a size parameter and an inclination angle of the mask 500 into the electronic control device in advance, and the electronic control device controls the driving member 300 and the clamping jaw 400 to move according to the input parameters, so that the overturning platform 200 inclines a certain angle and clamps the mask 500.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, and alternatives falling within the spirit and principles of the utility model.

Claims

1. The turnover photomask clamping device comprises a base and is characterized by comprising a turnover platform and a driving piece; wherein:

2. The reversible reticle clamping device according to claim 1 wherein the upper end face of the flip platform is slidably provided with a plurality of clamping jaws; the clamping jaw is used for clamping the photomask.

3. The reversible reticle clamping device according to claim 2 wherein the clamping jaw comprises a slider, a mounting plate, a clamping mount and a clamping post; the sliding block is slidably arranged on the overturning platform; the mounting plate is fixedly connected with the sliding block; the clamping seat is fixedly arranged on the outer side of the mounting plate; the clamping column is fixedly arranged on the inner side of the mounting plate.

4. The reversible reticle clamping device according to claim 3 wherein the clamping posts comprise bolts and rubber rings; the bolt is in threaded connection with the mounting plate; the rubber ring is sleeved on the bolt.

5. The reversible reticle clamping device according to claim 4 wherein the reversible platform comprises a main platform and at least two legs; one end of the supporting leg is connected with the main platform; the slider is slidably mounted on the leg.

6. The reversible reticle clamping means according to any one of claims 1 to 5 wherein the drive member is a servo cylinder; the servo electric cylinder is fixedly arranged on the base; and an output shaft of the servo electric cylinder is connected with the lower end face of the overturning platform.

7. The reversible reticle clamping device according to claim 6 wherein the servo cylinder is inclined at an angle of 80 ° to the horizontal.

8. The reversible reticle clamping device according to claim 5 wherein there are four legs and the angles between the legs are each 90 °.

9. The reversible reticle clamping device according to claim 8 wherein the primary platform has a plurality of energy absorbers disposed thereon; the energy absorber comprises a spring and a butt joint; one end of the spring is fixedly connected with the main platform; the other end of the spring is connected with the abutting joint.

10. The reversible reticle clamping device according to claim 9 wherein the main stage is provided with a fiber optic sensor.