TWI831667B - Device for transferring electronic component - Google Patents
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- TWI831667B TWI831667B TW112113619A TW112113619A TWI831667B TW I831667 B TWI831667 B TW I831667B TW 112113619 A TW112113619 A TW 112113619A TW 112113619 A TW112113619 A TW 112113619A TW I831667 B TWI831667 B TW I831667B
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- 239000000758 substrate Substances 0.000 claims abstract description 51
- 239000000463 material Substances 0.000 claims description 10
- 239000011521 glass Substances 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
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Abstract
Description
本申請係關於一種用以轉移電子元件之裝置,具體而言,係關於一種包括一支撐元件的用以轉移電子元件之裝置。 The present application relates to a device for transferring electronic components, and in particular, to a device for transferring electronic components that includes a support element.
隨著電子元件的微型化,電子元件於載體至基板之間的轉移所需要設備精度以及穩定度越來越高。 With the miniaturization of electronic components, the transfer of electronic components between carriers and substrates requires increasingly higher precision and stability of equipment.
當基板承載於框架上時,將因重力而導致該基板之中心區域的位置略低於邊緣區域,使得該基板之中心區域與邊緣區域並非位於同一平面上。這種基板之中心區域與邊緣區域因重力而非位於同一平面上的現象係不利於電子元件的轉移。因此,傳統之用以轉移電子元件之裝置存在在基板之中心區域中,轉移效率及準確率不佳的問題。 When the substrate is carried on the frame, the center area of the substrate will be positioned slightly lower than the edge area due to gravity, so that the center area and edge area of the substrate are not located on the same plane. This phenomenon that the central area and edge area of the substrate are not on the same plane due to gravity is not conducive to the transfer of electronic components. Therefore, traditional devices for transferring electronic components have problems with poor transfer efficiency and accuracy in the central area of the substrate.
有鑑於上述傳統之用以轉移電子元件之裝置的缺點。本發明係提供一種用以轉移電子元件之裝置,藉此改善轉移電子元件時,基板之中心區域與邊緣區域並非位於同一平面上所產生的轉移效率及準確率不佳的問題。 In view of the above-mentioned shortcomings of traditional devices for transferring electronic components. The present invention provides a device for transferring electronic components, thereby improving the problem of poor transfer efficiency and accuracy caused by the central area and edge area of the substrate not being on the same plane when transferring electronic components.
為達上述目的及其他目的,本發明係提供一種用以轉移電子元件之裝置,其係包含:一第一框架,其係用以承載一其上載有一欲轉移電子元件之載體。上述之用以轉移電子元件之裝置,還包含:一第二框架,其係用以承載一基板,其相對該第一框架設置。上述之用以轉移電子元件之裝置,還包含:一頂抵元件,其設置於鄰近該第一框架處,並受一致動機構控制,可朝向該第一框架上所承載之載體,並透過該載體對該欲轉移電子元件為一頂抵之作動。上述之用以轉移電子元件之裝置,還包含:一支撐元件,其設置於鄰近該第二框架處,其可於該頂抵元件為頂抵之作動時,對該承載於第二框架上之基板提供一區域支撐面。 In order to achieve the above objects and other objects, the present invention provides a device for transferring electronic components, which includes: a first frame, which is used to carry a carrier on which an electronic component is to be transferred. The above-mentioned device for transferring electronic components also includes: a second frame, which is used to carry a substrate and is arranged relative to the first frame. The above-mentioned device for transferring electronic components also includes: a resisting component, which is disposed adjacent to the first frame and is controlled by an actuating mechanism. It can face the carrier carried on the first frame and pass through the first frame. The carrier acts against the electronic component to be transferred. The above-mentioned device for transferring electronic components also includes: a supporting element, which is disposed adjacent to the second frame, and which can support the supporting element carried on the second frame when the resisting element is in a resisting action. The base plate provides a regional support surface.
上述之用以轉移電子元件之裝置,其中該第二框架可相對於該支撐元件移動,以使該支撐元件可對該第二框架所承載基板的不同位置處提供該區域支撐面。 In the above device for transferring electronic components, the second frame can move relative to the support element, so that the support element can provide the regional support surface at different positions of the substrate carried by the second frame.
上述之用以轉移電子元件之裝置,其中該支撐元件可為一中空體,而可提供一環形之區域支撐面。 In the above-mentioned device for transferring electronic components, the supporting element can be a hollow body and can provide an annular regional supporting surface.
上述之用以轉移電子元件之裝置,其中該支撐元件之材質可為光可透過者。 In the above-mentioned device for transferring electronic components, the material of the supporting component can be light-transmissive.
上述之用以轉移電子元件之裝置,其中該光可透過之材質可為石英、鑽石或玻璃。 In the above-mentioned device for transferring electronic components, the light-transmissible material may be quartz, diamond or glass.
上述之用以轉移電子元件之裝置,其可更包括一能量光束產生機構,其可產生一能量光束通過該支撐元件中空之部分,作用於該第二框架所承載之基板上。 The above-mentioned device for transferring electronic components may further include an energy beam generating mechanism, which can generate an energy beam passing through the hollow part of the supporting element and acting on the substrate carried by the second frame.
上述之用以轉移電子元件之裝置,其可更包括一能量光束產生機構,其可產生一能量光束通過該支撐元件,作用於該第二框架所承載之基板上。 The above-mentioned device for transferring electronic components may further include an energy beam generating mechanism that can generate an energy beam that passes through the support element and acts on the substrate carried by the second frame.
上述之用以轉移電子元件之裝置,其中該能量光束產生機構可為一雷射光束產生機構。 In the above device for transferring electronic components, the energy beam generating mechanism can be a laser beam generating mechanism.
上述之用以轉移電子元件之裝置,其可更包括一相機,其可透過該支撐元件中空之部分,擷取該第二框架所承載之基板的影像。 The above-mentioned device for transferring electronic components may further include a camera that can capture an image of the substrate carried by the second frame through the hollow part of the supporting component.
上述之用以轉移電子元件之裝置,其可更包括一相機,其可透過該支撐元件,擷取該第二框架所承載之基板的影像。 The above-mentioned device for transferring electronic components may further include a camera that can capture an image of the substrate carried by the second frame through the supporting component.
本發明之用以轉移電子元件之裝置,藉由設置一支撐元件,可改善轉移電子元件時,基板之中心區域與邊緣區域並非位於同一平面上所產生的轉移效率及準確率不佳的問題。 By providing a supporting element, the device for transferring electronic components of the present invention can improve the problem of poor transfer efficiency and accuracy caused by the central area and edge area of the substrate not being on the same plane when transferring electronic components.
10:用以轉移電子元件之裝置 10: Devices used to transfer electronic components
11:第一框架 11:First frame
12:第二框架 12:Second frame
13:頂抵元件 13: Push against the component
14:支撐元件 14:Support element
14’:支撐元件 14’: Support element
111:欲轉移電子元件 111: Want to transfer electronic components
111’:欲轉移電子元件 111’: To transfer electronic components
112:載體 112: Carrier
121:基板 121:Substrate
131:致動機構 131: Actuating mechanism
141:區域支撐面 141: Regional support surface
141’:區域支撐面 141’: Regional support surface
20:用以轉移電子元件之裝置 20: Devices for transferring electronic components
21:第一框架 21:First frame
22:第二框架 22:Second frame
23:頂抵元件 23: Push against components
24:支撐元件 24:Support element
25:能量光束產生機構 25: Energy beam generating mechanism
211:欲轉移電子元件 211: Want to transfer electronic components
212:載體 212: Carrier
221:基板 221:Substrate
231:致動機構 231: Actuating mechanism
241:區域支撐面 241:Regional support surface
251:能量光束 251:Energy Beam
30:用以轉移電子元件之裝置 30: Devices for transferring electronic components
31:第一框架 31:First frame
32:第二框架 32: Second frame
33:頂抵元件 33: Push against components
34:支撐元件 34:Support element
35:相機 35:Camera
311:欲轉移電子元件 311: To transfer electronic components
312:載體 312: Carrier
321:基板 321:Substrate
331:致動機構 331: Actuating mechanism
341:區域支撐面 341: Regional support surface
X:X軸 X:X axis
Y:Y軸 Y:Y axis
Z:Z軸 Z:Z axis
為了便於描述與清晰,圖式中各元件的尺寸被加以放大、省略或概要的描繪。同時,各元件之尺寸並不完全反映其真實尺寸。 For convenience of description and clarity, the size of each element in the drawings is exaggerated, omitted, or schematically depicted. At the same time, the size of each component does not fully reflect its true size.
〔圖1〕係為本發明實施例1之用以轉移電子元件之裝置之示意圖;〔圖2〕係為本發明實施例1之用以轉移電子元件之裝置中的電子元件與支撐元件之相對關係之俯視示意圖;〔圖3〕係為本發明之另一實施例之用以轉移電子元件之裝置中的電子元件與支撐元件之相對關係之俯視示意圖;〔圖4〕係為本發明實施例2之用以轉移電子元件之裝置之示意圖;以及〔圖5〕係為本發明實施例3之用以轉移電子元件之裝置之示意圖。 [Fig. 1] is a schematic diagram of a device for transferring electronic components according to Embodiment 1 of the present invention; [Fig. 2] is a schematic diagram of the electronic components and supporting elements in the device for transferring electronic components according to Embodiment 1 of the present invention. A schematic top view of the relationship; [Fig. 3] is a schematic top view of the relative relationship between electronic components and supporting components in a device for transferring electronic components according to another embodiment of the present invention; [Fig. 4] is an embodiment of the present invention. 2 is a schematic diagram of a device for transferring electronic components; and [Fig. 5] is a schematic diagram of a device for transferring electronic components according to Embodiment 3 of the present invention.
實施例1 Example 1
請參照圖1、圖2及圖3,其中,圖1係為本發明實施例1之用以轉移電子元件之裝置之示意圖;以及圖2及圖3係為本發明實施例1之用以轉移電子元件之裝置中的電子元件與支撐元件之相對關係之俯視示意圖。如圖1、圖2及圖3所示,實施例1之用以轉移電子元件之裝置10包含:一第一框架11、一第二框架12、一頂抵元件13以及一支撐元件14。
Please refer to Figures 1, 2 and 3. Figure 1 is a schematic diagram of a device for transferring electronic components according to Embodiment 1 of the present invention; and Figures 2 and 3 are schematic diagrams of a device for transferring electronic components according to Embodiment 1 of the present invention. A schematic top view of the relative relationship between electronic components and supporting components in an electronic component device. As shown in FIGS. 1 , 2 and 3 , the
如圖1所示,該一第一框架11係用以承載一其上載有一欲轉移電子元件111之載體112。
As shown in FIG. 1 , the
如圖1所示,該第二框架12係用以承載一基板121,其相對該第一框架11設置。
As shown in FIG. 1 , the
如圖1所示,該頂抵元件13設置於鄰近該第一框架處11,並受一致動機構131控制,可朝向該第一框架11上所承載之載體112,並透過該載體112對該欲轉移電子元件111為一頂抵之作動。
As shown in FIG. 1 , the resisting
如圖1、圖2所示,該支撐元件14設置於鄰近該第二框架12處,其可於該頂抵元件13為頂抵之作動時,對該承載於第二框架12上之基板121提供一區域支撐面141。
As shown in Figures 1 and 2, the
如圖2所示,本實施例中,該支撐元件14係提供一環形之區域支撐面141,該支撐元件14之外徑係大致等於正方形之欲轉移電子元件111之對角線的長度,且該支撐元件14之內徑係略大於正方形之欲轉移電子元件111之邊
長,但本發明並不限於此,本發明所屬技術領域中具有通常知識者可依據欲轉移電子元件111之形狀及尺寸調整該區域支撐面141之形狀及大小。
As shown in Figure 2, in this embodiment, the
如圖3所示,在另一實施例中,該支撐元件14’係提供一環形之區域支撐面141’,該支撐元件14’之內徑係略大於正方形之欲轉移電子元件111’之對角線的長度。 As shown in Figure 3, in another embodiment, the support element 14' is provided with an annular regional support surface 141', and the inner diameter of the support element 14' is slightly larger than the square of the electronic component to be transferred 111'. The length of the corner line.
當該致動機構131驅動該頂抵元件13向下移動,以透過該載體112對該欲轉移電子元件111為一頂抵之作動時,由於該支撐元件14對該承載於第二框架12上之基板121提供一區域支撐面141,可使基板121之中心區域與邊緣區域位於同一平面上,有利於欲轉移電子元件111之轉移有效提升欲轉移電子元件111的轉移效率及準確率。
When the
於一較佳實施方式中,該第二框架12係可相對於該支撐元件14移動,以使該支撐元件14可對該第二框架12所承載基板121的不同位置處提供該區域支撐面141,但本發明並不限於此。
In a preferred embodiment, the
於一較佳實施方式中,該支撐元件14係為一中空體,而可提供一環形之區域支撐面141,藉此可透過該支撐元件14之中空部分觀察該欲轉移電子元件111,或者可使一能量光束透過該支撐元件14之中空部分照射該欲轉移電子元件111,但本發明並不限於此。
In a preferred embodiment, the supporting
於一較佳實施方式中,該支撐元件14之材質係為光可透過者,藉此可透過該支撐元件14觀察該欲轉移電子元件111,或者可使一能量光束透過該支撐元件14照射該欲轉移電子元件111,但本發明並不限於此。於該較佳實施方式中,該光可透過之材質可為石英、鑽石或玻璃,但本發明並不限於此。
In a preferred embodiment, the material of the supporting
於一較佳實施方式中,該載體112係為一藍膜,但本發明並不限於此。
In a preferred embodiment, the
於一較佳實施方式中,該基板121係為一玻璃基板,但本發明並不限於此。
In a preferred embodiment, the
於一較佳實施方式中,該第一框架11可沿平行於該載體112之表面的X軸及Y軸水平移動,亦可沿垂直貫穿該載體112之中心的R軸轉動。此外,該第一框架11亦可沿垂直於該載體112之表面的Z軸上下移動。
In a preferred embodiment, the
於一較佳實施方式中,該第二框架12可沿平行於該基板121之表面的X軸及Y軸水平移動,亦可沿垂直該基板121之表面的Z軸上下移動。
In a preferred embodiment, the
於一較佳實施方式中,該用以轉移電子元件之裝置10可包含多組頂抵元件13以及支撐元件14,以進一步提升轉移電子元件之效率。
In a preferred embodiment, the
實施例2 Example 2
請參照圖4之本發明實施例2之用以轉移電子元件之裝置之示意圖。如圖4所示,實施例2之用以轉移電子元件之裝置20包含:一第一框架21、一第二框架22、一頂抵元件23、一支撐元件24以及一能量光束產生機構25。
Please refer to FIG. 4 which is a schematic diagram of a device for transferring electronic components according to Embodiment 2 of the present invention. As shown in FIG. 4 , the
如圖4所示,該一第一框架21係用以承載一其上載有一欲轉移電子元件211之載體212。
As shown in FIG. 4 , the
如圖4所示,該第二框架22係用以承載一基板221,其相對該第一框架21設置。
As shown in FIG. 4 , the
如圖4所示,該頂抵元件23設置於鄰近該第一框架處21,並受一致動機構231控制,可朝向該第一框架21上所承載之載體212,並透過該載體212對該欲轉移電子元件211為一頂抵之作動。
As shown in FIG. 4 , the resisting
如圖4所示,該支撐元件24設置於鄰近該第二框架22處,其可於該頂抵元件23為頂抵之作動時,對該承載於第二框架22上之基板221提供一區域支撐面241。
As shown in FIG. 4 , the
相較於實施例1,實施例2之支撐元件24係為一中空體,藉此可使一能量光束251透過該支撐元件24之中空部分照射該欲轉移電子元件211。
Compared with Embodiment 1, the supporting
相較於實施例1,實施例2更包括一能量光束產生機構25,其可產生一能量光束251通過該支撐元件24中空之部分,作用於該第二框架22所承載之基板221上,藉此可進一步藉由使該能量光束251照射該欲轉移電子元件211與該載體212之間的黏著劑,以弱化該欲轉移電子元件211與該載體212之間的黏著力,以利於該欲轉移電子元件211之轉移。
Compared with Embodiment 1, Embodiment 2 further includes an energy
於另一包括能量光束產生機構25之實施方式中,該支撐元件24並非中空,但該支撐元件24之材質係為光可透過者,藉此可使該能量光束251通過該支撐元件24,作用於該第二框架22所承載之基板221上。亦即,在包括能量光束產生機構25之實施方式中,該支撐元件24可為一中空體或該支撐元件24之材質係為光可透過者,只要能使該能量光束251通過該支撐元件24即可。
In another embodiment including the energy
於一較佳實施方式中,該能量光束產生機構25係為一雷射光束產生機構,但本發明並不限於此。
In a preferred embodiment, the energy
實施例3 Example 3
請參照圖5之本發明實施例3之用以轉移電子元件之裝置之示意圖。如圖5所示,實施例3之用以轉移電子元件之裝置30包含:一第一框架31、一第二框架32、一頂抵元件33、一支撐元件34以及一相機35。
Please refer to FIG. 5 which is a schematic diagram of a device for transferring electronic components according to Embodiment 3 of the present invention. As shown in FIG. 5 , the
如圖5所示,該一第一框架31係用以承載一其上載有一欲轉移電子元件311之載體312。
As shown in FIG. 5 , the
如圖5所示,該第二框架32係用以承載一基板321,其相對該第一框架31設置。
As shown in FIG. 5 , the
如圖5所示,該頂抵元件33設置於鄰近該第一框架處31,並受一致動機構331控制,可朝向該第一框架31上所承載之載體312,並透過該載體312對該欲轉移電子元件311為一頂抵之作動。
As shown in FIG. 5 , the resisting
如圖5所示,該支撐元件34設置於鄰近該第二框架32處,其可於該頂抵元件33為頂抵之作動時,對該承載於第二框架32上之基板321提供一區域支撐面341。
As shown in FIG. 5 , the
相較於實施例1,實施例3之支撐元件34係為一中空體,藉此可使一相機35透過該支撐元件34之中空部分,擷取該第二框架32所承載之基板321的影像。
Compared with Embodiment 1, the supporting
相較於實施例1,實施例3更包括一相機35,其可透過該支撐元件34中空之部分,擷取該第二框架32所承載之基板321的影像,藉此可藉由分析所擷取的影像來確定該欲轉移電子元件311轉移至該基板321上之位置是否符合預期。
Compared with Embodiment 1, Embodiment 3 further includes a
於另一包括相機35之實施方式中,該支撐元件34並非中空,但該支撐元件34之材質係為光可透過者,藉此可使該相機35透過該支撐元件34,擷取該第二框架32所承載之基板321的影像。亦即,在包括相機35之實施方式中,該支撐元件34可為一中空體或該支撐元件34之材質係為光可透過者,只要
能使該相機35透過該支撐元件34,擷取該第二框架32所承載之基板321的影像即可。
In another embodiment including a
於一包括相機35之較佳實施例中,該相機35可沿著一垂直於該第二框架32所承載之基板321之表面的Z軸上下移動,藉此對焦,以擷取到更為清晰的影像。此外,該相機35亦可沿平行該第二框架32所承載之基板321之表面的X軸及Y軸水平移動,以擷取各個欲轉移電子元件311的影像。
In a preferred embodiment including a
於一較佳實施例中,本發明之用以轉移電子元件之裝置可同時包括一能量光束產生機構以及一相機,藉此使該用以轉移電子元件之裝置同時具備以能量光束產生機構弱化該欲轉移電子元件與該載體之間的黏著力,以及擷取該第二框架所承載之基板的影像等二種功能。 In a preferred embodiment, the device for transferring electronic components of the present invention can include an energy beam generating mechanism and a camera at the same time, whereby the device for transferring electronic components is also equipped with an energy beam generating mechanism to weaken the It has two functions: transferring the adhesive force between the electronic component and the carrier, and capturing the image of the substrate carried by the second frame.
於同時包括雷射光束產生機構以及相機之較佳實施例中,可於該支撐元件之下方設置一半反射鏡,且該能量光束產生機構以及該相機係分別設置於該半反射鏡之透射及反射之路徑上,使該第二框架所承載之基板可在透過相機擷取影像的同時受到能量光束之照射。 In a preferred embodiment that includes both a laser beam generating mechanism and a camera, a half-reflecting mirror can be disposed below the supporting element, and the energy beam generating mechanism and the camera are respectively disposed on the transmission and reflection sides of the half-reflecting mirror. on the path, so that the substrate carried by the second frame can be irradiated by the energy beam while capturing images through the camera.
綜合上述,本發明之用以轉移電子元件之裝置,藉由設置一支撐元件,可有效地改善轉移電子元件時,基板之中心區域與邊緣區域並非位於同一平面上所產生的問題,藉此提升轉移電子元件之效率以及準確性。於本發明之較佳實施方式中,藉由更包括一能量光束產生機構,可進一步以能量光束產生機構弱化該欲轉移電子元件與該載體之間的黏著力,以進一步提升轉移電子元件之效率以及準確性。於本發明之較佳實施方式中,藉由更包括一相機,可進一步擷取該第二框架所承載之基板的影像,以進一步確定該欲轉移電子元件轉移至該基板上之位置是否符合預期。 In summary, the device for transferring electronic components of the present invention, by providing a supporting element, can effectively improve the problem caused by the central area and edge area of the substrate not being on the same plane when transferring electronic components, thereby improving the Efficiency and accuracy in transferring electronic components. In a preferred embodiment of the present invention, by further including an energy beam generating mechanism, the energy beam generating mechanism can further weaken the adhesion between the electronic component to be transferred and the carrier, thereby further improving the efficiency of transferring the electronic component. and accuracy. In a preferred embodiment of the present invention, by further including a camera, an image of the substrate carried by the second frame can be further captured to further determine whether the position of the electronic component to be transferred to the substrate is as expected. .
本發明之用以轉移電子元件之裝置係適用於轉移電子元件,例如:LED。 The device for transferring electronic components of the present invention is suitable for transferring electronic components, such as LEDs.
10:用以轉移電子元件之裝置 10: Devices used to transfer electronic components
11:第一框架 11:First frame
12:第二框架 12:Second frame
13:頂抵元件 13: Push against the component
14:支撐元件 14:Support element
111:欲轉移電子元件 111: Want to transfer electronic components
112:載體 112: Carrier
121:基板 121:Substrate
131:致動機構 131: Actuating mechanism
141:區域支撐面 141: Regional support surface
X:X軸 X:X axis
Y:Y軸 Y:Y axis
Z:Z軸 Z:Z axis
Claims (9)
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Citations (2)
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TWI768482B (en) * | 2018-05-12 | 2022-06-21 | 美商羅茵尼公司 | Apparatus for executing a direct transfer of one or more semiconductor device die from a wafer tape to a substrate and apparatus for executing a direct transfer of one or more electrically-actuable elements from a wafer tape to a circuit trace |
US20220359254A1 (en) * | 2021-05-06 | 2022-11-10 | Asti Global Inc., Taiwan | Electronic component transfer apparatus, electronic component transfer method, and method of manufacturing a light-emitting diode panel |
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TWI768482B (en) * | 2018-05-12 | 2022-06-21 | 美商羅茵尼公司 | Apparatus for executing a direct transfer of one or more semiconductor device die from a wafer tape to a substrate and apparatus for executing a direct transfer of one or more electrically-actuable elements from a wafer tape to a circuit trace |
US20220359254A1 (en) * | 2021-05-06 | 2022-11-10 | Asti Global Inc., Taiwan | Electronic component transfer apparatus, electronic component transfer method, and method of manufacturing a light-emitting diode panel |
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