CN218860860U

CN218860860U - PVD coating rotating frame mechanism

Info

Publication number: CN218860860U
Application number: CN202222347701.5U
Authority: CN
Inventors: 彭苏红; 廖勇; 祝恒
Original assignee: Zhejiang Massive Nanotechnology Co ltd
Current assignee: Zhejiang Massive Nanotechnology Co ltd
Priority date: 2022-09-01
Filing date: 2022-09-01
Publication date: 2023-04-14
Anticipated expiration: 2032-09-01

Abstract

The utility model discloses a PVD coating film revolving rack mechanism, including the revolving rack, revolving rack top and bottom central point put and are fixed with the revolving rack axle, revolving rack middle part position distributes along the circumferencial direction has a plurality ofly to rotate the stores pylon axle of being connected with the revolving rack, the epaxial hanger that plates of being equipped with of stores pylon, the epaxial initiative drive wheel that is fixed with of revolving rack in the bottom, the revolving rack passes the revolving rack under the stores pylon axial to correspond the initiative drive wheel and install driven drive wheel at stores pylon axle bottom, driven drive wheel is connected with the initiative drive wheel transmission after the transmission is connected in proper order along the circumferencial direction, form annular indirect transmission structure. The PVD coating film rotating frame mechanism of the utility model has the bottom which is in an indirect transmission mode to reduce the size of the transmission gear, reduce the cost and transfer the difficulty.

Description

PVD coating rotating frame mechanism

Technical Field

The utility model relates to a PVD coating equipment technical field especially relates to a PVD coating film revolving rack mechanism.

Background

Physical Vapor Deposition (PVD) is a process of evaporation, ionization or sputtering, etc., to produce metal particles and react with reactive gases to form compounds to deposit on the surface of a workpiece. Physical vapor deposition coating techniques are mainly classified into three categories, vacuum evaporation coating, vacuum sputtering coating, and vacuum ion coating.

In the vacuum ion plating, inert gas glow discharge is used to gasify, evaporate and ionize the plating material (such as metal titanium), and the ions are accelerated by an electric field to bombard the surface of a workpiece with higher energy to form a plating layer.

Generally, a workpiece to be processed is hung on a coating rack (coating rod), and the rack is arranged on a rotating frame. In the coating process, the rotating frame rotates to drive the coated workpiece to rotate in the coating cavity, and when the rotating workpiece passes by the vicinity of the target, target particles are deposited on the surface of the workpiece to carry out coating. During the period, the hanging rack can also rotate, so that the plating piece can be plated more uniformly when passing through the target.

However, the common rotating frame adopts a planetary gear structure to rotate and drive the hanging frame to rotate, and the planetary sun gear adopting the planetary gear structure has a larger diameter, so that the requirement on the gear is higher and the cost is higher relatively especially for a large rotating frame. Meanwhile, the bottom is provided with the planetary gear, so that a large amount of space of the bottom can be occupied, and the revolving rack is not beneficial to being taken out from the coating cavity subsequently.

SUMMERY OF THE UTILITY MODEL

The present invention aims at solving at least one of the technical problems in the related art to a certain extent. Therefore, an object of the present invention is to provide a PVD coating rotating frame mechanism, which has a bottom part with an indirect transmission mode to reduce the size of the transmission gear.

The technical scheme of the utility model as follows:

the utility model provides a PVD coating film revolving rack mechanism, including the revolving rack, revolving rack top and bottom central point put to be fixed with the revolving rack axle, the position distributes along the circumferencial direction in the middle part of the revolving rack has a plurality of stores pylon axles of being connected with the revolving rack rotation, the epaxial hanger that plates that is equipped with of stores pylon, the epaxial initiative drive wheel that is fixed with of revolving rack in the bottom, the revolving rack passes the revolving rack under the stores pylon axial to correspond the initiative drive wheel and install driven drive wheel at stores pylon axle bottom, driven drive wheel is connected with the transmission of initiative drive wheel after the connection of transmission in proper order along the circumferencial direction, form annular indirect transmission structure.

Furthermore, the driving transmission wheel and the driven transmission wheel are gears, belt pulleys or chain wheels.

Furthermore, rail wheels are symmetrically arranged on two sides of the bottom of the rotating frame so as to facilitate subsequent transfer of the rotating frame.

Furthermore, the end part of the rotating frame shaft is arranged into a special shape.

Furthermore, a driving shaft and a positioning shaft are respectively and rotatably connected to the bottom and the top of the vacuum chamber corresponding to the rotating frame shaft, and a clamping groove with matched shapes is formed in the center position of the driving shaft corresponding to the side of the rotating frame shaft for forming a clamping structure and transmitting torque.

Furthermore, the clamping grooves of the driving shaft and the positioning shaft are provided with radial openings and are arranged in a penetrating manner.

Furthermore, a gap is reserved between the track wheel and the bottom of the vacuum chamber after the rotating frame is assembled, so that a slide rail can be inserted in the follow-up process.

Furthermore, the driving shaft corresponds the shaping of block groove and has the ramp, and the ramp bottom height highly flushes with the slide rail height to when shifting the revolving rack, corresponding installation clearance is left to the track.

Furthermore, a movable space is reserved in a positioning groove of the positioning shaft.

The utility model provides a beneficial effect: by arranging the indirect transmission structure, the size of the gear can be reduced, the cost is saved, and more operation space is reserved; the rail wheels are arranged, so that the rotary frame can be conveniently transferred at the later stage; the clamping groove arranged in the middle of the rotating shaft of the vacuum chamber corresponding to the rotating frame shaft is provided with a radial opening in a penetrating way, so that the subsequent translation mode is convenient for transferring; and the driving shaft at the bottom is provided with a ramp corresponding to the opening and closing groove, so that the subsequent installation of a sliding rail is convenient.

Drawings

The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a schematic structural view of a PVD coating rotating frame mechanism provided by the present invention (the hanging frame and the transmission chain at the bottom are omitted);

FIG. 2 is a bottom view of the turret;

FIG. 3 is a schematic structural view of the turret disposed in the cavity;

FIG. 4 is an enlarged view of a portion of FIG. 3 at A;

FIG. 5 is a schematic view of the construction of the drive shaft engaged with the bottom turret shaft;

fig. 6 is a schematic view of the positioning shaft engaged with the top turret shaft.

In the figure:

1-rotating the frame; 11-a turret shaft; 12-a hanger shaft; 2-a driving gear; 3-a driven gear; 4-a chain; 5-a rail wheel; 51-gap;

0-a vacuum chamber; 01-a drive shaft; 011-clamping groove; 012-ramp; 02-positioning the shaft; 021-positioning groove; 03-sliding rail.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below by referring to the drawings are exemplary intended for explaining the present invention, and should not be construed as limiting the present invention.

Referring to fig. 1-2, a PVD coating rotating frame mechanism comprises a rotating frame 1, wherein a rotating frame shaft 11 is fixed at the top and bottom center positions of the rotating frame 1, a plurality of hanging frame shafts 12 rotatably connected with the rotating frame 1 are distributed at the middle position of the rotating frame 1 along the circumferential direction, a coating hanger is assembled (such as directly welded and fixed) on the hanging frame shafts 12, a driving gear 2 is fixed on the rotating frame shaft 11 at the bottom, and the rotating frame shaft 11 and the shaft hole of the driving gear 2 are in interference fit and further connected through a key; similarly, the hanger shaft 12 passes the revolving rack 1 downwards, and the driven gear 3 is installed at the bottom of the hanger shaft 12 corresponding to the driving gear 2, and the driven gear 3 is connected with the driving gear 2 in a transmission manner after being sequentially connected in series along the circumferential direction through the chain 4 to form an annular indirect transmission structure, so that the size of the gear is reduced, and the cost is saved.

Of course, the gear can also adopt a driving belt pulley or a chain wheel and is assisted with the tensioner for tensioning.

Track wheels 5 are symmetrically arranged on two sides of the bottom of the rotating frame 1 so as to facilitate the subsequent transfer of the rotating frame 1; of course, after the turret 1 is assembled into the vacuum chamber, the rail wheels 5 have a certain clearance from the bottom of the vacuum chamber to avoid interfering with the rotation of the turret 1.

As shown in fig. 5, the end of the rotating shaft 11 is shaped like a special shape, and the end side is shaped like a rectangle in this example, so as to be embedded into the corresponding rotating shaft (driving shaft 01) of the vacuum chamber 0 to transmit torque, and the rotating shaft is driven to rotate by a speed reducer at the bottom.

Specifically, a driving shaft 01 and a positioning shaft 02 are respectively rotatably connected to the bottom and the top of the vacuum chamber corresponding to the rotating frame shaft 11, and a clamping groove with matched shapes is formed in the center position of the driving shaft 01 corresponding to the end side of the rotating frame shaft 11 and used for forming a clamping structure and transmitting torque.

With further reference to fig. 3-6, for the convenience of moving out the rotating frame, the engaging grooves of the driving shaft 01 and the positioning shaft 02 are opened with radial openings and are arranged in a penetrating manner, so that the rotating frame 1 can slide out of the driving shaft 01 and the positioning shaft 02; in this embodiment, specifically, the engaging groove 011 formed in the center of the driving shaft 01 is radially through, and the positioning groove 021 formed in the center of the positioning shaft 02 is also radially through.

Meanwhile, after the rotating stand is assembled, the rail wheel 5 and the bottom of the vacuum chamber 0 are reserved with a sufficient gap 51, so that a slide rail 03 can be conveniently inserted and arranged subsequently for transferring the rotating stand 1; for example, the slide rails 03 may be mounted on a transfer rack having the same height as the bottom of the vacuum chamber, and the end sides of the slide rails 03 may be extended from the end sides of the transfer rack, so that the slide rails at the extended positions may be inserted into the gaps 51 to pull out the transfer rack.

In addition, in order to conveniently insert the slide rail 03, the driving shaft 01 is formed with a ramp 012 corresponding to the engaging slot 011, the height of the ramp 012 is smaller and is 1-5mm, and the bottom height of the ramp 012 is basically flush with the height of the slide rail 03, so that when the rotating frame 1 is transferred, a corresponding installation gap is left when the rail 03 is inserted.

Due to the ramp 012, the rotating shaft 11 will be axially displaced during the assembly process, so that a sufficient moving height is reserved in the positioning groove 021 of the positioning shaft 02.

In the present application, the structures and the connection relations that are not described in detail are all the prior art, and the structures and the principles thereof are known in the prior art and are not described herein again.

The above, only be the embodiment of the preferred of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, which are designed to be replaced or changed equally, all should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a PVD coating film revolving rack mechanism, includes the revolving rack, and revolving rack top and bottom central point put to be fixed with the revolving rack axle, and the revolving rack middle part position distributes along the circumferencial direction has a plurality of stores pylon axles of being connected with the revolving rack rotation, and the epaxial hanger that is equipped with of stores pylon is plated, its characterized in that: a driving transmission wheel is fixed on a rotating frame shaft at the bottom, the hanging frame axially penetrates through the rotating frame downwards, a driven transmission wheel is installed at the bottom of the hanging frame shaft corresponding to the driving transmission wheel, and the driven transmission wheels are sequentially in transmission connection along the circumferential direction and then are in transmission connection with the driving transmission wheel to form an annular indirect transmission structure.

2. The PVD coating turret mechanism of claim 1, wherein: the driving transmission wheel and the driven transmission wheel are gears, belt pulleys or chain wheels.

3. The PVD coating turret mechanism of claim 1, wherein: track wheels are symmetrically arranged on two sides of the bottom of the rotating frame.

4. The PVD coating turret mechanism of claim 3, wherein: the end part of the rotating frame shaft is arranged in a special shape.

5. The PVD coating turret mechanism of claim 4, wherein: the corresponding rotating frame shaft is respectively and rotatably connected with a driving shaft and a positioning shaft at the bottom and the top of the vacuum chamber, and a clamping groove with matched shapes is formed in the center position of the driving shaft corresponding to the end side of the rotating frame shaft and used for forming a clamping structure and transmitting torque.

6. The PVD coating turret mechanism of claim 5, wherein: the drive shaft and the clamping groove of the positioning shaft are provided with radial openings and are arranged in a penetrating way.

7. The PVD coating turret mechanism of claim 6, wherein: after the rotating frame is assembled, a gap is reserved between the rail wheel and the bottom of the vacuum cavity for subsequent insertion of the sliding rail.

8. The PVD coating turret mechanism of claim 7, wherein: the driving shaft is formed with a ramp bottom height which is flush with the height of the slide rail corresponding to the clamping groove, so that a corresponding mounting gap is reserved for the rail when the rotating frame is transferred.

9. The PVD coating turret mechanism of claim 8, wherein: the positioning groove of the positioning shaft is reserved with a movable space.