CN218737268U

CN218737268U - Electron cigarette sensing subassembly and electron cigarette

Info

Publication number: CN218737268U
Application number: CN202223255208.7U
Authority: CN
Inventors: 荣根兰
Original assignee: Memsensing Microsystems Suzhou China Co Ltd
Current assignee: Memsensing Microsystems Suzhou China Co Ltd
Priority date: 2022-12-05
Filing date: 2022-12-05
Publication date: 2023-03-28
Anticipated expiration: 2032-12-05

Abstract

The application discloses electron cigarette sensing subassembly and electron cigarette. The electronic cigarette sensing assembly comprises a substrate and a vibrating diaphragm, wherein a partial area of the substrate is directly used as one electrode of a capacitor plate; the vibration sensitive area of the vibrating diaphragm forms the other electrode of the capacitor plate, the substrate is provided with at least one hollow-out area to form a back cavity, and the scheme of forming the variable capacitor structure between the vibrating diaphragm and the substrate is adopted, so that the structure of the electronic cigarette sensing assembly is simplified; and the vibrating diaphragm includes insulating layer, conducting layer and isolation structure, separates the invalid capacitor area of the effective capacitance area of the central part of conducting layer and edge portion of conducting layer through isolation structure, not only can play the effect that reduces parasitic capacitance, has still promoted the electric capacity change volume in electric capacity effective area to reach the effect that promotes product sensitivity.

Description

Electron cigarette sensing subassembly and electron cigarette

Technical Field

The application relates to the technical field of sensing, especially, relate to an electron cigarette sensing subassembly and electron cigarette.

Background

As shown in fig. 1, the conventional electronic smoke sensing module is generally configured by forming two layers of plates (e.g. including a diaphragm 300' and a back plate 400 ') on a silicon substrate 100' to form a parallel plate capacitor, however, the use of such a structural design may result in a larger number of film structures of the electronic smoke sensing module and a corresponding higher manufacturing cost.

Therefore, improvements in the prior art are needed.

SUMMERY OF THE UTILITY MODEL

The utility model discloses aim at solving one of the technical problem that exists among the prior art at least, provide an electron cigarette sensing subassembly and electron cigarette.

According to one aspect of the present application, there is provided an electronic cigarette sensing assembly comprising a substrate, a partial region of the substrate constituting a first electrode; the vibrating diaphragm is positioned on the surface of one side of the substrate and comprises an insulating layer and a conducting layer fixedly connected with the insulating layer, and the conducting layer is positioned on one side, far away from the substrate, of the insulating layer in the thickness direction of the substrate; an isolation structure penetrating the conductive layer in a thickness direction to partition the conductive layer into a central portion constituting a second electrode and an edge portion surrounding the central portion; wherein the substrate has at least one first hollowed-out area surrounding the first electrode to form a back cavity, the back cavity is communicated with an external environment of the electronic cigarette, and projections of the first electrode and the second electrode are overlapped in a thickness direction of the substrate.

Further, the isolation structure includes an isolation trench.

Furthermore, a first supporting body used for supporting the vibrating diaphragm is arranged on one side, close to the vibrating diaphragm, of the substrate, and the first supporting body is located on the edge of the substrate, so that the vibrating diaphragm is suspended above the first electrode, and the first electrode and the second electrode form a variable capacitor.

Further, the substrate further comprises: the first supporting part and the at least one first beam fixedly connect the second electrode with the first supporting part.

Further, at least one of the at least one first beam includes a conductive medium to transmit electrical signals between the second electrode and an external circuit.

Further, the diaphragm also includes: at least one air hole, the at least one air hole sets up in the edge of the vibration sensitive area of vibrating diaphragm.

Further, the electronic cigarette sensing assembly further comprises: a first pad and a second pad; a first opening penetrating through the diaphragm and the first support body in the thickness direction is formed in the diaphragm to expose a part of the conductive electrode on the substrate, wherein the first bonding pad is located in the first opening and is electrically connected with the first electrode; the second pad is electrically connected to the second electrode.

Further, a first anti-sticking structure is arranged on one side, facing the substrate, of the insulating layer; wherein a projection of the first release structure is located within a projection range of the first electrode in a thickness direction of the substrate.

Further, the first anti-sticking structure is integrally formed with the insulating layer.

According to yet another aspect of the present application, there is also provided an electronic cigarette sensing assembly comprising: a substrate, wherein a partial region of the substrate constitutes a third electrode; the vibrating diaphragm is positioned on the surface of one side of the substrate and comprises an insulating layer and a conducting layer fixedly connected with the insulating layer, and the conducting layer is positioned on one side, far away from the substrate, of the insulating layer in the thickness direction of the substrate; an isolation structure penetrating the conductive layer in a thickness direction to divide the conductive layer into a center portion and an edge portion surrounding the center portion, the center portion constituting a fourth electrode; the third electrode is provided with at least one second hollow-out area, the at least one second hollow-out area forms a back cavity, the back cavity is communicated with the external environment of the electronic cigarette, and the projections of the third electrode and the fourth electrode are overlapped in the thickness direction of the substrate.

Further, the isolation structure includes an isolation trench.

Furthermore, a first supporting body used for supporting the vibrating diaphragm is arranged on one side, close to the vibrating diaphragm, of the substrate, and the first supporting body is located on the edge of the substrate, so that the vibrating diaphragm is suspended above the third electrode, and the third electrode and the fourth electrode form a variable capacitor.

Further, the diaphragm also includes: and the air holes are arranged in the middle of the vibrating diaphragm.

Further, the electronic cigarette sensing assembly further comprises: a third pad and a fourth pad; a second opening penetrating through the diaphragm and the first support body in the thickness direction is formed in the diaphragm to expose a part of the conductive electrode on the substrate, wherein the third bonding pad is located in the second opening and is electrically connected with the third electrode; the fourth pad is electrically connected to the fourth electrode.

Further, a second anti-sticking structure is arranged on one side, facing the substrate, of the insulating layer; wherein a projection of the second release structure is located within a projection range of the third electrode in a thickness direction of the substrate.

Further, the second anti-sticking structure is integrally formed with the insulating layer.

According to yet another aspect of the present application, there is also provided an electronic cigarette sensing assembly comprising: the partial area of the substrate forms a fifth electrode, and the fifth electrode is provided with at least one third hollow area; the vibrating diaphragm is positioned on the surface of one side of the substrate and comprises an insulating layer and a conducting layer fixedly connected with the insulating layer, and the conducting layer is positioned on one side, far away from the substrate, of the insulating layer in the thickness direction of the substrate; at least one isolation structure penetrating the conductive layer in a thickness direction to divide the conductive layer into a central portion constituting a sixth electrode and an edge portion surrounding the central portion; wherein, in the thickness direction of the substrate, the projections of the fifth electrode and the sixth electrode are overlapped, and the substrate further has at least one fourth hollowed-out area which surrounds the fifth electrode to form a back cavity which is communicated with the external environment of the electronic cigarette.

Further, the isolation structure includes an isolation trench.

Furthermore, a first supporting body used for supporting the vibrating diaphragm is arranged on one side, close to the vibrating diaphragm, of the substrate, and the first supporting body is located on the edge of the substrate, so that the vibrating diaphragm is suspended above the fifth electrode, and the fifth electrode and the sixth electrode form a variable capacitor.

Further, the substrate further comprises: the sixth electrode is fixedly connected with the second supporting part through the at least one second beam.

Further, at least one of the at least one second beam includes a conductive medium to transmit an electrical signal between the sixth electrode and an external circuit.

Further, the electronic cigarette sensing assembly further comprises: a fifth pad and a sixth pad; a third opening penetrating through the diaphragm and the first support body in the thickness direction is formed in the diaphragm to expose a part of the conductive electrode on the substrate, wherein the fifth bonding pad is located in the third opening and is electrically connected with the fifth electrode; the sixth pad is electrically connected to the sixth electrode.

Further, a third bonding structure is arranged on one side, facing the substrate, of the insulating layer; wherein, in the thickness direction of the substrate, the projection of the third anti-sticking structure is located within the projection range of the fifth electrode.

Further, the third adhesion structure and the insulating layer are integrally formed.

According to another aspect of the present application, there is also provided an electronic cigarette comprising an electronic cigarette sensing assembly according to any of the embodiments described above.

The variable capacitance structure has the advantages that the partial area of the substrate is directly used as one electrode of the capacitance polar plate, and the other electrode is the vibrating diaphragm corresponding to the partial area, so that the scheme that the variable capacitance structure is formed between the vibrating diaphragm and the substrate is realized, and the electrode structure of the electronic cigarette sensing assembly is favorably simplified.

In some embodiments, the diaphragm includes an insulating layer, a conductive layer, and an isolation structure, and the isolation structure separates an effective capacitance region at a center portion of the conductive layer from an invalid capacitance region at an edge portion of the conductive layer, so that not only can a function of reducing parasitic capacitance be performed, but also a capacitance variation of the effective capacitance region is improved, thereby achieving a function of improving product sensitivity.

In some embodiments, the diaphragm further includes at least one air hole disposed in a center or an edge of the vibration sensitive region of the diaphragm and communicating with the back cavity. At least one gas pocket is as atmospheric pressure balancing hole, can adjust the load of blowing on the vibrating diaphragm on the one hand, prevents the broken phenomenon of membrane, and on the other hand, in the electron cigarette sensing assembly, can prevent that the tobacco tar from blockking up the self-starting phenomenon behind the PCB board through-hole in the use to the life-span of extension product.

Drawings

The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.

Figure 1 is a schematic structural view of an electronic cigarette sensing assembly provided according to the prior art;

figure 2 is a schematic structural diagram of an electronic cigarette sensing assembly according to an embodiment of the present application;

figure 3 is a schematic top view of a portion of a diaphragm of the electronic cigarette sensing assembly provided in figure 2;

figure 4 is a schematic top view of a portion of a substrate of the electronic cigarette sensing assembly provided in figure 2;

figure 5 is a schematic structural diagram of an electronic cigarette sensing assembly according to a second embodiment of the present application;

figure 6 is a schematic top view of a portion of a diaphragm of the electronic cigarette sensing assembly provided in figure 5;

figure 7 is a schematic top view of a portion of a substrate of the electronic cigarette sensing assembly provided in figure 5;

figure 8 is a schematic structural diagram of an electronic cigarette sensing assembly according to a third embodiment of the present application;

figure 9 is a schematic top view of a portion of a diaphragm of the electronic cigarette sensing assembly provided in figure 8;

figure 10 is a schematic top view of a portion of the substrate of the electronic cigarette sensing assembly provided in figure 8.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as the case may be.

In order to make the objects, features and advantages of the present invention more comprehensible, the present invention provides an electronic cigarette sensing assembly and an electronic cigarette, which are described in detail below with reference to the accompanying drawings and specific embodiments.

In the conventional technology, due to the fact that the diaphragm on the electronic cigarette sensing assembly is conductive in a whole surface, parasitic capacitance is generated between a fixed support position area of the edge of the diaphragm and another conductive electrode (such as a back plate, for example), and therefore the performance of the electronic cigarette sensing assembly is poor.

In view of the above, an object of the present application is to reduce a parasitic capacitance formed between an edge of a diaphragm and another conductive electrode and simplify an electrode structure of an electronic cigarette sensing assembly.

Example one

Fig. 2 is a schematic structural diagram of an electronic cigarette sensing assembly according to an embodiment of the present application, fig. 3 is a schematic structural diagram of a top view of a portion of a diaphragm of the electronic cigarette sensing assembly provided in fig. 2, and fig. 4 is a schematic structural diagram of a top view of a portion of a substrate of the electronic cigarette sensing assembly provided in fig. 2.

As shown in fig. 2-4, an embodiment of the present application provides an electronic cigarette sensing assembly, which includes a substrate 100, a partial region of the substrate 100 constituting a first electrode 110; the diaphragm 300 is located on one side surface of the substrate 100, the diaphragm 300 includes an insulating layer 310 and a conductive layer 320 fixedly connected to the insulating layer 310, and in the thickness direction of the substrate 100, the conductive layer 320 is located on one side of the insulating layer 310 away from the substrate 100; an isolation structure 340 penetrating the conductive layer 320 in a thickness direction of the isolation structure 340 to divide the conductive layer 320 into a center portion 31 and an edge portion 32 surrounding the center portion, the center portion 31 constituting a second electrode 322; wherein the substrate 100 has at least one first hollow area 101, the at least one first hollow area 101 surrounds the first electrode 110 to form a back cavity, the back cavity is communicated with an external environment of an electronic cigarette, and projections of the first electrode 110 and the second electrode 322 overlap in a thickness direction of the substrate 100.

Further, in the embodiment of the present application, the substrate 100 includes a conductive medium, so that a partial region of the substrate 100 forms the first electrode 110, so that an additional back plate is not required to be disposed on a side of the diaphragm 300 away from the substrate 100, and then the back plate and the diaphragm 300 form a variable capacitor, which is beneficial to simplifying an electrode structure of the electronic cigarette sensing assembly. In addition, the substrate is used as a conductive electrode, so that the MEMS (Micro-Electro-Mechanical System) electronic cigarette sensing assembly has the advantages of small size, low cost and good consistency under the condition of ensuring the same performance, or has the advantage of higher performance under the condition of the same size.

In this embodiment, a first supporting body 200 for supporting the diaphragm 300 is disposed on one side of the substrate 100 close to the diaphragm 300, and the first supporting body 200 is located at an edge of the substrate 100, so that the vibration sensitive area of the diaphragm 300 is suspended above the first electrode 110, and the first electrode 110 and the second electrode 322 form a variable capacitor.

The blowing load during normal operation and the blowing load during abnormal operation are both loaded to the diaphragm 300 through the back chamber. The first supporting body 200 is supported between the substrate 100 and the diaphragm 300, and is used for electrically isolating the diaphragm 300 from the substrate 100 and providing support for the diaphragm 300. The first support 200 is an insulating support, and may be, for example, silicon oxide. The thickness of the first support 200 is between 2 to 3um, for example, around 2.5 um. The diaphragm 300 and the substrate 100 are disposed opposite to each other and spaced apart from each other, so that an oscillating acoustic cavity for the diaphragm 300 to vibrate is formed between the substrate 100 and the diaphragm 300.

Preferably, the at least one first hollow-out region 101 is an annular back cavity, so that the space of the annular back cavity is large enough to reduce the surface vibration of the diaphragm 300 caused by the reflected wave, thereby improving the sensitivity and accuracy of the detection of the electrical signal of the electronic cigarette sensing assembly.

Specifically, in the present embodiment, the insulating layer 310 may be SiN _X A film layer, the conductive layer 320 may be a polysilicon layer, and the insulating layer 310 is used for supporting and fixing the conductive layer 320; the isolation structure 340 includes an isolation trench having a width ranging from 0.1 μm to 50 μm, and the bottom of the isolation trench is located on the surface of the insulating layer 310 to expose a portion of the insulating layer 310, which is not limited thereto, and those skilled in the art can perform other arrangements on the isolation structure as required, for example, filling the isolation trench with an insulating material.

As shown in fig. 3, the conductive layer 320 of the diaphragm 300 is divided into a center portion 31 and an edge portion 32 by the isolation structure 340, wherein the center portion 31 includes: a central region 31a, a pad region 31b, and a connection region 31c, where the central region 31a and the pad region 31b are connected by the connection region 31c, and a projection of the central region 31a overlaps a projection of the first hollow region 101 in a thickness direction of the substrate 100. In the embodiment of the present application, the diaphragm 300 is fixed in a peripheral fixed-support manner, so that the deformation capability of the middle portion of the diaphragm 300 is greater than that of the edge portion, and in the actual use process, the portion of the central area 31a of the conductive layer 320 opposite to the first electrode 110 is the effective capacitance area (sensitivity contribution area), so that the effective capacitance area of the central portion 31 is separated from the ineffective capacitance area of the edge portion 32 by the isolation structure 340, which not only can reduce the parasitic capacitance, but also improves the capacitance variation of the effective capacitance area, thereby achieving the effect of improving the product sensitivity.

As shown in fig. 4, the substrate 100 further includes: a first supporting portion 121, at least one first beam 122, wherein the at least one first beam 122 fixedly connects the first electrode 110 with the first supporting portion 121, and at least one of the at least one first beam 122 is made of a conductive medium, so as to transmit an electrical signal between the first electrode 110 and an external circuit (not shown).

Illustratively, the first supporting part 121 is located at an edge region of the substrate 100, and the first supporting part 121 is used for supporting the diaphragm 300 and various conductive electrodes, etc. Specifically, in the thickness direction of the substrate 100, a first support 200 is provided on one side surface of the first support part 121 to support the diaphragm 300.

Illustratively, in some embodiments of the present application, a region of the substrate 100 where the first electrode 110 is located is made of a conductive material, and a region of the substrate 100 other than the first electrode 110 is made of a non-conductive material, and a conductive film layer, such as electroplated copper, may be formed above the at least one first beam 122 to implement an external circuit to apply a voltage signal to the first electrode 110.

Illustratively, in other embodiments of the present application, the substrate 100 is a semiconductor substrate, and the substrate 100 includes a semiconductor material layer, which may be doped such that at least a portion of the semiconductor material layer has a conductive property for preparing the first electrode 110. Specifically, the region of the substrate 100 where the first electrode 110 is located may be doped in a semiconductor material layer to form an N-type dopant or a P-type impurity, and at least one of the regions of the substrate 100 where the at least one first beam 122 is located may be doped in the semiconductor material layer to form an N-type dopant or a P-type impurity, so as to implement an external circuit applying a voltage signal to the first electrode 110.

Further, the diaphragm 300 further includes at least one air hole 330a, and the at least one air hole 330a is disposed at an edge of the vibration sensitive area of the diaphragm 300 and is communicated with the back cavity. At least one gas pocket 330a is as the atmospheric pressure balancing hole, can adjust the load of blowing on the vibrating diaphragm 300 on the one hand, prevents the broken phenomenon of membrane, and on the other hand, in the electron cigarette sensing assembly, can prevent that the smoke tar from blockking up the self-starting phenomenon behind the PCB board through-hole in the use to the life-span of extension product. Illustratively, the at least one air hole 330a may have a structure in which the number of the grooves having a size of 0.3 μm to 2 μm is 1 to 6.

Further, the electronic cigarette sensing assembly further comprises: first and

second pads

51 and 52; the diaphragm 300 is provided with a first opening 41 penetrating through the diaphragm 300 and the first support 200 in a thickness direction to expose a part of the conductive electrode on the substrate 100, wherein the first pad 51 is located in the first opening 41 and electrically connected to the first electrode 110; the second pad 52 is electrically connected to the second electrode 322. Preferably, the second pad 52 may be disposed on the pad region 31b in direct contact.

In this embodiment, in order to avoid the diaphragm 300 contacting the first electrode 110 of the substrate 100 when vibrating, a first anti-adhesion structure 311 is disposed on a side of the vibration sensitive area of the diaphragm 300 facing the substrate 100; in the thickness direction of the substrate 100, a projection of the first anti-adhesive structure 311 is located within a projection range of the first electrode 110. The first anti-adhesion structure 311 may have various forms, such as a dot or a stripe. The embodiment of the utility model provides a do not limit to this. The first anti-adhesion structure 311 is made of an insulating material, such as SiNx or SiOx, to prevent the diaphragm 300 from touching and shorting with the first electrode 110 of the substrate 100 after being deformed.

Adopt the technical scheme that this application embodiment provided, the partial region with the basement directly is as one of them electrode of capacitance polar plate, another electrode is the vibrating diaphragm that corresponds with it, thereby realize the scheme that forms variable capacitance structure between vibrating diaphragm and the basement, be favorable to simplifying the electrode structure of electron cigarette sensing assembly, and the vibrating diaphragm includes the insulating layer, conducting layer and isolation structure, separate the invalid capacitance area of the effective capacitance area of the middle part of conducting layer and the edge part of conducting layer through isolation structure, not only can play the effect that reduces parasitic capacitance, the capacitance variation in capacitance effective area has still been promoted, thereby reach the effect that promotes product sensitivity.

Example two

Fig. 5 is a schematic structural diagram of an electronic cigarette sensing assembly according to a second embodiment of the present application, fig. 6 is a schematic partial top-view structural diagram of a diaphragm of the electronic cigarette sensing assembly provided in fig. 5, and fig. 7 is a schematic partial top-view structural diagram of a substrate of the electronic cigarette sensing assembly provided in fig. 5.

As shown in fig. 5-7, an electronic cigarette sensing assembly according to an embodiment of the present application includes a substrate 100, a partial region of which constitutes a third electrode 130; the diaphragm 300 is located on one side surface of the substrate 100, the diaphragm 300 includes an insulating layer 310 and a conductive layer 320 fixedly connected to the insulating layer 310, and in the thickness direction of the substrate 100, the conductive layer 320 is located on one side of the insulating layer 310 away from the substrate 100; a partition structure 340 penetrating the conductive layer 320 in a thickness direction of the partition structure 340 to partition the conductive layer 320 into a center portion 31 and an edge portion 32 surrounding the center portion 31, the center portion 31 constituting a fourth electrode 324; wherein the third electrode 130 has at least one second hollow area 102, the at least one second hollow area 102 constitutes a back cavity, the back cavity is communicated with an external environment of the electronic cigarette, and projections of the third electrode 130 and the fourth electrode 324 overlap in a thickness direction of the substrate 100.

Further, in the embodiment of the present application, the substrate 100 includes a conductive medium, so as to implement that a partial region of the substrate 100 constitutes the third electrode 130, so that an additional back plate is not required to be disposed on a side of the diaphragm 300 away from the substrate 100, and then the back plate and the diaphragm 300 form a variable capacitor, which is beneficial to simplifying an electrode structure of the electronic cigarette sensing assembly. In addition, the substrate is used as a conductive electrode, so that the MEMS (Micro-Electro-Mechanical System) electronic cigarette sensing assembly has the advantages of small size, low cost and good consistency under the condition of ensuring the same performance, or has the advantage of higher performance under the condition of the same size.

Illustratively, in some embodiments of the present application, the region of the substrate 100 where the third electrode 130 is located is made of a conductive material, and the region of the substrate 100 other than the third electrode 130 is made of a non-conductive material, such as electroplated copper, so as to implement an external circuit to apply a voltage signal to the third electrode 130.

Illustratively, in other embodiments of the present application, the substrate 100 is a semiconductor substrate, and the substrate 100 includes a semiconductor material layer, which may be doped such that at least a portion of the semiconductor material layer has a conductive property for preparing the third electrode 130. Specifically, the region of the substrate 100 where the third electrode 130 is located may be doped in a semiconductor material layer to form an N-type dopant or a P-type dopant, so as to enable an external circuit to apply a voltage signal to the third electrode 130.

In this embodiment, a first supporting body 200 for supporting the diaphragm 300 is disposed on one side of the substrate 100 close to the diaphragm 300, and the first supporting body 200 is located at an edge of the substrate 100, so that the vibration sensitive area of the diaphragm 300 is suspended above the third electrode 130, and the third electrode 130 and the fourth electrode 324 form a variable capacitor.

The blowing load during normal operation and the blowing load during abnormal operation are both loaded to the diaphragm 300 through the back cavity. The first supporting body 200 is supported between the substrate 100 and the diaphragm 300, and is used for electrically isolating the diaphragm 300 from the substrate 100 and providing support for the diaphragm 300. The first support 200 is an insulating support, and may be, for example, silicon oxide or silicon nitride. The thickness of the first support 200 is between 2 to 3um, for example, around 2.5 um. The diaphragm 300 and the substrate 100 are disposed opposite to each other and spaced apart from each other, so that an oscillating acoustic cavity for the diaphragm 300 to vibrate is formed between the substrate and the diaphragm 300.

Exemplarily, in the present embodiment, the third electrode 130 is a ring-shaped electrode, such that an area where a projection of the third electrode 130 overlaps with a projection of the diaphragm 300 in a thickness direction of the substrate 100 is sufficiently large.

Specifically, in the embodiment of the present application, the insulating layer 310 may be SiN _X A conductive layer 320, which may be a polysilicon layer, the insulating layer 310 is used to support and fix the conductive layer 320; the isolation structure 340 includes an isolation trench having a width ranging from 0.1 μm to 50 μm, and the bottom of the isolation trench is located on the surface of the insulating layer 310 to expose a portion of the insulating layer 310, which is not limited thereto, and those skilled in the art can perform other arrangements on the isolation structure as required, for example, filling the isolation trench with an insulating material.

As shown in fig. 6, the conductive layer 320 of the diaphragm 300 is divided into a center portion 31 and an edge portion 32 by the isolation structure 340, wherein the center portion 31 includes: a central region 31a, a pad region 31b, and a connection region 31c, where the central region 31a and the pad region 31b are connected by the connection region 31c, and a projection of the central region 31a overlaps a projection of the second hollow region 102 in a thickness direction of the substrate 100. In the embodiment of the present application, the diaphragm 300 is fixed in a peripheral fixed-support manner, so that the middle deformation capability of the diaphragm 300 is greater than the deformation capability of the edge portion, and in the actual use process, the portion of the central area 31a of the conductive layer 320 opposite to the third electrode 130 is the effective capacitance area (sensitivity contribution area), so that the effective capacitance area of the central portion 31 is separated from the ineffective capacitance area of the edge portion 32 by the isolation structure 340, which not only can reduce the parasitic capacitance, but also improves the capacitance variation of the effective capacitance area, thereby achieving the effect of improving the product sensitivity.

Further, in this embodiment, the diaphragm 300 further includes at least one air hole 330a, and the at least one air hole 330a is disposed in a middle portion of the vibration sensitive area of the diaphragm 300. Preferably, the at least one air hole 330a is disposed opposite to the at least one second hollow area 102 and is communicated with the back cavity. At least one gas pocket 330a can adjust the load of blowing on the vibrating diaphragm 300 as the atmospheric pressure balancing hole on the one hand, prevents the broken phenomenon of membrane, and on the other hand, in the electron cigarette sensing assembly of electron cigarette, can prevent that the cigarette oil from blockking up the self-starting phenomenon behind the PCB board through-hole in the use to the life-span of extension product. Illustratively, the at least one air hole 330a may have a structure in which the number of the grooves having a size of 0.3 μm to 2 μm is 1 to 6.

Further, the electronic cigarette sensing assembly further comprises: third and

fourth pads

53 and 54; the diaphragm 300 is provided with a second opening 42 penetrating through the diaphragm 300 and the first support 200 in the thickness direction to expose a part of the conductive electrode on the substrate 100, wherein the third pad 53 is located in the second opening 42 and electrically connected to the third electrode 130; the fourth pad 54 is electrically connected to the fourth electrode 324. Preferably, the fourth pad 54 may be disposed on the pad region 31b in direct contact.

In this embodiment, in order to avoid the diaphragm 300 contacting the third electrode 130 of the substrate 100 when vibrating, a second anti-adhesion structure 312 is disposed on a side of the vibration sensitive area of the diaphragm 300 facing the substrate 100; in the thickness direction of the substrate 100, a projection of the second release structure 312 is located within a projection range of the third electrode 130. The second anti-adhesion structure 312 may have various forms, such as a dot or a stripe. The embodiment of the utility model provides a do not limit to this. The second anti-adhesion structure 312 is made of an insulating material, such as SiNx or SiOx, to prevent the diaphragm 300 from touching and shorting with the third electrode 130 of the substrate 100 after being deformed.

EXAMPLE III

Fig. 8 is a schematic structural diagram of an electronic cigarette sensing assembly according to a third embodiment of the present application, fig. 9 is a schematic structural diagram of a partial top view of a diaphragm of the electronic cigarette sensing assembly provided in fig. 8, and fig. 10 is a schematic structural diagram of a partial top view of a substrate of the electronic cigarette sensing assembly provided in fig. 8.

As shown in fig. 8-10, an electronic cigarette sensing assembly according to an embodiment of the present application includes a substrate 100, a portion of the substrate 100 forms a fifth electrode 150, and the fifth electrode 150 has at least one third hollow area 103; the diaphragm 300 is located on one side surface of the substrate 100, the diaphragm 300 includes an insulating layer 310 and a conductive layer 320 fixedly connected to the insulating layer 310, and in the thickness direction of the substrate 100, the conductive layer 320 is located on one side of the insulating layer 310 away from the substrate 100; at least one isolation structure 340, the isolation structure 340 penetrating the conductive layer 320 in a thickness direction to separate the conductive layer 320 into a center portion 31 and an edge portion 32 surrounding the center portion 31, the center portion 31 constituting a sixth electrode 326; wherein, in the thickness direction of the substrate 100, the projections of the fifth electrode 150 and the sixth electrode 326 overlap, and the substrate 100 further has at least one fourth hollow area 104, and the fourth hollow area 104 surrounds the fifth electrode 150 to form a back cavity, and the back cavity is communicated with the external environment of the electronic cigarette.

Further, in the technical solution of this embodiment, in consideration that an area where the deformation amount of the diaphragm 300 is large is often in the central area of the diaphragm 300, and in order to reduce the blocking influence on the blowing air flow caused by the occupation of the fifth electrode 150 of the substrate 100, at least one third hollowed-out area 103 is further disposed on the fifth electrode 150, so that the diaphragm 300 can be well affected by the blowing air flow in an area facing the fifth electrode 150 to generate a sufficient offset, and further, the sensitivity of the vibration sensitive area of the diaphragm 300 located directly above the fifth electrode 150 to the blowing air flow can be significantly improved. Simultaneously, this third fretwork area 103 with fourth fretwork area 104 cooperatees, can also be favorable to the circulation of air current in whole electron cigarette sensing component of blowing.

In this embodiment, a first supporting body 200 for supporting the diaphragm 300 is disposed on one side of the substrate 100 close to the diaphragm 300, and the first supporting body 200 is located at an edge of the substrate 100, so that the vibration sensitive area of the diaphragm 300 is suspended above the fifth electrode 150, and the fifth electrode 150 and the sixth electrode 326 form a variable capacitor.

The blowing load during normal operation and the blowing load during abnormal operation are both loaded to the diaphragm 300 through the back chamber. The first supporting body 200 is supported between the substrate 100 and the diaphragm 300, and is used for electrically isolating the diaphragm 300 from the substrate 100 and providing support for the diaphragm 300. The first support 200 is an insulating support, and may be, for example, silicon oxide or silicon nitride. The thickness of the first support 200 is between 2 to 3um, for example, around 2.5 um. The diaphragm 300 and the substrate 100 are disposed opposite to each other and spaced apart from each other, so that an oscillating acoustic cavity for the diaphragm 300 to vibrate is formed between the substrate 100 and the diaphragm 300.

Preferably, the at least one fourth hollow region 104 is an annular back cavity, so that the space of the annular back cavity is large enough to reduce the surface vibration of the diaphragm 300 caused by the reflected wave, thereby improving the sensitivity and accuracy of the detection of the electrical signal of the electronic cigarette sensing assembly.

Specifically, in the present embodiment, the insulating layer 310 may be SiN _X A film layer, the conductive layer 320 may be a polysilicon layer, and the insulating layer 310 is used for supporting and fixing the conductive layer 320; the isolation structure 340 includes an isolation trench having a width ranging from 0.1 μm to 50 μm, and the bottom of the isolation trench is located on the surface of the insulating layer 310 to expose a portion of the insulating layer 310, although the embodiment of the present invention is not limited thereto, and those skilled in the art can perform other arrangements on the isolation structure as needed, for example, filling the isolation trench with an insulating material.

As shown in fig. 9, the conductive layer 320 of the diaphragm 300 is divided into a center portion 31 and an edge portion 32 by the isolation structure 340, wherein the center portion 31 includes: a central region 31a, a pad region 31b, and a connection region 31c, where the central region 31a and the pad region 31b are connected by the connection region 31c, and a projection of the central region 31a overlaps with projections of the fourth and third

hollow regions

104 and 103 in a thickness direction of the substrate 100. In the embodiment of the present application, the diaphragm 300 is fixed in a peripheral fixed-support manner, so that the deformation capability of the middle portion of the diaphragm 300 is greater than that of the edge portion, and in the actual use process, the portion of the central area 31a of the conductive layer 320 opposite to the fifth electrode 150 is the effective capacitance area (sensitivity contribution area), so that the effective capacitance area of the central portion 31 is separated from the ineffective capacitance area of the edge portion 32 by the isolation structure 340, which not only can reduce the parasitic capacitance, but also improves the capacitance variation of the effective capacitance area, thereby achieving the effect of improving the product sensitivity.

As shown in fig. 10, the substrate 100 further includes: a second supporting portion 141, and at least one second beam 142, where the at least one second beam 142 fixedly connects the fifth electrode 150 with the second supporting portion 141, and at least one of the at least one second beam 142 is made of a conductive medium, so as to transmit an electrical signal between the fifth electrode 150 and an external circuit (not shown).

Illustratively, the second supporting portion 141 is located at an edge region of the substrate 100, and the second supporting portion 141 supports the diaphragm 300 and the respective conductive electrodes, etc. Specifically, in a direction perpendicular to the plane of the substrate 100, a first support 200 is disposed on one side surface of the second support portion 141 to support the diaphragm 300.

Illustratively, in some embodiments of the present application, a region of the substrate 100 where the fifth electrode 150 is located is made of a conductive material, and a region of the substrate 100 other than the fifth electrode 150 is made of a non-conductive material, and a conductive film layer, such as electroplated copper, may be formed above the at least one second beam 142 to implement an external circuit to apply a voltage signal to the fifth electrode 150.

Illustratively, in other embodiments of the present application, the substrate 100 is a semiconductor substrate, and the substrate 100 includes a semiconductor material layer, which may be doped such that at least a portion of the semiconductor material layer has a conductive property for preparing the fifth electrode 150. Specifically, the region of the substrate 100 where the fifth electrode 150 is located may be doped in a semiconductor material layer to form an N-type dopant or a P-type hetero-body, and at least one of the regions of the substrate 100 where the at least one second beam 142 is located may be doped in the semiconductor material layer to form the N-type dopant or the P-type hetero-body, so as to enable an external circuit to apply a voltage signal to the fifth electrode 150.

Further, the diaphragm 300 further includes at least one air hole 330a, and the at least one air hole 330a is disposed at an edge of the vibration sensitive area of the diaphragm 300 and is communicated with the back cavity. At least one gas pocket 330a is as the balanced hole of atmospheric pressure, can adjust the load of blowing on vibrating diaphragm 300 on the one hand, prevents the broken phenomenon of membrane, and on the other hand, in the electron cigarette sensing assembly of electron cigarette, can prevent that the tobacco tar from blockking up the self-starting phenomenon behind the PCB board through-hole in the use to the life-span of extension product. Illustratively, the at least one air hole 330a may have a structure in which the number of the grooves having a size of 0.3 μm to 2 μm is 1 to 6.

Further, the electronic cigarette sensing assembly further comprises: fifth and sixth pads 55 and 56; a third opening 43 is formed in the diaphragm 300 and penetrates through the diaphragm 300 and the first support 200 in the thickness direction to expose a portion of the conductive electrode on the substrate 100, wherein the fifth pad 55 is located in the third opening 43 and electrically connected to the fifth electrode 150; the sixth pad 56 is electrically connected to the sixth electrode 326. Preferably, the sixth pad 56 may be disposed on the pad region 31b in direct contact.

In the present embodiment, in order to avoid the diaphragm 300 from contacting the fifth electrode 150 of the substrate 100 when vibrating, a third anti-sticking structure 313 is provided on a side of the vibration sensitive area of the diaphragm 300 facing the substrate 100; in the thickness direction of the substrate 100, the projection of the third anti-sticking structure 313 is located within the projection range of the fifth electrode 150. The third adhesion structures 313 may be in various forms, such as dots or stripes. The embodiment of the utility model provides a do not limit to this. The third adhesion structure 313 is made of an insulating material, such as SiNx or SiOx, to prevent the diaphragm 300 from touching and shorting with the fifth electrode 150 of the substrate 100 after being deformed.

Furthermore, at least one fourth hollow area surrounds the fifth electrode, so that the volume of the back cavity is increased, the surface vibration of the diaphragm caused by reflected waves is reduced, and the sensitivity and the accuracy of electric signal detection of the electronic cigarette sensing assembly are improved.

At least one embodiment of the present application further provides an electronic cigarette comprising an electronic cigarette sensing assembly as described in any of the above embodiments.

In the embodiments of the present application, unless otherwise specified or conflicting with respect to logic, terms or descriptions in different embodiments have consistency and may be mutually cited, and technical features in different embodiments may be combined to form a new embodiment according to their inherent logic relationship. In this application, "at least one" means one or more, "a plurality" means two or more.

It is to be understood that the various numerical references referred to in the embodiments of the present application are merely for descriptive convenience and are not intended to limit the scope of the embodiments of the present application. The sequence numbers of the above-mentioned processes do not mean the execution sequence, and the execution sequence of the processes should be determined by their functions and inherent logic.

The microphone assembly provided in the embodiments of the present application is described in detail above, and the principles and embodiments of the present application are described herein by applying specific examples, and the description of the above embodiments is only used to help understanding the microphone assembly and its core idea of the present application; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

Claims

1. An electronic cigarette sensing assembly, comprising:

a substrate, a partial region of which constitutes a first electrode;

the vibrating diaphragm is positioned on the surface of one side of the substrate and comprises an insulating layer and a conducting layer fixedly connected with the insulating layer, and the conducting layer is positioned on one side, far away from the substrate, of the insulating layer in the thickness direction of the substrate;

an isolation structure penetrating the conductive layer in a thickness direction to partition the conductive layer into a central portion constituting a second electrode and an edge portion surrounding the central portion;

wherein the substrate has at least one first hollowed-out area surrounding the first electrode to form a back cavity, the back cavity is communicated with an external environment of the electronic cigarette, and projections of the first electrode and the second electrode are overlapped in a thickness direction of the substrate.

2. The electronic cigarette sensing assembly of claim 1,

the isolation structure includes an isolation trench.

3. The electronic cigarette sensing assembly of claim 1,

one side of the substrate, which is close to the vibrating diaphragm, is provided with a first supporting body for supporting the vibrating diaphragm, and the first supporting body is positioned at the edge of the substrate, so that the vibrating diaphragm is suspended above the first electrode, and the first electrode and the second electrode form a variable capacitor.

4. The electronic cigarette sensing assembly of claim 3, wherein the substrate further comprises:

the first support part is used for supporting the first support part,

at least one first beam fixedly connecting the second electrode with the first support.

5. The electronic cigarette sensing assembly of claim 4,

at least one of the at least one first beam includes a conductive medium to transmit electrical signals between the second electrode and an external circuit.

6. The electronic cigarette sensing assembly of claim 1, wherein the diaphragm further comprises:

at least one air hole, the at least one air hole sets up in the edge of the vibration sensitive area of vibrating diaphragm.

7. The electronic cigarette sensing assembly of claim 3, further comprising:

a first pad and a second pad;

a first opening penetrating through the diaphragm and the first support body in the thickness direction is formed in the diaphragm to expose a part of the conductive electrode on the substrate, wherein the first bonding pad is located in the first opening and is electrically connected with the first electrode;

the second pad is electrically connected to the second electrode.

8. The electronic cigarette sensing assembly of claim 1,

a first anti-sticking structure is arranged on one side, facing the substrate, of the insulating layer;

wherein a projection of the first release structure is located within a projection range of the first electrode in a thickness direction of the substrate.

9. The electronic cigarette sensing assembly of claim 8,

the first anti-sticking structure and the insulating layer are integrally formed.

10. An electronic cigarette sensing assembly, comprising:

a substrate, wherein a partial region of the substrate constitutes a third electrode;

an isolation structure penetrating the conductive layer in a thickness direction to partition the conductive layer into a central portion constituting a fourth electrode and an edge portion surrounding the central portion;

the third electrode is provided with at least one second hollow-out area, the at least one second hollow-out area forms a back cavity, the back cavity is communicated with the external environment of the electronic cigarette, and the projections of the third electrode and the fourth electrode are overlapped in the thickness direction of the substrate.

11. The electronic cigarette sensing assembly of claim 10, wherein the isolation structure comprises an isolation slot.

12. The electronic cigarette sensing assembly of claim 10,

one side of the substrate, which is close to the vibrating diaphragm, is provided with a first supporting body for supporting the vibrating diaphragm, and the first supporting body is positioned at the edge of the substrate, so that the vibrating diaphragm is suspended above the third electrode, and the third electrode and the fourth electrode form a variable capacitor.

13. The electronic cigarette sensing assembly of claim 12, wherein the diaphragm further comprises:

and the air holes are arranged in the middle of the vibrating diaphragm.

14. The electronic cigarette sensing assembly of claim 12, further comprising:

a third pad and a fourth pad;

a second opening penetrating through the diaphragm and the first support body in the thickness direction is formed in the diaphragm to expose a part of the conductive electrode on the substrate, wherein the third bonding pad is located in the second opening and is electrically connected with the third electrode;

the fourth pad is electrically connected to the fourth electrode.

15. The electronic cigarette sensing assembly of claim 10,

a second anti-sticking structure is arranged on one side, facing the substrate, of the insulating layer;

wherein a projection of the second anti-adhesive structure is located within a projection range of the third electrode in a thickness direction of the substrate.

16. The electronic cigarette sensing assembly of claim 15,

the second anti-sticking structure and the insulating layer are integrally formed.

17. An electronic cigarette sensing assembly, comprising:

the partial area of the substrate forms a fifth electrode, and the fifth electrode is provided with at least one third hollow area;

at least one isolation structure penetrating the conductive layer in a thickness direction to divide the conductive layer into a central portion constituting a sixth electrode and an edge portion surrounding the central portion;

wherein, in the thickness direction of the substrate, the projections of the fifth electrode and the sixth electrode are overlapped, and the substrate further has at least one fourth hollowed-out area which surrounds the fifth electrode to form a back cavity which is communicated with the external environment of the electronic cigarette.

18. The electronic cigarette sensing assembly of claim 17, wherein the isolation structure comprises an isolation slot.

19. The electronic cigarette sensing assembly of claim 17,

one side of the substrate, which is close to the vibrating diaphragm, is provided with a first supporting body for supporting the vibrating diaphragm, and the first supporting body is positioned at the edge of the substrate, so that the vibrating diaphragm is suspended above the fifth electrode, and the fifth electrode and the sixth electrode form a variable capacitor.

20. The electronic cigarette sensing assembly of claim 19, wherein the substrate further comprises:

a second supporting part for supporting the first supporting part,

at least one second beam fixedly connecting the sixth electrode with the second support portion.

21. The electronic cigarette sensing assembly of claim 20,

at least one of the at least one second beam includes a conductive medium to transmit electrical signals between the sixth electrode and an external circuit.

22. The electronic cigarette sensing assembly of claim 17, wherein the diaphragm further comprises:

23. The electronic cigarette sensing assembly of claim 19, further comprising:

a fifth pad and a sixth pad;

a third opening penetrating through the diaphragm and the first support body in the thickness direction is formed in the diaphragm to expose a part of the conductive electrode on the substrate, wherein the fifth pad is located in the third opening and is electrically connected with the fifth electrode;

the sixth pad is electrically connected to the sixth electrode.

24. The electronic cigarette sensing assembly of claim 17,

a third anti-sticking structure is arranged on one side of the insulating layer facing the substrate;

wherein, in the thickness direction of the substrate, the projection of the third anti-sticking structure is located within the projection range of the fifth electrode.

25. The electronic cigarette sensing assembly of claim 24,

the third bonding structure and the insulating layer are integrally formed.

26. An electronic cigarette comprising the electronic cigarette sensing assembly of any one of claims 1-25.