CN115778002B - Electronic cigarette sensing assembly, preparation method and electronic cigarette - Google Patents
Electronic cigarette sensing assembly, preparation method and electronic cigarette Download PDFInfo
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- CN115778002B CN115778002B CN202310012115.1A CN202310012115A CN115778002B CN 115778002 B CN115778002 B CN 115778002B CN 202310012115 A CN202310012115 A CN 202310012115A CN 115778002 B CN115778002 B CN 115778002B
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Abstract
The invention provides an electronic cigarette sensing assembly, a preparation method and an electronic cigarette, wherein the electronic cigarette sensing assembly comprises a vibrating diaphragm and a substrate, the vibrating diaphragm comprises an insulating layer and a conducting layer fixedly connected with the insulating layer, the conducting layer comprises a first electrode area and a second electrode area which are mutually isolated, the first electrode area forms a first electrode, and the second electrode area forms a second electrode; and a part of the area of the substrate forms a third electrode, wherein the third electrode is overlapped with the projections of the first electrode and the second electrode respectively in the thickness direction of the substrate, so that the third electrode, the first electrode and the second electrode respectively form two capacitance structures. The technical scheme provided by the invention realizes the scheme of two capacitor structures of a single substrate, and is beneficial to simplifying the manufacturing process of the electronic cigarette sensing component.
Description
Technical Field
The invention relates to the technical field of sensing, in particular to an electronic cigarette sensing assembly, a preparation method and an electronic cigarette.
Background
As shown in fig. 1, in the conventional electronic cigarette sensing assembly, one electrical lead-out element 61' is electrically connected to the diaphragm 300', and the other electrical lead-out element 51' is electrically connected to the back plate 400', so as to form two opposite capacitor plates, and in order to electrically connect one electrical lead-out element 61' to the diaphragm 300', a through hole needs to be formed in a silicon oxide film layer between the two capacitor plates so as to expose a part of the surface of the diaphragm 300', and this electrode lead-out method not only increases the patterning process of the electronic cigarette sensing assembly, but also increases the manufacturing cost.
Accordingly, improvements in the art are needed.
Disclosure of Invention
The invention aims to at least solve one of the technical problems in the prior art and provides an electronic cigarette sensing assembly, a preparation method and an electronic cigarette.
The invention adopts the following technical scheme:
according to an aspect of the present invention, there is provided an electronic cigarette sensing assembly comprising: the vibrating diaphragm comprises an insulating layer and a conductive layer fixedly connected with the insulating layer, wherein the conductive layer comprises a first electrode area and a second electrode area which are isolated from each other, the first electrode area forms a first electrode, and the second electrode area forms a second electrode; the substrate is provided with a first surface which is in contact with the insulating layer and supports the insulating layer, a concave part is arranged on the first surface of the substrate, a cavity is formed between the surface of the concave part and one side surface of the insulating layer facing the first surface, the substrate is provided with at least one first hollowed-out area penetrating through the bottom surface of the concave part and the second surface of the substrate in the thickness direction, the at least one first hollowed-out area is communicated with the cavity to form a back cavity, a part of area of the substrate forms a third electrode, and the second surface is opposite to the first surface; wherein the third electrode overlaps projections of the first electrode and the second electrode, respectively, in a thickness direction of the substrate.
Further, the diaphragm includes: and an isolation structure penetrating through the conductive layer in a thickness direction to separate the conductive layer into the first electrode region and the second electrode region.
Optionally, the isolation structure comprises an isolation trench.
Further, the substrate comprises a conductive medium, and the third electrode is a floating electrode; the first electrode and the third electrode form a first variable capacitance, and the second electrode and the third electrode form a second variable capacitance.
Further, the first variable capacitor and the second variable capacitor are connected in series.
Further, the method comprises the steps of: a first pad electrically connected to the first electrode; a second pad electrically connected to the second electrode; wherein, first pad and the second pad all set up the conducting layer be away from the side of insulating layer.
Optionally, the third electrode surrounds the at least one first hollowed-out area.
Further, in the case that the diaphragm is not deformed, an effective area of the first variable capacitor formed by the first electrode region and an effective area of the second variable capacitor formed by the second electrode region are equal.
Further, a side of the insulating layer facing the first surface of the substrate is provided with a first anti-sticking structure; in the thickness direction of the substrate, the projection of the first anti-sticking structure is positioned in the projection range of the third electrode.
Further, the first anti-sticking structure and the insulating layer are integrally formed.
Optionally, the at least one first hollowed-out area surrounds the third electrode.
Further, in the case that the diaphragm is not deformed, an effective area of the first variable capacitor formed by the first electrode region and an effective area of the second variable capacitor formed by the second electrode region are equal.
Further, a second anti-sticking structure is arranged on one side, facing the first surface, of the insulating layer, and the projection of the second anti-sticking structure is located in the projection range of the third electrode in the thickness direction of the substrate.
Further, the second anti-sticking structure is integrally formed with the insulating layer.
According to still another aspect of the present invention, there is also provided a method for manufacturing an electronic cigarette sensing assembly, the method including:
providing a substrate, wherein the substrate comprises a first surface and a second surface which are oppositely arranged, a concave part is formed on the first surface of the substrate, and a part of area of the substrate forms a third electrode;
Filling a sacrificial layer in the concave part, and enabling the surface of the sacrificial layer, which is exposed out of the concave part, to be flush with the rest of the first surface;
depositing an insulating layer on the sacrificial layer and on the remaining first surface of the substrate;
manufacturing a conductive layer on the insulating layer, and forming a first electrode area and a second electrode area which are mutually isolated on the conductive layer, wherein the first electrode area forms a first electrode, and the second electrode area forms a second electrode;
etching the substrate on the second surface of the substrate to form at least one first hollowed-out area penetrating through the second surface of the substrate and the bottom surface of the concave part in the thickness direction;
etching the sacrificial layer between the insulating layer and the substrate by a solution release method through the position of the at least one first hollowed-out area to form a cavity communicated with the at least one first hollowed-out area;
wherein the third electrode overlaps projections of the first electrode and the second electrode, respectively, in a thickness direction of the substrate.
Optionally, surrounding the third electrode with the at least one first hollowed-out area;
Or the third electrode surrounds the at least one first hollowed-out area.
Further, the fabricating a conductive layer on the insulating layer and forming a first electrode region and a second electrode region isolated from each other on the conductive layer includes: and manufacturing an isolation structure penetrating through the conductive layer in the thickness direction on the conductive layer so as to form a first electrode region and a second electrode region which are isolated from each other on the conductive layer.
Further, after the conductive layer is formed on the insulating layer and the first electrode region and the second electrode region isolated from each other are formed on the conductive layer, the method includes: manufacturing a first bonding pad and a second bonding pad on one side of the conductive layer far away from the insulating layer; the first bonding pad is electrically connected with the first electrode, and the second bonding pad is electrically connected with the second electrode.
Further, the method further comprises: and manufacturing an anti-sticking structure on the first surface of the insulating layer facing the substrate.
According to another aspect of the present invention, there is also provided an electronic cigarette including the electronic cigarette sensing assembly according to any of the embodiments described above.
The electronic cigarette sensing component provided by the invention can realize the scheme of two capacitance structures of a single substrate, and is beneficial to simplifying the manufacturing process of the electronic cigarette sensing component.
Further, the third electrode is a floating electrode, one of the first electrode and the second electrode is electrically connected to an anode potential, and the other electrode is electrically connected to a cathode potential, so that the first variable capacitor and the second variable capacitor form two capacitor structures connected in series to commonly sense an incoming air pressure signal passing through the at least one hollowed-out area. The manufacturing process steps of graphically manufacturing the through holes for accommodating the electrode lead-out circuits are reduced, the manufacturing cost is saved, and the first electrode and the second electrode can be respectively electrically led out on the same conductive layer, so that the subsequent packaging lead bonding process is facilitated.
Further, in the case that the diaphragm is not deformed, an effective area of the first variable capacitor formed by the first electrode region and an effective area of the second variable capacitor formed by the second electrode region are equal. Therefore, the sensitivity of the electronic cigarette sensing component can be kept unchanged from that of the electronic cigarette sensing component with the whole-surface vibrating diaphragm structure in the prior art.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments will be briefly described below, it being obvious that the drawings in the following description are only some embodiments of the present application, and that other embodiments may be obtained according to these drawings without inventive effort to a person skilled in the art.
Fig. 1 is a schematic diagram of a structure of electrode extraction of an e-cigarette sensing assembly provided according to the prior art.
Fig. 2 is a schematic structural diagram of an electronic cigarette sensing component according to an embodiment of the invention.
Fig. 3A is a schematic top view of a diaphragm of the electronic cigarette sensing device provided in fig. 2.
Fig. 3B is a schematic top view of a diaphragm of the electronic cigarette sensing assembly provided in fig. 2.
Fig. 3C is a schematic top view of a diaphragm of the electronic cigarette sensing device provided in fig. 2.
Fig. 4A is a schematic top view of a substrate of the electronic cigarette sensing assembly provided in fig. 2.
Fig. 4B is a schematic top view of a substrate of the e-cigarette sensing assembly provided in fig. 2.
Fig. 4C is another schematic top view of the substrate of the e-cigarette sensing assembly provided in fig. 2.
Fig. 5 is a schematic structural diagram of a vibrating diaphragm with an anti-sticking structure in the electronic cigarette sensing assembly provided in fig. 2.
Fig. 6 is a schematic structural diagram of an electronic cigarette sensing component according to a second embodiment of the present invention.
Fig. 7 is a schematic top view of a diaphragm of the electronic cigarette sensing assembly provided in fig. 6.
Fig. 8A is a schematic top view of a substrate of the e-cigarette sensing assembly provided in fig. 6.
Fig. 8B is a schematic top view of a substrate of the e-cigarette sensing assembly provided in fig. 6.
Fig. 8C is another schematic top view of the substrate of the e-cigarette sensing assembly provided in fig. 6.
Fig. 9 is a schematic structural diagram of a diaphragm in the electronic cigarette sensing assembly provided in fig. 6 with an anti-sticking structure.
Fig. 10A is a circuit diagram corresponding to the electronic cigarette sensing component provided in fig. 1.
Fig. 10B is a circuit diagram corresponding to the electronic cigarette sensing component provided in fig. 2 and 6.
Fig. 11 is a flowchart of a method for manufacturing an electronic cigarette sensing component according to an embodiment of the present invention.
Detailed Description
The foregoing description is only an overview of the present invention, and is intended to be implemented in accordance with the teachings of the present invention, as well as the preferred embodiments thereof, together with the following detailed description of the invention, given by way of illustration only, together with the accompanying drawings.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically connected, electrically connected or can be communicated with each other; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art according to the specific circumstances.
The electronic cigarette sensing component provided by the embodiment of the invention comprises: the vibrating diaphragm comprises an insulating layer and a conductive layer fixedly connected with the insulating layer, wherein the conductive layer comprises a first electrode area and a second electrode area which are isolated from each other, the first electrode area forms a first electrode, and the second electrode area forms a second electrode; the substrate is provided with a first surface which is in contact with the insulating layer and supports the insulating layer, a concave part is arranged on the first surface of the substrate, a cavity is formed between the surface of the concave part and one side surface of the insulating layer facing the first surface, the substrate is provided with at least one first hollowed-out area penetrating through the bottom surface of the concave part and the second surface of the substrate in the thickness direction, the at least one first hollowed-out area is communicated with the cavity to form a back cavity, a part of area of the substrate forms a third electrode, and the second surface is opposite to the first surface; wherein the third electrode overlaps projections of the first electrode and the second electrode, respectively, in a thickness direction of the substrate.
By adopting the technical scheme provided by the embodiment of the invention, the conductive layer on the vibrating diaphragm is divided into the first electrode area and the second electrode area which are isolated from each other, the first electrode area forms the first electrode, the second electrode area forms the second electrode, the partial area of the substrate forms the third electrode, and in the thickness direction of the substrate, the third electrode is overlapped with the projections of the first electrode and the second electrode respectively, so that the third electrode, the first electrode and the second electrode form two capacitance structures respectively.
When gas is introduced into the electronic cigarette sensing assembly, the gas is introduced into the at least one first hollow area of the substrate, then the gas acts on the vibrating diaphragm through a cavity communicated with the at least one hollow area, the vibrating diaphragm deforms in a direction away from the substrate, so that the distance between the vibrating diaphragm and the substrate becomes large, and at the moment, the first electrode and the second electrode on the vibrating diaphragm respectively generate corresponding electric signals to sense the introduced air pressure signal passing through the at least one hollow area.
The electronic cigarette sensing assembly, the preparation method and the electronic cigarette in the invention are described in detail below with reference to the accompanying drawings and the specific embodiments.
Example 1
Fig. 2 is a schematic structural view of an electronic cigarette sensing assembly according to an embodiment of the present invention, fig. 3A is a schematic structural view of a vibrating diaphragm of the electronic cigarette sensing assembly provided in fig. 2, fig. 3B is a schematic structural view of a vibrating diaphragm of the electronic cigarette sensing assembly provided in fig. 2, fig. 3C is a schematic structural view of a vibrating diaphragm of the electronic cigarette sensing assembly provided in fig. 2, fig. 4A is a schematic structural view of a substrate of the electronic cigarette sensing assembly provided in fig. 2, fig. 4B is a schematic structural view of a substrate of the electronic cigarette sensing assembly provided in fig. 2, and fig. 4C is a schematic structural view of a substrate of the electronic cigarette sensing assembly provided in fig. 2.
As shown in fig. 2, an embodiment of the present invention provides an electronic cigarette sensing assembly, which includes a diaphragm 300 and a substrate 100; the diaphragm 300 includes an insulating layer 310 and a conductive layer 320 fixedly connected to the insulating layer 310, the conductive layer 320 includes a first electrode region and a second electrode region isolated from each other, the first electrode region forms a first electrode 321, and the second electrode region forms a second electrode 322; the substrate 100 has a first surface 100a contacting the insulating layer 310 and supporting the insulating layer 310, the substrate 100 is provided with a recess 121 on the first surface 100a, a cavity 120 is formed between the surface of the recess 121 and a side surface of the insulating layer 310 facing the first surface 100a, the substrate 100 has at least one first hollowed-out area 101 penetrating through the bottom surface of the recess 121 and a second surface 100b of the substrate 100 in a thickness direction, the at least one first hollowed-out area 101 is communicated with the cavity 120 to form a back cavity, a partial area of the substrate 100 forms a third electrode 110, and the second surface 100b is opposite to the first surface 100 a; wherein the third electrode 110 overlaps projections of the first electrode 321 and the second electrode 322, respectively, in a thickness direction of the substrate 100.
Further, the diaphragm 300 includes: and an isolation structure penetrating the conductive layer 320 in a thickness direction to separate the conductive layer 320 into the first electrode region and the second electrode region.
Specifically, in this embodiment, the isolation structure includes the isolation trench 330, where the width of the isolation trench 330 ranges from 0.1 μm to 50 μm, and the bottom of the isolation trench 330 is located on the surface of the insulating layer 310 to expose a portion of the insulating layer 310, which is not limited thereto, and those skilled in the art may perform other arrangements on the isolation structure as required, for example, fill the isolation trench 330 with an insulating material.
In the present embodiment, the isolation groove 330 has various planar shapes. For example, as shown in fig. 3A-3C, the isolation groove 330 may be a rectangular groove, an arc groove, an S-groove, or a combination of a rectangular groove and an arc groove.
Illustratively, in this embodiment, the material of the insulating layer 310 includes silicon oxide or silicon nitride. The effective area of the diaphragm 300 is circular or rectangular, that is, the effective area of the conductive layer 320 of the diaphragm 300 is circular or rectangular.
Further, in the embodiment of the present invention, the substrate 100 includes a conductive medium, and the third electrode 110 is a floating electrode, which is not grounded and is a floating potential, and can be used as an intermediate medium between the first electrode 321 and the second electrode 322. The first electrode 321 forms a first variable capacitance with the third electrode 110, the second electrode 322 forms a second variable capacitance with the third electrode 110, and the third electrode 110 may serve as a connection point between the first variable capacitance and the second variable capacitance.
Illustratively, in some embodiments of the present invention, the area of the third electrode 110 of the substrate 100 is made of a conductive material, and the area of the substrate 100 other than the third electrode 110 is made of a non-conductive material, for example, a conductive film layer, such as electroplated copper, may be formed on the area of the third electrode 110, so as to achieve that the potential of the third electrode 110 is a floating potential.
Illustratively, in other embodiments of the present invention, the substrate 100 is a semiconductor substrate, and the substrate 100 includes a layer of semiconductor material that may be doped such that at least a portion of the layer of semiconductor material has conductive properties for preparing the third electrode 110. Specifically, the region of the substrate 100 where the third electrode 110 is located may be doped in the semiconductor material layer to form an N-type doped body or a P-type doped body, so as to realize that the potential of the third electrode 110 is a floating potential.
Specifically, one of the first electrode 321 and the second electrode 322 is electrically connected to the positive potential, and the other electrode is electrically connected to the negative potential, so that the first variable capacitor and the second variable capacitor form two capacitor structures connected in series to commonly sense the incoming air pressure signal passing through the at least one hollowed-out area 101. Since the third electrode 110 is at a floating potential, only the electrode lead-out circuits need to be respectively arranged on the first electrode 321 and the second electrode 322 of the diaphragm 300 for the first variable capacitor and the second variable capacitor, and the electrode lead-out circuits do not need to be respectively arranged on the diaphragm 300 and the substrate 100 at the same time, so that a through hole for accommodating the electrode lead-out circuits does not need to be arranged on the diaphragm 300 for electrode lead-out of the third electrode 110 of the substrate 100. Therefore, not only the steps of manufacturing the through hole for accommodating the electrode lead-out circuit by patterning are reduced, and the manufacturing cost is saved, but also the first electrode 321 and the second electrode 322 can be electrically led out on the same conductive layer 320 due to the arrangement mode that the first electrode 321 and the second electrode 322 are positioned on the same film layer, so that the subsequent packaging lead bonding process is also facilitated.
Further, the electronic cigarette sensing assembly includes a first pad 51 and a second pad 61; the first pad 51 is electrically connected to the first electrode 321, so as to lead out an electrical signal of the first variable capacitor; the second pad 61 is electrically connected to the second electrode 322, for extracting an electrical signal of the second variable capacitor; the first pad 51 and the second pad 61 are both disposed on a side of the conductive layer 320 remote from the insulating layer 310. By adopting the design, the manufacturing process of the electrode lead-out circuit of the electronic cigarette sensing component provided by the embodiment of the invention is simpler.
Alternatively, the first pad 51 is electrically connected to a positive potential, and the second pad 61 is electrically connected to a negative potential; or the first pad 51 is electrically connected to a negative potential and the second pad 61 is electrically connected to a positive potential.
In this embodiment, as shown in fig. 4A-4C, the third electrode 110 is disposed around the at least one first hollow area 101, and the at least one first hollow area 101 is communicated with the cavity 120 to form a back cavity. After the gas is introduced into the electronic cigarette sensing component, the gas is introduced into the at least one first hollow area 101 of the substrate 100, then acts on the diaphragm 300 through the cavity 120, the diaphragm 300 deforms towards a direction away from the substrate 100, so that the distance between the diaphragm 300 and the substrate 100 is increased, and at the moment, the first electrode 321 and the second electrode 322 both generate corresponding electrical signals.
Illustratively, as shown in fig. 4A, the substrate 100 is provided with a recess 121 on the first surface 100a, and a projection shape of the recess 121 on the substrate 100 is rectangular. In the thickness direction of the substrate 100, the projection area of the recess 121 forms a third electrode 110, the at least one first hollow area 101 includes a first hollow area, and is located in the central area of the recess 121, and the third electrode 110 is disposed around the first hollow area 101.
Illustratively, as shown in fig. 4B, the difference from fig. 4A is that the at least one first hollowed-out area 101 includes a plurality of first hollowed-out areas, wherein, in addition to the one first hollowed-out area 101 located in the central area of the recess 121, a plurality of first hollowed-out areas 101 are provided on the third electrode 110, and illustratively, the number of the plurality of first hollowed-out areas 101 may be 2, 3, 4 or more. In this embodiment, the plurality of first hollowed-out areas 101 are communicated with the cavity formed by the concave portion 121 to form a back cavity, so that the space of the back cavity is sufficiently large to reduce the surface vibration of the diaphragm 300 caused by the reflected wave, thereby improving the sensitivity and accuracy of the detection of the electric signal of the electronic smoke sensing component.
Illustratively, as shown in fig. 4C, the difference from fig. 4A and 4B is that the substrate 100 is provided with a recess 121 on the first surface 100a, and the projection shape of the recess 121 on the substrate 100 is circular or annular. In the thickness direction of the substrate 100, the projection area of the recess 121 forms a third electrode 110, and the at least one first hollow area 101 includes a plurality of first hollow areas, wherein the plurality of first hollow areas 101 are disposed on the third electrode 110 in addition to the one first hollow area 101 located in the central area of the recess 121, and the number of the plurality of first hollow areas 101 may be 2, 3, 4 or more, for example.
Further, in the case where the diaphragm 300 is not deformed, the effective area of the first variable capacitor formed by the first electrode region and the effective area of the second variable capacitor formed by the second electrode region are equal. So that the area of the first electrode region facing the third electrode 110 of the substrate 100 and the area of the second electrode region facing the third electrode 110 of the substrate 100 are equal, thereby equalizing the initial capacitances of the first and second variable capacitances.
Preferably, in the embodiment of the present invention, the shape and size of the first electrode 321 and the second electrode 322 are the same.
With continued reference to fig. 3A-3C, the first electrode 321 and the second electrode 322 have a central symmetrical structure with respect to the isolation groove 330, so that the effective area of the first variable capacitor formed by the first electrode 321 is equal to the effective area of the second variable capacitor formed by the second electrode 322.
Specifically, in the present embodiment, the thicknesses of the first electrode 321 and the second electrode 322 are the same, so that the first pad 51 and the second pad 61 are located on the same horizontal plane, which is advantageous for the subsequent package wire bonding process. The first bonding pad 51 and the second bonding pad 61 can be made of the same conductive material and have the same thickness, so that the first bonding pad 51 and the second bonding pad 61 can be manufactured by the same mask process, the process flow for manufacturing the first bonding pad 51 and the second bonding pad 61 is simplified, and the manufacturing cost is reduced more effectively.
As can be seen from fig. 1 and 10A, in the prior art, when the diaphragm 300' is not deformed, the initial capacitance of the capacitance structure C formed by the back plate 400' and the diaphragm 300' is C 0 When the diaphragm 300' is deformed, if the capacitance change amount caused by the deformation is fatly C 0 The sensitivity of the capacitive structure C is then obtained as: c (V) 0 /C 0 。
As can be seen from fig. 2 and 10B, in the present embodiment, the first electrode 321 and the third electrode 110 form a first variable capacitor C1, the second electrode 322 and the third electrode 110 form a second variable capacitor C2, and the first variable capacitor C1 and the second variable capacitor C2 form a series circuit. In order to facilitate the explanation of the sensitivity of the electronic cigarette sensing device formed by the series connection of the first variable capacitor C1 and the second variable capacitor C2 in the present embodiment, when the diaphragm 300 is not deformed, the total capacitance value of the series circuit formed by the first variable capacitor C1 and the second variable capacitor C2 is set to be C 0 (same as the initial capacitance of the capacitance structure C in FIG. 10A), the initial capacitance of the first variable capacitance C1 and the second variable capacitance are equal due to the equal effective area of the first variable capacitance formed by the first electrode region and the effective area of the second variable capacitance formed by the second electrode regionThe initial capacitance of the variable capacitor C2 is C respectively 0 /2. When the diaphragm 300 is deformed, if the deformation causes the total capacitance to change to father C 0 Then the capacitance variation on the first and second variable capacitors C1 and C2 are father C, respectively 0 Therefore, the sensitivity of the series circuit formed by the first variable capacitor C1 and the second variable capacitor C2 is:
it can be seen that, in the present embodiment, the diaphragm is divided into the first electrode region and the second electrode region that are isolated from each other, and the first electrode region, the second electrode region and the third electrode of the substrate form the first variable capacitor C1 and the second variable capacitor C2, respectively, and the sensitivity of the series circuit formed by the first variable capacitor C1 and the second variable capacitor C2 is the same as that of the capacitor structure of the electronic smoke sensing assembly in the background art.
Fig. 5 is a schematic structural diagram of a vibrating diaphragm with an anti-sticking structure in the electronic cigarette sensing assembly provided in fig. 2.
As shown in fig. 5, in the present embodiment, in order to avoid the diaphragm 300 from contacting the third electrode 110 (or the bottom of the recess 121) of the substrate 100 when vibrating, a first anti-sticking structure 311 is provided on a side of the insulating layer 310 facing the first surface 100a of the substrate 100; the projection of the first anti-sticking structure 311 is located within the projection range of the third electrode 110 in the thickness direction of the substrate 100. The first release structure 311 may take a variety of forms, and may be, for example, dot-shaped or stripe-shaped. The embodiments of the present invention are not limited in this regard.
Further, to save manufacturing process steps, the first anti-adhesion structure 311 is integrally formed with the insulating layer 310; at this time, the material of the first anti-sticking structure 311 is the same as that of the insulating layer 310.
Example two
Fig. 6 is a schematic structural diagram of an electronic cigarette sensing component according to a second embodiment of the present invention, fig. 7 is a schematic structural diagram of a further top view of a diaphragm of the electronic cigarette sensing component provided in fig. 6, fig. 8A is a schematic structural diagram of a substrate of the electronic cigarette sensing component provided in fig. 6, fig. 8B is a schematic structural diagram of a further top view of a substrate of the electronic cigarette sensing component provided in fig. 6, and fig. 8C is a schematic structural diagram of a further top view of a substrate of the electronic cigarette sensing component provided in fig. 6.
As shown in fig. 6, the difference between the electronic cigarette sensing component provided in the second embodiment and the electronic cigarette sensing component provided in the first embodiment is that: in the second embodiment, the at least one first hollowed-out area 101 surrounds the third electrode 110. That is, the at least one first hollow area 101 is formed to surround the periphery of the third electrode 110, and the at least one first hollow area 101 is communicated with the cavity 120 formed by the recess 121 to form an annular back cavity, which can increase the volume of the back cavity, so as to reduce the surface vibration of the diaphragm 300 caused by the reflected wave, thereby improving the sensitivity and accuracy of the detection of the electric signal of the electronic cigarette sensing component. And can make the electron cigarette sense subassembly when falling or when applying big air current of blowing and passing through annular back of body chamber, adjust damping on the vibrating diaphragm 300, prevent fragile vibrating diaphragm 300 and receive the damage because of the vibration amplitude is too big to can improve the signal to noise ratio of electron cigarette sense subassembly, strengthen the performance of electron cigarette sense subassembly. In addition, since the diaphragm 300 located directly above the annular back cavity can be directly impacted by the blowing air flow with a larger area, the deformation amount generated in the area is relatively larger, and the deformation amount generated by the diaphragm 300 located directly above the third electrode 110 is relatively smaller, so that the problem of adhesion between the diaphragm 300 and the third electrode 110 can be reduced.
Illustratively, as shown in fig. 8A, the substrate 100 is provided with a recess 121 on the first surface 100a, and a projection shape of the recess 121 on the substrate 100 is rectangular. In the thickness direction of the substrate 100, a projected partial area of the recess 121 forms a third electrode 110, for example, a central area of the recess 121 forms the third electrode 110, the at least one first hollowed-out area 101 includes a first hollowed-out area, and the first hollowed-out area 101 is disposed around the third electrode 110.
Illustratively, as shown in fig. 8B, the difference from fig. 8A is that the at least one first hollowed-out area 101 includes a plurality of first hollowed-out areas, wherein, in addition to the one first hollowed-out area 101 located in the central area of the recess 121, a plurality of first hollowed-out areas 101 are provided at the periphery of the recess 121, and illustratively, the number of the plurality of first hollowed-out areas 101 may be 2, 3, 4 or more. In this embodiment, the plurality of first hollowed-out areas 101 are communicated with the cavity formed by the recess 121 to form a back cavity, so that the space of the back cavity is further made to be large enough to reduce the surface vibration of the diaphragm 300 caused by the reflected wave, thereby improving the sensitivity and accuracy of the detection of the electrical signal of the electronic smoke sensing component.
Illustratively, as shown in fig. 8C, the difference from fig. 8A is that the substrate 100 is provided with a recess 121 on the first surface 100a, and the projection shape of the recess 121 on the substrate 100 is circular or annular. In the thickness direction of the substrate 100, a projected partial area of the recess 121 forms a third electrode 110, for example, a central area of the recess 121 forms the third electrode 110, the at least one first hollowed-out area 101 includes a first hollowed-out area, and the first hollowed-out area 101 is disposed around the third electrode 110.
Further, in the case where the diaphragm 300 is not deformed, the effective area of the first variable capacitor formed by the first electrode region and the effective area of the second variable capacitor formed by the second electrode region are equal. So that the area of the first electrode region facing the third electrode 110 of the substrate 100 and the area of the second electrode region facing the third electrode 110 of the substrate 100 are equal, thereby equalizing the initial capacitances of the first and second variable capacitances.
In this embodiment, the first electrode 321 and the second electrode 322 are identical in shape and size.
As shown in fig. 7, the isolation groove 330 has an S-shaped groove in a plan view, and the first electrode 321 and the second electrode 322 have a center-symmetrical structure with respect to the isolation groove 330 such that an effective area of the first variable capacitor composed of the first electrode 321 and an effective area of the second variable capacitor composed of the second electrode 322 are equal.
Specifically, in the present embodiment, the thicknesses of the first electrode 321 and the second electrode 322 are the same, so that the first pad 51 and the second pad 61 are located on the same horizontal plane, which is advantageous for the subsequent package wire bonding process. The first bonding pad 51 and the second bonding pad 61 can be made of the same conductive material and have the same thickness, so that the first bonding pad 51 and the second bonding pad 61 can be manufactured by the same mask process, the process flow for manufacturing the first bonding pad 51 and the second bonding pad 61 is simplified, and the manufacturing cost is reduced more effectively.
As can be seen from fig. 1 and 10A, in the prior art, when the diaphragm 300' is not deformed, the initial capacitance of the capacitance structure C formed by the back plate 400' and the diaphragm 300' is C 0 When the diaphragm 300' is deformed, if the capacitance change amount caused by the deformation is fatly C 0 The sensitivity of the capacitive structure C is then obtained as: c (V) 0 /C 0 。
As can be seen from fig. 2 and 10B, in the present embodiment, the first electrode 321 and the third electrode 110 form a first variable capacitor C1, the second electrode 322 and the third electrode 110 form a second variable capacitor C2, and the first variable capacitor C1 and the second variable capacitor C2 form a series circuit. In order to facilitate the explanation of the sensitivity of the electronic cigarette sensing device formed by the series connection of the first variable capacitor C1 and the second variable capacitor C2 in the present embodiment, when the diaphragm 300 is not deformed, the total capacitance value of the series circuit formed by the first variable capacitor C1 and the second variable capacitor C2 is set to be C 0 (same as the initial capacitance of the capacitance structure C in FIG. 10A), the initial capacitance of the first variable capacitance C1 and the second variable capacitance C2 are equal due to the equal effective area of the first variable capacitance formed by the first electrode region and the effective area of the second variable capacitance formed by the second electrode regionThe initial capacitance is C 0 /2. When the diaphragm 300 is deformed, if the deformation causes the total capacitance to change to father C 0 Then the capacitance variation on the first and second variable capacitors C1 and C2 are father C, respectively 0 Therefore, the sensitivity of the series circuit formed by the first variable capacitor C1 and the second variable capacitor C2 is:
It can be seen that, in the present embodiment, the diaphragm is divided into the first electrode region and the second electrode region that are isolated from each other, and the first electrode region, the second electrode region and the third electrode of the substrate form the first variable capacitor C1 and the second variable capacitor C2, respectively, and the sensitivity of the series circuit formed by the first variable capacitor C1 and the second variable capacitor C2 is the same as that of the capacitor structure of the electronic smoke sensing assembly in the background art.
Fig. 9 is a schematic structural diagram of a diaphragm in the electronic cigarette sensing assembly provided in fig. 6 with an anti-sticking structure.
As shown in fig. 9, in the present embodiment, in order to avoid the diaphragm 300 from contacting the third electrode 110 (or the bottom of the recess 121) of the substrate 100 when vibrating, a second anti-sticking structure 312 is provided on a side of the insulating layer 310 facing the first surface 100a of the substrate 100; the projection of the second release structure 312 is located within the projection range of the third electrode 110 in the thickness direction of the substrate 100. The second release structure 312 may take a variety of forms, and may be, for example, dot-shaped or stripe-shaped. The embodiments of the present invention are not limited in this regard.
Further, to save manufacturing process steps, the second anti-adhesion structure 312 is integrally formed with the insulating layer 310; at this time, the material of the second anti-sticking structure 312 is the same as that of the insulating layer 310.
According to still another aspect of the present invention, a method for manufacturing an electronic cigarette sensing assembly is provided.
Fig. 11 is a flowchart of a method for manufacturing an electronic cigarette sensing component according to an embodiment of the present invention.
As shown in fig. 11, the method comprises the steps of:
step S10, providing a substrate, wherein the substrate comprises a first surface and a second surface which are oppositely arranged, a concave part is formed on the first surface of the substrate, and a part of area of the substrate forms a third electrode;
step S20, filling a sacrificial layer in the concave part, and enabling the surface of the sacrificial layer, which is exposed out of the concave part, to be flush with the rest of the first surface;
step S30, depositing an insulating layer on the sacrificial layer and the rest of the first surface of the substrate;
step S40, manufacturing a conductive layer on the insulating layer, and forming a first electrode area and a second electrode area which are isolated from each other on the conductive layer, wherein the first electrode area forms a first electrode, and the second electrode area forms a second electrode;
Step S50, etching the substrate on the second surface of the substrate to form at least one first hollowed-out area penetrating through the second surface of the substrate and the bottom surface of the concave part in the thickness direction;
step S60, etching the sacrificial layer between the insulating layer and the substrate by a solution release method through the position of the at least one first hollowed-out area to form a cavity communicated with the at least one first hollowed-out area;
wherein the third electrode overlaps projections of the first electrode and the second electrode, respectively, in a thickness direction of the substrate.
Further, as shown in fig. 2 and 6, the substrate 100 includes a conductive medium, and the third electrode 110 is a floating electrode, which is not grounded, and is a floating potential, and can be used as an intermediate medium between the first electrode 321 and the second electrode 322. The first electrode 321 forms a first variable capacitance with the third electrode 110, the second electrode 322 forms a second variable capacitance with the third electrode 110, and the third electrode 110 may serve as a connection point between the first variable capacitance and the second variable capacitance.
Illustratively, in some embodiments of the present invention, the area of the third electrode 110 of the substrate 100 is made of a conductive material, and the area of the substrate 100 other than the third electrode 110 is made of a non-conductive material, for example, a conductive film layer, such as electroplated copper, may be formed on the area of the third electrode 110, so as to achieve that the potential of the third electrode 110 is a floating potential.
Illustratively, in other embodiments of the present invention, the substrate 100 is a semiconductor substrate, and the substrate 100 includes a layer of semiconductor material that may be doped such that at least a portion of the layer of semiconductor material has conductive properties for preparing the third electrode 110. Specifically, the region of the substrate 100 where the third electrode 110 is located may be doped in the semiconductor material layer to form an N-type doped body or a P-type doped body, so as to realize that the potential of the third electrode 110 is a floating potential.
Optionally, as shown in fig. 2, the at least one first hollowed-out area 101 surrounds the third electrode 110; or as shown in fig. 6, the third electrode 110 surrounds the at least one first hollowed-out area 101.
Further, the fabricating a conductive layer on the insulating layer and forming a first electrode region and a second electrode region isolated from each other on the conductive layer includes: and manufacturing an isolation structure penetrating through the conductive layer in the thickness direction on the conductive layer so as to form a first electrode region and a second electrode region which are isolated from each other on the conductive layer.
Specifically, as shown in fig. 3A, 3B, 3C, and 7, the isolation structure includes an isolation trench 330, the width of the isolation trench 330 ranges from 0.1 μm to 50 μm, the bottom of the isolation trench 330 is located on the surface of the insulating layer 310 to expose a part of the insulating layer 310, and of course, the embodiment of the invention is not limited thereto, and those skilled in the art may perform other arrangements on the isolation structure as required, for example, filling the isolation trench 330 with an insulating material.
In the present embodiment, the isolation groove 330 has various planar shapes. As shown in fig. 3A, 3B, 3C, and 7, the isolation groove 330 may be a rectangular groove, an S-groove, an arc-groove, or a combination of a rectangular groove and an arc-groove.
Further, after the conductive layer is formed on the insulating layer and the first electrode region and the second electrode region isolated from each other are formed on the conductive layer, the method includes: manufacturing a first bonding pad and a second bonding pad on one side of the conductive layer far away from the insulating layer; the first bonding pad is electrically connected with the first electrode, and the second bonding pad is electrically connected with the second electrode.
Specifically, in the present embodiment, the thicknesses of the first electrode 321 and the second electrode 322 are the same, so that the first pad 51 and the second pad 61 are located on the same horizontal plane, which is advantageous for the subsequent package wire bonding process. The first bonding pad 51 and the second bonding pad 61 can be made of the same conductive material and have the same thickness, so that the first bonding pad 51 and the second bonding pad 61 can be manufactured by the same mask process, the process flow for manufacturing the first bonding pad 51 and the second bonding pad 61 is simplified, and the manufacturing cost is reduced more effectively.
Further, the method further comprises: and manufacturing an anti-sticking structure on the first surface of the insulating layer facing the substrate.
Further, in order to save manufacturing process steps, the anti-sticking structure and the insulating layer are integrally formed; at this time, the material of the anti-sticking structure is the same as that of the insulating layer.
Specifically, after filling a sacrificial layer in the concave portion and enabling the surface of the sacrificial layer, which is exposed out of the concave portion, to be flush with the rest of the first surface, etching the sacrificial layer to form a plurality of grooves, and then depositing an insulating layer on the sacrificial layer and the rest of the first surface of the substrate, wherein the insulating layer is filled in the grooves to form an anti-sticking structure.
The invention also provides an electronic cigarette comprising the electronic cigarette sensing assembly according to any embodiment.
Therefore, by adopting the electronic cigarette sensing assembly, the manufacturing method and the electronic cigarette provided by the embodiment of the invention, the conductive layer on the vibrating diaphragm is divided into the first electrode area and the second electrode area which are isolated from each other, the first electrode area forms the first electrode, the second electrode area forms the second electrode, the partial area of the substrate forms the third electrode, and in the thickness direction of the substrate, the third electrode is overlapped with the projections of the first electrode and the second electrode respectively, so that the third electrode, the first electrode and the second electrode respectively form two capacitance structures. The technical scheme provided by the invention can realize the scheme of two capacitor structures of a single substrate, and is beneficial to simplifying the manufacturing process of the electronic cigarette sensing component.
Further, the third electrode is a floating electrode, one of the first electrode and the second electrode is electrically connected to an anode potential, and the other electrode is electrically connected to a cathode potential, so that the first variable capacitor and the second variable capacitor form two capacitor structures connected in series to commonly sense an incoming air pressure signal passing through the at least one hollowed-out area. The manufacturing process steps of graphically manufacturing the through holes for accommodating the electrode lead-out circuits are reduced, the manufacturing cost is saved, and the first electrode and the second electrode can be respectively electrically led out on the same conductive layer, so that the subsequent packaging lead bonding process is facilitated.
Further, in the case that the diaphragm is not deformed, an effective area of the first variable capacitor formed by the first electrode region and an effective area of the second variable capacitor formed by the second electrode region are equal. Therefore, the sensitivity of the electronic cigarette sensing component can be kept unchanged from that of the electronic cigarette sensing component with the whole-surface vibrating diaphragm structure in the prior art.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and are not limiting; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present invention.
Claims (18)
1. An electronic cigarette sensing assembly, comprising:
the vibrating diaphragm comprises an insulating layer and a conductive layer fixedly connected with the insulating layer, wherein the conductive layer comprises a first electrode area and a second electrode area which are isolated from each other, the first electrode area forms a first electrode, and the second electrode area forms a second electrode;
the substrate is provided with a first surface which is in contact with the insulating layer and supports the insulating layer, a concave part is arranged on the first surface of the substrate, a cavity is formed between the surface of the concave part and one side surface of the insulating layer facing the first surface, the substrate is provided with at least one first hollowed-out area penetrating through the bottom surface of the concave part and the second surface of the substrate in the thickness direction, the at least one first hollowed-out area is communicated with the cavity to form a back cavity, a part of area of the substrate forms a third electrode, and the second surface is opposite to the first surface;
wherein, in the thickness direction of the substrate, the third electrode overlaps with projections of the first electrode and the second electrode, respectively;
the substrate comprises a conductive medium, the third electrode is a floating electrode, one electrode of the first electrode and the second electrode is electrically connected to positive electrode potential, and the other electrode is electrically connected to negative electrode potential; the first electrode and the third electrode form a first variable capacitance, and the second electrode and the third electrode form a second variable capacitance;
The first variable capacitor and the second variable capacitor are connected in series.
2. The electronic smoke sensing assembly of claim 1, wherein the diaphragm comprises:
and an isolation structure penetrating through the conductive layer in a thickness direction to separate the conductive layer into the first electrode region and the second electrode region.
3. The electronic smoke sensing assembly of claim 2 wherein,
the isolation structure includes an isolation trench.
4. The electronic smoke sensing assembly of claim 1, comprising:
a first pad electrically connected to the first electrode;
a second pad electrically connected to the second electrode;
wherein, first pad and the second pad all set up the conducting layer be away from the side of insulating layer.
5. The electronic smoke sensing assembly of claim 4 wherein,
the third electrode surrounds the at least one first hollowed-out area.
6. The electronic smoke sensing assembly of claim 5 wherein,
and under the condition that the vibrating diaphragm is not deformed, the effective area of the first variable capacitor formed by the first electrode area is equal to the effective area of the second variable capacitor formed by the second electrode area.
7. The electronic smoke sensing assembly of claim 6 wherein,
a first anti-sticking structure is arranged on one side of the insulating layer facing the first surface of the substrate;
in the thickness direction of the substrate, the projection of the first anti-sticking structure is positioned in the projection range of the third electrode.
8. The electronic smoke sensing assembly of claim 7,
the first anti-sticking structure and the insulating layer are integrally formed.
9. The electronic smoke sensing assembly of claim 4 wherein,
the at least one first hollowed-out area surrounds the third electrode.
10. The electronic smoke sensing assembly of claim 9 wherein,
and under the condition that the vibrating diaphragm is not deformed, the effective area of the first variable capacitor formed by the first electrode area is equal to the effective area of the second variable capacitor formed by the second electrode area.
11. The electronic smoke sensing assembly of claim 10 wherein,
a second anti-sticking structure is arranged on one side of the insulating layer facing the first surface;
in the thickness direction of the substrate, the projection of the second anti-sticking structure is positioned in the projection range of the third electrode.
12. The electronic smoke sensing assembly of claim 11 wherein,
the second anti-sticking structure and the insulating layer are integrally formed.
13. A method of manufacturing an electronic cigarette sensing assembly, the method comprising:
providing a substrate, wherein the substrate comprises a first surface and a second surface which are oppositely arranged, a concave part is formed on the first surface of the substrate, and a part of area of the substrate forms a third electrode;
filling a sacrificial layer in the concave part, and enabling the surface of the sacrificial layer, which is exposed out of the concave part, to be flush with the rest of the first surface;
depositing an insulating layer on the sacrificial layer and on the remaining first surface of the substrate;
manufacturing a conductive layer on the insulating layer, and forming a first electrode area and a second electrode area which are mutually isolated on the conductive layer, wherein the first electrode area forms a first electrode, and the second electrode area forms a second electrode;
etching the substrate on the second surface of the substrate to form at least one first hollowed-out area penetrating through the second surface of the substrate and the bottom surface of the concave part in the thickness direction;
Etching the sacrificial layer between the insulating layer and the substrate by a solution release method through the position of the at least one first hollowed-out area to form a cavity communicated with the at least one first hollowed-out area;
wherein the third electrode overlaps projections of the first electrode and the second electrode, respectively, in a thickness direction of the substrate.
14. The method of manufacturing an e-cigarette sensing assembly of claim 13,
surrounding the third electrode by the at least one first hollowed-out area; or alternatively
And surrounding the third electrode to the at least one first hollowed-out area.
15. The method of claim 13, wherein forming a conductive layer on the insulating layer and forming a first electrode region and a second electrode region on the conductive layer that are isolated from each other comprises:
and manufacturing an isolation structure penetrating through the conductive layer in the thickness direction on the conductive layer so as to form a first electrode region and a second electrode region which are isolated from each other on the conductive layer.
16. The method of claim 15, wherein after forming a conductive layer on the insulating layer and forming a first electrode region and a second electrode region isolated from each other on the conductive layer, the method comprises:
Manufacturing a first bonding pad and a second bonding pad on one side of the conductive layer far away from the insulating layer;
the first bonding pad is electrically connected with the first electrode, and the second bonding pad is electrically connected with the second electrode.
17. The method of manufacturing an e-cigarette sensing assembly of claim 13, wherein the method comprises:
and manufacturing an anti-sticking structure on the first surface of the insulating layer facing the substrate.
18. An electronic cigarette comprising an electronic cigarette sensing assembly according to any one of claims 1 to 12.
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| CN101867860B (en) * | 2010-06-11 | 2012-12-12 | 中国科学院声学研究所 | Condenser microphone having split electrodes |
| CN105776124A (en) * | 2014-12-24 | 2016-07-20 | 中芯国际集成电路制造(上海)有限公司 | MEMS device and preparation method thereof, and electronic device |
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| CN213754953U (en) * | 2020-09-28 | 2021-07-20 | 苏州敏芯微电子技术股份有限公司 | Micro-electromechanical structure, electronic cigarette switch and electronic cigarette |
| CN112188374A (en) * | 2020-09-29 | 2021-01-05 | 歌尔微电子有限公司 | MEMS microphone chip, manufacturing method of chip module and electronic equipment |
| CN216019107U (en) * | 2021-09-22 | 2022-03-15 | 通用微(深圳)科技有限公司 | Electricity structure, electron cigarette switch and electron cigarette |
| CN114520947B (en) * | 2022-04-20 | 2022-07-08 | 苏州敏芯微电子技术股份有限公司 | Microphone assembly and electronic equipment |
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