CN218677088U

CN218677088U - Special manipulator for grabbing and conveying bicrystal round flower basket

Info

Publication number: CN218677088U
Application number: CN202222457409.9U
Authority: CN
Inventors: 郑耀敦; 施先众; 赵艳; 钟红海
Original assignee: Guangdong Fanlin Equipment Technology Co ltd
Current assignee: Guangdong Fanlin Equipment Technology Co ltd
Priority date: 2022-09-16
Filing date: 2022-09-16
Publication date: 2023-03-21
Anticipated expiration: 2032-09-16

Abstract

The utility model discloses a special manipulator for grabbing and transmitting a bicrystal wafer basket, which comprises a top stretching cylinder, a rotary connecting block, a rotary rod and a clamping arm, wherein the top stretching end of the top stretching cylinder is fixedly connected with the rotary connecting block, the rotary connecting block drives the rotary rod to rotate, and the clamping arm for grabbing the bicrystal wafer basket is arranged at the end part of the rotary rod; the quantity of rotary rod is two, two the rotary rod is located same horizontal plane parallel arrangement, two the tip of rotary rod all is provided with the centre gripping arm. The utility model has the advantages that: the manipulator special for grabbing and transmitting the bicrystal wafer basket adopts one cylinder to drive two rotary rods to rotate, thereby realizing the synchronous operation of the clamping arms and preventing the wafer basket from falling to cause unnecessary loss in the clamping process; the operation is flexible, the structure is simple, and the jacking device is positioned in the seal box and can avoid contacting with corrosive substances, so that the service life of the device is prolonged.

Description

Special manipulator for grabbing and conveying bicrystal round flower basket

Technical Field

The utility model belongs to the technical field of the semiconductor product processing, concretely relates to bicrystal circle basket of flowers snatchs transmission special manipulator.

Background

For the semiconductor industry, the twin-wafer baskets mainly play a role in placing and conveying wafers in the semiconductor production, minimize the risk of contamination for more efficient transportation and simplification of the basket loading process, and reduce the heavy and expensive PFA outer baskets. Chip manufacturers utilize wafer baskets to transport and store wafers, and transport the wafer baskets in semiconductor wet cleaning machines is generally completed by using a manipulator which is the most direct execution structure for grabbing actions, and common manipulators comprise an electric cam clamping mechanism, a hydraulic clamping mechanism, a cylinder clamping mechanism, a mechanical sliding table mechanism and the like.

For example, in the above structure, the two cylinders are adopted to drive the clamp to clamp the wafer basket, so that the acting forces applied to the article by the two cylinders cannot be equal, and the clamped wafer basket may be damaged or broken due to the fact that one side of the clamped wafer basket is subjected to a large force; and the two clamp heads which cannot be used for synchronously clamping lead to the risk of falling the basket due to the fact that the clamp heads turn over to the other side or are not firmly clamped, so that the wafer is polluted and damaged, and unnecessary loss is caused.

SUMMERY OF THE UTILITY MODEL

The main aim at of this application provides one kind and adopts the cylinder to connect synchronous centre gripping technique, reduces the bicrystal circle basket of flowers that falls blue risk and snatchs the special manipulator of transmission.

In order to achieve the above object, the present invention provides the following technical solutions:

a manipulator special for grabbing and transmitting a bicrystal wafer basket comprises a jacking cylinder, a rotary connecting block, a rotary rod and a clamping arm, wherein the jacking end of the jacking cylinder is fixedly connected with the rotary connecting block, the rotary connecting block drives the rotary rod to rotate, and the end part of the rotary rod is provided with the clamping arm for grabbing the bicrystal wafer basket;

the quantity of rotary rod is two, two the rotary rod is located same horizontal plane parallel arrangement, two the tip of rotary rod all is provided with the centre gripping arm.

Use this application during twin-wafer basket of flowers snatchs transmission special purpose machinery hand, the top stretches the cylinder top and stretches the motion that drives swivelling joint piece about stretching the end, and swivelling joint piece drives two synchronous circumferential direction of rotary rod to the corresponding centre gripping arm opposite direction of drive rotates, makes the centre gripping arm realize the centre gripping and loosen the action, realizes promptly that snatching or putting down twin-wafer basket of flowers.

As an optimal implementation scheme, the cross section of the rotary connecting block is Z-shaped, and the central part of the rotary connecting block is fixedly connected with the top extending end of the top extending cylinder.

As a preferred embodiment, the rotating connecting block drives the rotating rods to rotate through two shifting plates, one end of each of the two shifting plates is respectively connected to two ends of the rotating connecting block in a sliding manner, and the other end of each of the two shifting plates is respectively fixedly connected with the two rotating rods;

the rotary connecting block is positioned above the rotary rod.

As a preferred embodiment, the end of the poking plate is provided with a through hole, and the end of the rotating connecting block is slidably connected in the through hole and slides along the length direction of the through hole.

Preferably, the through hole is formed along the length direction of the poking plate, and the length of the through hole along the length direction of the poking plate is 20-30mm.

The mechanical arm special for grabbing and transmitting the bicrystal round flower basket is a preferred embodiment and further comprises a box body, the top stretching cylinder, the rotary connecting block and the poking plate are all located in the box body, and the opposite end of the connecting end of the rotary rod and the poking plate extends out of the box body.

The top stretching cylinder is fixed on the bottom surface of the box body, the box body is arranged to seal the top stretching cylinder and the rotary connecting block, the top stretching cylinder and the rotary connecting block are prevented from being corroded in the using process, and the service life is prolonged.

Above-mentioned bicrystal circle basket of flowers snatchs transmission special manipulator, as an preferred embodiment, two the tip of rotary rod is equallyd divide and is provided with two centre gripping arms respectively, and is located two the centre gripping arm one-to-one of rotary rod sets up.

The clamping arms on the rotating rod are arranged in a one-to-one correspondence mode, and the two corresponding clamping arms can clamp the wafer flower basket.

Preferably, the clamping arm comprises a connecting plate and a clamping jaw, one end of the connecting plate is fixedly connected with the rotating rod, and the other end of the connecting plate is provided with the clamping jaw for clamping the crystal flower basket.

As a preferred embodiment, bearing blocks are symmetrically arranged on two corresponding side surfaces of the inner surface of the box body, and sealing rings are arranged at the contact parts of the bearing blocks and the box body;

one end of the rotating rod positioned in the box body is rotatably connected with one of the bearing seats, and the other end of the rotating rod penetrates through the other bearing seat to extend out of the box body.

The setting of bearing frame is convenient for the rotary rod pass the box body can the free rotation in the time, and sealed as far as possible between with the box, prevents that corrosive substance from getting into the box.

The utility model has the advantages that: twin-crystal circle basket of flowers snatchs transmission special purpose machine hand adopts a cylinder to drive two rotary rods and rotates to realize the synchronous operation of centre gripping arm, prevent that the wafer basket of flowers from getting the in-process and dropping and causing the unnecessary loss pressing from both sides.

Twin-crystal circle basket of flowers snatchs special manipulator of transmission operation flexibility, simple structure, and its top stretch the device and be located the seal box can avoid contacting with corrosive substance, has prolonged its life.

Drawings

Fig. 1 is a schematic structural view of a special robot for grabbing and conveying a double-wafer basket according to the present application;

in the figure: 1. a jacking cylinder; 2. rotating the connecting block; 3. rotating the rod; 4. a clamp arm; 5. a poking plate; 6. a through hole; 7. a box body; 8. a connecting plate; 9. a gripper jaw; 10. a bearing seat; 11. a seal ring; 12. and (5) blue-flower the wafer.

Detailed Description

In order to make the technical solutions in the embodiments of the present application better understood, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to examples, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In this application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.

Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.

A manipulator special for grabbing and transmitting a bicrystal wafer basket comprises a jacking cylinder 1, a rotary connecting block 2, a rotary rod 3 and a clamping arm 4, wherein the jacking end of the jacking cylinder 1 is fixedly connected with the rotary connecting block 2, the rotary connecting block 2 drives the rotary rod 3 to rotate, and the clamping arm 4 for grabbing a wafer basket 12 is arranged at the end part of the rotary rod 3;

the quantity of rotary rod 3 is two, two rotary rod 3 is located same horizontal plane parallel arrangement, two rotary rod 3's tip all is provided with centre gripping arm 4.

The shape of the cross section of the rotary connecting block 2 adopted by the embodiment is Z-shaped, the central part of the rotary connecting block 2 is fixedly connected with the top extending end of the top extending cylinder 1, and the top extending cylinder 1 moves up and down to drive the rotary connecting block 2 to rotate.

The method comprises the following specific steps: the rotary connecting block 2 drives the rotary rod 3 to rotate through the poking plate 5. The end of the poking plate 5 is provided with a through hole 6, the end of the rotary connecting block 2 is connected in the through hole 6 in a sliding mode and slides along the length direction of the through hole 6, the through hole 6 is arranged along the length direction of the poking plate 5, and the length of the through hole 6 along the length direction of the poking plate 5 can be 20mm, 25mm or 30mm. The other ends of the two poking plates 5 are respectively fixedly connected with the two rotating rods 3, and the rotating connecting block 2 is positioned above the rotating rods 3.

When the top extending end of the top extending cylinder 1 moves up and down, the rotary connecting block 2 can be driven to move up and down in a certain range, so that the poking plate 5 is driven to rotate, and under the acting force of the poking plate 5, the rotary rod 3 moves synchronously in the circumferential direction to grasp or put down the crystal basket.

For preventing in the use corrosives from causing the corruption to stretching cylinder 1 on the top, shorten its life, stretch cylinder 1 on the top, swivelling joint piece 2 with stir board 5 and all be located in the box 7, and rotary rod 3 with the looks remote site of stirring board 5 link extends box 7. In order to maintain the tightness of the box body 7, bearing seats 10 are symmetrically arranged on two corresponding side surfaces of the inner surface of the box body 7, and sealing rings 11 are arranged at the contact parts of the bearing seats 10 and the box body 7;

one end of the rotating rod 3 positioned in the box body 7 is rotatably connected with one of the bearing seats 10, and the other end of the rotating rod 3 passes through the other bearing seat 10 and extends out of the box body 7.

As a preferred embodiment, the end portions of the two rotating rods 3 are respectively provided with two clamping arms 4, and the clamping arms 4 located on the two rotating rods 3 are arranged in a one-to-one correspondence manner, so that the twin-crystal flower baskets 12 can be simultaneously grabbed.

In addition, the clamping arm 4 described in this embodiment includes a connecting plate 8 and a clamping claw 9, one end of the connecting plate 8 is fixedly connected with the rotating rod 3, and the other end of the connecting plate is provided with the clamping claw 9 for clamping the crystal basket.

The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and additions can be made without departing from the method of the present invention, and these improvements and additions should also be regarded as the protection scope of the present invention.

Claims

1. The manipulator special for grabbing and transmitting the bicrystal wafer flower basket is characterized by comprising a top extension cylinder, a rotary connecting block, a rotary rod and a clamping arm, wherein the top extension end of the top extension cylinder is fixedly connected with the rotary connecting block, the rotary connecting block drives the rotary rod to rotate, and the end part of the rotary rod is provided with the clamping arm for grabbing the bicrystal wafer flower basket;

the quantity of rotary rod is two, two the rotary rod is located same horizontal plane upper parallel arrangement, two the tip of rotary rod all is provided with the centre gripping arm.

2. The mechanical arm special for grabbing and conveying the bicrystal circular flower basket according to claim 1, wherein the cross section of the rotary connecting block is in a Z shape, and the central part of the rotary connecting block is fixedly connected with the top extending end of the top extending cylinder.

3. The manipulator special for grabbing and conveying the bicrystal round flower basket according to claim 2, wherein the rotary connecting block drives the rotary rods to rotate through two poking plates, one end of each of the two poking plates is slidably connected to two ends of the rotary connecting block, and the other end of each of the two poking plates is fixedly connected with the two rotary rods;

the rotary connecting block is positioned above the rotary rod.

4. The mechanical hand special for grabbing and conveying the bicrystal round flower basket according to claim 3, wherein the end of the poking plate is provided with a through hole, and the end of the rotating connecting block is slidably connected in the through hole and slides along the length direction of the through hole.

5. The manipulator special for grabbing and conveying the bicrystal round flower basket as claimed in claim 4, wherein the through hole is arranged along the length direction of the poking plate, and the length of the through hole along the length direction of the poking plate is 20-30mm.

6. The manipulator special for grabbing and conveying the bicrystal round flower basket according to claim 3, further comprising a box body, wherein the top-extending cylinder, the rotary connecting block and the poking plate are all located in the box body, and the opposite end of the connecting end of the rotary rod and the poking plate extends out of the box body.

7. The manipulator as claimed in claim 6, wherein the two ends of the two rotating rods are respectively provided with two clamping arms, and the clamping arms of the two rotating rods are arranged in a one-to-one correspondence manner.

8. The manipulator special for grabbing and conveying the bicrystal circular flower basket as claimed in claim 7, wherein the clamping arm comprises a connecting plate and a clamping claw, one end of the connecting plate is fixedly connected with the rotating rod, and the other end of the connecting plate is provided with the clamping claw for clamping the bicrystal circular flower basket.

9. The manipulator special for grabbing and conveying the bicrystal circular flower basket as claimed in claim 6, wherein bearing seats are symmetrically arranged on two corresponding side surfaces of the inner surface of the box body, and sealing rings are arranged at the contact parts of the bearing seats and the box body;