CN218666246U

CN218666246U - Intelligent high vacuum evaporation coating machine

Info

Publication number: CN218666246U
Application number: CN202223156916.5U
Authority: CN
Inventors: 吴科宁; 朱姝
Original assignee: Shenyang Shuoke Technology Co ltd
Current assignee: Shenyang Shuoke Technology Co ltd
Priority date: 2022-11-28
Filing date: 2022-11-28
Publication date: 2023-03-21
Anticipated expiration: 2032-11-28

Abstract

The utility model discloses an intelligent high vacuum evaporation coating machine relates to evaporation coating technical field. The utility model discloses a base station and base have been welded respectively to mount table and the coating film storehouse body, two surfaces about the mount table, and the coating film storehouse body lies in the upper surface of base station, and the mount table is inside including built-in storehouse, and the motor has been placed to built-in storehouse inside, and motor one end is including the motor shaft, and motor shaft one end is pegged graft and is had the rotation seat, rotates the welding of seat one end and has rotated the platform, rotates the inside upper surface of platform and has placed the evaporation boat, and the target has been placed to evaporation boat upper surface. This device rotates platform and the ejection of compact mouth of pipe through setting up, can put the substrate when using and place the bench, closes the encapsulation door and sets for the parameter through controlling the platform, starter motor and evaporation boat, and the evaporation boat heats the evaporation to the target, and the target molecule passes through the ejection of compact mouth of pipe and discharges to the cooperation is at the uniform velocity pivoted and is rotated the platform and can be guaranteed target evenly distributed on the surface of substrate, has improved the coating effect.

Description

Intelligent high vacuum evaporation coating machine

Technical Field

The utility model belongs to the technical field of the evaporation coating, especially, relate to an intelligent high vacuum evaporation coating machine.

Background

When carrying out vacuum evaporation coating, the target evaporation on the evaporation plant can be because the locating position of substrate influences and adheres to thickness, and then leads to the coating film not even enough, for solving above-mentioned problem existing design an intelligent high vacuum evaporation coating machine can effectual solution traditional vacuum evaporation coating equipment when evaporating target, can be because the locating position of substrate influences and adheres to thickness, and then lead to the not even problem of coating film enough.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an intelligent high vacuum evaporation coating machine solves traditional mesh plate desilting device and often formula structure as an organic whole, is difficult to maintain when local structural damage, leads to the higher problem of replacement cost.

In order to solve the technical problem, the utility model discloses a realize through following technical scheme:

the utility model relates to an intelligent high vacuum evaporation coating machine, including the mount table and the coating film storehouse body, base station and base have been welded respectively on two surfaces about the mount table, the coating film storehouse body is located the upper surface of base station, the mount table is inside including built-in storehouse, the inside motor of having placed in built-in storehouse, motor one end is including the motor shaft, it has the rotation seat to peg graft motor shaft one end, it has the rotation platform to rotate seat one end welding, the evaporation boat has been placed to the inside upper surface of rotation platform, the target has been placed to evaporation boat upper surface.

Furthermore, a plurality of discharging pipe openings are welded on the upper surface of the rotating table and communicated with the inside of the rotating table, a packaging door is installed on the surface of the coating bin body, an inner bin is arranged in the coating bin body, and the rotating table is located inside the inner bin.

Furthermore, the inner bin is welded with a placing table on the peripheral side, a substrate is placed on the upper surface of the placing table and located above the target, and the upper surface of the base table is electrically connected with the coating bin body and comprises a control table.

Further, the console upper surface is including input device and display screen, input device and display screen all with control platform electric connection.

The utility model discloses following beneficial effect has:

1. the utility model discloses a set up and rotate platform and ejection of compact mouth of pipe, can put the substrate when using and place the bench, close the encapsulation door and set for the parameter through controlling the platform, starter motor and evaporation boat, the evaporation boat heats the evaporation to the target, the target molecule is discharged through ejection of compact mouth of pipe to the cooperation is at the uniform velocity pivoted rotates the platform and can be guaranteed target evenly distributed on the surface of substrate, has improved the coating effect.

Of course, it is not necessary for any product to achieve all of the above advantages simultaneously in practicing the invention.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a front view of the present invention;

FIG. 3 is a right side view of the present invention;

FIG. 4 is a schematic view of the internal structure of the coating chamber of the present invention;

fig. 5 is a top view of the present invention.

In the drawings, the components represented by the respective reference numerals are listed below: 1. a base; 2. a base station; 3. a mounting seat; 4. a package door; 5. a film coating bin body; 6. a display screen; 7. an input device; 8. a console; 9. an inner bin; 10. a placing table; 11. a target material; 12. a rotating table; 13. a rotating seat; 14. a motor; 15. a built-in bin; 16. a motor shaft; 17. evaporating the boat; 18. a discharge pipe orifice; 19. a substrate.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "middle", "outer", "inner", "lower", and the like, indicate positional or positional relationships, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the referenced components or elements must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Please refer to fig. 1-5, the utility model relates to an intelligent high vacuum evaporation coating machine, including mount table 3 and coating film storehouse body 5, mount table 3 upper and lower two surfaces have welded base station 2 and base 1 respectively, coating film storehouse body 5 is located the upper surface of base station 2, mount table 3 is inside including built-in storehouse 15, motor 14 has been placed to built-in storehouse 15 inside, motor 14 one end is including motor shaft 16, 16 one end of motor shaft is pegged graft and is had rotating seat 13, rotating seat 13 one end welding has rotating platform 12, rotating platform 12 inside upper surface has placed evaporation boat 17, evaporation boat 17 upper surface has placed target 11, through setting up rotating platform 12 and ejection of compact mouth of pipe 18, this device is when using, place base 19 on placing platform 10, close encapsulation door 4 and set for the parameter through control platform 8, start motor 14 and evaporation boat 17, evaporation boat 17 heats evaporation target 11, the target molecule is discharged through ejection of compact mouth of pipe 18, and cooperation uniform velocity pivoted rotating platform 12 can guarantee that 11 evenly distributed is on the surface of base 19, the coating film effect has been improved.

The upper surface welding of the rotating table 12 has a plurality of discharging pipe orifices 18, the discharging pipe orifices 18 are communicated with the inside of the rotating table 12, a surface mounting of the coating cabin body 5 is provided with a packaging door 4, the inside of the coating cabin body 5 comprises an inner cabin 9, and the rotating table 12 is positioned inside the inner cabin 9.

The inner bin 9 is welded with a placing table 10 on the peripheral side, a substrate 19 is placed on the upper surface of the placing table 10, the substrate 19 is located above the target 11, the upper surface of the base table 2 comprises a control table 8, and the control table 8 is electrically connected with the film coating bin body 5.

The upper surface of the console 8 comprises an input device 7 and a display screen 6, and both the input device 7 and the display screen 6 are electrically connected with the console 8.

One specific application of this embodiment is: when the device is used, the substrate 19 is placed on the placing table 10, the packaging door 4 is closed, parameters are set through the control table 8, the motor 14 and the evaporation boat 17 are started, the evaporation boat 17 heats and evaporates the target 11, target molecules are discharged through the discharge pipe opening 18, the target 11 can be guaranteed to be uniformly distributed on the surface of the substrate 19 by matching with the rotating table 12 which rotates at a constant speed, the film coating effect is improved, and the model of the motor 14 is Y2.

In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the present invention disclosed above are intended to aid in the description of the invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, thereby enabling others skilled in the art to best understand the invention and its practical application. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. The utility model provides an intelligent high vacuum evaporation coating machine, includes mount table (3) and the coating film storehouse body (5), its characterized in that, base station (2) and base (1) have been welded respectively to mount table (3) upper and lower two surfaces, the coating film storehouse body (5) are located the upper surface of base station (2), mount table (3) are inside including built-in storehouse (15), motor (14) have been placed to built-in storehouse (15) inside, motor (14) one end is including motor shaft (16), motor shaft (16) one end is pegged graft and is had rotation seat (13), it has rotation platform (12) to rotate seat (13) one end welding, evaporation boat (17) have been placed to the inside upper surface of rotation platform (12), target (11) have been placed to evaporation boat (17) upper surface.

2. The intelligent high vacuum evaporation coating machine of claim 1, wherein: the upper surface of the rotating table (12) is welded with a plurality of discharging pipe orifices (18), and the discharging pipe orifices (18) are communicated with the inside of the rotating table (12).

3. The intelligent high vacuum evaporation coating machine of claim 1, wherein: a packaging door (4) is installed on one surface of the film coating bin body (5), an inner bin (9) is arranged inside the film coating bin body (5), and the rotating table (12) is located inside the inner bin (9).

4. An intelligent high vacuum evaporation coating machine as claimed in claim 3, characterized in that: the inner bin (9) is welded with a placing table (10) on the peripheral side face, a substrate (19) is placed on the upper surface of the placing table (10), and the substrate (19) is located above the target (11).

5. The intelligent high vacuum evaporation coating machine of claim 1, wherein: the upper surface of the base station (2) comprises a control platform (8), and the control platform (8) is electrically connected with the film coating cabin body (5).

6. The intelligent high vacuum evaporation coating machine of claim 5, wherein: the upper surface of the console (8) comprises an input device (7) and a display screen (6), and the input device (7) and the display screen (6) are electrically connected with the console (8).