CN108081436A - The method and apparatus that roller injection forming prepares oxide ceramics target - Google Patents
The method and apparatus that roller injection forming prepares oxide ceramics target Download PDFInfo
- Publication number
- CN108081436A CN108081436A CN201711292916.9A CN201711292916A CN108081436A CN 108081436 A CN108081436 A CN 108081436A CN 201711292916 A CN201711292916 A CN 201711292916A CN 108081436 A CN108081436 A CN 108081436A
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- China
- Prior art keywords
- injection forming
- oxide ceramics
- oxide
- cylindrical mold
- roller injection
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/20—Producing shaped prefabricated articles from the material by centrifugal or rotational casting
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- Compositions Of Oxide Ceramics (AREA)
Abstract
The invention discloses the method and apparatus that a kind of roller injection forming prepares oxide ceramics target.In this method, oxide slurry flowing is scattered on the inner wall of cylindrical mold, and oxide target material green body is formed in the rotation process of the cylindrical mold.It can be arranged in the rotation process of cylindrical mold, oxide slurry is progressed into cylindrical mold, and the cylindrical mold is by having the gypsum of strong water absorption character to make, and oxide slurry is low viscosity, the oxide slurry of good fluidity.The device includes columnar body and the sealing part for being arranged at body both ends, the opening of oxide slurry entrance is provided at least one sealing part, and sealing part is connected with body removable seal.Method is simple and practicable, and the high target material blank body of density can be prepared, and device is simple, and convenient for preparation manipulation, the optional scope of green body size that can be prepared is big, at low cost.
Description
Technical field
This practicality invention belongs to oxide ceramic material preparation field, and in particular to a kind of roller injection forming prepares oxidation
The method and apparatus of object ceramic target.
Background technology
Oxide ceramics target is mainly used in sputter coating into transparent conductive film (Transparent conductive
Oxide, abbreviation TCO).In recent years, with the development of liquid crystal display, touch panel, organic light emitting display, solar cell etc.,
So that transparent conductive film becomes one of key material.
At present, the preparation shaping of oxide tubulose target blankss is mainly made using the slurry of low solid volume content to spray
Grain, is then molded, isostatic pressing obtains crude green body with cylindrical die, is then processed into tubular target blankss on lathe again.And institute
The Mold Making used is complicated, not easy to operate, is not easy to prepare large scale green body target material blank body.
The content of the invention
In order at least solve one of technical problem existing in the prior art mentioned above, the invention discloses a kind of roller notes
Oxidation slurry flowing is scattered on the inner wall of cylindrical mold by the method that slurry shaping prepares oxide ceramics target, this method,
Oxide target material green body is formed in the rotation process of cylindrical mold.
As alternative embodiment of the present invention, roller injection forming is prepared in the method for oxide ceramics target, can be set
In the rotation process of cylindrical mold, oxide slurry is progressed into cylindrical mold, prepares oxide ceramics target base
Body.
As alternative embodiment of the present invention, roller injection forming is prepared in the method for oxide ceramics target, cylindrical shape mould
Tool can be set by having the gypsum of strong water absorption character to be prepared.
As alternative embodiment of the present invention, roller injection forming is prepared in the method for oxide ceramics target, oxide slurry
Material can select low viscosity, the oxide slurry of good fluidity.
Alternative embodiment is disclosed as the present invention, and roller injection forming is prepared in the method for oxide ceramics target, cylinder
The rotation process of shape mold could be provided as carrying out by shaft of its horizontally disposed central shaft.
Alternative embodiment is disclosed as the present invention, and roller injection forming is prepared in the method for oxide ceramics target, roller
Rotation process could be provided as uniform motion.
Alternative embodiment is disclosed as the present invention, and roller injection forming is prepared in the method for oxide ceramics target, cylinder
Shape mold is provided at both ends with dismountable sealing part.
Further, more preferred embodiment is disclosed as the present invention, roller injection forming prepares oxide ceramics target
In method, sealing part could be provided as the smooth circular plate in surface, for example, the material of plate is chosen as plastic-aluminum, macromolecule
Plastics, metal.
Alternative embodiment is disclosed as the present invention, and the method that oxide ceramics target is prepared as roller injection forming should
Method can also include process dry in constant-temperature constant-humidity environment after taking-up oxide target material green body from cylindrical mold.
Alternative embodiment is disclosed as the present invention, and roller injection forming is prepared in the method for oxide ceramics target, cylinder
The rotation of shape mold could be provided as speed as 80~180 hertz, the rotation process duration could be provided as 10~24 it is small when.
The invention also discloses the device that a kind of roller injection forming prepares oxide ceramics target, which can include
Columnar device body and the sealing part for being arranged at device body both ends are set on wherein at least one sealing part aerobic
The feed openings that compound slurry enters；Moreover, the sealing part is connected with described device body removable seal.
Further, more preferred embodiment is disclosed as the present invention, roller injection forming prepares oxide ceramics target
In device, cylinder-shaped device body includes the die assembly being prepared by water imbibition gypsum and the mould being arranged on outside die assembly
Has stiffener assembly.
The method that roller injection forming disclosed by the invention prepares oxide ceramics target is simple and practicable, can be prepared
The high target material blank body of density, device is simple, and convenient for preparation manipulation, the optional scope of green body size that can be prepared is big, at low cost.
Description of the drawings
Fig. 1 roller injection formings prepare the apparatus structure schematic diagram of oxide ceramics target
Reference numeral
1 device body, 11 mold stiffener assembly, 12 die assembly
2 perforate, 31 first sealing part, 32 second sealing part
4 rotation direction, 5 feed openings
Specific embodiment
Dedicated word " embodiment " herein, any embodiment illustrated by as " exemplary " should not necessarily be construed as being better than or
It is better than other embodiments.It is to be understood that the term described in the invention is only to describe special embodiment, not using
In limitation present disclosure.
Unless otherwise stated, technical and scientific terms used herein has the invention technical field
The normally understood identical meanings of those of ordinary skill.
In order to better illustrate the content of the invention, given in specific embodiment below numerous specific thin
Section.It will be appreciated by those skilled in the art that without some details, the invention can equally be implemented.In embodiment,
It is not retouched in detail for certain methods well known to those skilled in the art, means, instrument, equipment, raw material composition, molecular structure etc.
It states, in order to highlight the purport of the present invention.
The invention is understood in detail below in conjunction with attached drawing, is implemented convenient for relatively sharp description the invention
The technical solution of example.Fig. 1 forms structure diagram for preparation facilities disclosed by the embodiments of the present invention.
The method that roller injection forming disclosed by the invention prepares oxide ceramics target, utilizes oxide slurry itself
Mobile performance makes its flowing be scattered on the inner wall of cylindrical mold, oxide is formed in the rotation process of cylindrical mold
Target material blank body.In the rotation process of cylindrical mold, scattered oxide slurry is flowed further in gravity or other external force
Relative motion occurs for the lower inner wall with mold of effect, for example, mould inner wall is in the motion process in horizontal plane direction, because being used to
Property, the effect of frictional force etc., with mould inner wall relative motion occurs for oxide slurry, in the motion process of vertical direction, because
For the effect of inertia force, gravity and frictional force etc., with mould inner wall relative motion, many relative motions occur for oxide slurry
Oxide slurry further disperses in the process, is uniformly dispersed in die surface, oxide slurry layer is formed, in mold rotation process
In, the liquid component in oxide slurry is gradually separated with frozen composition, and oxide slurry layer is gradually fixed on die surface,
Ultimately form oxide ceramics green body.
In order to the thickness of control oxide ceramic body, can in the rotation process of cylindrical mold, gradually into
Material is injected oxide slurry in mold with certain speed, so as to which liquid and solid gradually divide in the rotation process of mold
It is gradually molded from, green body, it may finally be by controlling the quantity of the slurry into mold, control obtains required oxide pottery
Porcelain target material blank body.The method that oxide slurry injects mold, may be employed sample presentation method commonly employed in the art, as more excellent
The embodiment of choosing, the present invention is preferential to select the method for pressurization, for example, it is empty that compression is passed through in oxide slurry storing apparatus
Gas is sent into cylindrical mold using the pressure drop oxide slurry of compressed air, is needed at this time by slurry storing apparatus with sending
Expect that connecting line is tightly connected.
The separation of liquid and solid that the present invention addresses typically refers to consolidating based on oxide powder in oxide slurry
The separation process of the liquid components such as body component and solvent, dispersant, the process can be the volatilization of liquid component or liquid
The phase separation of body and powder, so liquid is disconnected from each other with ceramic body.
In order to promote the separation of liquid and solid in above-described oxide slurry, can select to use has water imbibition
The material preparation cylindrical mold of energy using the water absorbing properties of water-absorbing material by the liquid absorption in slurry, and then is realized and is somebody's turn to do
Separation process.For example, the usually used gypsum material with strong water absorbing properties can be selected, circle disclosed by the invention is made
Cylindrical mould, such as gypsum or even water absorption rate gypsum more than 48% of the optional water absorption rate more than 40%.
As the method that roller injection forming disclosed by the invention prepares oxide ceramics target, the selection of oxide slurry
And an important factor for prepared by target is influenced, for example, the mobility and dispersion performance of oxide slurry, select low viscosity, flowing
The good oxide slurry of property, is more advantageous to the dispersion flows of slurry, and then is conducive to the uniformity of target material blank body, preferably,
Oxide slurry can be handled with Selection utilization vacuum mechanical milling process, so obtained oxide slurry granularity is thinner, viscous
Smaller is spent, is more advantageous to preparing highdensity ceramic target.
Roller injection forming prepares the process of oxide ceramics target, make use of the mobile performance of oxide slurry itself,
So the rotation of cylindrical mold has a great impact to shape of oxide ceramics green body etc., central shaft is set in level side
It is rotated to for shaft, it is ensured that the inner wall surface of cylindrical mold is rotating lowest part always in horizontal state.
It may insure to obtain oxide ceramics green body in uniform thickness.If not in the horizontal direction, oxide slurry is in mold for central shaft
The interior flowing that can generate horizontal direction forms oxide ceramics green body in uneven thickness.If for example, shape in cylindrical mold
Into rule cylinder, central shaft in the horizontal plane when, oxide ceramics green body in uniform thickness can be obtained, if wherein
Mandrel is not in the horizontal plane, such as angle with horizontal plane is 10 degree, then will eventually get the inconsistent oxide ceramics base of wall thickness
Body, the angle of two sides of obtained cylindrical shape green body, it is likely that be exactly 10 degree.Alternatively, if mould inner wall forms circle
Platform shape can also then obtain ceramic body in uneven thickness.In uneven thickness in order to obtain or oxide in uniform thickness pottery
Porcelain billet body, the method for the relation control thickness of any mobility and mold rotation using slurry itself, in present inventive concept
Within the scope of.
Roller injection forming is prepared in the method for oxide ceramics target, and the rotating speed of roller also can generate shadow to target material blank body
It rings, for example, the rotating speed of variation may have an impact the shape of target material blank body and the uniformity of material, selection is set at the uniform velocity to transport
It is dynamic, be conducive to obtain the uniform target material blank body of regular shape.
Roller injection forming is prepared in the method for oxide ceramics target, in order to take out molding target material blank body, is needed
By die failure, if for example, value or the destruction of mold that mold does not reuse are more conducive to taking-up target
Green body, the then method that can select to destroy mold；Or dismountable structure is arranged to, for example, can be by cylindrical mold
Sealing two ends component carries out split type set, it is necessary to which sealing part and cylindrical mold body are assembled integral, system when using
The sealing part can be dismantled after the completion of standby, you can facilitate taking-up target material blank body.Surface is could be provided as sealing part
Smooth circular plate, for example, the material of plate is chosen as plastic-aluminum, high molecule plastic, metal.For example, in order to enable take out target
The convenience of material green body can play the role of hydrophobic thin slurry in sealing part inner surface coating release agent.
The method that oxide ceramics target is prepared as roller injection forming after ceramic target green body is prepared, also needs
Oxide target material green body is taken out, sizing is dried, for example, in order to control the dryness finalization process, it is necessary to control drying
The condition of environment such as temperature, humidity, waits the factor for influencing drying process, it is preferred that in constant-temperature constant-humidity environment more added with
Beneficial to the progress of drying process.During dehydration and drying, the stage especially is dehydrated in early stage, the rate for controlling dehydration is heavier
Will, the cracking of green body can be caused very much soon, for example, suitable temperature can be selected, be set between 25~40 DEG C, such as 25 DEG C,
30 DEG C, the temperature values such as 35 DEG C, humidity may be set between 50%~70%, such as the humidity such as 50%, 55%, 60%, 65%
Value.
Before the taking-up of oxide target material green body, suitably dry in the green body mold, appropriate dried green body can be made
Can shrink and become smaller, can with the separation of mold appropriateness, convenient for take out green body.
Under normal conditions, during roller injection forming prepares oxide ceramics target, the rotation feelings of cylindrical mold
Condition can control, to control the shape of target material blank body, thickness etc., for example, can usually select its speed as 80~180 hertz
Hereby, the rotation process duration can with selected as 10~24 it is small when, within this range, preferable target material blank body can be obtained, turn
Dynamic speed and duration depend on the solidified forming time of target material blank body and set.In the present disclosure, rotating speed
Refer to that each second, inner cylindrical mold completed the number rotated.
Roller injection forming disclosed by the invention prepares the device of oxide ceramics target, can include columnar device
Body 1 and the sealing part for being arranged at body both ends, specifically include the first sealing part 31 and the second sealing part 32, and at least one
On a sealing part, for example, the feed openings 5 of oxide slurry entrance can be provided on the first sealing part 31；It moreover, can
The first sealing part 31 to be set to be connected with the right side removable seal of device body 1, the first sealing part 32 can be set
It is connected with the left side removable seal of described device body 1.It is detachably connected and refers to that the sealing part can be with cylindrical shape sheet
Body assembling is integral, and then carries out target material blank body preparation, can separate sealing part and device body after completing preparation process,
Convenient for taking out the green body prepared.It is tightly connected, refers to sealing part and after body assembling integrally, connecting portion can be to watertight
Envelope, slurry in a mold will not ooze out from interface and influence preparation process.
Wherein, columnar device body 1 can include the die assembly 21 being prepared by water imbibition gypsum and be arranged on
The mold stiffener assembly 11 of 21 outsides of set of molds.It separates and oozes out of mold for the ease of the liquid components of mould inside slurry
Go out, can perforate 2 be set in the outer surface of mold stiffener assembly 11, the setting of perforate 2 can be multiple, for example, multiple perforates
2 can on the wall of mold stiffener assembly 11 axially it is regularly arranged in a row, the quantity of row may be set to be multiple；Also may be used
Irregularly to set, different set-up modes can be selected as long as disclosure satisfy that the demand of slurry liquid component outflow.
The rotation direction of device body can be carried out along the direction as indicated by reference numeral 4 in Fig. 1, can also edge
Its negative direction carries out.The rotation axis of rotation is set in the horizontal plane.
Roller injection forming disclosed by the invention prepares the device of oxide ceramics target, can make with other matched with devices
With can be that it sets mating driving device for example, in order to enable device body rotates.As the side that can be selected
Device disclosed by the invention with tumbling ball mill can be matched, rotation provided for it using tumbling ball mill by case
Power, by controlling the velocity of rotation of ball mill and velocity of rotation and the time of run time control device.
Using method and apparatus disclosed by the invention, the oxide target materials such as ITO, IGZO, IZO, AZO and GZO can be prepared.
The method that roller injection forming disclosed by the invention prepares oxide ceramics target is simple and practicable, can be prepared
The high target material blank body of density, device is simple, and convenient for preparation manipulation, the optional scope of green body size that can be prepared is big, at low cost.
The foregoing is merely schematical specific embodiments disclosed by the invention, are not departing from present inventive concept and principle
On the premise of, it is claimed should all to belong to the present invention for equivalent variations and modification that any those skilled in the art is made
Scope.
Claims (12)
1. a kind of method that roller injection forming prepares oxide ceramics target, which is characterized in that oxide slurry flowing is scattered
In on the inner wall of cylindrical mold, oxide ceramics target material blank body is formed in the rotation process of the cylindrical mold.
2. the method that roller injection forming according to claim 1 prepares oxide ceramics target, which is characterized in that in circle
In the rotation process of cylindrical mould, oxide slurry is progressed into the cylindrical mold.
3. the method that roller injection forming according to claim 1 prepares oxide ceramics target, which is characterized in that described
Cylindrical mold is by having the gypsum of strong water absorption character to be prepared.
4. the method that roller injection forming according to claim 1 prepares oxide ceramics target, which is characterized in that described
Oxide slurry is low viscosity, the oxide slurry of good fluidity.
5. the method that roller injection forming according to claim 1 prepares oxide ceramics target, which is characterized in that described
The rotation process of cylindrical mold is carried out by shaft of its horizontally disposed central shaft.
6. the method that roller injection forming according to claim 1 prepares oxide ceramics target, which is characterized in that described
Rotation process is uniform motion.
7. the method that roller injection forming according to claim 1 prepares oxide ceramics target, which is characterized in that described
Cylindrical mold is provided at both ends with demountable sealing part.
8. the method that roller injection forming according to claim 7 prepares oxide ceramics target, which is characterized in that described
Sealing part is the smooth circular plate in surface, and the material of the plate is plastic-aluminum, high molecule plastic, metal.
9. the method that roller injection forming according to claim 1 prepares oxide ceramics target, which is characterized in that the party
Method further includes process dry in constant-temperature constant-humidity environment after oxide target material green body takes out from cylindrical mold.
10. the method that roller injection forming according to claim 1 prepares oxide ceramics target, which is characterized in that institute
The velocity of rotation of cylindrical mold is stated as 80~180 hertz, the rotation process continue 10~24 it is small when.
11. a kind of roller injection forming prepares the device of oxide ceramics target, which is characterized in that the device includes：
Device body, the device body are cylindrical；
The sealing part at device body both ends is arranged at, the charging of oxide slurry entrance is provided at least one sealing part
Opening；
And the sealing part is connected with the body removable seal.
12. according to the devices described in claim 11, which is characterized in that described device body includes：
The die assembly that water imbibition gypsum is prepared into；
The mold stiffener assembly being arranged on outside the die assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711292916.9A CN108081436A (en) | 2017-12-08 | 2017-12-08 | The method and apparatus that roller injection forming prepares oxide ceramics target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711292916.9A CN108081436A (en) | 2017-12-08 | 2017-12-08 | The method and apparatus that roller injection forming prepares oxide ceramics target |
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| Publication Number | Publication Date |
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| CN108081436A true CN108081436A (en) | 2018-05-29 |
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ID=62174017
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| Application Number | Title | Priority Date | Filing Date |
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| CN201711292916.9A Pending CN108081436A (en) | 2017-12-08 | 2017-12-08 | The method and apparatus that roller injection forming prepares oxide ceramics target |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110625735A (en) * | 2019-10-22 | 2019-12-31 | 河北惟新科技有限公司 | Slip casting device and method of ITO (indium tin oxide) rotating target |
| CN114804882A (en) * | 2022-05-24 | 2022-07-29 | 先导薄膜材料（广东）有限公司 | Indium selenide doped target material and preparation method thereof |
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| JPH0361007A (en) * | 1989-07-28 | 1991-03-15 | Kubota Corp | Cast molding method for slurry and manufacture for calcined product of ceramic |
| CN106985261A (en) * | 2017-04-07 | 2017-07-28 | 中国船舶重工集团公司第七二五研究所 | The centrifugal pressure method of ITO rotary target base substrate one sides and mould |
| CN206501214U (en) * | 2017-01-16 | 2017-09-19 | 福建省诺希科技园发展有限公司 | A kind of ceramic rotary target vibrating grouting mold for forming |
| CN107244911A (en) * | 2017-01-13 | 2017-10-13 | 昆明理工大学 | A kind of preparation method of ITO tubular targets |
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2017
- 2017-12-08 CN CN201711292916.9A patent/CN108081436A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0361007A (en) * | 1989-07-28 | 1991-03-15 | Kubota Corp | Cast molding method for slurry and manufacture for calcined product of ceramic |
| CN107244911A (en) * | 2017-01-13 | 2017-10-13 | 昆明理工大学 | A kind of preparation method of ITO tubular targets |
| CN206501214U (en) * | 2017-01-16 | 2017-09-19 | 福建省诺希科技园发展有限公司 | A kind of ceramic rotary target vibrating grouting mold for forming |
| CN106985261A (en) * | 2017-04-07 | 2017-07-28 | 中国船舶重工集团公司第七二五研究所 | The centrifugal pressure method of ITO rotary target base substrate one sides and mould |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110625735A (en) * | 2019-10-22 | 2019-12-31 | 河北惟新科技有限公司 | Slip casting device and method of ITO (indium tin oxide) rotating target |
| CN114804882A (en) * | 2022-05-24 | 2022-07-29 | 先导薄膜材料（广东）有限公司 | Indium selenide doped target material and preparation method thereof |
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