CN106985261A - The centrifugal pressure method of ITO rotary target base substrate one sides and mould - Google Patents
The centrifugal pressure method of ITO rotary target base substrate one sides and mould Download PDFInfo
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- CN106985261A CN106985261A CN201710224206.6A CN201710224206A CN106985261A CN 106985261 A CN106985261 A CN 106985261A CN 201710224206 A CN201710224206 A CN 201710224206A CN 106985261 A CN106985261 A CN 106985261A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
- B28B1/261—Moulds therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
- B28B1/261—Moulds therefor
- B28B1/262—Mould materials; Manufacture of moulds or parts thereof
- B28B1/264—Plaster
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
- B28B1/265—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor pressure being applied on the slip in the filled mould or on the moulded article in the mould, e.g. pneumatically, by compressing slip in a closed mould
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/26—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor
- B28B1/28—Producing shaped prefabricated articles from the material by slip-casting, i.e. by casting a suspension or dispersion of the material in a liquid-absorbent or porous mould, the liquid being allowed to soak into or pass through the walls of the mould; Moulds therefor ; specially for manufacturing articles starting from a ceramic slip; Moulds therefor involving rotation of the mould about a centrifugal axis
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Dispersion Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Producing Shaped Articles From Materials (AREA)
Abstract
The centrifugal pressure method of ITO rotary target base substrate one sides and mould, mould is arranged on rotation platform, it is internal with a cylindrical shape die cavity for being used to accommodate slurry, the mold wall of cylindrical shape die cavity inner side and outer side is provided with micropore, in the cylindrical shape die cavity that slurry is injected to mould, while rotating mould formation centrifugal action, through the micropore on mold wall on the inside of cylindrical shape die cavity compressed air is passed through into cylindrical shape die cavity, so that one side pressurizes to slurry from inside to outside, the moisture in slurry is set to be discharged through the micropore on cylindrical shape die cavity outside mould wall, form ITO rotary target base substrates.By the way of centrifugal injection forming combination one side ventilation pressurization, one side draining, without mending slurry in forming process, the blank structure of shaping is uniform, is not in interlayer defect, density is also further improved.After shaping on the inside of tubular base substrate will not sticking to mould, it is higher to be so stripped yield rate, and process is also more simply, conveniently.
Description
Technical field
It is specifically a kind of the present invention relates to a kind of body formed method of rotary ceramic target blankss and its used mould
The centrifugal pressure method of ITO rotary target base substrate one sides and mould.
Background technology
ITO is Tin-doped Indium Oxide abbreviation title, and ITO implication refers to a kind of indium tin oxide material
Cylindrical blank before material, the rotary target sintering that ITO rotary target base substrates refer to be made up of indium tin oxide, base substrate internal diameter is generally
150 ~ 200mm, external diameter are 165 ~ 220mm, a height of 300 ~ 350mm of cylinder.
The forming method of current ITO rotary target base substrates, generally has rubber package set dry powder isostatic cool pressing and with common gypsum
For mould filling forming method both.Chinese patent (A of CN 103193262 A, CN 103787651) etc. is reported
Base substrate is relatively molded density and further improved after the method that isostatic cool pressing prepares high-density ITO targe material, isostatic cool pressing, after sintering easily
Highdensity ITO targets are obtained, but hydrostatic pressing has its limitation, and such as large-size target compacting difficulty is big, the finished product of shaping
Rate is low, stability is poor.Rotary target base substrate degree in uneven thickness is larger, it is necessary to certain processing capacity after the shaping of jacket isostatic pressing method
Make base substrate consistency of thickness, be non-net nearly size shaping, following process amount is big after shaping.Moreover, because ITO target to purity requirement very
Height, and the clout purity after processing is affected, and is used it is difficult to carry out recovery.Simultaneously isostatic pressing method to mould and press requirement compared with
Height is, it is necessary to be equipped with the equipment such as granulation tower, cold isostatic press, and investment is big, cost is high.Using common gypsum as the injection forming side of mould
When method is molded, grouting pressure is usually no more than 0.15MPa, only relies on the moisture content in the pore absorption slurry of gypsum, makes die cavity
Surface gradually accumulates to form ceramic body, and the density of molding blank is relatively low.Japan Patent (JP1117136/88, JP117137/
88, JP117138/88) with the slurry being made up of indium tin oxide, water, dispersant and binding agent in, inject by gypsum or high score
Base substrate is shaped in sub- porous mold, after the demoulding, drying, isostatic cool pressing need to be carried out to continue to increase blank density, process increases
Plus have impact on production efficiency.And this grouting mode is in itself because de-watering of slurries is slow, it is low to cause into base speed, and mould is being inhaled
Water absorbing capacity declines after water reaches to a certain degree, must be dried before reusing, production efficiency is further reduced.In addition, rotation
Mould therefor during target blankss body injection forming, form is generally solid（It is two-sided）Slip casting mould, this forming method is due to being relative
Two gypsum surfaces absorb water simultaneously, easily there is interlayer in the centre position of institute's molding blank through-thickness（With used in slip casting
Raw material is unrelated）, the particle in slurry is accumulated to the relative gypsum mold adsorption in both sides simultaneously, in the process in the middle of base substrate
Part forms cavity, it is necessary to which persistently supplement slurry is to fill up cavity and continue to accumulate to both sides, and such cavity, which becomes narrow gradually, to attenuate,
Interlayer defect is ultimately formed until slurry cannot be introduced into.The interlayer in the properties of product such as domestic ceramics, sanitary ware to not having
Influence, but it is larger to ITO rotary target performance impacts, by adjusting the granularity and slurry properties of ceramic raw material, interlayer can be mitigated
Performance degree, but from technique be difficult interlayer defect is completely eliminated, product quality stability can be impacted.
The content of the invention
The technical problems to be solved by the invention overcome rotary target base substrate slip-casting shaping process base substrate to be also easy to produce interlayer
Defect is there is provided a kind of blank structure is uniform, the centrifugal pressure method of ITO rotary targets base substrate one side without dissection and mould
Tool.
The present invention is for the technical scheme that is used of solution above-mentioned technical problem：The centrifugal pressure of ITO rotary target base substrate one sides
In power filling forming method, the cylindrical shape die cavity that slurry is injected to mould, while rotating mould formation centrifugal action, pass through
Micropore on the inside of cylindrical shape die cavity on mold wall is passed through compressed air into cylindrical shape die cavity, so that one side from inside to outside is to slurry
Pressurization, makes the moisture in slurry be discharged through the micropore on cylindrical shape die cavity outside mould wall, forms ITO rotary target base substrates.
Further, after the cylindrical shape die cavity of slurry injection mould, through micro- on mold wall on the inside of cylindrical shape die cavity
Hole be passed through into cylindrical shape die cavity compressed air make its initial pressure be 0.3-0.6MPa, and control mould with 100-200 turns/
Point rotating speed rotation, after being kept for 3-5 minutes under initial pressure, pressure is increase gradually to 1.8 in 10-15 minutes-
2.5MPa, and pressurize 20-30 minutes.
Mould used in the centrifugal pressure of ITO rotary target base substrate one sides is arranged on rotation platform, inside it
With a cylindrical shape die cavity for being used to accommodate slurry, being distributed with the mold wall on the inside of cylindrical shape die cavity is used for cylindrical shape type
The mold wall that intracavitary is passed through on the outside of the micropore of compressed air, cylindrical shape die cavity is provided with the micropore for being used for discharging moisture in slurry.
Further, the mould includes backform, bed die, left half module and right half module, at the center of bed die provided with convex
The cylindrical shape plaster mold gone out, left half module and right half module are arranged on the outside of cylindrical shape plaster mold, and are surrounded jointly with backform and bed die
It is distributed with the micropore for being passed through compressed air, left half module and right half module and is distributed with cylindrical shape die cavity, cylindrical shape plaster mold
Micropore for draining.
Further, described bed die is connected by circular epoxy resin bottom, base circle plaster mold and cylindrical shape plaster mold
Composition is connect, base circle plaster mold is fixed on the circumference of circular epoxy resin bottom, for the lower end of closed circular tubular die cavity,
Cylindrical shape plaster mold is fixed on the center of circular epoxy resin bottom upper surface.
Further, described backform is connected and composed by circular epoxy resin top cover and top annular plaster mold, top ring
Shape plaster mold is fixed on the circumference of circular epoxy resin top cover, the upper end for closed circular tubular die cavity.
Further, described left half module and right half module are by semi-cylindrical shaped plaster mold and are fixed on semi-cylindrical shaped plaster mold
The semi-cylindrical shaped epoxy resin in outside is constituted.
Further, described backform, which is provided with, is used to be passed through compressed air into the cavity at cylindrical shape plaster mold center
Forcing pipe, the Grouting Pipe for injecting slurry to cylindrical shape die cavity and the blast pipe for discharging cylindrical shape type chamber air.
Further, circumferentially distributed in described semi-cylindrical shaped plaster mold to have demoulding tracheae, demoulding tracheae is vertically arranged,
Its one end is communicated with the external world, and the other end is extended to inside semi-cylindrical shaped plaster mold.
Further, drainpipe, the one of drainpipe are equipped with the semi-cylindrical shaped epoxy resin of left half module and right half module
End is in communication with the outside, and the other end passes to semi-cylindrical shaped plaster mold bottom outside.
The beneficial effects of the invention are as follows：According to the straight cylindrical form of rotary target base substrate, combined using centrifugal injection forming
One side ventilation pressurization, the mode of one side draining, slurry is fully entered after die cavity, without mending the water in slurry, slurry in forming process
Divide only from the discharge of unilateral die surface, the blank structure being molded is uniform, is not in interlayer defect.And this mode makes slurry
In bubble be easier fast strikethrough outside mould micropore discharge, so as to prevent from forming gas hole defect in base substrate, with common note
The slurry method of forming is compared, and more preferably, density is also further improved the even green body molded, and one is entered without carrying out jacket isostatic pressed etc.
Step processing.Due to being that one side pressurizes and do not supplement in slurry, mold cavity slurry in pressurization to away from interior side form from inside to outside
Have the direction Uniform Movement of cylinderical surface and final into base, thus after shaping on the inside of tubular base substrate will not sticking to mould, be so stripped into
Product rate is higher, and process is also simpler, conveniently.This method is compared with rubber package set dry powder cold isostatic compaction method, the base after shaping
Cost of material can be greatly reduced even without processing in body processing capacity very little, it is not required that the high equipment of cost, cost is more
It is low.
Further, using resin and the composite die of high strength gypsum, compared with common gypsum mould, it can bear more
High pressure, maximum dwell pressure may be up to 1.8 ~ 2.5MPa, can accelerate shaping speed, improve production efficiency, and be molded
Blank density it is higher, blank density can reach 4.65 ~ 5.01g/cm3(relative density is 65 ~ 70%, and solid density presses 7.15g/
cm3Calculate), while because with reference to the characteristics of centrifugal injection forming, it is ensured that base substrate consistent internal structure, such a base substrate is conducive to
It is fired into the uniform rotary target material of high density, microstructure.
Assembling die is designed as backform, left and right half module and the combination of the part of bed die 4, facilitates cylindrical shape base substrate to be stripped, the bottom of by
Mould and left and right half module are placed in 3 and are spliced on one group of flat bogie, coordinate demoulding tracheae to be passed through compressed air, it is easy to accomplish
Automatically control.
Brief description of the drawings
Fig. 1 is the structural representation of mould therefor of the present invention.
Fig. 2 is the structural representation of bed die.
Fig. 3 is the structural representation of backform.
Fig. 4 is the structural representation of left half module.
Marked in figure：1st, backform, 101, circular epoxy resin top cover, 102, top annular plaster mold, 2, bed die, 201, circle
Shape epoxy resin bottom, 202, base circle plaster mold, 203, cylindrical shape plaster mold mould, 3, left half module, 301, semi-cylindrical shaped stone
Cream mould, 302, semi-cylindrical shaped epoxy resin, 4, right half module, 5, metallic framework, 6, forcing pipe, 7, Grouting Pipe, 8, valve, 9, exhaust
Pipe, 10, demoulding tracheae, 11, cylindrical shape die cavity, 12, cavity, 13, drainpipe, 14, rotation platform, 15, cylindrical shape fixed seat.
Embodiment
Embodiments of the present invention are illustrated below in conjunction with drawings and examples.
The present invention carries out injection forming using one side pressurization by the way of centrifugation is combined, and slurry is injected into mould first
In cylindrical shape die cavity, then rotating mould forms centrifugal action, and slurry is close to the mould on the outside of cylindrical shape die cavity under the action of the centrifugal
Have wall, simultaneously, compressed air is passed through into cylindrical shape die cavity through the micropore on mold wall on the inside of cylindrical shape die cavity, compressed
Air pressurizes to slurry from inside to outside.Under the pressurization of centrifugal action and compressed air, the moisture in slurry is through cylindrical shape die cavity
Particle packing in micropore discharge on outside mould wall, slurry forms ITO rotations on the mold wall on the outside of cylindrical shape die cavity
Target blankss body.
In forming process, preferably control to be passed through the pressure of compressed air, by the way of pressurization step by step and pressurize, concrete mode
For：The ITO slurries of prepared higher solids content, good fluidity are injected to the cylindrical shape die cavity of mould, afterwards through cylindrical shape
Micropore on the inside of die cavity on mold wall, which is passed through compressed air into cylindrical shape die cavity, makes its initial pressure be 0.3-0.6MPa, and
Mould is controlled to be rotated with 100-200 revs/min of rotating speed, will in 10-15 minutes after being kept for 3-5 minutes under initial pressure
Pressure is increase gradually to 1.8-2.5MPa, and pressurize 20-30 minutes.In the process in slurry moisture content through outside mould micropore
Filtering is gone out, and forms the solid base substrate of cylindrical shape of rotary target.
The method of the present invention can be realized using following mould.The mould is arranged on rotation platform 14, by controlling to rotate
14 platforms are rotated, driven mold rotation.One cylindrical shape die cavity 11 is set in mould, for accommodating slurry and blank forming, shaping
The thickness of cylindrical shape base substrate can be determined by parameters such as the solid concentrations and grouting pressure of slurry afterwards, or as desired by adjustment mould
Has die cavity thickness（Cylindrical shape die cavity is outer, the difference of internal diameter）.Die inside portion of the cylindrical shape die cavity 11 generally by being nested together
Divide and Outboard Sections are surrounded.Die inside part constitutes the mold wall of the inner side of cylindrical shape die cavity 11, and mould Outboard Sections constitute circle
The outside mould wall of tubular die cavity 11.It is distributed with the mold wall of the inner side of cylindrical shape die cavity 11 for being passed through into cylindrical shape die cavity
The micropore of compressed air, the mold wall in the outside of cylindrical shape die cavity 11 is provided with the micropore for being used for discharging moisture in slurry.
As shown in figure 1, the mould includes backform 1, bed die 2, left half module 3 and right half module 4.The center of bed die 2 be provided with to
The cylindrical shape plaster mold 203 protruded above.Left half module 3 and right half module 4 are arranged on the outside of cylindrical shape plaster mold 203, and with backform 1 and
Bed die 2 surrounds cylindrical shape die cavity 11 jointly.The cylindrical wall of cylindrical shape plaster mold 203 is the mould of the inner side of cylindrical shape die cavity 11
Wall, cylindrical shape plaster mold 203 is high-strength porous gypsum material, and micropore of distribution is used to be passed through pressure into cylindrical shape die cavity 11 in it
Contracting air.Left half module 3 and right half module 4 constitute the mold wall in the outside of cylindrical shape die cavity 11, are similarly high-strength porous gypsum material, its
The micropore of interior distribution is used to discharge the moisture in slurry.
The mould can be constituted using resin is framed with high strength gypsum Material cladding, as shown in Fig. 2 bed die 2 is by circular rings
Oxygen tree fat bottom 201, base circle plaster mold 202 and cylindrical shape plaster mold 203 are connected and composed.Connected mode is in gypsum cast
Before, in the circular fixed metallic framework 5 in the outside of epoxy resin bottom 201, the He of base circle plaster mold 202 is then poured into a mould in mould
Cylindrical shape plaster mold 203, and then bed die 2 is made in solidification connection.Wherein, base circle plaster mold 202 is fixed on circular asphalt mixtures modified by epoxy resin
On the circumference of fat bottom, after other die assemblies, base circle plaster mold 202 is located at the lower end of cylindrical shape die cavity 11.Cylinder
Shape plaster mold 203 is fixed on the center of the circular upper surface of epoxy resin bottom 201, is used as the interior side mold of cylindrical shape die cavity 11
Wall.The center of cylindrical shape plaster mold 203 is the cylindrical cavity 12 where compressed air, during gradually boosting, pressurize,
Compressed air passes through the micropore in cylindrical shape plaster mold 203, is uniformly pressurizeed from inside to outside to slurry.
As shown in figure 3, backform 1 is connected and composed by circular epoxy resin top cover 101 and top annular plaster mold 102, connection
Mode is similar to bed die.Before gypsum cast, in the circular fixed metallic framework 5 in the outside of epoxy resin top cover 101, then cast is pushed up
Portion's annular plaster mold 102, is connected as one after solidification.Top annular plaster mold 102 is fixed on circular epoxy resin top cover 101
On circumference, the upper end for closed circular tubular die cavity 11.
As shown in figure 4, left half module 3 is by semi-cylindrical shaped plaster mold 301 and the semicircle being fixed on the outside of semi-cylindrical shaped plaster mold
Tubular epoxy resin 302 is constituted.The structure of right half module 4 is identical with left half module 3, and both are arranged symmetrically.Left half module 3 and right half module 4
It is used as the outside mould wall of cylindrical shape die cavity 11.Compressed air passes through the micropore in cylindrical shape plaster mold 203, from inside to outside uniformly
Pressurizeed to slurry, at the same time, moisture content is discharged and turned into by the semi-cylindrical shaped plaster mold of left half module 3 and right half module 4 in slurry
Base substrate.Drainpipe 13 is additionally provided with left half module 3 and right half module 4.The diameter 12-20mm of drainpipe 13, by air-locked plastic tube
It is placed in the semi-cylindrical shaped epoxy resin mould inframe of left and right half module（Left and right each 1）, one end is located at semi-cylindrical shaped plaster mold most
On the outside of low side, one end is interlinked to the outside by the way that resin is framed with mould.
Forcing pipe 6, Grouting Pipe 7 and blast pipe 9 are provided with backform 1.Forcing pipe 6 is placed in the center of backform 1, using not
Ventilative plastic tube or metal tube, pipe diameter 8-15mm, for leading in the cavity 12 to the center of cylindrical shape plaster mold 203
Enter pressurized with compressed air.Grouting Pipe 7 is connected with automatic or manual grouting equipment, is made up of the plastic tube of transparent, non-sticky slurry, directly
Footpath 10-15mm, one end is passed from the circular epoxy resin top cover 101 of backform 1, and the other end is embedded in top annular plaster mold in advance
Connected in 102 and with cylindrical shape die cavity 11, treat that top annular plaster mold 102 is poured into a mould, solidifies grouting behind shaft or drift lining pipe and fixed.Grouting Pipe 7
Valve 8 is provided with, for controlling the open and closed of slip casting tube passage, its main function is closed after slurry fills die cavity adds
Pressure.Blast pipe 9 is made up of the plastic tube of transparent, non-sticky slurry, diameter 6-10mm, positioned at the position relative with Grouting Pipe 7, for arranging
Go out air in cylindrical shape die cavity 11, its one end is passed from the circular epoxy resin top cover 101 of backform 1, and the other end is embedded in top in advance
Connect in portion's annular plaster mold 102 and with cylindrical shape die cavity 11, treat that top annular plaster mold 102 is poured into a mould, solidifies heel row tracheae quilt
It is fixed.
As shown in Fig. 1-4, demoulding tracheae 10 is equipped with backform, bed die, left half module and right half module, tracheae 10 is stripped
For a kind of steel wire winding pipe, ventable air-vent is distributed with pipe, the fibrous material, diameter such as Surface coating ventilative cotton, fiber crops
6-10mm, pipe one end is fixed on that solid resin mold is framed to be interlinked to the outside with mould, and the other end extends into high-strength micropore gypsum mold,
Tracheae is stripped apart from cavity surface 10-20mm, and along circumferential uniform, the vertical, parallel arrangement of cylindrical shape die cavity, tracheae spacing is
60-80mm, it is pre-buried before pouring gypsum, fixed（Only 2 are respectively illustrated in figure in backform, bed die, left half module and right half module
Tracheae is stripped, it is other not shown）.
Backform 1, bed die 2, left half module 3 and right half module 4 are positioned on rotation platform 14 after combining, and rotation platform 14 is provided with
Cylindrical shape fixed seat 15 for fixing slip casting mould（It is a circular groove in form）, it is made up of metal material.In one side
While slip casing by pressure, the rotation of the driven mold of rotation platform 14 produces centrifugal force and accelerates dehydration forming speed, while improving base
Body even structure degree.
Embodiment：After the backform 1 made, bed die 2, left half module 3, the matched moulds of right half module 4, with jack or other fixtures
Pressurization is simultaneously fixed on the cylindrical shape fixed station 15 of rotation platform 14.The solid concentration made is taken to be less than for 85%, viscosity
600mPas, and the ITO slurries added after micro defoamer, send slurry to enter in cylindrical shape die cavity 11 from Grouting Pipe 7 with air pump,
Until the micro- outlet for exposing transparent blast pipe 9 of slurry, illustrates that die cavity 11 has been filled.Then close the valve of Grouting Pipe 7 and blast pipe 9
Door, the compressed air that initial pressure is 0.3 MPa is passed through by forcing pipe 6, and the micropore of gas permeation cylindrical shape plaster mold 203 is to type
ITO slurry uniform pressurizations in chamber 11, start to start rotation platform 14 after pressurization, adjustment fixed rotating speed is 150 revs/min, with first
After beginning pressure 0.3MPa pressurizes 5min, pressure is increase gradually to highest 2.2MPa, and pressurize 25min in 12min, made
The micro porous filtration that moisture content surrounds columnar two semi-cylindrical shaped plaster molds through outside in ITO slurries is gone out, and forms ITO rotary targets
The solid base substrate of cylindrical shape.It is stripped immediately after blank forming, first mould is removed and is positioned on track 3 and is spliced into a plane
Flat bogie on, first with 0.2MPa pressure respectively by the demoulding tracheae 10 of left half module 3 and the middle ring cloth of right half module 4 to half
Be blown into compressed air in cylindrical shape plaster mold, gas by mould micropore to billet surface uniform pressurization, under pressure,
Left and right half module is separated from base substrate with dolly, and base substrate is stayed on middle dolly, then passes through the middle ring of backform 1 with 0.2MPa pressure
The demoulding tracheae 10 of cloth is blown into compressed air into top annular plaster mold 102, sloughs backform 1, finally with 0.2MPa pressure
Compressed air is blown into base circle plaster mold 202 by the demoulding tracheae 10 of the middle ring cloth of bed die 2, at the same along straight up side
To base is taken, bed die 2 is sloughed（Due to being that one side pressurizes and do not supplement in slurry, die cavity 11 slurry in pressurization to remote from inside to outside
It is final into base from the direction Uniform Movement of the cylinderical surface of cylindrical shape plaster mold 203, thus on the inside of tubular base substrate will not sticking to mould, can
Take out upwards easily）.
ITO rotary target base substrates after the demoulding are placed directly on load bearing board, and after drying, degreasing, base substrate is surveyed with weight method
Amount, density is 4.79g/cm3(relative density is 67%, and solid density presses 7.15g/cm3Calculate), then by base substrate in 1560 DEG C, it is micro-
Press after being sintered under Oxygen Condition, obtain density for 7.136 g/cm3(relative density is 99.8%, and solid density presses 7.15g/cm3Meter
Calculate) ITO rotary target materials.
This method mould therefor long lifespan, without drying, can at any time, Reusability, save cost.Can be simultaneously using many
Group mould be connected with automatic grouting system program, and blank forming completion rear mold, which is positioned on track 3 and is spliced into one group, puts down
On plate dolly, the compressed air realization demoulding is passed through by being stripped tracheae, it is easy to accomplish automatically control.The ITO rotation target blankss of preparation
Volume density is high, specification is big, even structure, is suitable for firing high density ITO rotary target material under the conditions of normal pressure or minute-pressure.
Claims (10)
1.ITO the centrifugal pressure method of rotary target base substrate one side, it is characterised in that：Slurry is injected to the cylinder of mould
In shape die cavity, while rotating mould formation centrifugal action, through the micropore on mold wall on the inside of cylindrical shape die cavity to cylinder
Be passed through compressed air in shape die cavity, so that one side from inside to outside pressurizes to slurry, make the moisture in slurry through cylindrical shape die cavity outside
Micropore discharge on side mold wall, forms ITO rotary target base substrates.
2. the centrifugal pressure method of ITO rotary targets base substrate one side as claimed in claim 1, it is characterised in that：Slurry
After the cylindrical shape die cavity of material injection mould, it is passed through through the micropore on mold wall on the inside of cylindrical shape die cavity into cylindrical shape die cavity
Compressed air makes its initial pressure be 0.3-0.6MPa, and controls mould to be rotated with 100-200 revs/min of rotating speed, initial
After being kept for 3-5 minutes under pressure, pressure is increase gradually to 1.8-2.5MPa, and 20-30 points of pressurize in 10-15 minutes
Clock.
The mould of the centrifugal pressure of 3.ITO rotary target base substrate one sides, it is characterised in that：The mould is arranged on rotation
Platform（14）On, it is internal with a cylindrical shape die cavity for being used to accommodate slurry（11）, cylindrical shape die cavity（11）The mould of inner side
The micropore for being passed through compressed air into cylindrical shape die cavity, cylindrical shape die cavity are distributed with tool wall（11）On the mold wall in outside
Provided with the micropore for discharging moisture in slurry.
4. the mould of the centrifugal pressure of ITO rotary targets base substrate one side as claimed in claim 3, its feature exists
In：The mould includes backform（1）, bed die（2）, left half module（3）With right half module（4）, in bed die（2）Center provided with convex
The cylindrical shape plaster mold gone out（203）, left half module（3）With right half module（4）It is arranged on cylindrical shape plaster mold（203）Outside, and with top
Mould（1）And bed die（2）Cylindrical shape die cavity is surrounded jointly（11）, cylindrical shape plaster mold（203）On be distributed with it is empty for being passed through compression
The micropore of gas, left half module（3）With right half module（4）On micropore for draining is distributed with.
5. the mould of the centrifugal pressure of ITO rotary targets base substrate one side as claimed in claim 4, its feature exists
In：Described bed die（2）By circular epoxy resin bottom（201）, base circle plaster mold（202）With cylindrical shape plaster mold
（203）Connect and compose, base circle plaster mold（202）On the circumference for being fixed on circular epoxy resin bottom, for closed cylinder
Shape die cavity（11）Lower end, cylindrical shape plaster mold（203）It is fixed on circular epoxy resin bottom（201）The center of upper surface.
6. the mould of the centrifugal pressure of ITO rotary targets base substrate one side as claimed in claim 4, its feature exists
In：Described backform（1）By circular epoxy resin top cover（101）With top annular plaster mold（102）Connect and compose, top annular
Plaster mold（102）It is fixed on circular epoxy resin top cover（101）Circumference on, for closed circular tubular die cavity（11）Upper end.
7. the mould of the centrifugal pressure of ITO rotary targets base substrate one side as claimed in claim 4, its feature exists
In：Described left half module（3）With right half module（4）By semi-cylindrical shaped plaster mold and half be fixed on the outside of semi-cylindrical shaped plaster mold
Cylindrical shape epoxy resin is constituted.
8. the mould of the centrifugal pressure of ITO rotary targets base substrate one side as claimed in claim 4, its feature exists
In：Described backform（1）Being provided with is used for cylindrical shape plaster mold（203）The cavity at center（12）Inside it is passed through adding for compressed air
Pressure pipe（6）, for cylindrical shape die cavity（11）Inject the Grouting Pipe of slurry（7）With for discharging cylindrical shape die cavity（11）Interior air
Blast pipe（9）.
9. the mould of the centrifugal pressure of ITO rotary targets base substrate one side as claimed in claim 7, its feature exists
In：It is circumferentially distributed in described semi-cylindrical shaped plaster mold to have demoulding tracheae（10）, demoulding tracheae is vertically arranged, its one end with it is outer
Boundary is communicated, and the other end is extended to inside semi-cylindrical shaped plaster mold.
10. the mould of the centrifugal pressure of ITO rotary targets base substrate one side as claimed in claim 7, its feature exists
In：In left half module（3）With right half module（4）Semi-cylindrical shaped epoxy resin in be equipped with drainpipe（13）, one end of drainpipe with
External world's connection, the other end passes to semi-cylindrical shaped plaster mold bottom outside.
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| CN201710224206.6A CN106985261B (en) | 2017-04-07 | 2017-04-07 | The centrifugal pressure method of ITO rotary target green body single side and mold |
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| CN107599123A (en) * | 2017-09-07 | 2018-01-19 | 韶关市欧莱高新材料有限公司 | A kind of frock of tubular target injection forming mould |
| CN108081436A (en) * | 2017-12-08 | 2018-05-29 | 郑州大学 | The method and apparatus that roller injection forming prepares oxide ceramics target |
| CN109079963A (en) * | 2018-07-11 | 2018-12-25 | 中国船舶重工集团公司第七二五研究所 | A kind of manufacturing method of single side pressure mold and ITO flat target |
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| CN110625735A (en) * | 2019-10-22 | 2019-12-31 | 河北惟新科技有限公司 | Slip casting device and method of ITO (indium tin oxide) rotating target |
| CN111440000A (en) * | 2020-04-24 | 2020-07-24 | 河北恒博新材料科技股份有限公司 | Preparation method of large-size rotary ceramic target |
| CN112725753A (en) * | 2020-12-30 | 2021-04-30 | 湖南柯盛新材料有限公司 | Method for binding multiple sections of ITO (indium tin oxide) rotary target materials in one-step centrifugation manner |
| CN113815091A (en) * | 2021-07-30 | 2021-12-21 | 安徽省含山民生瓷业有限责任公司 | Grouting process |
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| CN110370426A (en) * | 2019-07-29 | 2019-10-25 | 福建阿石创新材料股份有限公司 | A kind of preparation method of centrifugal forming device and ITO rotary target material |
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| CN112725753A (en) * | 2020-12-30 | 2021-04-30 | 湖南柯盛新材料有限公司 | Method for binding multiple sections of ITO (indium tin oxide) rotary target materials in one-step centrifugation manner |
| CN112725753B (en) * | 2020-12-30 | 2023-02-24 | 湖南柯盛新材料有限公司 | Method for binding multiple sections of ITO (indium tin oxide) rotary target materials in one-step centrifugation manner |
| CN113815091A (en) * | 2021-07-30 | 2021-12-21 | 安徽省含山民生瓷业有限责任公司 | Grouting process |
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