TWI765462B - Manufacturing method of solar cell thin film - Google Patents
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Abstract
一種太陽能電池薄膜的製造方法,包含一前置步驟、一混合步驟,及一沉積步驟。在該前置步驟中,準備一設置有複數微液滴產生器的低壓環境,該等微液滴產生器分別容置不同的液態材料。在該混合步驟中,該等微液滴產生器將液態材料以液滴型態輸出至該低壓環境中,並在空中相互混合。在該沉積步驟中,該等液態材料中的溶劑在該低壓環境中蒸發,而該等液態材料中的溶質堆疊沉積而製成一太陽能電池薄膜,藉此可提升製作太陽能電池薄膜之材料複合種類及效能。此外,透過在空中混合液滴狀的液態材料,能達到較均勻的材料混合效果。A manufacturing method of a solar cell thin film includes a pre-step, a mixing step, and a deposition step. In this pre-step, a low-pressure environment is prepared with a plurality of micro-droplet generators, and the micro-droplet generators respectively accommodate different liquid materials. In the mixing step, the droplet generators output the liquid material in the form of droplets into the low pressure environment and mix with each other in the air. In the deposition step, the solvents in the liquid materials are evaporated in the low pressure environment, and the solutes in the liquid materials are stacked and deposited to form a solar cell thin film, thereby improving the composite type of materials for making the solar cell thin film and efficiency. In addition, by mixing droplet-shaped liquid materials in the air, a relatively uniform material mixing effect can be achieved.
Description
本發明是有關於一種薄膜的製作方式,特別是指一種有機高分子太陽能電池薄膜的製造方法。The present invention relates to a method for manufacturing a thin film, in particular to a method for manufacturing an organic polymer solar cell thin film.
太陽能是發展已久但技術卻仍不斷在更迭的綠色能源之一,尤其是在材料及製程技術不斷進步的情況下,至今仍為技術含量極為密集的領域。太陽能電池在吸收太陽能後,產生電子與電洞的分離,再經由電子及電洞傳輸到外部電路而形成電壓降,最後產生電能。目前太陽能電池主要是透過液態製程製成導電主動層、前後電極或光電子作用層等薄膜,常見用來製造前述薄膜的液態製程如中華民國第I339914號發明專利案中所述的旋轉塗佈法,其是透過機台旋轉產生的離心力,將溶膠或溶液均勻平鋪到襯底表面,以形成薄膜;此外,也有如中華民國第I410332號發明專利案中所述的轉印法,其透過滾輪裝置將薄膜轉印至一基材上。除了前述的製造方法外,太陽能電池薄膜的液態製程尚有網印或刮塗等方法。然而,若能在薄膜中混合不同種類的材料形成異質微結構,便能提升接觸面積、電流量等效能,但前述的製造方法往往受限於溶劑條件而仍以單一成分為主,因此大幅限制了這些各層材料之混合組成的變化需求。Solar energy is one of the green energies that have been developed for a long time but the technology is still changing. Especially with the continuous advancement of materials and process technology, it is still an extremely technology-intensive field. After the solar cell absorbs solar energy, the separation of electrons and holes is generated, and then the electrons and holes are transmitted to the external circuit to form a voltage drop, and finally electricity is generated. At present, solar cells are mainly made of thin films such as conductive active layers, front and rear electrodes or optoelectronic active layers through a liquid process. The common liquid process used to manufacture the aforementioned thin films is the spin coating method described in the Republic of China Invention Patent No. I339914. It is through the centrifugal force generated by the rotation of the machine, the sol or solution is evenly spread on the surface of the substrate to form a thin film; in addition, there is also a transfer method as described in the Republic of China Patent No. I410332, which uses a roller device. Transfer the film to a substrate. In addition to the aforementioned manufacturing methods, there are still methods such as screen printing or blade coating for the liquid process of the solar cell thin film. However, if different types of materials can be mixed in the film to form a heterogeneous microstructure, the contact area, current flow and other performances can be improved. However, the aforementioned manufacturing methods are often limited by solvent conditions and are still dominated by a single component, which is greatly limited. The varying requirements for the mixed composition of these various layers of materials are addressed.
因此,本發明之目的,即在提供一種能製造出具異質微結構的太陽能電池薄膜之製造方法。Therefore, the purpose of the present invention is to provide a method for producing a solar cell thin film with a heterogeneous microstructure.
於是,本發明太陽能電池薄膜的製造方法,包含一前置步驟、一混合步驟,及一沉積步驟。在該前置步驟中,準備一低壓環境,並在該低壓環境中置放一基板,該低壓環境中設置有複數位於該基板上方的微液滴產生器,該等微液滴產生器分別容置不同的液態材料。在該混合步驟中,該等微液滴產生器將自身所容置的液態材料以液滴型態輸出至該低壓環境中,該等液滴狀的液態材料於該低壓環境內在空中相互混合。在該沉積步驟中,該等液態材料中的溶劑在該低壓環境中蒸發,而該等液態材料中的溶質堆疊沉積於該基板表面,從而製成一太陽能電池薄膜,該太陽能電池薄膜具有至少一由該等液態材料之溶質所構成的異質微結構層。Therefore, the manufacturing method of the solar cell thin film of the present invention includes a pre-step, a mixing step, and a deposition step. In the pre-step, a low-pressure environment is prepared, and a substrate is placed in the low-pressure environment. The low-pressure environment is provided with a plurality of micro-droplet generators located above the substrate, and the micro-droplet generators respectively contain different liquid materials. In the mixing step, the droplet generators output the liquid materials contained in themselves into the low-pressure environment in the form of droplets, and the droplet-shaped liquid materials are mixed with each other in the air in the low-pressure environment. In the deposition step, the solvents in the liquid materials are evaporated in the low-pressure environment, and the solutes in the liquid materials are stacked on the surface of the substrate to form a solar cell film, the solar cell film has at least one Heterogeneous microstructured layers composed of solutes of these liquid materials.
本發明之功效在於:透過該製造方法可將不同種類的液態材料以液滴狀態在該低壓環境中輸出,並使該等液態材料在空中碰撞混合、蒸發並堆疊沉積於該基板上,形成一太陽能電池薄膜,該太陽能電池薄膜具有由複合材料構成的異質微結構層,能提升製作太陽能電池薄膜之材料複合種類及效能。此外,透過在空中混合液滴狀的液態材料,能達到較均勻的材料混合效果,從而提升接觸面積及電流穩定性。The effect of the present invention is: through the manufacturing method, different types of liquid materials can be output in the low-pressure environment in the form of droplets, and the liquid materials can be collided and mixed in the air, evaporated and stacked and deposited on the substrate to form a The solar cell thin film has a heterogeneous microstructure layer composed of composite materials, which can improve the composite type and efficiency of the materials used to make the solar cell thin film. In addition, by mixing droplet-shaped liquid materials in the air, a more uniform material mixing effect can be achieved, thereby improving the contact area and current stability.
參閱圖1與圖2,本發明太陽能電池薄膜的製造方法之一實施例,包含一前置步驟11、一混合步驟12,及一沉積步驟13。在該前置步驟11中,準備一低壓環境21,並在該低壓環境21中水平置放一基板22。該低壓環境21中設置有二位於該基板22上方的微液滴產生器23,該等微液滴產生器23分別容裝成分不同的液態材料,該微液滴產生器23也可視需求而為三個以上,以使用三種以上的液態材料,且不以此為限。在本實施例中,該低壓環境21為可受控制地開啟且透過管線211向外抽取空氣的密閉腔室,較佳壓力為10
-2托(Torr)至10
-5托(Torr)之間,即細真空至高真空之間。每一微液滴產生器23可以具有一或一個以上的噴頭231,該等噴頭231依據混合需求採取適當的角度、高度,及間隔距離設置。
Referring to FIG. 1 and FIG. 2 , an embodiment of a method for manufacturing a solar cell thin film of the present invention includes a pre-step 11 , a mixing
在該混合步驟12中,控制該等微液滴產生器23將自身所容置的液態材料以液滴型態由該等噴頭231輸出至該低壓環境21中,該等液滴狀的液態材料在噴灑至空中後,會互相碰撞並層層混合,若該液態材料會相互反應,則會在前述混合過程中產生反應,例如液態材料A及液態材料B混合後,形成液態材料C。需要特別說明的是,該等微液滴產生器23可依需求調整該等液態材料的比例。In the
參閱圖1、圖2,及圖3,在該沉積步驟13中,該等液態材料中的溶劑在該低壓環境中蒸發,而該等液態材料中的溶質則堆疊沉積在該基板22表面,從而製成一奈米級厚度的太陽能電池薄膜3。該太陽能電池薄膜3具有一層或多層由該等液態材料之溶質所構成的異質微結構層31。該太陽能電池薄膜3可作為前電極、背電極、電洞傳輸載體層、電子傳輸載體層,或主動層等元件,但不以此為限。進一步詳述,當液態材料具導電性,例如液態材料為導電高分子、石墨烯、奈米碳管,或奈米銀時,所製造出來的太陽能電池薄膜3可做為電極、電子載子傳輸薄膜,或電洞載子傳輸薄膜。當液態材料含有正負型半導體主動層材料,例如含有高分子載子受體或高分子載子施體時,所製造出來的太陽能電池薄膜3可做為作用層薄膜。藉由複合材料的搭配可提升該太陽能電池薄膜3之效能,讓太陽能電池能隨先進材料的發展而持續進化。此外,由於該等液態材料是在空中以液滴狀態相互混合,均勻度較高,可避免習知旋轉塗佈法因材料分布不均勻而造成漏電流增大或光電流減少等問題。Referring to FIGS. 1, 2, and 3, in the
參閱圖4,將透過本製造方法所製得的前電極D、背電極E,及主動層F堆疊後,再設置密封外罩41及焊接導線42,便可形成三層薄膜結構的太陽能電池4,其會在受到外部光線43照射時產生電流輸出以供使用。參閱圖5,除了前述的結構外,也可以透過本製造方法所製得的前電極D、背電極E、主動層F、電洞傳輸載體層G,及電子傳輸載體層H堆疊,再設置密封外罩41及焊接導線42,便可形成五層薄膜結構的太陽能電池5。Referring to FIG. 4 , after stacking the front electrode D, the back electrode E, and the active layer F obtained by this manufacturing method, a
綜上所述,本發明可噴灑出液滴狀的液態材料,使其在空中混合、蒸發並堆疊沉積於該基板22上,從而製成該太陽能電池薄膜3,讓該太陽能電池薄膜3能藉由複合材料的特性提升效能,且能增加材料的混合均勻性,故確實能達成本發明之目的。To sum up, the present invention can spray droplet-shaped liquid materials, which are mixed in the air, evaporated, and deposited on the
惟以上所述者,僅為本發明之實施例而已,當不能以此限定本發明實施之範圍,凡是依本發明申請專利範圍及專利說明書內容所作之簡單的等效變化與修飾,皆仍屬本發明專利涵蓋之範圍內。However, the above are only examples of the present invention, and should not limit the scope of the present invention. Any simple equivalent changes and modifications made according to the scope of the application for patent of the present invention and the content of the patent specification are still within the scope of the present invention. within the scope of the invention patent.
11:前置步驟 12:混合步驟 13:沉積步驟 21:低壓環境 211:管線 22:基板 23:微液滴產生器 231:噴頭 3:太陽能電池薄膜 31:異質微結構層 4:三層薄膜結構太陽能電池 41:密封外罩 42:焊接導線 43:外部光線 5:五層薄膜結構太陽能電池 A:液態材料 B:液態材料 C:液態材料 D:前電極 E:背電極 F:主動層 G:電洞傳輸載體層 H:電子傳輸載體層 11: Preliminary steps 12: Mixing step 13: Deposition step 21: Low pressure environment 211: Pipeline 22: Substrate 23: Droplet Generator 231: Sprinkler 3: Solar cell film 31: Heterogeneous microstructure layers 4: Three-layer thin-film structure solar cell 41: Seal the cover 42: Solder the wires 43: External Light 5: Five-layer thin-film structure solar cell A: Liquid material B: liquid material C: liquid material D: Front electrode E: back electrode F: Active layer G: hole transport carrier layer H: electron transport carrier layer
本發明之其它的特徵及功效,將於參照圖式的實施方式中清楚地呈現,其中: 圖1是一流程圖,說明本發明太陽能電池薄膜的製造方法之一實施例; 圖2是一示意圖,說明本實施例的設備配置; 圖3是一不完整的放大圖,說明本實施例製造出的太陽能電池薄膜的結構; 圖4是一示意圖,說明以本實施例製得的三層薄膜結構之太陽能電池;及 圖5是一示意圖,說明以本實施例製得的五層薄膜結構之太陽能電池。 Other features and effects of the present invention will be clearly presented in the embodiments with reference to the drawings, wherein: 1 is a flow chart illustrating an embodiment of a method for manufacturing a solar cell thin film of the present invention; FIG. 2 is a schematic diagram illustrating the device configuration of this embodiment; FIG. 3 is an incomplete enlarged view illustrating the structure of the solar cell thin film manufactured in this embodiment; FIG. 4 is a schematic diagram illustrating a solar cell with a three-layer thin film structure obtained in this example; and FIG. 5 is a schematic diagram illustrating a solar cell with a five-layer thin film structure prepared in this example.
21:低壓環境 21: Low pressure environment
211:管線 211: Pipeline
22:基板 22: Substrate
23:微液滴產生器 23: Droplet Generator
231:噴頭 231: Sprinkler
3:太陽能電池薄膜 3: Solar cell film
A:液態材料 A: Liquid material
B:液態材料 B: liquid material
C:液態材料 C: liquid material
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Publication number | Priority date | Publication date | Assignee | Title |
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US20120292725A1 (en) * | 2011-01-14 | 2012-11-22 | Mark Greyson Christoforo | Deposition and post-processing techniques for transparent conductive films |
TW201427037A (en) * | 2012-12-19 | 2014-07-01 | Sunpower Corp | Solar cell emitter region fabrication using silicon nano-particles |
CN104485392A (en) * | 2014-12-26 | 2015-04-01 | 浙江正泰太阳能科技有限公司 | Preparation method of thin-film solar cell |
TW201720759A (en) * | 2015-12-01 | 2017-06-16 | 台灣中油股份有限公司 | Perovskite donor layer applied to active layer of thin-film solar cell and method for manufacturing the same |
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US20120292725A1 (en) * | 2011-01-14 | 2012-11-22 | Mark Greyson Christoforo | Deposition and post-processing techniques for transparent conductive films |
TW201427037A (en) * | 2012-12-19 | 2014-07-01 | Sunpower Corp | Solar cell emitter region fabrication using silicon nano-particles |
CN104485392A (en) * | 2014-12-26 | 2015-04-01 | 浙江正泰太阳能科技有限公司 | Preparation method of thin-film solar cell |
TW201720759A (en) * | 2015-12-01 | 2017-06-16 | 台灣中油股份有限公司 | Perovskite donor layer applied to active layer of thin-film solar cell and method for manufacturing the same |
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