CN218664282U

CN218664282U - Anti-slip device for stacking wafer iron frames

Info

Publication number: CN218664282U
Application number: CN202222777847.3U
Authority: CN
Inventors: 陈立梅; 朱锦健; 蒋菲菲
Original assignee: Jiangsu Union Semiconductor Co Ltd
Current assignee: Jiangsu Union Semiconductor Co Ltd
Priority date: 2022-10-21
Filing date: 2022-10-21
Publication date: 2023-03-21
Anticipated expiration: 2032-10-21

Abstract

The utility model discloses a wafer chase piles up antiskid device that falls in the semiconductor processing manufacturing field, including a plurality of wafer chase of piling up the place, wafer chase be provided with preceding sharp limit, back sharp limit, left straight line limit and right straight line limit around respectively, preceding sharp limit is parallel with back sharp limit symmetry, left side sharp limit is parallel with right straight line limit symmetry, corresponds left side sharp limit, back sharp limit, right straight line limit of wafer chase all are provided with the fixer, the fixer is the hollow cylinder structure, the equal coaxial ring limiting plate that is provided with of downside on the fixer, ring limiting plate internal diameter is the same with the internal diameter of fixer, the external diameter of ring limiting plate is greater than the external diameter of fixer, be provided with a plurality of countersunk head holes on the downside ring limiting plate. The utility model discloses can fix the put position of wafer chase, restrict stacking height of wafer chase, can effectively prevent wafer chase landing risk.

Description

Anti-slip device for stacking wafer iron frames

Technical Field

The utility model belongs to semiconductor processing manufacturing field, in particular to wafer iron frame piles up antiskid device that falls.

Background

Among the prior art, wafer chase mainly plays the effect of placing and carrying the wafer in semiconductor production, in order to simplify the transportation and reduce contaminated risk as far as possible, the chip manufacturer utilizes wafer chase to carry and store the wafer, and idle wafer chase is piled up usually and is placed on goods shelves or work desktop, and its weak point lies in: the placing position of the wafer iron frame is not limited, the stacking height of the wafer iron frame is not controlled, when the number of the wafers which are left unused is large, the wafer iron frame located at the high position can slide down, and people can be hit by the slide down.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a wafer chase piles up antiskid device that falls can fix the locating place of wafer chase, restricts stacking height of wafer chase, can effectively prevent wafer chase landing risk.

The purpose of the utility model is realized like this: the utility model provides a wafer chase piles up antiskid device that falls, includes a plurality of wafer chase that stack up and places, the setting is provided with preceding straight line limit, back straight line limit, left straight line limit and right straight line limit respectively all around of wafer chase, preceding straight line limit is parallel with back straight line limit symmetry, left side straight line limit is parallel with right straight line limit symmetry, its characterized in that corresponds left straight line limit, back straight line limit, right straight line limit of wafer chase all are provided with the fixer, the fixer is the hollow cylinder structure, the equal coaxial ring limiting plate that is provided with of downside on the fixer, ring limiting plate internal diameter is the same with the internal diameter of fixer, the external diameter of ring limiting plate is greater than the external diameter of fixer, be provided with a plurality of countersunk head holes on the downside ring limiting plate.

The utility model discloses during the use, at goods shelves or three fixer of work desktop installation, when placing first wafer chase, make the left straight line limit of wafer chase, back straight line limit, right straight line limit respectively with left fixer, back fixer, the outer wall contact of right fixer, thereby it places the region to form stable triangle, again through installation fastener in the counter sink, the preferred screw of fastener, it is fixed with goods shelves or work desktop, when follow-up wafer chase of accomodating, from supreme stacking in proper order down, until the downside of wafer chase contact last ring limiting plate. Compared with the prior art, the beneficial effects of the utility model reside in that: the arrangement position of the wafer iron frame is fixed, so that the iron frame jig is arranged more orderly, and the time is saved for subsequently taking the wafer iron frame jig; the placing height of the wafer iron frame is limited, the potential safety hazard caused by too high stacking is avoided, and the risk of material falling is effectively prevented.

As a further improvement, the number of counter bores is 2, two the counter bores symmetric distribution is on lower ring limiting plate.

As a further improvement of the utility model, the straight line edge of the wafer iron frame is overlapped with the contact point of the fixer and the middle point of the straight line edge.

As a further improvement, the utility model also includes the tee bend supporting seat, all be provided with the optical axis on the through-hole of supporting seat, the other end of optical axis all is provided with the support, it has the slider all to overlap on the optical axis, be provided with the reference column on the slider, the external diameter of reference column and the internal diameter adaptation of fixer, the reference column stretches into inside the fixer. The distance between the three fixers can be adjusted by moving the sliding block so as to meet the requirement that the left straight line side, the rear straight line side and the right straight line side of the wafer iron frames with different sizes are all in contact with the outer walls of the corresponding fixers.

As a further improvement of the utility model, the height of fixer is 155mm, the internal diameter of ring limiting plate is 72mm, the external diameter of ring limiting plate is 105mm.

Drawings

Fig. 1 is a schematic view of the three-dimensional structure of the present invention.

FIG. 2 is a schematic view of the positions of the holder and the wafer chase.

Fig. 3 is a cross-sectional view of the holder.

Fig. 4 is a left side view of the three-way support seat.

FIG. 5 is a top view of the three-way support seat.

Fig. 6 is a schematic perspective view of a slider.

Fig. 7 is a front view of the present invention.

The wafer positioning device comprises a wafer iron frame 1, a left straight line side 101, a rear straight line side 102, a right straight line side 103, a front straight line side 104, a fixer 2, a ring limiting plate 3, a countersunk hole 301, a three-way supporting seat 4, a through hole 401, an optical axis 5, a support 6, a sliding block 7 and a positioning column 701.

Detailed Description

As shown in fig. 1-7, a wafer iron frame stacking anti-slipping device comprises a plurality of stacked wafer iron frames 1, wherein a front straight line side 104, a rear straight line side 102, a left straight line side 101 and a right straight line side 103 are respectively arranged on the periphery of each wafer iron frame 1, the front straight line side 104 is symmetrically parallel to the rear straight line side 102, the left straight line side 101 is symmetrically parallel to the right straight line side 103, each of the left straight line side 101, the rear straight line side 102 and the right straight line side 103 corresponding to the wafer iron frame 1 is provided with a holder 2 with a height of 155mm, each holder 2 is of a hollow cylinder structure, contact points of the straight line sides of the wafer iron frames 1 and the outer walls of the holders 2 are overlapped with the middle points of the corresponding straight line sides, and during actual operation, in consideration of the weight of the wafer iron frames 1, a worker can adjust the contact positions of the left straight line sides 101 and the right straight line sides 103 and the holders 2, so that the left contact points and the right contact points are positioned on the front sides of the middle points of the corresponding straight line sides, and a more stable triangular structure can be obtained; the upper side and the lower side of the fixer 2 are coaxially provided with the ring limiting plates 3, the inner diameters of the ring limiting plates 3 and the fixer 2 are both 72mm, the outer diameter of each ring limiting plate 3 is larger than that of the fixer 2, and the outer diameter of each ring limiting plate 3 is preferably 105mm; two countersunk holes 301 which are symmetrically distributed are formed in the lower circular limiting plate 3; still include tee bend supporting seat 4, all be provided with optical axis 5 on the three through-hole 401 of supporting seat, the other end of three optical axis 5 all is provided with support 6, all overlaps on three optical axis 5 to be equipped with slider 7, is provided with the reference column 701 of the internal diameter adaptation of external diameter and fixer 2 on the slider 7, and three reference column 701 all stretches into inside corresponding fixer 2.

When the utility model is used, when the idle wafer iron frame 1 has a single size and a large number, only three fixing devices 2 can be used, and the fixing devices 2 are arranged on the goods shelf or the working desktop through the screws arranged in the counter bores 301; when idle wafer chase 1 size is more and the dwell time is shorter, can use fixer 2 and the 5 guide rail combinations of optical axis, install three fixer 2 on corresponding slider 7 through corresponding reference column 701, movable slider 7 adjusts the distance between three fixer 2, with the left straight line limit 101 who satisfies not unidimensional wafer chase 1, back straight line limit 102, right straight line limit 103 homoenergetic and the contact of corresponding 2 outer walls of fixer, when accomodating wafer chase 1, from supreme stacking in proper order down, until the downside of wafer chase 1 contact last ring limiting plate 3. The utility model has the advantages that: the arrangement position of the wafer iron frame 1 is fixed, so that the iron frame jig is arranged more orderly, and the time is saved for subsequently taking the iron frame jig; the placing height of the wafer iron frame 1 is limited, the potential safety hazard caused by too high stacking is avoided, and the risk of material falling is effectively prevented.

The present invention is not limited to the above embodiments, and based on the technical solutions disclosed in the present invention, those skilled in the art can make some substitutions and modifications to some technical features without creative labor, and these substitutions and modifications are all within the protection scope of the present invention.

Claims

1. The utility model provides a wafer chase piles up antiskid device that falls, includes a plurality of wafer chase that stack up and place, be provided with preceding straight line limit, back straight line limit, left straight line limit and right straight line limit around the wafer chase respectively, preceding straight line limit is parallel with back straight line limit symmetry, left side straight line limit is parallel with right straight line limit symmetry, its characterized in that corresponds left straight line limit, back straight line limit, right straight line limit of wafer chase all are provided with the fixer, the fixer is the hollow cylinder structure, the equal coaxial ring limiting plate that is provided with of downside on the fixer, ring limiting plate internal diameter is the same with the internal diameter of fixer, the external diameter of ring limiting plate is greater than the external diameter of fixer, be provided with a plurality of countersunk head holes on the downside ring limiting plate.

2. The wafer iron frame stacking anti-slip device according to claim 1, wherein the number of the counter bores is 2, and the two counter bores are symmetrically distributed on the lower ring limiting plate.

3. The wafer iron frame stacking anti-slip device according to claim 1 or 2, wherein the straight edge of the wafer iron frame overlaps the middle point of the straight edge with the contact point of the holder.

4. The wafer iron frame stacking anti-slipping device as claimed in claim 1, further comprising a three-way support seat, wherein the through holes of the support seat are provided with optical shafts, the other ends of the optical shafts are provided with brackets, the optical shafts are sleeved with sliding blocks, the sliding blocks are provided with positioning columns, the outer diameters of the positioning columns are matched with the inner diameter of the holder, and the positioning columns extend into the holder.

5. The wafer iron frame stacking anti-slip device according to claim 1 or 4, wherein the height of the retainer is 155mm, the inner diameter of the ring limiting plate is 72mm, and the outer diameter of the ring limiting plate is 105mm.