CN218629871U - Low-coupling self-limiting piezoresistive acceleration sensor - Google Patents
Low-coupling self-limiting piezoresistive acceleration sensor Download PDFInfo
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- CN218629871U CN218629871U CN202223290819.5U CN202223290819U CN218629871U CN 218629871 U CN218629871 U CN 218629871U CN 202223290819 U CN202223290819 U CN 202223290819U CN 218629871 U CN218629871 U CN 218629871U
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Abstract
The utility model is suitable for an acceleration sensor technical field provides a low coupling from spacing piezoresistive acceleration sensor, including the sensitive detection layer of inertial force, the upper and lower both sides on the sensitive detection layer of inertial force all install the protection cover plate, the sensitive detection layer of inertial force is including the installation piece, it is sectorial from spacing draw-in groove to have seted up in the installation piece, install sectorial quality piece from spacing draw-in groove, the one end that the quality piece is close to the centre of a circle angle is connected with sensitive roof beam, sensitive roof beam is the narrow arm structure of full expert, still be provided with the lead terminal platform on the installation piece, the lead terminal platform includes a plurality of lead terminal, the lead terminal platform has two reference resistance and two working resistance through the pin connection, working resistance sets up on sensitive roof beam. The device has the advantages of simple integral structure, low cost, good linearity, high sensitivity and self-limiting impact load resistance.
Description
Technical Field
The utility model belongs to the technical field of acceleration sensor, especially, relate to a low coupling from spacing piezoresistive acceleration sensor.
Background
The principle of the sensitive element used by the micro-sensor includes capacitance, piezoelectricity, piezoresistance, thermocouple, resonance, tunnel current change and the like. Among them, the inertial sensor and the pressure sensor are the most widely used sensors at present.
Piezoresistive sensors are based on the piezoresistive effect of single crystal silicon material and a common structure is a beam-mass structure. The mass block is supported and suspended through a cantilever beam or a connecting beam, and the piezoresistor is manufactured on the beam along the crystal direction through an ion implantation or diffusion process. After the monocrystalline silicon material is acted by force, the resistivity changes, and an electric signal output which is in direct proportion to the force change can be obtained through a measuring circuit. When the sensor senses the inertia force, the mass block is deflected to drive the support beam to deform such as twist or bend, stress change is generated in the resistor, so that the change of the resistance value of the piezoresistor is caused, the change is converted into measurable signals such as voltage, current and the like by using a proper peripheral circuit (generally in a Wheatstone bridge form) to be output, and the relationship between the output signals and the measured acceleration can be established through calibration, so that the acceleration is measured.
It is known that the piezoresistive acceleration sensor has a high natural frequency while improving the sensitivity of the device from the original cantilever beam structure to the four-beam, five-beam, and four-beam dual-mass structure. Although the micromachining process is mature and the theoretical research level is continuously advanced, some problems are still not completely solved. Such as: how to adopt reasonable structure to realize decoupling of structure in all directions, realize the suppression to the lateral disturbance to and how to effectively resist impact load etc..
SUMMERY OF THE UTILITY MODEL
An object of the embodiment of the utility model is to provide a low coupling from spacing piezoresistive acceleration sensor aims at solving the problem of proposing among the above-mentioned background art.
The embodiment of the utility model provides a realize like this, a low coupling from spacing piezoresistive acceleration sensor, including the sensitive detection layer of inertial force, protective cover is all installed to the upper and lower both sides on the sensitive detection layer of inertial force, the sensitive detection layer of inertial force is including the installation piece, seted up sectorial from spacing draw-in groove in the installation piece, install sectorial quality piece from spacing draw-in groove, the one end that the quality piece is close to the central angle is connected with sensitive roof beam, and sensitive roof beam is the narrow arm structure of full expert, still be provided with the lead terminal platform on the installation piece, the lead terminal platform includes a plurality of lead terminals, the lead terminal platform has two reference resistance and two working resistance through the pin connection, working resistance sets up on sensitive roof beam.
According to a further technical scheme, the two working resistors are installed on the sensitive beam in an ion implantation mode.
According to the further technical scheme, the two reference resistors are installed on the installation block in an ion implantation mode.
According to a further technical scheme, the two protective cover plates are made of glass.
According to a further technical scheme, the two protective cover plates are connected with the mounting block in a contraposition silicon-glass anodic bonding mode.
The embodiment of the utility model provides a pair of low coupling from spacing piezoresistive acceleration sensor, overall structure is simple, and is with low costs, and the linearity is good, and sensitivity is high and have from spacing anti impact load capacity. The technical problems that the large-range accelerometer is difficult to decouple between the axes and overload protection is difficult to realize are solved. Meanwhile, the high sensitivity, the low coupling degree and the high overload resistance of the accelerometer are organically combined by optimizing the structural parameters of the beam and fusing the limiting mechanism.
Drawings
Fig. 1 is a schematic structural diagram of a low-coupling self-limiting piezoresistive acceleration sensor according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of an inertia force sensitive detection layer in a low-coupling self-limiting piezoresistive acceleration sensor according to an embodiment of the present invention;
fig. 3 is an enlarged view of a position a of a low-coupling self-limiting piezoresistive acceleration sensor according to an embodiment of the present invention.
In the drawings: an inertial force sensitive detection layer 1; a protective cover plate 2; a mass block 3; a self-limiting clamping groove 4; a sensitive beam 5; a lead terminal block 6; a lead 7; a reference resistor 8; a working resistor 9; the block 10 is mounted.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
The following detailed description is provided for the specific embodiments of the present invention.
As shown in fig. 1-3, for the utility model discloses a low coupling from spacing piezoresistive acceleration sensor that embodiment provided, including the sensitive detection layer 1 of inertial force, protective cover 2 is all installed to the upper and lower both sides on the sensitive detection layer 1 of inertial force, the sensitive detection layer 1 of inertial force includes installation piece 10, fan-shaped from spacing draw-in groove 4 has been seted up in the installation piece 10, install fan-shaped quality piece 3 in the spacing draw-in groove 4, the one end that quality piece 3 is close to the central angle of a circle is connected with sensitive roof beam 5, and sensitive roof beam 5 is the narrow arm structure of full lead-through, still be provided with terminal platform 6 on the installation piece 10, terminal platform 6 includes a plurality of lead terminals, terminal platform 6 is connected with two reference resistance 8 and two work resistance 9 through lead wire 7, work resistance 9 sets up on sensitive roof beam 5.
The embodiment of the utility model provides an in, overall structure is last with sandwich's stromatolite sealed protection, whole quality piece 3's simple structure, and quality piece 3 is very little about sensitive roof beam 5 symmetric distribution, sensitive roof beam 5 at the working direction moment of inertia, and rigidity is low to provide higher stress strain sensitivity at the working direction, it is big at non-working direction moment of inertia, rigidity is high, can effectively restrain the interference of meeting an emergency that non-working direction inertia arouses.
Two working resistors 9 are manufactured on the sensitive beam 5 in an ion implantation mode, and the other two reference resistors 8 are also manufactured on the mounting block 10 in an ion implantation mode, and are connected with each other to realize external full-bridge output through the lead terminal block 6. From spacing draw-in groove 4 can appear when the big displacement of overrange, through with 3 marginal curve normal direction vertical contact of quality piece, increase area of contact reduces stress concentration, plays spacing guard action in the quality piece 3.
The invention can realize the modulation of the sensitivity, the linearity and the impact resistance of the accelerometer by changing the size of the mass block 3, the length-width ratio of the sensitive beam 5 and the like. On the premise of ensuring that the sensor has high enough sensitivity in the working direction, the invention effectively reduces the coupling interference in other non-sensitive directions, greatly improves the natural frequency, and realizes the purposes of low cost and easy realization.
As an optimized embodiment of the utility model, two protection apron 2 are the glass material, and two protection apron 2 carry out counterpoint silicon-glass anodic bonding with installation piece 10 respectively, form a semi-enclosed cavity, guarantee through the suitable gap width of design that the quality piece has appropriate air damping coefficient and make the accelerometer have excellent dynamic response characteristic, realize simultaneously at follow-up cutting, further packaging process to the effective protection of the sensitive detection layer of inertial force 1.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (5)
1. The utility model provides a low coupling is from spacing piezoresistive acceleration sensor, includes the sensitive detection layer of inertial force, the protection apron is all installed to the upper and lower both sides on the sensitive detection layer of inertial force, a serial communication port, the sensitive detection layer of inertial force is including the installation piece, it is sectorial from spacing draw-in groove to have seted up in the installation piece, install sectorial quality piece from spacing draw-in groove, the one end that the quality piece is close to the central angle is connected with sensitive roof beam, sensitive roof beam is the narrow arm structure of full expert, still be provided with the lead terminal platform on the installation piece, the lead terminal platform includes a plurality of lead terminals, the lead terminal platform has two reference resistance and two working resistance through the pin connection, working resistance sets up on sensitive roof beam.
2. The low-coupling self-limiting piezoresistive acceleration sensor according to claim 1, wherein said two working resistors are mounted on said sensitive beam by means of ion implantation.
3. The low-coupling self-limiting piezoresistive acceleration sensor according to claim 2, wherein said two reference resistors are mounted on said mounting block by means of ion implantation.
4. The low-coupling self-limiting piezoresistive acceleration sensor according to claim 1, wherein the two protective cover plates are made of glass.
5. The low-coupling self-limiting piezoresistive acceleration sensor according to claim 4, wherein both of said protective cover plates are connected to the mounting block by means of aligned silicon-glass anodic bonding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223290819.5U CN218629871U (en) | 2022-12-08 | 2022-12-08 | Low-coupling self-limiting piezoresistive acceleration sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223290819.5U CN218629871U (en) | 2022-12-08 | 2022-12-08 | Low-coupling self-limiting piezoresistive acceleration sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218629871U true CN218629871U (en) | 2023-03-14 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202223290819.5U Active CN218629871U (en) | 2022-12-08 | 2022-12-08 | Low-coupling self-limiting piezoresistive acceleration sensor |
Country Status (1)
| Country | Link |
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| CN (1) | CN218629871U (en) |
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2022
- 2022-12-08 CN CN202223290819.5U patent/CN218629871U/en active Active
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