CN218507895U - Vacuum physical deposition equipment - Google Patents

Abstract

The utility model provides a pair of vacuum physical deposition equipment, be in including the vacuum chamber, and set up in the vacuum chamber, and receive and release system, metal source system and the a steering system that sets up at first direction interval in proper order, wherein, receive and release the vertical setting of system and metal source system in the bottom of vacuum chamber, steering system sets up on the vacuum chamber body wall, receive and release system, metal source system and steering system setting on same horizontal plane. Through the embodiment of the utility model provides an equipment can handle many rolls of films simultaneously through the roller of limited quantity, and not only the cost is lower, still convenient to detach and transportation simultaneously.

Description

Vacuum physical deposition equipment

Technical Field

The utility model relates to a vacuum coating equipment technical field, concretely relates to vacuum physical deposition equipment.

Background

The evaporation is to place the material to be evaporated in a high temperature resistant container such as a crucible, heat the material to be evaporated and melt the material, so that the material to be evaporated is gasified and deposited on the passing film.

In the process of implementing the invention, the inventor finds that the existing vacuum physical deposition equipment needs more rollers, is expensive and is difficult to disassemble and transport.

Disclosure of Invention

In view of this, an object of the embodiments of the present invention is to provide a vacuum physical deposition apparatus, so as to solve the technical problem of low space utilization rate in the prior art.

In order to achieve the above object, an embodiment of the present invention provides a vacuum physical deposition apparatus, which includes a vacuum chamber, and a retraction system, a metal source system and a steering system disposed in the vacuum chamber and sequentially spaced in a first direction, wherein,

the collecting and releasing system and the metal source system are vertically arranged at the bottom of the vacuum cavity, the steering system is arranged on the wall of the vacuum cavity, and the collecting and releasing system, the metal source system and the steering system are arranged on the same horizontal plane.

In some possible embodiments, the retraction system comprises: the first cylinder is vertically arranged in the vacuum chamber, and the first unwinding part and the first winding part are sequentially arranged on the first cylinder from bottom to top;

the metal source system includes: the second cylinder is vertically arranged in the vacuum chamber, and the first metal source and the second metal source are sequentially arranged on the second cylinder from bottom to top;

the steering system includes: the first steering roller and the second steering roller are respectively connected with the side wall of the vacuum chamber in a rotating mode, the first steering roller is located between the first metal source and the second metal source, the installation height of the second steering roller in the vertical direction is higher than that of the second metal source steering roller, and the metal source system is located between the steering system and the collecting and releasing system.

In some possible embodiments, the vacuum physical deposition apparatus further comprises a cooling mechanism, the cooling mechanism comprising:

the first cooling roller is arranged in the vacuum chamber, positioned between the collecting and releasing system and the metal source system and rotatably connected with the inner wall of the vacuum chamber, and the mounting height of the first cooling roller in the vertical direction is lower than that of the first steering roller;

the installation height of the first cooling roller and the first steering roller in the vertical direction is higher than that of the first unwinding part.

In some possible embodiments, the vacuum physical deposition apparatus further includes a pressing mechanism, the pressing mechanism including:

the first squeezing roller is arranged in the vacuum chamber and is rotationally connected with the inner wall of the vacuum chamber; the surface of the first extrusion roller is made of soft material and is in rolling contact with the first steering roller.

In some possible embodiments, the cooling mechanism further comprises:

the second cooling roller is arranged in the vacuum chamber, is positioned between the collecting and releasing system and the metal source system, is rotatably connected with the inner wall of the vacuum chamber, and is equal to the second steering roller in the vertical direction in installation height;

the mounting heights of the second cooling roller and the second steering roller in the vertical direction are higher than those of the first winding part; the installation height of the second cooling roller in the vertical direction is higher than the second turning roller and lower than the first coiling part, and the bottom tangent plane of the second cooling roller and the top tangent plane of the second turning roller are on the same horizontal plane.

In some possible embodiments, the pressing mechanism further comprises:

the second squeezing roller is arranged in the vacuum chamber and is rotationally connected with the inner wall of the vacuum chamber; the surface of the second extrusion roller is made of soft material and is in rolling contact with the second turning roller.

In some possible embodiments, the retraction system further comprises: the second unwinding part and the second winding part are positioned above the first winding part and are sequentially arranged on the first cylinder from bottom to top;

the metal source system further comprises: the third metal source and the fourth metal source are positioned above the second metal source and are sequentially arranged on the second cylinder from bottom to top;

the steering system further includes: and the third steering roller and the fourth steering roller are respectively connected with the side wall of the vacuum chamber in a rotating way, the third steering roller is positioned between the third metal source and the fourth metal source, and the installation height of the fourth steering roller in the vertical direction is higher than that of the fourth metal source steering roller.

In some possible embodiments, the top tangent plane of the second unwinding part and the bottom tangent plane of the third turning roll are on the same horizontal plane, and the installation height of the second unwinding part and the fourth turning roll in the vertical direction is equal.

The beneficial technical effects of the technical scheme are as follows:

the embodiment of the utility model provides a pair of vacuum physical deposition equipment, including the vacuum chamber to and set up in the vacuum chamber, and receive and release system, metal source system and the a steering system that set up at first direction interval in proper order, wherein, receive and release the vertical setting of system and metal source system in the bottom of vacuum chamber, steering system sets up on the vacuum chamber wall, receive and release system, metal source system and steering system setting on same horizontal plane. Through the embodiment of the utility model provides an equipment can handle many rolls of films simultaneously through the roller of limited quantity, and not only the cost is lower, still convenient to detach and transportation simultaneously.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a front view of a thin film evaporation apparatus with high space utilization provided by an embodiment of the present invention;

fig. 2 is a front view of another thin film evaporation apparatus with high space utilization according to an embodiment of the present invention;

fig. 3 is a front view of another thin film evaporation apparatus with high space utilization according to an embodiment of the present invention;

fig. 4 is a front view of another thin film evaporation apparatus with high space utilization according to an embodiment of the present invention;

fig. 5 is a front view of another thin film evaporation apparatus with high space utilization according to an embodiment of the present invention;

fig. 6 is a front view of another thin film evaporation apparatus with high space utilization according to an embodiment of the present invention;

fig. 7 is a front view of another thin film evaporation apparatus with high space utilization according to an embodiment of the present invention;

fig. 8 is a flowchart of a physical deposition method according to an embodiment of the present invention.

Fig. 9 is a flow chart of another physical deposition method provided by the embodiment of the invention.

The reference numbers illustrate:

11. a first column; 12. a first unwinding part; 13. a first winding part; 14. a second unwinding part; 15. a second winding part;

21. a second cylinder; 22. a first metal source; 23. a second metal source; 24. a third metal source; 25. a fourth metal source;

31. a first steering roller; 32. a second turning roll; 33. a third turning roll; 34. a fourth steering roller;

41. a first cooling roll; 42. a second cooling roll;

51. a first squeeze roller; 52. a second squeeze roll.

Detailed Description

Features and exemplary embodiments of various aspects of the present invention will be described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the invention by illustrating examples of the invention. In the drawings and the following description, at least some well-known structures and techniques of construction have not been shown in order to avoid unnecessarily obscuring the present invention; also, the size of the mechanical sub-structures may be exaggerated for clarity. Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

Example one

As shown in fig. 1 to 6, the embodiment of the utility model provides a vacuum physical deposition equipment, this vacuum film evaporation equipment include the vacuum chamber to and set up receiving and releasing system, metal source system and the a steering system in the vacuum chamber, wherein, receive and release the vertical setting in vacuum chamber's bottom of system and metal source system, a steering system sets up on the vacuum chamber wall, receive and release system, metal source system and a steering system setting on same horizontal plane, preferably, receive and release system, metal source system and a steering system all with vacuum chamber detachable connects. Through the embodiment of the utility model provides a vacuum physical deposition equipment can handle many rolls of films simultaneously through the roller of limited quantity, and not only the cost is lower, still convenient to detach and transportation simultaneously. In some embodiments, the retraction system comprises: the metal source system comprises a first cylinder 11 vertically arranged in a vacuum chamber, and a first unreeling part 12 and a first reeling part 13 which are sequentially arranged on the first cylinder 11 from bottom to top, wherein the metal source system comprises a second cylinder 21 vertically arranged in the vacuum chamber, and a first metal source 22 and a second metal source 23 which are sequentially arranged on the second cylinder 21 from bottom to top; the steering system comprises a first steering roller 31 and a second steering roller 32 which are respectively arranged in the vacuum chamber and are rotationally connected with the inner wall of the vacuum chamber, the installation height of the second steering roller 32 in the vertical direction is higher than that of the first steering roller 31, and the metal source system is positioned between the steering system and the collecting and releasing system, or the steering system is positioned on the right side of the metal source system. Note that the first column 11 and the second column 21 are mounted in positions close to the side wall of the vacuum chamber to which the steering system is mounted. The embodiment of the utility model provides a only can accomplish the physical deposition of film through two steering rolls, need more roller with traditional vacuum physical deposition equipment and compare, great reduction the cost. Furthermore, the embodiment of the utility model provides a pair of vacuum physical deposition equipment, through with first and metal source system set up in the inside diapire of vacuum chamber vertically, and set up a steering system on the inner wall of vacuum chamber, greatly improved the utilization ratio in vacuum space.

In some embodiments, the vacuum chamber may consist of a vacuum pumping system and an evaporation chamber. The embodiment of the utility model provides an in, whole physical deposition equipment includes cryrogenic system, ordinary cold system, winding system, lobe pump, mechanical pump, diffusion pump and vacuum cavity, and ordinary cold system is responsible for controlling the chill roll, gives the film cooling. And the deep cooling is responsible for cooling the vacuum cavity. The diffusion pump is arranged in the vacuum cavity and is responsible for vacuumizing the vacuum cavity, and the roots pump and the mechanical pump are arranged outside the vacuum cavity and are responsible for vacuumizing the vacuum cavity.

The evaporation source is a member for heating the film material to evaporate, and in this embodiment, the evaporation source used for vacuum evaporation may be resistance heating, electron beam heating, high-frequency induction heating, arc heating, laser heating, or the like.

As shown in fig. 2, in some embodiments, the vacuum thin film evaporation apparatus further includes a cooling mechanism, the cooling mechanism includes a first cooling roller 41, which is disposed in the vacuum chamber and between the collecting and releasing system and the metal source system, and is rotatably connected to the inner wall of the vacuum chamber, the installation height of the first cooling roller 41 in the vertical direction is lower than that of the first turning roller 31, and the installation heights of the first cooling roller 41 and the first turning roller 31 in the vertical direction are higher than that of the first unwinding part 12; in the coating by vaporization process, the film is located the top of metal source, treats that the coating by vaporization material melts into gaseous state atom or atomic group under the high temperature effect, deposits on the film of passing by, because gaseous state atom or atomic group have high temperature, cools down the film through the chill roll, prevents that the film from being burnt into the hole by the atom.

Preferably, the top section of the first cooling roller 41 is on the same horizontal plane as the bottom section of the first turning roller 31, so that the film can be horizontally moved on the metal source to uniformly evaporate the material to be evaporated on the film. The installation height of the first cooling roller 41 and the first turning roller 31 in the vertical direction is higher than that of the first unwinding part 12, so that the film between the first unwinding part 12 and the first cooling roller 41 is wound at a certain angle, the tension of the film is controlled conveniently, and wrinkles or deformation are avoided.

As shown in fig. 3, in some embodiments, the vacuum thin film evaporation apparatus may further include a squeezing mechanism including a first squeezing roller 51 disposed in the vacuum chamber and rotatably connected to an inner wall of the vacuum chamber; the surface of the first pressing roll 51 is a soft material and is in rolling contact with the first steering roll 31. Through setting up first squeeze roll 51, when the film passes through first direction changing roller 31, can give the film and exert a extrusion force, increase the adhesive force of coating by vaporization material and film, the material on general squeeze roll surface is the rubber material, or other softer materials, for example the better rubber of temperature resistance, such as chlorohydrin rubber etc. avoid causing the damage to the film. The first squeeze roll 51 is disposed in the second direction, and the rolls are parallel to each other, and in addition, in order to facilitate control of the tension during the film feeding, the diameters of the squeeze roll and the turn roll are equal in the present embodiment.

In some embodiments, the cooling mechanism further comprises: the second cooling roller 42 is arranged in the vacuum chamber, is positioned between the collecting and releasing system and the metal source system, is rotatably connected with the inner wall of the vacuum chamber, and is equal to the second steering roller 32 in the vertical direction in installation height; the second cooling roll 42 and the second steering roll 32 are both mounted at a height higher than the first winding portion 13 in the vertical direction. In the coating by vaporization in-process, the film is located the top of metal source, treats that the coating by vaporization material melts into gaseous state atom or atomic group under the high temperature effect, deposits on the film of passing by, because gaseous state atom or atomic group have a high temperature, through setting up second chill roll 42, can further cool down the film in the coating by vaporization, prevents that the film from being burnt into the hole by the atom.

In some embodiments, as shown in fig. 4, the second cooling roller 42 is installed at the same height in the vertical direction as the second turning roller 32, so that the thin film is horizontally transported above the first metal source 22, and the evaporation material can be uniformly evaporated on the thin film. The installation height of the second cooling roller 42 in the vertical direction is higher than that of the first winding part 13, so that the film between the first winding part 13 and the second cooling roller 42 is rolled at a certain angle, the tension of the film is convenient to control, and wrinkles or deformation are avoided. In order to verify the influence of the angle on the film properties, the present application obtained a film by cutting the film obtained by adjusting the position of the first winding portion 13 to 42 without changing the position and cutting the film to a sample having a width of 2cm and a length of 5cm, and obtaining the tensile strength of the film at different angles. Each set of samples was pulled at a rate of 200mm/min using a tensile strength tester from Hongtuo macrotopology. Each set included three samples and final averaging gave the following table. It is possible that the tensile strength of the resulting product increases gradually over horizontal angles in the range of 0-90 degrees. Therefore, the tension of the film can be better controlled by the fact that the film is moved at a certain angle.

Angle of rotation	Tensile Strength MPA
		0	23.4
10	25.3
		20	26.7
30	27.0
		40	28.5
50	28.9
		60	29.3
70	30.2
		80	30.6

In some embodiments, as shown in fig. 5 and 6, the second cooling roller 42 is installed at a lower height than the first winding portion 13 in the vertical direction, so that the film is wound at an angle between the first winding portion 13 and the second cooling roller 42, thereby controlling the tension of the film and avoiding wrinkles or deformation. The bottom section of the second cooling roller 42 is located on the same horizontal plane as the top section of the second turning roller 32, so that the film is horizontally transported above the first metal source 22, and the evaporation material can be uniformly evaporated on the film.

In some embodiments, the pressing mechanism further comprises a second pressing roll 52 disposed within the vacuum chamber and rotationally connected to the inner wall of the vacuum chamber; the surface of the second pressing roll 52 is a soft material and is in rolling contact with the second turning roll 32. Through setting up second squeeze roll 52, when the film passes through second turn roll 32, can give the film and exert an extrusion force, increase the adhesive force of coating by vaporization material and film, the material on general squeeze roll surface is the rubber material, or other softer materials, for example the better rubber of temperature resistance, such as chlorohydrin rubber etc. avoid causing the damage to the film.

In some embodiments, the winding and unwinding system further includes a second unwinding portion 14 and a second winding portion 15, and the second unwinding portion 14 and the second winding portion 15 are both located above the first winding portion 13 and are sequentially disposed on the first column 11 from bottom to top; the metal source system further comprises a third metal source 24 and a fourth metal source 25, wherein the third metal source 24 and the fourth metal source 25 are located above the second metal source 23 and are sequentially arranged on the second column 21 from bottom to top. Through being provided with second unreeling part 14 and second coiling part 15 on first cylinder 11, through set up third metal source 24 and fourth metal source 25 on second cylinder 21, can make vacuum physical deposition equipment can deposit two rolls of films simultaneously, improve the utilization ratio in vacuum space greatly, can also improve the production efficiency of film simultaneously. It should be noted that a plurality of unwinding rollers, winding rollers, turning rollers and evaporation sources can be arranged according to actual needs, and a plurality of rolls of films can be deposited simultaneously.

In some embodiments, the top cut surface of the second unwinding part 14 and the bottom cut surface of the third turning roll 33 are on the same horizontal plane, and the installation height of the second winding part 15 and the fourth turning roll 34 in the vertical direction is equal. So that the film can be horizontally moved above the metal source, and the deposition material can be uniformly deposited on the film. In addition, under the condition that the conditions allow, a plurality of cooling rollers and squeezing rollers can be arranged, so that the production efficiency is improved, and the film deposition quality is improved. And the coating quality is improved.

In the present embodiment, the functions of the respective components are as follows: the first unwinding part 12 is used for unwinding a first film to be deposited, and the second unwinding part 14 is used for unwinding a second film to be deposited; a first metal source 22 and a second metal source 23 for depositing a first side and a second side of a first roll of film to be deposited, respectively, and a third metal source 24 and a fourth metal source 25 for depositing a first side and a second side of a second roll of film to be deposited, respectively; the first turning roll 31 and the second turning roll 32 are respectively used for turning or turning over the first roll of film and the second roll of film, so that the first surfaces of the first roll of film and the second roll of film are converted into second surfaces facing to the corresponding or next metal source after being deposited; the first winding part 13 is used for winding a first deposited film, and the second winding part 15 is used for winding a second deposited film.

The first cooling roller 41 and the second cooling roller 42 are used for cooling the first roll of film and the second roll of film in deposition, and can also act as a roller so that the first roll of film is horizontally wound above the first metal source 22 and the second metal source 23, and the second roll of film is horizontally wound above the third metal source 24 and the fourth metal source 25; the first and second pressing rollers 51 and 52 are used to press the first and second turning rollers 31 and 32, respectively, so that the film is not easily wrinkled or deformed.

In some embodiments, the first and second cooling rolls 41 and 42 each include a hollow roll, and a rotary joint provided at both sides of the hollow roll, the rotary joint being rotatably connected to the inner wall of the vacuum chamber, and a cooling medium being provided inside the hollow roll. Rotate through rotary joint and the inner wall of vacuum chamber and be connected, convenient to detach and transportation can be provided with the cooling medium through the inside of hollow roll simultaneously and cool off the roller shell.

The embodiment of the utility model provides a vacuum physical deposition equipment's beneficial effect as follows:

1. in the physical deposition process, the used rollers are fewer, so that the cost is greatly reduced;

2. the collecting and releasing system, the metal source system and the steering system are detachably connected with the vacuum chamber, and are convenient to detach and transport

3. By arranging the cooling roller, the film in evaporation can be further cooled, and the film is prevented from being burnt into holes by atoms;

4. by arranging the squeezing roller, the material with deposition can be better attached to the film, and the deposition quality of the film is improved; 5. a plurality of unwinding rollers, winding rollers, steering rollers and evaporation sources can be arranged according to actual needs, and a plurality of rolls of films can be deposited simultaneously.

Example two

As shown in fig. 8, an embodiment of the present invention provides a vacuum physical deposition method, which is based on the vacuum physical apparatus, and includes the following steps:

s81, the first roll of film to be deposited is mounted on the first unwinding part 12.

S82, guiding the first roll of film through the first turning roll 31 and the second turning roll 32, enabling the first roll of film to sequentially pass through the first metal source 22 and the second metal source 23, depositing the first surface of the first roll of film through the first metal source 22, and depositing the second surface of the first roll of film through the second metal source 23, so as to achieve double-surface deposition of the first roll of film.

S83, the first winding unit 13 winds the first film after vapor deposition.

In some embodiments, step S102 may further include further cooling the film in evaporation by the first cooling roller 41 and/or the second cooling roller 42 to prevent the film from being burned through into holes by atoms, so that the film in evaporation may be cooled by the first cooling roller 41 and the second cooling roller 42.

In some embodiments, step S102 may further include pressing the first turning roll 31 and the second turning roll 32 by the first pressing roll 51 and the second pressing roll 52, respectively, to increase the adhesion between the evaporation material and the film, where the surface of the pressing roll is made of rubber, or other softer material, such as rubber with better temperature resistance, for example, epichlorohydrin rubber, to avoid damage to the film. As shown in fig. 9, the embodiment of the present invention provides another vacuum physical deposition method, which is based on any one of the above vacuum physical deposition apparatuses, and the vacuum physical deposition method includes the following steps:

s91, mounting a first film roll to be deposited on a first unwinding part, and mounting a second film roll to be deposited on a second unwinding part;

s92, guiding the first roll of film through the first turning roll and the second turning roll, enabling the first roll of film to sequentially pass through the first metal source and the second metal source, gasifying the metal material to be gasified through the first metal source and the second metal source, respectively depositing the gasified metal atoms on the first surface and the second surface of the first roll of film,

guiding a second roll of film through a third turning roll and a fourth turning roll, enabling the second roll of film to sequentially pass through a third metal source and a fourth metal source, gasifying the metal material to be gasified through the third metal source and the fourth metal source, and respectively depositing the gasified metal atoms on a first surface and a second surface of the second roll of film;

and S,93, rolling the deposited first roll of film through the first rolling part, and rolling the deposited second roll of film through the second rolling part.

The embodiment of the utility model provides a vacuum physical deposition method can realize the deposit of two rolls or many rolls of films through the roller of less quantity, both reduce cost can also improve production efficiency.

It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The specific implementation mode is a specific example for implementing the technical scheme of the utility model. Also, the term "comprises/comprising" when used herein refers to the presence of a feature, integer or component, but does not preclude the presence or addition of one or more other features, integers or components.

It is to be understood that the above embodiments are merely exemplary embodiments that have been employed to illustrate the principles of the present invention, and that the present invention is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.

Claims (7)

1. A vacuum physical deposition device is characterized by comprising a vacuum chamber, a retraction system, a metal source system and a steering system which are arranged in the vacuum chamber and are sequentially arranged at intervals in a first direction,

the collecting and releasing system and the metal source system are vertically arranged at the bottom of the vacuum chamber, the steering system is arranged on the side wall of the vacuum chamber, and the collecting and releasing system, the metal source system and the steering system are arranged on the same horizontal plane;

the retraction system comprises: the first cylinder (11) is vertically arranged in the vacuum chamber, and the first unwinding part (12) and the first winding part (13) are sequentially arranged on the first cylinder (11) from bottom to top;

the metal source system includes: a second column (21) vertically arranged in the vacuum chamber, and a first metal source (22) and a second metal source (23) which are arranged on the second column (21) from bottom to top in sequence;

the steering system includes: a first steering roller (31) and a second steering roller (32) which are respectively connected with the side wall of the vacuum chamber in a rotating way, wherein the first steering roller (31) is positioned between the first metal source (22) and the second metal source (23), the installation height of the second steering roller (32) in the vertical direction is higher than that of the second metal source (23), and the metal source system is positioned between the steering system and the collecting and releasing system.

2. The vacuum physical deposition apparatus according to claim 1, further comprising a cooling mechanism, the cooling mechanism comprising:

the first cooling roller (41) is arranged in the vacuum chamber, is positioned between the collecting and releasing system and the metal source system, is rotatably connected with the inner wall of the vacuum chamber, and is lower than the first steering roller (31) in the vertical direction;

the installation height of the first cooling roller (41) and the first steering roller (31) in the vertical direction is higher than that of the first unreeling part (12).

3. The vacuum physical deposition apparatus according to claim 2, further comprising a pressing mechanism, the pressing mechanism comprising:

a first squeeze roller (51) provided in the vacuum chamber and rotatably connected to an inner wall of the vacuum chamber; the surface of the first pressing roll (51) is made of soft material and is in rolling contact with the first steering roll (31).

4. The vacuum physical deposition apparatus of claim 3, wherein the cooling mechanism further comprises:

the second cooling roller (42) is arranged in the vacuum chamber, is positioned between the collecting and releasing system and the metal source system, is rotatably connected with the inner wall of the vacuum chamber, and is equal to the second steering roller (32) in the vertical direction in the installation height of the second cooling roller (42);

the installation height of the second cooling roller (42) and the second steering roller (32) in the vertical direction is higher than that of the first coiling part (13); alternatively, the first and second electrodes may be,

the installation height of the second cooling roller (42) in the vertical direction is higher than the second turning roller (32) and lower than the first coiling part (13), and the bottom tangent plane of the second cooling roller (42) and the top tangent plane of the second turning roller (32) are on the same horizontal plane.

5. The vacuum physical deposition apparatus according to claim 4, wherein the pressing mechanism further comprises:

a second squeeze roller (52) which is provided in the vacuum chamber and is rotatably connected to the inner wall of the vacuum chamber; the surface of the second pressing roll (52) is made of soft material and is in rolling contact with the second steering roll (32).

6. The vacuum physical deposition apparatus according to claim 5,

the retraction system further comprises: the second unwinding part (14) and the second winding part (15) are positioned above the first winding part (13) and are sequentially arranged on the first cylinder (11) from bottom to top;

the metal source system further comprises: a third metal source (24) and a fourth metal source (25) which are positioned above the second metal source (23) and are sequentially arranged on the second column body (21) from bottom to top;

the steering system further includes: a third turning roller (33) and a fourth turning roller (34) which are respectively connected with the side wall of the vacuum chamber in a rotating way, wherein the third turning roller (33) is positioned between the third metal source (24) and the fourth metal source (25), and the installation height of the fourth turning roller (34) in the vertical direction is higher than that of the fourth metal source (25).

7. The vacuum physical deposition apparatus according to claim 6,

the top tangent plane of the second unreeling part (14) and the bottom tangent plane of the third turning roller (33) are on the same horizontal plane, and the installation heights of the second reeling part (15) and the fourth turning roller (34) in the vertical direction are equal.

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