CN116815150A - Vacuum physical deposition equipment and vacuum physical deposition method - Google Patents

Abstract

The application provides vacuum physical deposition equipment and a physical deposition method, which comprise a vacuum chamber, a collecting and releasing system, a metal source system and a steering system, wherein the collecting and releasing system, the metal source system and the steering system are arranged in the vacuum chamber and are sequentially arranged at intervals in a first direction, the collecting and releasing system and the metal source system are vertically arranged at the bottom of the vacuum chamber, the steering system is arranged on the wall of the vacuum chamber, and the collecting and releasing system, the metal source system and the steering system are arranged on the same horizontal plane. The equipment provided by the embodiment of the application can process multiple rolls of films simultaneously through a limited number of rollers, has lower cost and is convenient to detach and transport.

Description

Vacuum physical deposition equipment and vacuum physical deposition method

Technical Field

The application relates to the technical field of vacuum coating equipment, in particular to vacuum physical deposition equipment and a vacuum physical deposition method.

Background

The vapor deposition refers to placing a material to be vapor deposited in a high temperature resistant container such as a crucible, and heating to melt the material to be vapor deposited, so that the material to be vapor deposited is gasified and deposited on the passing film.

The inventor has found in the process of implementing the present application that the existing vacuum physical deposition apparatus requires a large number of rollers, which are expensive and difficult to disassemble and transport.

Disclosure of Invention

In view of the above, an object of the embodiments of the present application is to provide a vacuum physical deposition apparatus and a vacuum physical deposition method, so as to solve the technical problem of low space utilization in the prior art.

To achieve the above object, in a first aspect, an embodiment of the present application provides a vacuum physical deposition apparatus including a vacuum chamber, and a retraction system, a metal source system, and a steering system disposed in the vacuum chamber and sequentially spaced apart in a first direction,

the collecting and releasing system and the metal source system are vertically arranged at the bottom of the vacuum cavity, the steering system is arranged on the wall of the vacuum cavity, and the collecting and releasing system, the metal source system and the steering system are arranged on the same horizontal plane.

In some possible embodiments, the retraction system comprises: the first cylinder is vertically arranged in the vacuum chamber, and the first unreeling part and the first reeling part of the first cylinder are sequentially arranged from bottom to top;

the metal source system includes: the vacuum chamber comprises a vacuum chamber body, a first metal source, a second metal source, a first metal source and a second metal source, wherein the vacuum chamber body is provided with a vacuum cavity;

the steering system includes: the first steering roller and the second steering roller are respectively connected with the side wall of the vacuum chamber in a rotating way, the first steering roller is positioned between the first metal source and the second metal source, the installation height of the second steering roller in the vertical direction is higher than that of the second metal source steering roller, and the metal source system is positioned between the steering system and the retraction system.

In some possible embodiments, the vacuum physical deposition apparatus further comprises a cooling mechanism comprising:

the first cooling roller is arranged in the vacuum chamber, is positioned between the retraction system and the metal source system, is rotationally connected with the inner wall of the vacuum chamber, and is lower than the first steering roller in the installation height in the vertical direction;

the mounting heights of the first cooling roller and the first steering roller in the vertical direction are higher than that of the first unreeling part.

In some possible embodiments, the vacuum physical deposition apparatus further comprises a pressing mechanism comprising:

the first squeeze roller is arranged in the vacuum chamber and is rotationally connected with the inner wall of the vacuum chamber; the surface of the first squeeze roller is made of soft material and is in rolling contact with the first steering roller.

In some possible embodiments, the cooling mechanism further comprises:

the second cooling roller is arranged in the vacuum chamber, is positioned between the retraction system and the metal source system, is rotationally connected with the inner wall of the vacuum chamber, and has the same installation height in the vertical direction as the second steering roller;

the mounting heights of the second cooling roller and the second steering roller in the vertical direction are higher than that of the first winding part; the installation height of the second cooling roller in the vertical direction is higher than that of the second steering roller and lower than that of the first winding part, and the bottom tangent plane of the second cooling roller and the top tangent plane of the second steering roller are on the same horizontal plane.

In some possible embodiments, the pressing mechanism further comprises:

the second extrusion roller is arranged in the vacuum chamber and is rotationally connected with the inner wall of the vacuum chamber; the surface of the second squeeze roller is made of soft materials and is in rolling contact with the second steering roller.

In some possible embodiments, the retraction system further comprises: the second unreeling part and the second reeling part are positioned above the first reeling part and are sequentially arranged on the first column body from bottom to top;

the metal source system further comprises: the third metal source and the fourth metal source are positioned above the second metal source and are sequentially arranged on the second column from bottom to top;

the steering system further includes: the third steering roller and the fourth steering roller are respectively connected with the side wall of the vacuum chamber in a rotating way, the third steering roller is positioned between the third metal source and the fourth metal source, and the installation height of the fourth steering roller in the vertical direction is higher than that of the fourth metal source steering roller.

In some possible embodiments, the top section of the second unreeling part and the bottom section of the third steering roller are on the same horizontal plane, and the mounting height of the second reeling part and the fourth steering roller in the vertical direction is equal.

In a second aspect, an embodiment of the present application provides a vacuum physical deposition method, which is based on one of the first seven vacuum physical deposition apparatuses, and includes the following steps:

mounting a first roll of film to be deposited on a winding and unwinding system;

guiding the first roll of film through a steering system, enabling the first roll of film to pass through a metal source system, gasifying a metal material to be gasified through the metal source system, and depositing gasified metal atoms on a first surface and a second surface of the first roll of film respectively;

and rolling the deposited first roll of film through the rolling and unrolling system.

In a third aspect, an embodiment of the present application provides a vacuum physical deposition method, which is characterized in that the vacuum physical deposition method is based on the vacuum physical deposition apparatus of the last kind, and the vacuum physical deposition method includes the following steps:

mounting a first roll film to be deposited on a first unreeling part, and mounting a second roll film to be deposited on a second unreeling part;

guiding the first roll of film through a first steering roller and a second steering roller, enabling the first roll of film to sequentially pass through a first metal source and a second metal source, gasifying metal materials to be gasified through the first metal source and the second metal source, respectively depositing gasified metal atoms on a first surface and a second surface of the first roll of film, guiding the second roll of film through a third steering roller and a fourth steering roller, enabling the second roll of film to sequentially pass through a third metal source and a fourth metal source, gasifying the metal materials to be gasified through the third metal source and the fourth metal source, and respectively depositing gasified metal atoms on the first surface and the second surface of the second roll of film;

and rolling the deposited first rolled film through the first rolling part, and rolling the deposited second rolled film through the second rolling part.

The beneficial technical effects of the technical scheme are as follows:

the embodiment of the application provides vacuum physical deposition equipment which comprises a vacuum chamber, a collecting and releasing system, a metal source system and a steering system, wherein the collecting and releasing system, the metal source system and the steering system are arranged in the vacuum chamber and are sequentially arranged at intervals in a first direction, the collecting and releasing system and the metal source system are vertically arranged at the bottom of the vacuum chamber, the steering system is arranged on the wall of the vacuum chamber, and the collecting and releasing system, the metal source system and the steering system are arranged on the same horizontal plane. The equipment provided by the embodiment of the application can process multiple rolls of films simultaneously through a limited number of rollers, has lower cost and is convenient to detach and transport.

Drawings

In order to more clearly illustrate the embodiments of the application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a front view of a thin film vapor deposition apparatus with high space utilization provided by an embodiment of the present application;

fig. 2 is a front view of another thin film vapor deposition apparatus with high space utilization according to an embodiment of the present application;

fig. 3 is a front view of another thin film vapor deposition apparatus with high space utilization according to an embodiment of the present application;

fig. 4 is a front view of another thin film vapor deposition apparatus with high space utilization according to an embodiment of the present application;

fig. 5 is a front view of another thin film vapor deposition apparatus with high space utilization according to an embodiment of the present application;

fig. 6 is a front view of another thin film vapor deposition apparatus with high space utilization according to an embodiment of the present application;

fig. 7 is a front view of another thin film vapor deposition apparatus with high space utilization according to an embodiment of the present application;

fig. 8 is a flow chart of a physical deposition method according to an embodiment of the present application.

FIG. 9 is a flow chart of another physical deposition method according to an embodiment of the present application.

Reference numerals illustrate:

11. a first column; 12. a first unreeling part; 13. a first winding part; 14. a second unreeling part; 15. a second winding part;

21. a second column; 22. a first metal source; 23. a second metal source; 24. a third metal source; 25. a fourth metal source;

31. a first steering roller; 32. a second steering roller; 33. a third steering roller; 34. a fourth steering roller;

41. a first cooling roller; 42. a second cooling roller;

51. a first squeeze roll; 52. and a second squeeze roll.

Detailed Description

Features and exemplary embodiments of various aspects of the application are described in detail below. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the application. It will be apparent, however, to one skilled in the art that the present application may be practiced without some of these specific details. The following description of the embodiments is merely intended to provide a better understanding of the application by showing examples of the application. In the drawings and the following description, at least well-known structures and techniques of mechanism parts have not been shown in order to avoid unnecessarily obscuring the present application; also, the dimensions of the mechanical components may be exaggerated for clarity. Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

Example 1

As shown in fig. 1 to 6, an embodiment of the present application provides a vacuum physical deposition apparatus, where the vacuum physical deposition apparatus includes a vacuum chamber, and a collecting and releasing system, a metal source system and a steering system that are disposed in the vacuum chamber, where the collecting and releasing system and the metal source system are vertically disposed at the bottom of the vacuum chamber, the steering system is disposed on a wall of the vacuum chamber, and the collecting and releasing system, the metal source system and the steering system are disposed on the same horizontal plane, and preferably, the collecting and releasing system, the metal source system and the steering system are all detachably connected with the vacuum chamber. The vacuum physical deposition equipment provided by the embodiment of the application can process multiple rolls of films simultaneously through a limited number of rollers, has low cost and is convenient to detach and transport. In some embodiments, a retraction system includes: the metal source system comprises a first column 11 vertically arranged in the vacuum chamber, a first unreeling part 12 and a first reeling part 13 sequentially arranged in the first column 11 from bottom to top, a second column 21 vertically arranged in the vacuum chamber, and a first metal source 22 and a second metal source 23 sequentially arranged in the second column 21 from bottom to top; the steering system comprises a first steering roller 31 and a second steering roller 32 which are respectively arranged in the vacuum chamber and are rotationally connected with the inner wall of the vacuum chamber, the installation height of the second steering roller 32 in the vertical direction is higher than that of the first steering roller 31, and the metal source system is positioned between the steering system and the retraction system or positioned on the right side of the metal source system. In addition, the first column 11 and the second column 21 are installed close to the side wall of the vacuum chamber where the steering system is installed. According to the embodiment of the application, the physical deposition of the film can be completed only through two steering rollers, and compared with the traditional vacuum physical deposition equipment which needs more rollers, the cost is greatly reduced. In addition, according to the vacuum physical deposition equipment provided by the embodiment of the application, the first and metal source systems are vertically arranged on the inner bottom wall of the vacuum chamber, and the steering system is arranged on the inner wall of the vacuum chamber, so that the utilization rate of the vacuum space is greatly improved.

In some embodiments, the vacuum chamber may be comprised of a vacuum pumping system and an evaporation chamber. In the embodiment of the application, the whole physical deposition equipment comprises a cryogenic system, a common cooling system, a winding system, a Roots pump, a mechanical pump, a diffusion pump and a vacuum cavity, wherein the common cooling system is responsible for controlling a cooling roller to cool a film. Cryogenic cooling is responsible for cooling the vacuum chamber. The diffusion pump is arranged in the vacuum cavity and is responsible for vacuumizing the vacuum cavity, and the Roots pump and the mechanical pump are arranged outside the vacuum cavity and are responsible for vacuumizing the vacuum cavity.

The evaporation source is a member for heating the film material to evaporate it by vaporization, and in this embodiment, the evaporation source used for vacuum evaporation may be resistance heating, electron beam heating, high-frequency induction heating, arc heating, laser heating, or the like.

As shown in fig. 2, in some embodiments, the vacuum thin film evaporation apparatus further includes a cooling mechanism including a first cooling roller 41 disposed in the vacuum chamber between the retraction system and the metal source system and rotatably connected to an inner wall of the vacuum chamber, the first cooling roller 41 having a lower installation height in a vertical direction than the first steering roller 31, and the first cooling roller 41 and the first steering roller 31 each having a higher installation height in a vertical direction than the first unreeling section 12; in the evaporation process, the film is positioned above the metal source, the material to be evaporated melts into gaseous atoms or atomic groups under the action of high temperature, and the gaseous atoms or the atomic groups are deposited on the passing film, and the film is cooled by the cooling roller due to the high temperature of the gaseous atoms or the atomic groups, so that the film is prevented from being burnt through by atoms to form holes.

Preferably, the top section of the first cooling roller 41 is on the same level as the bottom section of the first turning roller 31, so that the film can be horizontally transported on the metal source to uniformly evaporate the material to be evaporated on the film. The mounting heights of the first cooling roller 41 and the first steering roller 31 in the vertical direction are higher than the first unreeling part 12, so that the film between the first unreeling part 12 and the first cooling roller 41 forms a certain angle for tape running, the tension of the film is convenient to control, and the occurrence of wrinkles or deformation is avoided.

As shown in fig. 3, in some embodiments, the vacuum thin film evaporation apparatus may further include a pressing mechanism including a first pressing roller 51 disposed within the vacuum chamber and rotatably connected to an inner wall of the vacuum chamber; the surface of the first pressing roller 51 is a soft material and is in rolling contact with the first steering roller 31. Through setting up first squeeze roll 51, when the film passes through first steering roll 31, can give the film and exert a extrusion force, increase the adhesion of coating by vaporization material and film, the material on general squeeze roll surface is rubber material, or other softer materials, for example the better rubber of temperature resistance, like chlorohydrin rubber etc. avoids causing the damage to the film. The first squeeze rollers 51 are disposed in the second direction, and the respective rollers are parallel to each other, and in order to facilitate control of tension in the film feeding process, the squeeze rollers and the steering rollers in the present embodiment have the same diameters.

In some embodiments, the cooling mechanism further comprises: the second cooling roller 42 is arranged in the vacuum chamber, is positioned between the retraction system and the metal source system, is rotationally connected with the inner wall of the vacuum chamber, and has the installation height of the second cooling roller 42 in the vertical direction equal to that of the second steering roller 32; the second cooling roller 42 and the second steering roller 32 are each higher in installation height in the vertical direction than the first winding portion 13. In the evaporation process, the film is located above the metal source, the material to be evaporated melts into gaseous atoms or atomic groups under the action of high temperature, and the gaseous atoms or atomic groups are deposited on the passing film, and the second cooling roller 42 is arranged to further cool the film in the evaporation process, so that the film is prevented from being burnt through into holes by atoms.

In some embodiments, as shown in fig. 4, the second cooling roller 42 has the same vertical mounting height as the second turning roller 32, so that the film is transported over the first metal source 22 Cheng Shuiping, and the vapor deposition material can be uniformly deposited on the film. The mounting height of the second cooling roller 42 in the vertical direction is higher than that of the first winding part 13, so that a certain angle is formed between the first winding part 13 and the second cooling roller 42 for feeding the film, the tension of the film is conveniently controlled, and the film is prevented from being wrinkled or deformed. In addition, in order to verify the influence of the angle on the film property, the application cuts the obtained film into samples with the width of 2cm and the length of 5cm without changing the position of the first rolling part 13, adjusting the position of 42 and other factors, and obtains the tensile strength of the film under different angles. Each set of samples was pulled at a speed of 200mm/min using a Hongtuo macro tensile strength tester. Each group included three samples and the final de-averaged to give the following table. It is possible that the tensile strength of the final product increases gradually over an angle of horizontal in the range of 0-90 degrees. Therefore, the film is drawn to form a certain angle, and the tension of the film can be better controlled.

Angle of	Tensile Strength MPA
		0	23.4
10	25.3
		20	26.7
30	27.0
		40	28.5
50	28.9
		60	29.3
70	30.2
		80	30.6

In some embodiments, as shown in fig. 5 and 6, the second cooling roller 42 is installed at a lower height than the first winding portion 13 in the vertical direction, so that the film between the first winding portion 13 and the second cooling roller 42 forms a certain angle for feeding, which is convenient for controlling the tension of the film and avoiding wrinkling or deformation. The bottom section of the second cooling roller 42 is on the same horizontal plane as the top section of the second turning roller 32, so that the film is carried over Cheng Shuiping above the first metal source 22, and the vapor deposition material can be uniformly deposited on the film.

In some embodiments, the pressing mechanism further includes a second pressing roller 52 disposed within the vacuum chamber and rotatably connected to an inner wall of the vacuum chamber; the surface of the second squeeze roll 52 is a soft material and is in rolling contact with the second turn roll 32. Through setting up second squeeze roll 52, when the film passes through second turn roll 32, can give the film and exert a extrusion force, increase the adhesion of coating by vaporization material and film, the material on general squeeze roll surface is the rubber material, or other softer materials, for example the better rubber of temperature resistance ability, like chlorohydrin rubber etc. avoids causing the damage to the film.

In some embodiments, the winding and unwinding system further includes a second unwinding portion 14 and a second winding portion 15, where the second unwinding portion 14 and the second winding portion 15 are located above the first winding portion 13 and are sequentially disposed on the first column 11 from bottom to top; the metal source system further comprises a third metal source 24 and a fourth metal source 25, wherein the third metal source 24 and the fourth metal source 25 are positioned above the second metal source 23 and are sequentially arranged on the second column 21 from bottom to top. Through being provided with second unreeling portion 14 and second rolling portion 15 on first cylinder 11, through setting up third metal source 24 and fourth metal source 25 on second cylinder 21, can make vacuum physical deposition equipment deposit two rolls of films simultaneously, improved the utilization ratio in vacuum space greatly, can also improve the production efficiency of film simultaneously. It should be noted that, a plurality of unreeling rollers, a plurality of reeling rollers, a plurality of turning rollers and a plurality of evaporation sources can be arranged according to actual needs, and a plurality of films can be deposited at the same time.

In some embodiments, the top section of the second unreeling part 14 is on the same horizontal plane as the bottom section of the third turning roller 33, and the mounting height of the second reeling part 15 and the fourth turning roller 34 in the vertical direction is equal. The film can be carried above the metal source Cheng Shuiping, so that the deposited material can be deposited on the film uniformly. In addition, if the conditions allow, a plurality of cooling rollers and squeeze rollers may be provided, thereby improving the production efficiency and the film deposition quality. And the coating quality is improved.

In the present embodiment, the functions of the respective components are as follows: a first unreeling part 12 for unreeling a first roll of film to be deposited, and a second unreeling part 14 for unreeling a second roll of film to be deposited; a first metal source 22 and a second metal source 23 for respectively depositing a first side and a second side of a first roll of film to be deposited, and a third metal source 24 and a fourth metal source 25 for respectively depositing a first side and a second side of a second roll of film to be deposited; the first steering roller 31 and the second steering roller 32 are respectively used for steering or turning over the first roll of film and the second roll of film, so that the first surface of the first roll of film and the second roll of film is converted into the second surface which faces the corresponding or next metal source after being deposited; the first winding part 13 is used for winding the deposited first roll of film, and the second winding part 15 is used for winding the deposited second roll of film.

The first cooling roller 41 and the second cooling roller 42 are used for cooling the first rolled film and the second rolled film in deposition, and can also act as a roller, so that the first rolled film is flatly rolled on the upper surfaces Fang Chengshui of the first metal source 22 and the second metal source 23, and the second rolled film is rolled on the upper surfaces Cheng Shuiping of the third metal source 24 and the fourth metal source 25; the first pressing roller 51 and the second pressing roller 52 are respectively used for pressing the first steering roller 31 and the second steering roller 32, so that the film is not easy to wrinkle or deform.

In some embodiments, the first cooling roller 41 and the second cooling roller 42 each include a hollow roller, and rotary joints provided at both sides of the hollow roller, the rotary joints being rotatably connected with an inner wall of the vacuum chamber, and the inside of the hollow roller being provided with a cooling medium. Through rotary joint and vacuum chamber's inner wall rotation connection, convenient to detach and transportation can be provided with the cooling medium through the inside of hollow roller simultaneously and cool off the roller shell.

The vacuum physical deposition equipment provided by the embodiment of the application has the following beneficial effects:

1. in the physical deposition process, fewer rollers are used, so that the cost is greatly reduced;

2. the retraction system, the metal source system and the steering system are detachably connected with the vacuum chamber, so that the disassembly and the transportation are convenient

3. By arranging the cooling roller, the film in evaporation can be further cooled, and the film is prevented from being burnt through into holes by atoms;

4. by arranging the squeeze rollers, the deposited material and the film can be better attached, and the film deposition quality is improved; 5. a plurality of unreeling rollers, a plurality of reeling rollers, a plurality of steering rollers and a plurality of evaporation sources can be arranged according to actual needs, and a plurality of films can be deposited at the same time.

Example two

As shown in fig. 8, an embodiment of the present application provides a vacuum physical deposition method based on the above vacuum physical apparatus, including the steps of:

s81, the first rolled film to be deposited is mounted on the first unreeled portion 12.

S82, the first roll of film is guided by the first steering roller 31 and the second steering roller 32, so that the first roll of film sequentially passes through the first metal source 22 and the second metal source 23, the first surface of the first roll of film is deposited by the first metal source 22, and the second surface of the first roll of film is deposited by the second metal source 23, so that double-sided deposition of the first roll of film is realized.

S83, the first film roll after vapor deposition is wound by the first winding portion 13.

In some embodiments, step S102 may further include cooling the film in evaporation by the first cooling roller 41 and/or the second cooling roller 42, so as to prevent the film from being burned through by atoms into holes, and thus, the film in evaporation may be cooled by the first cooling roller 41 and the second cooling roller 42.

In some embodiments, step S102 may further include extruding the first steering roller 31 and the second steering roller 32 by the first extruding roller 51 and the second extruding roller 52 respectively, so as to increase the adhesion force between the vapor deposition material and the film, and the surface of the extruding roller is generally made of rubber, or other softer materials, such as rubber with better temperature resistance, for example, chlorohydrin rubber, so as to avoid damage to the film. As shown in fig. 9, an embodiment of the present application provides another vacuum physical deposition method based on any one of the above vacuum physical deposition apparatuses, the vacuum physical deposition method including the steps of:

s91, mounting a first roll of film to be deposited on a first unreeling part, and mounting a second roll of film to be deposited on a second unreeling part;

s92, guiding the first roll of film through the first steering roller and the second steering roller, enabling the first roll of film to sequentially pass through the first metal source and the second metal source, gasifying the metal material to be gasified through the first metal source and the second metal source, depositing gasified metal atoms on the first surface and the second surface of the first roll of film respectively,

guiding the second roll of film through a third steering roller and a fourth steering roller, enabling the second roll of film to sequentially pass through a third metal source and a fourth metal source, gasifying a metal material to be gasified through the third metal source and the fourth metal source, and depositing gasified metal atoms on a first surface and a second surface of the second roll of film respectively;

s,93, rolling the deposited first rolled film through the first rolling part, and rolling the deposited second rolled film through the second rolling part.

The vacuum physical deposition method provided by the embodiment of the application can realize the deposition of two or more rolls of films through a small number of rollers, thereby reducing the cost and improving the production efficiency.

It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The specific embodiments are specific examples for implementing the technical scheme of the application. Also, the term "comprises/comprising" when used herein refers to the presence of a feature, integer or component, but does not exclude the presence or addition of one or more other features, integers or components.

It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present application, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the application.

Claims (10)

1. A vacuum physical deposition apparatus is characterized in that the vacuum physical deposition apparatus comprises a vacuum chamber, a retraction system, a metal source system and a steering system which are arranged in the vacuum chamber and are sequentially arranged at intervals in a first direction,

the collecting and releasing system and the metal source system are vertically arranged at the bottom of the vacuum cavity, the steering system is arranged on the wall of the vacuum cavity, and the collecting and releasing system, the metal source system and the steering system are arranged on the same horizontal plane.

2. A vacuum physical deposition apparatus according to claim 1, wherein,

the receiving and releasing system comprises: the first cylinder (11) is vertically arranged in the vacuum chamber, and the first unreeling part (12) and the first reeling part (13) are sequentially arranged on the first cylinder (11) from bottom to top;

the metal source system includes: a second column (21) vertically arranged in the vacuum chamber, and a first metal source (22) and a second metal source (23) which are sequentially arranged on the second column (21) from bottom to top;

the steering system includes: the first steering roller (31) and the second steering roller (32) are respectively connected with the side wall of the vacuum chamber in a rotating way, the first steering roller (31) is positioned between the first metal source (22) and the second metal source (23), the installation height of the second steering roller (32) in the vertical direction is higher than that of the second metal source steering roller (23), and the metal source system is positioned between the steering system and the retraction system.

3. The vacuum physical deposition apparatus according to claim 2, further comprising a cooling mechanism, the cooling mechanism comprising:

the first cooling roller (41) is arranged in the vacuum chamber, is positioned between the collecting and releasing system and the metal source system, is rotationally connected with the inner wall of the vacuum chamber, and is lower than the first steering roller (31) in the installation height of the first cooling roller (41) in the vertical direction;

the first cooling roller (41) and the first steering roller (31) are arranged at a height higher than the first unreeling part (12) in the vertical direction.

4. A vacuum physical deposition apparatus according to claim 3, further comprising a pressing mechanism comprising:

the first squeeze roller (51) is arranged in the vacuum chamber and is rotationally connected with the inner wall of the vacuum chamber; the surface of the first squeeze roller (51) is made of soft material and is in rolling contact with the first steering roller (31).

5. The vacuum physical deposition apparatus according to claim 4, wherein the cooling mechanism further comprises:

the second cooling roller (42) is arranged in the vacuum chamber, is positioned between the collecting and releasing system and the metal source system, is rotationally connected with the inner wall of the vacuum chamber, and has the installation height of the second cooling roller (42) in the vertical direction equal to that of the second steering roller (32);

the mounting heights of the second cooling roller (42) and the second steering roller (32) in the vertical direction are higher than those of the first winding part (13); or,

the second cooling roller (42) is higher than the second steering roller (32) in the installation height in the vertical direction and lower than the first winding part (13), and the bottom tangent plane of the second cooling roller (42) and the top tangent plane of the second steering roller (32) are on the same horizontal plane.

6. The vacuum physical deposition apparatus according to claim 5, wherein the pressing mechanism further comprises:

the second squeeze roller (52) is arranged in the vacuum chamber and is rotationally connected with the inner wall of the vacuum chamber; the surface of the second squeeze roller (52) is made of soft material and is in rolling contact with the second turning roller (32).

7. A vacuum physical deposition apparatus according to claim 6, wherein,

the receiving and releasing system further comprises: the second unreeling part (14) and the second reeling part (15) are positioned above the first reeling part (13) and are sequentially arranged on the first column body (11) from bottom to top;

the metal source system further comprises: a third metal source (24) and a fourth metal source (25) which are positioned above the second metal source (23) and are sequentially arranged on the second column (21) from bottom to top;

the steering system further includes: and a third steering roller (33) and a fourth steering roller (34) are respectively and rotatably connected with the side wall of the vacuum chamber, the third steering roller (33) is positioned between the third metal source (24) and the fourth metal source (25), and the installation height of the fourth steering roller (34) in the vertical direction is higher than that of the fourth metal source steering roller (25).

8. A vacuum physical deposition apparatus according to claim 7, wherein,

the top tangent plane of second unreeling portion (14) with the bottom tangent plane of third steering roller (33) is on same horizontal plane, second rolling portion (15) with the installation height of fourth steering roller (34) in vertical direction equals.

9. Physical deposition method vacuum physical deposition method, characterized in that it is based on a vacuum physical deposition apparatus according to any one of claims 1-7, comprising the steps of:

mounting a first roll of film to be deposited on a winding and unwinding system;

guiding the first roll of film through a steering system, enabling the first roll of film to pass through a metal source system, gasifying a metal material to be gasified through the metal source system, and depositing gasified metal atoms on a first surface and a second surface of the first roll of film respectively;

and rolling the deposited first roll of film through the rolling and unrolling system.

10. A vacuum physical deposition method, characterized in that the vacuum physical deposition method is based on a vacuum physical deposition apparatus according to any one of claims 8, the vacuum physical deposition method comprising the steps of:

mounting a first roll of film to be deposited on a first unwind section (12) and a second roll of film to be deposited on a second unwind section (14);

guiding the first roll of film through a first steering roller (31) and a second steering roller (32), enabling the first roll of film to sequentially pass through a first metal source (22) and a second metal source (23), gasifying metal materials to be gasified through the first metal source (22) and the second metal source (23), respectively depositing gasified metal atoms on a first surface and a second surface of the first roll of film, guiding the second roll of film through a third steering roller (33) and a fourth steering roller (34), enabling the second roll of film to sequentially pass through a third metal source (24) and a fourth metal source (25), gasifying the metal materials to be gasified through the third metal source (24) and the fourth metal source (25), and respectively depositing gasified metal atoms on the first surface and the second surface of the second roll of film;

the deposited first rolled film is rolled through the first rolling part (13), and the deposited second rolled film is rolled through the second rolling part (15).