CN218487397U

CN218487397U - Electric discharge machining apparatus

Info

Publication number: CN218487397U
Application number: CN202222607639.9U
Authority: CN
Inventors: 寇崇善; 叶文勇; 陈长营
Original assignee: Highlight Technology Corp
Current assignee: Highlight Technology Corp
Priority date: 2021-10-06
Filing date: 2022-09-30
Publication date: 2023-02-17
Anticipated expiration: 2032-09-30
Also published as: TWM644737U; TW202315691A; CN115922002A

Abstract

The utility model relates to an electric discharge machining device contains microscope carrier and electric discharge machining unit at least. The carrier is used for carrying at least one object to be processed. The electric discharge machining unit is used for performing an electric discharge machining process on a plurality of machining target areas of the object to be machined along the machining advancing direction. The electrical discharge machining unit includes a plurality of electrodes distributed in parallel along a first direction. Wherein when the electrical discharge machining unit performs an electrical discharge machining process along the machining traveling direction, the discharge section of the electrode and the machining target area of the object to be machined move relatively along the second direction. The utility model discloses can save whole process time and save and change the electrode required time.

Description

Electric discharge machining apparatus

Technical Field

The present invention relates to a machining device, and more particularly, to an electric discharge machining device.

Background

With the explosive growth of the semiconductor industry, electrical discharge machining techniques have been commonly used to process ingots or wafers. Electrical Discharge Machining (EDM) is a manufacturing process for forming a workpiece into a desired shape by generating sparks through Electrical Discharge. The dielectric material separates the two electrodes and applies a voltage to generate a periodic and rapidly-changing current discharge for processing the object to be processed. The electric discharge machining technique uses two electrodes, one of which is called a tool electrode or a discharge electrode, and the other electrode is called a workpiece electrode, and is connected with the object to be machined. During the electric discharge machining, there is no actual contact between the discharge electrode and the workpiece electrode.

When the potential difference between the two electrodes increases, the electric field between the two electrodes also increases until the electric field strength exceeds the dielectric strength, at which time dielectric breakdown occurs, current flows through the two electrodes, and a portion of the material is removed. When the current is stopped, new dielectric material flows into the electric field between the electrodes, removing some of the material and re-providing dielectric insulation. After the current flows, the potential difference between the two electrodes will return to the state before the dielectric breakdown, so that a new dielectric breakdown can be repeated.

However, the conventional electric discharge machining has disadvantages in that the roughness of the cut surface is not good, and there are considerable surface cracks on the cut surface, and may even extend in a non-cutting direction, resulting in a cracking effect in an unintended direction. Furthermore, the conventional electrical discharge machining techniques use jigs to hold the peripheral edge of the ingot, i.e., the lateral edges of the ingot, in order to prevent rolling or displacement, when cutting the ingot, for example. However, since the cutting surface of the ingot is also located in the radial direction, the conventional technique can only cut the ingot exposed outside the jig, and cannot cut the region where the jig overlaps the ingot, so that the conventional technique needs to be stopped and readjusted to be able to cut again. In addition, the existing electro-discharge machining technology can only cut or thin one wafer at a time, which is slow. Furthermore, the conventional electrical discharge machining technology only uses a single cutting line, and the conventional electrical discharge machining device has no quick-release design, so that if the cutting line is accidentally broken, the machine needs to be stopped and the replacement can be completed within a relatively long time.

SUMMERY OF THE UTILITY MODEL

In view of the above, one or more objects of the present invention are to provide an electric discharge machining apparatus to solve the above problems of the prior art.

To achieve the above object, the present invention provides an electric discharge machining apparatus, which at least comprises: a carrying platform for carrying at least one object to be processed; and an electrical discharge machining unit for performing an electrical discharge machining process on a plurality of machining target areas of the object to be machined on the carrier along a machining traveling direction, the electrical discharge machining unit comprising: a plurality of electrodes distributed in parallel along a first direction; a fixture, which is formed by assembling at least two bearing members and at least two fixing members, wherein two sides of the plurality of electrodes are respectively abutted against the two bearing members, so that a discharge section of the plurality of electrodes is in a suspended state; and a power supply unit, which provides a first power supply for the plurality of electrodes and the object to be processed during the electrical discharge machining process, so as to apply an electrical discharge energy to the plurality of target areas of the object to be processed via the electrical discharge sections of the plurality of electrodes, wherein when the electrical discharge machining unit performs the electrical discharge machining process along the machining traveling direction, the electrical discharge sections of the plurality of electrodes and the plurality of target areas of the object to be processed move relatively along a second direction.

Wherein the discharge sections of the electrodes and the processing target areas of the object to be processed move reciprocally or cyclically along the second direction.

Wherein the two bearing members and the two holding members move in a reciprocating or circulating manner together with the plurality of electrodes, so that the plurality of electrodes apply the discharge energy to the object to be processed by the discharge section.

Wherein the electrical discharge machining unit adjusts the tension value of the plurality of electrodes by causing the two bearing members or the two holding members to generate relative displacement.

Wherein the electric discharge machining apparatus further comprises a stabilizing member for stabilizing the movement of the plurality of electrodes relative to the object to be machined.

The plurality of electrodes are distributed in parallel along the first direction and a third direction, and the third direction is perpendicular to the first direction or the second direction.

Wherein the plurality of electrodes distributed in parallel along the first direction are distributed in different numbers in parallel along the third direction.

Wherein, the plurality of electrodes are distributed in parallel at different heights along the first direction.

Wherein the plurality of electrodes are in contact with each other.

Wherein the electrical discharge machining unit has a connection structure extending along the first direction to connect the plurality of electrodes distributed in parallel along the first direction.

Wherein the plurality of electrodes are linear or plate-shaped.

Wherein the plurality of electrodes have asymmetric transverse cross-sections.

The power supply unit is a group of power supply outputs or a plurality of groups of power supply outputs.

Wherein, the power supply unit is electrically connected with the plurality of electrodes in series or in parallel.

Wherein the carrier moves along the first direction, the second direction or the processing advancing direction.

Wherein the carrier rotates around the first direction, the second direction or the processing advancing direction.

Wherein, the electrical discharge machining device further comprises a slag discharging unit, when the electrical discharge machining unit performs the electrical discharge machining process on the object to be machined, the slag discharging unit provides an external force to remove the residue generated by the plurality of electrodes applying the electrical discharge energy to the object to be machined.

Wherein, the electrical discharge machining device further comprises a slag discharging unit, when the electrical discharge machining unit performs the electrical discharge machining process on the object to be machined, the slag discharging unit provides a plurality of external forces to respectively remove the residues generated by the plurality of electrodes applying the electrical discharge energy to the object to be machined.

Wherein the slag discharging unit is an ultrasonic generator or a piezoelectric oscillator, which can oscillate the tool, the object to be processed and the plurality of electrodes.

The electric discharge machining device also comprises a tension measuring unit for measuring tension values of the plurality of electrodes.

The electric discharge machining device also comprises a vibration measuring unit for measuring the vibration values of the plurality of electrodes.

Wherein the power supply unit of the electrical discharge machining unit further comprises a second power supply for providing a DC power supply or a radio frequency for the plurality of electrodes.

The object to be processed has a plane area, and is connected with the carrier through the plane area.

The carrying platform also comprises a clamping piece used for fixing the object to be processed.

Wherein, the carrying platform or the clamping piece is connected with the object to be processed by an adhesive.

Wherein the adhesive is a conductive adhesive.

Wherein, the electrical discharge machining unit performs the electrical discharge machining process on the object to be machined on the carrying platform and the clamping piece along the machining advancing direction.

Wherein, the clamping piece clamps a buffer component, the buffer component fixes the object to be processed through a conductive adhesive layer, and the electro-discharge machining unit carries out the electro-discharge machining program on the object to be processed on the carrying platform along the machining advancing direction.

Wherein the clamping member clamps a conductive frame to fix the object to be machined, and the electrical discharge machining unit performs the electrical discharge machining process on the object to be machined on the carrier along the machining direction.

Wherein, the clamping member comprises two plate bodies, at least one of the two plate bodies is a comb-shaped plate.

Wherein the clamping member axially supports against a single side of the object to be processed, and the discharge energy is adhered to two groove walls of the processing groove by an adhesive in a processing groove formed in the processing target region of the object to be processed.

Wherein, the discharge energy forms a processing groove in the processing target area of the object to be processed, and the processing groove is filled with a filling material.

Wherein, the two bearing components are respectively in a plate structure or a sleeve structure.

Wherein, the two bearing members respectively comprise a first sheet material and a second sheet material, and the plurality of electrodes are clamped between the first sheet material and the second sheet material.

Wherein, the two bearing members are respectively provided with a through slot, the two holding members are respectively provided with a lug corresponding to the through slot, and the two bearing members are correspondingly assembled with the lugs of the two holding members by the through slot.

Wherein, the two bearing components are respectively provided with a through hole, the two fixing components are respectively provided with a screw hole, and the two bearing components are screwed with the screw holes of the two fixing components by a bolt passing through the through hole.

Wherein, the two holding members are respectively provided with a groove structure, and the two bearing members are inserted into the groove structures of the two holding members so as to be correspondingly assembled on the two holding members.

Wherein, the two holding members are respectively provided with a conductive structure for electrically connecting the plurality of electrodes abutting against the two bearing members.

Wherein the two holding members simultaneously hold the two carrying members and the plurality of electrodes.

Wherein, an insulating structure is disposed between the plurality of electrodes to prevent the plurality of electrodes from electrically contacting each other.

Wherein, the two bearing components are provided with a plurality of limiting grooves for limiting the plurality of electrodes.

Wherein, the plurality of electrodes are fixed in the plurality of limit grooves by adhesive.

Wherein the electrical discharge machining unit further comprises an attachment member connected to the plurality of electrodes at edges of the two support members.

Wherein the attachment member is electrically connected to the first power source or a second power source of the power supply unit.

Wherein the two ends of the plurality of electrodes are connected to the same or different of the two carrying members respectively.

Wherein the edges of the two bearing members have a chamfer.

Wherein, the plurality of electrodes are equidistantly and parallelly distributed along the first direction.

The plurality of electrodes are connected with each other through a conductive structure so as to be electrically connected with the power supply unit.

Wherein the object to be processed carried by the carrier is a semiconductor ingot or a wafer.

Wherein, the electro-discharge machining device cuts or grinds the object to be machined carried by the carrying platform sequentially or simultaneously in the electro-discharge machining process.

Wherein, the electric discharge machining device also comprises a laser unit used for providing a heat source to the object to be machined before, during or after the electric discharge machining procedure.

Wherein the object to be processed is formed by electrically bonding a plurality of workpieces.

Bear the above, according to the utility model discloses an electric discharge machining device has following advantage:

(1) By means of the multi-layer electrode, the problem that the single electrode is broken and needs to be stopped for replacement can be effectively solved.

(2) The fixture is formed by assembling at least two bearing members and at least two fixing members respectively, so that the time required for replacing the electrodes can be greatly reduced by the quick-release design, and the tension of the discharge electrodes can be adjusted.

(3) By means of the parallel distributed electrodes, a plurality of processing target areas can be cut or polished simultaneously, and the whole processing time is effectively saved.

(4) The stabilizing member reduces electrode wobble, provides a guiding effect, and can be used as an electrical contact.

(5) The slag discharging unit can provide external force for providing one or more processing target areas to help remove the residue generated by the electrical discharge machining process.

(6) The clamping member has various clamping modes, and can effectively solve the problem that the traditional electro-discharge machining technology can not cut the overlapping area of the jig and the object to be machined.

In order to make the jun have a better understanding and appreciation of the technical features and technical effects of the invention, the preferred embodiments and the accompanying detailed description are considered in the following.

Drawings

FIG. 1 is a front view of an electrical discharge machining apparatus according to the present invention.

FIG. 2 is a schematic top view of a partial structure of an electrical discharge machining apparatus according to the present invention.

FIG. 3 is a schematic side view of a partial structure of the electric discharge machining apparatus of the present invention.

FIG. 4 is a schematic top view of the workpiece to be processed according to the present invention, which is composed of a plurality of workpieces to be processed.

Fig. 5 is a schematic side view of the electric discharge machining unit of the present invention performing an electric discharge machining process on a plurality of workpieces to be machined.

Fig. 6 is a schematic diagram of the electrode of the present invention with a circular or square transverse cross section.

FIG. 7 is a schematic side view of the electrode of the present invention with its ends and ends connected to different carrying members respectively.

FIG. 8 is a top view of the electrode of the present invention with its ends connected to different supporting members.

Fig. 9 is a schematic view of the filling material filled in the processing groove of the present invention.

FIG. 10 is a schematic view of an electric discharge machining apparatus of the present invention having a stabilizing member.

FIG. 11 is a schematic view of the present invention, in which a plurality of electrodes are disposed in the limiting grooves of the supporting member.

Fig. 12 is a schematic side view of the plate-shaped load-bearing member of the present invention.

Fig. 13 is a schematic side view of another plate-shaped structure of the load-bearing member of the present invention.

Fig. 14 is a side view of the bearing members screwed to the holding member according to the present invention.

FIG. 15 is a side view of the supporting member assembled by the holding member with the groove structure according to the present invention.

FIG. 16 is a top view of the electrode connecting structure of the fixing member of the present invention.

FIG. 17 is a top view of an insulating structure disposed between the conductive structure and the electrode of FIG. 16.

Fig. 18 is a schematic side view of the carrier of the present invention, which radially holds the object to be processed by the holding member.

Fig. 19 is a schematic side view of the carrier of the present invention clamping the object to be processed with the clamping member in the axial direction.

Fig. 20 is a schematic side view of the carrier of the present invention, which is used to fix the object to be processed on one side of the clamping member.

FIG. 21 is a side view of the clamp of the present invention fixing the object to be processed through the buffering member.

Fig. 22 is a schematic side view of the clamping member of the present invention fixing the object to be processed through the conductive frame.

Fig. 23 is a schematic side view of the comb-shaped holding member of the present invention.

FIG. 24 is a schematic side view of an electrical discharge machining unit of the present invention with adjustable tension.

FIG. 25 is a schematic view of the arrangement of the tool of the present invention with a plurality of supporting members to distribute the electrodes in parallel.

FIG. 26 is a schematic view of the arrangement of the jig of the present invention with electrodes separated by separation posts.

Description of reference numerals:

10: electric discharge machining apparatus

20: carrying platform

21: additional circuit board

22: stabilizing member

23: plate body

24: clamping piece

25: conductive frame

26: viscose glue

27: buffer member

28: contact surface

29: comb teeth opening

30: electric discharge machining unit

31: electrical contact

32: electrode for electrochemical cell

33: separation column

34: power supply unit

34': another power supply unit

35: connection structure

36: jig tool

40: load-bearing component

41: shaft hole

42: limiting groove

43: trough penetrating

44a: first sheet

44b: second sheet material

45: through hole

46: attachment member

47: lead angle

50: holding member

51: bump

52: base body

53: bump

54: conductive structure

56: insulation structure

57: trench structure

59: bolt

60: tension measuring unit

62: vibration measuring unit

64: slag discharge unit

70: laser unit

100: object to be processed

110: machining target area

120: machining grooves

124: filling material

A: two sides

B: discharge section

D: distance between each other

H: depth of field

h: depth of field

X: a first direction

Y: second direction

Z: third direction

F: direction of machine travel

P1: first power supply

P2: second power supply

Detailed Description

In order to facilitate understanding of the technical features, contents, advantages and effects achieved by the present invention, the present invention will be described in detail with reference to the accompanying drawings and the embodiments, wherein the drawings are used only for illustration and supplementary description, and not necessarily for actual proportion and precise configuration after the implementation of the present invention, so the scope of the present invention in actual implementation should not be read and limited with reference to the proportion and configuration of the drawings. In addition, for the sake of easy understanding, the same elements in the following embodiments are illustrated with the same reference numerals.

Furthermore, the words used throughout the specification and claims have the ordinary meaning as is usually accorded to each word described herein, including any words which have been commonly referred to in the art, in the context of this disclosure, and in any other specific context. Certain words used to describe the invention are discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.

The terms "first," "second," "third," and the like, as used herein, are not intended to be limited to the specific order or sequence presented, nor are they intended to limit the invention in any way, except as to distinguish one element from another element or operation described in such technical terms.

Furthermore, as used herein, the terms "comprising," "including," "having," "containing," and the like are open-ended terms that mean including, but not limited to.

Fig. 1 is a front view of an electrical discharge machining apparatus of the present invention, fig. 2 is a top view of a partial structure of the electrical discharge machining apparatus of the present invention, and fig. 3 is a side view of the partial structure of the electrical discharge machining apparatus of the present invention. Referring to fig. 1 to 3, an Electrical Discharge Machining (EDM) device 10 of the present invention includes a stage 20 and an EDM unit 30. The carrier 20 is used for carrying at least one object 100 to be processed. The object 100 to be processed may be any conductive or semiconductor structure, such as an ingot or a wafer, and its shape may be a block such as a cylinder or a sheet, for example. However, the radial cross section of the workpiece 100 is not limited to a circular shape, and may be any shape, such as a circular shape having a flat area. The object 100 to be processed may also be selectively connected to the carrier 20 by a planar area. The object 100 has a plurality of processing target areas 110 defined therein, and the processing target areas 110 are disposed in parallel at any suitable positions in the object 100. The distance D between the processing target regions 110 corresponds to (e.g., is the same as) the cutting thickness, thinning thickness or cutting pitch of the object 100 to be processed, and the values thereof can be selectively adjusted according to the actual process requirements, and thus can be equal to or different from each other.

As shown in fig. 1 to 3, the Electrical Discharge Machining (EDM) unit 30 is configured to perform an electrical Discharge machining process on the machining target areas 110 of the object 100 on the stage 20 along a machining proceeding direction F, for example, sequentially or simultaneously performing an electrical Discharge machining process such as Cutting and/or polishing (EDG) on the machining target areas 110 of the object 100. The utility model discloses be not limited to microscope carrier 20 drive treat that thing 100 removes towards the electrode 32 of electrical discharge machining unit 30 or electrical discharge machining unit 30 orders about electrode 32 and treats that thing 100 removes towards, as long as the thing 100 of treating on Electrical Discharge Machining (EDM) unit 30 and the microscope carrier 20 can carry out relative motion along the processing advancing direction F of the aforesaid, can be applicable to the utility model discloses in. In other words, the carrier 20 of the present invention can be a fixed-position carrier, or a movable or rotatable moving carrier, wherein the carrier 20 is exemplified as a working platform with an additional circuit board 21. The object 100 to be processed of the present invention is not limited to be composed of a single workpiece, but the object 100 to be processed of the present invention can also be composed of a plurality of workpieces to be processed connected together, wherein the workpieces can be selectively connected together by means of the adhesive 26 (as shown in fig. 4), wherein the adhesive can be conductive adhesive. In addition, the electrical discharge machining unit 30 of the present invention can also selectively perform an electrical discharge machining process on one or more objects 100 to be machined sequentially or simultaneously (as shown in fig. 5). Fig. 4 is a schematic top view illustrating a plurality of objects to be machined being adhered to each other for performing an electrical discharge machining process, and fig. 5 is a schematic side view illustrating an electrical discharge machining apparatus according to the present invention performing an electrical discharge machining process on a plurality of objects to be machined.

As shown in fig. 1 to 3, the edm unit 30 includes a plurality of electrodes 32, a power supply unit 34, and a jig 36. These plural electrodes 32 are disposed in parallel along the first direction X and are formed of a linear or plate-like conductive structure, such as a conductive wire or foil. The number of electrodes 32 is selectively determined according to the actual requirement. The pitch between these electrodes 32 corresponds to the cutting or thinning thickness of the object 100 to be processed. The electrodes 32 may have any shape, such as a linear shape or a plate shape, or any symmetrical (e.g., circular or square as shown in fig. 6) or asymmetrical shape, which may or may not be identical to each other in transverse cross section. The power supply unit 34 is electrically connected to the electrode 32 and the workpiece 100 via electrical contacts 31 (electrical contacts), respectively. The power supply unit 34 may be a set of power outputs or a plurality of sets of power outputs for supplying the first power P1. The power supply unit 34 may also be a series or parallel electrically connected electrode 32, as long as the electrode 32 can apply the discharge energy to the processing target area 110 of the object 100 to be processed, which is applicable to the present invention. The material of the discharge electrode 32 may be selected from the group consisting of Copper (Copper), brass (Brass), molybdenum (Molybdenum), tungsten (Tungsten), graphite (Graphite), steel (Steel), aluminum (Aluminum), and Zinc (Zinc), for example. The thickness of the discharge electrode 32 is less than about 300 μm, preferably in the range of about 30 μm to about 300 μm.

Referring to fig. 1 to 3, the fixture 36 is formed by assembling at least two carrying members 40 and at least two holding members 50 respectively. Two sides A of the electrode 32 are movably or fixedly abutted against the two supporting members 40 respectively, so that the discharge section B of the electrode 32 is in a suspended state, wherein the two supporting members 40 are separated from each other by a distance. The size of the two supporting members 40 and the height of the electrode 32 supported by the supporting members are not particularly limited to be the same or different, and the present invention can be applied as long as the discharge section B of the electrode 32 is suspended. The holding member 50 is selectively detachably or fixedly and firmly connected to the carrying member 40, and the holding member 50 is disposed on the base 52, wherein the base 52 can be a structure that fixes the position of the holding member 50, or the base 52 can be a moving mechanism that can move or rotate the holding member 50, so as to correspondingly drive the carrying member 40 to move or rotate, and thus the discharging section B of the electrode 32 can move in a left-right reciprocating manner. The base 52 is taken as an example of a moving mechanism, which can be any moving mechanism capable of moving in a reciprocating manner, such as a sliding mechanism, or any rotating mechanism capable of rotating in a reciprocating manner or in a circulating manner, such as a motor, for driving the holding member 50 to move or rotate correspondingly. Thereby, the carrying member 40 and the holding member 50 can selectively reciprocate or circulate with the electrode 32, so that the electrode 32 applies discharge energy to the workpiece 100 at the discharge section B. In order to provide better adherence of the electrode 32 to the carrier member 40, the edge of the carrier member 40 is optionally provided with a chamfer 47, as shown in fig. 2 and 12.

In the electrical discharge machining process, the power supply unit 34 provides a first power source P1 to the electrode 32 and the workpiece 100, so as to apply electrical discharge energy to the machining target area 110 of the workpiece 100 through the electrical discharge section B of the electrode 32, wherein when the electrical discharge machining unit 30 performs the electrical discharge machining process on the machining target area 110 of the workpiece 100 along the machining advancing direction (cutting/polishing direction) F, the electrical discharge section B of the electrode 32 and the machining target area 110 of the workpiece 100 move relatively along a second direction Y, for example, move reciprocally or cyclically. That is, one of the electrode 32 and the workpiece 100 may be fixed, and the other may be relatively moved. Alternatively, both the electrode 32 and the workpiece 100 are moved relatively. The processing direction F may be, for example, perpendicular to the first direction X or the second direction Y, or oblique to the first direction X or the second direction Y. For example, taking the object 100 to be processed as moving relative to the electrode 32 as an example, the stage 20 of the present invention is, for example, a movable or rotatable moving stage, and moves along the first direction X, the second direction Y or the processing advancing direction F or rotates around the first direction X, the second direction Y or the processing advancing direction F.

In the present invention, as shown in fig. 1 to 3, the electrodes 32 distributed in parallel along the first direction X can, for example, movably surround two carrying members 40 separated from each other by a distance, so that the discharging section B of the electrode 32 is in a suspended state and can move in a reciprocating or circulating manner along the second direction Y along with the movement of the two carrying members 40. Alternatively, the electrodes 32 may be, for example, two carrier members 40 fixedly connected across or spaced around each other. The electrical discharge machining unit 10 optionally has a connecting structure 35, and the connecting structure 35 extends along the first direction X to connect the plurality of electrodes 32 distributed in parallel along the first direction X. The connecting structure 35 can increase the structural stability of the discharge electrode 32 during the discharge process, so that the connecting structure 35 can be made of non-conductive material, but if the connecting structure 35 is made of conductive material, the connecting structure 35 can be used as the electrical contact 31. That is, the head and tail ends of the electrode 32 are respectively connected to the same one (as shown in fig. 1) or different ones (as shown in fig. 7 and 8) of the two carrying members 40, so that the discharge section B of the electrode 32 is suspended and can perform reciprocating movement along the second direction Y along with the reciprocating movement of the two carrying members 40. As shown in fig. 7, the electrode 32 is not limited to surround the two carrier members 40, and the electrode 32 may alternatively only span the top sides of the two carrier members 40.

As shown in fig. 9, in the electrical discharge machining process, the electrical discharge machining unit 30 applies electrical discharge energy to the machining target region 110 of the workpiece 100 along the machining proceeding direction F via the electrical discharge section B of the electrode 32, so that a plurality of machining grooves 120 may be formed on the machining target region 110 of the workpiece 100 along the machining proceeding direction F, wherein the depth h of the machining grooves 120 may be deepened as the electrical discharge machining process proceeds until the electrical discharge machining process is completed. As shown in fig. 9, the filling material 124 is selectively filled in the processing groove 120, so as to reduce the vibration of the workpiece 100 and maintain the original cut (as-cut)/thinning distance of the workpiece 100, and prevent the cut or ground sheets of the workpiece 100 from colliding with each other. The filling material 124 may be an insulating material such as air, deionized water, oil, glue, etc., or other suitable insulating material as a dielectric material.

As shown in fig. 10, since the discharge section B of the electrode 32 advances along the machining advancing direction F to apply the discharge energy to the machining target area 110 of the workpiece 100 during the electric discharge machining process, and the discharge section B of the electrode 32 and the machining target area 110 of the workpiece 100 move relatively along the second direction Y at the same time, in order to avoid the shaking phenomenon generated during the electric discharge machining process of the electrode 32, the electric discharge machining apparatus 10 of the present invention selectively has the stabilizing member 22, wherein the stabilizing member 22 is disposed on the stage 20 or the jig 36, for example, the position of the stabilizing member 22 is located between the two sides a of the electrode 32, the type of the stabilizing member 22 is not particularly limited, and the present invention can be applied as long as the shaking generation of the electrode 32 can be reduced. For example, the contact surface 28 of the stabilizing member 22 contacting the electrode 32 may be a flat surface, for example, to reduce the vibration phenomenon by supporting the electrode 32 in a suspended state, or the contact surface 28 of the stabilizing member 22 contacting the electrode 32 may optionally have a guide groove, which not only supports the electrode 32 in a suspended state, but also stabilizes the electrode 32 and provides a guiding effect when the electrode 32 reciprocates relative to the workpiece 100. In addition, the stabilizing member 22 may optionally be designed to be highly retractable, whereby the height of the contact surface 28 of the stabilizing member 22 in contact with the electrode 32 may be varied with the depth of the machined groove 120.

In the present invention, the type of the carrier member 40 is not particularly limited, and may be, for example, a plate type structure (as shown in fig. 12 and 13) or a sleeve type structure (as shown in fig. 1 to 10). The surface of the carrier member 40 has a plurality of limiting grooves 42, for example, wherein the electrodes 32 are limited in the limiting grooves 42, and the electrodes 32 in different limiting grooves 42 can be electrically independent from each other, or can be sequentially connected to be electrically connected to each other. The spacing grooves 42 are also arranged in parallel along the first direction X at the above-mentioned distance D, so that the electrodes 32 are arranged in parallel along the first direction X. The width of the limiting groove 42 corresponds to the width of the electrode 32, for example, the width of the limiting groove 42 is slightly larger than the width of the electrode 32, so that the electrode 32 is limited in the limiting groove 42. The two bearing members 40 may have a limiting groove 42, for example. If there is no need for the electrode 32 and the supporting member 40 to move relative to each other, for example, if the supporting member 40 does not need to rotate, the present invention can also selectively fix the electrode 32 in the limiting groove 42 by means of an attachment member 46 (as shown in fig. 7 and 8), wherein the attachment member 46 has a plurality of protrusions corresponding to the limiting groove 42 in position and size, for example, or the attachment member 46 can also be adhesive. In addition, the attachment member 46 can be selectively electrically connected to the first power source P1 supplied by the power supply unit 34 or a second power source P2 of another power supply unit 34', wherein the second power source P2 can be, for example, a DC power source or a radio frequency. That is, the attachment member 46 may be selectively used as the electrical contact 31 of fig. 1.

Referring to fig. 11 and also referring to fig. 1 to 10, for example, in a sleeve structure in which the supporting member 40 is cylindrical, the limiting grooves 42 are distributed in parallel along a first direction X (i.e. an axial direction of the supporting member 40), and penetrate into the supporting member 40 along a third direction Z (i.e. a radial direction of the supporting member 40) to have a depth H. Wherein, the depth H of the position-limiting grooves 42 can be determined according to practical requirements, the depths H of the position-limiting grooves 42 are not limited to be the same, that is, the depths H of the position-limiting grooves 42 distributed in parallel along the first direction X can also be different. Wherein, two sides A of the electrode 32 are contacted with each other to present a stacking state, and are located in the limiting groove 42 by surrounding the bearing member 40. In addition, the number of the electrodes 32 in different limiting grooves 42 is not limited to be the same, i.e., the number of the electrodes 32 in different limiting grooves 42 can also be different. In other words, the electrodes 32 distributed in parallel along the first direction X may be distributed in the same number in parallel along the third direction Z, or the electrodes 32 distributed in parallel along the first direction X may be distributed in different numbers in parallel along the third direction Z. The third direction Z is perpendicular to the first direction X, i.e. the third direction Z is radial to the bearing member 40 and parallel to the radial direction of the workpiece 100. However, since the edm process can be performed vertically along the radial direction of the workpiece 100 or obliquely along the radial direction of the workpiece 100 at an oblique angle according to the actual process requirement, the stage 20 or the fixture 36 can be adjusted to be parallel to the processing direction F, for example, during the actual edm process.

The holding member 50 is selectively detachably or fixedly assembled to the supporting member 40, and the assembly of the supporting member 40 and the holding member 50 is not particularly limited as long as the supporting member is assembled to the holding member 50, or the supporting member 40 is selectively moved or rotated by the movement or rotation of the holding member 50, and the present invention is applicable. The supporting member 40 is, for example, a cylindrical (as shown in fig. 2) or other shaped sleeve having a shaft hole 41, and the supporting member 40 can be sleeved on the protrusion 51 of the retaining member 50 by using the shaft hole 41. In addition, in order to reduce the time required for replacing the electrode 32 when the electrode 32 is accidentally broken, the present invention can also cover the shaft hole 41 of the supporting member 40 on the dummy (dummy) supporting member having the bump. Therefore, the user can quickly take out the carrier member 40 having the electrode 32 surrounded thereon from the dummy support member, and fit the shaft hole 41 of the carrier member 40 onto the protrusion 51 of the holding member 50, or insert the protrusion 51 of the holding member 50 into the shaft hole 41 of the carrier member 40, so as to quickly complete the assembly of the jig.

Taking a plate-type structure as an example (as shown in fig. 12 and 13), the carrying member 40 includes a first sheet 44a and a second sheet 44b, respectively, and the electrode 32 is clamped between the first sheet 44a and the second sheet 44 b. Taking fig. 12 as an example, the electrode 32 is wound on the first sheet 44a, the second sheet 44b is bonded to the first sheet 44a, and the second sheet 44b is bonded to the first sheet 44a, for example, in the fitting groove of the first sheet 44a, thereby clamping the electrode 32. The second sheet 44b can be used as a separation layer between the multi-layer wound electrodes 32, and the spacing between the multi-layer electrodes 32 can be adjusted by changing the thickness of the second sheet 44 b. The supporting member 40 optionally has a through slot 43, for example, and the supporting member 40 can be sleeved on the protrusion 53 of the holding member 50 by using the through slot 43. The through-slot 43 is not limited to a single-sided opening or a double-sided opening, and any type of through-slot 43 or assembly method can be applied to the present invention as long as the supporting member 40 and the holding member 50 can be assembled together. Alternatively, as shown in fig. 14, the supporting members 40 can be selectively assembled to the holding members 50 by, for example, screwing, for example, the supporting members 40 have a through hole 45, and the protrusions 53 of the holding members 50 have a screw hole, respectively, wherein the supporting members 40 are screwed to the screw holes of the holding members 50 by a bolt 59 passing through the through hole 45. Alternatively, as shown in fig. 15, the holding members 50 may also have a groove structure 57, respectively, for example, and the carrying members 40 are inserted into the groove structure 57 of the holding members 50 to be correspondingly assembled on the holding members 50.

In addition, as shown in fig. 16, the holding member 50 may further have a conductive structure 54, for example, the conductive structure 54 crosses the plurality of electrodes 32 along the first direction X, for example, so as to electrically connect the electrodes 32 abutting on the supporting member 40. Thus, the first power P1 provided by the power supply unit 34 can be selectively electrically connected to the electrode 32 through the conductive structure 54, for example, i.e. the conductive structure 54 can be selectively used as the electrical contact 31 in fig. 1. In addition, an insulating structure 56 can be optionally disposed between the electrodes 32 to prevent the electrodes 32 from electrically contacting each other. For example, as shown in fig. 17, an insulating structure 56 may be disposed between the electrode 32 and the conductive structure 54, for example. The material of the insulating structure 56 is not particularly limited, and may be applied to the present invention as long as the insulating effect is provided.

In addition, the heights of the electrodes 32 in different ones of the stopper grooves 42 are not limited to be the same, and the heights of the electrodes 32 in different ones of the stopper grooves 42 may be different from each other. Alternatively, the heights of the electrodes 32 on different carrier members 40 are not limited to be the same, and the heights of the electrodes 32 in different carrier members 40 may also be different. That is, as shown in fig. 11, the electrodes 32 may be not only distributed in parallel along the first direction X, but also selectively distributed in parallel along the third direction Z at the same height or at different heights. Wherein, the electrodes 32 in the same limiting groove 42 can be stacked or arranged in parallel.

In addition, as shown in fig. 11, since the plurality of electrodes 32 are distributed in parallel along the third direction Z (the processing traveling direction F), when the electrodes 32 distributed in parallel along the third direction Z sequentially cut or polish the processing target area 110 of the object 100 along the processing traveling direction F, the rear electrode 32 repeatedly passes through the position where the front electrode 32 has passed. In other words, even if the front electrode 32 (e.g., the lower electrode) is disconnected, the rear electrode 32 (e.g., the upper electrode) can still apply the discharge energy to the target area 110 of the workpiece 100 shown in fig. 1 instead of the front electrode 32, taking the working direction F as an example from top to bottom. Therefore, the utility model can avoid the bad effects of the process interruption caused by the broken wire of the electrode by the electrode replacement function.

The object 100 to be processed is placed on the carrier 20, and the carrier 20 optionally includes a clamping member 24 for fixing the object 100 to be processed. The carrier 20 or the clamping member 24 thereon can be selectively connected to the object 100 by an adhesive, such as a conductive adhesive, which can provide conductive and fixing effects. For example, in the case where the object 100 to be processed is a block (e.g., an ingot), the holding member 24 may be, for example, a cylindrical periphery of the ingot, i.e., two sides of the ingot are radially held, as shown in fig. 18, so as to prevent rolling or displacement, and so that the processing target region 110 of the object 100 to be processed is located outside the holding member 24. Alternatively, the holding members 24 may hold both ends of the ingot, i.e., both sides of the ingot in the axial direction, as shown in fig. 19, for preventing displacement and allowing the processing target region 110 of the object 100 to be processed to be located between the holding members 24. The clamping member 24 may be, for example, two plates 23 separately arranged, so as to clamp the object 100 to be processed by the two plates 23.

As shown in fig. 20, the clamping member 24 may be a single plate 23 for supporting a single side of the workpiece 100. In addition, the present invention can selectively adhere the two groove walls of the processing groove 120 of the processing target area 110 of the object 100 to be processed by the adhesive 26, so as to avoid the shaking phenomenon of the object 100 to be processed during the electrical discharge machining process, and to avoid the burr phenomenon before the electrical discharge machining process is finished. The workpiece 100 is not limited to be fixed to one side of the clamping member 24 via the adhesive 26 at both axial ends or at the radial periphery.

As shown in fig. 21, the clamping member 24 can also clamp a buffer member 27, for example, and the buffer member 27 fixes the workpiece 100 via an adhesive 26, and the edm unit 30 performs an edm process on the workpiece 100 on the stage 20 along the machining traveling direction F, or even performs an edm process on the workpiece 100 together with the buffer member 27, for example. The adhesive 26 is, for example, a conductive adhesive layer. The workpiece 100 is not limited to be fixed to the buffer member 27 through the adhesive 26 at both axial ends or at the radial periphery.

As shown in fig. 22, the clamping member 24 can also clamp the conductive frame 25 to fix the object 100 to be machined, for example, and the edm unit 30 can perform an edm process on the object 100 to be machined on the stage 20 along the machining traveling direction F, or even perform an edm process on the object 100 to be machined together with the conductive frame 25, for example. The workpiece 100 is not limited to be fixed to one side of the clamping member 24 via the adhesive 26 at both axial ends or at the radial periphery.

In addition, as shown in fig. 23, in the clamping member 24 shown in the above figures, the plate body of the clamping member 24 may also be a comb-shaped plate, for example, at least one of the two plate bodies is a comb-shaped plate, and the position of the comb opening 29 of the comb-shaped plate corresponds to the position of the electrode 32, that is, the position of the processing target area 110.

As shown in fig. 24, the edm unit 30 selectively has an adjustable tension value, and the tension value of the electrode 32 is adjusted by relatively displacing the two carrying members 40 or the two holding members 50 (as shown by the double arrows at the lower left and right sides of fig. 24), for example, moving toward or away from each other. As shown in fig. 24, the edm unit 30 further includes a tension measuring unit 60, such as a tension meter, for measuring the tension of the electrode 32. As shown in fig. 24, the electric discharge machining apparatus further includes a vibration measuring unit 62 for measuring a vibration value of the electrode 32.

As shown in fig. 24, the electric discharge machining apparatus 30 further includes a slag discharging unit 64, when the electric discharge machining apparatus 30 performs an electric discharge machining process on the workpiece 100, the slag discharging unit 64 provides one or more external forces to remove the residue generated by the electrode 32 applying the electric discharge energy to the workpiece 100, and a direction of the external force applied by the slag discharging unit 64 corresponds to the discharge section B of the electrode 32. The slag discharging unit 64 may be, for example, an air flow generator, a water flow generator, an ultrasonic generator, a piezoelectric oscillator, or a magnetic force generating component. The external force may be, for example, air flow, water flow, ultrasonic vibration, piezoelectric vibration, suction force, magnetic force, or the like. The residue discharge unit 64 is not limited to be disposed on the jig 36 and the stage 20, and may be disposed even around the discharge section B of the electrode 32. Taking the slag discharging unit 64 as an ultrasonic generator or a piezoelectric oscillator as an example, the slag discharging unit 64 can be disposed on the jig 36 and the stage 20, for example, by directly generating an external force to directly act on the jig 36 and the stage 20, and the external force generated by the slag discharging unit 64 can also, for example, cause the jig 36, the object 100 to be processed, or the electrode 32 to oscillate, for example, simultaneously, to provide an effect of assisting in removing the residue.

In other possible embodiments, the electrical discharge machining unit 30 of the present invention may drive the discharge sections B of the plurality of electrodes 32 to move in a reciprocating or circulating manner by, for example, rotating more than two of the supporting members 40 in a reciprocating or circulating manner. The connection configuration of the carrier members 40 and the electrodes 32 can be as shown in fig. 25, wherein each electrode 32 surrounds four carrier members 40. The electrodes 32 share two of the four supporting members 40, so that two sides a of the electrodes 32 are in contact with each other to present a stacked state and movably abut against the two shared supporting members 40, and the rest of the supporting members 40 are disposed at different heights in pairs, so that the electrodes 32 are distributed in parallel at an interval. Thereby, when the carrying member 40 performs reciprocating or circulating rotation, the discharge sections B of the electrodes 32 are also displaced relative to the object 100 to be processed, and are located at different heights by the pair of carrying members 40 disposed at different heights, i.e., are distributed in parallel with each other at the interval. The two shared carrying members 40 are, for example, synchronously rotated in a reciprocating or circulating manner at the same speed, so that the electrodes 32 are moved in the reciprocating or circulating manner along the second direction Y at the same speed.

In other equally feasible embodiments, the electrical discharge machining unit 30 of the present invention may move the discharge sections B of the plurality of electrodes 32 in a reciprocating or circulating manner, for example, by rotating the two carrying members 40 in a reciprocating or circulating manner. For example, as shown in fig. 26, the carrying members 40 and the electrodes 32 are configured such that two sides a of the electrodes 32 are in contact with each other to be stacked and movably abutted against the two carrying members 40, the discharge sections B of the electrodes 32 are distributed in parallel at an interval by the separation columns 33, whereby when the carrying members 40 perform reciprocating or circulating rotation, the discharge sections B of the electrodes 32 are also displaced relative to the object 100 to be processed and are distributed in parallel at intervals by the separation columns 33. Wherein, these electrodes 32 are movably abutted against the separation column 33, and the position of the separation column 33 is fixed, but can be designed in a fixed or rolling way, and has a limit groove to be used as a guide column. The separation column 33 may also be made of an electrically conductive material, so that the electrode 32 can be electrically connected to the power supply unit 34 through the separation column 33, i.e. the separation column 33 can also be used as the electrical contact 31 in fig. 1. Wherein the two carrying members 40 rotate synchronously in a reciprocating or circulating manner at the same speed, so that the electrodes 32 move in a reciprocating or circulating manner along the second direction Y at the same speed.

In other possible embodiments, as shown in fig. 24, the edm unit 30 of the present invention may further optionally include a laser unit 70, for example, for providing a heat source to the workpiece 100 before, during or after the edm unit 30 performs the edm process, so as to partially (locally) heat or entirely heat the workpiece 100. That is, the heat source provided by the laser unit 70 can provide energy before and during the electric discharge machining process to increase the efficiency of the electric discharge machining process, and can also provide repairing, polishing and annealing effects after the electric discharge machining process.

To sum up, the utility model discloses an electric discharge machining device has following advantage:

(2) The fixture is formed by assembling at least two bearing members and at least two fixing members respectively, so that the time required for replacing the electrodes can be greatly reduced by means of a quick-release design, and the tension of the discharge electrodes can be adjusted.

(4) The stabilizing member reduces electrode jitter and provides a guiding effect and can be used as an electrical contact.

The foregoing is by way of example only, and not limiting. It is intended that all equivalent modifications or variations be included within the spirit and scope of the present invention, which is defined in the appended claims.

Claims

1. An electric discharge machining apparatus, comprising:

a carrying platform for carrying at least one object to be processed; and

an electrical discharge machining unit for performing an electrical discharge machining process on a plurality of machining target areas of the object to be machined on the carrier along a machining direction, the electrical discharge machining unit comprising:

a plurality of electrodes distributed in parallel along a first direction;

a fixture, which is formed by assembling at least two bearing members and at least two fixing members, wherein two sides of the plurality of electrodes are respectively abutted against the two bearing members, so that a discharge section of the plurality of electrodes is in a suspended state; and

a power supply unit, which provides a first power source for the plurality of electrodes and the object to be processed during the electrical discharge machining process, so as to apply an electrical discharge energy to the plurality of processing target areas of the object to be processed through the electrical discharge sections of the plurality of electrodes, wherein when the electrical discharge machining unit performs the electrical discharge machining process along the machining traveling direction, the electrical discharge sections of the plurality of electrodes and the plurality of processing target areas of the object to be processed move relatively along a second direction.

2. The electrical discharge machining apparatus according to claim 1, wherein the discharge sections of the plurality of electrodes and the plurality of machining target regions of the object to be machined are relatively moved in a reciprocating or circulating manner along the second direction.

3. The electric discharge machine according to claim 2, wherein the two carrying members and the two holding members are reciprocated or circulated together with the plurality of electrodes so that the plurality of electrodes apply the discharge energy to the object to be processed with the discharge section.

4. The electrical discharge machining apparatus of claim 1, wherein the electrical discharge machining unit adjusts the tension value of the plurality of electrodes by causing the two carrying members or the two holding members to be relatively displaced.

5. The electrical discharge machining apparatus of claim 2, further comprising a stabilizing member for stabilizing the movement of the plurality of electrodes relative to the object to be machined.

6. The electrical discharge machining apparatus of claim 1, wherein the plurality of electrodes are disposed in parallel along both the first direction and a third direction, the third direction being perpendicular to the first direction or the second direction.

7. The electrical discharge machining apparatus according to claim 6, wherein the plurality of electrodes distributed in parallel along the first direction are distributed in parallel along the third direction in different numbers.

8. The electrical discharge machining apparatus of claim 1, wherein the plurality of electrodes are distributed in parallel at different heights along the first direction.

9. The electrical discharge machining apparatus of claim 8, wherein the plurality of electrodes are in contact with each other.

10. The electrical discharge machining apparatus of claim 1, wherein the electrical discharge machining unit has a connection structure extending along the first direction to connect the plurality of electrodes distributed in parallel along the first direction.

11. The electrical discharge machining apparatus according to claim 1, wherein the plurality of electrodes are linear or plate-shaped.

12. The electrical discharge machining apparatus of claim 1, wherein the plurality of electrodes are asymmetric in transverse cross-section.

13. The electrical discharge machining apparatus of claim 1, wherein the power supply unit is one power output or a plurality of power outputs.

14. The electrical discharge machining apparatus of claim 1, wherein the power supply unit is electrically connected to the plurality of electrodes in series or in parallel.

15. The electrical discharge machining apparatus of claim 1, wherein the stage moves in the first direction, the second direction, or the machining traveling direction.

16. The electrical discharge machining apparatus of claim 1, wherein the carrier rotates about the first direction, the second direction, or the machining direction.

17. The electrical discharge machining apparatus of claim 1, further comprising a slag discharge unit, wherein when the electrical discharge machining unit performs the electrical discharge machining process on the workpiece, the slag discharge unit provides an external force to remove residues generated by the electrodes applying the electrical discharge energy to the workpiece.

18. The electrical discharge machining apparatus of claim 1, further comprising a slag discharge unit, wherein when the electrical discharge machining unit performs the electrical discharge machining process on the workpiece, the slag discharge unit provides a plurality of external forces to respectively remove residues generated by the electrodes applying the electrical discharge energy to the workpiece.

19. The electrical discharge machining apparatus of claim 17 or 18 wherein the slag discharge unit is an ultrasonic generator or a piezoelectric oscillator, and the tool, the workpiece, or the plurality of electrodes are oscillated.

20. The electrical discharge machining apparatus of claim 1, wherein the electrical discharge machining apparatus further comprises a tension measuring unit for measuring tension values of the plurality of electrodes.

21. The electrical discharge machining apparatus of claim 1, wherein the electrical discharge machining apparatus further comprises a vibration measuring unit for measuring vibration values of the plurality of electrodes.

22. The electrical discharge machining apparatus of claim 1, wherein the power supply unit of the electrical discharge machining unit further comprises a second power supply for providing a direct current power or a radio frequency to the plurality of electrodes.

23. The electrical discharge machining apparatus of claim 1, wherein the object to be machined has a flat area, and is connected to the carrier by the flat area.

24. The electrical discharge machining apparatus of claim 1 wherein the carrier further comprises a holder for holding the object to be machined.

25. The electrical discharge machining apparatus of claim 24, wherein the carrier or the holder is attached to the object to be machined with an adhesive.

26. The electrical discharge machining apparatus of claim 25 wherein the adhesive is a conductive adhesive.

27. The electrical discharge machining apparatus according to claim 24, wherein the electrical discharge machining unit performs the electrical discharge machining process on the object to be machined on the stage together with the holder along the machining traveling direction.

28. The electrical discharge machining apparatus of claim 24, wherein the clamping member clamps a buffer member, the buffer member fixes the object to be machined through a conductive adhesive layer, and the electrical discharge machining unit performs the electrical discharge machining process on the object to be machined on the carrier along the machining traveling direction.

29. The electrical discharge machining apparatus of claim 24 wherein the holder holds the object to be machined by holding a conductive frame, the electrical discharge machining unit performing the electrical discharge machining process on the object to be machined on the carrier along the machining traveling direction.

30. The electrical discharge machining apparatus of any one of claims 24 to 29, wherein the holder comprises two plates, at least one of the two plates being a comb plate.

31. The electrical discharge machining apparatus of claim 24, wherein the holder is axially supported against a single side of the object to be machined, and a machining groove formed in the machining target region of the object to be machined by the electrical discharge energy is adhesively fixed to both groove walls of the machining groove.

32. The electrical discharge machining apparatus of claim 1, wherein the discharge energy forms a machining groove in the machining target region of the object to be machined, the machining groove being filled with a filling material.

33. The electrical discharge machining apparatus of claim 1, wherein the two support members are respectively plate-shaped or sleeve-shaped.

34. The electrical discharge machining apparatus of claim 1, wherein the two support members comprise a first sheet and a second sheet, respectively, and the plurality of electrodes are clamped between the first sheet and the second sheet.

35. The electrical discharge machining apparatus as claimed in claim 1, wherein the two carrying members each have a through-groove, the two holding members each have a protrusion corresponding to the through-groove, and the two carrying members are correspondingly assembled with the protrusions of the two holding members by the through-grooves.

36. The electrical discharge machining apparatus of claim 1, wherein the two support members each have a through hole, the two holding members each have a screw hole, and wherein the two support members are screwed to the screw holes of the two holding members by a bolt passing through the through holes.

37. The electrical discharge machining apparatus according to claim 1, wherein the two holding members have a groove structure, respectively, and the two carrier members are inserted into the groove structures of the two holding members so as to be correspondingly coupled to the two holding members.

38. The electrical discharge machining apparatus of claim 1 wherein the two holding members each have a conductive structure for electrically connecting against the plurality of electrodes on the two bearing members.

39. The electric discharge machining apparatus according to claim 1, 37 or 38, wherein the two holding members simultaneously hold the two carrying members and the plurality of electrodes.

40. The electrical discharge machining apparatus of claim 38 wherein an insulating structure is disposed between the plurality of electrodes to prevent the plurality of electrodes from electrically contacting each other.

41. The electrical discharge machining apparatus of claim 1, wherein the two support members have a plurality of position-limiting grooves for limiting the plurality of electrodes.

42. The electrical discharge machining apparatus of claim 41, wherein the plurality of electrodes are fixed in the plurality of retaining grooves by adhesive.

43. The electrical discharge machining apparatus of claim 1 or 41, wherein the electrical discharge machining unit further comprises an attachment member connected to the plurality of electrodes at edges of the two support members.

44. The electrical discharge machining apparatus of claim 43, wherein the attachment member is electrically connected to the first power source or a second power source of the power supply unit.

45. The electrical discharge machining apparatus according to claim 1, wherein the ends of the plurality of electrodes are connected to the same one or different ones of the two support members, respectively.

46. The electrical discharge machining apparatus of claim 1 wherein edges of the two support members have chamfered corners.

47. The electrical discharge machining apparatus of claim 1 wherein the plurality of electrodes are equally spaced in parallel along the first direction.

48. The electrical discharge machining apparatus of claim 1 wherein the plurality of electrodes are electrically connected to each other via a conductive structure to electrically connect the power supply unit.

49. The electrical discharge machining apparatus of claim 1, wherein the object to be machined carried by the stage is a semiconductor ingot or wafer.

50. The electrical discharge machining apparatus of claim 1, wherein the electrical discharge machining apparatus cuts or polishes the workpiece carried by the carrier sequentially or simultaneously during the electrical discharge machining process.

51. The electrical discharge machining apparatus of claim 1, further comprising a laser unit for providing a heat source to the workpiece before, during or after the electrical discharge machining process.

52. The electrical discharge machining apparatus of claim 1, wherein the object to be machined is formed by electrically bonding a plurality of workpieces.