TW202315691A - Electrical discharge machining apparatus - Google Patents

Abstract

An electrical discharge machining apparatus at least comprising a carrier and a discharge processing unit is disclosed. The carrier is used to carry at least one object to be machined. A discharge processing unit is used to perform a discharge processing procedure on a plurality of processing target areas of the object to be machined along a processing direction. The discharge processing unit comprises a plurality of electrodes distributed in parallel along a first direction. When the discharge processing unit performs the discharge processing procedure along the processing direction, the discharge section of the electrodes and the processing target area of the object to be processed move in opposite directions. As a result, the overall processing time and the time required to change electrodes can be saved.

Description

EDM

The present invention relates to a processing device, in particular to a discharge processing device.

With the vigorous development of the semiconductor industry, electrical discharge machining technology has been commonly used to process crystal ingots or wafers. Electrical discharge machining (Electrical Discharge Machining, EDM) is a manufacturing process that generates sparks through electrical discharge to make the object to be processed into a desired shape. The dielectric material separates the two electrodes and applies a voltage to generate periodic and rapidly changing current discharges for processing the above-mentioned objects to be processed. EDM technology uses two electrodes, one of which is called tool electrode, or discharge electrode, and the other electrode is called workpiece electrode, which is connected to the above-mentioned object to be processed. During EDM, there is no actual contact between the discharge electrode and the workpiece electrode.

As the potential difference between the two electrodes increases, the electric field between the two electrodes also increases until the electric field strength exceeds the dielectric strength, at which point dielectric breakdown occurs and current flows through the two electrodes, removing some of the material. When the current flow ceases, new dielectric material flows into the electric field between the electrodes, displacing some of the aforementioned material and re-providing dielectric insulation. After the current flows, the potential difference between the two electrodes will return to before the dielectric breakdown, so that a new dielectric breakdown can be repeated.

However, the disadvantage of the existing electric discharge machining technology is that the roughness of the cutting surface is not good, and there are quite a lot of surface cracks on the cutting surface, which may even extend along the non-cutting direction, resulting in a cracking effect in an unexpected direction. Moreover, the existing electrical discharge machining technology uses jigs to clamp the periphery of the crystal ingot, that is, radially clamp the sides of the crystal ingot, to prevent rolling or displacement when cutting the crystal ingot. However, since the cutting surface of the ingot is also located in the radial direction, the traditional technology can only cut the ingot exposed to the outside of the jig, and cannot cut the area where the jig and the ingot overlap, so the traditional technology needs to stop and readjust the position , to cut again. In addition, existing EDM techniques can only cut or thin wafers one wafer at a time, which is quite slow. Furthermore, the existing EDM technology only uses a single cutting line, and the existing EDM device does not have a quick-release design. If the cutting line breaks accidentally, it needs to be shut down and it takes a lot of time to complete the replacement. .

In view of this, the object of the present invention is to provide an electric discharge machining device to solve the above-mentioned problems of the prior art.

To achieve the aforementioned purpose, the present invention proposes an electric discharge machining device, which at least includes: a stage for carrying at least one object to be processed; and an electric discharge machining unit for processing the object on the stage along a processing direction A plurality of processing target areas of the object to be processed are subjected to an electrical discharge machining procedure, and the electrical discharge machining unit includes: a plurality of electrodes, the plurality of electrodes are distributed in parallel along a first direction; a jig, the jig is carried by at least two The components and at least two holding components are assembled correspondingly, and the two sides of the plurality of electrodes are respectively abutted against the two supporting components, so that one discharge section of the plurality of electrodes is in a suspended state; and a power supply unit, The power supply unit provides a first power supply to the plurality of electrodes and the object to be processed in the electric discharge machining process, for applying a discharge energy to the plurality of the object to be processed through the discharge section of the plurality of electrodes A machining target area, wherein when the electrical discharge machining unit performs the electrical discharge machining procedure along the machining direction, the discharge section of the plurality of electrodes and the plurality of machining target areas of the object to be processed are along a second direction is relative movement.

Wherein, the discharge sections of the plurality of electrodes and the plurality of machining target areas of the workpiece move relative to each other along the second direction in a reciprocating or circular manner.

Wherein, the two carrying members and the two holding members move reciprocatingly or circularly together with the plurality of electrodes, so that the plurality of electrodes apply the discharge energy to the object to be processed in the discharge section.

Wherein, the electrical discharge machining unit adjusts the tension values of the plurality of electrodes by causing relative displacement of the two bearing members or the two holding members.

Wherein, the electrical discharge machining device further includes a stabilizing member for stabilizing the movement of the plurality of electrodes relative to the object to be processed.

Wherein, the plurality of electrodes are parallel distributed along the first direction and a third direction at the same time, and the third direction is perpendicular to the first direction or the second direction.

Wherein, the plurality of electrodes distributed in parallel along the first direction are distributed in parallel along the third direction in different numbers.

Wherein, the plurality of electrodes are parallel distributed at different heights along the first direction.

Wherein, the plurality of electrodes are in contact with each other.

Wherein, the electrical discharge machining unit has a connection structure, and the connection structure extends along the first direction to connect the plurality of electrodes distributed in parallel along the first direction.

Wherein, the plurality of electrodes are linear or plate-shaped.

Wherein, the transverse cross-sections of the plurality of electrodes are asymmetric shapes.

Wherein, the power supply unit is a group of power output or multiple groups of power output.

Wherein, the power supply unit is electrically connected to the plurality of electrodes in series or in parallel.

Wherein, the stage moves along the first direction, the second direction or the processing direction.

Wherein, the stage rotates around the first direction, the second direction or the processing direction as the axis.

Wherein, the electrical discharge machining device also includes a slag discharge unit, and when the discharge machining unit performs the discharge machining procedure on the object to be processed, the slag discharge unit provides an external force to prevent the plurality of electrodes from applying the discharge to the object to be processed. Residues produced by energy.

Wherein, the electrical discharge machining device also includes a slag discharge unit. When the discharge machining unit performs the discharge machining procedure on the object to be processed, the slag discharge unit provides a plurality of external forces to respectively exclude the plurality of electrodes from exerting on the object to be processed. The residue produced by the discharge energy.

Wherein, the slag discharge unit is an ultrasonic generator or a piezoelectric oscillator, which makes the jig, the object to be processed and the plurality of electrodes vibrate.

Wherein, the electrical discharge processing device further includes a tension measuring unit for measuring the tension values of the plurality of electrodes.

Wherein, the electric discharge processing device further includes a vibration measuring unit for measuring the vibration values of the plurality of electrodes.

Wherein, the power supply unit of the electrical discharge machining unit further includes providing a second power supply to the plurality of electrodes, so as to provide a DC power supply or a radio frequency to the plurality of electrodes.

Wherein, the object to be processed has a planar area, and is connected to the carrier through the planar area.

Wherein, the stage further includes a clamping part for fixing the object to be processed.

Wherein, the stage or the clamping member is connected with the object to be processed by an adhesive.

Wherein, the glue is conductive glue.

Wherein, the electrical discharge machining unit performs the electrical discharge machining procedure on the object to be processed and the clamping member on the stage along the machining direction.

Wherein, the clamping part clamps a buffer member, and the buffer member fixes the object to be processed through a conductive adhesive layer, and the electrical discharge machining unit is used to control the object to be processed on the stage along the processing direction. This electrical discharge machining procedure is performed.

Wherein, the clamping member fixes the object to be processed by clamping a conductive frame, and the electrical discharge machining unit performs the electrical discharge machining procedure on the object to be processed on the stage along the processing direction.

Wherein, the clamping member includes two plates, at least one of which is a comb-shaped plate.

Wherein, the clamping member axially supports one side of the object to be processed, and the discharge energy forms a processing groove in the processing target area of the object to be processed by using an adhesive to fix the processing groove The two walls of the groove.

Wherein, the discharge energy forms a processing groove in the processing target area of the object to be processed, and a filling material is filled in the processing groove.

Wherein, the two load-carrying members are plate-shaped structures or sleeve structures respectively.

Wherein, the two bearing members respectively include a first sheet and a second sheet, and the plurality of electrodes are sandwiched between the first sheet and the second sheet.

Wherein, the two bearing members respectively have a through groove, and the two holding members respectively have a protrusion corresponding to the through groove, and the two carrying members are correspondingly assembled with the protrusions of the two holding members through the through groove.

Wherein, the two bearing members respectively have a through hole, and the two holding members respectively have a screw hole, wherein the two bearing members pass through the through hole by a bolt to be screwed to the screw holes of the two holding members.

Wherein, the two holding members respectively have a groove structure, and the two carrying members are inserted into the groove structures of the two holding members, so as to be correspondingly assembled on the two holding members.

Wherein, the two holding members respectively have a conductive structure, so as to electrically connect the plurality of electrodes abutting against the two carrying members.

Wherein, the two holding members fix the two carrying members and the plurality of electrodes at the same time.

Wherein, an insulating structure is provided between the plurality of electrodes to avoid electrical contact between the plurality of electrodes.

Wherein, the two bearing members have a plurality of limiting slots for limiting the plurality of electrodes.

Wherein, the plurality of electrodes are fixed in the plurality of limiting slots with glue.

Wherein, the electric discharge machining unit further includes an attachment member connected to the plurality of electrodes at the edges of the two bearing members.

Wherein, the attachment member is electrically connected to the first power supply or a second power supply of the power supply unit.

Wherein, the head and tail ends of the plurality of electrodes are respectively connected to the same or different ones of the two carrying members.

Wherein, the edges of the two bearing members have chamfers.

Wherein, the plurality of electrodes are equidistant and parallel distributed along the first direction.

Wherein, the plurality of electrodes are connected to each other through a conductive structure, so as to electrically connect the power supply unit.

Wherein, the object to be processed carried by the platform is a semiconductor crystal ingot or wafer.

Wherein, the electrical discharge machining device cuts or polishes the object to be processed carried by the stage sequentially or simultaneously during the electrical discharge machining procedure.

Wherein, the electric discharge machining device further includes a laser unit, which is used to provide a heat source to the object to be processed before, during or after the electric discharge machining procedure.

Wherein, the object to be processed is formed by electrically bonding a plurality of workpieces.

Based on the above, the electrical discharge machining device according to the present invention has the following advantages:

(1) The multi-layer electrode can effectively solve the problem that a single electrode must be stopped for replacement if it breaks.

(2) The jig is composed of at least two load-carrying components and at least two holding components corresponding to each other. The quick-release design can greatly reduce the time required for electrode replacement, and can also adjust the tension of the discharge electrode.

(3) With electrodes distributed in parallel, multiple processing target areas can be cut or polished at the same time, effectively saving the overall processing time.

(4) The stabilizing member can reduce the shaking of the electrode, provide a guiding effect, and be used as an electric contact.

(5) The slag removal unit can provide external force for one or more machining target areas to help remove the residue generated by the electrical discharge machining process.

(6) The clamping parts have a variety of clamping styles, which can effectively solve the problem that the traditional electric discharge machining technology cannot cut the overlapping area between the jig and the object to be processed.

In order to facilitate the understanding of the technical features, content and advantages of the present invention and the effects that can be achieved, the present invention is hereby combined with the drawings and described in detail as follows in the form of embodiments, and the purposes of the drawings used therein are only For the purpose of illustrating and assisting the description, it may not be the true proportion and precise configuration of the present invention after implementation, so the scale and configuration relationship of the attached drawings should not be interpreted to limit the scope of rights of the present invention in actual implementation. In addition, for ease of understanding, the same elements in the following embodiments are described with the same symbols.

In addition, the terms used in the entire specification and patent claims generally have the ordinary meanings of each term used in this field, in the disclosed content and in the special content, unless otherwise specified. Certain terms used to describe the present invention are discussed below or elsewhere in this specification to provide those skilled in the art with additional guidance in describing the present invention.

Regarding the use of "first", "second", "third", etc. in this article, it does not specifically refer to the order or order, nor is it used to limit the present invention, but it is only for the purpose of distinguishing components described with the same technical terms or operation only.

Secondly, if the words "comprising", "including", "having", "containing" etc. are used in this article, they are all open terms, meaning including but not limited to.

Figure 1 is a schematic front view of the electrical discharge machining device of the present invention, Figure 2 is a schematic top view of the partial structure of the electrical discharge machining device of the present invention, and Figure 3 is a schematic side view of the partial structure of the electrical discharge machining device of the present invention. Referring to FIG. 1 to FIG. 3 , an electrical discharge machining (EDM) device 10 of the present invention includes a stage 20 and an electrical discharge machining unit 30 . The carrier 20 is used to carry at least one object 100 to be processed. The object 100 to be processed can be any conductor or semiconductor structure, such as an ingot or a wafer, and its shape can be, for example, a cylindrical block or a sheet. However, the radial section of the object 100 to be processed is not limited to a circle, and it can be any shape, such as a circle with a planar area. Wherein, the object 100 to be processed can also be selectively connected to the carrier 20 through a planar area. The object to be processed 100 is defined with a plurality of processing target areas 110 , and these processing target areas 110 are distributed in parallel on any position suitable for processing in the object to be processed 100 . The distance D between these processing target areas 110 corresponds to (for example, the same as) the cutting thickness, thinning thickness or cutting distance of the object to be processed 100, and its value can be selectively adjusted according to the actual process requirements, so it can be equal to or different from each other. equal.

As shown in FIGS. 1 to 3 , the electrical discharge machining (EDM) unit 30 is used to perform an electrical discharge machining procedure on the machining target area 110 of the object to be processed 100 on the stage 20 along a processing direction F, for example, the object to be processed The machining target areas 110 of the 100 are sequentially or simultaneously subjected to cutting (Cutting) and/or grinding and polishing (Electric Discharge Grinding, EDG) and other electrical discharge machining procedures. The present invention is not limited to the stage 20 driving the workpiece 100 to move toward the electrode 32 of the EDM unit 30 or the EDM unit 30 driving the electrode 32 to move toward the object 100, as long as the EDM unit 30 is connected to the stage 20 If the object 100 to be processed can perform relative movement along the above-mentioned processing direction F, it can be applied to the present invention. In other words, the stage 20 of the present invention can be a fixed-position stage, or a movable or rotatable movable stage, wherein the present invention is illustrated by taking the stage 20 as a working platform with a supporting plate 21 . The object to be processed 100 of the present invention is not limited to be composed of a single workpiece, the object to be processed 100 of the present invention can also be composed of a plurality of workpieces to be processed, for example, wherein these workpieces can be selectively assembled with each other, such as by glue 26 connected together (as shown in Figure 4), wherein the glue can be conductive glue. In addition, the electrical discharge machining unit 30 of the present invention can also selectively perform electrical discharge machining procedures on one or more objects to be processed 100 sequentially or simultaneously (as shown in FIG. 5 ). Among them, Fig. 4 is a schematic top view showing a plurality of objects to be processed bonded to each other to perform an electrical discharge machining procedure, and Fig. 5 is a schematic side view showing an electrical discharge machining device of the present invention performing an electrical discharge machining procedure on a plurality of objects to be processed .

As shown in FIGS. 1 to 3 , the electrical discharge machining unit 30 includes a plurality of electrodes 32 , a power supply unit 34 and a jig 36 . The plurality of electrodes 32 are linear or plate-shaped conductive structures distributed in parallel along the first direction X, such as conductive wires or foils. The number of electrodes 32 is optional according to actual needs. The distance between these electrodes 32 corresponds to the cutting or thinning thickness of the object 100 to be processed. The transverse sections of these electrodes 32 can be any shapes that are the same or different from each other, such as linear or plate-shaped, or any symmetrical (circular or square as shown in FIG. 6 ) or asymmetrical shape. The power supply unit 34 is electrically connected to the electrode 32 and the object to be processed 100 respectively via an electrical contact 31 (electrical contact). Wherein, the power supply unit 34 can be a set of power outputs or a plurality of sets of power outputs for supplying the first power P1. The power supply unit 34 can also be electrically connected to the electrode 32 in series or in parallel, as long as the discharge energy can be applied to the processing target area 110 of the workpiece 100 through the electrode 32 , it can be applicable to the present invention. The material of the discharge electrode 32 can be selected from, for example, copper (Copper), brass (Brass), molybdenum (Molybdenum), tungsten (Tungsten), graphite (Graphite), steel (Steel), aluminum (Aluminum) and zinc (Zinc) composed of groups. The thickness of the discharge electrode 32 is about less than 300 μm, and the thickness range is preferably about 30 μm to about 300 μm.

Please refer to FIG. 1 to FIG. 3 , the jig 36 is composed of at least two bearing members 40 and at least two holding members 50 respectively correspondingly assembled. The two sides A of the electrode 32 are movable or fixed against the two carrying members 40 respectively, so that the discharge section B of the electrode 32 is suspended, and the two carrying members 40 are separated from each other by a certain distance. The dimensions of the two supporting members 40 and the heights of the electrodes 32 they carry are not particularly limited to be the same or different, as long as the discharge section B of the electrodes 32 can be suspended, it can be applied in the present invention. The holding member 50 is selectively detachable or fixed to assemble the bearing member 40 firmly, and the holding member 50 is arranged on the seat body 52, wherein the seat body 52 can be a structure that makes the position of the holding member 50 fixed, or this The seat body 52 is a motion mechanism capable of moving or rotating the holding member 50 to drive the bearing member 40 to move or rotate accordingly. Therefore, the discharge section B of the electrode 32 can reciprocate left and right. Take the seat body 52 as an example of a moving mechanism, the moving mechanism can be any moving mechanism capable of reciprocating left and right, such as a sliding mechanism, or any rotating mechanism capable of reciprocating rotation or circular rotation, such as a motor, To correspondingly drive the holding member 50 to move or rotate. Thereby, the carrying member 40 and the holding member 50 can selectively move reciprocatingly or circularly together with the electrode 32 , so that the electrode 32 applies discharge energy to the object 100 to be processed in the discharge section B. In order to allow the electrode 32 to have a better adhesion to the carrying member 40 , the edge of the carrying member 40 is selectively provided with a chamfer 47 , as shown in FIG. 2 and FIG. 12 .

In the electrical discharge machining procedure, the power supply unit 34 provides the first power supply P1 to the electrode 32 and the object to be processed 100, so as to apply discharge energy to the processing target area 110 of the object to be processed 100 through the discharge section B of the electrode 32, wherein the electrical discharge machining When the unit 30 carries out the electric discharge machining program on the machining target area 110 of the workpiece 100 along the processing direction (cutting/grinding and polishing direction) F, the discharge section B of the electrode 32 and the machining target area 110 of the workpiece 100 are along the The second direction Y is a relative movement, such as a reciprocating or circular relative movement. That is, one of the electrode 32 and the workpiece 100 may be fixed, while the other may be relatively movable. Alternatively, both the electrode 32 and the workpiece 100 are relatively moving. Wherein, the processing direction F may be, for example, perpendicular to the first direction X or the second direction Y, or inclined to the first direction X or the second direction Y. For example, taking the movement of the workpiece 100 relative to the electrode 32 as an example, the stage 20 of the present invention is, for example, a movable or rotatable movable stage, and is, for example, along the above-mentioned first direction X, the second It moves in two directions Y or the processing direction F or rotates with the first direction X, the second direction Y or the processing direction F as the axis.

In the present invention, as shown in FIGS. 1 to 3 , the electrodes 32 distributed in parallel along the first direction X can be, for example, movable around two bearing members 40 spaced apart from each other, so that the discharge area of the electrodes 32 Section B is in a suspended state, and can move reciprocatingly or circularly along the second direction Y along with the movement of the two bearing members 40 . Alternatively, the electrode 32 may, for example, be fixed across or around two carrying members 40 spaced apart from each other. The electrical discharge machining unit 10 optionally has a connection structure 35 , and the connection structure 35 extends along the first direction X to connect a plurality of electrodes 32 distributed along the first direction X in parallel. The connecting structure 35 can increase the structural stability of the discharge electrode 32 during the EDM process, so the connecting structure 35 can be made of non-conductive material, but if the connecting structure 35 is made of conductive material, the connecting structure 35 can be used as the electrical contact 31 . That is, the head and tail ends of the electrode 32 are respectively connected to the same one (as shown in FIG. 1 ) or different ones (as shown in FIG. 7 and FIG. 8 ) of the two carrying members 40, so that the discharge section B of the electrode 32 It is in a suspended state, and can reciprocate along the second direction Y along with the reciprocating movement of the two carrying members 40 . As shown in FIG. 7 , the electrode 32 is not limited to surround the two bearing members 40 , and the electrode 32 can also selectively span only the top sides of the two bearing members 40 .

As shown in Figure 9, in the electrical discharge machining procedure, the electrical discharge machining unit 30 applies discharge energy to the machining target area 110 of the workpiece 100 along the machining direction F through the electrical discharge section B of the electrode 32, so it can be processed along the direction F. The traveling direction F forms a plurality of processing grooves 120 on the processing target area 110 of the workpiece 100 , wherein the depth h of the processing grooves 120 will be deepened as the EDM process progresses until the entire EDM process is completed. Wherein, as shown in FIG. 9 , the processing groove 120 is selectively filled with a filling material 124, which can reduce the vibration of the object to be processed 100 and maintain the original cutting (as-cut)/thinning distance of the object to be processed 100, and also It is possible to prevent the slices of the workpiece 100 after cutting or grinding from colliding with each other. Wherein, the above-mentioned filling material 124 can be an insulating material such as air, deionized water, oil, glue, or other suitable insulating substances as a dielectric material.

As shown in Fig. 10, since in the electrical discharge machining procedure, the discharge section B of the electrode 32 advances along the machining direction F to apply discharge energy to the machining target area 110 of the workpiece 100, and the discharge section B of the electrode 32 B and the processing target area 110 of the object to be processed 100 are relatively moving along the second direction Y at the same time, so in order to avoid the shaking phenomenon of the electrode 32 during the discharge processing procedure, the discharge processing device 10 of the present invention is selective. There is a stabilizing member 22, wherein the stabilizing member 22 is, for example, arranged on the stage 20 or the jig 36, the position of the stabilizing member 22 is, for example, between the two sides A of the electrode 32, and the form of the stabilizing member 22 is not particularly limited. As long as it can reduce the shaking of the electrode 32, it can be applied to the present invention. For example, the contact surface 28 between the stabilizing member 22 and the electrode 32 can be flat, for example, by supporting the electrode 32 in a suspended state, the shaking phenomenon can be reduced, or the contact surface 28 between the stabilizing member 22 and the electrode 32 can be selected The guide groove can not only support the suspended electrode 32, but also stabilize the electrode 32 and provide a guiding effect when the electrode 32 reciprocates relative to the object 100 to be processed. In addition, the stabilizing member 22 can also be designed as a highly scalable structure, so that the height of the contact surface 28 between the stabilizing member 22 and the electrode 32 can be changed according to the depth of the groove 120 .

In the present invention, the shape of the bearing member 40 is not particularly limited, and it can be, for example, a plate structure (as shown in FIGS. 12 and 13 ) or a sleeve structure (as shown in FIGS. 1 to 10 ). The surface of the carrying member 40 has, for example, a plurality of limiting grooves 42, wherein the electrodes 32 are limited in the limiting grooves 42, and the electrodes 32 in different limiting grooves 42 can be electrically independent or connected in sequence. are electrically connected to each other. The limiting slots 42 are also distributed in parallel along the first direction X with the aforementioned distance D, so that the electrodes 32 are distributed in parallel along the first direction X. As shown in FIG. The width of the limiting groove 42 corresponds to the width of the electrode 32 , for example, the width of the limiting groove 42 is slightly larger than the width of the electrode 32 , so that the electrode 32 can be limited in the limiting groove 42 . Wherein, the two carrying members 40 may have limiting slots 42 , for example. If the electrode 32 and the carrying member 40 do not need to move relative to each other, for example, if the carrying member 40 does not need to rotate, then the present invention can also selectively fix the electrode 32 to the electrode 32 by the attachment member 46 (as shown in FIGS. 7 and 8 ). In the limit groove 42 , the attachment member 46 has, for example, a plurality of protrusions whose positions and sizes correspond to the limit groove 42 , or the attachment member 46 can also be glue. In addition, the attachment member 46 can also be selectively electrically connected to the first power supply P1 supplied by the power supply unit 34 or the second power supply P2 of another power supply unit 34', wherein the second power supply P2 can be, for example, a DC power supply or a radio frequency. That is, the attachment member 46 can be selectively used as the electrical contact 31 of FIG. 1 .

Please refer to Fig. 11, and please also refer to Fig. 1 to Fig. 10 at the same time, taking the sleeve structure in which the bearing member 40 is cylindrical as an example, the limiting groove 42 is, for example, along the first direction X (that is, the axis of the bearing member 40 direction), and go deep into the bearing member 40 along the third direction Z (ie, the radial direction of the bearing member 40 ) to have a depth H. Wherein, the depth H of the limiting groove 42 can be determined according to actual needs, and the depth H of the limiting groove 42 is not limited to be the same as each other, that is, the depth H of the limiting groove 42 parallel to the first direction X can also be mutually Are not the same. Wherein, the two sides A of the electrode 32 are in contact with each other to present a stacked state, and are located in the limiting groove 42 by surrounding the carrying member 40 . In addition, the number of electrodes 32 in different limiting grooves 42 is not limited to be the same, that is, the number of electrodes 32 in different limiting grooves 42 may also be different from each other. In other words, the electrodes 32 distributed in parallel along the first direction X can be distributed in parallel along the third direction Z in the same number, or the electrodes 32 distributed in parallel along the first direction X can be distributed in different numbers along the third direction Z. parallel distribution. The third direction Z is, for example, perpendicular to the first direction X, that is, the third direction Z is the radial direction of the bearing member 40 and is parallel to the radial direction of the object 100 to be processed. However, according to the actual process requirements, the electrical discharge machining procedure can be vertical cutting or grinding along the radial direction of the object 100 to be processed, or oblique cutting or grinding along the radial direction of the object 100 at an inclination angle. Therefore, when actually performing the electric discharge machining procedure, for example, the stage 20 or the jig 36 can be adjusted so as to adjust the third direction Z to be parallel to the machining direction F.

The holding member 50 is selectively detachable or fixed to assemble the carrying member 40 firmly, and the assembly form of the carrying member 40 and the holding member 50 is not particularly limited, as long as the carrying member can be assembled to the holding member 50, Alternatively, the carrying member 40 can be selectively moved or rotated through the movement or rotation of the holding member 50 , which is applicable to the present invention. The bearing member 40 is, for example, a cylindrical (as shown in FIG. 2 ) or other shaped sleeve with a shaft hole 41 , and the bearing member 40 can be sleeved on the protrusion 51 of the holding member 50 through the shaft hole 41 . In addition, in order to reduce the time required for replacing the electrode 32 when the electrode 32 breaks unexpectedly, the present invention can also, for example, first set the shaft hole 41 of the bearing member 40 on a dummy support member that also has a bump. In this way, the user can quickly take out the carrying member 40 surrounded by the electrodes 32 from the imitation supporting member, and fit the shaft hole 41 of the carrying member 40 on the protrusion 51 of the holding member 50, or place the holding member 50 The protrusion 51 is inserted into the shaft hole 41 of the bearing member 40, so the assembly of the jig can be quickly completed.

Taking the plate structure as an example (as shown in FIGS. 12 and 13 ), the carrying member 40 includes a first sheet 44a and a second sheet 44b respectively, and the electrodes 32 are clamped between the first sheet 44a and the second sheet. Between materials 44b. Taking Fig. 12 as an example, the electrode 32 is first wound on the first sheet 44a, and the second sheet 44b is then combined on the first sheet 44a, and the second sheet 44b is for example combined with the first sheet 44a. In the slot, the electrode 32 is clamped. The second sheet 44b can be used as a separation layer between the multilayer wound electrodes 32, and the distance between the multilayer electrodes 32 can be adjusted by changing the thickness of the second sheet 44b. The carrying member 40 optionally has, for example, a through groove 43 , and the carrying member 40 can be sleeved on the protrusion 53 of the holding member 50 by using the through groove 43 . The slot 43 is not limited to opening on one side or opening on both sides, as long as the bearing member 40 and the holding member 50 can be assembled together, any type of slot 43 or assembly method is applicable to the present invention. Or, as shown in Figure 14, the carrying member 40 can optionally be assembled with the holding member 50 by screwing, for example, the carrying member 40 has a through hole 45 respectively, and the protrusions 53 of the holding member 50 have a screw hole respectively, wherein The bearing member 40 is screwed to the screw hole of the holding member 50 by passing a bolt 59 through the through hole 45 . Or, as shown in FIG. 15 , the holding member 50 can also optionally have a groove structure 57, for example, respectively, and the bearing member 40 is inserted into the groove structure 57 of the holding member 50, so as to be assembled on the holding member 50 correspondingly. .

In addition, as shown in FIG. 16 , the holding member 50 may also have, for example, a conductive structure 54 that spans the plurality of electrodes 32 along the first direction X, so as to electrically connect the electrodes abutting on the carrying member 40 32. In this way, the first power supply P1 provided by the power supply unit 34 can be selectively electrically connected to the electrode 32 through the conductive structure 54 , that is, the conductive structure 54 can be selectively used as the electrical contact 31 in FIG. 1 . In addition, an insulating structure 56 may also be optionally provided between the electrodes 32 to prevent the electrodes 32 from being in electrical contact with each other. For example, as shown in FIG. 17 , the insulating structure 56 may be disposed between the electrode 32 and the conductive structure 54 . Wherein, the material of the insulating structure 56 is not particularly limited, as long as it can provide the above-mentioned insulating effect, it can be applied in the present invention.

In addition, the heights of the electrodes 32 in different limiting grooves 42 are not limited to be the same, and the heights of the electrodes 32 in different limiting grooves 42 may also be different from each other. Alternatively, the heights of the electrodes 32 on different carrying members 40 are not limited to be the same, and the heights of the electrodes 32 on different carrying members 40 may also be different from each other. That is, as shown in FIG. 11 , the electrodes 32 can not only be distributed in parallel along the first direction X, but can also be selectively distributed in parallel along the third direction Z at the same height or at different heights. Wherein, the electrodes 32 located in the same limiting groove 42 can be stacked on each other or arranged in parallel.

In addition, as shown in FIG. 11, since a plurality of electrodes 32 are distributed in parallel along the third direction Z (processing direction F), when these electrodes 32 distributed in parallel along the third direction Z are sequentially along the processing direction F When cutting or polishing the processing target area 110 of the object to be processed 100, the rear electrode 32 will repeatedly pass the position where the front electrode 32 has passed. In other words, taking the processing direction F as an example from top to bottom, even if the front electrode 32 (such as the bottom electrode) is disconnected, the rear electrode 32 (such as the top electrode) can still replace the front electrode 32 to apply discharge. The energy is given to the processing target area 110 of the object to be processed 100 shown in FIG. 1 . Therefore, the present invention can avoid adverse effects such as process interruption caused by electrode disconnection through the electrode replacement function.

The object to be processed 100 is placed on the platform 20 , and the platform 20 may optionally include a clamping member 24 for fixing the object to be processed 100 . Wherein, the stage 20 or the clamping part 24 on it can optionally be connected to the object 100 to be processed with glue, wherein the glue is, for example, conductive glue, and the glue can provide the effect of conduction and fixation. For example, taking the object 100 to be processed as a block (such as a crystal ingot) as an example, the clamping member 24 can be, for example, clamping the circumference of the cylinder of the crystal ingot, that is, radially clamping the two sides of the crystal ingot, such as As shown in FIG. 18 , to prevent rolling or displacement, and make the processing target area 110 of the object 100 to be located outside the clamping member 24 . Alternatively, the clamping member 24 can, for example, clamp the two ends of the crystal ingot, that is, axially clamp the two sides of the crystal ingot, as shown in FIG. The zone 110 is located between the two clips 24 . Wherein, the clamping member 24 can be, for example, two plates 23 arranged separately, and is used to clamp the object 100 to be processed by the two plates 23 .

As shown in FIG. 20 , the clamping member 24 can also be, for example, a single plate body 23 for supporting against one side of the object 100 to be processed. In addition, the present invention can also optionally use glue 26 to fix the two groove walls of the processing groove 120 of the processing target area 110 of the object to be processed 100, which can avoid the vibration of the object to be processed 100 during the EDM process. Phenomenon, but also to avoid the phenomenon of burrs before the end of the EDM program. Wherein, the object 100 to be processed is not limited to be fixed on one side of the clamping member 24 by the glue 26 at the two ends in the axial direction or the peripheral edge in the radial direction.

As shown in FIG. 21 , the clamping member 24 can also, for example, clamp a buffer member 27, and the buffer member 27 fixes the object 100 to be processed through an adhesive 26, and the electric discharge machining unit 30 is opposite to the carrier along the processing direction F. The object to be processed 100 above 20 is subjected to an electrical discharge machining procedure, and even the object to be processed 100 together with the buffer member 27 may be subjected to an electrical discharge machining procedure. The glue 26 is, for example, a conductive glue layer. Wherein, the object to be processed 100 is not limited to be fixed on the buffer member 27 via the glue 26 at both ends in the axial direction or at the peripheral edge in the radial direction.

As shown in FIG. 22 , the clamping member 24 can also fix the object 100 to be processed, for example, by clamping the conductive frame 25 , and the electrical discharge machining unit 30 performs electrical discharge machining on the object 100 to be processed on the carrier 20 along the processing direction F. For example, the electric discharge machining procedure can be performed on the object 100 to be processed together with the conductive frame 25 . Wherein, the object 100 to be processed is not limited to be fixed on one side of the clamping member 24 by the glue 26 at the two ends in the axial direction or the peripheral edge in the radial direction.

In addition, as shown in Figure 23, among the clamping parts 24 listed in the above-mentioned figures, the plate body of the clamping part 24 can also optionally be a comb-shaped plate, for example, at least one of the two plate bodies is a comb-shaped plate The position of the comb opening 29 of the comb plate corresponds to the position of the electrode 32 , that is, corresponds to the position of the processing target area 110 .

Wherein, as shown in FIG. 24 , the electric discharge machining unit 30 is optionally provided with an adjustable tension value, and for example, by making the two bearing members 40 or the two holding members 50 produce relative displacements (as shown in FIG. indicated by arrows), for example, moving toward each other or moving away from each other, thereby adjusting the tension value of the electrodes 32 . As shown in FIG. 24 , the EDM unit 30 further includes a tension measuring unit 60 , such as a tensiometer, for measuring the tension value of the electrode 32 . As shown in FIG. 24 , the electrical discharge machining device further includes a vibration measurement unit 62 for measuring the vibration value of the electrode 32 .

As shown in Figure 24, the electrical discharge machining device 30 also includes a slagging unit 64. When the electrical discharge machining device 30 performs the electrical discharge machining program on the workpiece 100, the slagging unit 64 provides one or more external forces to eliminate the application of the electrodes 32 to the workpiece 100. For the residue generated by the discharge energy, the direction of the external force applied by the slag discharge unit 64 corresponds to the discharge section B of the electrode 32 . Wherein, the slag discharge unit 64 may be, for example, an air flow generator, a water flow generator, an ultrasonic generator, a piezoelectric oscillator or a magnetic force generating element. The external force can be, for example, air flow, water flow, ultrasonic vibration, piezoelectric vibration, suction force or magnetic force. The slag discharge unit 64 is not limited to be disposed on the jig 36 and the carrier 20 , and can even be disposed around the discharge section B of the electrode 32 . Taking the slag discharge unit 64 as an ultrasonic generator or a piezoelectric oscillator as an example, the slag discharge unit 64 can be arranged on the jig 36 and the carrier 20, for example, and directly acts on the jig 36 and the carrier 20 by directly generating external force In addition, the external force generated by the slag removal unit 64 can also vibrate the jig 36 , the workpiece 100 or the electrode 32 , and at the same time, for example, vibrate, which can provide an effect of assisting the removal of slag.

In other feasible embodiments, the electrical discharge machining unit 30 of the present invention can, for example, rotate more than two bearing members 40 reciprocatingly or cyclically to drive the discharge sections B of the plurality of electrodes 32 to reciprocate or cyclically move. The connection configuration of the carrying member 40 and the electrodes 32 can be shown in FIG. 25 , and each electrode 32 surrounds four carrying members 40 respectively. These electrodes 32 share two carrying members 40 among the four carrying members 40, so the two sides A of these electrodes 32 are in contact with each other to present a stacked state and move together against the above-mentioned two sharing carrying members 40, as The rest of the carrying members 40 are arranged in pairs at different heights, so that the electrodes 32 are distributed parallel to each other at a distance. Thereby, when the carrying member 40 is reciprocatingly or cyclically rotating, the discharge section B of these electrodes 32 will also be displaced relative to the object 100 to be processed, and by the above-mentioned carrying member 40 arranged in pairs at different heights, are located at different heights, ie distributed parallel to each other at this interval. Wherein, the above-mentioned two shared carrying members 40 are, for example, synchronously performing reciprocating or cyclic rotation at the same rotation speed, so the reciprocating or cyclic movement speeds of the electrodes 32 along the second direction Y are also the same.

In other equally feasible embodiments, the electrical discharge machining unit 30 of the present invention can, for example, rotate the two bearing members 40 reciprocatingly or cyclically to drive the discharge sections B of the plurality of electrodes 32 to move reciprocally or cyclically. . For example, the setting configuration of the carrying member 40 and the electrodes 32 can be shown in FIG. The discharge sections B of the electrodes 32 are distributed parallel to each other at an interval by the separation columns 33, so that when the carrying member 40 is reciprocating or circularly rotated, the discharge sections B of the electrodes 32 will also be relatively to be processed. The objects 100 are displaced and separated by the partition column 33 to be distributed parallel to each other. Wherein, these electrodes 32 are movable against the separation column 33, and the position of the separation column 33 is fixed, but it can be fixed or rolling, and has a limit groove, so as to serve as a guide column. The separation column 33 can also be optionally made of conductive material, so that the electrode 32 can be electrically connected to the power supply unit 34 through the separation column 33 , that is, the separation column 33 can also be selectively used as the electrical contact 31 in FIG. 1 . Wherein, the two carrying members 40 are, for example, synchronously performing reciprocating or cyclic rotation at the same rotation speed, so the reciprocating or cyclic movement speeds of the electrodes 32 along the second direction Y are also the same.

In other equally feasible embodiments, as shown in FIG. 24 , the electrical discharge machining unit 30 of the present invention may also optionally include a laser unit 70, for example, to provide A heat source is given to the object 100 to be processed, whereby the object 100 to be processed can be partially (locally) heated or heated as a whole. That is, the heat source provided by the laser unit 70 can provide energy before and during the EDM process to increase the efficiency of the EDM process, and can also provide repairing, grinding and annealing effects after the EDM process.

To sum up, the electrical discharge machining device of the present invention has the following advantages:

(1) The multi-layer electrode can effectively solve the problem that a single electrode must be stopped for replacement if it breaks.

(2) The jig is composed of at least two load-carrying components and at least two holding components corresponding to each other. The quick-release design can greatly reduce the time required for electrode replacement, and can also adjust the tension of the discharge electrode.

(3) With electrodes distributed in parallel, multiple processing target areas can be cut or polished at the same time, effectively saving the overall processing time.

(4) The stabilizing member can reduce the shaking of the electrode, provide a guiding effect, and be used as an electric contact.

(5) The slag removal unit can provide external force for one or more machining target areas to help remove the residue generated by the electrical discharge machining process.

(6) The clamping parts have a variety of clamping styles, which can effectively solve the problem that the traditional electric discharge machining technology cannot cut the overlapping area between the jig and the object to be processed.

The above descriptions are illustrative only, not restrictive. Any equivalent modification or change made without departing from the spirit and scope of the present invention shall be included in the scope of the appended patent application.

10: Electrical discharge machining device 20: Carrier 21: Loading board 22: Stabilizing member 23: board body 24: clamping piece 25: Conductive frame 26: Viscose 27: buffer member 28: contact surface 29: Comb opening 30: EDM unit 31: Electric contact 32: electrode 33:Separation column 34: Power supply unit 34': another power supply unit 35: Connection structure 36: Fixture 40: Bearing member 41: shaft hole 42: limit slot 43: Grooving 44a: first sheet 44b: second sheet 45: Through hole 46: Attachment member 47: chamfer 50: Holding member 51: Bump 52: seat body 53: Bump 54: Conductive structure 56: Insulation structure 57: Trench structure 59: Bolt 60: Tension measuring unit 62: Vibration measurement unit 64:Slagging unit 70:Laser unit 100: to be processed 110: Processing target area 120: Processing grooves 124: filling material A: Both sides B: discharge section D: Spacing H: Depth h: depth X: first direction Y: the second direction Z: third direction F: Processing direction P1: the first power supply P2: second power supply

Fig. 1 is a schematic front view of the electrical discharge machining device of the present invention.

Fig. 2 is a schematic top view of a partial structure of the electrical discharge machining device of the present invention.

Fig. 3 is a schematic side view of a partial structure of the electric discharge machining device of the present invention.

Fig. 4 is a schematic top view of the object to be processed in the present invention consisting of a plurality of connected workpieces to be processed.

5 is a schematic side view of the electrical discharge machining unit of the present invention performing electrical discharge machining on a plurality of objects to be processed.

Fig. 6 is a schematic diagram of a circular or square cross-section of an electrode of the present invention.

Fig. 7 is a schematic side view showing that the head and tail ends of the electrode of the present invention are respectively connected to different carrying members.

Fig. 8 is a schematic top view of the head and tail ends of the electrode of the present invention respectively connected to different bearing members.

Fig. 9 is a schematic diagram of filling material in the processing trench of the present invention.

Fig. 10 is a schematic diagram of a stabilizing member of the electric discharge machining device of the present invention.

Fig. 11 is a schematic diagram of a plurality of electrodes disposed in the limiting groove of the bearing member of the present invention.

Fig. 12 is a schematic side view showing that the load-carrying member of the present invention is a plate-shaped structure.

Fig. 13 is a schematic side view of another plate-shaped structure of the load-carrying member of the present invention.

Fig. 14 is a schematic side view of a plurality of bearing members screwed to a holding member according to the present invention.

Fig. 15 is a schematic side view of the retaining member of the present invention assembled with the carrying member in a groove structure.

Fig. 16 is a schematic top view of a holding member having a conductive structure connecting electrodes of the present invention.

FIG. 17 is a schematic top view of an insulating structure disposed between the conductive structure and electrodes in FIG. 16 .

Fig. 18 is a schematic side view of the stage of the present invention, which clamps the object to be processed radially with the clamping member.

Fig. 19 is a schematic side view of the carrier of the present invention, which clamps the object to be processed axially with the clamping member.

Fig. 20 is a schematic side view of the carrier of the present invention, which fixes the object to be processed on one side with a clamping member.

Fig. 21 is a schematic side view of the clamping part of the present invention fixing the object to be processed through the buffer member.

Fig. 22 is a schematic side view of the clamping member of the present invention fixing the object to be processed through the conductive frame.

Fig. 23 is a schematic side view of the clamping part of the present invention being a comb-shaped plate.

Fig. 24 is a schematic side view of the electric discharge machining unit with adjustable tension value of the present invention.

Fig. 25 is a schematic diagram of the configuration of the jig according to the present invention with a plurality of supporting members so that the electrodes are distributed in parallel.

Fig. 26 is a schematic diagram of the arrangement of the jig of the present invention to separate the electrodes by the separation column.

10: Electrical discharge machining device

20: Carrier

21: Loading board

30: EDM unit

31: Electric contact

32: electrode

35: Connection structure

40: Bearing member

47: chamfer

50: Holding member

A: Both sides

B: discharge section

P1: the first power supply

Y: the second direction

Z: third direction

F: Processing direction

Claims (52)

An electrical discharge machining device, at least including: a carrier for carrying at least one object to be processed; and An electrical discharge machining unit is used to perform an electrical discharge machining procedure on a plurality of machining target areas of the object to be processed on the carrier along a machining direction, and the electrical discharge machining unit includes: a plurality of electrodes, the plurality of electrodes are distributed in parallel along a first direction; A jig, the jig is composed of at least two carrying members and at least two holding members respectively correspondingly assembled, the two sides of the plurality of electrodes are respectively abutted against the two carrying members, so that one of the plurality of electrodes is discharged the section is left floating; and A power supply unit, the power supply unit provides a first power supply to the plurality of electrodes and the object to be processed during the electrical discharge machining process, and is used to apply a discharge energy to the object to be processed through the discharge section of the plurality of electrodes The plurality of machining target areas of the object, wherein when the electrical discharge machining unit performs the electrical discharge machining procedure along the machining direction, the discharge section of the plurality of electrodes is aligned with the plurality of machining target areas of the object to be processed Relatively moving in a second direction. The electrical discharge machining device as claimed in claim 1, wherein the discharge sections of the plurality of electrodes and the plurality of machining target areas of the workpiece move relative to each other along the second direction in a reciprocating or circular manner. The electrical discharge machining device as described in Claim 2, wherein the two supporting members and the two holding members move reciprocatingly or circularly with the plurality of electrodes, so that the plurality of electrodes apply the discharge energy to the discharge section The object to be processed. The electrical discharge machining device according to claim 1, wherein the electrical discharge machining unit adjusts the tension values of the plurality of electrodes by making the two bearing members or the two holding members generate relative displacements. The electrical discharge machining device as claimed in Claim 2 further includes a stabilizing member for stabilizing the movement of the plurality of electrodes relative to the object to be processed. The electrical discharge machining device as claimed in claim 1, wherein the plurality of electrodes are distributed parallel to the first direction and a third direction at the same time, and the third direction is perpendicular to the first direction or the second direction. The electrical discharge machining device as claimed in claim 6, wherein the plurality of electrodes distributed in parallel along the first direction are distributed in parallel along the third direction in different numbers. The electrical discharge machining device as claimed in claim 1, wherein the plurality of electrodes are distributed in parallel along the first direction at different heights. The electrical discharge machining device according to claim 8, wherein the plurality of electrodes are in contact with each other. The electrical discharge machining device as claimed in claim 1, wherein the electrical discharge machining unit has a connection structure, and the connection structure extends along the first direction to connect the plurality of electrodes distributed in parallel along the first direction. The electrical discharge machining device according to claim 1, wherein the plurality of electrodes are in the shape of wires or plates. The electrical discharge machining device according to claim 1, wherein the transverse cross-sections of the plurality of electrodes are asymmetrical. The electrical discharge machining device according to claim 1, wherein the power supply unit is a set of power outputs or a plurality of sets of power outputs. The electrical discharge machining device as claimed in claim 1, wherein the power supply unit is electrically connected to the plurality of electrodes in series or in parallel. The electrical discharge machining device as claimed in claim 1, wherein the stage moves along the first direction, the second direction, or the machining travel direction. The electrical discharge machining device as claimed in claim 1, wherein the stage rotates around the first direction, the second direction or the machining direction as the axis. The electrical discharge machining device as described in claim 1, wherein the electrical discharge machining device further includes a slag discharge unit, and when the discharge machining unit performs the discharge machining procedure on the object to be processed, the slag discharge unit provides an external force to remove the plurality of A residue produced by applying the discharge energy to the object to be processed by each electrode. The electrical discharge machining device as described in claim 1, wherein the electrical discharge machining device further includes a slag discharge unit, and when the discharge machining unit performs the discharge machining procedure on the object to be processed, the slag discharge unit provides a plurality of external forces to respectively remove The residues produced by applying the discharge energy to the object to be processed by the plurality of electrodes. The electrical discharge machining device according to claim 17 or 18, wherein the slag discharge unit is an ultrasonic generator or a piezoelectric oscillator, which oscillates the jig, the object to be processed, or the plurality of electrodes. The discharge processing device as described in claim 1, wherein the discharge processing device further includes a tension measuring unit for measuring the tension values of the plurality of electrodes. The electrical discharge processing device as claimed in claim 1, wherein the electrical discharge processing device further includes a vibration measurement unit for measuring vibration values of the plurality of electrodes. The electrical discharge machining device as described in claim 1, wherein the power supply unit of the electrical discharge machining unit further includes providing a second power supply to the plurality of electrodes, so as to provide a DC power supply or a radio frequency to the plurality of electrodes. The electrical discharge machining device as claimed in claim 1, wherein the object to be processed has a planar area, and is connected to the stage through the planar area. The electrical discharge machining device according to claim 1, wherein the stage further includes a clamping member for fixing the object to be processed. The electrical discharge machining device according to claim 24, wherein the stage or the clamping member is connected to the object to be processed by an adhesive. The electrical discharge machining device as claimed in claim 25, wherein the glue is conductive glue. The electrical discharge machining device according to claim 24, wherein the electrical discharge machining unit performs the electrical discharge machining procedure on the object to be processed and the holder on the stage along the machining direction. The electrical discharge machining device according to claim 24, wherein the clamping member clamps a buffer member, and the buffer member fixes the object to be processed through a conductive adhesive layer, and the electrical discharge machining unit is along the processing direction The electrical discharge machining procedure is performed on the object to be processed on the carrier. The electrical discharge machining device as described in claim 24, wherein the clamping member fixes the object to be processed by clamping a conductive frame, and the electrical discharge machining unit is to the workpiece to be processed on the stage along the processing direction The object is subjected to the electric discharge machining procedure. The electric discharge machining device according to any one of claims 24 to 29, wherein the clamping member includes two plates, at least one of which is a comb-shaped plate. The electrical discharge machining device as described in claim 24, wherein the clamping member is axially supported against one side of the object to be processed, and a machining groove formed by the discharge energy in the machining target area of the object to be processed is The two groove walls of the processed groove are fixed by an adhesive. The electrical discharge machining device according to claim 1, wherein the discharge energy forms a machining groove in the machining target area of the object to be machined, and a filling material is filled in the machining groove. The electrical discharge machining device as claimed in claim 1, wherein the two supporting members are plate-shaped structures or sleeve structures respectively. The electric discharge machining device according to claim 1, wherein the two supporting members respectively comprise a first sheet and a second sheet, and the plurality of electrodes are clamped between the first sheet and the second sheet between. The electrical discharge machining device as described in Claim 1, wherein the two carrying members respectively have a through groove, and the two holding members respectively have a protrusion corresponding to the through groove, and the two carrying members are assembled correspondingly through the through groove The protrusions of the two holding members. The electrical discharge machining device as described in claim 1, wherein the two bearing members respectively have a through hole, and the two holding members respectively have a screw hole, wherein the two bearing members are screwed together by passing a bolt through the through hole. The screw holes of the two holding components. The electrical discharge machining device as described in claim 1, wherein the two holding members have a groove structure respectively, and the two bearing members are inserted into the groove structures of the two holding members, so as to be correspondingly assembled to the two holding members superior. The electrical discharge machining device as claimed in claim 1, wherein the two holding members respectively have a conductive structure, so as to electrically connect the plurality of electrodes abutting against the two supporting members. The electrical discharge machining device as claimed in claim 1, 37 or 38, wherein the two holding members simultaneously fix the two carrying members and the plurality of electrodes. The electrical discharge machining device as claimed in claim 38, wherein an insulating structure is provided between the plurality of electrodes to prevent the plurality of electrodes from being in electrical contact with each other. The electrical discharge machining device according to claim 1, wherein the two supporting members have a plurality of limiting grooves for limiting the plurality of electrodes. The electrical discharge machining device as claimed in claim 41, wherein the plurality of electrodes are fixed in the plurality of limiting grooves with glue. The electrical discharge machining device as claimed in claim 1 or 41, wherein the electrical discharge machining unit further includes an attachment member connected to the plurality of electrodes at the edges of the two carrying members. The electrical discharge machining device as claimed in claim 43, wherein the attachment member is electrically connected to the first power source or a second power source of the power supply unit. The electrical discharge machining device as described in Claim 1, wherein the head and tail ends of the plurality of electrodes are respectively connected to the same or different ones of the two carrying members. The electrical discharge machining device as claimed in claim 1, wherein the edges of the two bearing members have chamfered corners. The electrical discharge machining device as claimed in claim 1, wherein the plurality of electrodes are equidistantly distributed in parallel along the first direction. The electrical discharge machining device as claimed in claim 1, wherein the plurality of electrodes are connected to each other through a conductive structure, so as to electrically connect the power supply unit. The electrical discharge machining device according to claim 1, wherein the object to be processed carried by the stage is a semiconductor crystal ingot or wafer. The electrical discharge machining device as described in Claim 1, wherein the electrical discharge machining device cuts or polishes the object to be processed carried by the stage sequentially or simultaneously during the electrical discharge machining procedure. The electrical discharge machining device as described in Claim 1 further includes a laser unit for providing a heat source to the object to be processed before, during or after the electrical discharge machining procedure. The electrical discharge machining device as described in claim 1, wherein the object to be processed is formed by electrically bonding a plurality of workpieces.

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