CN218253274U

CN218253274U - Electric discharge machining apparatus

Info

Publication number: CN218253274U
Application number: CN202221124258.9U
Authority: CN
Inventors: 寇崇善; 叶文勇
Original assignee: Highlight Technology Corp
Current assignee: Highlight Technology Corp
Priority date: 2021-05-14
Filing date: 2022-05-11
Publication date: 2023-01-10
Anticipated expiration: 2032-05-11

Abstract

The utility model discloses an electric discharge machining device contains a microscope carrier and an Electric Discharge Machining (EDM) unit. The carrier is provided with a fixture, which includes a carrier for carrying an object to be processed, and the object to be processed defines a processing target area. Wherein, the Electrical Discharge Machining (EDM) unit applies an electrical discharge energy to a machining target region of the object to be machined through an electrical discharge electrode in a non-uniform electric field distribution so as to make the electric field concentrated in the advancing direction. In addition, the bearing plate is provided with an adhesive layer which can adhere and fix the object to be processed, so that the object to be processed can be prevented from shaking in the process of the electric discharge processing procedure, the phenomenon of burrs generated before the electric discharge processing procedure is finished can be avoided, and a processing target area is positioned above the bearing plate, for example, so that the jig can be prevented from interfering the object to be processed to carry out the electric discharge processing procedure.

Description

Electric discharge machining apparatus

Technical Field

The present invention relates to a machining device, and more particularly, to an electric discharge machining device.

Background

With the explosive growth of the semiconductor industry, electrical discharge machining techniques have been commonly used to process ingots or wafers. Electrical Discharge Machining (EDM) is a manufacturing process for forming a workpiece into a desired shape by generating sparks through Electrical Discharge. The dielectric material separates the two electrodes and applies a voltage to generate a periodic and rapidly-changing current discharge for processing the object to be processed. The electric discharge machining technique uses two electrodes, one of which is called a tool electrode or a discharge electrode, and the other electrode is called a workpiece electrode, and is connected with the object to be machined. During the electric discharge machining, there is no actual contact between the discharge electrode and the workpiece electrode.

When the potential difference between the two electrodes increases, the electric field between the two electrodes also increases until the electric field strength exceeds the dielectric strength, at which time dielectric breakdown occurs, current flows through the two electrodes, and a portion of the material is removed. When the current is stopped, new dielectric material flows into the electric field between the electrodes, removing some of the material and re-providing dielectric insulation. After the current flows, the potential difference between the two electrodes will return to the value before the dielectric breakdown, so that a new dielectric breakdown can be repeated.

However, the electrical discharge machining technique has disadvantages in that the roughness of the cut surface is not good, and the cut surface has considerable surface cracks, which may even extend in a non-cutting direction, resulting in a cracking effect in an unintended direction. Furthermore, the conventional electrical discharge machining techniques use jigs to hold the periphery of the ingot, i.e., to radially hold the sides of the ingot, to prevent rolling or shifting, when cutting the ingot, for example. However, since the cutting surface of the ingot is also located in the radial direction, the conventional technique can only cut the ingot exposed outside the jig, and cannot cut the region where the jig overlaps the ingot, so that the conventional technique needs to be stopped and readjusted in position before cutting again. However, no matter how the position is adjusted, there is always a mutual overlap of partial areas between the jig and the ingot, and the electric discharge machining cannot be performed.

SUMMERY OF THE UTILITY MODEL

In view of the above, one or more objects of the present invention are to provide an electrical discharge machining apparatus to solve the above-mentioned problems of the prior art.

To achieve the above object, the present invention provides an electrical discharge machining apparatus, comprising a carrier, wherein the carrier is provided with a fixture, the fixture comprises a bearing plate for bearing at least one object to be machined, wherein the object to be machined is defined with a machining target area; and an Electrical Discharge Machining (EDM) unit for applying an electrical discharge energy to the machining target region of the object to be machined through at least one electrical discharge electrode in a non-uniform electrical field distribution to machine the object to be machined along the machining target region.

Wherein, the two sides of the discharge electrode are covered with an electrically shielding structure to make the discharge energy form the non-uniform electric field distribution.

The discharge electrode has a concave region to make the discharge energy form the non-uniform electric field distribution.

Wherein the cross-sectional shape of the discharge electrode is T-shaped, l-shaped or elliptical, so as to form the non-uniform electric field distribution by the discharge energy.

Wherein the cross-sectional shape of the discharge electrode is circular, so that the discharge energy forms the non-uniform electric field distribution.

Wherein the discharge electrode is linear or plate-shaped.

Wherein the electrically shielding structure is a supporting structure.

Wherein the discharge electrode or the support structure has a guide protrusion corresponding to a guide groove of a pulley of the Electrical Discharge Machining (EDM) unit, so as to guide the guide protrusion by the guide groove.

Wherein the discharge electrode is a magnetic component, and when the discharge electrode machines the object to be machined along the machining target area, the Electrical Discharge Machining (EDM) unit acts on the magnetic component in a non-contact way by a magnetic attraction force so as to fix an orientation of the discharge electrode.

Wherein the discharge electrode comprises a first conductive line and a second conductive line, the thickness and/or applied voltage of the first conductive line is different from that of the second conductive line.

Wherein, it further comprises a microwave or radio frequency source for supplying a microwave or radio frequency energy to the processing target area of the object to be processed through the discharge electrode of the Electrical Discharge Machining (EDM) unit.

To achieve the above object, the present invention provides an electric discharge machining apparatus, comprising: a carrying platform, which is provided with a fixture, the fixture comprises a carrying plate for carrying at least one object to be processed, wherein the object to be processed is defined with a processing target area, and the position of the processing target area of the object to be processed is located above the carrying plate; and an Electrical Discharge Machining (EDM) unit for applying an electrical discharge energy to the machining target region of the object to be machined via at least one electrical discharge electrode to machine the object to be machined along the machining target region.

Wherein, the fixture further has two side plates disposed at two ends of the carrier plate, and the two side plates are respectively disposed at two sides of the object to be processed.

Wherein the jig has an adhesive layer disposed on the carrier plate, and the periphery of the object to be processed is partially adhered to the adhesive layer of the jig.

Wherein the adhesive layer is a conductive adhesive layer.

Wherein, the viscose layer is discontinuously arranged on the bearing plate.

Wherein the adhesive layer extends upward from the carrier plate to at least one side of the object to be processed.

Wherein the adhesive layer is penetrated into the object to be processed.

Wherein the fixture has a conductive plate disposed on the carrier plate, and the adhesive layer is disposed on the conductive plate.

Wherein the conductive plate is a conductive metal structure with a work function below 4.5 eV.

Wherein the discharge electrode applies the discharge energy to the processing target region of the object to be processed with a non-uniform electric field distribution.

Wherein the carrier adjusts the inclination of the fixture relative to the discharge electrode or the Electrical Discharge Machining (EDM) unit adjusts the inclination of the discharge electrode relative to the object to be machined, so as to adjust the included angle of the machining target area of the object to be machined relative to the carrier plate of the fixture.

The object to be processed and/or the jig further have a conductive gain layer for improving the electrical contact between the object to be processed and the jig.

Wherein, the fixture further comprises a heat source for heating the object to be processed on the carrier plate to improve the electrical contact between the object to be processed and the fixture.

Wherein the discharge electrode cuts the processing target area of the object to be processed in a fluid.

Wherein the discharge electrode cuts the processing target area of the object to be processed in a vacuum environment.

Wherein the number of the discharge electrodes is one or plural.

Wherein the number of the objects to be processed is one or plural.

To sum up, the utility model discloses an electrical discharge machining device has following advantage:

(1) By the non-uniform electric field distribution design, the electric field can be concentrated in the advancing direction.

(2) By the non-uniform electric field distribution design, the electric field distribution in the non-moving direction can be reduced, so that the surface roughness and surface cracks of the object to be processed in the non-moving direction can be reduced.

(3) The jig is provided with the adhesive layer, so that the shaking phenomenon of the object to be processed in the process of the electric discharge machining procedure can be avoided, and the phenomenon of burrs generated before the electric discharge machining procedure is finished can also be avoided.

(4) The jig is provided with the adhesive layer, so that the jig can be prevented from interfering the object to be processed with the electric discharge processing procedure, and the electric discharge processing procedure can be more flexible.

(5) Since the discharge electrode has a plurality of conductive wires, the cutting step and the polishing step can be performed simultaneously, so that the whole processing procedure can be accelerated, and a surface with low roughness can be obtained.

(6) By means of the conductive gain layer of the object to be processed and/or the jig, the electrical contact between the object to be processed and the jig can be improved, and the efficiency of the electric discharge machining program can be improved.

In order to make the jun have a better understanding and appreciation of the technical features and technical effects of the invention, the preferred embodiments and the accompanying detailed description are considered in the following.

Drawings

FIG. 1 is a schematic view showing the structure of an electric discharge machining apparatus according to the present invention, which is obtained from the front of a jig.

FIG. 2 is a partial schematic view of the structure of the electric discharge machining apparatus according to the present invention, which is obtained from the side of the jig.

Fig. 3 is a schematic view of the electric discharge machining apparatus according to the present invention performing a partial amplification of an electric discharge machining process, wherein the discharge electrode is a single conductive wire.

FIG. 4 is a schematic view showing the structure of the electric discharge machining apparatus of the present invention, and the electric discharge machining process is performed in a heated liquid tank.

Fig. 5 is a schematic view of the electric discharge machining apparatus according to the present invention, in which the discharge electrodes are a plurality of conductive wires, partially enlarging the electric discharge machining process.

Fig. 6a to 6g are schematic diagrams of a discharge electrode capable of generating non-uniform electric field distribution in a discharge machining apparatus according to the present invention and an electrical shielding structure thereof.

Fig. 7a to 7b are schematic views of a discharge electrode and an electrical shielding structure thereof having a guide protrusion corresponding to a guide groove of a pulley according to the present invention.

Fig. 8a to 8c are exploded views of the workpiece, jig and stage of the electric discharge machine of the present invention.

FIG. 9 is a schematic view of the adhesive layer of the jig of the electric discharge machining apparatus of the present invention extending to the side of the object to be machined.

FIG. 10 is a schematic view illustrating the adhesive layer of the jig of the electric discharge machining apparatus of the present invention permeating into the workpiece to be machined.

FIG. 11 is a schematic view of the electric discharge machining apparatus according to the present invention, in which the positioning unit fixes the orientation of the discharge electrode during the electric discharge machining process.

Fig. 12a to 12b are schematic diagrams illustrating an off-axis electrical discharge machining process performed by the electrical discharge machining apparatus of the present invention.

Fig. 13 is a schematic diagram of a conductive gain layer according to the present invention.

Fig. 14 is a schematic diagram of the conductive gain layer of the present invention.

Fig. 15a is a schematic view of the present invention using a single discharge electrode to cut a plurality of objects to be processed, fig. 15b is a schematic view of the present invention using a plurality of discharge electrodes to cut a single object to be processed, and fig. 15c is a schematic view of the present invention using a plurality of discharge electrodes to cut a plurality of objects to be processed, wherein the view angle of fig. 15a is different from that of fig. 15b and 15c.

Description of reference numerals:

10: electric discharge machining apparatus

20: carrying platform

22: jig tool

24: bearing plate

26: side plate

50: electrical Discharge Machining (EDM) unit

52: discharge electrode

52a: depressed region

52b: electrical shielding structure

53a, 53b: guide projection

54: electric power source

59a: liquid heating tank

59b: liquid for heating

55a: first conductive line

55b: second conductive line

56a: wire feeding winder

56b: take-up winder

57a, 57b: pulley wheel

58a, 58b: guide groove

60: microwave or radio frequency source

62: positioning unit

70: viscose glue layer

72: conductive plate

100: object to be processed

100a: cut surface

100b: cut surface

100c: cut surface

110: machining target area

80. 82, 84, 86: conductive gain layer

90: heat source

Detailed Description

In order to facilitate understanding of the technical features, contents, advantages and effects achieved by the present invention, the present invention will be described in detail with reference to the accompanying drawings and the embodiments, wherein the drawings are used only for illustration and supplementary description, and not necessarily for actual proportion and precise configuration after the implementation of the present invention, so the scope of the present invention in actual implementation should not be read and limited with reference to the proportion and configuration of the drawings. Moreover, to facilitate understanding, like components in the following embodiments are illustrated with like reference numerals.

Furthermore, the words used throughout the specification and claims have the ordinary meaning as is usually accorded to each word described herein, including any words which have been commonly referred to in the art, in the context of this disclosure, and in any other specific context. Certain terms used to describe the invention are discussed below or elsewhere in this specification to provide additional guidance to those skilled in the art in describing the invention.

The terms "first," "second," "third," and the like, as used herein, are not intended to be limited to the specific order or sequence presented, nor are they intended to limit the invention in any way, except as to distinguish one element from another element or operation described in such technical terms.

Furthermore, as used herein, the terms "comprising," "including," "having," "containing," and the like are open-ended terms that mean including, but not limited to.

Referring to fig. 1 and 2, fig. 1 is a schematic view showing the structure of an electric discharge machining apparatus according to the present invention, which is obtained from the front of a jig. FIG. 2 is a partial schematic view of the structure of the electric discharge machining apparatus according to the present invention, which is obtained from the side of the jig. The electrical Discharge machining device 10 of the present invention includes a stage 20 and an Electrical Discharge Machining (EDM) unit 50 for performing an electrical Discharge machining process on a workpiece 100, such as Cutting and/or polishing (EDG) the workpiece 100. The carrier 20 is provided with a fixture 22, and the carrier 20 can be a movable carrier or a fixed carrier. The fixture 22 at least comprises a carrier 24 for placing the object 100 to be processed, wherein the object 100 to be processed defines a processing target area 110, and the processing target area 110 can be located at any suitable position in the object 100 to be processed. The workpiece 100 may be any conductive or semiconductor structure, such as a wafer or ingot, although the cross-section of the workpiece 100 is not limited to circular and may be any shape.

The Electrical Discharge Machining (EDM) unit 50 has a discharge electrode 52, and the discharge electrode 52 is, for example, a linear conductive wire, a plate-like conductive plate, or a conductive structure of other shapes. Taking an example of an ingot in which the object to be processed 100 is cylindrical, the processing target region 110 is defined, for example, in the radial direction of the ingot, as shown by the dotted line in fig. 2. However, the position of the processing target area 110 is only an example and is not intended to limit the present invention. As shown in fig. 3, a gap exists between the surface of the discharge electrode 52 and the surface of the workpiece 100 to be processed in the traveling direction (cut surface 100 a) and the surfaces in the non-traveling direction (cut

surfaces

100b, 100 c), wherein the gap is filled with an insulating material such as air, deionized water or oil or other suitable insulating material as a dielectric material. For example, if the electrical discharge machining step is performed in deionized water, the deionized water is filled into the gap. Similarly, if the electrical discharge machining step is performed in an atmosphere, air is filled into the gap. Further, as shown in fig. 4, when the electric discharge machining step is performed in the heating liquid tank 59a, the heating liquid 59b is filled in the gap, and the heating liquid 59b in the heating liquid tank 59a, for example, hot oil, can reduce thermal shock or increase thermal uniformity. In addition, at the in-process of electrical discharge machining procedure, the utility model discloses borrow and can make waiting to process thing 100 to reduce and produce the shake by fluid pressure, reduce the roughness of cutting

plane

100b, 100c, help promoting the electrical discharge machining quality. As described above, the present invention is exemplified by cutting a workpiece 100 (i.e., a single solid structure) with a single discharge electrode 52 (a single conductive structure), as shown in fig. 2, but the present invention is not limited thereto. The discharge electrode 52 of the present invention can also perform the discharge process on a plurality of objects 100 to be processed (i.e. a plurality of solid structures) at the same time, as shown in fig. 15a, that is, the discharge electrode 52 can cut a plurality of objects 100 to be processed at the same time. Similarly, the present invention can also perform a cutting process on one workpiece 100 (as shown in fig. 15 b) or a plurality of workpieces (as shown in fig. 15 c) by a plurality of separated discharge electrodes 52 (a plurality of conductive structures). Moreover, the electric discharge machining process of the present invention is not limited to the above-mentioned liquid or gaseous fluid, and the electric discharge machining process of the present invention can be performed in a vacuum environment. In other words, the electrical discharge machining process of the present invention can not only perform wet cutting of the workpiece 100 by the discharge electrode 52 (i.e., in the liquid tank or the heating liquid tank 59 a), but also perform dry cutting of the workpiece 100 by the discharge electrode 52 (i.e., in the air or in the vacuum environment). In the process of dry-cutting the workpiece 100 by the discharge electrode 52, the discharge electrode 52 may be selectively cooled, for example, the discharge electrode 52 may be cooled or kept at a temperature by using a cooling fluid such as liquid or gas, or the discharge electrode 52 may be heated by discharging energy, i.e., the cooling fluid such as liquid or gas is not used.

As shown in fig. 1 to fig. 3, the Electrical Discharge Machining (EDM) unit 50 of the present invention further includes an electrical power source 54, wherein the electrical power source 54 is connected to the discharge electrode 52 through an electrical circuit, so as to generate a voltage difference between the discharge electrode 52 and the workpiece 100, and when the voltage difference is greater than the insulation strength provided by the gap, the electrical discharge energy is generated and provided to the machining target area 110 of the workpiece 100, so as to machine the workpiece 100 along the machining target area 110. In addition, taking a linear conductive wire as an example, the discharge electrode 52 of the present invention can be a single conductive wire (as shown in fig. 3) or a plurality of conductive wires. Taking two conductive lines as an example, as shown in fig. 5, the thickness (diameter) and/or applied voltage of the first conductive line 55a may be the same or different from the second conductive line 55b. For example, the thickness of the second conductive line 55b is substantially greater than that of the first conductive line 55a, so that the first conductive line 55a can be used to cut the cutting surface 100a of the object 100 to be processed in the traveling direction (front side), and the second conductive line 55b can be used to polish the cutting surfaces 100b and 100c of the object 100 to be processed in the non-traveling direction. The thickness of the first conductive line 55a and the second conductive line 55b and/or the applied voltage may depend on the required roughness of the cut surface, and are not illustrated. The present invention may optionally further comprise a microwave or rf source 60 for providing microwave energy or rf energy to the processing target region 110 of the object 100 to be processed, for example, via the first conductive line 55a and/or the second conductive line 55b, thereby providing heating, annealing or polishing effects, effectively reducing surface roughness and avoiding the need for subsequent mechanical or chemical polishing steps. Similarly, if the discharge electrode 52 of the present invention is only a single conductive wire, the microwave or rf source 60 of the present invention can also supply microwave energy or rf energy to the processing target area 110 of the object 100 to be processed through the single conductive wire. Taking microwave or rf source 60 as an example of microwave, the microwave of the present invention has a wavelength ranging from about 1mm to about 1m, a frequency ranging from about 300GHz to about 0.3GHz, and a power ranging from about 200 w to about 5,000 w, for example. The material of the discharge electrode 52 may be selected from the group consisting of Copper (Copper), brass (Brass), molybdenum (Molybdenum), tungsten (Tungsten), graphite (Graphite), steel (Steel), aluminum (Aluminum), and Zinc (Zinc), for example. The thickness of the discharge electrode 52 is less than about 300 μm, preferably in the range of about 30 μm to about 300 μm.

In one embodiment, the discharge energy provided by the discharge electrode 52 of the present invention preferably has a non-uniform electric field distribution, and the electric field of the discharge energy provided by the discharge electrode 52 is preferably concentrated in the traveling direction of the discharge electrode 52. That is, the electric field distribution in the traveling direction (cutting direction) of the discharge electrode 52 is large, and the electric field distribution in the lateral direction perpendicular to the traveling direction thereof is small. In other words, the discharge energy provided by the discharge electrode 52 is preferably applied to the object 100 to be machined in the advancing direction (front side) in a concentrated manner, and the application of the discharge energy to the object 100 to be machined in the non-advancing direction (both sides) is reduced, so that the surface roughness of the cut surfaces 100b, 100c of the object 100 to be machined in the non-advancing direction, for example, the values of Ra and Rz, and the surface cracks of the cut surfaces 100b, 100c can be reduced.

In order to provide the discharge energy with non-uniform electric field distribution via the discharge electrode 52, as shown in fig. 6a to 6g, the periphery (e.g. left and right sides or one side) of the discharge electrode 52 of the present invention may have a recessed region 52a or the periphery (e.g. left and right sides or one side) of the discharge electrode 52 may have an electrical shielding structure 52b, which is made of an insulating material or other suitable material, for example. Wherein, the recessed region 52a and the electrically shielding structure 52b can reduce the electric field expansion of the discharge electrode 52, so as to reduce the surface roughness of the cutting surfaces 100b, 100c of the object 100 to be processed. For example, the cross-sectional shape of the discharge electrode 52 may be a T-shape (as shown in FIG. 6 a), a l-shape or other shapes with a recessed area 52 a. Alternatively, the periphery (e.g., left and right sides or one side) of the discharge electrode 52 is covered with the electrically shielding structure 52b, the cross-sectional shape of the discharge electrode 52 may be T-shaped (as shown in fig. 6 b), l-shaped (as shown in fig. 6e, 6f, 6 g), circular (as shown in fig. 6 c), elliptical (as shown in fig. 6 d) or other shapes, and preferably only the front side (traveling direction) of the discharge electrode 52 is exposed, so that the electric field of the discharge energy provided by the discharge electrode 52 is concentrated in the traveling direction of the discharge electrode 52. In the electrical discharge machining process, the recessed region 52a can function to fix the discharge electrode 52, so as to reduce the shaking or rotation of the discharge electrode 52 during the cutting process, and provide the effect of draining water from the leak hole.

In addition, as shown in fig. 1 and 4, the Electrical Discharge Machining (EDM) unit 50 of the present invention may further optionally include a wire feeding winder 56a and a wire receiving winder 56b, wherein two ends of the discharge electrode 52 are respectively connected to the wire feeding winder 56a and the wire receiving winder 56b, and the wire feeding winder 56a and the wire receiving winder 56b can respectively sleeve the discharge electrode 52 by using

pulleys

57a and 57b to position the discharge electrode 52 and, for example, adjust the tension of the discharge electrode 52. Therefore, the discharge electrode 52 of the Electrical Discharge Machining (EDM) unit 50 of the present invention may further optionally have a guiding protrusion 53a (as shown in fig. 6 g) corresponding to the guiding

grooves

58a, 58b of the

pulleys

57a, 57b (as shown in fig. 7 a), and/or the electrically shielding structure 52b may not only cover the periphery of the discharge electrode 52, but also optionally have a guiding protrusion 53b (as shown in fig. 6 d) corresponding to the guiding

grooves

58a, 58b of the

pulleys

57a, 57b (as shown in fig. 7 b), thereby serving as a supporting structure at the same time.

In addition, referring to fig. 1 to 12b, in order to avoid the object 100 to be processed from shaking (swaying) during the electrical discharge process of the discharge electrode 52 or from generating burrs before the electrical discharge process is completed, the jig 22 of the present invention is further selectively provided with an adhesive layer 70 disposed on the carrier plate 24. The peripheral edge of the object 100 is partially adhered to the adhesive layer 70, so that the object 100 is firmly adhered to the carrier plate 24 of the fixture 20. The adhesive layer 70 is not limited to be disposed continuously (as shown in fig. 8 b) or disposed discontinuously (as shown in fig. 8 c) on the carrier. For example, the adhesive layer 70 is disposed on the carrier 24 of the fixture 22 at intervals, and the position of the adhesive layer 70 corresponds to the processing target area 110, i.e. the position of the adhesive layer 70 is located below the processing target area 110. The position of the adhesive layer 70 is not limited to be located right under the processing target area 110, and the present invention can be applied as long as the object 100 to be processed can be adhered.

The fixture 22 may further optionally have a conductive plate 72 disposed on the carrier plate 24, and the adhesive layer 70 is disposed on the conductive plate 72, thereby serving as a buffer layer to prevent the fixture 22 from being damaged during the electrical discharge machining process. The conductive plate 72 is, for example, but not limited to, a material layer having a work function of about 4.5eV or less, such as zinc, titanium, aluminum, or other suitable conductive metal structure. The adhesive layer 70 also provides the functions of conducting, fixing and protecting the conductive plate 72, and has the advantage of easy removal. Besides, in addition to the above-mentioned adhesive layer 70 disposed on the carrier plate 24 of the fixture 22, the fixture 22 of the present invention can further optionally include two side plates 26 disposed at two ends of the carrier plate 24 (as shown in fig. 8 a), wherein the two side plates 26 are respectively disposed at two sides of the object 100 to be processed, and preferably hold two sides of the object 100 to be processed, such as an axially held ingot, so as to prevent the object 100 to be processed from sliding or toppling over when the processing angle is tilted, and further enable the side plates 26 to stagger the traveling path of the discharge electrode 52, thereby hindering the performing of the discharge processing procedure. In addition, the adhesive layer 70 can be omitted, that is, the object 100 to be processed can be directly placed on the conductive plate 72 of the fixture 22, and if the adhesive layer 70 is omitted, the two side plates 26 of the fixture 22 can be selectively and directly fixed on the two sides of the object 100 to be processed, so as to prevent the object 100 to be processed from sliding or toppling over. Wherein, the viscose layer 70 can be a non-conductive adhesive layer or a conductive adhesive layer, as long as can stick the object 100 to be processed on the bearing plate 24 of the jig 20 or on the conductive plate 72, can be applicable to the utility model discloses, and the viscose layer 70 and the sticking area of the object 100 to be processed are not limited, as long as can make the object 100 to be processed electrical conduction its below bearing plate 24 or conductive plate 72 in order to constitute the electrical loop, can be applicable to the utility model discloses.

As shown in fig. 9, the adhesive layer 70 is not limited to only adhere to the bottom of the workpiece 100, but the adhesive layer 70 can also selectively extend from the carrier plate 24 (i.e. the bottom of the workpiece 100) to at least one side of the workpiece 100, so long as the workpiece 100 can be firmly adhered, and the present invention can be applied. In addition, as shown in fig. 10, before being adhered to the adhesive layer 70, the present invention can also perform a pre-processing procedure on the object 100 to be processed, so as to make the area of the object 100 to be processed, where the adhesive layer 70 is adhered, have a rough surface or gap, so that the adhesive layer 70 can further penetrate into the object 100 to be processed from the surface of the object 100 to be processed, so as to enhance the adhesion effect, and if the adhesive layer 70 is made of a conductive adhesive material, the conductive effect can be enhanced. The adhesive layer 70 may be made of any suitable material, such as a conductive adhesive material or a non-conductive adhesive material.

In addition, as shown in fig. 2 to fig. 3 and fig. 8a, the position of the processing target area 110 of the object 100 to be processed is preferably located above the loading board 24, i.e. the projection line of the processing target area 110 is located between the two side plates 26, rather than the technology that the processing target area adopted is located outside the side plates of the loading board, thereby the utility model discloses the shake phenomenon of the object 100 to be processed can be reduced in the electric discharge process, and burrs can be avoided from being generated on the cutting surfaces 100b, 100c of the object 100 to be processed before the electric discharge process is finished. In addition, the present invention locates the position of the target area 110 of the object 100 above the loading plate 24, i.e. the position of the target area 110 is located between the two side plates 26, so that the discharge electrode 52 only performs the discharge process between the two side plates 26. The position of the processing target area 110 of the object 100 to be processed is not limited to be located right above the carrier plate 24, and the present invention can be applied as long as the processing procedure can be performed. Therefore, the present invention can perform the electrical discharge machining process on the whole object 100 to be machined, so as to avoid the drawback that the conventional technique is obstructed by the side plate 26 and only the electrical discharge machining process can be performed on the machining target area located outside the side plate of the loading plate. As shown in fig. 8b and fig. 8c, since the present invention has disposed the adhesive layer 70 on the carrier plate 24 of the fixture 22, and the position of the carrier plate 24 is located under the processing target area 110, the whole object 100 to be processed can be supported, even if the two side plates 26 are omitted, the present invention can achieve the effect of reducing the jitter and burr, and the electrical discharge processing procedure can not be obstructed by the side plates 26.

Since, when the overlap length of the discharge electrode 52 and the workpiece 100 is too long, the discharge electrode 52 between the

pulleys

57a and 57b is easily shaken during cutting of the workpiece 100, causing a deviation or skew of the cut surface. Further, the distance from the

pulleys

57a, 57b increases the amplitude of the discharge electrode 52. Therefore, the present invention may also optionally have a positioning unit 62 for non-contact fixing the orientation of the discharge electrode 52, for example. For example, the discharge electrode 52 or the electrically shielding structure 52b is a magnetic component, such as a magnet or a ferrous material, the positioning unit 62 is a component capable of generating magnetic attraction force, such as a magnet or an electromagnet, and the discharge electrode 52 and the positioning unit 62 are respectively located at opposite sides of the processing target area 110, so that the magnetic component is acted on by the magnetic attraction force, and the discharge electrode 52 can maintain a fixed orientation during the discharge processing.

In addition, the present invention can also adjust the included angle between the processing target area 110 of the object 100 to be processed and the carrier plate 24 of the fixture 22, so as to perform the Off-Axis (Off-Axis) electrical discharge processing procedure. For example, as shown in fig. 1 and 12a, the stage 20 of the present invention can be, for example, a movable stage having a multi-axis (e.g., 2-axis, 3-axis or more) motor to achieve a moving position and even adjust the inclination of the jig 22 relative to the discharge electrode 52, or as shown in fig. 1 and 12b, the wire feeding winder 56a and the wire winding winder 56b of the Electrical Discharge Machining (EDM) unit 50 can be, for example, a multi-axis (e.g., 2-axis, 3-axis or more) motor to adjust the inclination of the discharge electrode 52 relative to the object 100 by adjusting the wire feeding direction of the Electrical Discharge Machining (EDM) unit 50.

In addition, in order to improve the efficiency of the electrical discharge machining process, the present invention can also improve the electrical contact between the workpiece 100 and the fixture 22 through the conductive gain layer. For example, as shown in fig. 13, a conductive gain layer 80 may be formed on the workpiece 100 by surface modification, such as by using the Electrical Discharge Machining (EDM) unit 50 or laser, the composition of the conductive gain layer 80 depends on the composition of the workpiece 100, and the conductive gain layer 80 is located adjacent to the carrier 24 of the fixture 22 or directly connected to the carrier 24. The utility model discloses borrow and carry out the surface modification by treating processing thing 100 to improve tool 22 and treat the electrical contact between processing thing 100. Alternatively, the present invention can also form the conductive gain layer 82 and/or 84 on the carrier plate 24 and/or the two side plates 26 of the fixture 22 by coating, etc. to provide a good electrical contact, even the conductive plate 72 can be coated with the conductive gain layer 86 or itself is the conductive gain layer 86 (as shown in fig. 14) to provide a good electrical contact, and the positions of the conductive gain layers 82 and 84 can be adjacent to or directly contact the object 100 to be processed. The material of the conductive gain layers 82 and/or 84 may be the same or different conductive materials, for example, as long as good electrical contact can be provided. In addition, the conductive plate 72, the carrier plate 24 of the fixture 22 and/or the two side plates 26 themselves may also be made of the

conductive gain layer

82, 84 and/or 86, and the conductive gain layer may be made of different or the same conductive material, such as different or the same metal material, as long as good electrical contact can be provided. Alternatively, during the electric discharge machining process, a conductive material may be added to the heated liquid 59b in the heated liquid tank 59a to facilitate the electric discharge machining process, and in particular, the electric discharge machining efficiency of the workpiece 100 such as a semiconductor or a defective conductor can be improved. The conductive gain layers 82, 84, and/or 86 have work functions of, for example, less than about 4.5eV, but are not limited thereto, and may be used to facilitate the electrical contact.

In addition, the present invention can also heat the workpiece 100 on the bearing plate 24 through the heat source 90 to improve the electrical contact between the workpiece 100 and the fixture 22. The heat source 90 may be, for example, a heating liquid bath 59a, microwave or radio frequency source 60 as described above, or a laser source and/or an infrared light source. After the object 100 to be processed contacts the jig 22, the heat source 90 is used for heat treatment to enhance the electrical contact, thereby enhancing the efficiency of the subsequent electrical discharge machining process.

(1) By the design of non-uniform electric field distribution, the electric field can be concentrated in the advancing direction.

(3) The jig is provided with the adhesive layer, so that the shaking phenomenon of the object to be processed in the process of the electric discharge processing program can be avoided, and the phenomenon of burrs generated before the electric discharge processing program is finished can also be avoided.

(4) The jig is provided with the adhesive layer, so that the jig can be prevented from interfering the object to be processed to carry out the electric discharge machining process, and the electric discharge machining process can be more flexible.

The foregoing is illustrative only and is not limiting. It is intended that all equivalent modifications or variations be included within the spirit and scope of the present invention, which is defined in the appended claims.

Claims

1. An electric discharge machining apparatus, comprising:

a carrier, which is provided with a fixture, the fixture comprises a bearing plate for bearing at least one object to be processed, wherein the object to be processed is defined with a processing target area; and

an electrical discharge machining unit for applying an electrical discharge energy to the machining target region of the object to be machined through at least one electrical discharge electrode in a non-uniform electric field distribution to machine the object to be machined along the machining target region.

2. The electrical discharge machining apparatus of claim 1 wherein both sides of the discharge electrode are coated with an electrically shielding structure to cause the discharge energy to form the non-uniform electric field distribution.

3. The electrical discharge machining apparatus of claim 1 wherein the discharge electrode has a recessed region to cause the discharge energy to form the non-uniform electric field distribution.

4. The electric discharge machine according to claim 1 or 2, wherein the cross-sectional shape of the discharge electrode is a T-shape, an l-shape or an ellipse so that the discharge energy forms the non-uniform electric field distribution.

5. The electrical discharge machining apparatus of claim 2 wherein the cross-sectional shape of the discharge electrode is circular to cause the discharge energy to form the non-uniform electric field distribution.

6. The electrical discharge machining apparatus according to claim 1, wherein the discharge electrode is in a shape of a wire or a plate.

7. The electrical discharge machining apparatus of claim 2 wherein the electrically shielding structure is a support structure.

8. The electrical discharge machining apparatus of claim 7, wherein the discharge electrode or the support structure has a guide projection corresponding to a guide groove of a pulley of the electrical discharge machining unit, whereby the guide projection is guided by the guide groove.

9. The electric discharge machine according to claim 1, wherein the discharge electrode is a magnetic member, and the electric discharge machine unit acts on the magnetic member in a non-contact manner with a magnetic attractive force when the discharge electrode machines the object to be machined along the machining target region, thereby fixing an orientation of the discharge electrode.

10. The electrical discharge machining apparatus of claim 1 wherein the discharge electrode comprises a first electrically conductive line and a second electrically conductive line, the first electrically conductive line having a different thickness and/or different applied voltage than the second electrically conductive line.

11. The electrical discharge machining apparatus of claim 1, further comprising a microwave or radio frequency source for supplying a microwave or radio frequency energy to the machining target region of the object to be machined via the discharge electrode of the electrical discharge machining unit.

12. An electric discharge machining apparatus, comprising:

a carrier having a fixture, the fixture including a carrier plate for carrying at least one object to be processed, wherein the object to be processed defines a processing target area, and the processing target area of the object to be processed is located above the carrier plate; and

an electrical discharge machining unit for applying an electrical discharge energy to the machining target region of the object to be machined through at least one electrical discharge electrode to machine the object to be machined along the machining target region.

13. The electrical discharge machining apparatus of claim 12, wherein the fixture further has two side plates disposed at two ends of the carrier plate, the two side plates being disposed at two sides of the object to be machined respectively.

14. The electrical discharge machining apparatus of claim 12, wherein the fixture has an adhesive layer disposed on the carrier plate, and the periphery of the object to be machined is partially adhered to the adhesive layer of the fixture.

15. The electrical discharge machining apparatus of claim 14 wherein the adhesive layer is a conductive adhesive layer.

16. The electrical discharge machining apparatus of claim 14 wherein the adhesive layer is non-continuous on the carrier plate.

17. The electrical discharge machining apparatus of claim 14, wherein the adhesive layer extends upward from the carrier plate to at least one side of the object to be machined.

18. The electrical discharge machining apparatus of claim 14 wherein the adhesive layer penetrates into the workpiece.

19. The electrical discharge machining apparatus of claim 12 wherein the fixture has a conductive plate disposed on the carrier plate.

20. The electrical discharge machining apparatus of claim 14, 15, 16, 17 or 18, wherein the fixture has a conductive plate disposed on the carrier plate, and the adhesive layer is disposed on the conductive plate.

21. The electrical discharge machining apparatus of claim 19, wherein the conductive plate is a conductive metal structure having a work function of 4.5eV or less.

22. The electrical discharge machining apparatus of claim 12, wherein the discharge electrode applies the discharge energy to the machining target region of the object to be machined with a non-uniform electric field distribution.

23. The electrical discharge machining apparatus of claim 12, wherein the carrier adjusts an inclination of the fixture relative to the discharge electrode or the electrical discharge machining unit adjusts an inclination of the discharge electrode relative to the workpiece, thereby adjusting an angle of the machining target region of the workpiece relative to the carrier plate of the fixture.

24. The electrical discharge machining apparatus of claim 1 or 12, wherein the workpiece and/or the fixture further comprises a conductive gain layer for improving electrical contact between the workpiece and the fixture.

25. The electrical discharge machining apparatus as claimed in claim 1 or 12, further comprising a heat source for heating the workpiece on the carrier plate to enhance electrical contact between the workpiece and the fixture.

26. The electric discharge machining apparatus according to claim 1 or 12, wherein the discharge electrode cuts the machining target region of the object to be machined in a fluid.

27. The electric discharge machining apparatus according to claim 1 or 12, wherein the discharge electrode cuts the machining target region of the object to be machined in a vacuum atmosphere.

28. The electrical discharge machining apparatus according to claim 1 or 12, wherein the number of the discharge electrodes is one or plural.

29. The electric discharge machining apparatus according to claim 1 or 12, wherein the number of the objects to be machined is one or plural.