CN218436017U - Heat exchanger and monocrystalline silicon rod drawing device - Google Patents
Heat exchanger and monocrystalline silicon rod drawing device Download PDFInfo
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- CN218436017U CN218436017U CN202222210865.3U CN202222210865U CN218436017U CN 218436017 U CN218436017 U CN 218436017U CN 202222210865 U CN202222210865 U CN 202222210865U CN 218436017 U CN218436017 U CN 218436017U
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Abstract
The embodiment of the application provides a heat exchanger and a monocrystalline silicon rod drawing device. The heat exchanger specifically includes: the cooling device comprises an annular body, wherein an annular cavity is arranged in the annular body and is used for accommodating a cooling medium; the water inlet pipe is communicated with the annular cavity and is used for introducing the cooling medium into the annular cavity; the water outlet pipe is communicated with the annular cavity and used for leading out the cooling medium in the annular cavity; and the annular magnetic part is connected to one side of the annular body close to the crucible. In this application embodiment, the magnetic part of heat exchanger can be in form magnetic field in the silicon liquid of crucible, magnetic field can be used for restraining the inside thermal convection of silicon liquid reduces the silicon liquid is right the erodeing of crucible wall reduces impurity content in the silicon liquid to compromise the pulling speed and the crystal pulling quality of single crystal silicon rod.
Description
Technical Field
The application belongs to the technical field of the photovoltaic, concretely relates to heat exchanger and monocrystalline silicon stick draw gear.
Background
In recent years, photovoltaic power generation has been increasingly emphasized and vigorously developed in countries around the world as a green energy source and one of the main energy sources for human sustainable development. The monocrystalline silicon wafer is used as a basic material for photovoltaic power generation and has wide market demand. The monocrystalline silicon piece is usually obtained by slicing a monocrystalline silicon rod, and the monocrystalline silicon rod can be grown and drawn from a silicon liquid.
At present, in order to improve the crystal growth rate, a heat exchanger is usually arranged in a furnace body. The heat released during the crystallization of the monocrystalline silicon rod can be quickly taken out of the furnace through the heat exchanger, the longitudinal temperature gradient of the monocrystalline silicon rod is improved, the crystal growth rate is improved, and therefore the pulling speed of the monocrystalline silicon rod is improved.
However, when the heat exchanger takes away heat, the temperature at the solid-liquid interface is also reduced, and the temperature difference inside the silicon liquid is aggravated, so that the melt convection inside the silicon liquid is aggravated. In practical application, the melt convection in the silicon liquid can easily bring the oxygen-containing compound to the solid-liquid interface and enter the single crystal silicon rod, so that the quality of the single crystal silicon rod is reduced. That is, the conventional heat exchanger is difficult to consider both the pulling speed and the quality of the single crystal silicon rod.
SUMMERY OF THE UTILITY MODEL
The application aims to provide a heat exchanger and a monocrystalline silicon rod drawing device, so as to solve the problem that the drawing speed and the quality of a monocrystalline silicon rod are difficult to be considered in the conventional heat exchanger.
In order to solve the technical problem, the present application is implemented as follows:
in a first aspect, the present application discloses a heat exchanger for a single crystal silicon rod pulling apparatus, the single crystal silicon rod pulling apparatus including a furnace body and a crucible provided in the furnace body, the heat exchanger being located above the crucible, the heat exchanger comprising:
the cooling device comprises an annular body, wherein an annular cavity is arranged in the annular body and is used for accommodating a cooling medium;
the water inlet pipe is communicated with the annular cavity and is used for introducing the cooling medium into the annular cavity;
the water outlet pipe is communicated with the annular cavity and used for guiding out the cooling medium in the annular cavity; and
the magnetic part is connected to one side of the annular body close to the crucible.
Optionally, the magnetic member is disposed in the annular cavity.
Optionally, the heat exchanger further comprises a housing, a closed accommodating cavity is arranged in the housing, and the magnetic member is located in the accommodating cavity.
Optionally, a gap exists between the outer wall of the casing and the inner wall of the annular cavity, and the cooling medium is filled in the gap.
Optionally, a plurality of support blocks arranged at intervals are arranged at the bottom of the annular cavity, and the support blocks are connected to the bottom of the shell, so that the gap is formed between the shell and the annular cavity;
and/or, be provided with a plurality of interval distribution's first boss on the inside wall of cyclic annular cavity, first boss orientation the casing extends, the casing with the position that a plurality of first bosses correspond is provided with a plurality of second bosses, one the second boss with one first boss cooperation, so that the casing with cyclic annular cavity forms the clearance.
Optionally, the housing includes a housing body and an upper cover connected to the housing body, and the housing body and the upper cover enclose the accommodating cavity.
Optionally, the connection between the housing body and the upper cover includes welding, riveting, bonding or threaded connection by a fastener; wherein the content of the first and second substances,
the shell further comprises a sealing ring which is arranged between the shell body and the upper cover under the condition that the threaded connection between the shell body and the upper cover is realized through the fastening piece.
Optionally, the magnetic member is a ferromagnetic member; wherein the content of the first and second substances,
the ferromagnetic part is of an annular integrated structure;
or the ferromagnetic part is of a split structure and comprises a plurality of magnetic blocks which are sequentially distributed along the circumferential direction of the annular body to form an annular structure.
Optionally, the magnetic member is an electromagnetic coil; wherein, the first and the second end of the pipe are connected with each other,
the axial direction of the electromagnetic coil is vertical to the axial direction of the annular body, and the electromagnetic coil is used for forming a transverse magnetic field;
or the axial direction of the electromagnetic coil is parallel to the axial direction of the annular body, and the electromagnetic coil is used for forming a vertical magnetic field.
Optionally, in a case that an axial direction of the electromagnetic coil is perpendicular to an axial direction of the annular body, the electromagnetic coil is plural, and the plural electromagnetic coils are distributed at intervals in a circumferential direction;
in the case where the axial direction of the electromagnetic coil is parallel to the axial direction of the annular body, the number of the electromagnetic coils is one or more, and the electromagnetic coils are distributed at intervals in the circumferential direction of the annular body.
Optionally, the magnetic member is an electromagnetic coil; wherein the content of the first and second substances,
the axial direction of the electromagnetic coil and the axial direction of the annular body are arranged at a preset included angle, and the preset included angle is an included angle except a right angle.
In a second aspect, the present application also discloses a single crystal silicon rod pulling apparatus, including:
a furnace body;
the crucible is arranged in the furnace body and used for containing silicon liquid so as to grow a single crystal silicon rod from the silicon liquid;
the heat exchanger is arranged in the furnace body and is positioned above the crucible, and the heat exchanger comprises a magnetic part which is connected to one side of the heat exchanger close to the crucible.
In this application embodiment, the heat exchanger can include the ring-shaped body, be provided with the cyclic annular cavity that is used for holding cooling medium in the ring-shaped body, the magnetic part set up in the ring-shaped body is close to one side of crucible. In the process of drawing the silicon single crystal rod, the heat released during crystallization of the silicon single crystal rod can be quickly taken away through circulation of the cooling medium in the annular cavity, and the drawing speed of the silicon single crystal rod is increased. Meanwhile, the magnetic part can form a magnetic field in the silicon liquid of the crucible, and the magnetic field can be used for inhibiting heat convection in the silicon liquid, reducing scouring of the silicon liquid on the crucible wall and reducing the content of impurities in the silicon liquid, so that the crystal pulling quality of the single crystal silicon rod is improved. That is, the heat exchanger according to the embodiment of the present application can achieve both the pulling speed and the crystal pulling quality of the single crystal silicon rod.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
FIG. 1 is a schematic structural diagram of a heat exchanger according to an embodiment of the present disclosure;
FIG. 2 is a schematic top view of the heat exchanger shown in FIG. 1;
FIG. 3 isbase:Sub>A cross-sectional view of the heat exchanger of FIG. 2 taken along section A-A;
FIG. 4 is a detailed schematic diagram of the location of the heat exchanger B shown in FIG. 3;
FIG. 5 is a side view of the heat exchanger of FIG. 1;
FIG. 6 is a cross-sectional structural schematic view of a cross-section C-C of the heat exchanger shown in FIG. 5;
FIG. 7 is a schematic diagram of a cusp magnetic field formed by a magnetic element in a silicon liquid in a heat exchanger according to an embodiment of the present application;
FIG. 8 is a schematic diagram of a solenoid layout in a heat exchanger according to an embodiment of the present application;
FIG. 9 is a schematic illustration of the magnetic fields generated by the electromagnetic coil shown in FIG. 8;
fig. 10 is a second schematic layout diagram of an electromagnetic coil in a heat exchanger according to an embodiment of the present application;
FIG. 11 is a schematic illustration of the magnetic fields generated by the electromagnetic coil shown in FIG. 10;
FIG. 12 is a schematic view showing the structure of a single-crystal silicon rod pulling apparatus according to an embodiment of the present application;
reference numerals: 10-ring-shaped body, 100-crystal pulling channel, 101-ring-shaped cavity, 102-outer wall, 103-bottom plate, 104-first inner wall, 105-second inner wall, 106-first boss, 211-water inlet pipe, 12-water outlet pipe, 13-magnetic part, 14-shell, 141-shell body, 142-upper cover, 143-fastener, 144-sealing ring, 145-second boss, 131-magnetic induction line, 20-crucible, 21-silicon liquid, 22-heat exchanger, 23-single crystal silicon rod, D-current incidence direction and E-current emergence direction.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary only for explaining the present invention, and should not be construed as limiting the present invention. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort belong to the protection scope of the present application.
The features of the terms first and second in the description and in the claims of the present application may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more unless otherwise specified. In addition, "and/or" in the specification and claims means at least one of connected objects, a character "/", and generally means that the former and latter related objects are in an "or" relationship.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship indicated based on the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
The embodiment of the application provides a heat exchanger which can be used for a single crystal silicon rod pulling device. The single crystal silicon rod drawing device can comprise a furnace body and a crucible arranged in the furnace body, the crucible can be used for containing silicon liquid, and the heat exchanger is positioned above the crucible. Specifically, the heat exchanger can be sleeved outside the single crystal silicon rod, and the heat exchanger can absorb heat radiated during crystallization of the single crystal silicon rod and transmit the absorbed heat to the outside of the furnace body, so that the longitudinal temperature gradient of the single crystal silicon rod is improved, and the crystal growth speed of the single crystal silicon rod is increased. The heat exchanger can be any one of water-cooled heat exchanger or air-cooled heat exchanger, and this application embodiment only uses the heat exchanger explains for the example water-cooled heat exchanger, and the air-cooled heat exchanger refers to the execution can.
Referring to fig. 1,base:Sub>A schematic structural diagram ofbase:Sub>A heat exchanger according to an embodiment of the present application is shown, referring to fig. 2,base:Sub>A schematic structural diagram ofbase:Sub>A top view of the heat exchanger shown in fig. 1 is shown, referring to fig. 3,base:Sub>A schematic structural diagram ofbase:Sub>A cross sectionbase:Sub>A-base:Sub>A of the heat exchanger shown in fig. 2 is shown, referring to fig. 4,base:Sub>A detailed structural diagram ofbase:Sub>A position of the heat exchanger B shown in fig. 3 is shown, referring to fig. 5,base:Sub>A schematic structural diagram ofbase:Sub>A side direction of the heat exchanger shown in fig. 1 is shown, and referring to fig. 6,base:Sub>A schematic structural diagram ofbase:Sub>A cross section C-C of the heat exchanger shown in fig. 5 is shown.
Specifically, the heat exchanger may specifically include: the cooling device comprises an annular body 10, wherein an annular cavity 101 is arranged in the annular body 10, and the annular cavity 101 can be used for containing a cooling medium; the water inlet pipe 11 is communicated with the annular cavity 101, and the water inlet pipe 11 can be used for introducing the cooling medium into the annular cavity 101; the water outlet pipe 12 is communicated with the annular cavity 101, and the water outlet pipe 12 can be used for guiding out the cooling medium in the annular cavity 101; and a ring-shaped magnetic member 13, wherein the magnetic member 13 is connected to one side of the ring-shaped body 10 close to the crucible 20.
In the embodiment of the present application, the heat exchanger may include a ring body 10, an annular cavity 101 for accommodating a cooling medium is disposed in the ring body 10, and the magnetic member 13 is disposed on a side of the ring body 10 close to the crucible 20. In the process of pulling the single crystal silicon rod, the cooling medium circulates in the annular cavity 101, so that heat released during crystallization of the single crystal silicon rod can be quickly taken away, and the pulling speed of the single crystal silicon rod is increased. Meanwhile, the magnetic part 13 can form a magnetic field in the silicon liquid 21 of the crucible 20, and the magnetic field can be used for inhibiting heat convection in the silicon liquid 21, reducing the scouring of the silicon liquid 21 on the wall of the crucible 20 and reducing the content of impurities in the silicon liquid 21, thereby improving the crystal pulling quality of the single crystal silicon rod. That is, the heat exchanger according to the embodiment of the present application can achieve both the pulling speed and the crystal pulling quality of the single crystal silicon rod.
Specifically, the annular body 10, which is used as the main structural body of the heat exchanger, may be made of a metal material having a certain strength. A pulling channel 100 for the passage of the monocrystalline silicon rod is provided in the ring-shaped body 10. Since the circulating cooling medium can be continuously introduced into the annular cavity 101 of the annular body 10, when the single crystal silicon rod passes through the crystal pulling channel 100, heat exchange can be performed with the cooling medium in the annular cavity 101, latent heat of crystallization of the single crystal silicon rod can be rapidly taken away, and the pulling speed of the single crystal silicon rod can be increased.
Specifically, the water inlet pipe 11 may be connected to the bottom of the annular chamber 101, and the water outlet pipe 12 may be connected to the top of the annular chamber 101. In this way, the cooling medium can enter from the bottom of the annular cavity 101 through the water inlet pipe 211, and flow out from the water outlet pipe 12 at the top after flowing through the annular cavity 101, so as to realize heat conduction. By way of example, the cooling medium may include water, a cooling liquid, and the like, and the specific type of the cooling medium may not be limited in the embodiments of the present application.
In the embodiment of the present application, an annular magnetic member 13 may be disposed on a side of the heat exchanger close to the crucible 20, and at least a portion of the magnetic member 13 may extend into the crucible 20, so that the magnetic member 13 may be disposed close to the silicon liquid 21 in the crucible 20 and form a hook-shaped magnetic field in the silicon liquid 21. In a specific application, the cusp magnetic field inside the silicon liquid 21 can be used to suppress longitudinal thermal convection, transverse thermal convection, and other directional thermal convection of the silicon liquid 21. Thus, the impurity content in the silicon liquid 21 can be reduced, and the quality of the single crystal silicon rod is improved.
Referring to fig. 7, a schematic diagram of a cusp magnetic field formed by a magnetic element in a silicon liquid in the heat exchanger according to the embodiment of the present application is shown. As shown in fig. 7, the magnetic induction lines 131 of the hook-shaped magnetic field in the silicon melt 21 of the crucible 20 are arc-shaped magnetic induction lines 131. Thus, the partial magnetic induction lines 131 can cut the longitudinal thermal convection in the silicon fluid 21, generate lorentz force, and inhibit the longitudinal thermal convection in the silicon fluid 21. Meanwhile, the other part of the magnetic induction lines 131 can cut the transverse thermal convection in the silicon liquid 21 to generate a lorentz force, so that the transverse thermal convection in the silicon liquid 21 is inhibited. Furthermore, the lines of magnetic induction 131 are also capable of generating lorentz forces by thermal convection in directions other than the longitudinal and transverse directions. For example, the other direction may be a direction having an inclination angle of 45 °, 60 ° or the like with respect to the lateral direction. Thus, by suppressing the heat convection in the silicon liquid 21 in a plurality of directions, the erosion of the silicon liquid 21 against the wall of the crucible 20 can be reduced, and the impurity content in the silicon liquid 21 can be reduced.
In an optional embodiment of the present application, the magnetic member 13 may be disposed in the annular cavity 101, and the cooling medium in the annular cavity 101 may cool the magnetic member 13, so as to avoid the high temperature of the silicon solution 21 from causing the demagnetization or damage of the magnetic member 13, thereby enabling the magnetic member 13 to operate at a suitable temperature, and improving the service life of the magnetic member 13.
For example, the magnetic member 13 may be disposed at the bottom of the annular chamber 101. Since the crucible 20 is generally disposed below the ring-shaped body 10, the magnetic member 13 can be disposed as close as possible to the crucible 20 by disposing the magnetic member 13 at the bottom of the ring-shaped cavity 101, and the distance between the magnetic member 13 and the silicon liquid 21 in the crucible 20 can be reduced.
Optionally, the heat exchanger may further include a housing 14, and a closed accommodating cavity is disposed in the housing 14, and the magnetic member 13 is located in the accommodating cavity. The housing 14 can be used to protect the magnetic member 13, prevent the magnetic member 13 from being corroded due to direct contact with the cooling medium, and further prolong the service life of the magnetic member 13.
As shown in fig. 3, the housing 14 may specifically include a housing body 141 and an upper cover 142 connected to the housing body 141, where the housing body 141 and the upper cover 142 enclose to form the accommodating cavity. In a specific application, by providing the housing 14 with the detachable housing body 141 and the detachable upper cover 142, not only the processing of the housing 14 but also the installation of the magnetic element 13 into the accommodating cavity of the housing 14 or the removal of the magnetic element 13 from the accommodating cavity of the housing 14 can be facilitated, so as to implement the maintenance or replacement of the housing 14 and/or the magnetic element 13.
In a specific application, the connection manner between the housing body 141 and the upper cover 142 may include, but is not limited to, at least one of welding, riveting, bonding, or screwing through the fastener 143, and the connection manner between the housing body 141 and the upper cover 142 is not particularly limited in the embodiments of the present application. The housing body 141 and the upper cover 142 may be made of solid materials with a magnetic permeability of 0.9-1.1, such as metal, polyethylene, epoxy resin, and the like, and the materials of the housing body 141 and the upper cover 142 may be the same or different, which is not limited in this embodiment of the application.
As shown in fig. 4, under the condition that the housing body 141 and the upper cover 142 are screwed by the fastening member 143, the housing 14 further includes a sealing ring 144, and the sealing ring 144 is disposed between the housing body 141 and the upper cover 142 to achieve the sealing connection between the housing body 141 and the upper cover 142, so as to prevent the cooling medium from entering the inside of the accommodating cavity from a gap between the housing body 141 and the upper cover 142, so as to achieve the waterproof effect of the magnetic element 13, and further improve the safety of the magnetic element 13.
For example, the material of the sealing ring 144 may include, but is not limited to, any one of flexible materials such as foam and silicone, and the material of the sealing ring 144 is not specifically limited in the embodiments of the present application. The fastener 143 may include, but is not limited to, at least one of a bolt, a screw, and a stud, and the specific type of the fastener 143 may not be limited in the embodiments of the present application.
In some optional embodiments of the present application, there is a gap between the outer wall of the casing 14 and the inner wall of the annular cavity 101, and the cooling medium may be filled in the gap to take away heat of the casing 14, so that the magnetic element 13 in the casing 14 can operate at a proper temperature, and the service life of the magnetic element 13 is prolonged.
As shown in fig. 3, the annular body 10 may include an outer wall 102, a bottom plate 103, a first inner wall 104, and a second inner wall 105, the outer wall 102, the bottom plate 103, the first inner wall 104, and the second inner wall 105 may be sequentially welded and connected and enclose an annular cavity 101, the annular cavity 101 may be used to contain a cooling medium, and the housing 14 may be disposed at the bottom of the annular cavity 101.
In a specific application, the material of the water inlet pipe 11, the water outlet pipe 12, the outer wall 102, the bottom plate 103, the first inner wall 104 and the second inner wall 105 may be copper, iron, aluminum or an alloy of copper, iron and aluminum, and the material of each component may be the same or different. For example, copper materials with high thermal conductivity may be used for all components to achieve the best cooling effect. For another example, in order to achieve low processing cost, stainless steel materials can be selected for the parts as a whole. For another example, in order to achieve both the cooling effect and the economy, the bottom plate 103 and the first inner wall 104 close to the heat source (crucible 20) may be made of copper with high thermal conductivity, and the rest may be made of stainless steel.
It is noted that in particular applications, the outer wall 102 may be at least one of a straight wall, a sloped wall, or an arcuate wall. Accordingly, the first inner wall 104 and the second inner wall 105 may also be at least one of a straight wall, an inclined wall, or an arc-shaped wall. The shape of the outer wall 102, the first inner wall 104, and the second inner wall 105 is not particularly limited in the embodiments of the present application.
In a particular application, the housing 14 may be annular in shape. The minimum inner diameter of the housing 14 may be larger than the inner diameter of the annular cavity 101, and the maximum outer diameter of the housing 14 may be smaller than the outer diameter of the annular cavity 101, so that a gap may be formed between the housing 14 and the side of the annular body 10. Further, a gap may exist between the bottom of the housing 14 and the bottom (bottom plate 103) of the annular chamber 101. In this way, the cooling medium can be sufficiently filled in the gaps at the side and the bottom of the housing 14 to rapidly remove the heat from the surface of the housing 14.
Optionally, the bottom of the annular cavity 101 is provided with a plurality of support blocks arranged at intervals, and the support blocks are connected to the bottom of the shell 14, so that the shell 14 and the annular cavity 101 form the gap, so that the cooling medium is filled in the bottom of the shell 14, and the bottom of the shell 14 is cooled.
Specifically, the supporting block may be a metal block, and the metal block may be welded on the bottom plate 103. The plurality of metal blocks may be spaced at any position as desired in order to achieve a reliable support for the housing 14.
And/or, as shown in fig. 4, a plurality of first bosses 106 are arranged on the inner side wall of the annular cavity 101, the first bosses 106 extend toward the casing 14, a plurality of second bosses 145 are arranged on the casing 14 at positions corresponding to the plurality of first bosses 106, and one second boss 145 is matched with one first boss 106, so that a gap is formed between the casing 14 and the annular cavity 101, and the cooling medium is filled in the side surface of the casing 14, thereby cooling the side surface of the casing 14.
As shown in fig. 6, the first bosses 106 need to be spaced apart, that is, channels through which the cooling medium can flow need to be formed between the first bosses 106, so that the cooling medium can flow along the outside of the casing 14, and cooling of the casing 14 is achieved. In practical applications, in order to enhance the cooling effect of the cooling medium on the casing 14, more than 90% of the area of the outer surface of the casing 14 needs to be in contact with the cooling medium, i.e. the area occupied by the second bosses 145 on the outer surface of the casing 14 cannot exceed 10%.
In alternative embodiments of the present application, the magnetic member 13 is a ferromagnetic member that may include, but is not limited to, any one of samarium cobalt magnets, neodymium iron boron magnets, and iron oxide magnets. Because the ferromagnetic part has a simple structure and a low cost, when the magnetic part 13 is a ferromagnetic part, the structure of the magnetic part 13 can be relatively simple and the cost is low.
Alternatively, the ferromagnetic part may be a ring-shaped integrally formed structure, that is, the ferromagnetic part may be a monolithic structure, which is simple in structure and simple in assembly process. Or, the ferromagnetic part is a split structure, and the ferromagnetic part includes a plurality of magnetic blocks, which are sequentially distributed along the circumferential direction of the annular body 10 to form an annular structure, and in practical application, the shapes and positions of the plurality of magnetic blocks and the interval between two adjacent magnetic blocks may be set according to actual conditions, so that the flexibility of the layout of the magnetic part 13 may be greatly improved.
In particular, the ferromagnetic member may include a first magnetic pole and a second magnetic pole, the first magnetic pole and the second magnetic pole having opposite polarities. In practice, the first magnetic pole may be disposed on the top of the ferromagnetic member and the second magnetic pole may be disposed on the bottom of the ferromagnetic member, or the first magnetic pole may be disposed on the outside of the ferromagnetic member and the second magnetic pole may be disposed on the inside of the ferromagnetic member. The specific positions of the first magnetic pole and the second magnetic pole in the embodiment of the present application may not be limited.
For example, the first magnetic pole may be one of an N pole and an S pole, and the second magnetic pole may be the other of the N pole and the S pole.
In some optional embodiments of the present application, the magnetic member 13 may also be an electromagnetic coil, which can generate a magnetic field when being energized, so as to suppress magnetic convection inside the silicon liquid 21.
Referring to fig. 8, one of the schematic layout diagrams of the electromagnetic coil in the heat exchanger according to the embodiment of the present application is shown, and referring to fig. 9, a schematic diagram of the magnetic field generated by the electromagnetic coil shown in fig. 8 is shown. As shown in fig. 8, an axial direction of the electromagnetic coil may be perpendicular to an axial direction of the annular body 10, that is, the axial direction of the annular body 10 is a vertical direction, the axial direction of the electromagnetic coil is a transverse direction (that is, a radial direction of the annular body 10), a current incident direction D of the electromagnetic coil may be located above, and a current emitting direction E of the electromagnetic coil may be located below. The electromagnetic coil may be used to create a transverse magnetic field as shown in fig. 9.
As shown in fig. 9, the magnetic induction lines 131 of the transverse magnetic field in the silicon liquid 21 of the crucible 20 are arc-shaped magnetic induction lines 131. Thus, the partial magnetic induction lines 131 can cut the longitudinal thermal convection in the silicon fluid 21, generate lorentz force, and inhibit the longitudinal thermal convection in the silicon fluid 21. Meanwhile, the other part of the magnetic induction lines 131 can cut the transverse thermal convection in the silicon liquid 21 to generate a lorentz force, so that the transverse thermal convection in the silicon liquid 21 is inhibited. Furthermore, the lines of magnetic induction 131 are also capable of generating lorentz forces by thermal convection in directions other than the longitudinal and transverse directions. Thus, the heat convection in multiple directions in the silicon liquid 21 can be inhibited, the scouring of the silicon liquid 21 to the crucible 20 wall can be reduced, and the impurity content in the silicon liquid 21 can be reduced.
Referring to fig. 10, a second schematic layout of an electromagnetic coil in a heat exchanger according to an embodiment of the present application is shown, and referring to fig. 11, a schematic diagram of a magnetic field generated by the electromagnetic coil shown in fig. 10 is shown. As shown in fig. 10, the axial direction of the electromagnetic coil is parallel to the axial direction of the annular body 10, that is, the axial direction of the annular body 10 is a vertical direction, the axial direction of the electromagnetic coil is also a vertical direction, the current incident direction D of the electromagnetic coil may be located on the outer side, and the current emitting direction E may be located on the inner side. The electromagnetic coil may be used to create the vertical magnetic field shown in fig. 11.
As shown in fig. 11, the magnetic induction lines 131 of the vertical magnetic field in the silicon liquid 21 of the crucible 20 are arc-shaped magnetic induction lines 131. Thus, the partial magnetic induction lines 131 can cut the longitudinal thermal convection in the silicon fluid 21, generate lorentz force, and inhibit the longitudinal thermal convection in the silicon fluid 21. Meanwhile, the other part of the magnetic induction lines 131 can cut the transverse thermal convection in the silicon liquid 21 to generate a lorentz force, so that the transverse thermal convection in the silicon liquid 21 is inhibited. Furthermore, the lines of magnetic induction 131 are also capable of generating lorentz forces by thermal convection in directions other than the longitudinal and transverse directions. Thus, the heat convection in multiple directions in the silicon liquid 21 can be inhibited, the scouring of the silicon liquid 21 to the crucible 20 wall can be reduced, and the impurity content in the silicon liquid 21 can be reduced.
In practical applications, when the magnetic member 13 is an electromagnetic coil, a person skilled in the art may lay out the electromagnetic coil in the manner shown in fig. 8 or in the manner shown in fig. 10, which is not limited in this embodiment of the present invention. However, comparing the magnetic field diagrams shown in fig. 9 and 11, it can be seen that the magnetic field shown in fig. 9 is more favorable for heat convection to the silicon liquid 21 from a plurality of directions under the same conditions, and therefore, the layout shown in fig. 8 can be preferably used.
Alternatively, in the case where the axial direction of the electromagnetic coil is perpendicular to the axial direction of the annular body 10, the number of the electromagnetic coil may be plural, and the plural electromagnetic coils are distributed at intervals along the circumferential direction of the annular body 10 to form the annular magnetic member 13. In practical applications, the magnetic fields generated by the plurality of electromagnetic coils can be overlapped to suppress the heat convection inside the silicon liquid 21 from more directions, and further reduce the impact of the silicon liquid 21 on the wall of the crucible 20.
Alternatively, in the case where the axial direction of the electromagnetic coil is parallel to the axial direction of the ring-shaped body 10, the number of the electromagnetic coil is one or more. When the number of the electromagnetic coils is one, the electromagnetic coils can be distributed annularly and are sleeved outside the crystal pulling channel 100 of the heat exchanger. In the case where there are a plurality of electromagnetic coils, the plurality of electromagnetic current situations are distributed at intervals in the circumferential direction to form the annular magnetic member 13. In practical applications, the magnetic fields generated by the plurality of electromagnetic coils can be overlapped to suppress the heat convection inside the silicon liquid 21 from more directions, and further reduce the impact of the silicon liquid 21 on the wall of the crucible 20.
In other optional embodiments of the present application, the magnetic member is an electromagnetic coil, and an axial direction of the electromagnetic coil and an axial direction of the annular body 10 are set to be a predetermined included angle, where the predetermined included angle is an included angle other than a right angle, so that the electromagnetic coil can generate an intermediate magnetic field between the transverse magnetic field shown in fig. 9 and the vertical magnetic field shown in fig. 11.
In a specific application, the magnetic induction line 131 of the intermediate magnetic field in the silicon liquid 21 of the crucible 20 is an arc-shaped magnetic induction line 131. Thus, the partial magnetic induction lines 131 can cut the longitudinal thermal convection in the silicon fluid 21, generate lorentz force, and inhibit the longitudinal thermal convection in the silicon fluid 21. Meanwhile, the other part of the magnetic induction lines 131 can cut the transverse thermal convection in the silicon liquid 21 to generate a lorentz force, so that the transverse thermal convection in the silicon liquid 21 is inhibited. Furthermore, the lines of magnetic induction 131 are also capable of generating lorentz forces by thermal convection in directions other than the longitudinal and transverse directions. Thus, the heat convection in multiple directions in the silicon liquid 21 can be inhibited, the scouring of the silicon liquid 21 to the crucible 20 wall can be reduced, and the impurity content in the silicon liquid 21 can be reduced.
It should be noted that, in practical application, the value of the preset included angle may be set according to an actual situation, for example, the preset included angle may be 30 degrees, 50 degrees, 85 degrees, 140 degrees, or the like, and the specific value of the preset included angle may not be limited in the embodiment of the present application.
In summary, the heat exchanger according to the embodiment of the present application may include at least the following advantages:
in this application embodiment, the heat exchanger can include the annular body, be provided with the cyclic annular cavity that is used for holding cooling medium in the annular body, the magnetic part set up in the one side that the annular body is close to the crucible. In the process of drawing the silicon single crystal rod, the heat released during crystallization of the silicon single crystal rod can be quickly taken away through circulation of the cooling medium in the annular cavity, and the drawing speed of the silicon single crystal rod is increased. Meanwhile, the magnetic part can form a magnetic field in the silicon liquid of the crucible, and the magnetic field can be used for inhibiting heat convection in the silicon liquid, reducing scouring of the silicon liquid on the crucible wall and reducing the content of impurities in the silicon liquid, so that the crystal pulling quality of the single crystal silicon rod is improved. That is, the heat exchanger according to the embodiment of the present application can achieve both the pulling speed and the crystal pulling quality of the single crystal silicon rod.
Referring to fig. 12, a schematic structural diagram of a single crystal silicon rod pulling apparatus according to an embodiment of the present application is shown, and as shown in fig. 12, the single crystal silicon rod pulling apparatus may specifically include: a furnace body (not shown in the figure); the crucible 20 is arranged in the furnace body and used for containing the silicon liquid 21 so as to grow a monocrystalline silicon rod 23 from the silicon liquid 21; and the heat exchanger 22 of any of the above embodiments, the heat exchanger 22 is disposed in the furnace body and above the crucible 20, the heat exchanger 22 may include a magnetic member 13, and the magnetic member 13 is connected to a side of the heat exchanger 22 close to the crucible 20.
In the embodiment of the present application, the magnetic member 13 of the heat exchanger 22 is disposed at a side close to the crucible 20. In the process of pulling the single crystal silicon rod 23, the heat released during crystallization of the single crystal silicon rod 23 can be quickly taken away by circulating the cooling medium in the heat exchanger 22, so that the pulling speed of the single crystal silicon rod 23 is increased. Meanwhile, the magnetic part 13 can form a magnetic field in the silicon liquid 21 of the crucible 20, and the magnetic field can be used for inhibiting heat convection in the silicon liquid 21, reducing the scouring of the silicon liquid 21 on the wall of the crucible 20 and reducing the content of impurities in the silicon liquid 21, thereby improving the crystal pulling quality of the single crystal silicon rod 23. That is, the single crystal silicon rod pulling apparatus according to the embodiment of the present application can achieve both the pulling rate and the pulling quality of the single crystal silicon rod 23.
In the description of the present specification, reference to the description of "one embodiment," "some embodiments," "an illustrative embodiment," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.
Claims (12)
1. A heat exchanger for a single crystal silicon rod pulling apparatus including a furnace body and a crucible provided in the furnace body, the heat exchanger being located above the crucible, characterized by comprising:
the cooling device comprises an annular body, wherein an annular cavity is arranged in the annular body and is used for accommodating a cooling medium;
the water inlet pipe is communicated with the annular cavity and is used for introducing the cooling medium into the annular cavity;
the water outlet pipe is communicated with the annular cavity and used for leading out the cooling medium in the annular cavity; and
the magnetic part is connected to one side of the annular body close to the crucible.
2. The heat exchanger of claim 1, wherein the magnetic member is disposed within the annular cavity.
3. The heat exchanger of claim 2, further comprising a housing having a closed receiving cavity disposed therein, wherein the magnetic member is located in the receiving cavity.
4. The heat exchanger of claim 3, wherein a gap exists between the outer wall of the housing and the inner wall of the annular cavity, and the cooling medium is filled in the gap.
5. The heat exchanger of claim 4, wherein the bottom of the annular cavity is provided with a plurality of support blocks arranged at intervals, and the support blocks are connected to the bottom of the shell so that the shell and the annular cavity form the gap;
and/or, be provided with a plurality of interval distribution's first boss on the inside wall of cyclic annular cavity, first boss orientation the casing extends, the casing with the position that a plurality of first bosses correspond is provided with a plurality of second bosses, one the second boss with one first boss cooperation, so that the casing with cyclic annular cavity forms the clearance.
6. The heat exchanger of claim 3, wherein the housing comprises a housing body and an upper cover connected to the housing body, and the housing body and the upper cover enclose the receiving cavity.
7. The heat exchanger of claim 6, wherein the connection between the housing body and the upper cover comprises welding, riveting, bonding or screwing by a fastener; wherein the content of the first and second substances,
the shell further comprises a sealing ring, and the sealing ring is arranged between the shell body and the upper cover under the condition that the threaded connection between the shell body and the upper cover is realized through the fastening piece.
8. The heat exchanger of claim 1, wherein the magnetic member is a ferromagnetic member; wherein the content of the first and second substances,
the ferromagnetic part is of an annular integrated structure;
or the ferromagnetic part is of a split structure and comprises a plurality of magnetic blocks, and the magnetic blocks are sequentially distributed along the circumferential direction of the annular body to form an annular structure.
9. The heat exchanger of claim 1, wherein the magnetic member is an electromagnetic coil; wherein the content of the first and second substances,
the axial direction of the electromagnetic coil is vertical to the axial direction of the annular body, and the electromagnetic coil is used for forming a transverse magnetic field;
or the axial direction of the electromagnetic coil is parallel to the axial direction of the annular body, and the electromagnetic coil is used for forming a vertical magnetic field.
10. The heat exchanger of claim 9, wherein the number of the electromagnetic coils is plural in a case where an axial direction of the electromagnetic coils is perpendicular to an axial direction of the annular body, and the plural electromagnetic coils are circumferentially spaced;
under the condition that the axial direction of the electromagnetic coils is parallel to the axial direction of the annular body, the number of the electromagnetic coils is one or more, and a plurality of the electromagnetic coils are distributed at intervals along the circumferential direction of the annular body.
11. The heat exchanger of claim 1, wherein the magnetic member is an electromagnetic coil; wherein the content of the first and second substances,
the axial direction of the electromagnetic coil and the axial direction of the annular body are arranged at a preset included angle, and the preset included angle is an included angle outside a right angle.
12. A single-crystal silicon rod pulling apparatus, characterized by comprising:
a furnace body;
the crucible is arranged in the furnace body and used for containing silicon liquid so as to grow a single crystal silicon rod from the silicon liquid;
and the heat exchanger of any one of claims 1 to 11, which is arranged in the furnace body and above the crucible, and comprises a magnetic part, and the magnetic part is connected to one side of the heat exchanger close to the crucible.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222210865.3U CN218436017U (en) | 2022-08-22 | 2022-08-22 | Heat exchanger and monocrystalline silicon rod drawing device |
| PCT/CN2023/106352 WO2024041240A1 (en) | 2022-08-22 | 2023-07-07 | Magnetic field applied czochralski device and heat exchanger |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222210865.3U CN218436017U (en) | 2022-08-22 | 2022-08-22 | Heat exchanger and monocrystalline silicon rod drawing device |
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| Publication Number | Publication Date |
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| CN218436017U true CN218436017U (en) | 2023-02-03 |
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| CN202222210865.3U Active CN218436017U (en) | 2022-08-22 | 2022-08-22 | Heat exchanger and monocrystalline silicon rod drawing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024041240A1 (en) * | 2022-08-22 | 2024-02-29 | 隆基绿能科技股份有限公司 | Magnetic field applied czochralski device and heat exchanger |
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- 2022-08-22 CN CN202222210865.3U patent/CN218436017U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024041240A1 (en) * | 2022-08-22 | 2024-02-29 | 隆基绿能科技股份有限公司 | Magnetic field applied czochralski device and heat exchanger |
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