CN220887762U - Thermal insulation cylinder and monocrystalline silicon rod drawing device - Google Patents

Abstract

The embodiment of the application provides a thermal insulation cylinder and a single crystal silicon rod drawing device. The heat preservation section of thick bamboo includes: an annular body; the shell is at least partially embedded in the annular body, and an annular accommodating cavity is formed in the shell; the annular magnetic piece is an accommodating cavity in the shell; the water inlet pipe is communicated with the accommodating cavity and is used for introducing a cooling medium into the accommodating cavity to cool the magnetic piece; and the water outlet pipe is communicated with the accommodating cavity and is used for guiding out the cooling medium in the accommodating cavity. Under the condition that the heat preservation cylinder provided by the embodiment of the application is applied to a monocrystalline silicon rod drawing device, the crystal pulling quality of the monocrystalline silicon rod can be improved.

Description

Thermal insulation cylinder and monocrystalline silicon rod drawing device

Technical Field

The application belongs to the technical field of photovoltaic processing, and particularly relates to a heat preservation cylinder and a monocrystalline silicon rod drawing device.

Background

In recent years, photovoltaic power generation is increasingly being regarded as one of green energy and main energy for sustainable development of human beings, and is being greatly developed by people in various countries around the world. Monocrystalline silicon wafers have a wide market demand as a base material for photovoltaic power generation. The monocrystalline silicon wafer is usually obtained by slicing a monocrystalline silicon rod, and the monocrystalline silicon rod can be formed by growing and drawing silicon liquid.

At present, a heat exchanger is usually arranged in the single crystal silicon rod drawing device, and the heat exchanger can rapidly take heat released during crystallization of the single crystal silicon rod out of the furnace, so that the longitudinal temperature gradient of the crystal rod is improved, the crystal growth rate is improved, and the drawing speed of the single crystal silicon rod is improved.

However, the heat exchanger can also reduce the temperature at the solid-liquid interface while taking away heat, so that the temperature difference inside the silicon liquid is increased, and the convection of the melt inside the silicon liquid is increased. In practical application, the oxygen-containing compound is easily brought to a solid-liquid interface by melt convection in the silicon liquid and enters into the monocrystalline silicon rod, so that the quality of the monocrystalline silicon rod is reduced.

Disclosure of utility model

The application aims to provide a heat preservation cylinder and a single crystal silicon rod drawing device, which at least solve the problem of lower crystal pulling quality of the existing single crystal silicon rod drawing device.

In order to solve the technical problems, the application is realized as follows:

In a first aspect, the application discloses a thermal insulation cylinder for a single crystal silicon rod drawing device, the single crystal silicon rod drawing device comprises a furnace body and a crucible arranged in the furnace body, the thermal insulation cylinder is sleeved outside the crucible and used for isolating heat, and the thermal insulation cylinder comprises:

an annular body;

The shell is at least partially embedded in the annular body, and an annular accommodating cavity is formed in the shell;

An annular magnetic member located in an accommodation cavity in the housing;

the water inlet pipe is communicated with the accommodating cavity and is used for introducing a cooling medium into the accommodating cavity to cool the magnetic piece;

And the water outlet pipe is communicated with the accommodating cavity and is used for guiding out the cooling medium in the accommodating cavity.

Optionally, an annular cavity is disposed in the annular body, and the housing is disposed in the annular cavity.

Optionally, the heat preservation cylinder further comprises a flexible heat preservation piece, and the flexible heat preservation piece is filled in the annular cavity.

Optionally, the annular body comprises: the first annular body and the second annular body are connected above the first annular body; wherein,

The shell is at least partially embedded in the first annular body and/or the second annular body.

Optionally, a groove is formed in the top of the first annular body, and the shell is at least partially embedded in the groove.

Optionally, a gap exists between the outer wall of the magnetic piece and the inner wall of the accommodating cavity, and the cooling medium is filled in the gap.

Optionally, a plurality of supporting blocks are arranged at intervals at the bottom of the accommodating cavity, and the supporting blocks are connected to the bottom of the magnetic piece so that the magnetic piece and the accommodating cavity form the gap;

And/or, be provided with a plurality of interval distribution's first boss on holding the inside wall in chamber, first boss orientation magnetic part extends, magnetic part in with a plurality of first boss corresponding positions are provided with a plurality of second bosses, one the second boss with one first boss cooperates, so that magnetic part with hold the chamber and form the clearance.

Optionally, the magnetic member is a ferromagnetic member; wherein,

The ferromagnetic piece is of an annular integrated structure;

or the ferromagnetic piece is of a split structure and comprises a plurality of magnetic blocks, and the plurality of magnetic blocks are arranged on the magnetic piece

The blocks are distributed in sequence along the circumferential direction of the annular body to form an annular structure.

Optionally, the magnetic element is an electromagnetic coil; wherein,

The axial direction of the electromagnetic coil is perpendicular to the axial direction of the annular body, and the electromagnetic coil is used for forming a transverse magnetic field;

Or the axial direction of the electromagnetic coil is parallel to the axial direction of the annular body, and the electromagnetic coil is used for forming a vertical magnetic field.

Optionally, in the case that the axial direction of the electromagnetic coil is perpendicular to the axial direction of the annular body, the number of the electromagnetic coils is plural, and the plurality of the electromagnetic coils are distributed at intervals along the circumferential direction;

The number of the electromagnetic coils is one or more in the case that the axial direction of the electromagnetic coils is parallel to the axial direction of the annular body, and the electromagnetic coils are distributed at intervals along the circumferential direction of the annular body.

Optionally, the magnetic element is an electromagnetic coil; wherein,

The electromagnetic coil is arranged at a preset included angle with the axial direction of the annular body, and the preset included angle is an included angle outside the right angle.

In a second aspect, the present application also discloses a single crystal silicon rod pulling apparatus, comprising:

a furnace body;

The crucible is arranged in the furnace body and is used for accommodating silicon liquid so as to grow monocrystalline silicon rods from the silicon liquid;

the heater is arranged in the furnace body and is at least partially positioned on the side surface of the crucible;

And the heat preservation cylinder is arranged in the furnace body and sleeved outside the heater, and comprises a magnetic part which is at least partially embedded in the heat preservation cylinder.

In an embodiment of the present application, the thermal insulation cylinder may include an annular body; the shell is at least partially embedded in the annular body, and an annular accommodating cavity is formed in the shell; and the annular magnetic piece is connected in the shell. By the cold during the drawing of the single crystal silicon rod

The circulation of the cooling medium in the receiving chamber cools the magnetic element. The magnetic piece can form a magnetic field in the silicon liquid of the crucible, the magnetic field can be used for inhibiting heat convection in the silicon liquid, washing of the silicon liquid on the wall of the crucible is reduced, the impurity content in the silicon liquid is reduced, and therefore the crystal pulling quality of the monocrystalline silicon rod is improved.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:

FIG. 1 is a schematic structural view of a thermal insulation cylinder applied to a single crystal silicon rod drawing device according to an embodiment of the application;

FIG. 2 is a schematic diagram of a cusp magnetic field formed by a magnetic member in a thermal insulation cylinder in a silicon liquid according to an embodiment of the present application;

FIG. 3 is a schematic illustration of an electromagnetic coil arrangement in a thermal insulation cylinder according to an embodiment of the present application;

FIG. 4 is a schematic diagram of the magnetic field generated by the solenoid shown in FIG. 3;

FIG. 5 is a second schematic diagram of the layout of the electromagnetic coil in the thermal insulation cylinder according to the embodiment of the application;

FIG. 6 is a schematic diagram of the magnetic field generated by the solenoid shown in FIG. 5;

Reference numerals: 10-annular body, 101-first annular body, 102-second annular body, 11-casing, 12-magnetic piece, 121-magnetic induction line, 122-supporting block, 13-inlet tube, 14-outlet tube, 20-heater, 30-crucible, 40-monocrystalline silicon rod, 50-silicon liquid, 60-heat exchanger, A-current incident direction, B-current emergent direction.

Detailed Description

Reference will now be made in detail to embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements throughout or elements having like or similar functionality. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without inventing work

And fall within the scope of the present application.

The features of the utility model "first", "second" and the like in the description and in the claims may be used for the explicit or implicit inclusion of one or more such features. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more. Furthermore, in the description and claims, "and/or" means at least one of the connected objects, and the character "/", generally means that the associated object is an "or" relationship.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The embodiment of the application provides a heat preservation cylinder which can be used for a monocrystalline silicon rod drawing device. The single crystal silicon rod drawing device can comprise a furnace body, a crucible arranged in the furnace body, and a heater arranged at the bottom or on the side surface of the crucible. The crucible can be used for containing silicon liquid, the heater can be used for heating the silicon liquid in the crucible, and the heat preservation cylinder can be sleeved outside the heater. Specifically, the heat preservation cylinder can play the effect of isolated heat, provides better thermal field environment. In practical application, a heat shield can be arranged above the crucible, and the heat shield can provide a thermal field environment suitable for crystal pulling so as to improve the crystal pulling speed.

Referring to fig. 1, a schematic structural diagram of a heat-insulating cylinder applied to a single crystal silicon rod drawing device according to an embodiment of the present application is shown. Specifically, the single crystal silicon rod drawing device can comprise a furnace body and a crucible 30 arranged in the furnace body, and the heat preservation cylinder is sleeved outside the crucible 30.

As shown in fig. 1, the thermal insulation cylinder may specifically include: an annular body 10; the shell 11 is at least partially embedded in the annular body 10, and an annular accommodating cavity is formed in the shell 11; a ring-shaped magnetic member 12, the magnetic member 12 being connected inside the housing 11; the water inlet pipe 13 is communicated with the accommodating cavity, and the water inlet pipe 13 is used for introducing a cooling medium into the accommodating cavity; and a water outlet pipe 14, wherein the water outlet pipe 14 is communicated with the accommodating cavity, and the water outlet pipe 14 is used for guiding out the cooling medium in the accommodating cavity.

In an embodiment of the present application, the thermal insulation cylinder may include an annular body 10; the shell 11 is at least partially embedded in the annular body 10, and an annular accommodating cavity is formed in the shell 11; an annular magnetic member 12, the magnetic member 12 being connected to the inside of the housing 11. During the drawing of the single crystal silicon rod 40, the magnetic member 12 can be cooled by the circulation of the cooling medium in the accommodating chamber. Meanwhile, the magnetic member 12 can form a magnetic field in the silicon liquid 50 of the crucible 30, and the magnetic field can be used for inhibiting heat convection in the silicon liquid 50, reducing scouring of the silicon liquid 50 to the wall of the crucible 30 and reducing impurity content in the silicon liquid 50, so that the crystal pulling quality of the monocrystalline silicon rod 40 is improved. That is, in the case where the thermal insulation barrel according to the embodiment of the present application is applied to the pulling apparatus of the single crystal silicon rod 40, the pulling quality can be improved.

Specifically, the annular body 10 may be made of a carbon-carbon composite material, a graphite material, or the like having a certain strength and having a heat-insulating function as a structural main body of the heat-insulating cylinder. In some alternative embodiments of the present application, the single crystal silicon rod 40 drawing apparatus may further include a heater 20, the heater 20 being disposed within the furnace body and at least partially located at a side of the crucible 30, the heater 20 being operable to heat the silicon liquid 50 within the crucible 30. The heat preservation section of thick bamboo can overlap to establish outside heater 20 and form the clearance with heater 20 between, the heat preservation section of thick bamboo can play the effect of isolated heat, provides better thermal field environment. A heat shield 60 can be arranged above the crucible 30, and the heat shield 60 can provide a thermal field environment suitable for pulling, so that the pulling speed of the monocrystalline silicon rod 40 is improved.

In the embodiment of the present application, a housing 11 may be disposed in the annular body 10 of the thermal insulation cylinder, and an annular magnetic member 12 may be disposed in the housing 11. In practice, magnetic element 12 may be disposed in crucible 30

Near the bath 50, the height of the magnetic member 12 may be level with the bath 50 in the crucible 30, or slightly above or below the bath 50 in the crucible 30, so that the magnetic member 12 may be positioned near the bath 50 in the crucible 30 and form a cusp magnetic field in the bath 50. In particular applications, cusp magnetic fields within the silicon liquid 50 may be used to inhibit longitudinal thermal convection, lateral thermal convection, and other directional thermal convection of the silicon liquid 50. Thus, the impurity content in the silicon liquid 50 can be reduced, and the quality of the single crystal silicon rod 40 can be improved.

Referring to fig. 2, a schematic diagram of a cusp magnetic field formed by a magnetic member in a thermal insulation cylinder in a silicon liquid according to an embodiment of the present application is shown. As shown in fig. 2, the magnetic induction lines 121 of the cusp magnetic field in the silicon liquid 50 of the crucible 30 are arc-shaped magnetic induction lines 121. Thus, the partial magnetic induction lines 121 can cut the longitudinal heat convection in the silicon liquid 50, generate lorentz force, and suppress the longitudinal heat convection in the silicon liquid 50. Meanwhile, another part of the magnetic induction lines 121 can cut the transverse heat convection in the silicon liquid 50, generate lorentz force and inhibit the transverse heat convection in the silicon liquid 50. Moreover, the magnetic induction lines 121 can also cut heat convection in other directions than the longitudinal and transverse directions to generate lorentz forces. The other direction may be, for example, a direction having an inclination angle of 45 °, 60 ° or the like with respect to the lateral direction. By suppressing the heat convection in the silicon liquid 50 in a plurality of directions in this way, the scouring of the crucible 30 wall by the silicon liquid 50 can be reduced, and the impurity content in the silicon liquid 50 can be reduced.

As shown in fig. 1, an annular cavity is disposed in the annular body 10, and the housing 11 may be entirely embedded in the annular cavity, so as to improve connection reliability of the housing 11 on the annular body 10.

Optionally, the heat preservation cylinder further comprises a flexible heat preservation piece, and the flexible heat preservation piece is filled in the annular cavity. The flexible heat preservation piece can play the effect of heat preservation and heat insulation. In practical applications, the flexible heat-insulating member may be filled in the annular cavity of the annular body 10 at a position outside the housing 11, so as to achieve a better heat-insulating effect.

The flexible heat-insulating member may include, but is not limited to, any one of a heat-insulating felt and a heat-insulating foam, and the specific content of the flexible heat-insulating member according to the embodiment of the present application may not be limited.

It should be noted that, in practical applications, the housing 11 may also be partially embedded in the annular body 10, for example, the housing 11 may be partially embedded in a side of the annular body 10 near the heater 20, or the housing 11 may be at least partially embedded in a side of the annular body 10 far from the heater 20, and the connection manner of the housing 11 on the annular body 10 is not limited in the embodiment of the present application.

As shown in fig. 1, the annular body 10 may include: a first annular body 101 and a second annular body 102, the second annular body 102 being connected above the first annular body 101; wherein, the housing 11 is at least partially embedded in the first annular body 101 and/or the second annular body 102.

In a specific application, by separating the annular body 10 into the first annular body 101 and the second annular body 102 that are connected to each other, the heights of the first annular body 101 and the second annular body 102 can be made lower, so as to reduce the processing difficulty of the annular body 10. The housing 11 may be at least partially embedded on the first annular body 101, or at least partially embedded on the second annular body 102, or embedded on both the first annular body 101 and the second annular body 102. The connection manner of the housing 11 to the first annular body 101 and the second annular body 102 is not particularly limited in the embodiment of the present application.

In some alternative embodiments of the present application, a groove is provided at the top of the first annular body 101, and the shell 11 is at least partially embedded in the groove, so that the shell 11 is not easy to deviate during the crystal pulling process, and the connection reliability of the shell 11 on the annular body 10 is improved.

In an embodiment of the present application, a housing cavity may be provided in the housing 11, and the magnetic member 12 is located in the housing cavity. Housing 11 may be used to support magnetic element 12 and to provide protection for magnetic element 12. By introducing a circulating cooling medium into the receiving space of the housing 11, the magnetic part 12 can be cooled by the cooling medium. In this way, the magnetic element 12 is prevented from being demagnetized or damaged due to the high temperature of the silicon liquid 50, so that the magnetic element 12 can work at a proper temperature, and the service life of the magnetic element 12 is prolonged.

In some alternative embodiments of the application, a gap exists between the outer wall of magnetic element 12 and the inner wall of the receiving chamber, and the cooling medium fills the gap. The cooling medium may fill the gap to remove heat from magnetic element 12, so that magnetic element 12 may operate at a suitable temperature, thereby increasing the useful life of magnetic element 12.

Optionally, a plurality of supporting blocks 122 are disposed at the bottom of the accommodating cavity at intervals, and the supporting blocks 122 are connected to the bottom of the magnetic element 12, so that the magnetic element 12 and the accommodating cavity form the gap, and a cooling medium is filled in the bottom of the magnetic element 12, so that cooling of the bottom of the magnetic element 12 is achieved.

Specifically, the supporting block 122 may be a metal block, and the metal block may be welded to the bottom of the accommodating cavity. The plurality of metal blocks may be spaced at any location as desired for reliable support of magnetic element 12.

And/or, be provided with a plurality of first bosss of interval distribution on holding the inside wall of chamber, first boss extends towards magnetic part 12, and magnetic part 12 is in the position that corresponds with a plurality of first bosss is provided with a plurality of second bosss, a second boss with a first boss cooperation, so that magnetic part 12 with hold the chamber and form the clearance, be convenient for cooling medium fills in the side of magnetic part 12, realizes the cooling to magnetic part 12 side.

Specifically, the first bosses need to be distributed at intervals, that is, a channel through which the cooling medium can circulate needs to be formed between the first bosses, so that the cooling medium can flow along the outer side of the magnetic element 12, and cooling of the magnetic element 12 is achieved. In practical applications, to enhance the cooling effect of the cooling medium on magnetic element 12, more than 90% of the area of the outer surface of magnetic element 12 needs to be in contact with the cooling medium, i.e. the area occupied by the second boss on the outer surface of magnetic element 12 cannot exceed 10%.

In some alternative embodiments of the present application, magnetic member 12 is a ferromagnetic member that may include, but is not limited to, any of a samarium cobalt magnet, a neodymium iron boron magnet, and an iron oxide magnet. Because of the simple structure and low cost of the ferromagnetic member, in the case where the magnetic member 12 is a ferromagnetic member, the structure of the magnetic member 12 can be made correspondingly simpler and less costly.

Alternatively, the ferromagnetic piece may be an annular integrally formed structure, that is, the ferromagnetic piece may be an integral structure, and the structure is simple and the assembly process is relatively simple. Or the ferromagnetic piece is in a split structure, and comprises a plurality of magnetic blocks which are sequentially distributed along the circumferential direction of the annular body 10 to form an annular structure. In practical applications, the shapes and positions of the magnetic blocks and the intervals between two adjacent magnetic blocks can be set according to practical situations, so that the layout flexibility of the magnetic piece 12 can be greatly improved.

In particular, the ferromagnetic member may comprise a first magnetic pole and a second magnetic pole, the first and second magnetic poles being of opposite polarity. In practical application, the first magnetic pole may be disposed at the top of the ferromagnetic member, the second magnetic pole may be disposed at the bottom of the ferromagnetic member, or the first magnetic pole may be disposed at the outer side of the ferromagnetic member, and the second magnetic pole may be disposed at the inner side of the ferromagnetic member. The specific positions of the first magnetic pole and the second magnetic pole are not limited in the embodiment of the application.

For example, the first magnetic pole may be one of an N pole and an S pole, and the second magnetic pole may be the other of the N pole and the S pole.

In some alternative embodiments of the present application, magnetic element 12 may also be a solenoid coil that, when energized, may generate a magnetic field that inhibits convection of the melt within silicon liquid 50.

Referring to fig. 3, a schematic diagram of a layout of an electromagnetic coil in a thermal insulation cylinder according to an embodiment of the present application is shown, and referring to fig. 4, a schematic diagram of a magnetic field generated by the electromagnetic coil shown in fig. 3 is shown. As shown in fig. 3, the axial direction of the electromagnetic coil may be perpendicular to the axial direction of the annular body 10, that is, the axial direction of the annular body 10 is a vertical direction, the axial direction of the electromagnetic coil is a transverse direction (that is, the radial direction of the annular body 10), the current incident direction a of the electromagnetic coil may be located above, and the current exiting direction B may be located below. The electromagnetic coil may be used to form a transverse magnetic field as shown in fig. 4.

As shown in fig. 4, the magnetic induction line 121 of the transverse magnetic field in the silicon liquid 50 of the crucible 30 is an arc-shaped magnetic induction line 121. Thus, the partial magnetic induction lines 121 can cut the longitudinal heat convection in the silicon liquid 50, generate lorentz force, and suppress the longitudinal heat convection in the silicon liquid 50. Meanwhile, another part of the magnetic induction lines 121 can cut the transverse heat convection in the silicon liquid 50, generate lorentz force and inhibit the transverse heat convection in the silicon liquid 50. Moreover, the magnetic induction lines 121 can also cut heat convection in other directions than the longitudinal and transverse directions to generate lorentz forces. Thus, heat convection in a plurality of directions in the silicon liquid 50 can be suppressed, the scouring of the wall of the crucible 30 by the silicon liquid 50 can be reduced, and the impurity content in the silicon liquid 50 can be reduced.

Referring to fig. 5, a second schematic layout of an electromagnetic coil in a thermal insulation cylinder according to an embodiment of the present application is shown, and referring to fig. 6, a schematic diagram of a magnetic field generated by the electromagnetic coil shown in fig. 5 is shown. As shown in fig. 5, the axial direction of the electromagnetic coil is parallel to the axial direction of the annular body 10, that is, the axial direction of the annular body 10 is a vertical direction, the axial direction of the electromagnetic coil is also a vertical direction, the current incident direction a of the electromagnetic coil may be located at the outer side, and the current exiting direction B may be located at the inner side. The electromagnetic coil may be used to form a vertical magnetic field as shown in fig. 6.

As shown in fig. 6, the magnetic induction lines 121 of the vertical magnetic field in the silicon liquid 50 of the crucible 30 are arc-shaped magnetic induction lines 121. Thus, the partial magnetic induction lines 121 can cut the longitudinal heat convection in the silicon liquid 50, generate lorentz force, and suppress the longitudinal heat convection in the silicon liquid 50. Meanwhile, another part of the magnetic induction lines 121 can cut the transverse heat convection in the silicon liquid 50, generate lorentz force and inhibit the transverse heat convection in the silicon liquid 50. Moreover, the magnetic induction lines 121 can also cut heat convection in other directions than the longitudinal and transverse directions to generate lorentz forces. Thus, heat convection in a plurality of directions in the silicon liquid 50 can be performed

The inhibition can reduce the scouring of the silicon liquid 50 to the wall of the crucible 30 and reduce the impurity content in the silicon liquid 50.

In practical applications, in the case where the magnetic member 12 is an electromagnetic coil, those skilled in the art may arrange the electromagnetic coil in the manner shown in fig. 3, or may arrange the electromagnetic coil in the manner shown in fig. 5, which is not limited in the embodiment of the present application. However, by comparing the magnetic field diagrams shown in fig. 4 and 6, it can be obtained that the magnetic field shown in fig. 4 is more advantageous to realize heat convection of the silicon liquid 50 from a plurality of directions under the same conditions, and therefore, the layout manner shown in fig. 3 can be preferred.

Alternatively, in the case where the axial direction of the electromagnetic coil is perpendicular to the axial direction of the annular body 10, the number of the electromagnetic coils may be plural, and the plural electromagnetic coils may be distributed at intervals along the circumferential direction of the annular body 10 to form the annular magnetic member 12. In practice, the magnetic fields generated by the plurality of electromagnetic coils may overlap to inhibit thermal convection within the silicon liquid 50 from more directions, further reducing the impact of the silicon liquid 50 on the walls of the crucible 30.

Alternatively, in the case where the axial direction of the electromagnetic coil is parallel to the axial direction of the annular body 10, the number of the electromagnetic coils is one or more. Under the condition that the electromagnetic coils are one, the electromagnetic coils can be annularly distributed and sleeved outside the crystal pulling channel. In the case where there are a plurality of electromagnetic coils, a plurality of the electromagnetic current conditions are distributed at intervals in the circumferential direction to form the annular magnetic member 12. In practice, the magnetic fields generated by the plurality of electromagnetic coils may overlap to inhibit thermal convection within the silicon liquid 50 from more directions, further reducing the impact of the silicon liquid 50 on the walls of the crucible 30.

In other alternative embodiments of the present application, the magnetic member 12 is an electromagnetic coil, and the axial direction of the electromagnetic coil is disposed at a preset angle with respect to the axial direction of the annular body 10, and the preset angle is an angle other than a right angle, so that the electromagnetic coil can generate an intermediate magnetic field between the transverse magnetic field shown in fig. 4 and the vertical magnetic field shown in fig. 6.

In a specific application, the magnetic induction line 121 of the intermediate magnetic field in the silicon liquid 50 of the crucible 30 is an arc-shaped magnetic induction line 121. Thus, the partial magnetic induction lines 121 can cut the longitudinal heat convection in the silicon liquid 50, generate lorentz force, and suppress the longitudinal heat convection in the silicon liquid 50. Meanwhile, another part of the magnetic induction lines 121 can cut the transverse heat convection in the silicon liquid 50, generate lorentz force and inhibit the transverse heat convection in the silicon liquid 50. Moreover, the magnetic induction lines 121 can also cut heat convection in other directions than the longitudinal and transverse directions to generate lorentz forces. Thus, convection of heat in a plurality of directions in the silicon liquid 50 can be achieved

By suppressing the erosion of the crucible 30 wall by the silicon liquid 50, the impurity content in the silicon liquid 50 can be reduced.

It should be noted that, in practical application, the value of the preset included angle may be set according to practical situations, for example, the preset included angle may be 30 degrees, 50 degrees, 85 degrees, or 140 degrees, etc., and the specific value of the preset included angle may not be limited in the embodiment of the present application.

In summary, the heat preservation cylinder according to the embodiment of the application at least can have the following advantages:

In an embodiment of the present application, the thermal insulation cylinder may include an annular body; the shell is at least partially embedded in the annular body, and an annular accommodating cavity is formed in the shell; and the annular magnetic piece is connected in the shell. During the drawing of the single crystal silicon rod, the magnetic member can be cooled by the circulation of the cooling medium in the accommodating chamber. Meanwhile, the magnetic piece can form a magnetic field in the silicon liquid of the crucible, the magnetic field can be used for inhibiting heat convection in the silicon liquid, washing of the silicon liquid on the crucible wall is reduced, impurity content in the silicon liquid is reduced, and accordingly crystal pulling quality of a monocrystalline silicon rod is improved.

The embodiment of the application also provides a structural schematic diagram of the single crystal silicon rod drawing device shown in fig. 1, wherein the single crystal silicon rod drawing device comprises 12 and a single crystal silicon rod drawing device, and is characterized in that the single crystal silicon rod drawing device comprises: a furnace body; the crucible is arranged in the furnace body and is used for accommodating silicon liquid so as to grow monocrystalline silicon rods from the silicon liquid; the heater is arranged in the furnace body and is at least partially positioned on the side surface of the crucible; and the heat preservation cylinder is arranged in the furnace body and sleeved outside the heater, and comprises a magnetic part which is at least partially embedded in the heat preservation cylinder.

In an embodiment of the present application, the thermal insulation cylinder may include an annular body; the shell is at least partially embedded in the annular body, and an annular accommodating cavity is formed in the shell; and the annular magnetic piece is connected in the shell. During the drawing of the single crystal silicon rod, the magnetic member can be cooled by the circulation of the cooling medium in the accommodating chamber. Meanwhile, the magnetic piece can form a magnetic field in the silicon liquid of the crucible, the magnetic field can be used for inhibiting heat convection in the silicon liquid, washing of the silicon liquid on the crucible wall is reduced, impurity content in the silicon liquid is reduced, and accordingly crystal pulling quality of a monocrystalline silicon rod is improved.

In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.

Claims (12)

1. The utility model provides a heat preservation section of thick bamboo for monocrystalline silicon stick drawing device, monocrystalline silicon stick drawing device include the furnace body and set up in crucible in the furnace body, the heat preservation section of thick bamboo cover is established outside the crucible, the heat preservation section of thick bamboo is used for insulating heat, its characterized in that, the heat preservation section of thick bamboo includes:

an annular body;

The shell is at least partially embedded in the annular body, and an annular accommodating cavity is formed in the shell;

An annular magnetic member located in an accommodation cavity in the housing;

the water inlet pipe is communicated with the accommodating cavity and is used for introducing a cooling medium into the accommodating cavity to cool the magnetic piece;

And the water outlet pipe is communicated with the accommodating cavity and is used for guiding out the cooling medium in the accommodating cavity.

2. The insulating cartridge of claim 1, wherein an annular cavity is disposed within the annular body, and the housing is disposed within the annular cavity.

3. The insulating cartridge of claim 2, further comprising a flexible insulating member filled within the annular cavity.

4. The insulating cartridge of claim 1, wherein the annular body comprises: the first annular body and the second annular body are connected above the first annular body; wherein,

The shell is at least partially embedded in the first annular body and/or the second annular body.

5. The insulating cartridge of claim 4, wherein the top of the first annular body is provided with a recess, and the housing is at least partially embedded in the recess.

6. The insulating cylinder according to claim 1, wherein a gap exists between an outer wall of the magnetic member and an inner wall of the accommodating chamber, and the cooling medium is filled in the gap.

7. The insulating cylinder according to claim 6, wherein a plurality of supporting blocks are arranged at intervals at the bottom of the accommodating cavity, and the supporting blocks are connected to the bottom of the magnetic piece so that the magnetic piece and the accommodating cavity form the gap;

And/or, be provided with a plurality of interval distribution's first boss on holding the inside wall in chamber, first boss orientation magnetic part extends, magnetic part in with a plurality of first boss corresponding positions are provided with a plurality of second bosses, one the second boss with one first boss cooperates, so that magnetic part with hold the chamber and form the clearance.

8. The insulating cartridge of claim 1, wherein the magnetic member is a ferromagnetic member; wherein,

The ferromagnetic piece is of an annular integrated structure;

Or the ferromagnetic piece is of a split structure, the ferromagnetic piece comprises a plurality of magnetic blocks, and the magnetic blocks are sequentially distributed along the circumferential direction of the annular body to form an annular structure.

9. The insulating cartridge of claim 1, wherein the magnetic member is an electromagnetic coil; wherein,

The axial direction of the electromagnetic coil is perpendicular to the axial direction of the annular body, and the electromagnetic coil is used for forming a transverse magnetic field;

Or the axial direction of the electromagnetic coil is parallel to the axial direction of the annular body, and the electromagnetic coil is used for forming a vertical magnetic field.

10. The heat insulating cylinder according to claim 9, wherein in the case where an axial direction of the electromagnetic coil is perpendicular to an axial direction of the annular body, the number of the electromagnetic coils is plural, and the plurality of the electromagnetic coils are circumferentially spaced apart;

The number of the electromagnetic coils is one or more in the case that the axial direction of the electromagnetic coils is parallel to the axial direction of the annular body, and the electromagnetic coils are distributed at intervals along the circumferential direction of the annular body.

11. The insulating cartridge of claim 1, wherein the magnetic member is an electromagnetic coil; wherein,

The electromagnetic coil is arranged at a preset included angle with the axial direction of the annular body, and the preset included angle is an included angle outside the right angle.

12. A single crystal silicon rod pulling apparatus, characterized in that the single crystal silicon rod pulling apparatus comprises:

a furnace body;

The crucible is arranged in the furnace body and is used for accommodating silicon liquid so as to grow monocrystalline silicon rods from the silicon liquid;

the heater is arranged in the furnace body and is at least partially positioned on the side surface of the crucible;

And the heat preservation cylinder according to any one of claims 1 to 11, wherein the heat preservation cylinder is arranged in the furnace body and sleeved outside the heater, and comprises a magnetic part, and the magnetic part is at least partially embedded in the heat preservation cylinder.