CN218331674U

CN218331674U - Test tool for wafer chip with simple control

Info

Publication number: CN218331674U
Application number: CN202222446978.3U
Authority: CN
Inventors: 请求不公布姓名
Original assignee: Suzhou Huiken Electronic Technology Co ltd
Current assignee: Suzhou Huiken Electronic Technology Co ltd
Priority date: 2022-09-15
Filing date: 2022-09-15
Publication date: 2023-01-17
Anticipated expiration: 2032-09-15

Abstract

The utility model discloses a control simple test fixture for wafer chip, including lower coupling plate, the centre of lower coupling plate is equipped with the standing groove, the centre of standing groove is equipped with the conducting hole, the outside periphery of standing groove is equipped with four high pieces that are square array setting, the equal roller bearing in one side of keeping away from the standing groove center of piece such as every, the equal roll connection of every roller bearing has a directive wheel, all be equipped with on the rolling surface of every directive wheel with roller bearing complex chute, all be connected with a driving strip between every two adjacent directive wheels, at least one is connected with the handle in four directive wheels. The utility model has the advantages that: the height of the steering wheel is adjusted, the requirement of wafer chip testing is met, the connection of a wafer chip testing machine connected with the lower coupling plate, a wafer chip and a wafer chip testing head is realized, and the connection testing of the wafer chip is realized; the test tool is ingenious in design, simple in structure and easy to operate.

Description

Control simple test fixture for wafer chip

Technical Field

The utility model relates to a wafer chip tests technical field, specifically is a control simple wafer chip and use test fixture.

Background

The wafer is the most basic semiconductor material for manufacturing the IC, and the quality of the wafer directly determines the quality of the finished IC. Due to different process levels, wafers may generate three defects, namely redundancy, crystal defects and mechanical damage at the production stage. Therefore, the efficient and accurate detection equipment can provide guarantee for high-reliability wafer materials. With the rapid improvement of the chip manufacturing technology, the challenges of wafer inspection are increasing, and the cost proportion of the test is also obviously increased. The wafer chip test requires that the wafer chip is placed between the wafer chip testing machine and the wafer chip testing head, and the wafer chip testing machine and the wafer chip testing head are simultaneously communicated with the wafer chip for testing. The existing wafer chip test mostly adopts automatic detection, and is suitable for simultaneously detecting large batch of wafer chips. However, the automatic wafer chip detection equipment has high starting requirements, consumes a large amount of power at each starting, is not suitable for testing a small number of wafer chips, and has a complex structure, multiple operation requirements and high operation difficulty.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a control simple test fixture for wafer chip to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a control simple test fixture for wafer chip, includes the coupling plate down, the centre of coupling plate is equipped with the standing groove down, the centre of standing groove is equipped with the conducting hole, the outside periphery of standing groove is equipped with four equal high blocks that are square array setting, every equal high block keep away from the equal roller bearing in one side at standing groove center, every roller bearing all roll connection has a directive wheel, every all be equipped with on the rolling surface of directive wheel with roller bearing complex chute, every adjacent two all be connected with a driving strip between the directive wheel, four at least one is connected with the handle in the directive wheel.

Further preferably, the side face, far away from the placing groove, of the equal-height block is provided with a mounting groove, the mounting groove is an inwards concave arc-shaped groove, and the roller bearing is mounted in the mounting groove.

Further preferably, an opening is formed in the rolling surface of the steering wheel, and the opening is formed in the lowest end of the inclined groove and penetrates through the steering wheel downwards.

Further preferably, the placing groove and the via hole are both circular, a plurality of positioning grooves are formed in the side wall of the placing groove, and a plurality of positioning pins are arranged at the bottom of the placing groove.

Further preferably, be equipped with on the lower coupling plate and dodge the groove, it is the rectangle recess to dodge the groove, the standing groove sets up in the middle of the tank bottom of dodging the groove.

Further preferably, the side face, close to the placing groove, of the equal-height block is an arc-shaped face, a positioning shaft penetrating through the equal-height block is arranged on the equal-height block, and a plurality of mounting holes penetrating through the equal-height block are formed in the equal-height block.

Further preferably, a plurality of connecting holes are formed in the steering wheel, and an upper coupling plate is connected to the wheel center of the steering wheel.

Has the advantages that: the utility model discloses a control simple test fixture for wafer chip through rotating handle, can drive the directive wheel and rotate around its wheel center, through the cooperation of chute on the directive wheel and roller bearing, realizes the regulation of directive wheel height, and then realizes the regulation of the height of the upper coupling plate of being connected with the directive wheel, wafer chip test head, reaches the requirement of wafer chip test, realizes the intercommunication of wafer chip test machine, wafer chip and wafer chip test head that the coupling plate is connected down, realizes the intercommunication test of wafer chip; the test tool is ingenious in design, simple in structure, simple to operate, suitable for manual test of a small number of wafer chips, low in operation requirement and low in energy consumption.

Drawings

Fig. 1 is an exploded schematic view of a test tool for a wafer chip, which is disclosed in an embodiment of the present invention and is easy to operate;

fig. 2 is a schematic top view of a test tool for a wafer chip according to an embodiment of the present invention;

fig. 3 is a schematic view of a matching structure of a lower coupling plate and an equal-height block disclosed in an embodiment of the present invention;

fig. 4 is a schematic structural view of the equal-height block disclosed by the embodiment of the present invention;

fig. 5 is a schematic view of a matching structure of a steering wheel and a transmission bar disclosed in the embodiment of the present invention;

fig. 6 is a schematic structural view of a rotary wheel according to an embodiment of the present invention.

Reference numerals: 1-lower coupling plate, 11-placing groove, 12-leading hole, 13-avoiding groove, 14-positioning groove, 2-equal-height block, 21-mounting groove, 22-positioning shaft, 23-mounting hole, 3-roller bearing, 4-steering wheel, 41-inclined groove, 42-opening, 43-connecting hole, 5-driving strip and 6-handle.

Detailed Description

The following are specific embodiments of the present invention and the accompanying drawings are used to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

As shown in fig. 1 to 6, a test tool for a wafer chip with simple operation and control comprises a lower coupling plate 1, wherein the lower coupling plate 1 is installed on a machine table of a wafer chip tester, and a placing groove 11 is formed in the middle of the lower coupling plate 1, so that the wafer chip can be conveniently placed; the middle of the placing groove 11 is provided with a through hole 12 for communicating the wafer chip with a wafer chip testing machine, so as to realize the test of the wafer chip. Four equal-height blocks 2 arranged in a square array are arranged on the periphery of the outer side of the placing groove 11, a roller bearing 3 is arranged on one side, away from the center of the placing groove 11, of each equal-height block 2, each roller bearing 3 is connected with a steering wheel 4 in a rolling mode, and a chute 41 matched with the roller bearings 3 is arranged on the rolling surface of each steering wheel 4. In this application, equal-height block 2 is used for the installation of directive wheel 4, and the wheel center of directive wheel 4 is connected with the coupling board, goes up the coupling board and installs on wafer chip test head, through the connection of last coupling board and lower coupling board, realizes the intercommunication of wafer chip test head, wafer chip and wafer chip test machine, realizes wafer chip's test. Wherein, the side of the equal-height block 2 far away from the placing groove 11 is provided with an installation groove 21, the installation groove 21 is an inward-concave arc-shaped groove, and the roller bearing 3 is installed in the installation groove 21; meanwhile, the inclined groove 41 is arranged on the rolling surface of the steering wheel 4, and the roller bearing 3 can only rotate and cannot move in the vertical or horizontal directions, so that when the roller bearing 3 rotates in the groove of the inclined groove 41, the steering wheel 4 rotates and simultaneously changes in height under the guidance of the inclined groove 41, and then the height change of an upper coupling plate connected with the steering wheel 4 can be driven, so that the height adjustment of the wafer chip testing head is realized, the height required by the wafer chip testing is reached, the wafer chip testing head, the wafer chip and the wafer chip testing machine are communicated, and the wafer chip testing is realized.

In the application, a transmission strip 5 is connected between every two adjacent steering wheels 4, so that the four steering wheels 4 are connected, the four steering wheels 4 are ensured to move up and down synchronously, the upper coupling plate connected with the four steering wheels 4 and the wafer chip testing head are ensured to move up and down stably, the communication between the wafer chip and the wafer chip testing head is influenced, the testing accuracy of the wafer chip is influenced, and the wafer chip can be prevented from being crushed; at least one in four directive wheels 4 is connected with handle 6, can drive directive wheel 4 through handle 6 and rotate around its wheel center, and rethread transmission strip 5 realizes the synchronous rotation of four directive wheels 4, and realizes the manual rotation of directive wheel 4, realizes wafer chip's manual test.

In the application, the rolling surface of the steering wheel 4 is provided with the opening 42, the opening 42 is arranged at the lowest end of the inclined groove 41 and penetrates through the steering wheel 4 downwards, and the roller bearing 3 is conveniently inserted into the inclined groove 41 of the steering wheel 4 through the arrangement of the opening 42, so that the roller bearing 3 is connected with the steering wheel 4; the opening 42 is disposed below the steering wheel 4 to ensure that the roller bearing 3 does not separate from the steering wheel 4 when rotating to the lowest position of the inclined groove 41.

In the present application, the placement groove 11 and the via hole 12 are both circular and are configured to match the shape of the wafer chip; a plurality of positioning grooves 14 are formed in the side wall of the placing groove 11 and used for positioning the wafer chips; the bottom of the placing groove 11 is provided with a plurality of positioning pins, so that the wafer chip can be prevented from rotating, the test of the wafer chip is inaccurate, and the test accuracy of the wafer chip can be effectively improved through the positioning grooves 14 and the positioning pins.

In this application, be equipped with on the lower coupling plate 1 and dodge groove 13, dodge groove 13 and be the rectangle recess, standing groove 11 sets up in the middle of the tank bottom of dodging groove 13, through the setting of dodging groove 13, guarantees that the height of directive wheel 4 when the downward movement, and when the probe tower on the wafer chip test head communicates with the wafer chip, other positions of wafer chip test head can not influence moving down of wafer chip test head, guarantee the intercommunication test of wafer chip.

In the application, the side surface of the equal-height block 2 close to the placing groove 11 is an arc-shaped surface, so that the volume of the equal-height block 2 can be reduced, and the equal-height block 2 is prevented from influencing the downward movement of the wafer chip testing head; the equal-height block 2 is provided with a positioning shaft 22 which penetrates through the equal-height block up and down, the positioning shaft 22 is connected with the lower coupling plate 1, positioning of the equal-height block 2 and the lower coupling plate 1 is achieved, the positioning shaft 22 can facilitate the equal-height block 2 to rotate by taking the positioning shaft 22 as an axis, four steering wheels 4 are matched with the four equal-height blocks 2 conveniently, adjustment of the positions of the four equal-height blocks 2 is facilitated, and accurate installation positions of the equal-height blocks 2 are guaranteed; the equal-height blocks 2 are provided with a plurality of mounting holes 23 which penetrate up and down and are used for fixing the positioned equal-height blocks 2.

In this application, be equipped with a plurality of connecting holes 43 on directive wheel 4 for directive wheel 4 is connected with drive strip 5.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the content of the present invention within the protection scope of the present invention.

Claims

1. The utility model provides a control simple test fixture for wafer chip, includes coupling plate (1) down, its characterized in that: the middle of the lower coupling plate (1) is provided with a placing groove (11), the middle of the placing groove (11) is provided with a through hole (12), four equal-height blocks (2) arranged in a square array are arranged on the periphery of the outer side of the placing groove (11), one side, far away from the center of the placing groove (11), of each equal-height block (2) is provided with a roller bearing (3), each roller bearing (3) is connected with a steering wheel (4) in a rolling mode, each rolling surface of each steering wheel (4) is provided with a chute (41) matched with the roller bearing (3), every two adjacent steering wheels (4) are connected with one transmission bar (5) therebetween, and at least one steering wheel (4) is connected with a handle (6).

2. The test tool for wafer chips with simple operation and control as claimed in claim 1, wherein: the side surfaces, far away from the placing groove (11), of the equal-height blocks (2) are provided with installing grooves (21), the installing grooves (21) are inwards concave arc-shaped grooves, and the roller bearings (3) are installed in the installing grooves (21).

3. The test tool for wafer chips with simple operation and control as claimed in claim 1, wherein: be equipped with opening (42) on the rolling surface of directive wheel (4), opening (42) set up in the least significant end of chute (41) and run through directive wheel (4) downwards.

4. The wafer chip testing tool easy to operate and control as claimed in claim 1, wherein: the novel positioning device is characterized in that the placing groove (11) and the conducting hole (12) are both circular, a plurality of positioning grooves (14) are formed in the side wall of the placing groove (11), and a plurality of positioning pins are arranged at the bottom of the placing groove (11).

5. The test tool for wafer chips with simple operation and control as claimed in claim 1, wherein: be equipped with on lower coupling plate (1) and dodge groove (13), dodge groove (13) and be the rectangle recess, standing groove (11) set up in the middle of the tank bottom of dodging groove (13).

6. The test tool for wafer chips with simple operation and control as claimed in claim 1, wherein: the side face, close to the placing groove (11), of the equal-height block (2) is an arc-shaped face, a positioning shaft (22) penetrating through the equal-height block (2) up and down is arranged on the equal-height block, and a plurality of mounting holes (23) penetrating through the equal-height block (2) up and down are arranged on the equal-height block.

7. The wafer chip testing tool easy to operate and control as recited in claim 6, wherein: the steering wheel (4) is provided with a plurality of connecting holes (43), and the wheel center of the steering wheel (4) is connected with an upper coupling plate.