CN218319065U

CN218319065U - Conveyor for semiconductor processing

Info

Publication number: CN218319065U
Application number: CN202221999420.1U
Authority: CN
Inventors: 张弛
Original assignee: Shanghai Zhengjin Industrial Co ltd
Current assignee: Shanghai Zhengjin Industrial Co ltd
Priority date: 2022-08-01
Filing date: 2022-08-01
Publication date: 2023-01-17
Anticipated expiration: 2032-08-01

Abstract

The utility model discloses a conveyor is used in semiconductor processing, including base and ball, the base is provided with two sets ofly, the equal swing joint in inside of base has ball, ball's the equal activity in outside has cup jointed screw nut, screw nut's one end fixedly connected with mounting bracket, the top swing joint of mounting bracket has the fluted disc, the top fixedly connected with pivot of fluted disc, the top fixedly connected with of pivot carries the platform, carry the bench top and placed the carrier. This conveyor for semiconductor processing is through being provided with servo motor, ball, screw nut, carry platform, carrier, and the screw nut that the ball outside cup jointed truns into linear motion with the rotation, drives and carries the whole horizontal migration of platform to carry the multiunit carrier to machining area, once only carry the multiunit, carry improvement machining efficiency through automatic transport, guarantee the productivity, solved the problem that conveying efficiency is low.

Description

Conveyor for semiconductor processing

Technical Field

The utility model relates to a semiconductor processing technology field specifically is a conveyor for semiconductor processing.

Background

The processing of semiconductor wafers requires the use of automated or semi-automated equipment for the transport of materials, and because of the small size of the semiconductor, the use of conveyor belts for direct transport is not ideal and requires the use of specialized carriers to transport the wafers to the processing area.

The prior conveying device for processing the semiconductor has some problems, such as: the conveying efficiency of the conveying device is low, and multiple groups cannot be conveyed at one time, so that the productivity is influenced; the conveying device cannot automatically correct the arrangement of the carriers, and workers need to manually arrange the carriers and then convey the carriers, so that labor is wasted; the conveying process cannot be automatically steered, and the material can be taken by workers in a processing area inconveniently.

Therefore, a novel conveying device for semiconductor processing is proposed to overcome the above disadvantages.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a conveyor for semiconductor processing to the conveyor's that proposes in solving above-mentioned background art transport efficiency is low, can not once only carry the multiunit, influences the problem of productivity.

In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a conveyor is used in semiconductor processing, includes base and ball, the base is provided with two sets ofly, the equal swing joint in inside of base has ball, screw nut has been cup jointed in ball's the equal activity in outside, screw nut's one end fixedly connected with mounting bracket, the top swing joint of mounting bracket has the fluted disc, the top fixedly connected with pivot of fluted disc, the platform is carried to the top fixedly connected with of pivot, carry the bench end and placed the carrier, the inside range of carrier has the semiconductor wafer, logical groove has been seted up to the inside of carrying the platform, carry the first cylinder of one end fixedly connected with of platform bottom, the output of first cylinder is provided with first piston rod, first piston rod fixedly connected with second cylinder.

Preferably, a moving groove is formed in the right side of the bottom end of the conveying table, the top end of the second air cylinder is embedded in the moving groove to move, and a sliding ball is arranged between the moving groove and the second air cylinder.

Preferably, the output end of the second cylinder is provided with a second piston rod, the bottom end of the second piston rod is fixedly connected with a connecting plate, the top end of the connecting plate is fixedly connected with a limiting plate, and the limiting plate upwards penetrates through the through groove.

Preferably, the left side of fluted disc is provided with step motor, step motor's output fixedly connected with gear, the gear is connected with the fluted disc meshing, fluted disc and gear are the awl tooth.

Preferably, the left side fixedly connected with fixed plate on transport platform top, the right side fixedly connected with spring of fixed plate, the terminal surface fixedly connected with locating plate of spring, the spring is provided with four groups and equidistant distribution, locating plate and carrier butt.

Preferably, servo motor is installed on the right side of base, servo motor's output and ball fixed connection, ball is provided with two sets ofly and is parallel to each other.

Compared with the prior art, the beneficial effects of the utility model are that: the conveying device for semiconductor processing not only realizes automatic conveying, improves the processing efficiency, ensures the productivity, realizes automatic position correction and strong applicability, but also realizes rotary reversing in the conveying process and flexible material taking;

(1) The automatic conveying device is provided with the servo motor, the ball screw, the screw nut, the conveying table and the carriers, wherein the screw nut sleeved outside the ball screw converts rotation into linear motion to drive the conveying table to move horizontally integrally, so that a plurality of groups of carriers are conveyed to a processing area, a plurality of groups are conveyed at one time, the processing efficiency is improved through automatic conveying, and the productivity is ensured;

(2) Through the arrangement of the first air cylinder, the second air cylinder, the first piston rod, the second piston rod, the limiting plate, the fixing plate, the spring and the positioning plate, through the matching motion of the two groups of air cylinders, a plurality of groups of carriers can be regularly arranged and the positions of the carriers can be corrected, the automatic correction function is achieved, the carriers with different sizes can be clamped and carried, when the conveying table moves to a machining area, the limiting plate withdraws downwards, the carriers can be conveniently taken by workers, and the automatic correction device has high applicability;

(3) Through being provided with gear, fluted disc, step motor, mounting bracket, at transportation process, through gear and fluted disc meshing rotation, the tooth drives carries platform whole rotation, accomplishes the switching-over, and the processing personnel of being convenient for get the material, carry the platform and can accomplish 360 rotations of horizontal direction, carry more nimble.

Drawings

FIG. 1 is a schematic view of the front cross-sectional structure of the present invention;

fig. 2 is a schematic front view of the conveying table of the present invention;

fig. 3 is a schematic front view of the second cylinder of the present invention;

fig. 4 is a schematic view of the top view structure of the present invention.

In the figure: 1. positioning a plate; 2. a spring; 3. a fixing plate; 4. a conveying table; 5. a first cylinder; 6. a rotating shaft; 7. a stepping motor; 8. a lead screw nut; 9. a base; 10. a ball screw; 11. a servo motor; 12. a mounting frame; 13. a fluted disc; 14. a gear; 15. a first piston rod; 16. a second cylinder; 17. a second piston rod; 18. a connecting plate; 19. a limiting plate; 20. a through groove; 21. a carrier; 22. a semiconductor wafer; 23. a moving groove; 24. and (4) sliding the beads.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

Example 1: referring to fig. 1-4, a conveying device for semiconductor processing includes a base 9 and ball screws 10, the base 9 is provided with two groups, the ball screws 10 are movably connected inside the base 9, screw nuts 8 are movably sleeved outside the ball screws 10, one end of each screw nut 8 is fixedly connected with a mounting frame 12, the top end of a fluted disc 13 is fixedly connected with a rotating shaft 6, the top end of each rotating shaft 6 is fixedly connected with a conveying table 4, a carrier 21 is placed at the top end of each conveying table 4, and semiconductor wafers 22 are arranged inside the carrier 21;

a servo motor 11 is arranged on the right side of the base 9, the output end of the servo motor 11 is fixedly connected with a ball screw 10, and two groups of ball screws 10 are arranged and are parallel to each other;

specifically, as shown in fig. 1, fig. 2, fig. 3 and fig. 4, an output shaft of the servo motor 11 drives the ball screw 10 to rotate, a screw nut 8 sleeved outside the ball screw 10 converts the rotation into a linear motion, and drives the conveying table 4 to move horizontally as a whole, so that the plurality of groups of carriers 21 are conveyed to a processing area, and a plurality of groups of semiconductor wafers 22 are arranged in order in each group of carriers 21, so that the processing efficiency is improved through automatic conveying, and the productivity is ensured.

Example 2: a through groove 20 is formed in the conveying table 4, a first air cylinder 5 is fixedly connected to one end of the bottom of the conveying table 4, a first piston rod 15 is arranged at the output end of the first air cylinder 5, a second air cylinder 16 is fixedly connected to the first piston rod 15, a moving groove 23 is formed in the right side of the bottom end of the conveying table 4, the top end of the second air cylinder 16 is embedded in the moving groove 23 to move, a sliding ball 24 is arranged between the moving groove 23 and the second air cylinder 16, a second piston rod 17 is arranged at the output end of the second air cylinder 16, a connecting plate 18 is fixedly connected to the bottom end of the second piston rod 17, a limiting plate 19 is fixedly connected to the top end of the connecting plate 18, the limiting plate 19 upwards penetrates through the through groove 20, a fixing plate 3 is fixedly connected to the left side of the top end of the conveying table 4, a spring 2 is fixedly connected to the right side of the fixing plate 3, a positioning plate 1 is fixedly connected to the end face of the spring 2, the spring 2 is provided with four groups and distributed at equal intervals, and the positioning plate 1 is abutted to a carrier 21;

specifically, as shown in fig. 1, fig. 2, fig. 3 and fig. 4, a worker places carriers 21 on which semiconductor wafers 22 are arranged on a conveying table 4 and pushes the carriers forward until the carriers abut against a positioning plate 1, a first air cylinder 5 is started, a first piston rod 15 pushes a second air cylinder 16 to move forward, the second air cylinder 16 drives a second piston rod 17 to extend, a connecting plate 18 moves downward and then retracts, a limiting plate 19 extends upward from a through groove 20, the first piston rod 15 pulls back to move the limiting plate 19 to the left, so that the carriers 21 are clamped, the carriers 21 have a certain moving space under the action of a spring 2, so that multiple groups of carriers 21 can be arranged in order and the positions can be corrected automatically, the carriers 21 with different sizes can be clamped and carried by the matching motion of the two groups of air cylinders, when the conveying table 4 moves to a processing area, the limiting plate 19 retracts downward, the carriers 21 can be taken by the worker conveniently, and the carrier has strong applicability.

Example 3: a fluted disc 13 is movably connected to the top end of the mounting frame 12, a stepping motor 7 is arranged on the left side of the fluted disc 13, a gear 14 is fixedly connected to the output end of the stepping motor 7, the gear 14 is meshed with the fluted disc 13, and both the fluted disc 13 and the gear 14 are conical teeth;

specifically, as shown in fig. 1, fig. 2, fig. 3, and fig. 4, in the conveying process, the output shaft of the stepping motor 7 drives the gear 14 to rotate, the gear 14 drives the toothed disc 13 engaged therewith to rotate, and the toothed disc 13 drives the rotating shaft 6 to rotate, so as to drive the conveying table 4 to integrally rotate, complete the reversing, facilitate the material taking of the processing personnel, and enable the conveying table 4 to complete the 360-degree rotation in the horizontal direction, so that the conveying is more flexible.

The working principle is as follows: the utility model discloses when using, the staff places carrier 21 that will arrange semiconductor wafer 22 on carrying platform 4, and promote forward until it and locating plate 1 looks butt, start first cylinder 5, first piston rod 15 promotes second cylinder 16 and moves forward, second cylinder 16 drives second piston rod 17 and stretches out, connecting plate 18 moves down, then return and contract again, limiting plate 19 upwards stretches out from leading to groove 20, then first piston rod 15 draws back, move limiting plate 19 left side, thereby press from both sides carrier 21 tightly, play the effect of automatic correction, servo motor 11's output shaft drives ball 10 and rotates, ball 10 outside lead screw nut 8 that cup joints turns to the rotation linear motion, the whole horizontal migration of platform 4 is carried in the drive, thereby carry multiunit carrier 21 to the processing region, in transportation process, step motor 7's output shaft drives gear 14 and rotates, gear 14 drives the fluted disc 13 with it meshing and rotates, fluted disc 13 drives pivot 6 and rotates, thereby drive and carry platform 4 integral rotation, accomplish the switching-over, when carrying platform 4 moves to the processing region, then 19 downward completion limiting plate, transport withdrawal.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides a conveyor for semiconductor processing, includes base (9) and ball (10), its characterized in that: base (9) are provided with two sets ofly, the equal swing joint in inside of base (9) has ball (10), screw nut (8) have been cup jointed in the equal activity of outside of ball (10), one end fixedly connected with mounting bracket (12) of screw nut (8), the top swing joint of mounting bracket (12) has fluted disc (13), the top fixedly connected with pivot (6) of fluted disc (13), platform (4) are carried to the top fixedly connected with of pivot (6), carrier (21) have been placed on carrying platform (4) top, semiconductor wafer (22) have been arranged to the inside of carrier (21), logical groove (20) have been seted up to the inside of carrying platform (4), carry the first cylinder of one end fixedly connected with (5) of platform (4) bottom, the output of first cylinder (5) is provided with first piston rod (15), first piston rod (15) fixedly connected with second cylinder (16).

2. The conveying apparatus for semiconductor processing according to claim 1, wherein: a moving groove (23) is formed in the right side of the bottom end of the conveying table (4), the top end of the second air cylinder (16) is embedded in the moving groove (23) to move, and a sliding ball (24) is arranged between the moving groove (23) and the second air cylinder (16).

3. The conveying apparatus for semiconductor processing according to claim 1, wherein: the output end of the second air cylinder (16) is provided with a second piston rod (17), the bottom end of the second piston rod (17) is fixedly connected with a connecting plate (18), the top end of the connecting plate (18) is fixedly connected with a limiting plate (19), and the limiting plate (19) upwards penetrates through the through groove (20).

4. The conveying apparatus for semiconductor processing according to claim 1, wherein: the left side of fluted disc (13) is provided with step motor (7), the output fixedly connected with gear (14) of step motor (7), gear (14) are connected with fluted disc (13) meshing, fluted disc (13) are the awl tooth with gear (14).

5. The conveying apparatus for semiconductor processing according to claim 1, wherein: carry left side fixedly connected with fixed plate (3) on platform (4) top, the right side fixedly connected with spring (2) of fixed plate (3), the terminal surface fixedly connected with locating plate (1) of spring (2), spring (2) are provided with four groups and equidistant distribution, locating plate (1) and carrier (21) butt.

6. The conveying apparatus for semiconductor processing according to claim 1, wherein: servo motor (11) are installed on the right side of base (9), the output and ball (10) fixed connection of servo motor (11), ball (10) are provided with two sets and are parallel to each other.