CN218262742U

CN218262742U - Supporting structure applied to CVD (chemical vapor deposition) process

Info

Publication number: CN218262742U
Application number: CN202220871709.9U
Authority: CN
Inventors: 陈成; 王进
Original assignee: Foshan Zunshen Xinglian Technology Co ltd
Current assignee: Foshan Zunshen Xinglian Technology Co ltd
Priority date: 2022-04-15
Filing date: 2022-04-15
Publication date: 2023-01-10
Anticipated expiration: 2032-04-15

Abstract

The utility model relates to a mechanical structure technical field specifically is a be applied to bearing structure in CVD technology, include: the device comprises a substrate, a PIN base and a PIN head; the PIN bases are vertically and detachably arranged on the substrate; PIN head detachable install the top of PIN base, this be applied to bearing structure in the CVD technology can make between base plate, PIN base, the PIN head dismouting alone to this change of PIN base and PIN head when convenient use produces mechanical wear many times, the maintenance of the workman to equipment of being convenient for.

Description

Supporting structure applied to CVD (chemical vapor deposition) process

Technical Field

The utility model relates to a mechanical structure technical field specifically is a be applied to bearing structure in CVD technology.

Background

In the CVD (chemical vapor deposition) process in the liquid crystal panel manufacturing industry, a vacuum lock is used as a transmission channel for vacuum and atmosphere, a glass panel needs to be conveyed into the vacuum lock by an automatic robot arm and clamped by a clamp, the glass panel is conveyed into a transmission chamber after being vacuumized and conveyed to a process cavity by the vacuum robot arm, a Pin head of the vacuum lock plays a supporting role for the glass panel, the Pin head is usually fixed on a substrate of the vacuum lock in a welding mode, and the end of the Pin head is worn after long-term use, and the worn Pin head scratches the glass panel, so that the mode is not convenient for replacing the Pin head. In view of this, we propose a support structure for use in a CVD process.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a be applied to bearing structure in CVD technology to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

a support structure for use in a CVD process, comprising: the device comprises a substrate, a PIN base and a PIN head;

the PIN bases are vertically and detachably arranged on the substrate;

the PIN head is detachably mounted at the top end of the PIN base.

Preferably, a first thread groove is formed in the lower end face of the PIN base, and a second thread groove is formed in the upper end face of the PIN base;

the PIN head is in a bullet shape and is screwed at the top end of the PIN base through the second thread groove;

the base plate is provided with a threaded PIN, and the PIN base is screwed on the threaded PIN through the first thread groove.

Preferably, a first magnet is installed on the upper end face of the PIN base, and a slot is formed in the lower end face of the PIN base;

the PIN head is spherical and is adsorbed on the top end of the PIN base through a first magnet;

the base plate is welded with a positioning PIN, and the PIN base is inserted in the positioning PIN through the slot.

Preferably, a second magnet for adsorbing the positioning pin is further arranged in the slot.

Preferably, the upper end surface of the PIN base is provided with a groove, and the lower end surface of the PIN base is provided with a telescopic groove;

the PIN head is spherical and is movably arranged in the groove;

the base plate is welded with a plug PIN, a spring is mounted on the plug PIN, and the PIN base is inserted into the plug PIN through the telescopic groove.

Preferably, the groove is a groove body larger than a hemisphere.

Compared with the prior art, the beneficial effects of the utility model are that: this be applied to bearing structure in CVD technology can make dismouting alone between base plate, PIN base, the PIN head to this change of PIN base and PIN head when convenient use produces mechanical wear many times, the maintenance of the workman to equipment of being convenient for.

Drawings

Fig. 1 is a schematic view of the overall structure of embodiment 1 of the present invention;

fig. 2 is a schematic view of the overall structure of embodiment 2 of the present invention;

fig. 3 is a schematic view of the overall structure of embodiment 3 of the present invention;

fig. 4 is a schematic view of the overall structure of embodiment 4 of the present invention.

In the figure:

1. substrate

1a, a threaded pin; 1b, positioning pins; 1c, a bolt; 1d, a spring;

2. PIN base

2a, a first thread groove; 2b, a second thread groove; 2c, a first magnet; 2d, inserting a slot; 2e, a second magnet; 2f, a groove; 2g, a telescopic groove;

3. a PIN header.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the invention.

In the description of this patent, it is noted that unless otherwise specifically stated or limited, the terms "mounted," "connected," and "disposed" are to be construed broadly and can include, for example, fixedly connected, disposed, detachably connected, disposed, or integrally connected and disposed. The specific meaning of the above terms in this patent may be understood by one of ordinary skill in the art as appropriate.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "plurality" means two or more unless specifically limited otherwise.

Example 1

A support structure for use in a CVD process, as shown in fig. 1, comprising: the device comprises a substrate 1, a PIN base 2 and a PIN head 3; the PIN bases 2 are vertically and detachably arranged on the base plate 1 and are provided with a plurality of groups; PIN head 3 is detachably installed on the top of PIN base 2. Through above-mentioned scheme, can make between base plate 1, PIN base 2, the PIN head 3 dismouting alone to this change of PIN base 2 and PIN head 3 when convenient use produces mechanical wear many times, the workman of being convenient for is to the maintenance of equipment.

Example 2

Example 2 is a modification based on example 1, as shown in fig. 2, and the modification is that: the lower end face of the PIN base 2 is provided with a first thread groove 2a, and the upper end face of the PIN base 2 is provided with a second thread groove 2b; the PIN head 3 is bullet-shaped, and the PIN head 3 is screwed at the top end of the PIN base 2 through a second thread groove 2b; the base plate 1 is provided with a threaded PIN 1a, and the PIN base 2 is screwed on the threaded PIN 1a through a first threaded groove 2 a. Through set up first thread groove 2a and second thread groove 2b respectively at the both ends of PIN base 2 the upper end and the first 3 dismouting of PIN base 2 of being convenient for, lower extreme and the dismouting of base plate 1 to this is convenient for the independent dismouting between base plate 1, PIN base 2, the PIN head 3, and is easy and simple to handle, and bullet head-shaped PIN head 3 can reduce the frictional force of its surface and glass panels contact surface, avoids leaving the mar on the panel surface.

Example 3

Example 3 is a modification based on example 1, as shown in fig. 3, and the modification is that: the upper end face of the PIN base 2 is provided with a first magnet 2c, and the lower end face of the PIN base 2 is provided with a slot 2d; the PIN head 3 is spherical, and the PIN head 3 is adsorbed on the top end of the PIN base 2 through a first magnet 2 c; the base plate 1 is welded with a positioning PIN 1b, and the PIN base 2 is inserted into the positioning PIN 1b through a slot 2 d. Through the first magnet 2c and the slot 2d that set up, can realize adsorbing PIN head 3 in the upper end of PIN base 2 through first magnet 2c, fix on locating PIN 1b on base plate 1 through the lower extreme of PIN base 2 to this is convenient for base plate 1, PIN base 2, the independent dismouting between the PIN head 3, and spherical PIN head 3 can reduce the frictional force of its surface and glass panels contact surface, avoids leaving the mar on the panel surface.

Further, still be provided with the second magnet 2e that is used for adsorbing locating PIN 1b in the slot 2d, be convenient for fix more firm through second magnet 2e between with PIN base 2 and locating PIN 1b, avoid rocking and the risk that produces the piece at the in-process of glass panels removal operation.

Example 4

Example 4 is a modification based on example 1, as shown in fig. 4, and the modification is that: the upper end face of the PIN base 2 is provided with a groove 2f, and the lower end face of the PIN base 2 is provided with a telescopic groove 2g; the PIN head 3 is spherical, and the PIN head 3 is movably arranged in the groove 2 f; the base plate 1 is welded with a bolt 1c, the bolt 1c is provided with a spring 1d, and the PIN base 2 is inserted into the bolt 1c through a telescopic groove 2 g. Through recess 2f and flexible groove 2g that sets up on PIN base 2, can 3 cards of PIN head and in recess 2f, utilize flexible groove 2g to peg graft 2 bottoms of PIN base on bolt 1c simultaneously, and spring 1d on the bolt 1c can play an elastic support to PIN base 2, so that base plate 1, PIN base 2, the independent dismouting between the first 3 of PIN, simultaneously spring 1d and globular PIN head 3 can reduce the risk of glass panels fish tail and piece.

Further, recess 2f is for being greater than hemispherical cell body, and the restriction that spherical PIN head 3 can be stable in recess 2f of being convenient for, and makes spherical PIN head 3 roll in recess 2 f.

The foregoing shows and describes the basic principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. A support structure for use in a CVD process, comprising: the device comprises a substrate (1), a PIN base (2) and a PIN head (3);

the PIN bases (2) are provided with a plurality of groups and are vertically and detachably mounted on the base plate (1);

PIN head (3) detachable install the top of PIN base (2).

2. The support structure applied in the CVD process according to claim 1, wherein the lower end face of the PIN base (2) is provided with a first thread groove (2 a), and the upper end face of the PIN base (2) is provided with a second thread groove (2 b);

the PIN head (3) is bullet-shaped, and the PIN head (3) is screwed at the top end of the PIN base (2) through the second thread groove (2 b);

the base plate (1) is provided with a threaded PIN (1 a), and the PIN base (2) is screwed on the threaded PIN (1 a) through the first thread groove (2 a).

3. The support structure applied to the CVD process according to claim 1, wherein a first magnet (2 c) is installed on the upper end face of the PIN base (2), and a slot (2 d) is arranged on the lower end face of the PIN base (2);

the PIN head (3) is spherical, and the PIN head (3) is adsorbed at the top end of the PIN base (2) through a first magnet (2 c);

the base plate (1) is welded with a positioning PIN (1 b), and the PIN base (2) is inserted into the positioning PIN (1 b) through the inserting groove (2 d).

4. The support structure used in the CVD process according to claim 3, wherein a second magnet (2 e) for attracting the positioning pin (1 b) is further provided in the slot (2 d).

5. The support structure applied in the CVD process according to claim 1, wherein the upper end face of the PIN base (2) is provided with a groove (2 f), and the lower end face of the PIN base (2) is provided with a telescopic groove (2 g);

the PIN head (3) is spherical, and the PIN head (3) is movably arranged in the groove (2 f);

the base plate (1) is welded with a plug PIN (1 c), the plug PIN (1 c) is provided with a spring (1 d), and the PIN base (2) is inserted into the plug PIN (1 c) through the telescopic groove (2 g).

6. The support structure applied to the CVD process according to claim 5, wherein the groove (2 f) is a groove body with a shape larger than a hemisphere.