CN218215236U

CN218215236U - Pendulum piece end effector with force control function

Info

Publication number: CN218215236U
Application number: CN202221950573.7U
Authority: CN
Inventors: 冯恒毅
Original assignee: Haining Zhixing Technology Co ltd
Current assignee: Haining Zhixing Technology Co ltd
Priority date: 2022-07-25
Filing date: 2022-07-25
Publication date: 2023-01-03
Anticipated expiration: 2032-07-25

Abstract

The utility model provides a pendulum piece end effector with power accuse function, including being used for the connecting seat that links to each other with the robot tip, a serial communication port, install the conversion motor on the connecting seat, the output shaft tip and the shift lever middle part of conversion motor link to each other, the shift lever tip passes through the mounting and the crossbeam middle part links to each other, crossbeam end connection has the installation guide arm, sliding connection has two at least adjusting blocks on the installation guide arm, threaded connection has the hand screw on the adjusting block, still be connected with the sucking disc that is used for getting and put the wafer on the adjusting block, be provided with on the mounting and be used for with the umbrella shape frame detect the pressure sensor that the bump cooperation was used.

Description

Swing piece end effector with force control function

Technical Field

The utility model belongs to the technical field of machinery, a pendulum piece end effector is related to, especially a pendulum piece end effector with force control function.

Background

Wafer refers to a silicon wafer used for making silicon semiconductor circuits, the starting material of which is silicon. And dissolving the high-purity polycrystalline silicon, doping the dissolved high-purity polycrystalline silicon into silicon crystal seed crystals, and slowly pulling out the silicon crystal seed crystals to form cylindrical monocrystalline silicon. After the silicon crystal bar is ground, polished and sliced, a silicon wafer, namely a wafer, is formed. Domestic wafer production lines are dominated by 8 inches and 12 inches. In the production process of the wafer, a plurality of wafers need to be swung to an umbrella-shaped frame, namely, the wafer swinging operation is completed, then the umbrella-shaped frame is placed into a film coating machine to realize film coating, generally, the film coating can be completed through a robot, and the structure of the wafer swinging end effector in the existing robot is too simple, so that only one wafer can be grabbed at a time, therefore, the design of the wafer swinging end effector with the force control function is necessary.

Disclosure of Invention

The utility model aims at having the above-mentioned problem to current technique, provided a pendulum piece end effector with force control function, this pendulum piece end effector has the characteristics that the practicality is strong.

The purpose of the utility model can be realized by the following technical proposal: the utility model provides a pendulum piece end effector with power accuse function, is including being used for the connecting seat that links to each other with the robot tip, its characterized in that, install the conversion motor on the connecting seat, the output shaft tip and the switching rod middle part of conversion motor link to each other, the switching rod tip passes through the mounting and the crossbeam middle part links to each other, crossbeam end connection has the installation guide arm, sliding connection has two at least adjusting blocks on the installation guide arm, threaded connection has the hand screw on the adjusting block, still be connected with the sucking disc that is used for getting and put the wafer on the adjusting block, be provided with on the mounting be used for with the umbrella shape frame detect the pressure sensor that the bump cooperation was used.

Adopt this structure, can drive the switching lever through the conversion motor and rotate, make two sets of sucking discs on the switching lever switch work to this pendulum piece end effector during operation can snatch two wafers, simultaneously, through the position on the installation guide arm on the regulation adjusting block as required, can adjust the position of sucking disc, thereby satisfy not unidimensional wafer and get the demand, the practicality is strong.

The installation guide rod is provided with scale marks.

The fixing part is provided with a push-pull type clamp, a rod body of the push-pull type clamp is vertically arranged, and the pressure sensor is arranged at the end part of the rod body of the push-pull type clamp.

Still install the protection casing on the mounting, and in pressure sensor can the rebound shield, the opening has been seted up on the protection casing, it has the closing plate that can seal the opening to articulate on the protection casing, still have the bolt between closing plate and the protection casing.

By adopting the structure, when the pressure sensor is needed, the pressure sensor is moved downwards to be positioned at a working position through the push-pull type clamp; when not needed, the pressure sensor can be positioned in the protective cover; the interior of the protective cover can be conveniently checked through the closing plate.

The closing plate is also provided with a handle.

The shape of the fixing piece is L-shaped.

The fixing piece is provided with a yielding hole for the pressure sensor to pass through.

Compared with the prior art, this pendulum piece end effector with force control function has this advantage:

the utility model discloses in can drive the switching lever through the conversion motor and rotate, make two sets of sucking discs switching work on the switching lever to this pendulum piece end effector during operation can snatch two wafers, simultaneously, through installing the position on the guide arm on the regulation adjusting block as required, can adjust the position of sucking disc, thereby satisfy not unidimensional wafer and get the demand of putting, the practicality is strong.

Drawings

Fig. 1 is a schematic plan view of the entire robot;

fig. 2 is a schematic plan view of the present invention;

FIG. 3 is a schematic perspective view of the present invention with the parts removed;

FIG. 4 is a schematic perspective view of a push-pull type clamp of the present invention;

FIG. 5 is a perspective view of the umbrella frame;

in the figure, 1, a platform; 2. a robot; 3. converting the motor; 4. a switch lever; 5. a suction cup; 6. a fixing member; 6a, a yielding hole; 7. a cross beam; 8. a connecting seat; 9. installing a guide rod; 10. screwing the screw by hand; 11. an adjusting block; 12. a pressure sensor; 13. a bolt; 14. a handle; 15. a protective cover; 16. push-pull type clamp; 17. a closing plate; 18. an umbrella-shaped frame; 19. and detecting the salient points.

Detailed Description

The following are specific embodiments of the present invention and the accompanying drawings are used to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

As shown in fig. 1-5, the swing piece end effector with force control function includes a connecting base 8 for connecting with an end of a robot 2, in this embodiment, the robot 2 itself has a controller, the controller controls the robot 2 to operate according to the prior art, the robot 2 adopts the prior structure, and the robot 2 is mounted on a platform 1; the connecting seat 8 is provided with the conversion motor 3, the end part of an output shaft of the conversion motor 3 is connected with the middle part of the switching rod 4, the end part of the switching rod 4 is connected with the middle part of the cross beam 7 through the fixing part 6, the end part of the cross beam 7 is connected with the installation guide rod 9, the installation guide rod 9 is connected with at least two adjusting blocks 11 in a sliding way, and in the embodiment, each installation guide rod 9 is connected with two adjusting blocks 11 in a sliding way; the adjusting block 11 is in threaded connection with a hand screw 10, the adjusting block 11 is also connected with a suction cup 5 used for taking and placing a wafer, the fixing piece 6 is provided with a pressure sensor 12 used for being matched with a detection bump 19 on the umbrella-shaped frame 18, in the embodiment, the umbrella-shaped frame 18 is an existing product, the pressure sensor 12 is of an existing structure, the pressure sensor 12 can be connected with a controller in the prior art, the pressure sensor 12 is arranged to have a pressure detection function when the wafer is swung, when the suction cup 5 moves downwards to place the wafer on the umbrella-shaped frame 18, the pressure sensor 12 abuts against the detection bump 19, after the pressure sensor 12 reaches a set value, the suction cup 5 stops moving downwards, and finally the wafer is placed on the umbrella-shaped frame 18, so that the wafer is guaranteed not to be broken.

Adopt this structure, can drive switch lever 4 through conversion motor 3 and rotate, make two sets of sucking discs 5 switching work on the switch lever 4 to this pendulum piece end effector during operation can snatch two wafers, simultaneously, through adjusting the position on the adjusting block 11 last installation guide arm 9, can adjust the position of sucking disc 5 as required, thereby satisfy not unidimensional wafer and get the demand of putting, the practicality is strong.

The mounting guide rod 9 is provided with scale marks.

A push-pull type clamp 16 is arranged on the fixing piece 6, the rod body of the push-pull type clamp 16 is vertically arranged, and the pressure sensor 12 is arranged at the end part of the rod body of the push-pull type clamp 16.

Still install protection casing 15 on the mounting 6, and in pressure sensor 12 can the rebound reached protection casing 15, the opening has been seted up on the protection casing 15, it has the shut 17 that can seal the opening to articulate on the protection casing 15, bolt 13 still has between shut 17 and the protection casing 15.

With this structure, when the pressure sensor 12 is needed, the pressure sensor 12 is moved down to the working position by the push-pull type clamp 16; when not needed, the pressure sensor 12 can be positioned in the protective cover 15; the interior of the hood 15 can be easily viewed through the closing plate 17.

The closing plate 17 also has a handle 14 thereon.

The fixing member 6 has an L-shape.

The fixing member 6 has a relief hole 6a through which the pressure sensor 12 passes.

The above components are all standard components or components known to those skilled in the art, and the structure and principle thereof can be known to those skilled in the art through technical manuals or through routine experiments.

The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications, additions and substitutions for the specific embodiments described herein may be made by those skilled in the art without departing from the spirit of the invention or exceeding the scope of the invention as defined in the accompanying claims.

Claims

1. The utility model provides a pendulum piece end effector with power accuse function, is including being used for connecting seat (8) that link to each other with robot (2) tip, its characterized in that, install conversion motor (3) on connecting seat (8), the output shaft tip and the switching rod (4) middle part of conversion motor (3) link to each other, switching rod (4) tip passes through mounting (6) and crossbeam (7) middle part links to each other, crossbeam (7) end connection has installation guide arm (9), sliding connection has two at least adjusting blocks (11) on installation guide arm (9), threaded connection has hand screw (10) on adjusting block (11), still be connected with sucking disc (5) that are used for the wafer to get on adjusting block (11), be provided with on mounting (6) and be used for detecting pressure sensor (12) that bump (19) cooperation was used on umbrella-shaped frame (18).

2. The pendulum end-effector with force control according to claim 1, wherein the mounting guide (9) has graduation marks.

3. The force-controlled swing piece end effector is characterized in that a push-pull clamp (16) is installed on the fixed part (6), the rod body of the push-pull clamp (16) is vertically arranged, and the pressure sensor (12) is installed at the end of the rod body of the push-pull clamp (16).

4. The pendulum end-effector with force control function of claim 3, wherein the fixed part (6) further has a protective cover (15), and the pressure sensor (12) can move up into the protective cover (15), the protective cover (15) has an opening, the protective cover (15) has a closing plate (17) hinged thereto for closing the opening, and a latch (13) is further provided between the closing plate (17) and the protective cover (15).

5. Pendulum end-effector with force control according to claim 4, characterized in that the closing plate (17) further has a handle (14) thereon.

6. Pendulum end-effector with force control according to claim 1, characterized in that the shape of the fixation (6) is L-shaped.

7. The pendulum end-effector with force control according to claim 1, wherein the fixing member (6) has a relief hole (6 a) for the pressure sensor (12) to pass through.