CN218191593U - Sputtering target cleaning device - Google Patents
Sputtering target cleaning device Download PDFInfo
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- CN218191593U CN218191593U CN202120618696.XU CN202120618696U CN218191593U CN 218191593 U CN218191593 U CN 218191593U CN 202120618696 U CN202120618696 U CN 202120618696U CN 218191593 U CN218191593 U CN 218191593U
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Abstract
The utility model provides a belt cleaning device of sputter target, belt cleaning device passes through the rotating part and is connected with the operation panel, and belt cleaning device includes the dead lever that is close to the rotating part and keeps away from the movable rod of rotating part, and the dead lever includes two first poles, two first pole parallel symmetry settings, and two there is first space between the first pole, and the symmetry is provided with two at least fixed clamp splices in the first space, and the movable rod includes second dead lever and second movable rod, and second dead lever and the parallel symmetry setting of second movable rod, just there is the second space between second dead lever and the second movable rod, is provided with the second draw-in groove on the second dead lever, and the second movable rod is provided with the second draw-in groove with first draw-in groove same position department, between the second space, is located first draw-in groove and second draw-in groove department and is provided with movable clamp splice, belt cleaning device avoids touching at abluent in-process personnel and causes finger print and dirty remaining, promotes the cleaning performance, uses manpower sparingly simultaneously.
Description
Technical Field
The utility model relates to a target washs technical field, especially relates to a belt cleaning device of sputter target.
Background
In the production process of semiconductor chips, the alloy targets such as titanium targets, tantalum targets, aluminum targets, copper targets and the like in the sputtering of the targets all comprise 300MM sputtering targets. One process of the 300MM target material in the production and manufacturing process is surface cleaning, which influences that the 300MM target material can discharge abnormally during sputtering to cause wafer scrap.
In the field of sputtering target application, extremely strict standards are set for the aspects of metal material purity, internal microstructure and the like of the sputtering target by a semiconductor chip, and a product meeting the process requirements can be prepared by mastering key technologies in the production process and long-term practice, so that the cleanliness of the surface of a 300MM target has great influence on the sputtering of the target. The prior art has the problems of poor cleaning effect on the target material and poor outer surface cleanliness.
CN208991371U discloses a belt cleaning device is used in processing of efficient target, which comprises a housin, wash cavity and stoving cavity, wash the inner wall lateral wall fixedly connected with submergence purger of cavity, the submergence purger includes supersound waterproof probe and connecting plate, the right side fixedly connected with of supersound waterproof probe reinforces the clean shot, one side of submergence purger is provided with placer, placer includes the fixed plate, the last fixed surface of fixed plate is connected with the shelves strip, the equal symmetric processing in both sides of shelves strip has the draw-in groove, the bottom of draw-in groove welds each other with the upper surface of fixed plate, wash the right side fixedly connected with baffle of cavity, the inside wall fixedly connected with stoving board of stoving cavity, but the device structure is complicated.
CN211247508U discloses a high-efficient belt cleaning device is used in processing of cylindricality target, including box and supporting legs, the equal rigid coupling in both sides has the supporting legs around the below of box both ends, the internally mounted of box has the subassembly of cleaning, clean the outside of subassembly and install the washing subassembly, the inboard top of third spring all is equipped with the cushion, the cushion links to each other with the second diaphragm is fixed, but the device structure is complicated.
CN211303967U discloses a target processing and cleaning device, which comprises a cleaning box, a storage rack fixedly disposed in the cleaning box for placing a target, a water storage chamber disposed below the storage rack, a spraying device disposed on the top wall of the cleaning box and located above the storage rack, a first air supply cylinder fixedly disposed outside the first side wall of the cleaning box and communicated with the cleaning box, a second air supply cylinder fixedly disposed outside the second side wall of the cleaning box and communicated with the cleaning box, a first drying fan fixedly disposed in the first air supply cylinder and blowing air into the cleaning box, a second drying fan fixedly disposed in the second air supply cylinder and blowing air into the cleaning box, a window disposed on the front side of the cleaning box, and a transparent cover plate rotatably opened and disposed outside the window, wherein the storage rack is provided with a plurality of water leakage holes penetrating through the storage rack, the first air supply cylinder is obliquely disposed outside the first side wall of the cleaning box, the second end of the first air supply cylinder is communicated with the cleaning box, but the device has a complex structure.
Therefore, there is a need to develop a cleaning device for a target material, which has a simple structure and can prevent the target material from being left with fingerprints and dirt due to the touch of a person during the cleaning process.
SUMMERY OF THE UTILITY MODEL
In view of the problems in the prior art, the utility model provides a belt cleaning device who sputters target, belt cleaning device sets up on the operation panel, is connected with the operation panel through the rotating part, and belt cleaning device includes the dead lever that is close to the rotating part and the movable rod of keeping away from the rotating part, and the dead lever includes two first poles, two first pole parallel symmetry settings, and two there is first space between the first pole, and the symmetry is provided with two at least fixed clamp splice in the first space, and the movable rod includes second dead lever and second movable rod, and second dead lever and second movable rod parallel symmetry set up, just there is the second space between second dead lever and the second movable rod, is provided with the second draw-in groove on the second dead lever, and second movable rod and first draw-in groove same position department are provided with the second draw-in groove, between the second space, lie in first draw-in groove and second draw-in groove department and be provided with movable clamp splice, belt cleaning device avoids touching the remaining that causes finger mark and dirty at abluent in-process, promotes the cleaning performance, uses manpower sparingly simultaneously, improves cleaning efficiency.
To achieve the purpose, the utility model adopts the following technical proposal:
the utility model provides a cleaning device for sputtering target materials, which is arranged on an operation table; the cleaning device is connected with the operating table through a rotating part; the cleaning device comprises a fixed rod close to the rotating part and a movable rod far away from the rotating part; the fixing rod comprises two first rods; the two first rods are symmetrically arranged in parallel, and a first gap is formed between the two first rods; at least two fixed clamping blocks are symmetrically arranged in the first gap; the movable rod comprises a second fixed rod and a second movable rod; the second fixed rod and the second movable rod are symmetrically arranged in parallel, and a second gap is formed between the second fixed rod and the second movable rod; a first clamping groove is formed in the second fixed rod, and a second clamping groove is formed in the position, which is the same as the first clamping groove, of the second movable rod; a movable clamping block is arranged between the first clamping groove and the second clamping groove between the second gaps; one end of the second movable rod is movably connected with one end of the second fixed rod; the other end of the second movable rod is provided with a detachable connecting part connected with the other end of the second fixed rod.
The cleaning device is connected with the operating platform through the rotating part, so that the cleaning device is converted from a horizontal state to a vertical state, the horizontal state is convenient for mounting and dismounting the target material, the vertical state is convenient for cleaning the target material, a fixed rod and a movable rod in the cleaning device are used for fixing the target material, two first rods in the fixed rod are parallel and symmetrical, a first gap is formed between the two first rods, at least two fixed clamping blocks are symmetrically arranged in the first gap, and the fixed clamping blocks can be stabilized by bolts and nuts and used for positioning when the target material is fixed; the movable clamping block can move in the first clamping groove and the second clamping groove in the movable rod, the target can be fastened, the movable clamping block can be stabilized by bolts and nuts, and therefore the target is fixed, one end of the second movable rod is movably connected with one end of the second fixed rod in the movable rod, the other end of the second movable rod is provided with a detachable connecting portion connected with the other end of the second fixed rod, and installation and unloading of the target are facilitated.
Preferably, the distance between the movable rod and the fixed rod is 200-250 mm, such as 200mm, 210mm, 220mm, 230mm, 240mm or 250 mm.
Preferably, an operating rod is arranged on one side of the movable rod far away from the fixed rod.
Preferably, the ratio of the distance between the operating rod and the movable rod to the distance between the movable rod and the fixed rod is 2-3, and may be, for example, 2, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9 or 3.
Preferably, the cleaning device further comprises two third connecting rods connecting both ends of the movable rod and the fixed rod.
Preferably, the cleaning device further comprises two fourth connecting rods connecting the two ends of the movable rod and the operating rod.
The utility model discloses it is right can dismantle the connecting portion do not have special restriction, can adopt the part that can dismantle the connection that technical personnel in the field are familiar with can.
Preferably, the fixing clamp block is provided with a through hole.
Preferably, the material of the fixed clamping block comprises PPS plastic.
Preferably, the movable clamping block is provided with a through hole.
Preferably, the material of the movable clamping block comprises PPS plastic.
Preferably, the fixed clamping block and the movable clamping block are the same in shape and size.
The shape of the fixed clamping block and the movable clamping block is not particularly limited, and the clamping blocks which can be used for fixing the target and are well known to the technical personnel in the field can be adopted.
Preferably, the material of other parts of the cleaning device except the fixed clamping block and the movable clamping block comprises 304 stainless steel.
Preferably, a circumferential groove is formed in the middle of the fixed clamping block.
Preferably, a circumferential groove is formed in the middle of the movable clamping block.
Preferably, the diameter of the through hole of the fixing clamp block is 14-18 mm, for example, 14mm, 14.5mm, 15mm, 15.5mm, 16mm, 16.5mm, 17mm, 17.5mm, 18mm, etc.
Preferably, the diameter of the through hole of the movable clamping block is 14-18 mm, for example, 14mm, 14.5mm, 15mm, 15.5mm, 16mm, 16.5mm, 17mm, 17.5mm, 18mm, etc.
Preferably, the ratio of the distance between the fixing clamping blocks to the length of the fixing rod is 0.3-0.4, and may be, for example, 0.3, 0.31, 0.32, 0.33, 0.34, 0.35, 0.36, 0.37, 0.38, 0.39, 0.4, etc.
Preferably, the ratio of the length of the first card slot to the length of the movable rod is greater than or equal to 1.
The ratio of the length of the second card slot to the length of the movable rod is more than or equal to 1, and can be, for example, 1.
Preferably, the number of the first card slots is 1 to 2, and may be 1 or 2, for example.
Preferably, the number of the second card slots is 1 to 2, and may be 1 or 2, for example.
The utility model provides a cleaning method of target, the method adopts the cleaning device of sputtering target, including the following steps:
(1) Horizontally placing the cleaning device for the sputtering target on an operation table, opening a second movable rod, and moving the movable clamping block to two ends of the movable rod along the first clamping groove and the second clamping groove;
(2) Horizontally placing a 300mm target material in a circumferential groove of the fixed clamping block, closing the second movable rod, moving the movable clamping block to the middle part along the first clamping groove and the second clamping groove, fixing the 300mm target material in the circumferential groove with accelerated movement, and fixing the movable clamping block by using nuts and bolts;
(3) The cleaning device for the sputtering target is vertically placed on an operation table and is placed on a feeding rail of cleaning equipment for cleaning.
Compared with the prior art, the utility model discloses following beneficial effect has at least:
(1) The utility model provides a cleaning device for sputtering target, the cleaning device adopts at least two fixed clamping blocks and two movable clamping blocks to fix the target, wherein the fixed clamping blocks are the same as the movable clamping blocks, and the fixed rods and the movable rods are combined to facilitate the installation and the uninstallation of the target, the structure is simple, and the operation is simple and convenient;
(2) The utility model provides a belt cleaning device of sputter target conveniently places the target in cleaning equipment's track, can avoid touching of abluent in-process personnel to cause finger print and dirty remaining, has promoted the cleaning performance, makes the washing cleaner, uses manpower sparingly simultaneously, improves the cleaning efficiency.
Drawings
Fig. 1 is a front view of a cleaning apparatus for a sputtering target according to embodiment 1 of the present invention.
Fig. 2 is a left side view of the cleaning apparatus for a sputtering target according to embodiment 1 of the present invention.
In the figure: 1-fixing the rod; 2-a movable rod; 3-fixing the clamping block; 4-movable clamping blocks; 5-a first card slot; 6-operating rod; 7-a third connecting rod; 8-fourth connecting rod.
Detailed Description
The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.
The present invention will be described in further detail below. However, the following examples are merely exemplary of the present invention and do not represent or limit the scope of the present invention, which is defined by the appended claims.
1. Examples of the embodiments
Example 1
The present embodiment provides a cleaning apparatus for a sputtering target, as shown in fig. 1 and 2, the cleaning apparatus is disposed on an operation table and connected to the operation table through a rotating portion; the cleaning device comprises a fixed rod 1 close to the rotating part and a movable rod 2 far away from the rotating part, the distance between the movable rod 2 and the fixed rod 1 is 225mm, an operating rod 6 is arranged on one side of the movable rod 2 far away from the fixed rod 1, the ratio of the distance between the operating rod 6 and the movable rod 2 to the distance between the movable rod 2 and the fixed rod 1 is 2.5, the fixed rod 1 comprises two first rods, the first rods are symmetrically arranged in parallel, a first gap is formed between the two first rods, two fixed clamping blocks 3 made of PPS (polyphenylene sulfide) plastic are symmetrically arranged in the first gap, through holes with the diameter of 16mm are arranged in the fixed clamping blocks 3, a circumferential groove is arranged in the middle of the fixed clamping blocks, the ratio of the distance between the fixed clamping blocks 3 to the length of the fixed rod 1 is 0.35, the movable rod 2 comprises a second fixed rod 1 and a second movable rod, and the second fixed rod 1 and the second movable rod are symmetrically arranged in parallel, and a second gap exists between the second fixed rod 1 and the second movable rod, two first clamping grooves 5 are arranged on the second fixed rod 1, two second clamping grooves are arranged at the same positions of the second movable rod and the first clamping grooves 5, the ratio of the length of the first clamping grooves 5 to the length of the movable rod 2 is 1, the cleaning device also comprises two fourth connecting rods 8 which are connected with the two ends of the movable rod 2 and the operating rod 6.
Example 2
The embodiment provides a cleaning device for a sputtering target, which is arranged on an operating platform and is connected with the operating platform through a rotating part; the cleaning device comprises a fixed rod close to the rotating part and a movable rod far away from the rotating part, the distance between the movable rod and the fixed rod is 200mm, an operating rod is arranged on one side of the movable rod, which is far away from the fixed rod, the ratio of the distance between the operating rod and the movable rod to the distance between the movable rod and the fixed rod is 2, the fixed rod comprises two first rods which are symmetrically arranged in parallel, and a first gap is arranged between the two first rods, two fixed clamping blocks made of PPS plastic are symmetrically arranged in the first gap, through holes with the diameter of 14mm are arranged in the fixed clamping blocks, a circumferential groove is arranged in the middle of each fixed clamping block, the ratio of the distance between the fixed clamping blocks to the length of the fixed rods is 0.3, each movable rod comprises a second fixed rod and a second movable rod, the second fixed rods and the second movable rods are symmetrically arranged in parallel, and a second gap is formed between the second fixed rod and the second movable rod, two first clamping grooves are arranged on the second fixed rod, two second clamping grooves are arranged at the same positions of the second movable rod and the first clamping grooves, the ratio of the length of the first clamping grooves to the length of the movable rods is 1, between the second space, be located first draw-in groove and second draw-in groove department and be provided with two materials for the activity clamp splice of PPS plastics, be provided with the through-hole that the diameter is 14mm in the activity clamp splice, the middle part is provided with the circumference recess, the one end of second movable rod and the one end swing joint of second dead lever, the other end of second movable rod is provided with the connecting portion of dismantling of being connected with the other end of second dead lever, belt cleaning device is still including connecting two third connecting rods at the both ends of movable rod and dead lever, belt cleaning device is still including connecting two fourth connecting rods at the both ends of movable rod and action bars.
Example 3
The embodiment provides a cleaning device for a sputtering target, which is arranged on an operating platform and is connected with the operating platform through a rotating part; the cleaning device comprises a fixed rod close to the rotating part and a movable rod far away from the rotating part, the distance between the movable rod and the fixed rod is 250mm, an operating rod is arranged on one side of the movable rod, which is far away from the fixed rod, the ratio of the distance between the operating rod and the movable rod to the distance between the movable rod and the fixed rod is 3, the fixed rod comprises two first rods which are symmetrically arranged in parallel, a first gap is arranged between the two first rods, two fixed clamping blocks made of PPS plastic are symmetrically arranged in the first gap, through holes with the diameter of 18mm are arranged in the fixed clamping blocks, a circumferential groove is arranged in the middle of the fixed clamping blocks, the ratio of the distance between the fixed clamping blocks to the length of the fixed rods is 0.4, the movable rods comprise second fixed rods and second movable rods which are symmetrically arranged in parallel, and a second gap is formed between the second fixed rod and the second movable rod, a first clamping groove is arranged on the second fixed rod, a second clamping groove is arranged at the same position of the second movable rod as the first clamping groove, the ratio of the length of the first clamping groove to the length of the movable rod is 1, between the second space, be located first draw-in groove and second draw-in groove department and be provided with two materials for the activity clamp splice of PPS plastics, be provided with the through-hole that the diameter is 18mm in the activity clamp splice, the middle part is provided with the circumference recess, the one end of second movable rod and the one end swing joint of second dead lever, the other end of second movable rod is provided with the connecting portion of dismantling of being connected with the other end of second dead lever, belt cleaning device is still including connecting two third connecting rods at the both ends of movable rod and dead lever, belt cleaning device is still including connecting two fourth connecting rods at the both ends of movable rod and action bars.
2. Application example
Application example 1
The present application example provides a method for cleaning a target, which uses the cleaning apparatus for a sputtering target in embodiment 1, and includes the steps of:
(1) Horizontally placing the cleaning device for sputtering the target material on an operation table, opening a second movable rod, and moving the movable clamping block to two ends of the movable rod along the first clamping groove and the second clamping groove;
(2) Horizontally placing a 300mm target material in a circumferential groove of the fixed clamping block, closing the second movable rod, moving the movable clamping block to the middle part along the first clamping groove and the second clamping groove, fixing the 300mm target material in the circumferential groove with accelerated movement, and fixing the movable clamping block by using nuts and bolts;
(3) The cleaning device for the sputtering target is vertically placed on an operation table and is placed on a feeding track of cleaning equipment for cleaning.
Application examples 2 to 3
Application examples 2 to 3 provide a method for cleaning a target, which is different from application example 1 only in that the cleaning apparatus for a sputtering target in examples 2 to 3 was used, and the rest was the same as application example 1.
The utility model discloses with the belt cleaning device of sputtering target among embodiment 1 ~ 3, be applied to the cleaning process of 300mm target, easy and simple to handle, the cleaning performance is good, follow-up target sputtering in-process abnormal conditions does not appear being applied to.
The utility model discloses in the belt cleaning device that provides adopt two at least fixed clamp splices and two fixed target materials of activity clamp splice, wherein fixed clamp splice is the same with the activity clamp splice, combines second dead lever and second movable rod in dead lever, the movable rod, makes things convenient for the installation and the uninstallation of target, belt cleaning device conveniently places the target in cleaning equipment's track, can avoid touching of abluent in-process personnel to cause finger print and dirty remaining, has promoted the cleaning performance, makes the washing cleaner, uses manpower sparingly simultaneously, improves the cleaning efficiency.
The applicant states that the present invention is described by the above embodiments, but the present invention is not limited to the above detailed structural features, and the present invention can be implemented only by relying on the above detailed structural features. It should be clear to those skilled in the art that any modifications to the present invention, to the equivalent replacement of selected parts and the addition of auxiliary parts, the selection of specific modes, etc., all fall within the scope of protection and disclosure of the present invention.
Claims (10)
1. The cleaning device for the sputtering target is characterized in that the cleaning device is arranged on an operating platform;
the cleaning device is connected with the operating table through the rotating part;
the cleaning device comprises a fixed rod close to the rotating part and a movable rod far away from the rotating part;
the fixing rod comprises two first rods;
the two first rods are symmetrically arranged in parallel, and a first gap is formed between the two first rods;
at least two fixed clamping blocks are symmetrically arranged in the first gap;
the movable rod comprises a second fixed rod and a second movable rod;
the second fixed rod and the second movable rod are symmetrically arranged in parallel, and a second gap is formed between the second fixed rod and the second movable rod;
a first clamping groove is formed in the second fixing rod;
a second clamping groove is formed in the position, which is the same as the first clamping groove, of the second movable rod;
a movable clamping block is arranged between the first clamping groove and the second clamping groove between the second gaps;
one end of the second movable rod is movably connected with one end of the second fixed rod;
the other end of the second movable rod is provided with a detachable connecting part connected with the other end of the second fixed rod.
2. The cleaning device for a sputtering target according to claim 1, wherein the fixing clamp block is provided with a through hole.
3. The cleaning device for a sputtering target according to claim 1, wherein the movable clamping block is provided with a through hole.
4. The cleaning device for a sputtering target according to claim 1, wherein a circumferential groove is provided in the middle of the fixing clamp.
5. The cleaning device for a sputtering target according to claim 1, wherein a circumferential groove is provided in the middle of the movable clamping block.
6. The cleaning device for a sputtering target according to claim 1, wherein the diameter of the through hole of the fixing clamp is 14 to 18mm.
7. The cleaning device for a sputtering target according to claim 1, wherein the diameter of the through hole of the movable clamp block is 14 to 18mm.
8. The cleaning apparatus for a sputtering target according to claim 1, wherein a ratio of a distance between the fixing clamping blocks to a length of the fixing bar is 0.3 to 0.4.
9. The cleaning device for the sputtering target according to claim 1, wherein the ratio of the length of the first clamping groove to the length of the movable rod is greater than or equal to 1;
the ratio of the length of the second clamping groove to the length of the movable rod is more than or equal to 1.
10. The cleaning device for a sputtering target according to claim 1, wherein the number of the first clamping grooves is 1 to 2;
the number of the second clamping grooves is 1-2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120618696.XU CN218191593U (en) | 2021-03-26 | 2021-03-26 | Sputtering target cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120618696.XU CN218191593U (en) | 2021-03-26 | 2021-03-26 | Sputtering target cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218191593U true CN218191593U (en) | 2023-01-03 |
Family
ID=84628096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120618696.XU Active CN218191593U (en) | 2021-03-26 | 2021-03-26 | Sputtering target cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218191593U (en) |
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2021
- 2021-03-26 CN CN202120618696.XU patent/CN218191593U/en active Active
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