CN218059189U - Adjustable screw thread molybdenum ring device of diamond growth - Google Patents
Adjustable screw thread molybdenum ring device of diamond growth Download PDFInfo
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- CN218059189U CN218059189U CN202121807653.2U CN202121807653U CN218059189U CN 218059189 U CN218059189 U CN 218059189U CN 202121807653 U CN202121807653 U CN 202121807653U CN 218059189 U CN218059189 U CN 218059189U
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Abstract
The utility model discloses a threaded molybdenum ring device with adjustable diamond growth, which solves the technical problem that the distance between diamond and plasma needs to be continuously adjusted to interrupt the growth of the diamond in the existing diamond growth process, and comprises a water-cooling table and a molybdenum ring arranged on the top surface of the water-cooling table, wherein a diamond material is arranged in the molybdenum ring, and the plasma is arranged above the diamond material; the molybdenum ring consists of an inner molybdenum ring and an outer molybdenum ring, and the inner molybdenum ring is connected in the outer molybdenum ring in a threaded mode. The utility model has the advantages of simple structure and scientific and reasonable design, convenient to use has adopted adjustable screw thread molybdenum ring, along with the interval of growth thickness increase regulation diamond and plasma, makes it maintain high-speed growth under higher power and suitable temperature all the time.
Description
Technical Field
The utility model belongs to the technical field of the diamond is made, concretely relates to adjustable screw thread molybdenum ring device of diamond growth.
Background
The MPCVD method, i.e. the chemical vapor deposition method, is a common method for producing synthetic diamonds and has made great progress at present. The MPCVD method comprises introducing microwave generated by microwave generator into reactor via isolator and introducing CH 4 And H 2 Under the excitation of microwave, glow discharge is produced in the reaction chamber to ionize the molecules of the reaction gas and produce plasma, and diamond film is deposited on the substrate. The method mainly aims to improve input power and avoid etching pollution of plasma to a microwave window, and the existing quartz tube type, quartz bell jar type and cylindrical resonant cavity type MPCVD adopted at present are not ideal enough in terms of power input and avoidance of etching of plasma to the quartz window. However, with the improvement of the apparatus and method, there is a multi-mode non-cylindrical cavity MPCVD method, in which the microwave is inputted from the lower part of the cavity and the diamond sample stage is fixed, and thicker single crystal or polycrystalline diamond is grown (by using a diamond sample stage)>1 mm), the distance between the diamond surface and the plasma is closer and closer along with the increase of the thickness, the growth temperature is higher and higher, the microwave input power or the cavity pressure is required to be reduced to maintain the growth temperature, and the reduction of the microwave power causes the reduction of the growth rate.
The above-mentioned unstable growth conditions are not conducive to the improvement of the production efficiency and quality of diamond, and the current solution is intermittent growth, i.e., the growth is interrupted when the growth thickness of diamond reaches a certain value, and the diamond is treated and placed in a deeper growth mold to achieve a suitable growth temperature at a high power. The above repeated operation requires a series of molybdenum material molds of different depths, which not only increases the production cost, but also reduces the production efficiency.
Therefore, the utility model provides an adjustable screw thread molybdenum ring device of diamond growth solves the technical problem that need constantly adjust between diamond and the plasma and break off its growth among the current diamond growth process, has adopted adjustable screw thread molybdenum ring, along with the interval of growth thickness increase regulation diamond and plasma, makes it maintain high-speed growth under higher power and suitable temperature all the time.
SUMMERY OF THE UTILITY MODEL
The to-be-solved technical problem of the utility model is: the utility model provides an adjustable screw thread molybdenum ring device of diamond growth, solves current technical problem.
In order to achieve the above object, the utility model adopts the following technical scheme:
a thread molybdenum ring device with adjustable diamond growth comprises a water-cooling table and a molybdenum ring arranged on the top surface of the water-cooling table, wherein a diamond material is arranged in the molybdenum ring, and plasma is arranged above the diamond material; the molybdenum ring consists of an inner molybdenum ring and an outer molybdenum ring, and the inner molybdenum ring is connected with the outer molybdenum ring in a threaded manner.
Further, the inner diameter of the outer molybdenum ring is consistent with the outer diameter of the inner molybdenum ring.
Furthermore, an outer molybdenum ring internal thread is formed on the inner wall of the outer molybdenum ring, an inner molybdenum ring external thread matched with the outer molybdenum ring internal thread is formed on the outer wall of the inner molybdenum ring, and the outer wall of the inner molybdenum ring is connected with the inner wall of the outer molybdenum ring through threads.
Further, the height of the inner molybdenum ring is greater than that of the outer molybdenum ring.
Further, the water cooling platform is of a cylindrical structure, and a water cooling groove used for placing the diamond material is formed in the top surface of the water cooling platform.
Furthermore, the water-cooling groove is a circular groove, and the diameter of the water-cooling groove is consistent with the outer diameter of the outer molybdenum ring.
Furthermore, the inner wall of the water-cooling groove is provided with a groove internal thread, the outer wall of the outer molybdenum ring is provided with an outer molybdenum ring external thread matched with the groove internal thread, and the outer wall of the outer molybdenum ring is connected with the inner wall of the water-cooling groove through a thread.
Furthermore, the water cooling table is of a cavity structure, and a cooling water inlet is formed in the bottom of the water cooling table.
Further, the water cooling platform is made of copper materials.
Compared with the prior art, the utility model discloses following beneficial effect has:
the utility model has the advantages of simple structure and scientific and reasonable design, convenient to use solves the technical problem that need constantly adjust the distance between diamond and the plasma and interrupt its growth among the current diamond growth process, has adopted adjustable screw thread molybdenum ring, along with the interval of growth thickness increase regulation diamond and plasma, makes it maintain high-speed growth under higher power and suitable temperature all the time.
The utility model discloses a but the molybdenum ring of screw thread regulation diamond and plasma interval, molybdenum ring comprises interior molybdenum ring and outer molybdenum ring, and interior molybdenum ring threaded connection is in outer molybdenum ring and can reciprocate for outer molybdenum ring. When the diamond material is thin in the initial growth stage, the inner molybdenum ring is rotated by the screw thread to enable the diamond material to be at a proper distance from the plasma; when the growth is in the middle and later stages, the thickness of the diamond material is increased, the inner molybdenum ring is rotated by the screw thread to move upwards so that the thickness of the inner molybdenum ring is matched with the thickness of the inner molybdenum ring, and the distance between the diamond material and the plasma meets the growth requirement. The utility model discloses can be applied to the whole process that the diamond grows completely, application range is wide, has reduced manufacturing cost, has improved production efficiency.
Drawings
Fig. 1 shows a schematic structure of the present invention.
Fig. 2 shows a structure of the present invention.
FIG. 3 is a plan view of a water cooled stage.
FIG. 4 is a view showing the structure of a water cooling table.
Fig. 5 is a top view of a molybdenum ring.
Fig. 6 is a structural view of an inner molybdenum ring.
Fig. 7 is a structural view of an outer molybdenum ring.
Wherein, the names corresponding to the reference numbers are:
1-water cooling table, 2-molybdenum ring, 3-diamond material, 4-plasma, 11-water cooling groove, 12-cooling water inlet, 21-inner molybdenum ring, 22-outer molybdenum ring, 111-groove internal thread, 211-inner molybdenum ring external thread, 221-outer molybdenum ring internal thread and 222-outer molybdenum ring external thread.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and thus, it should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; of course, mechanical connection and electrical connection are also possible; alternatively, they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
As shown in fig. 1-7, the utility model provides a pair of adjustable screw thread molybdenum ring device of diamond growth, simple structure, design scientific and reasonable, convenient to use solves the technical problem that need constantly adjust between diamond material 3 and the plasma 4 distance and interrupt its growth among the current diamond growth process, but has adopted screw thread regulation's molybdenum ring 2, along with the interval of growth thickness increase regulation diamond material 3 and plasma 4, makes it maintain high-speed growth under higher power and suitable temperature all the time.
The utility model comprises a water cooling table 1 and a molybdenum ring 2 arranged on the top surface of the water cooling table 1, wherein diamond materials 3 are arranged in the molybdenum ring 2, and plasmas 4 are arranged above the diamond materials 3; the molybdenum ring 2 is composed of an inner molybdenum ring 21 and an outer molybdenum ring 22, and the inner molybdenum ring 21 is screwed into the outer molybdenum ring 22 and can move up and down relative to the outer molybdenum ring 22. When the diamond material 3 is thin in the initial growth stage, the inner molybdenum ring is rotated by the screw thread to enable the diamond material 3 to be at a proper distance from the plasma 4; when the thickness of the diamond material 3 is increased in the middle and later growth stages, the inner molybdenum ring 21 is rotated by the screw thread to move upwards to match the growth thickness at the moment, and the distance between the diamond material 3 and the plasma 4 meets the growth requirement. The utility model discloses can be applied to the whole process that the diamond grows completely, application range is wide, has reduced manufacturing cost, has improved production efficiency.
The utility model discloses outer molybdenum ring 22 internal diameter is unanimous with interior molybdenum ring 21 external diameter, and interior molybdenum ring 21 highly is greater than outer molybdenum ring 22 height, has seted up outer molybdenum ring internal thread 221 on the outer molybdenum ring 22 inner wall, sets up the interior molybdenum ring external screw thread 211 with outer molybdenum ring internal thread 221 looks adaptation on the interior molybdenum ring 21 outer wall, passes through threaded connection between interior molybdenum ring 21 outer wall and the outer molybdenum ring 22 inner wall.
In the initial growth stage, the diamond material 3 is thin, and the distance between the surface of the diamond material and the plasma 4 is proper, so that the diamond material is suitable for the growth of diamond. As the growth continues, the thickness of the diamond material 3 increases and the distance from the plasma 4 gradually decreases, causing the growth temperature of the diamond material 3 to increase, at which time the growth power or growth pressure may be slightly decreased to maintain the temperature stable, and at the same time, the inner molybdenum ring 21 is rotated to a certain height, so that the distance between the plasma 4 and the surface of the diamond material 3 is close to that in fig. 1.
In the middle and later growth stages, as the diamond material 3 continues to grow, its thickness continues to increase, the growth power and growth pressure are no longer suitable for growing high quality diamond material 3, at which point the apparatus is closed, the sample material is removed, and the above steps are repeated, i.e. the inner molybdenum ring 21 is rotated so that its relative height continues to be greater than the outer molybdenum ring 22 until the optimum spacing between the diamond material 3 and the plasma 4 is reached, as shown in figure 2. And repeating the steps continuously as the production continues until a diamond of a suitable thickness is grown.
The utility model is provided with a water cooling platform 1 for adjusting the growth temperature, the water cooling platform 1 is a cylindrical cavity structure, and the bottom of the water cooling platform 1 is provided with a cooling water inlet 12; the top surface of the water cooling table 1 is provided with a water cooling groove 11, the water cooling groove 11 is a circular groove, and the diamond material 3 is arranged in the water cooling groove 11. When the growth temperature needs to be reduced, cooling water enters the cavity of the water cooling table 1 from the cooling water inlet 12, and cold energy of the cooling water is transmitted to the diamond material 3 through the surface of the water cooling groove 11, so that heat transfer and temperature reduction are performed. In addition, the water cooling platform 1 is made of a copper material, and the copper material has excellent heat conductivity and can be effectively cooled.
The utility model discloses water-cooling recess 11 diameter is unanimous with outer molybdenum ring 22 external diameter, and recess internal thread 111 has been seted up to water-cooling recess 11 inner wall, set up on the outer molybdenum ring 22 outer wall with the outer molybdenum ring external screw thread 222 of recess internal thread 111 looks adaptation, through threaded connection between outer molybdenum ring 22 outer wall and the water-cooling recess 11 inner wall, this threaded connection structure is convenient for outer molybdenum ring 22's dismouting.
Finally, it should be noted that: the above embodiments are only preferred embodiments of the present invention to illustrate the technical solution of the present invention, but not to limit the same, and certainly not to limit the scope of the present invention; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; the modifications or replacements do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention; that is, the technical problems solved by the present invention are still consistent with the present invention, and all the modifications or colors made in the spirit and the idea of the main design of the present invention are included in the protection scope of the present invention; in addition, will the technical scheme of the utility model direct or indirect application is in other relevant technical field, all including on the same principle the utility model discloses a within the patent protection scope.
Claims (9)
1. The utility model provides an adjustable screw thread molybdenum ring device of diamond growth which characterized in that: the device comprises a water cooling table (1) and a molybdenum ring (2) arranged on the top surface of the water cooling table (1), wherein diamond materials (3) are arranged in the molybdenum ring (2), and plasmas (4) are arranged above the diamond materials (3); the molybdenum ring (2) consists of an inner molybdenum ring (21) and an outer molybdenum ring (22), and the inner molybdenum ring (21) is connected in the outer molybdenum ring (22) in a threaded manner.
2. A diamond growth adjustable threaded molybdenum ring apparatus as claimed in claim 1 wherein: the inner diameter of the outer molybdenum ring (22) is consistent with the outer diameter of the inner molybdenum ring (21).
3. The threaded molybdenum ring device with adjustable diamond growth according to claim 1, wherein: an outer molybdenum ring internal thread (221) is formed on the inner wall of the outer molybdenum ring (22), an inner molybdenum ring external thread (211) matched with the outer molybdenum ring internal thread (221) is formed on the outer wall of the inner molybdenum ring (21), and the outer wall of the inner molybdenum ring (21) is connected with the inner wall of the outer molybdenum ring (22) through threads.
4. A diamond growth adjustable threaded molybdenum ring apparatus as claimed in claim 1 wherein: the height of the inner molybdenum ring (21) is greater than that of the outer molybdenum ring (22).
5. A diamond growth adjustable threaded molybdenum ring apparatus as claimed in claim 1 wherein: the water cooling table (1) is of a cylindrical structure, and a water cooling groove (11) used for placing the diamond material (3) is formed in the top surface of the water cooling table (1).
6. A diamond growth adjustable threaded molybdenum ring apparatus as claimed in claim 5 wherein: the water-cooling groove (11) is a circular groove, and the diameter of the water-cooling groove (11) is consistent with the outer diameter of the outer molybdenum ring (22).
7. The threaded molybdenum ring device with adjustable diamond growth according to claim 1, wherein: the inner wall of the water-cooling groove (11) is provided with a groove internal thread (111), the outer wall of the outer molybdenum ring (22) is provided with an outer molybdenum ring external thread (222) matched with the groove internal thread (111), and the outer wall of the outer molybdenum ring (22) is in threaded connection with the inner wall of the water-cooling groove (11).
8. The threaded molybdenum ring device with adjustable diamond growth according to claim 1, wherein: the water cooling platform (1) is of a cavity structure, and a cooling water inlet (12) is formed in the bottom of the water cooling platform (1).
9. A diamond growth adjustable threaded molybdenum ring apparatus as claimed in claim 1 wherein: the water cooling platform (1) is made of copper materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121807653.2U CN218059189U (en) | 2021-08-04 | 2021-08-04 | Adjustable screw thread molybdenum ring device of diamond growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202121807653.2U CN218059189U (en) | 2021-08-04 | 2021-08-04 | Adjustable screw thread molybdenum ring device of diamond growth |
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| Publication Number | Publication Date |
|---|---|
| CN218059189U true CN218059189U (en) | 2022-12-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202121807653.2U Active CN218059189U (en) | 2021-08-04 | 2021-08-04 | Adjustable screw thread molybdenum ring device of diamond growth |
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| Country | Link |
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| CN (1) | CN218059189U (en) |
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2021
- 2021-08-04 CN CN202121807653.2U patent/CN218059189U/en active Active
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