CN217990189U - Cleaning device - Google Patents

Abstract

The cleaning device comprises a swing arm assembly, a spray head assembly and a first fixing piece, wherein an arc-shaped hole or a fixing hole is formed in the swing arm assembly, and a fixing hole or an arc-shaped hole corresponding to the arc-shaped hole or the fixing hole in the swing arm assembly is formed in the spray head assembly; the first fixing piece comprises a rod part and a head part, the rod part penetrates through the arc-shaped hole and the fixing hole, and the head part abuts against the end wall of the arc-shaped hole so as to connect the swing arm component with the spray head component; wherein, the pole portion can slide in the arc hole, and swing arm subassembly is used for driving the shower nozzle subassembly motion. When pole portion of this application embodiment slides in the arc hole, can drive the central line that swing arm subassembly and shower nozzle subassembly used the arc hole and rotate as the rotation center for angle between swing arm subassembly and the shower nozzle subassembly can be adjusted, makes the orientation of shower nozzle subassembly and treats that the angle between the washing surface reaches the best angle, thereby improves the cleaning performance of treating the washing piece.

Description

Cleaning device

Technical Field

The application relates to the technical field of semiconductors, in particular to a cleaning device.

Background

A wafer refers to a silicon wafer used to fabricate silicon semiconductor circuits. During the process of continuous processing, shaping and polishing of the wafer, various organic matters, particles and other foreign matters are adhered to the surface of the wafer, so that the wafer needs to be cleaned by a cleaning device.

At present, when a cleaning device on the market cleans a wafer, the water outlet direction of a nozzle of the cleaning device is generally perpendicular to the surface of the wafer, and the angle between the water outlet direction of the nozzle and the surface of the wafer cannot be adjusted, so that the cleaning effect on the wafer is poor.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a cleaning device, which can improve the cleaning effect of a workpiece to be cleaned.

To achieve the above object, in a first aspect, an embodiment of the present application provides a cleaning device, where the cleaning device is used to clean a member to be cleaned, and the cleaning device includes:

the swing arm assembly is provided with an arc-shaped hole or a fixing hole;

the spray head assembly is provided with a fixing hole or an arc hole corresponding to the arc hole or the fixing hole on the swing arm assembly;

the first fixing piece comprises a rod part and a head part, the rod part is fixedly connected with the head part, the rod part penetrates through the arc-shaped hole and the fixing hole, and the head part abuts against the end wall of the arc-shaped hole so as to connect the swing arm component with the spray head component;

the rod part can slide in the arc-shaped hole, and the swing arm component is used for driving the spray head component to move.

In some possible embodiments of the first aspect, the arc-shaped hole is provided in plurality, and center lines of the arc-shaped holes coincide.

In some possible embodiments of the first aspect, a sinking groove corresponding to the arc-shaped hole is provided on the swing arm assembly or the spray head assembly, the arc-shaped hole is provided in the sinking groove, and the head abuts against a bottom wall of the sinking groove.

In some possible embodiments of the first aspect, the counter sink has a contour shape identical to a contour shape of the arc-shaped hole, and the head has a diameter identical to a width of the counter sink.

In some possible embodiments of the first aspect, a rotation hole is provided on the swing arm assembly or the spray head assembly, a rotation column corresponding to the rotation hole on the swing arm assembly or the spray head assembly is provided on the spray head assembly or the swing arm assembly, the rotation column is rotatably provided in the rotation hole, and a center line of the rotation hole coincides with a center line of the arc hole.

In some possible embodiments of the first aspect, the swing arm assembly comprises:

a driver;

the swing arm is arranged on an output shaft of the driver, and the driver is used for driving the swing arm to rotate in a plane perpendicular to the axis of the output shaft of the driver;

the height adjustment piece, be provided with a plurality of regulation holes on the height adjustment piece, the regulation hole sets up along same direction interval, the swing arm is kept away from the one end of driver is provided with the connecting piece, the connecting piece is worn to locate the regulation hole, with the height adjustment piece connect in the swing arm, the arc hole or the fixed orifices set up in the height adjustment piece.

In some possible embodiments of the first aspect, the showerhead assembly includes:

the fixing block is provided with a plurality of interfaces, and the fixing holes or the arc-shaped holes are formed in the fixing block;

the nozzle is arranged at the end part of the fixing block and communicated with the interface through the fixing block.

In some possible embodiments of the first aspect, the swing arm assembly and the spray head assembly are provided in plurality, part of the spray head assembly is arranged on the front surface of the member to be cleaned, and the other part of the spray head assembly is arranged on the back surface of the member to be cleaned.

In some possible embodiments of the first aspect, the swing arm assembly disposed at the back of the member to be cleaned includes:

a plurality of second fixing members;

the cleaning device comprises a mounting seat, a cleaning device and a cleaning device, wherein a plurality of waist-shaped holes are formed in the mounting seat, and the waist-shaped holes are arranged around the back surface of the to-be-cleaned part at intervals;

the second fixing piece penetrates through the waist-shaped hole and the connecting hole so as to connect the spray head assembly to the mounting seat, and the arc-shaped hole or the fixing hole is arranged in the position adjusting block;

wherein each waist-shaped hole corresponds to at least one spray head assembly.

In some possible embodiments of the first aspect, the cleaning device further comprises:

a rotating assembly;

the cleaning box is internally provided with a cleaning chamber;

the adsorption carrying platform is arranged in the cleaning chamber and is connected with the output shaft of the rotating assembly so as to drive the adsorption carrying platform to rotate through the rotating assembly, and the adsorption carrying platform is used for adsorbing the piece to be cleaned.

When the rod part of the first fixing part is arranged in the arc-shaped hole and the fixing hole in a penetrating manner, the head part of the first fixing part abuts against the end wall of the arc-shaped hole, so that the swing arm assembly can be connected with the spray head assembly; the swing arm assembly is used for driving the spray head assembly to move, so that the spray head assembly can be driven by the swing arm assembly to scan the surface of the piece to be cleaned, the cleaning area is increased, and the cleaning effect of the piece to be cleaned is improved; pole portion can slide in the arc downthehole, and pole portion wears to locate the fixed orifices again, therefore pole portion when sliding in the arc downthehole, can drive the central line that swing arm subassembly and shower nozzle subassembly used the arc downthehole and rotate as the center of rotation, make the angle between swing arm subassembly and the shower nozzle subassembly can adjust, so that when treating the washing, through the angle between adjustment shower nozzle subassembly and the swing arm subassembly, make the orientation of shower nozzle subassembly and treat that the angle between the washing surface reaches the optimum angle, thereby improve the cleaning performance who treats the washing.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

FIG. 1 is a schematic structural view of an embodiment of a cleaning apparatus according to the present application;

FIG. 2 is a schematic structural view of another embodiment of the cleaning apparatus of the present application;

FIG. 3 is a schematic structural view of another embodiment of the cleaning apparatus of the present application;

FIG. 4 is a schematic structural view of a cleaning apparatus according to yet another embodiment of the present application;

FIG. 5 is a schematic view of the swing arm assembly of FIG. 4 in connection with a showerhead assembly;

FIG. 6 is a cross-sectional view of the swing arm assembly of FIG. 4 coupled to a spray head assembly;

FIG. 7 is a schematic structural view of another embodiment of the coupling of the swing arm assembly to the showerhead assembly of FIG. 2;

FIG. 8 is a schematic view of the connection of the swing arm assembly of FIG. 7 to a showerhead assembly.

The reference numbers illustrate:

1. a swing arm assembly; 11. a driver; 12. swinging arms; 13. a height adjusting block; 131. an arc-shaped hole; 132. sinking a groove; 133. rotating the column; 134. an adjustment hole; 14. a mounting seat; 141. a waist-shaped hole; 15. a position adjustment block; 151. connecting holes; 2. a showerhead assembly; 21. a fixed block; 211. a fixing hole; 212. rotating the hole; 213. an interface; 22. a spray head; 3. a first fixing member; 31. a head; 4. a cleaning tank; 41. a cleaning chamber; 5. an adsorption stage; 6. a part to be cleaned; 7. a robot arm.

The implementation, functional features and advantages of the object of the present application will be further explained with reference to the embodiments, and with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.

It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the present application.

It should be understood that the term "and/or" as used in this specification and the appended claims refers to any and all possible combinations of one or more of the associated listed items and includes such combinations.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.

The embodiment of the application provides a cleaning device for solve the poor technical problem of cleaning performance who treats the cleaning member.

In the embodiment of the application, as shown in fig. 3 to 5, the cleaning device is used for cleaning the to-be-cleaned member 6, and the cleaning device includes a swing arm assembly 1, a spray head assembly 2 and a first fixing member 3, an arc hole 131 or a fixing hole 211 is provided on the swing arm assembly 1, and a fixing hole 211 or an arc hole corresponding to the arc hole 131 or the fixing hole on the swing arm assembly 1 is provided on the spray head assembly 2; the first fixing member 3 includes a rod portion (not shown in the figure) and a head portion 31, the rod portion is fixedly connected with the head portion 31, the rod portion is arranged through the arc-shaped hole 131 and the fixing hole 211, and the head portion 31 abuts against the end wall of the arc-shaped hole 131 to connect the swing arm assembly 1 with the spray head assembly 2.

Wherein, the pole portion can slide in arc hole 131, and swing arm subassembly 1 is used for driving shower nozzle subassembly 2 and moves.

As can be understood, when the swing arm assembly 1 is provided with the arc-shaped hole 131, the spray head assembly 2 is provided with a fixing hole 211 corresponding to the arc-shaped hole 131 on the swing arm assembly 1; when being provided with the fixed orifices on the swing arm subassembly 1, be provided with the arc hole that corresponds with the fixed orifices on the swing arm subassembly 1 on the shower nozzle subassembly 2. The central angle corresponding to the arc-shaped hole 131 can be 360 degrees, and the arc-shaped hole 131 is a circular ring-shaped hole; the corresponding central angle of the arcuate aperture 131 may also be less than 360.

Alternatively, the member 6 to be cleaned may be a wafer. The first fixing member 3 may be a screw.

When the rod part of the first fixing part 3 penetrates through the arc-shaped hole 131 and the fixing hole 211, the head part 31 of the first fixing part 3 abuts against the end wall of the arc-shaped hole 131, so that the swing arm assembly 1 can be connected with the spray head assembly 2; the swing arm assembly 1 is used for driving the spray head assembly 2 to move, so that the spray head assembly 2 can be driven by the swing arm assembly 1 to scan the surface of the piece 6 to be cleaned, the cleaning area is increased, and the cleaning effect of the piece 6 to be cleaned is improved; pole portion can slide in arc hole 131, and pole portion wears to locate fixed orifices 211 again, therefore pole portion when sliding in arc hole 131, can drive swing arm subassembly 1 and shower nozzle subassembly 2 and use the central line in arc hole 131 to rotate as the center of rotation, make the angle between swing arm subassembly 1 and the shower nozzle subassembly 2 can be adjusted, so that when treating cleaning 6, through adjusting the angle between shower nozzle subassembly 2 and the swing arm subassembly 1, make the orientation of shower nozzle subassembly 2 and treat that the angle between the 6 surfaces of cleaning reaches the optimum angle, thereby improve the cleaning performance who treats cleaning 6.

In the process of manufacturing the wafer, different types of foreign matters such as various organic matters and metal particles may adhere to the surface of the wafer, and the adhesion force of the different types of foreign matters to the surface of the wafer is different. Therefore, when the angle between the nozzle unit 2 and the wafer surface is different, the cleaning effect on various foreign matters is different. In the actual process of cleaning the wafer, the angle of the nozzle assembly 2 can be adjusted according to the actual situation, so that the cleaning effect on the wafer can be optimal.

When the water outlet of the nozzle assembly 2 is oriented to be inclined to the surface of the wafer, when water is sprayed from the nozzle assembly 2 to the surface of the wafer, a component force parallel to the surface of the wafer and a component force perpendicular to the surface of the wafer are generated, so that the impact force of the water flow on the surface of the wafer is reduced, and meanwhile, the thrust of the water flow on foreign matters on the surface of the wafer is increased, and the cleaning effect of the wafer is improved.

In this embodiment, when the angle between the nozzle assembly 2 and the swing arm assembly 1 needs to be adjusted, an external force needs to be applied to the nozzle assembly 2 to push the nozzle assembly 2 to rotate by taking the center line of the arc-shaped hole 131 as a rotation center through the external force. After the inclination angle of the spray head component 2 towards the surface of the piece 6 to be cleaned is adjusted, the friction force at the joint can prevent the spray head component 2 and the swing arm component 1 from continuously rotating relatively, so that the purpose of automatic limiting is realized. In one embodiment, when the first fixing member 3 is a screw, the first fixing member 3 can be loosened to reduce the friction at the joint, and after the inclination angle of the nozzle assembly 2 towards the surface of the member to be cleaned 6 is adjusted, the first fixing member 3 can be tightened to increase the friction at the joint and prevent the nozzle assembly 2 and the swing arm assembly 1 from rotating continuously.

In one embodiment, as shown in fig. 4 and 5, the arc-shaped holes 131 are provided in plurality, and the central lines of the arc-shaped holes 131 coincide, so as to increase the number of contact points between the first fixing member 3 and the arc-shaped holes 131, thereby improving the stability of the rotation of the spray head assembly 2 relative to the swing arm assembly 1. Because the central lines of the arc-shaped holes 131 coincide, the distribution positions of the contact points of the first fixing piece 3 and the arc-shaped holes 131 are more reasonable, and the rotating stability of the spray head assembly 2 relative to the swing arm assembly 1 is further improved. Wherein, the radiuses of the arc holes 131 may be equal.

In this embodiment, the diameter of the stem portion may be equal to the width of the arc-shaped hole 131 to limit the movement of the stem portion through the hole wall of the arc-shaped hole 131, so that the stability of the rotation of the spray head assembly 2 with respect to the swing arm assembly 1 may be improved.

In an embodiment, as shown in fig. 4 and fig. 5, the swing arm assembly 1 or the nozzle assembly 2 is provided with a sinking groove 132 corresponding to the arc-shaped hole 131, the arc-shaped hole 131 is disposed in the sinking groove 132, and the head 31 abuts against a bottom wall of the sinking groove 132 to prevent the head 31 from protruding and interfering with other components, and also prevent the other components from interfering with the first fixing member 3 to slide in the arc-shaped hole 131.

In the present embodiment, the thickness of the head 31 is less than or equal to the height of the sink 132.

In one embodiment, as shown in fig. 4 and 5, the contour of the sinking groove 132 is the same as the contour of the arc-shaped hole 131, and the diameter of the head 31 is the same as the width of the sinking groove 132, so as to limit the head 31 by the groove wall of the sinking groove 132, thereby improving the stability of the rotation of the spray head assembly 2 relative to the swing arm assembly 1.

In an embodiment, as shown in fig. 4 and fig. 6, a rotation hole 212 is disposed on the swing arm assembly 1 or the spray head assembly 2, a rotation post 133 corresponding to the rotation hole 212 on the swing arm assembly 1 or the spray head assembly 2 is disposed on the spray head assembly 2 or the swing arm assembly 1, the rotation post 133 is rotatably disposed in the rotation hole 212, a center line of the rotation hole 212 coincides with a center line of the arc-shaped hole 131, so as to limit the rotation post 133 through a hole wall of the rotation hole 212, and improve the stability of the rotation of the spray head assembly 2 relative to the swing arm assembly 1.

In an embodiment, as shown in fig. 4 and 5, the swing arm assembly 1 includes a driver 11, a swing arm 12 and a height adjustment block 13, the swing arm 12 is disposed on an output shaft of the driver 11, and the driver 11 is configured to drive the swing arm 12 to rotate in a plane perpendicular to an axis of the output shaft of the driver 11; the height adjusting block 13 is provided with a plurality of adjusting holes 134, the adjusting holes 134 are arranged at intervals along the same direction, one end of the swing arm 12, which is far away from the driver 11, is provided with a connecting piece (not shown in the figure), the connecting piece penetrates through the adjusting holes 134 so as to connect the height adjusting block 13 to the swing arm 12, and the arc-shaped holes 131 or the fixing holes are arranged in the height adjusting block 13. Wherein the connecting member may be a screw and the driver 11 may be a motor.

Because the height adjusting block 13 is provided with a plurality of adjusting holes 134, the adjusting holes 134 are arranged at intervals along the same direction, so that the height of each adjusting hole 134 is different, and when the connecting piece is arranged in different adjusting holes 134 in a penetrating manner, the height of the height adjusting block 13 relative to the swing arm 12 is different, thereby realizing the purpose of adjusting the height of the height adjusting block 13. That is, the height of the nozzle assembly 2 can be adjusted by adjusting the height of the height adjusting block 13, so that the distance between the nozzle assembly 2 and the piece 6 to be cleaned is adjusted, and the phenomenon that the nozzle assembly 2 is too close to the piece 6 to be cleaned, so that the impact force of the water sprayed from the nozzle assembly 2 on the piece 6 to be cleaned is too large, and the piece 6 to be cleaned is damaged is avoided; or, the phenomenon that the impact force of water sprayed from the spray head assembly 2 to the piece 6 to be cleaned is too small to influence the cleaning capability of foreign matters due to the fact that the spray head assembly 2 is too far away from the piece 6 to be cleaned is avoided.

In this embodiment, when the output shaft of the driver 11 rotates, the swing arm 12 can be driven to rotate in the plane perpendicular to the axis of the output shaft of the driver 11, that is, the swing arm 12 is perpendicular to the output shaft of the driver 11, so as to drive the spray head assembly 2 to scan the to-be-cleaned object 6, thereby improving the cleaning effect of the to-be-cleaned object 6. The height of the height adjusting block 13 relative to the swing arm 12 can be adjusted to adjust the distance between the spray head assembly 2 and the piece 6 to be cleaned, so that the cleaning effect of the piece 6 to be cleaned is improved.

Alternatively, a transverse hole may be provided on the swing arm 12 so that the height adjustment block 13 is fixed to different positions of the transverse hole by screws to adjust the position of the height adjustment block 13 on the swing arm 12. Wherein, the screw can slide in the transverse hole, and the length direction of the transverse hole is the same as that of the swing arm 12.

In one embodiment, as shown in fig. 5, the nozzle assembly 2 includes a fixing block 21 and a nozzle 22, the fixing block 21 is provided with a plurality of ports 213, and a fixing hole 211 or an arc-shaped hole is formed in the fixing block 21; the nozzle 22 is disposed at an end of the fixed block 21 and communicates with the interface 213 through the fixed block 21.

Because the fixed block 21 is provided with the plurality of interfaces 213, different cleaning substances can be introduced into the interfaces 213 so as to improve the cleaning effect of the piece 6 to be cleaned; for example, air may be introduced into one of the ports 213, and water may be introduced into the other port 213. The fixing holes 211 or the arc holes are formed in the fixing block 21, so that the structure of the spray head 22 can be simplified, and the spray head 22 and the fixing block 21 can be conveniently manufactured.

In one embodiment, as shown in fig. 1, 3, 5 and 7, the swing arm assembly 1 and the spray head assembly 2 are provided in plurality, a part of the spray head assembly 2 is disposed on the front surface of the member to be cleaned 6, and the other part of the spray head assembly 2 is disposed on the back surface of the member to be cleaned 6. Because the arc-shaped holes 131 correspond to the fixing holes 211, the swing arm assemblies 1 correspond to the spray head assemblies 2, that is, the number of the swing arm assemblies 1 corresponds to that of the spray head assemblies 2, so that when part of the spray head assemblies 2 are arranged on the front face of the piece to be cleaned 6, part of the swing arm assemblies 1 are also arranged on the front face of the piece to be cleaned 6; when part of the spray head assembly 2 is arranged on the back surface of the member to be cleaned 6, part of the swing arm assembly 1 is also arranged on the back surface of the member to be cleaned 6.

When treating the front of wasing piece 6 through setting up in the shower nozzle subassembly 2 that treats that washing piece 6 is positive, also wash the back of treating washing piece 6 through setting up in shower nozzle subassembly 2 that treats the back of washing piece 6 simultaneously, can make and spray the whole back of treating washing piece 6 of liquid cover that treats the back of washing piece 6, when avoiding wasing the front of treating washing piece 6, from treating that the back of washing piece 6 is treated to the water that flows down in front of washing piece 6 causes secondary pollution, thereby can improve the cleaning performance who treats washing piece 6.

In one embodiment, as shown in fig. 7 and 8, the swing arm assembly 1 disposed on the back of the to-be-cleaned object 6 includes a mounting seat 14, a position adjusting block 15 and a plurality of second fixing elements (not shown in the drawings), wherein the mounting seat 14 is provided with a plurality of waist-shaped holes 141, and the waist-shaped holes 141 are disposed at intervals around the back of the to-be-cleaned object 6; the position adjusting block 15 is provided with a connecting hole 151, the second fixing member is inserted into the waist-shaped hole 141 and the connecting hole 151 to connect the nozzle assembly 2 to the mounting base 14, and the arc-shaped hole 131 or the fixing hole is arranged in the position adjusting block 15. Wherein each slotted hole 141 corresponds to at least one showerhead assembly 2.

The mounting seat 14 is provided with a plurality of waist-shaped holes 141, and each waist-shaped hole 141 corresponds to at least one spray head assembly 2, so that different cleaning substances can be introduced into each spray head assembly 2 to improve the cleaning effect of the piece 6 to be cleaned; for example, one of the nozzle assemblies 2 may be purged with air, the other nozzle assembly 2 may be purged with water, and the other may be purged with a cleaning solution. Because the second fixing member is inserted into the waist-shaped hole 141 and the connection hole 151, the position of the second fixing member in the waist-shaped hole 141 can be adjusted, so that the position of the position adjusting block 15 on the mounting seat 14 can be adjusted, and the position of the nozzle assembly 2 arranged on the position adjusting block 15 can be adjusted, so that the nozzle assembly 2 can clean the back surface of the member to be cleaned 6 at a better position. Of course, it can be understood that the swing arm assembly 1 in the embodiment refers to the swing arm assembly 1 disposed on the back of the to-be-cleaned object 6, and the structure of the swing arm assembly 1 disposed on the front of the to-be-cleaned object 6 may be the same as or different from the structure of the swing arm assembly 1 disposed on the back of the to-be-cleaned object 6. It can be seen that in the example scheme provided by the embodiment, the structure of the swing arm assembly 1 arranged on the front surface of the piece to be cleaned 6 is different from the structure of the swing arm assembly 1 arranged on the back surface of the piece to be cleaned 6, but for simplifying the description, the two are not distinguished on the reference number in the embodiment.

Alternatively, the mount 14 may be a bracket structure.

In an embodiment, as shown in fig. 1 and fig. 2, the cleaning apparatus further includes a rotating assembly, a cleaning tank 4 and an adsorption stage 5, a cleaning chamber 41 is disposed in the cleaning tank 4, the adsorption stage 5 is disposed in the cleaning chamber 41 and is connected to an output shaft of the rotating assembly so as to drive the adsorption stage 5 to rotate through the rotating assembly, and the adsorption stage 5 is used for adsorbing the to-be-cleaned object 6. The adsorption carrying platform 5 is arranged in the cleaning chamber 41, so that the cleaning liquid can be prevented from splashing when the piece 6 to be cleaned is cleaned, namely, the cleaning box 4 can play a role in isolation and protection; adsorption carrier 5 can rotate under rotating assembly's drive to when treating cleaning 6, can be through treating the rotatory centrifugal force of cleaning 6 supplementary clearance attached to the foreign matter on treating cleaning 6 surface, can also reduce the removal region of shower nozzle subassembly 2, make things convenient for shower nozzle subassembly 2 to wash and treat cleaning 6. The swing arm assembly 1 drives the spray head assembly 2 to move, and the spray head assembly 2 can be prevented from interfering to feed the to-be-cleaned part 6 to the adsorption carrying platform 5; the rotating assembly may be a motor.

In one embodiment, as shown in fig. 2, the cleaning apparatus further includes a robot 7 to complete blanking by loading the member to be cleaned 6 onto the adsorption stage 5 or unloading the member to be cleaned 6 from the adsorption stage 5 by the robot 7.

Now, the step of cleaning the member to be cleaned 6 in the present embodiment will be briefly described, and it should be understood that the step of cleaning the member to be cleaned 6 in the present embodiment includes, but is not limited to, the following steps:

when the piece 6 to be cleaned is cleaned, the swing arm assembly 1 can drive the spray head assembly 2 to avoid the position right above the adsorption carrying platform 5, so that the piece 6 to be cleaned can be placed on the adsorption carrying platform 5 from the position right above the adsorption carrying platform 5 through the manipulator 7, and the adsorption carrying platform 5 can adsorb and fix the piece 6 to be cleaned; after the piece 6 to be cleaned is adsorbed and fixed by the adsorption carrying platform 5, the swing arm assembly 1 drives the spray head assembly 2 to move to the position right above the adsorption carrying platform 5; then, according to actual requirements, the direction of the spray head component 2 is adjusted, so that the spraying angle of the spray head component 2 on the piece 6 to be cleaned is adjusted; simultaneously opening the spray head 22 arranged on the front surface of the piece 6 to be cleaned and the spray head 22 arranged on the back surface of the piece 6 to be cleaned, so that the spray head assembly 2 simultaneously cleans the front surface and the back surface of the piece 6 to be cleaned, wherein the spray head 22 arranged on the front surface of the piece 6 to be cleaned can simultaneously introduce air and water so as to clean the front surface of the piece 6 to be cleaned; after cleaning, simultaneously introducing air to the nozzle assemblies 2 arranged on the front surface and the back surface of the piece 6 to be cleaned so as to dry the piece 6 to be cleaned; after drying, drive shower nozzle subassembly 2 again through the swing arm subassembly 1 and avoid adsorbing the front of microscope carrier 5 to treat that the piece 6 that washs that will wash the completion through manipulator 7 and carry out the unloading from adsorbing microscope carrier 5.

The above description is only a preferred embodiment of the present application, and not intended to limit the scope of the present application, and all modifications and equivalents of the technical solutions that can be directly or indirectly applied to other related fields without departing from the spirit of the present application are intended to be included in the scope of the present application.

Claims (10)

1. A cleaning device for cleaning an item to be cleaned, the cleaning device comprising:

the swing arm assembly is provided with an arc-shaped hole or a fixing hole;

the spray head assembly is provided with a fixing hole or an arc-shaped hole corresponding to the arc-shaped hole or the fixing hole on the swing arm assembly;

the first fixing piece comprises a rod part and a head part, the rod part is fixedly connected with the head part, the rod part is arranged in the arc-shaped hole and the fixing hole in a penetrating mode, and the head part abuts against the end wall of the arc-shaped hole so as to connect the swing arm assembly with the spray head assembly;

the rod part can slide in the arc-shaped hole, and the swing arm component is used for driving the spray head component to move.

2. The cleaning apparatus defined in claim 1, wherein the arcuate aperture is provided in plurality, and the centerlines of the plurality of arcuate apertures coincide.

3. The cleaning device as claimed in claim 1, wherein the swing arm assembly or the spray head assembly is provided with a sinking groove corresponding to the arc-shaped hole, the arc-shaped hole is arranged in the sinking groove, and the head part abuts against the bottom wall of the sinking groove.

4. The cleaning apparatus defined in claim 3, wherein the counter sink has a profile that is the same as the profile of the arcuate aperture and the head has a diameter that is the same as the width of the counter sink.

5. The cleaning apparatus as claimed in claim 1, wherein a rotation hole is provided on the swing arm assembly or the spray head assembly, a rotation post corresponding to the rotation hole on the swing arm assembly or the spray head assembly is provided on the spray head assembly or the swing arm assembly, the rotation post is rotatably provided in the rotation hole, and a center line of the rotation hole coincides with a center line of the arc hole.

6. The cleaning apparatus defined in claim 1, wherein the swing arm assembly comprises:

a driver;

the swing arm is arranged on an output shaft of the driver, and the driver is used for driving the swing arm to rotate in a plane perpendicular to the axis of the output shaft of the driver;

the height adjustment piece, be provided with a plurality of regulation holes on the height adjustment piece, the regulation hole sets up along same direction interval, the swing arm is kept away from the one end of driver is provided with the connecting piece, the connecting piece is worn to locate the regulation hole, with the height adjustment piece connect in the swing arm, the arc hole or the fixed orifices set up in the height adjustment piece.

7. The cleaning apparatus defined in claim 1, wherein the spray head assembly comprises:

the fixing block is provided with a plurality of interfaces, and the fixing holes or the arc-shaped holes are formed in the fixing block;

the nozzle is arranged at the end part of the fixing block and communicated with the interface through the fixing block.

8. The cleaning apparatus defined in claim 1, wherein the swing arm assembly and the spray head assembly are provided in plurality, and a part of the spray head assembly is disposed on a front surface of the member to be cleaned, and another part of the spray head assembly is disposed on a rear surface of the member to be cleaned.

9. The cleaning apparatus defined in claim 8, wherein the swing arm assembly provided on the back of the member to be cleaned comprises:

a plurality of second fixing members;

the cleaning device comprises a mounting seat, a cleaning device and a cleaning device, wherein a plurality of waist-shaped holes are formed in the mounting seat, and the waist-shaped holes are arranged around the back surface of a piece to be cleaned at intervals;

the second fixing piece penetrates through the waist-shaped hole and the connecting hole so as to connect the spray head assembly to the mounting seat, and the arc-shaped hole or the fixing hole is formed in the position adjusting block;

wherein each waist-shaped hole corresponds to at least one spray head assembly.

10. The cleaning apparatus defined in any one of claims 1-9, further comprising:

a rotating assembly;

the cleaning box is internally provided with a cleaning chamber;

the adsorption carrying platform is arranged in the cleaning chamber and is connected with the output shaft of the rotating assembly so as to drive the adsorption carrying platform to rotate through the rotating assembly, and the adsorption carrying platform is used for adsorbing the piece to be cleaned.

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