CN217973393U - Base station lifting unit and growth equipment - Google Patents
Base station lifting unit and growth equipment Download PDFInfo
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- CN217973393U CN217973393U CN202221796223.XU CN202221796223U CN217973393U CN 217973393 U CN217973393 U CN 217973393U CN 202221796223 U CN202221796223 U CN 202221796223U CN 217973393 U CN217973393 U CN 217973393U
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Abstract
The embodiment of the utility model provides a base station lifting unit and growth equipment belongs to the relevant technical field of microwave plasma vapor deposition, acts on the base station subassembly with reaction chamber sliding connection, lifting unit includes: the first lifting mechanism is connected with the base platform assembly and drives the base platform assembly to lift in the reaction chamber; the first end of the support plate component is connected with the first lifting mechanism, the second end of the support plate component is connected with the base platform component, and the support plate component can drive the base platform component to move out relative to the first lifting mechanism; the technical effect of conveniently placing the substrate on the base station or taking the crystal is achieved.
Description
Technical Field
The utility model relates to a microwave plasma vapor deposition correlation technique field especially relates to a base station lifting unit and growth equipment.
Background
Microwave Plasma Chemical Vapor Deposition (MPCVD) is the currently accepted optimal method for preparing diamond materials, and the diamond synthesized by the method has the characteristics of large granularity, large size, high purity and the like.
In the prior art, a base station for growing the diamond is fixed, and when the diamond grows continuously, the distance between the surface of the diamond and plasma is closer and closer, so that the growth of the diamond is influenced. When the base station is fixed, it is inconvenient to place a substrate on the base station or take a crystal.
Therefore, the technical problems of the prior art are as follows: it is inconvenient to place a substrate on the base or take a crystal.
SUMMERY OF THE UTILITY MODEL
The embodiment of the application provides a base station lifting assembly and growth equipment, and solves the technical problem that a substrate is inconvenient to place or take crystals from a base station in the prior art; the technical effect of conveniently placing the substrate on the base station or taking the crystal is achieved.
The embodiment of the application provides a base station lifting unit, act on with reaction chamber sliding connection's base station subassembly, its characterized in that: the lifting assembly comprises: the first lifting mechanism is connected with the base platform assembly and drives the base platform assembly to lift in the reaction chamber; the first end of the support plate component is connected with the first lifting mechanism, the second end of the support plate component is connected with the base station component, and the support plate component can drive the base station component to move out relative to the first lifting mechanism.
Preferably, the lifting assembly further comprises: a molybdenum table assembly located in the base table assembly; and the second lifting mechanism is connected with the molybdenum table component, is positioned in the first lifting mechanism and is connected with the first lifting mechanism.
Preferably, the second lifting mechanism and the first lifting mechanism are parallel to each other, and the moving direction of the carrier plate assembly is perpendicular to both the first lifting mechanism and the second lifting mechanism.
Preferably, the first elevating mechanism includes: the fixed frame is positioned outside the reaction chamber; the first guide column is positioned inside the fixed frame, and two ends of the first guide column are respectively fixedly connected with the inner end face of the fixed frame; the first movable plate is sleeved with the first guide column and can move up and down along the first guide column, the end face of the first movable plate is connected with the carrier plate assembly, and the carrier plate assembly can move out relative to the first movable plate; and the driving source is positioned on the outer side of the fixed frame, fixedly connected with the first moving plate and used for providing power for the first moving plate to move up and down.
Preferably, a limiting cylinder is arranged inside the fixing frame, and the limiting cylinder is connected with the driving source and used for limiting the position of the driving source.
Preferably, the second elevating mechanism includes: a first fixing plate; the first end of the lead screw is connected with the bottom of the base platform assembly, and the second end of the lead screw is connected with the first fixing plate; and the second moving plate is sleeved on the screw rod, can move up and down along the screw rod, and is connected with the molybdenum table assembly, so that the second moving plate drives the molybdenum table assembly to lift.
Preferably, the second elevating mechanism further includes: one or more second guide columns, wherein the second guide columns are parallel to the lead screw, the first ends of the second guide columns are connected with the bottom of the base platform assembly, and the second ends of the second guide columns penetrate through the first fixing plate; and the second fixing plate is fixedly connected with the second end of the second guide post.
Preferably, the carrier plate assembly includes: the sliding block is connected with the end face of the first moving plate; the first end of the guide rail is connected with the sliding block in a sliding manner; and the third moving plate is connected with the second end of the guide rail, the third moving plate is sleeved on the outer side of the molybdenum table assembly, and the third moving plate is connected with the base table assembly.
Preferably, a grip portion is provided in the third moving plate, and the grip portion is used for pulling the third moving plate.
A growing apparatus comprising: a lifting assembly, the lifting assembly being any of the lifting assemblies mentioned above; a base station assembly; the reaction chamber is positioned above the lifting component and provided with an opening relative to the base platform component, the reaction chamber is sealed through the base platform component, and the lifting component drives the base platform component to lift in the reaction chamber, so that a substrate can be placed or a crystal can be taken conveniently.
One or more technical solutions in the embodiments of the present application at least have one or more of the following technical effects:
1. in the embodiment of the application, the first lifting mechanism drives the base station component to lift in the reaction cavity, and when the base station component moves downwards and the reaction cavity is separated, the base station component is driven by matching with the support plate component to move out relative to the first lifting mechanism, so that a substrate can be placed on the base station component or crystals can be taken conveniently, and the technical problem that the substrate is placed on the base station or the crystals are not convenient to take in the prior art is solved; the technical effect of convenient substrate placement or crystal taking on the base station is achieved.
2. In the embodiment of the application, the second lifting mechanism is located inside the first lifting mechanism, the second lifting mechanism and the first lifting mechanism are parallel to each other, and the direction in which the support plate component drives the base station component to move is perpendicular to the first lifting mechanism and the second lifting mechanism, so that the whole lifting component is small in size and does not interfere with each other through the mutual matching of the first lifting mechanism, the second lifting mechanism and the support plate component, and a substrate is placed on the base station or a crystal is taken conveniently.
3. In this application embodiment, molybdenum platform subassembly is arranged in the base station subassembly, and first elevating system drives the base station subassembly and goes up and down, then drives molybdenum platform subassembly through second elevating system and goes up and down to be favorable to the accurate lift of molybdenum platform subassembly.
Drawings
FIG. 1 is a schematic diagram of an embodiment of an apparatus for lifting and lowering a platform and growing a material;
FIG. 2 is a schematic view of a portion of the structure of FIG. 1;
FIG. 3 is a top view of FIG. 2;
FIG. 4 is a front view of FIG. 2;
FIG. 5 isbase:Sub>A partial sectional view taken along line A-A of FIG. 3;
fig. 6 is a partial sectional view taken along line B-B in fig. 3.
Reference numerals are as follows:
100. a base station assembly; 200. a molybdenum table assembly; 300. a first lifting mechanism; 310. a fixed frame; 311. a limiting cylinder; 320. a first guide post; 330. a first moving plate; 340. a drive source; 400. a carrier plate assembly; 410. a slider; 420. a guide rail; 430. a third moving plate; 431. a grip portion; 500. a reaction chamber; 600. a second lifting mechanism; 610. a lead screw; 620. a second moving plate; 630. a second guide post; 640. a first fixing plate; 650. and a second fixing plate.
Detailed Description
The ordinal numbers used herein for the components, such as "first," "second," etc., are used merely to distinguish between the objects described, and do not have any sequential or technical meaning. The term "connected" and "coupled" when used in this application, unless otherwise indicated, includes both direct and indirect connections (couplings). In the description of the present application, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like are used in the orientations and positional relationships indicated in the drawings, which are based on the orientations and positional relationships indicated in the drawings, and are used for convenience of description and simplicity of description, but do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present application.
In this application, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.
In order to better understand the technical scheme, the technical scheme is described in detail in the following with reference to the attached drawings of the specification and specific embodiments.
In the diamond growth process, a general base is fixed, so that it is inconvenient to place a substrate on the base or take a crystal, as shown in fig. 1, 2 and 5, in order to achieve the purpose of facilitating the placement of a substrate on the base or the taking of a crystal, the embodiment of the present invention provides a base lifting assembly acting on a base assembly 100 slidably connected to a reaction chamber 500. The lift assembly includes a first lift mechanism 300, a carrier plate assembly 400, a molybdenum table assembly 200, and a second lift mechanism 600. The first lifting mechanism 300 is connected to the base assembly 100, and the first lifting mechanism 300 drives the base assembly 100 to lift in the reaction chamber 500. The first end of the carrier plate assembly 400 is connected to the first elevating mechanism 300, the second end of the carrier plate assembly 400 is connected to the base assembly 100, and the carrier plate assembly 400 can drive the base assembly 100 to move out relative to the first elevating mechanism 300. Therefore, when the base assembly 100 is driven by the first lifting mechanism 300 to move downward and separate from the reaction chamber 500, the carrier assembly 400 can pull the base assembly 100 to move out relative to the first lifting mechanism 300, and at this time, the base assembly 100 is exposed, thereby facilitating the placement of a substrate on the base or the taking of a crystal.
The molybdenum stage assembly 200 is disposed in the stage assembly 100. The second lifting mechanism 600 is connected with the molybdenum table assembly 200, the second lifting mechanism 600 is positioned in the first lifting mechanism 300, and the second lifting mechanism 600 is connected with the first lifting mechanism 300. The second lifting mechanism 600 and the first lifting mechanism 300 are parallel to each other, and the moving direction of the carrier assembly 400 is perpendicular to both the first lifting mechanism 300 and the second lifting mechanism 600. Thereby after the first elevating mechanism 300 drives the base station assembly 100, the carrier plate assembly 400, the molybdenum table assembly 200 and the second elevating mechanism 600 to ascend and descend, the second elevating mechanism 600 drives the molybdenum table assembly 200 to ascend and descend in the base station assembly 100, thereby facilitating the accurate ascending and descending of the molybdenum table assembly 200.
As shown in fig. 1 to 5, the first lifting mechanism 300 is used for driving the base assembly 100, the carrier assembly 400, the molybdenum table assembly 200 and the second lifting mechanism 600 to lift and lower. When the base assembly 100 moves downward and is separated from the reaction chamber 500, the carrier assembly 400 is engaged to move the base assembly 100 out relative to the first elevating mechanism 300, thereby facilitating the placement of a substrate on the base or the taking of a wafer. When the diamond needs to grow normally in the reaction chamber 500, the base assembly 100 is pulled to move through the carrier plate assembly 400, so that the base assembly 100 corresponds to the reaction chamber 500, the base assembly 100 is driven to move upwards through the first lifting mechanism 300, the reaction chamber 500 is sealed, and the normal growth of the diamond is facilitated. In one embodiment, the first elevating mechanism 300 includes a fixed frame 310, a first guide column 320, a first moving plate 330, and a driving source 340. Wherein the fixing frame 310 is located at the outside of the reaction chamber 500. The first guiding column 320 is located inside the fixing frame 310, and two ends of the first guiding column 320 are respectively fixedly connected with the inner end face of the fixing frame 310. The first moving plate 330 and the first guiding column 320 are sleeved, the first moving plate 330 can move up and down along the first guiding column 320, the end surface of the first moving plate 330 is connected with the carrier plate assembly 400, and the carrier plate assembly 400 can move out relative to the first moving plate 330. The first guide column 320 is used to guide the up and down movement of the first moving plate 330. Therefore, when a substrate needs to be placed on the base or a newly grown crystal needs to be taken away, the carrier plate assembly 400 is pulled to move the base assembly 100 out relative to the first moving plate 330 in the first lifting mechanism 300. The driving source 340 is located outside the fixed frame 310, the driving source 340 is fixedly connected to the first moving plate 330, and the driving source 340 provides power for moving the first moving plate 330 up and down.
Note that, in the present embodiment, the driving source 340 is a double cylinder. The fixing frame 310 is provided with a limiting cylinder 311 inside, and the limiting cylinder 311 is connected with the driving source 340 to limit the position of the driving source 340. By the arrangement of the limiting cylinder 311, the driving source 340 can have a proper position between the base assembly 100 and the reaction chamber 500 when driving the first moving plate 330 to move up and down along the first guiding column 320. In other words, when the base assembly 100 and the reaction chamber 500 are separated, the air cylinder is located at the lower limit, and a substrate can be directly placed on the base assembly 100 or a new crystal can be taken away. When the base station assembly 100 is located in the reaction chamber 500 and the cylinder is located at the upper limit position, the sealing ring on the base station assembly 100 and the reaction chamber 500 are tightly compacted under the action of the cylinder, so as to provide a sealing environment for vacuum pumping. Thereby facilitating the normal growth of diamond in the reaction chamber 500 in a vacuum state.
The second lifting mechanism 600, as shown in fig. 3-6, the second lifting mechanism 600 is used for driving the molybdenum table assembly 200 to lift. The first lifting mechanism 300 is matched to facilitate the precise lifting of the molybdenum table assembly 200. In one embodiment, the second lifting mechanism 600 includes a first fixing plate 640, a lead screw 610, a second moving plate 620, a second guide column 630, and a second fixing plate 650. Wherein, the first end of the lead screw 610 is connected to the bottom of the base assembly 100, and the second end of the lead screw 610 is connected to the first fixing plate 640. The second moving plate 620 is sleeved on the lead screw 610, the second moving plate 620 can move up and down along the lead screw 610, and the second moving plate 620 is connected with the molybdenum table assembly 200, so that the second moving plate 620 drives the molybdenum table assembly 200 to ascend and descend.
Further, a second end surface of the second fixing plate 650 is connected to a lead screw motor, the lead screw motor is connected to a coupler, the coupler is mounted on the first end surface of the second fixing plate 650, the coupler is fixedly connected to the second fixing plate 650, and the coupler is connected to the second end of the lead screw 610. Thereby, the lead screw 610 is driven to rotate by connecting the lead screw motor and the shaft coupling with the lead screw 610, so that the second moving plate 620 moves up and down along the second guiding column 630, and the base table assembly 100 is driven to lift, thereby being beneficial to the precise lifting of the molybdenum table assembly 200. The number of the second guide posts 630 is selected according to the size of the first fixing plate 640. When the first fixing plate 640 is large, a plurality of second guide posts 630 may be used to ensure the normal use of the lead screw 610. Therefore, there are one or several second guiding pillars 630. The second guide post 630 and the lead screw 610 are parallel to each other, a first end of the second guide post 630 is connected to the bottom of the abutment assembly 100, and a second end of the second guide post 630 penetrates the first fixing plate 640. A second end of the second guide post 630 is fixedly coupled to the second fixing plate 650.
The carrier plate assembly 400, as shown in fig. 5 and 6, the carrier plate assembly 400 is used to drive the base assembly 100 to move relative to the first lifting mechanism 300, so as to facilitate the placement of a substrate or the taking of a wafer on the base. In one embodiment, the carrier plate assembly 400 includes a slider 410, a guide rail 420, and a third moving plate 430. The slider 410 is connected to an end surface of the first moving plate 330. The first end of the guide rail 420 is slidably coupled to the slider 410. The second end of the guide rail 420 is connected to the third moving plate 430. The third moving plate 430 is coupled to the molybdenum table assembly 200, and the third moving plate 430 is coupled to the base table assembly 100. The third moving plate 430 has a grip 431 therein, and the grip 431 is used to pull the third moving plate 430. It should be noted that the end surfaces of the slider 410 and the first moving plate 330 are fixedly connected in two ways, one is that the slider 410 is located on the lower end surface of the first moving plate 330, and the other is that the slider 410 is located on the upper end surface of the first moving plate 330. Then, the first end of the guide rail 420 is slidably connected to the slider 410, and the second end of the guide rail 420 is connected to the third moving plate 430, so that the third moving plate 430 is pulled by the holding grip 431 to move, so that the base assembly 100 is moved out of the first lifting mechanism 300 together, thereby facilitating the placement of a substrate on the base assembly 100 or the removal of a newly grown crystal.
A growth apparatus includes a lift assembly, a stage assembly 100, and a reaction chamber 500. Wherein the lifting assembly is any one of the lifting assemblies mentioned above. The reaction chamber 500 is located above the lifting component, the reaction chamber 500 is provided with an opening relative to the base platform component 100, the reaction chamber 500 is sealed by the base platform component 100, the base platform component 100 is driven by the lifting component to lift in the reaction chamber 500, and a substrate is placed or a crystal is taken conveniently.
The working principle is as follows:
the precise lifting step of the molybdenum table assembly 200 is that the molybdenum table assembly 200 is positioned in the base station assembly 100, after the support plate assembly 400 and the base station assembly 100 are driven to lift together by the first lifting mechanism 300, the molybdenum table assembly 200 is driven to lift by the second lifting mechanism 600 positioned in the first lifting mechanism 300 and connected with the first lifting mechanism 300, and the second lifting mechanism 600 connected with the molybdenum table assembly 200, so that the molybdenum table assembly 200 is driven to lift by the second lifting mechanism 600, thereby realizing the precise lifting of the molybdenum table assembly 200;
it should be noted that, when a substrate needs to be placed on the base assembly 100 or a wafer needs to be removed, the base assembly 100 is removed from the first elevating mechanism 300 by moving the first elevating mechanism 300 and the carrier assembly 400 downward together to separate the base assembly 100 from the reaction chamber 500, and then the base assembly 100 is removed by moving the slider 410 and the guide rail 420 in the carrier assembly 400 to expose the base assembly 100, thereby facilitating the placement of the substrate on the base assembly 100 or the wafer removal.
The technical effects are as follows:
1. in the embodiment of the present application, the first lifting mechanism 300 drives the base station assembly 100 to lift in the reaction chamber 500, and after the base station assembly 100 moves downward and the reaction chamber 500 is separated, the support plate assembly 400 is matched to drive the base station assembly 100 to move out relative to the first lifting mechanism 300, so that a substrate can be placed on the base station assembly 100 or a crystal can be taken conveniently, and the technical problem in the prior art that the substrate is placed on the base station or the crystal is taken inconveniently is solved; the technical effect of convenient substrate placement or crystal taking on the base station is achieved.
2. In the embodiment of the present application, the second lifting mechanism 600 is located inside the first lifting mechanism 300, and the second lifting mechanism 600 and the first lifting mechanism 300 are parallel to each other, and the direction in which the support plate assembly 400 drives the base assembly 100 to move is perpendicular to both the first lifting mechanism 300 and the second lifting mechanism 600, so that the first lifting mechanism 300, the second lifting mechanism 600 and the support plate assembly 400 are mutually matched, so that the whole lifting assembly is small in size and does not interfere with each other, and the substrate can be conveniently placed on the base or the crystal can be conveniently taken.
3. In this embodiment, the molybdenum table assembly 200 is located the base table assembly 100, and the first lifting mechanism 300 drives the base table assembly 100 to go up and down, and then drives the molybdenum table assembly 200 to go up and down through the second lifting mechanism 600, thereby being beneficial to the accurate lifting of the molybdenum table assembly 200.
While the preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following appended claims be interpreted as including the preferred embodiment and all such alterations and modifications as fall within the scope of the invention.
It will be apparent to those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. The utility model provides a base station lifting unit, acts on the base station subassembly with reaction chamber sliding connection which characterized in that: the lifting assembly comprises:
the first lifting mechanism is connected with the base platform assembly and drives the base platform assembly to lift in the reaction chamber;
the first end of the support plate component is connected with the first lifting mechanism, the second end of the support plate component is connected with the base station component, and the support plate component can drive the base station component to move out relative to the first lifting mechanism.
2. The submount lifting assembly of claim 1, wherein the lifting assembly further comprises:
a molybdenum table assembly located in the base table assembly;
and the second lifting mechanism is connected with the molybdenum table component, is positioned in the first lifting mechanism and is connected with the first lifting mechanism.
3. A base lifting assembly as claimed in claim 2, wherein said second lifting mechanism and said first lifting mechanism are parallel to each other, and the direction of movement of said carrier assembly is perpendicular to both said first lifting mechanism and said second lifting mechanism.
4. A table lifting assembly as claimed in claim 3, wherein said first lifting mechanism comprises:
the fixed frame is positioned outside the reaction chamber;
the first guide column is positioned inside the fixed frame, and two ends of the first guide column are respectively fixedly connected with the inner end face of the fixed frame;
the first moving plate is sleeved with the first guide column and can move up and down along the first guide column, the end face of the first moving plate is connected with the carrier plate assembly, and the carrier plate assembly can move out relative to the first moving plate; and
the driving source is positioned on the outer side of the fixed frame and fixedly connected with the first moving plate, and the driving source provides power for the first moving plate to move up and down.
5. The abutment lifting assembly according to claim 4, wherein a position-limiting cylinder is provided inside the fixing frame, and the position-limiting cylinder is connected to the driving source to limit the position of the driving source.
6. A table lifting assembly as claimed in claim 3, wherein said second lifting mechanism comprises:
a first fixing plate;
the first end of the lead screw is connected with the bottom of the base station assembly, and the second end of the lead screw is connected with the first fixing plate; and
the second moving plate is sleeved on the screw rod and can move up and down along the screw rod, and the second moving plate is connected with the molybdenum table assembly, so that the second moving plate drives the molybdenum table assembly to lift.
7. The submount lifting assembly of claim 6, wherein the second lifting mechanism further comprises:
one or more second guide columns, wherein the second guide columns are parallel to the lead screw, the first ends of the second guide columns are connected with the bottom of the base platform assembly, and the second ends of the second guide columns penetrate through the first fixing plate;
and the second fixing plate is fixedly connected with the second end of the second guide post.
8. The submount lifting assembly of claim 4, wherein the carrier plate assembly comprises:
the sliding block is connected with the end face of the first moving plate;
the first end of the guide rail is connected with the sliding block in a sliding manner; and
and the third moving plate is connected with the second end of the guide rail, sleeved on the outer side of the molybdenum table assembly and connected with the base table assembly.
9. The base lifting assembly of claim 8, wherein the third moving plate has a grip formed therein for pulling the third moving plate.
10. A growing apparatus, comprising:
a lifting assembly as claimed in any one of claims 1 to 9;
a base station assembly;
the reaction chamber is positioned above the lifting component and is provided with an opening relative to the base platform component, the reaction chamber is sealed through the base platform component, and the base platform component is driven to lift in the reaction chamber through the lifting component, so that a substrate can be placed or a crystal can be taken conveniently.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221796223.XU CN217973393U (en) | 2022-07-11 | 2022-07-11 | Base station lifting unit and growth equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221796223.XU CN217973393U (en) | 2022-07-11 | 2022-07-11 | Base station lifting unit and growth equipment |
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| CN217973393U true CN217973393U (en) | 2022-12-06 |
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| CN202221796223.XU Active CN217973393U (en) | 2022-07-11 | 2022-07-11 | Base station lifting unit and growth equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116695099A (en) * | 2023-05-24 | 2023-09-05 | 佛山市海光智能科技有限公司 | Liftable MPCVD growth platform |
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2022
- 2022-07-11 CN CN202221796223.XU patent/CN217973393U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116695099A (en) * | 2023-05-24 | 2023-09-05 | 佛山市海光智能科技有限公司 | Liftable MPCVD growth platform |
| CN116695099B (en) * | 2023-05-24 | 2024-02-06 | 佛山市海光智能科技有限公司 | Liftable MPCVD growth platform |
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