CN217933756U

CN217933756U - Finished product storage and collection device for wafer production

Info

Publication number: CN217933756U
Application number: CN202221876581.1U
Authority: CN
Inventors: 曹金余
Original assignee: Changzhou Shundian Precision Technology Co ltd
Current assignee: Changzhou Shundian Precision Technology Co ltd
Priority date: 2022-07-20
Filing date: 2022-07-20
Publication date: 2022-11-29
Anticipated expiration: 2032-07-20

Abstract

The utility model relates to a wafer collecting technology, which is used for solving the problem that a wafer is easy to scratch when being clamped and stacked and the wafer is easy to shift and collapse when being stacked, in particular to a finished product collecting device for wafer production; the utility model discloses in absorb the wafer through the sucking disc, the possibility of clamping device damage wafer has been avoided, thereby guarantee the yields of wafer in production, bimodulus group has guaranteed the motion stability of wafer in-process of taking simultaneously, avoid wafer and device section bar to bump, spacing jack of multiunit is seted up through on the layer board at the wafer, make the gag lever post can peg graft in two sets of symmetrical spacing jacks of different positions, through the gag lever post to the wafer assistance-localization real-time that piles up, make wafer group pile up neatly, prevent to squint and collapse, and the spacing jack that is close to the central line more is at the interval littleer, make the gag lever post can the not unidimensional wafer of adaptation, the universality of device when using has been improved.

Description

Finished product storage and collection device for wafer production

Technical Field

The utility model relates to a wafer technique of gathering materials specifically is a finished product accomodates device that gathers materials for wafer production.

Background

At present, the demand of the semiconductor market for loading machines is rapidly increased, the labor force is in short supply, the labor cost is continuously increased, the demand of manufacturers on automatic equipment is promoted, the automatic equipment has obvious effects on reducing the production cost and improving the product yield, and the existing wafer needs to be subjected to a plurality of processes such as cleaning, gluing, pasting, shoveling, storing and the like during processing. After being attached to a ceramic disc and processed, a wafer needs to be subjected to shoveling treatment, and the wafer subjected to shoveling enters the next station after being collected; in the prior art, the wafer after being shoveled is manually sent into the corresponding collecting mechanism to be stored, so that time and labor are wasted, and the surface of the wafer is easily damaged.

At present, although the part appears and can accomodate the mechanism of wafer automatically, but most mechanisms all pile up the wafer through the mode of centre gripping, fish tail wafer easily, and the skew collapses takes place for the wafer easily when piling up simultaneously to damage the wafer, lead to the economic loss in the production process, reduced the benefit of enterprise.

In view of the above technical problems, the present application proposes a solution.

SUMMERY OF THE UTILITY MODEL

The utility model discloses in when piling up the wafer, absorb the wafer through the sucking disc, the possibility of clamping device damage wafer has been avoided, thereby guarantee the yields of wafer in production, improve economic benefits, bimodulus group has guaranteed the motion stability and the flexibility of wafer in-process of taking simultaneously, avoid wafer and device section bar to bump, spacing jack of multiunit through seting up on the layer board at the wafer, make the gag lever post can peg graft in two sets of symmetrical spacing jacks of different positions, through the gag lever post to the wafer assistance-localization real-time that piles up, make wafer group pile up neatly, prevent the skew and collapse, and the spacing jack that is close to the central line more is littleer at the interval, make the gag lever post can not unidimensional wafer of adaptation, the universality of device when using has been improved, solve the problem that the wafer when the centre gripping piles up easy fish tail wafer when piling up the wafer and the wafer piles up easy skew and collapse, and provide a finished product storage device for wafer production.

The purpose of the utility model can be realized by the following technical scheme:

a finished product containing and collecting device for wafer production comprises a wafer production device, wherein a portal frame is fixedly mounted on the upper surface of the wafer production device, the portal frame is a U-shaped mechanism, a bottom plate is fixedly mounted on the side wall of the portal frame, a cover plate is fixedly mounted on the side wall of the bottom plate, and the outer wall of the cover plate is connected with a connecting plate in a sliding manner;

the connecting plate outer wall fixed mounting has the section bar pipe, section bar pipe top fixed mounting has indirect motor cover, the one end fixed mounting that the section bar pipe was kept away from to indirect motor cover has driving motor, the section bar pipe is located the inside part of indirect motor cover with driving motor and is connected through the belt, the inside sliding connection of section bar pipe has the connecting rod, connecting rod bottom fixedly connected with connecting box, connecting box bottom fixed mounting has the sucking disc head.

As the utility model discloses a preferred embodiment, wafer apparatus for producing upper surface still fixed mounting has the silicon chip layer board, the silicon chip layer board is located the landing leg department of portal frame one side, it has the gag lever post to peg graft above the silicon chip layer board, the silicon chip has been piled to silicon chip layer board upper surface.

As a preferred embodiment of the utility model, one side fixed mounting that the section bar pipe was kept away from to the connecting plate has the sliding plate, the connecting plate cup joints at the apron outer wall with the sliding plate, sliding plate outer wall fixed mounting has slider and sliding seat, and is two sets of the slider distributes in both sides about the sliding plate, the sliding seat is located between two sets of sliders.

As a preferred embodiment of the utility model, bottom plate one end fixed mounting has driving motor, the inside rotation of bottom plate is connected with the lead screw, the driving motor output shaft is connected with the inside lead screw of bottom plate.

As an optimal implementation mode of the utility model, the equal fixed mounting in sliding seat outer wall and bottom plate both ends has crash pad, crash pad is frustum shape structure.

As an optimal implementation mode of the utility model, the silicon chip layer board upper surface is the arrow point form and has seted up the spacing jack of multiunit, every group spacing jack homoenergetic is connected with the gag lever post.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses in, when piling up the wafer, absorb the wafer through the sucking disc, avoided clamping device to damage the possibility of wafer to guarantee the yields of wafer in production, improve economic benefits, bimodulus group has guaranteed the wafer and has taken the motion stability and the flexibility of in-process simultaneously, avoids wafer and device section bar to bump.

2. The utility model discloses in, through seting up the spacing jack of multiunit on the layer board of wafer for the gag lever post can be pegged graft in the spacing jack of two sets of symmetries of different positions, through the gag lever post to the wafer assistance-localization real-time that piles up, makes wafer group pile up neatly, prevents that the skew from collapsing, and the spacing jack that is close to the central line more is more less at the interval, makes the gag lever post can the not unidimensional wafer of adaptation, has improved the universality of device when using.

Drawings

In order to facilitate understanding for those skilled in the art, the present invention will be further described with reference to the accompanying drawings.

FIG. 1 is a schematic front view of the structure of the present invention;

FIG. 2 is a schematic view of the structure of the connection box of the present invention;

FIG. 3 is a schematic view of the screw rod structure of the present invention;

fig. 4 is a schematic structural view of the sliding seat of the present invention;

fig. 5 is a schematic view of the silicon wafer supporting plate of the present invention.

In the figure: 1. a wafer production device; 2. a gantry; 3. a cover plate; 4. a base plate; 5. a profile tube; 6. an indirect motor housing; 7. a drive motor; 8. a silicon wafer supporting plate; 9. a limiting rod; 10. a suction cup head; 11. a connecting box; 12. a screw rod; 13. a drive motor; 14. a connecting plate; 15. a sliding plate; 16. a slider; 17. a sliding seat; 18. an anti-collision cushion block; 19. limiting the jacks; 20. a connecting rod.

Detailed Description

The technical solution of the present invention will be described clearly and completely with reference to the following embodiments, and it should be understood that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.

The first embodiment is as follows:

at present, although the part of the mechanism capable of automatically accommodating the wafer appears, most of mechanisms stack the wafer in a clamping mode, so that the wafer is easily scratched, the manual stacking efficiency is low, and the wafer is easily scratched, so that the economic loss in the production process is caused, and the benefit of an enterprise is reduced.

Referring to fig. 1-4, a finished product collecting and collecting device for wafer production includes a wafer production device 1, a gantry 2 is fixedly mounted on the upper surface of the wafer production device 1, the gantry 2 is a U-shaped mechanism and spans two ends of the wafer production device 1, a wafer drying device and a wafer stacking support plate are disposed below the gantry 2, a bottom plate 4 is fixedly mounted on a side wall of the gantry 2, a cross section of the bottom plate 4 is of a U-shaped structure, a cover plate 3 is fixedly mounted on a side wall of the bottom plate 4, a gap is left between the cover plate 3 and a side edge of the bottom plate 4, a connecting plate 14 is slidably connected to an outer wall of the cover plate 3, the connecting plate 14 and the sliding plate 15 are sleeved on the outer wall of the cover plate 3, so that the connecting plate 14 and the sliding plate 15 can slide on the outer wall of the cover plate 3, a sliding block 16 and a sliding seat 17 are fixedly mounted on the outer wall of the sliding plate 15, the two groups of sliding blocks 16 are distributed on upper and lower sides of the sliding plate 15, the sliding seat 17 is located between the two groups of sliding blocks 16, an outer wall of the sliding seat 17 and two ends of the sliding seat 17 and the bottom plate 4 are fixedly mounted on two ends of the bottom plate 4, an anti-collision cushion block 18 is fixedly mounted on two ends of the outer wall of the sliding seat 17, the sliding seat 17 is connected to a sliding block 12, an output shaft of a motor for driving motor 12, and a screw rod 12, and a motor, the sliding block 12, and a sliding block 13, and a sliding block 12 are connected to drive the sliding block 13, and a motor, and a screw rod drive the sliding block 13, and a motor for driving the sliding block 13, and a screw rod drive the sliding block 13, the sliding block 13;

14 outer wall fixed mounting of connecting plate has section bar pipe 5, section bar pipe 5 plays the effect of supporting the connection, 5 top fixed mounting of section bar pipe has indirect motor cover 6, the one end fixed mounting that section bar pipe 5 was kept away from to indirect motor cover 6 has drive motor 7, section bar pipe 5 is connected through the belt with the part that drive motor 7 is located indirect motor cover 6 inside, the inside sliding connection of section bar pipe 5 has connecting rod 20, drive motor 7 drives the inside connecting rod 20 of section bar pipe 5 through indirect motor cover 6 and rotates, the connecting rod 20 outside is threaded, through the lift of this screw thread control connecting rod 20, connecting rod 20 bottom fixed connection has connecting box 11, connecting box 11 is along with connecting rod 20 is quiet, connecting box 11 bottom fixed mounting has sucking disc head 10, sucking disc head 10 absorbs the wafer.

The utility model discloses in drive motor 13 and drive lead screw 12 and rotate, lead screw 12 drives sliding plate 15 through sliding seat 17 and moves on apron 3, sliding plate 15 is fixed as an organic whole with connecting plate 14, connecting plate 14 drives the section bar pipe 5 in the outside and removes, when section bar pipe 5 removes to the wafer top of drying, driving motor 7 drives connecting box 11 and descends, sucking disc head 10 of connecting box 11 below absorbs the wafer, absorb the wafer back rethread driving motor 7 and make connecting box 11 rise, drive section bar pipe 5 translation through driving motor 13, remove to silicon chip layer board 8 top, place the wafer on silicon chip layer board 8.

The second embodiment:

the mechanism that can accomodate the wafer automatically at present takes place to shift easily when the wafer piles up and collapses to damage the wafer, lead to the economic loss in the production process, reduced the benefit of enterprise.

Referring to fig. 4-5, a silicon wafer supporting plate 8 is further fixedly mounted on the upper surface of the wafer production device 1, the silicon wafer supporting plate 8 is located at a supporting leg on one side of the portal frame 2 and used for placing collected wafer sheets, a limiting rod 9 is inserted above the silicon wafer supporting plate 8, the wafer sheets are positioned through the limiting rod 9, it is ensured that the wafer sheets are stacked and tidy, the wafer sheets are prevented from collapsing, the silicon wafers are stacked on the upper surface of the silicon wafer supporting plate 8, a plurality of groups of limiting jacks 19 are formed in the upper surface of the silicon wafer supporting plate 8 in an arrow head shape, each group of limiting jacks 19 can be connected with the limiting rod 9, the spacing of the limiting rods 9 is adjusted by inserting the limiting rods 9 into different limiting jacks 19, so that the limiting rods 9 can be suitable for wafer sheets of different sizes, and the universality of the device is improved.

With the first and second embodiments, the working principle is as follows:

the utility model discloses in drive motor 13 and drive lead screw 12 and rotate, lead screw 12 drives sliding plate 15 through sliding seat 17 and moves on apron 3, sliding plate 15 is fixed as an organic whole with connecting plate 14, connecting plate 14 drives the section bar pipe 5 in the outside and removes, when section bar pipe 5 removes to the wafer top of drying, driving motor 7 drives connecting box 11 and descends, sucking disc head 10 of connecting box 11 below absorbs the wafer, absorb back rethread driving motor 7 with the wafer and make connecting box 11 rise, drive section bar pipe 5 translation through driving motor 13, remove to silicon chip layer board 8 top, place the wafer on silicon chip layer board 8, when the wafer prevents on silicon chip layer board 8, carry out spacingly to the wafer through gag lever post 9, hug closely gag lever post 9 with the wafer and place, thereby guarantee the homogeneity that the wafer piles up, prevent the collapse when the wafer piles up.

The foregoing is merely exemplary and illustrative of the structure of the invention, and various modifications, additions and substitutions as described in the detailed description may be made by those skilled in the art without departing from the structure or exceeding the scope of the invention as defined in the claims.

In the description herein, references to the description of "one embodiment," "an example," "a specific example," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. The preferred embodiments are not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical applications, to thereby enable others skilled in the art to best understand the invention for and utilize the invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A finished product containing and collecting device for wafer production comprises a wafer production device (1) and is characterized in that a portal frame (2) is fixedly mounted on the upper surface of the wafer production device (1), the portal frame (2) is a U-shaped mechanism, a bottom plate (4) is fixedly mounted on the side wall of the portal frame (2), a cover plate (3) is fixedly mounted on the side wall of the bottom plate (4), and a connecting plate (14) is connected to the outer wall of the cover plate (3) in a sliding manner;

connecting plate (14) outer wall fixed mounting has section bar pipe (5), section bar pipe (5) top fixed mounting has indirect motor cover (6), the one end fixed mounting that section bar pipe (5) were kept away from in indirect motor cover (6) has driving motor (7), section bar pipe (5) are connected through the belt with the inside part of driving motor (7) position in indirect motor cover (6), section bar pipe (5) inside sliding connection has connecting rod (20), connecting rod (20) bottom fixedly connected with connecting box (11), connecting box (11) bottom fixed mounting has sucking disc head (10).

2. The finished product collecting and aggregating device for wafer production as claimed in claim 1, wherein a silicon wafer supporting plate (8) is further fixedly mounted on the upper surface of the wafer production device (1), the silicon wafer supporting plate (8) is located at a supporting leg on one side of the portal frame (2), a limiting rod (9) is inserted above the silicon wafer supporting plate (8), and silicon wafers are stacked on the upper surface of the silicon wafer supporting plate (8).

3. The finished product collecting and aggregating device for wafer production is characterized in that a sliding plate (15) is fixedly mounted on one side, away from the profile pipe (5), of the connecting plate (14), the connecting plate (14) and the sliding plate (15) are sleeved on the outer wall of the cover plate (3), sliding blocks (16) and sliding seats (17) are fixedly mounted on the outer wall of the sliding plate (15), the two groups of sliding blocks (16) are distributed on the upper side and the lower side of the sliding plate (15), and the sliding seats (17) are located between the two groups of sliding blocks (16).

4. The finished product collecting and collecting device for wafer production as claimed in claim 3, wherein a driving motor (13) is fixedly installed at one end of the bottom plate (4), a screw rod (12) is rotatably connected inside the bottom plate (4), and an output shaft of the driving motor (13) is connected with the screw rod (12) inside the bottom plate (4).

5. The finished product collecting and collecting device for wafer production as claimed in claim 3, wherein crash pad blocks (18) are fixedly mounted on the outer wall of the sliding seat (17) and both ends of the bottom plate (4), and the crash pad blocks (18) are in a frustum-shaped structure.

6. The finished product collecting and collecting device for wafer production as claimed in claim 2, wherein the silicon wafer supporting plate (8) has an arrow-shaped upper surface and a plurality of sets of limiting insertion holes (19), and each set of limiting insertion holes (19) can be connected with a limiting rod (9).