CN215118854U - Automatic feeding and discharging mechanism of clamping tool structure and semiconductor cleaning machine - Google Patents
Automatic feeding and discharging mechanism of clamping tool structure and semiconductor cleaning machine Download PDFInfo
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- CN215118854U CN215118854U CN202120802337.XU CN202120802337U CN215118854U CN 215118854 U CN215118854 U CN 215118854U CN 202120802337 U CN202120802337 U CN 202120802337U CN 215118854 U CN215118854 U CN 215118854U
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- 238000004140 cleaning Methods 0.000 title claims abstract description 26
- 239000004065 semiconductor Substances 0.000 title claims abstract description 19
- 238000007599 discharging Methods 0.000 title claims description 12
- 239000000463 material Substances 0.000 claims abstract description 89
- 238000003723 Smelting Methods 0.000 claims abstract description 43
- 238000005406 washing Methods 0.000 claims abstract description 8
- 239000000969 carrier Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 13
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008094 contradictory effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
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Abstract
The utility model discloses a card smelting tool structure, automatic unloading mechanism of going up of semiconductor cleaning machine, wherein, card smelting tool structure, the product bracket can be placed at card smelting tool structure from last down, the product bracket can walk through card smelting tool structure from up down, through using this card smelting tool structure in the automatic unloading mechanism of going up of semiconductor cleaning machine, cooperation double track translation platform module uses, the product bracket is placed when calorie smelting tool structure is structural, slide to the washing chamber through last track and wash, the product bracket after the washing is placed under the track slides to the below of card smelting tool structure, and from up walk through card smelting tool structure down and get back to initial position, accomplish the unloading process of going up in the automation of semiconductor tablet cleaning machine, and because material loading and unloading are accomplished through the same structure, reduce the equipment volume, the cleaning efficiency is improved.
Description
Technical Field
The utility model relates to an automation equipment technical field, in particular to unloading mechanism in calorie smelting tool structure, semiconductor cleaning machine are automatic.
Background
The semiconductor need carry out plasma cleaning to the basement in the production and processing process to improve lead wire welding quality, traditional cleaning machine equipment material loading unloading is different structures, and material loading and unloading process are divided solitary process, cause equipment huge, and work efficiency is low, is unfavorable for the producer to carry out large-scale semiconductor product production operation.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an automatic unloading mechanism of going up of semiconductor cleaning machine aims at solving current semiconductor cleaning machine equipment bulky, problem that work efficiency is low.
In order to achieve the above object, the utility model discloses at first provide a clamping tool structure for place or walk the product bracket, include:
the supporting plate comprises a first supporting plate and a second supporting plate which are arranged oppositely, and a connecting plate which is connected with the same end of the first supporting plate and the second supporting plate;
the fixture block comprises a first fixture block and a second fixture block which are respectively and rotatably arranged on the first supporting plate and the second supporting plate, and the first fixture block and the second fixture block are provided with a first position after downward rotation and a second position after upward rotation; wherein,
when the first fixture block and the second fixture block are located at the first position, the distance between the first fixture block and the second fixture block is smaller than the distance between the first support plate and the second support plate, and the product bracket is placed between the first fixture block and the second fixture block from top to bottom;
when the first clamping block and the second clamping block are located at the second position, the distance between the first clamping block and the second clamping block is not smaller than the distance between the first supporting plate and the second supporting plate, and the product bracket passes through the space between the first supporting plate and the second supporting plate from bottom to top.
Further, the first fixture block and the second fixture block are respectively provided with a first limiting structure and a second limiting structure, and when the first fixture block and the second fixture block are located at the first position, the product bracket is placed between the first limiting structure and the second limiting structure.
Optionally, the clamping tool structure further comprises:
the clamping seats comprise first clamping seats arranged on the first supporting plate and second clamping seats arranged on the second supporting plate, and the clamping blocks are respectively rotatably arranged on the clamping seats.
Optionally, when the first fixture block and the second fixture block are located at the first position, the first fixture block and the second fixture block are respectively arranged to extend obliquely upward.
Optionally, the first support plate and the second support plate are respectively provided with a limiting member for limiting the first fixture block and the second fixture block to continue to rotate downward when the first fixture block and the second fixture block are at the first position.
The utility model also provides an unloading mechanism in semiconductor cleaning machine is automatic, include:
the feeding and discharging structure is used for pushing the material sheet in the material box to the product bracket or pushing the cleaned material sheet back to the material box;
the double-track translation table module comprises an upper track and a lower track which are arranged in a step shape, the upper track and the lower track are respectively two groups which are arranged oppositely, the distance between the two groups of upper tracks is larger than the distance between the two groups of lower tracks, a first jacking assembly and a second jacking assembly are arranged between the two groups of upper tracks and the two groups of lower tracks, the two groups of upper tracks are provided with the clamping and smelting tool structure, and a first supporting plate and a second supporting plate of the clamping and smelting tool structure can slide on the upper tracks to have a third position and a fourth position;
when the clamping and smelting tool structure is located at the third position, the first jacking assembly lifts the product bracket from top to bottom between the first clamping block and the second clamping block of the clamping and smelting tool structure so as to slide the product bracket to the fourth position, when the clamping and smelting tool structure is located at the fourth position, the second jacking assembly lifts the product bracket from bottom to top to clean the material sheet in the cleaning cavity, and the clamping and smelting tool structure returns to the third position;
after the material sheets are cleaned, the second jacking assembly lifts the product bracket to be placed between the two groups of lower rails and slides to the position below the third position of the clamping jig structure, at the moment, the first jacking assembly lifts the product bracket carrying the cleaned material sheets from bottom to top to pass through the position between the first supporting plate and the second supporting plate, and the cleaned material sheets are pushed back to the material box by the feeding and discharging structure;
and the washing cavity is used for washing the material sheet.
Further, the feeding and discharging structure comprises a material strip ejecting module, a material guiding module and an upper and lower material pushing module, wherein the material strip ejecting module is used for pushing the material sheets in the material box into the material guiding module, and the upper and lower material pushing module is used for pushing the material sheets in the material guiding module into the product bracket and pushing the cleaned material sheets on the product bracket back into the material box.
Preferably, the feeding and discharging structure further comprises a material box lifting module, wherein the material box lifting module is used for lifting the height of the material box, so that the material sheets which are not cleaned in the material box are matched with the heights of the material strip ejecting module and the material guiding module.
The utility model discloses technical scheme is through setting up a card smelting tool structure, the product bracket can be placed in the card smelting tool structure from last down, the product bracket can walk through the card smelting tool structure from up down, through using this card smelting tool structure in the automatic unloading mechanism of going up of semiconductor cleaning machine, cooperation double track translation platform module uses, the product bracket is placed when the card smelting tool is structural, it washs the chamber through last track slide, the product bracket after the washing is placed under the track slide to the below of card smelting tool structure, and from up walk through the card smelting tool structure and get back to initial position down, accomplish the unloading process of going up in the automation of semiconductor tablet cleaning machine, and because material loading and unloading are accomplished through the same structure, reduce the equipment volume, improve the cleaning efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic view of the overall structure of the automatic loading and unloading mechanism of the semiconductor cleaning machine of the present invention;
fig. 2 is a schematic structural view of the magazine lifting module of the present invention;
fig. 3 is a schematic structural view of the material strip ejecting module of the present invention;
fig. 4 is a schematic structural view of the material guiding module of the present invention;
fig. 5 is a schematic structural view of the dual-rail translation stage module of the present invention;
fig. 6 is a schematic structural view of the upper and lower pushing modules of the present invention;
FIG. 7 is a schematic structural view of the clamping and tooling structure of the present invention;
fig. 8 is a schematic view of the action principle of the clamping and tooling structure of the present invention.
The reference numbers illustrate:
the objects, features and advantages of the present invention will be further described with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that all the directional indicators (such as upper, lower, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture, if the specific posture is changed, the directional indicator is changed accordingly.
In the present application, unless expressly stated or limited otherwise, the terms "connected" and "fixed" are to be construed broadly, e.g., "fixed" may be fixedly connected or detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In addition, descriptions in the present application as to "first", "second", and the like are for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicit to the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions in the embodiments may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should not be considered to exist, and is not within the protection scope of the present invention.
The utility model provides a clamping tool structure, this structure can allow the product bracket from the top to place at clamping tool structure, can also allow the product bracket from the lower passage through clamping tool structure, and this clamping tool structure can use and go up unloading mechanism in the semiconductor cleaner is automatic.
The utility model discloses first propose a clamping tool structure 403, please refer to fig. 7 and 8 for place or walk product bracket 7, include: a support plate 4033, wherein the support plate 4033 comprises a first support plate 4033a and a second support plate 4033b which are oppositely arranged, and a connecting plate 4033c which is connected with the same end of the first support plate 4033a and the second support plate 4033 b; the fixture block 4031 comprises a first fixture block 4031a and a second fixture block 4031b which are respectively rotatably arranged on the first support plate 4033a and the second support plate 4033b, and the first fixture block 4031a and the second fixture block 4031b have a first position after being rotated downwards and a second position after being rotated upwards; when the first fixture block 4031a and the second fixture block 4031b are located at the first position, the distance between the first fixture block 4031a and the second fixture block 4031b is smaller than the distance between the first support plate 4033a and the second support plate 4033b, and the product bracket 7 is placed between the first fixture block 4031a and the second fixture block 4031b from top to bottom; when the first fixture block 4031a and the second fixture block 4031b are located at the second position, the distance between the first fixture block 4031a and the second fixture block 4031b is not smaller than the distance between the first support plate 4033a and the second support plate 4033b, and the product bracket 7 passes through the space between the first support plate 4033a and the second support plate 4033b from bottom to top.
Specifically, referring to fig. 8, on the left side of the vertical line in fig. 8, the first fixture block 4031a and the second fixture block 4031b are located at the first position after being rotated downward, and the product bracket 7 is placed between the first fixture block 4031a and the second fixture block 4031b from top to bottom. In fig. 8, the right side of the vertical line indicates that the first block 4031a and the second block 4031b are located at the second position after rotating upward, and the product bracket 7 passes through the space between the first support plate 4033a and the second support plate 4033b from bottom to top.
More specifically, when the first fixture block 4031a and the second fixture block 4031b are located at the first position, the first fixture block 4031a and the second fixture block 4031b may be arranged to be inclined upward, may also be arranged to be inclined downward, and may also be arranged parallel to the horizontal direction, which is not specifically limited as long as when the first fixture block 4031a and the second fixture block 4031b are located at the first position, the distance between the first fixture block 4031a and the second fixture block 4031b is smaller than the distance between the first support plate 4033a and the second support plate 4033 b.
More specifically, when the first fixture block 4031a and the second fixture block 4031b are located at the second position, the first fixture block 4031a and the second fixture block 4031b do not exceed a space between the first support plate 4033a and the second support plate 4033b in the horizontal direction, respectively, so as to ensure that the product bracket 7 can pass through smoothly.
The utility model discloses technical scheme's card smelting tool structure 403 through setting up first fixture block 4031a and second fixture block 4031b structure for product bracket 7 can be placed on card smelting tool structure 403 from last down, and product bracket 7 can be walked through card smelting tool structure 403 from up down, makes on same card smelting tool structure 403, and the material can have the trend of two differences, is convenient for use on automation equipment.
Further, referring to fig. 8, the first fixture block 4031a and the second fixture block 4031b are respectively provided with a first limit structure 4034a and a second limit structure 4034b, and when the first fixture block 4031a and the second fixture block 4031b are located at the first position, the product bracket 7 is placed between the first limit structure 4034a and the second limit structure 4034 b.
Specifically, the first and second limiting structures 4034a and 4034b are respectively arranged on the first and second fixture blocks 4031a and 4031b, so that the product bracket 7 is placed between the first and second limiting structures 4034a and 4034b, the position of the product bracket 7 is fixed conveniently, the product bracket is prevented from shifting, and the reliability of the clamping and smelting tool structure 403 is improved.
Optionally, referring to fig. 7, the clamping tool structure 403 further includes: the clamping seat 4032 comprises a first clamping seat 4032a arranged on the first support plate 4033a and a second clamping seat 4032b arranged on the second support plate 4033b, and the clamping seats 4031 are respectively and rotatably arranged on the clamping seat 4032. Through setting up cassette 4032, play the effect of fixed support fixture 4031, improve the reliability of card smelting tool structure 403.
Optionally, referring to fig. 8, when the first fixture 4031a and the second fixture 4031b are located at the first position, the first fixture 4031a and the second fixture 4031b are respectively inclined and extended upward. The first fixture block 4031a and the second fixture block 4031b extend obliquely upward respectively, so that the height of the first position can be raised, the height of the product bracket 7 is raised, and application scenes are increased.
Optionally, the first support plate 4033a and the second support plate 4033b are respectively provided with a limiting member (not shown in the drawings) for limiting the first fixture 4031a and the second fixture 4031b from continuing to rotate downward in the first position.
Specifically, the first fixture block 4031a and the second fixture block 4031b may be disposed on the support plate 4033 through the rotation shaft, and the limiting member ensures that the first fixture block 4031a and the second fixture block 4031b do not continue to rotate downward when in the first position, so as to ensure structural reliability, the limiting member may be, for example, a protrusion disposed below the first fixture block 4031a and the second fixture block 4031b, and the first fixture block 4031a and the second fixture block 4031b are respectively abutted to the protrusion when in the first position.
The utility model discloses still provide an automatic unloading mechanism 10 of going up of semiconductor cleaning machine, please refer to fig. 1, fig. 2, fig. 5 and fig. 7, include: a loading and unloading structure for pushing the tablets in the magazine 101 onto the product tray 7 or pushing the cleaned tablets back to the magazine 101; double track translation platform module 4, including being last track 404 and the lower track 405 that the echelonment set up, go up track 404 with lower track 405 is two sets of relative settings respectively, and the distance between two sets of last track 404 is greater than the distance between two sets of lower tracks 405, be provided with first jacking subassembly 401 and second jacking subassembly 402 between track 404 and two sets of lower tracks 405 on two sets of, a kind of clamp structure 403 of above-mentioned any kind is installed to two sets of last tracks 404, wherein, clamp structure 403's first backup pad 4033a and second backup pad 4033b can go up track 404 slides and have third position and fourth position.
Work as when card smelting tool structure 403 is located the third position, first jacking subassembly 401 will product bracket 7 from the top down lift place in between card smelting tool structure 403's first fixture block 4031a and second fixture block 4031b, with will product bracket 7 slides to the fourth position, works as when card smelting tool structure 403 is located the fourth position, second jacking subassembly 402 is from the top down lift product bracket 7 washs the tablet in wasing chamber 6, and card smelting tool structure 403 gets back to the third position.
After the tablets are cleaned, the second jacking assembly 402 lifts the product carrier 7 between the two sets of lower rails 405 and slides to a position below the third position of the clamping jig structure 403, and at this time, the first jacking assembly 401 lifts the product carrier 7 carrying the cleaned tablets from bottom to top to pass through between the first support plate 4033a and the second support plate 4033b, and the cleaned tablets are pushed back to the magazine by the loading and unloading structure.
Specifically, the process of pushing the tablets from the magazine 101 to the product carrier 7 is a feeding process, and the process of pushing the cleaned tablets from the product carrier 7 back to the magazine is a discharging process, it is understood that the magazine for pushing the cleaned tablets back may be the same as or different from the magazine 101 for the unwashed tablets, and preferably, the magazine for pushing the cleaned tablets back is the same as the magazine 101 for the unwashed tablets, so that the volume of the apparatus can be reduced.
Specifically, the product brackets 7 can work simultaneously, one product bracket 7 is cleaned in the cleaning cavity 6, and the other product bracket 7 is used for blanking and loading, so that the working efficiency of the equipment can be improved to the maximum degree, and the time is saved.
Specifically, referring to fig. 5, the dual-rail translation stage module 4 slides the clamping tool structure 403 from the third position to the fourth position through the upper rail sliding module 407, pushes the product bracket 7 to slide from the lower position of the clamping tool structure 403 to the lower position of the third position through the pushing block 408 of the lower rail sliding module 406, and lifts the passing clamping tool structure 403 upward through the first lifting assembly 401 to return to the initial position.
The utility model discloses technical scheme is through using card smelting tool structure 403 in the automatic unloading mechanism 10 of going up of semiconductor cleaning machine, cooperation double track translation platform module 4 uses, and when product bracket 7 was placed on card smelting tool structure 403, it washs to slide through last track 404 and wash chamber 6, and product bracket 7 after the washing is placed under track 405 slides the below of card smelting tool structure 403 to from up walk back to initial position through card smelting tool structure 403 down, thereby through the utility model discloses a card smelting tool structure 403 and double track translation platform module 4 cooperation, the unloading process of going up in the automation of accomplishing semiconductor tablet cleaning machine, and because material loading and unloading are accomplished through the same structure, thereby can reduce the equipment volume, improve the cleaning efficiency.
Further, referring to fig. 1 to 4 and 6, the feeding and discharging structure includes a strip ejecting module 2, a material guiding module 3, and an upper and lower pushing module 5, wherein the strip ejecting module 2 is configured to push the material sheets in the material box 101 into the material guiding module 3, and the upper and lower pushing module 5 is configured to push the material sheets in the material guiding module 3 onto the product bracket 7, and push the cleaned material sheets on the product bracket 7 back into the material box.
Specifically, referring to fig. 3 and 4, the feeding process is a two-stage feeding process, and the accuracy of the feeding position can be improved by feeding twice. The material strip ejection module 2 comprises a material pushing sliding assembly 202 and a material pushing rod 201, the material pushing sliding assembly 202 slides to drive the material pushing rod 201 to slide to push out the material sheet at the highest position in the material sheet which is not cleaned in the material box 101 to enter a conveyor belt track 302 of the material guide module 3 for conveying for a certain distance, the material guide module 3 further comprises a material guide module track adjusting mechanism 301, and the width of the conveyor belt track 302 can be adjusted by the material guide module track adjusting mechanism 301 to adapt to cleaning of the material sheets with different specifications.
Further, the upper and lower pushing module 5 includes a material pushing sliding assembly 502 and an upper and lower pushing rod 501, the material pushing sliding assembly 502 slides to drive the upper and lower pushing rod 501 to slide to push the material pieces in the conveyor track 302 into the product bracket 7, so as to complete feeding, and when discharging, the material pushing sliding assembly 502 slides in the opposite direction to drive the upper and lower pushing rod 501 to push the cleaned material pieces back into the material box 101.
Preferably, referring to fig. 1 and 2, the feeding and discharging structure further includes a magazine lifting module 1 for lifting the height of the magazine 101, so that the height of the unwashed material sheet in the magazine 101 matches the height of the material strip ejecting module 2 and the material guiding module 3.
Specifically, the height of the material box 101 is adjusted by arranging the material box lifting module 1, so that the material box 101 without cleaned material pieces can be the same as the material box with cleaned material pieces. The unwashed tablets pushed out by the material pushing rod 201 each time are located at the uppermost layer of all the unwashed tablets, that is, the tablets are washed sequentially downwards from the uppermost layer, the washed tablets are pushed back to the original position in the magazine 101, then the magazine lifting module 1 raises the height of the magazine 101 through the magazine clamping and lifting assembly 102 and clamps and fixes the magazine 101, and the raised height is just the height distance between each layer of tablets, so that the next cleaning process of the tablets is performed.
The above is only the optional embodiment of the present invention, and not the scope of the present invention is limited thereby, all the equivalent structure changes made by the contents of the specification and the drawings are utilized under the inventive concept of the present invention, or the direct/indirect application in other related technical fields is included in the patent protection scope of the present invention.
Claims (8)
1. A chuck tool structure for holding or passing product carriers, comprising:
the supporting plate comprises a first supporting plate and a second supporting plate which are arranged oppositely, and a connecting plate which is connected with the same end of the first supporting plate and the second supporting plate;
the fixture block comprises a first fixture block and a second fixture block which are respectively and rotatably arranged on the first supporting plate and the second supporting plate, and the first fixture block and the second fixture block are provided with a first position after downward rotation and a second position after upward rotation; wherein,
when the first fixture block and the second fixture block are located at the first position, the distance between the first fixture block and the second fixture block is smaller than the distance between the first support plate and the second support plate, and the product bracket is placed between the first fixture block and the second fixture block from top to bottom;
when the first clamping block and the second clamping block are located at the second position, the distance between the first clamping block and the second clamping block is not smaller than the distance between the first supporting plate and the second supporting plate, and the product bracket passes through the space between the first supporting plate and the second supporting plate from bottom to top.
2. The fixture tool structure of claim 1, wherein said first fixture block and said second fixture block are respectively provided with a first stop structure and a second stop structure, and said product carrier is disposed between said first stop structure and said second stop structure when said first fixture block and said second fixture block are in said first position.
3. The chuck tool structure of claim 2, further comprising:
the clamping seats comprise first clamping seats arranged on the first supporting plate and second clamping seats arranged on the second supporting plate, and the clamping blocks are respectively rotatably arranged on the clamping seats.
4. The chuck tool structure according to claim 3, wherein when said first engaging portion and said second engaging portion are located at said first position, said first engaging portion and said second engaging portion are respectively extended and inclined upward.
5. The structure of claim 4, wherein the first support plate and the second support plate are respectively provided with a limiting member for limiting the first engaging portion and the second engaging portion from rotating downward when in the first position.
6. The utility model provides an unloading mechanism in semiconductor cleaning machine automation which characterized in that includes:
the feeding and discharging structure is used for pushing the material sheet in the material box to the product bracket or pushing the cleaned material sheet back to the material box;
the double-track translation table module comprises an upper track and a lower track which are arranged in a step shape, the upper track and the lower track are respectively two groups which are arranged oppositely, the distance between the two groups of upper tracks is larger than the distance between the two groups of lower tracks, a first jacking assembly and a second jacking assembly are arranged between the two groups of upper tracks and the two groups of lower tracks, the two groups of upper tracks are provided with the clamping and smelting tool structure according to any one of claims 1 to 5, wherein the first supporting plate and the second supporting plate of the clamping and smelting tool structure can slide on the upper tracks to have a third position and a fourth position;
when the clamping and smelting tool structure is located at the third position, the first jacking assembly lifts the product bracket from top to bottom between the first clamping block and the second clamping block of the clamping and smelting tool structure so as to slide the product bracket to the fourth position, when the clamping and smelting tool structure is located at the fourth position, the second jacking assembly lifts the product bracket from bottom to top to clean the material sheet in the cleaning cavity, and the clamping and smelting tool structure returns to the third position;
after the material sheets are cleaned, the second jacking assembly lifts the product bracket to be placed between the two groups of lower rails and slides to the position below the third position of the clamping jig structure, at the moment, the first jacking assembly lifts the product bracket carrying the cleaned material sheets from bottom to top to pass through the position between the first supporting plate and the second supporting plate, and the cleaned material sheets are pushed back to the material box by the feeding and discharging structure;
and the washing cavity is used for washing the material sheet.
7. The automatic loading and unloading mechanism of claim 6, wherein the loading and unloading mechanism comprises a strip ejecting module, a guiding module, and an upper and lower pushing module, wherein the strip ejecting module is used for pushing the material sheet in the magazine into the guiding module, and the upper and lower pushing module is used for pushing the material sheet in the guiding module into the product bracket and pushing the cleaned material sheet on the product bracket back into the magazine.
8. The automatic loading and unloading mechanism of claim 7, wherein the loading and unloading mechanism further comprises a magazine lifting module for lifting the height of the magazine to match the height of the strip ejecting module and the material guiding module with the height of the unwashed material sheet in the magazine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120802337.XU CN215118854U (en) | 2021-04-19 | 2021-04-19 | Automatic feeding and discharging mechanism of clamping tool structure and semiconductor cleaning machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120802337.XU CN215118854U (en) | 2021-04-19 | 2021-04-19 | Automatic feeding and discharging mechanism of clamping tool structure and semiconductor cleaning machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215118854U true CN215118854U (en) | 2021-12-10 |
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ID=79267192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202120802337.XU Active CN215118854U (en) | 2021-04-19 | 2021-04-19 | Automatic feeding and discharging mechanism of clamping tool structure and semiconductor cleaning machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215118854U (en) |
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2021
- 2021-04-19 CN CN202120802337.XU patent/CN215118854U/en active Active
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| CP02 | Change in the address of a patent holder | ||
| CP02 | Change in the address of a patent holder |
Address after: 516000 8th floor, innovation building, No. 1, zhongkeji Road, Shihua Avenue, Daya Bay West District, Huizhou, Guangdong Patentee after: Ted laser Huizhou Co.,Ltd. Address before: 518000 401m-2, bike technology building, No.9, scientific research road, Maling community, Yuehai street, Nanshan District, Shenzhen City, Guangdong Province Patentee before: Ted laser Huizhou Co.,Ltd. |