CN217857455U - Wafer classification discharging device - Google Patents

Abstract

The utility model relates to a categorised discharging device of wafer, include: and a controller. A first conveyor line. A plurality of carriers. And the blanking mechanisms are arranged beside the first conveying line and are sequentially arranged along the conveying direction of the first conveying line. The plurality of jacking mechanisms are arranged on the first conveying line and are sequentially distributed along the conveying direction of the first conveying line; the jacking mechanism moves the wafer on the first conveying line to the blanking mechanism. The lifting mechanisms are in one-to-one correspondence with the blanking mechanisms, fixing seats for placing bearing parts are arranged on the lifting mechanisms, and the lifting mechanisms are matched with the blanking mechanisms to place the wafers on the blanking mechanisms into the bearing parts placed on the corresponding fixing seats. And the carrying mechanism is used for carrying the bearing piece to the fixed seat and carrying the bearing piece on the fixed seat to a specified position. The utility model discloses can realize that the wafer that will detect the completion puts things in good order according to the categorised mode automatic classification of settlement, the later stage management of being convenient for, moreover fast, efficient.

Description

Wafer classification discharging device

Technical Field

The utility model relates to a wafer detection technology field especially relates to a categorised discharging device of wafer.

Background

After the wafer is detected, the qualified products and the unqualified products need to be classified and stacked. For unqualified products, the products can be classified according to whether the products can be repaired or used continuously, for example: defective products whose defects can be repaired, defective products whose defects cannot be repaired without affecting the use, rejected products that are disposed of, and the like. Or, the unqualified products can be divided according to the defect types, such as: bubbles, blemishes, concavities, edges, etc. However, the current common method is to only distinguish qualified products from unqualified products, the qualified products are stacked and stored, and the unqualified products are directly scrapped and treated, so that the waste is serious, and the cost control of a factory is not facilitated. Moreover, at present, there is no device specially used for separating and discharging the wafers, even if unqualified products are classified, the laser codes on the wafers need to be checked manually (each wafer has a unique laser code, and a controller can correlate and record the detection result of the wafer and the laser code during detection), so that the wafers can be distinguished, and time and labor are wasted.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a categorised discharging device of wafer, it can be automatically put things in good order the wafer that detects the completion according to the categorised sign indicating number of the categorised mode of settlement, the later stage management of being convenient for, moreover fast, efficient.

In order to achieve the above object, the utility model discloses a categorised discharging device of wafer sets up the discharge end at wafer check out test set, and it includes:

and the first conveying line is used for conveying the detected wafer.

And the bearing parts are used for stacking the wafers.

And the blanking mechanisms are arranged on one side or two sides of the first conveying line and are sequentially distributed along the conveying direction of the first conveying line.

The plurality of jacking mechanisms are arranged on the first conveying line and are sequentially distributed along the conveying direction of the first conveying line; each jacking mechanism corresponds to at least one set of unloading mechanism, and the jacking mechanism moves the wafer on the first conveying line to the unloading mechanism.

The lifting mechanisms are in one-to-one correspondence with the blanking mechanisms, fixing seats used for positioning and placing bearing parts are arranged on the lifting mechanisms, and the lifting mechanisms are matched with the blanking mechanisms to place the wafer on the blanking mechanisms into the bearing parts placed on the corresponding fixing seats.

And the carrying mechanism is used for carrying the unloaded bearing piece to the fixed seat and carrying the bearing piece on the fixed seat to a specified position.

And the controller is connected with the first conveying line, the blanking mechanism, the jacking mechanism, the lifting mechanism and the carrying mechanism.

Preferably, the first conveying line comprises a first transmission motor and two groups of first belt groups, and the two groups of first belt groups are arranged in parallel; the first transmission motor is in transmission connection with the two groups of first belt groups; the jacking mechanism is arranged between the two first belt sets.

Preferably, the blanking mechanism comprises a first mounting frame, a second mounting frame, a first air cylinder, two groups of second belt groups, two groups of third belt groups and a second transmission motor, wherein a seat body of the first air cylinder is fixed on the first mounting frame, and a push rod of the first air cylinder is fixedly connected with the second mounting frame; the first mounting frame is provided with at least two groups of first guide sleeves, the second mounting frame is provided with first guide columns which correspond to the first guide sleeves one by one, and the first guide columns are connected in the first guide sleeves in a sliding manner; the second belt group and the third belt group are both arranged on the second mounting frame, the two second belt groups are arranged in parallel, the two third belt groups are arranged in front of the two second belt groups, the two third belt groups are respectively positioned at the feeding end and the discharging end of the third belt group, and the second belt group is in transmission connection with the third belt groups; and the second transmission motor is in transmission connection with the second belt set or the third belt set.

Preferably, the jacking mechanism comprises a third mounting frame, a fourth mounting frame, a second air cylinder, a third air cylinder, a striker plate, a third transmission motor and at least one group of fourth belt group, a seat body of the second air cylinder is fixed on the third mounting frame, a push rod of the second air cylinder is fixedly connected with the fourth mounting frame, at least two groups of second guide sleeves are arranged on the third mounting frame, second guide columns which are in one-to-one correspondence with the second guide sleeves are arranged on the fourth mounting frame, and the second guide columns are slidably connected in the second guide sleeves; the fourth belt group is arranged on the fourth mounting frame, the third transmission motor is in transmission connection with the fourth belt group, and the conveying direction of the fourth belt group is perpendicular to the conveying direction of the first conveying line; the base body of the third cylinder is fixed on the fourth mounting frame, and the push rod of the third cylinder is fixedly connected with the striker plate.

Preferably, an arc surface used for adjusting the posture of the wafer is arranged on the material baffle, and the arc surface is matched with the periphery of the wafer.

Preferably, the lifting mechanism further comprises a first fixing frame, a first driving motor, a first screw, at least one first sliding rail and at least one first sliding block, the first driving motor and the first sliding rail are fixed on the first fixing frame, the first screw is rotatably connected to the first fixing frame, and the first screw and the first sliding rail are arranged in parallel; the first sliding block is connected to the first sliding rail in a sliding mode and is in threaded connection with the first screw rod; the fixed seat is fixedly connected with the first sliding block; the fixed seat is provided with a plurality of positioning blocks or positioning grooves which are used for positioning and matching with the bearing piece.

Preferably, handling mechanism includes triaxial moving platform, rotating component and at least a set of subassembly of grabbing, triaxial moving platform includes that X axle removes module, Y axle and removes module and Z axle and remove the module.

The X-axis moving module, the Y-axis moving module and the Z-axis moving module respectively comprise at least one second fixing frame, at least one second driving motor, at least one second screw rod, at least one second sliding rail and at least one second sliding block, the second driving motor and the second sliding rail are fixed on the second fixing frame, the second screw rod is rotationally connected to the second fixing frame, and the second screw rod and the second sliding rail are arranged in parallel; the second sliding block is connected to the second sliding rail in a sliding mode, and the second sliding block is in threaded connection with the second screw rod.

The length direction of a second slide rail corresponding to the X-axis moving module is consistent with the length direction of the first conveying line; the second fixing frame corresponding to the Y-axis moving module is fixedly connected with the second sliding block corresponding to the X-axis moving module; and the second fixed frame corresponding to the Z-axis moving module is fixedly connected with the second sliding block corresponding to the Y-axis moving module.

The rotating assembly comprises a rotating cylinder and a third fixing frame, the base body of the rotating cylinder is fixed on the second sliding block corresponding to the Z-axis moving module, and the output shaft of the rotating cylinder is fixedly connected with the third fixing frame.

The grabbing assembly comprises a bidirectional cylinder and two clamping plates, the two side push rods of the bidirectional cylinder are used for fixing one clamping plate respectively, the two clamping plates driven by the bidirectional cylinder are close to or far away from each other, and the two clamping plates are matched with the clamping bearing piece.

Preferably, still be equipped with on the third mount and snatch the fender post group of subassembly one-to-one, keep off including at least one fender post in the fender post group.

Preferably, the conveying device further comprises at least one second conveying line for conveying the unloaded carriers.

Preferably, the conveying device further comprises a plurality of third conveying lines for conveying the sorted carriers, and the third conveying lines are arranged side by side.

The utility model discloses following beneficial effect has:

the utility model discloses the setting will detect the wafer transport of accomplishing and leave at wafer check out test set's discharge end through first transfer chain, the utility model discloses the controller can obtain the testing result of each wafer from wafer check out test set's controller, because the transfer rate of first transfer chain is invariable, can know the time when this wafer reaches each climbing mechanism position when certain wafer reachs first transfer chain. The controller then controls the action of corresponding climbing mechanism at appointed time node to on will belonging to a certain categorised wafer shift to appointed unloading mechanism according to categorised requirement, unloading mechanism then with the elevating system cooperation with the wafer pile up the carrier on. The carrying parts filled with the wafers can be carried to a specified position through the carrying mechanism to be stacked and stored, and meanwhile, the unloaded carrying parts can be placed on the fixed seat of the lifting mechanism, so that uninterrupted wafer classification and stacking are realized. The utility model discloses can realize that the wafer that will detect the completion puts things in good order according to the categorised mode automatic classification of settlement, the later stage management of being convenient for, moreover fast, efficient.

Drawings

Fig. 1 is a schematic view of the present invention.

Fig. 2 is a schematic view of another view angle of the present invention.

Fig. 3 is an enlarged view of a portion a in fig. 2.

Fig. 4 is an enlarged schematic view of a portion B in fig. 2.

Fig. 5 is a schematic view of a first conveyor line.

Fig. 6 is a schematic view of a blanking mechanism.

Fig. 7 is a schematic view of a jacking mechanism.

Fig. 8 is a schematic view of the elevating mechanism.

Fig. 9 is a schematic view of a carrier.

Fig. 10 is a schematic view of the conveyance mechanism.

Description of main part symbols:

a first conveyor line 10, a first drive motor 11, a first belt set 12;

the blanking mechanism 20, the first mounting frame 21, the first guide sleeve 211, the second mounting frame 22, the first guide column 221, the first air cylinder 23, the second belt set 24, the third belt set 25 and the second transmission motor 26;

the lifting mechanism 30, the fourth mounting frame 31, the third air cylinder 32, the material baffle 33, the cambered surface 331, the third transmission motor 34 and the fourth belt set 35;

the lifting mechanism 40, the first fixing frame 41, the first driving motor 42, the first screw 43, the first slide rail 44, the first slider 45, the fixing seat 46, the positioning block 461 and the material blocking column 47;

a carrier 50;

the device comprises a carrying mechanism 60, an X-axis moving module 61, a second fixed frame 611, a second driving motor 612, a second slide rail 613, a second slide block 614, a Y-axis moving module 62, a Z-axis moving module 63, a rotary cylinder 641, a third fixed frame 642, a bidirectional cylinder 651 and a clamping plate 652;

a second transfer line 70;

and a third transfer line 80.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.

As shown in fig. 1-10, the utility model discloses a categorised discharging device of wafer sets up the discharge end at wafer check out test set, and it includes: the automatic blanking device comprises a controller, a first conveying line 10, two second conveying lines 70, a plurality of third conveying lines 80, a plurality of carriers 50, a plurality of blanking mechanisms 20, a plurality of jacking mechanisms 30, a plurality of lifting mechanisms 40 and two sets of carrying mechanisms 60. The utility model discloses a controller can directly adopt wafer check out test set's controller, perhaps, the utility model discloses a controller is connected with wafer check out test set's controller to receive and make clear and definite the testing result of each wafer, be convenient for the utility model discloses sort the operation. A scanner or an industrial camera for reading the wafer laser code may be further disposed at the front end of the first conveying line 10, so as to further ensure the accuracy of the classification.

The feed end of the first conveyor line 10 is butted with the discharge end of the wafer detection equipment, and the first conveyor line 10 comprises a first drive motor 11 and two groups of first belt groups 12. The first drive motor 11 is connected to the controller. The two first belt sets 12 are parallel to each other, and the conveying surfaces of the two first belt sets 12 are flush. The first drive motor 11 is in driving connection with the two first belt sets 12, and the driving speeds of the two belt sets are equal.

The number of the blanking mechanisms 20 is not less than the classification number of the wafers, generally one set of blanking mechanism 20 corresponds to one type, and a plurality of sets of blanking mechanisms 20 correspond to one type. The blanking mechanisms 20 are disposed at two sides of the first conveyor line 10, and are sequentially arranged at equal intervals along the conveying direction of the first conveyor line 10, so as to form an array of two rows and multiple columns.

The blanking mechanism 20 comprises a first mounting frame 21, a second mounting frame 22, a first air cylinder 23, two groups of second belt groups 24, two groups of third belt groups 25 and a second transmission motor 26. The first cylinder 23 and the second transmission motor 26 are connected with the controller. The seat body of the first cylinder 23 is fixed on the first mounting frame 21, and the push rod of the first cylinder 23 is fixedly connected with the second mounting frame 22. The first cylinder 23 is actuated to push the second mounting bracket 22 to move in the vertical direction. Four sets of first guide sleeves 211 are arranged on the first mounting frame 21, first guide posts 221 corresponding to the first guide sleeves 211 one by one are arranged on the second mounting frame 22, the first guide posts 221 are slidably connected in the first guide sleeves 211, and the second mounting frame 22 can move stably through the matching of the first guide posts 221 and the first guide sleeves 211. Second belt group 24 and third belt group 25 all set up on second mounting bracket 22, and two sets of second belt group 24 parallel arrangement each other, and before two sets of second belt group 24 were arranged in to two sets of third belt group 25, and two sets of third belt group 25 were located the feed end and the discharge end of third belt group 25 respectively, and the conveying face parallel and level of second belt group 24 and third belt group 25. The second belt set 24 is in transmission connection with the third belt set 25, the second transmission motor 26 is in transmission connection with the second belt set 24 or the third belt set 25, and the transmission speeds of the second belt set 24 and the third belt set 25 are equal. In a normal state, the first air cylinder 23 contracts, so that the conveying surface of the third belt group 25 is lower than the conveying surface of the first conveying line 10, the blanking mechanism 20 is prevented from blocking the transmission of the wafer, the first conveying line 10 can convey the wafer with different specifications, and the practicability is higher. When the blanking mechanism 20 needs to be used, the second cylinder extends out, so that the conveying surface of the second belt set 24 is flush with the conveying surface of the jacking mechanism 30, and the wafer can be smoothly transited to the blanking mechanism 20. The second belt set 24 has a conveying surface with a certain length to accommodate a plurality of wafers at the same time, so that the wafers are not stacked when the carrier 50 is replaced.

The jacking mechanisms 30 are disposed between the two first belt sets 12 and are sequentially arranged at equal intervals along the conveying direction of the first conveying line 10. The number of the jacking mechanisms 30 is equal to the number of the rows of the blanking mechanisms 20, that is, one set of jacking mechanisms 30 corresponds to two sets of blanking mechanisms 20.

The jacking mechanism 30 comprises a third mounting frame, a fourth mounting frame 31, a second air cylinder, a third air cylinder 32, a striker plate 33, a third transmission motor 34 and two groups of fourth belt groups 35. The second cylinder, the third cylinder 32 and the third transmission motor 34 are connected with the controller. The pedestal of second cylinder is fixed on the third mounting bracket, and the push rod and the fourth mounting bracket 31 fixed connection of second cylinder, second cylinder promote the removal of fourth mounting bracket 31 along vertical direction. Four groups of second guide sleeves are arranged on the third mounting frame, second guide columns in one-to-one correspondence with the second guide sleeves are arranged on the fourth mounting frame 31, and the second guide columns are connected in the second guide sleeves in a sliding mode. The third and fourth mounts 31 are in mating relationship with the first and second mounts 21, 22. The fourth belt set 35 is disposed on the fourth mounting frame 31, the third driving motor 34 is in driving connection with the fourth belt set 35, the conveying direction of the fourth belt set 35 is perpendicular to the conveying direction of the first conveying line 10, and the fourth belt set 35 can be in butt joint with the third belt set 25 close to the fourth belt set. Normally, the second cylinder is contracted, and the conveying surface of the fourth belt group 35 is disposed lower than the conveying surface of the first conveyor line 10.

The seat body of the third cylinder 32 is fixed on the fourth mounting frame 31, and the push rod of the third cylinder 32 is fixedly connected with the striker plate 33.

The material baffle plate 33 is provided with a cambered surface 331 for adjusting the posture of the wafer, and the cambered surface 331 can be matched with the periphery of the wafer. Under normal conditions, the third cylinder 32 is contracted, and the material baffle plate 33 can not block the wafer from being conveyed on the first conveying line 10. When the wafer moves to the position of the blanking mechanism 20 which the wafer needs to go to, the third cylinder 32 extends out to block the wafer, and the first conveying line 10 still continues to operate and can be matched with the cambered surface 331 on the material baffle 33 to perform self-adaptive adjustment on the posture of the wafer, so that the wafer can be ensured to be over against the corresponding blanking mechanism 20. After the wafer is blocked, the second cylinder acts, the fourth belt set 35 jacks up the wafer, then the third transmission motor 34 acts, and the fourth belt set 35 conveys the wafer to the corresponding blanking mechanism 20, so that one-time sorting is completed.

The lifting mechanisms 40 correspond to the blanking mechanisms 20 one by one and are arranged on one side of the blanking mechanism 20 far away from the first conveying line 10. The lifting mechanism 40 includes a first fixing frame 41, a first driving motor 42, a first screw 43, two first slide rails 44, two first slide blocks 45, and a fixing base 46. The first drive motor 42 is connected to the controller. First driving motor 42 and first slide rail 44 are both fixed on first mount 41, and first screw 43 rotates to be connected on first mount 41, and first screw 43 and first slide rail 44 set up parallel to each other. The first sliding block 45 is slidably connected to the first sliding rail 44, and the first sliding block 45 is in threaded connection with the first screw 43. The fixed seat 46 is fixedly connected with the first slider 45. The fixing base 46 is provided with a plurality of positioning blocks 461 or positioning grooves for positioning and matching with the bearing member 50.

The supporting member 50 is placed on the fixing base 46 and positioned, the supporting member 50 is used for stacking wafers, and a plurality of slots for placing the wafers are arranged on the supporting member 50 along the vertical direction. The wafers on the blanking mechanism 20 are sequentially transmitted by the third conveyor belt, the second conveyor belt and another third conveyor belt, and can be inserted into the slots on the bearing member 50, the lifting mechanism 40 drives the bearing member 50 to move upwards, and the slots on the bearing member 50 are sequentially inserted into the wafers from top to bottom.

When the carriers 50 on the elevator mechanism 40 are fully loaded, the empty carriers 50 need to be replaced to continue stacking the wafers, which is accomplished by the handling mechanism 60. The conveyance mechanism 60 is erected above the first conveyor line 10. The carrying mechanism 60 comprises a three-axis moving platform, a rotating assembly and two or four groups of grabbing assemblies, wherein the three-axis moving platform comprises an X-axis moving module 61, a Y-axis moving module 62 and a Z-axis moving module 63.

The X-axis moving module 61, the Y-axis moving module 62, and the Z-axis moving module 63 each include at least one second fixing frame 611, at least one second driving motor 612, at least one second screw, at least one second slide rail 613, and at least one second sliding block 614. The second drive motor 612 is connected to the controller. The second driving motor 612 and the second slide rail 613 are fixed on the second fixing frame 611, the second screw rod is rotatably connected to the second fixing frame 611, and the second screw rod and the second slide rail 613 are arranged in parallel. The second sliding block 614 is slidably connected to the second sliding rail 613, and the second sliding block 614 is threadedly connected to the second screw. The length direction of the second slide rail 613 corresponding to the X-axis moving module 61 coincides with the length direction of the first conveyor line 10. The second fixing frame 611 corresponding to the Y-axis moving module 62 is fixedly connected to the second sliding block 614 corresponding to the X-axis moving module 61. The second fixing frame 611 corresponding to the Z-axis moving module 63 is fixedly connected to the second sliding block 614 corresponding to the Y-axis moving module 62. The mating relationship of the components in the X-axis moving module 61 is similar to that of the elevating mechanism 40.

The rotating assembly includes a rotating cylinder 641 and a third fixing frame 642, a base of the rotating cylinder 641 is fixed on the second sliding block 614 corresponding to the Z-axis moving module 63, and an output shaft of the rotating cylinder 641 is fixedly connected to the third fixing frame 642. The rotary cylinder 641 is connected to the controller.

The grabbing assembly comprises a bidirectional air cylinder 651 and two clamping plates 652, and the bidirectional air cylinder 651 is connected with a controller. The push rods on two sides of the bidirectional cylinder 651 are respectively used for fixing one clamping plate 652, the bidirectional cylinder 651 drives the two clamping plates 652 to move close to or away from each other, and the two clamping plates 652 are matched with the clamping bearing piece 50. Cooperating snap features may be provided on the carrier 50 and clamp 652 to ensure that the carrier 50 is securely gripped and handled. In addition, in order to avoid that the wafer is thrown out when the carrier 50 is transported, a material blocking column 47 set corresponding to the grabbing assembly one to one is further disposed on the third fixing frame 642, the material blocking column 47 set includes at least one material blocking column 47, and the transporting mechanism 60 can appropriately increase the speed by disposing the material blocking column 47.

The second conveyor line 70 is used for conveying the empty carriers 50, and the second conveyor line 70 may be the same as the first conveyor line 10, or may be a roller conveyor or the like. The two sets of second conveying lines 70 correspond to the two sets of carrying mechanisms 60, and a carrier 50 can be positioned at the end of the second conveying lines 70 so as to be convenient for the carrying mechanisms 60 to grab.

The third transport line 80 is used for transporting carriers 50 loaded with sorted wafers, and the third transport lines 80 are arranged side by side. The loaded carriers 50 on the elevating mechanism 40 are conveyed to the designated third conveyor line 80 by the conveying mechanism 60. The second and third feed lines 70, 80 may or may not be connected to the controller, and the second and third feed lines 70, 80 may be continuously operated.

The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the present invention.

Claims (10)

1. The utility model provides a categorised discharging device of wafer, sets up the discharge end at wafer check out test set, its characterized in that includes:

the first conveying line is used for conveying the detected wafer;

the bearing parts are used for stacking wafers;

the blanking mechanisms are arranged on one side or two sides of the first conveying line and are sequentially distributed along the conveying direction of the first conveying line;

the jacking mechanisms are arranged on the first conveying line and are sequentially distributed along the conveying direction of the first conveying line; each jacking mechanism corresponds to at least one set of blanking mechanism, and the jacking mechanism moves the wafer on the first conveying line to the blanking mechanism;

the lifting mechanisms are in one-to-one correspondence with the blanking mechanisms, fixed seats for positioning and placing bearing pieces are arranged on the lifting mechanisms, and the lifting mechanisms are matched with the blanking mechanisms to place the wafers on the blanking mechanisms into the bearing pieces placed on the corresponding fixed seats;

the carrying mechanism is used for carrying the unloaded bearing piece to a fixed seat and carrying the bearing piece on the fixed seat to a specified position;

and the controller is connected with the first conveying line, the blanking mechanism, the jacking mechanism, the lifting mechanism and the carrying mechanism.

2. The wafer classification discharging device of claim 1, wherein: the first conveying line comprises a first transmission motor and two groups of first belt groups, and the two groups of first belt groups are arranged in parallel; the first transmission motor is in transmission connection with the two groups of first belt groups; the jacking mechanism is arranged between the two first belt sets.

3. The wafer sorting and discharging device of claim 1, wherein: the blanking mechanism comprises a first mounting frame, a second mounting frame, a first air cylinder, two groups of second belt groups, two groups of third belt groups and a second transmission motor, wherein a seat body of the first air cylinder is fixed on the first mounting frame, and a push rod of the first air cylinder is fixedly connected with the second mounting frame; the first mounting frame is provided with at least two groups of first guide sleeves, the second mounting frame is provided with first guide columns which correspond to the first guide sleeves one by one, and the first guide columns are connected in the first guide sleeves in a sliding manner; the second belt group and the third belt group are arranged on the second mounting frame, the two second belt groups are arranged in parallel, the two third belt groups are arranged in front of the two second belt groups, the two third belt groups are respectively positioned at the feeding end and the discharging end of the third belt group, and the second belt group is in transmission connection with the third belt groups; and the second transmission motor is in transmission connection with the second belt set or the third belt set.

4. The wafer sorting and discharging device of claim 1, wherein: the jacking mechanism comprises a third mounting frame, a fourth mounting frame, a second air cylinder, a third air cylinder, a material baffle, a third transmission motor and at least one group of fourth belt group, wherein a seat body of the second air cylinder is fixed on the third mounting frame, a push rod of the second air cylinder is fixedly connected with the fourth mounting frame, at least two groups of second guide sleeves are arranged on the third mounting frame, second guide columns which correspond to the second guide sleeves one to one are arranged on the fourth mounting frame, and the second guide columns are connected in the second guide sleeves in a sliding manner; the fourth belt group is arranged on the fourth mounting frame, the third transmission motor is in transmission connection with the fourth belt group, and the conveying direction of the fourth belt group is perpendicular to the conveying direction of the first conveying line; the base body of the third air cylinder is fixed on the fourth mounting frame, and the push rod of the third air cylinder is fixedly connected with the material baffle plate.

5. The wafer classification discharging device of claim 4, wherein: the wafer attitude adjusting device is characterized in that an arc surface used for adjusting the wafer attitude is arranged on the material blocking plate, and the arc surface is matched with the periphery of the wafer.

6. The wafer sorting and discharging device of claim 1, wherein: the lifting mechanism further comprises a first fixing frame, a first driving motor, a first screw rod, at least one first sliding rail and at least one first sliding block, the first driving motor and the first sliding rail are fixed on the first fixing frame, the first screw rod is rotationally connected to the first fixing frame, and the first screw rod and the first sliding rail are arranged in parallel; the first sliding block is connected to the first sliding rail in a sliding mode and is in threaded connection with the first screw rod; the fixed seat is fixedly connected with the first sliding block; the fixed seat is provided with a plurality of positioning blocks or positioning grooves which are used for positioning and matching with the bearing piece.

7. The wafer sorting and discharging device of claim 1, wherein: the carrying mechanism comprises a three-axis moving platform, a rotating assembly and at least one group of grabbing assemblies, wherein the three-axis moving platform comprises an X-axis moving module, a Y-axis moving module and a Z-axis moving module;

the X-axis moving module, the Y-axis moving module and the Z-axis moving module respectively comprise at least one second fixing frame, at least one second driving motor, at least one second screw rod, at least one second sliding rail and at least one second sliding block, the second driving motor and the second sliding rail are fixed on the second fixing frame, the second screw rod is rotationally connected to the second fixing frame, and the second screw rod and the second sliding rail are arranged in parallel; the second sliding block is connected to the second sliding rail in a sliding mode and is in threaded connection with the second screw rod;

the length direction of a second slide rail corresponding to the X-axis moving module is consistent with the length direction of the first conveying line; the second fixing frame corresponding to the Y-axis moving module is fixedly connected with the second sliding block corresponding to the X-axis moving module; the second fixing frame corresponding to the Z-axis moving module is fixedly connected with the second sliding block corresponding to the Y-axis moving module;

the rotating assembly comprises a rotating cylinder and a third fixing frame, a seat body of the rotating cylinder is fixed on a second sliding block corresponding to the Z-axis moving module, and an output shaft of the rotating cylinder is fixedly connected with the third fixing frame;

the grabbing assembly comprises a bidirectional cylinder and two clamping plates, the two side push rods of the bidirectional cylinder are used for fixing one clamping plate respectively, the two clamping plates driven by the bidirectional cylinder are close to or far away from each other, and the two clamping plates are matched with the clamping bearing piece.

8. The wafer classification discharging device of claim 7, wherein: the third fixing frame is further provided with a material blocking column group which corresponds to the grabbing assemblies one to one, and the material blocking column group comprises at least one material blocking column.

9. The wafer sorting and discharging device of claim 1, wherein: the device also comprises at least one second conveying line for conveying the unloaded carriers.

10. The wafer sorting and discharging device of claim 1, wherein: the conveying device is characterized by further comprising a plurality of third conveying lines for conveying the classified bearing pieces, wherein the third conveying lines are arranged side by side.

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