CN217849660U - Microphone assembly and electronic equipment - Google Patents

Abstract

The application discloses microphone subassembly and electronic equipment. The microphone assembly comprises a vibrating diaphragm, a substrate and a back plate, wherein the vibrating diaphragm is positioned between the substrate and the back plate; the vibrating diaphragm is provided with a sound wave sensitive area, at least one air leakage seam penetrating through the vibrating diaphragm in the thickness direction is arranged on the sound wave sensitive area, and the air leakage seam is in a non-closed shape so as to form a suspended part surrounded by the air leakage seam and a root part fixedly connected with the vibrating diaphragm; and one side of the back plate facing the diaphragm is provided with at least one stopping structure, and at least one part of the at least one stopping structure corresponds to the root part formed by the at least one air leakage seam in position, wherein the projection of the stopping structure and the projection of the corresponding root part are at least partially overlapped on a plane perpendicular to the thickness direction of the substrate. The technical scheme that this application discloses has effectively solved current product structure and under high atmospheric pressure strikes, lets out the root of gas gap and easily tears the problem of vibrating diaphragm because of warping too big.

Description

Microphone assembly and electronic equipment

Technical Field

The application relates to the technical field of microphones, in particular to a microphone assembly and electronic equipment.

Background

MEMS microphones, also called silicon microphones, are microphones made based on MEMS technology, which integrate a capacitor on a silicon wafer to achieve the conversion of acoustic-electric signals. MEMS microphones are increasingly widely used because of their advantages such as small size, low power consumption, excellent performance, good consistency, and convenience in assembly.

In order to ensure the low-frequency response performance of the MEMS microphone and simultaneously ensure that the vibrating diaphragm can timely release air when bearing high-pressure impact, a non-closed annular air release gap is arranged on the vibrating diaphragm, and the vibrating diaphragm in the air release gap can swing up and down around the root of the air release gap so as to adjust the air release amount. However, under the impact of high air pressure, the swing angle of the vibrating diaphragm in the air leakage gap is large, and the root of the air leakage gap is easy to tear the vibrating diaphragm due to excessive deformation.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a microphone subassembly and electronic equipment to effectively solve current product structure under high atmospheric pressure strikes, let out the root of gas gap and easily tear the problem of vibrating diaphragm because of warping too big.

According to an aspect of the present application, there is provided a microphone assembly comprising a diaphragm, a substrate, and a backplate, the diaphragm being located between the substrate and the backplate;

the vibrating diaphragm is provided with a sound wave sensitive area, at least one air leakage gap penetrating through the vibrating diaphragm in the thickness direction is arranged on the sound wave sensitive area, and the air leakage gap is in a non-closed shape so as to form a suspended part surrounded by the air leakage gap and a root part fixedly connected with the vibrating diaphragm;

one side of the back plate facing the diaphragm is provided with at least one stop structure, at least one part of the at least one stop structure corresponds to the root formed by the at least one air leakage gap in position, wherein, on a plane perpendicular to the thickness direction of the substrate, the projection of the stop structure is at least partially overlapped with the projection of the root correspondingly.

Further, the vent slot is formed by a non-closed annular main section.

Further, the stopper structure is composed of a stopper pillar, wherein a projection of the stopper pillar on a plane perpendicular to the thickness direction of the substrate at least partially overlaps a projection of a root formed by the non-closed annular main section of the corresponding relief slit.

Furthermore, the air leakage gap is formed by a non-closed annular main section and at least one linear auxiliary section, wherein the at least one linear section is located in an area surrounded by the non-closed annular section.

Further, the stopper structure is composed of a stopper pillar, wherein a projection of the stopper pillar on a plane perpendicular to the thickness direction of the substrate at least partially overlaps a projection of a root formed by the non-closed annular main section of the corresponding relief slit.

Furthermore, the gas leakage slot is formed by a non-closed annular main section and a non-closed annular auxiliary section, wherein the non-closed annular auxiliary section is located in the area surrounded by the non-closed annular main section.

Further, the stopper structure is composed of two stopper posts, wherein projections of the two stopper posts respectively overlap with a projection of a root formed by the non-closed annular main section and a projection of a root formed by the non-closed annular auxiliary section of the corresponding relief slit at least partially on a plane perpendicular to the thickness direction of the substrate.

Further, the non-enclosed annular main section and the non-enclosed annular auxiliary section are identical in shape and are nested in parallel, and the spacing between the non-enclosed annular main section and the non-enclosed annular auxiliary section is 1 μm to 10 μm.

Furthermore, the non-closed annular main section comprises a main body section and extension sections which are arranged at two ends of the main body section and communicated with the main body section, and a preset included angle is formed between the extension direction of the extension sections and the extension direction of the main body section.

Further, the height of the stop structure is smaller than the distance between the diaphragm and the back plate in the thickness direction of the substrate.

Further, the number of the stop structures is larger than or equal to the number of the air leakage gaps.

Further, the cross-sectional shape of the stop structure is circular, elliptical, or polygonal.

Further, the stop structure is made of an electrically insulating material.

Furthermore, the back plate is provided with at least one through hole penetrating through the back plate in the thickness direction.

Furthermore, a first support body for supporting the vibrating diaphragm is arranged on one side, close to the vibrating diaphragm, of the substrate, and a second support body for supporting the back plate is arranged on one side, far away from the substrate, of the vibrating diaphragm;

the first support body is positioned at the edge of the substrate, so that the vibrating diaphragm is suspended above the substrate;

the second support body is positioned at the edge of the vibrating diaphragm, so that the back plate is suspended above the vibrating diaphragm;

the back plate and the diaphragm form a variable capacitor.

According to another aspect of the present application, there is also provided an electronic device including the microphone assembly according to any one of the embodiments of the present application.

The application has the advantages that the mechanical reliability of the product is improved by arranging the stopping structure corresponding to the root of the air leakage gap on the back plate, so that the problem that the suspended part tears the diaphragm due to too large deformation under the impact of high air pressure to cause failure of the microphone is effectively solved. Illustratively, the air-release slits comprise non-closed annular main sections, and on a plane perpendicular to the thickness direction of the substrate, the projections of the stop structures and the projections of the roots formed by the non-closed annular main sections of the corresponding air-release slits are at least partially overlapped, so that the mechanical strength of the diaphragm is ensured, the timely air release of the diaphragm is also ensured, and the mechanical reliability of the product is further improved.

Drawings

The technical solution and other advantages of the present application will become apparent from the detailed description of the embodiments of the present application with reference to the accompanying drawings.

Fig. 1A is a schematic structural diagram of a microphone assembly according to an embodiment of the present application;

FIG. 1B is a top view of the diaphragm provided in FIG. 1A;

FIG. 1C is an enlarged view of portion A of FIG. 1B;

FIG. 1D is a bottom view of the back plate provided in FIG. 1A;

fig. 1E is a schematic structural view of the diaphragm provided in fig. 1A when deformed;

fig. 2A is a top view of a diaphragm provided in another embodiment of the present application;

FIG. 2B is an enlarged view of portion B of FIG. 2A;

fig. 3A is a top view of a diaphragm according to another embodiment of the present disclosure;

FIG. 3B is an enlarged view of portion C of FIG. 3A;

fig. 3C is a bottom view of a back plate according to another embodiment of the present application.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It should be apparent that the described embodiments are only a few embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; they may be directly connected or indirectly connected through intervening media, or may be connected through the use of two elements or the interaction of two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.

At least one embodiment of the present application provides a microphone assembly, which includes a diaphragm, a substrate, and a back plate, where the diaphragm is located between the substrate and the back plate;

the vibrating diaphragm is provided with a sound wave sensitive area, at least one air leakage gap penetrating through the vibrating diaphragm in the thickness direction is arranged on the sound wave sensitive area, and the air leakage gap is in a non-closed shape so as to form a suspended part surrounded by the air leakage gap and a root part fixedly connected with the vibrating diaphragm;

one side of the back plate facing the diaphragm is provided with at least one stop structure, at least one part of the at least one stop structure corresponds to the root formed by the at least one air leakage gap in position, wherein, on a plane perpendicular to the thickness direction of the substrate, the projection of the stop structure is at least partially overlapped with the projection of the root correspondingly.

Therefore, the stopping structure corresponding to the root of the air leakage gap is arranged on the back plate, the mechanical reliability of the product is improved, and the problem that the vibration diaphragm is torn due to excessive deformation of the suspended part under the impact of high air pressure, so that the microphone fails is effectively solved.

Fig. 1A is a schematic structural diagram of a microphone assembly according to an embodiment of the present disclosure, fig. 1B is a top view of a diaphragm provided in fig. 1A, fig. 1C is an enlarged view of a portion a in fig. 1B, fig. 1D is a bottom view of a back plate provided in fig. 1A, and fig. 1E is a schematic structural diagram of the diaphragm provided in fig. 1A when deformed.

As shown in fig. 1A and 1B, the microphone assembly includes a diaphragm 10, a substrate 20, and a back plate 30, wherein the diaphragm 10 is located between the substrate 20 and the back plate 30;

the vibrating diaphragm 10 is provided with a sound wave sensitive area, at least one air release gap 40 penetrating through the vibrating diaphragm 10 in the thickness direction is arranged on the sound wave sensitive area, and the air release gap 40 is in a non-closed shape so as to form a suspended part 420 surrounded by the air release gap 40 and a root part 430 fixedly connected with the vibrating diaphragm 10;

the side of the backplate 30 facing the diaphragm 10 is provided with at least one stop structure 50, and at least a part of the at least one stop structure 50 corresponds in position to the root 430 formed by the at least one air bleed slit 40, wherein, on a plane perpendicular to the thickness direction of the substrate 20, a projection of the stop structure 50 at least partially overlaps a projection of the corresponding root 430. It should be noted that, when there are a plurality of air vent slits 40, the air vent slits 40 may be uniformly arranged on the diaphragm 10 at intervals in the circumferential direction, and of course, other arrangement modes may also be used, which is not limited in this application. Through set up in the backstop structure 50 that lets out the root 430 correspondence of gas seam 40 on back plate 30, when improving product mechanical strength, can avoid backstop structure 50 to influence the motion of suspended portion 420, guarantee normally to lose heart.

In this embodiment, a first support 60 for supporting the diaphragm 10 is disposed on a side of the substrate 20 close to the diaphragm 10, and a second support 70 for supporting the back plate 30 is disposed on a side of the diaphragm 10 away from the substrate 20; the first support 60 is located at the edge of the substrate 20, so that the diaphragm 10 is suspended above the substrate 20; the second support 70 is located at the edge of the diaphragm 10, so that the back plate 30 is suspended above the diaphragm 10; the back plate 30 and the diaphragm 10 form a variable capacitor.

In the present embodiment, the edge of the back plate 30 is provided with a first pad 90 and a second pad 91, and the second pad 91 is electrically connected to the non-acoustic wave sensitive region of the diaphragm 10.

As shown in FIG. 1C, in the present embodiment, the vent slit 40 is formed by a non-closed annular main section 410.

In the present embodiment, the non-closed annular main section 410 includes a main body section 4101 and extension sections 4102 located at two ends of the main body section 4101 and communicating with the main body section 4101, and the extension direction of the extension sections 4102 and the extension direction of the main body section 4101 have a preset included angle therebetween. The connection between the extension 4102 and the main body 4101 may be a rounded transition connection. It should be further noted that the extending section 4102 may extend towards an area of the diaphragm 10 that is close to the main body section 4101, and may also extend towards an area of the diaphragm 10 that is far from the main body section 4101, which is not limited in this application. The extension 4102 facilitates the suspension part 420 to swing up and down relative to the diaphragm 10, so as to improve the air leakage efficiency, thereby ensuring the low-frequency response performance and ensuring that the diaphragm 10 can be leaked in time when bearing high-pressure impact.

As shown in fig. 1D and 1E, in the present embodiment, the stopping structure 50 is composed of a stopping post 510, wherein, on a plane perpendicular to the thickness direction of the substrate 20, the projection of the stopping post 510 at least partially overlaps with the projection of the root 430 formed by the non-closed annular main section 410 of the corresponding relief slit 40.

In the present embodiment, the height of the stop structure 50 is smaller than the distance between the diaphragm 10 and the back plate 30 in the thickness direction of the substrate 20.

In the present embodiment, the number of the stopper structures 50 is greater than or equal to the number of the air leakage slits 40.

In the present embodiment, the cross-sectional shape of the stopper 50 is circular, elliptical, or polygonal.

In the present embodiment, the stop structure 50 is made of an electrically insulating material. For example, the electrically insulating material is SiN.

In the present embodiment, the back plate 30 is provided with at least one through hole 310 penetrating the back plate 30 in the thickness direction.

In the present embodiment, at least one stop body 80 is disposed on a side of the backplate 30 facing the diaphragm 10, and on a plane perpendicular to the thickness direction of the substrate 20, a projection of the stop body 80 does not overlap with a projection of the root 430 formed by all the air leakage slits 40, a projection of the suspended portion 420 formed by all the air leakage slits 40, and a projection of all the air leakage slits 40. Illustratively, in the present embodiment, the height of the stopper 80 is less than the height of the stopper structure 50. The stop body 80 and the stop structure 50 with different heights are adapted to the deformation of different areas of the diaphragm 10, so that the diaphragm 10 is effectively prevented from being broken due to excessive deformation, and the mechanical reliability of the product is further improved.

Therefore, the stopping structure corresponding to the root of the air leakage gap is arranged on the back plate, the mechanical reliability of the product is improved, and the problem that the vibration diaphragm is torn due to excessive deformation of the suspended part under the impact of high air pressure, so that the microphone fails is effectively solved. Illustratively, the air-release slits are formed by a non-closed annular main section, and on a plane perpendicular to the thickness direction of the substrate, the projection of the stop column at least partially overlaps with the projection of the root formed by the non-closed annular main section of the corresponding air-release slit, thereby ensuring both the mechanical strength and the timely air release of the diaphragm.

Fig. 2A is a top view of a diaphragm 10 according to another embodiment of the present disclosure, and fig. 2B is an enlarged view of a portion B in fig. 2A.

As shown in fig. 2A and 2B, fig. 2A differs from fig. 1B in that: the gas leakage slot 40 is formed by a non-closed ring-shaped main section 410 and at least one linear secondary section 450, wherein the at least one linear secondary section 450 is located in the region surrounded by the non-closed ring-shaped section. It should be noted that a plurality of linear minor segments 450 may be spaced in parallel.

As can be seen from the above, the air leakage slit is formed by the non-closed annular main section and the at least one linear auxiliary section, so that the air leakage capability of the diaphragm 10 is further improved.

Fig. 3A is a top view of a diaphragm 10 according to another embodiment of the present disclosure, fig. 3B is an enlarged view of a portion C in fig. 3A, and fig. 3C is a bottom view of a back plate according to another embodiment of the present disclosure.

As shown in fig. 3A-3C, fig. 3A differs from fig. 1B, for example, in that the gas leakage slot 40 is formed by a non-closed annular main section 410 and a non-closed annular auxiliary section 440, wherein the non-closed annular auxiliary section 440 is located in the region surrounded by the non-closed annular main section 410.

In the present embodiment, the stopper structure 50 is composed of two stopper posts 510, wherein, on a plane perpendicular to the thickness direction of the substrate 20, projections of the two stopper posts 510 respectively overlap with a projection of the root 430 formed by the non-closed annular main section 410 and a projection of the root 430 formed by the non-closed annular auxiliary section 440 of the corresponding relief slit 40 at least partially. It should be noted that the heights of the two stop posts 510 may not be the same. The two stop columns 510 respectively prevent the diaphragm 10 from being torn due to the fracture of the root portion 430 formed by the non-closed annular main section 410 and the root portion 430 formed by the non-closed annular auxiliary section 440, thereby effectively improving the mechanical reliability of the product.

In the present embodiment, the non-enclosed annular main section 410 and the non-enclosed annular auxiliary section 440 are identically shaped and are nested in parallel, and the spacing between the non-enclosed annular main section 410 and the non-enclosed annular auxiliary section 440 is 1 μm-10 μm.

Therefore, the stopping structure corresponding to the root of the air leakage gap is arranged on the back plate, the mechanical reliability of the product is improved, and the problem that the vibration diaphragm is torn due to excessive deformation of the suspended part under the impact of high air pressure, so that the microphone fails is effectively solved. Illustratively, the vent seam is formed by a non-closed annular main section and a non-closed annular auxiliary section, thereby further improving the venting capability of the diaphragm. Meanwhile, the vibrating diaphragm tearing caused by the fracture of the root formed by the non-closed annular main section and the root formed by the non-closed annular auxiliary section is prevented through the two stop columns, so that the mechanical reliability of the product is effectively improved.

At least one embodiment of the present application further provides an electronic device including the microphone assembly of any one of the embodiments of the present application. For example, the electronic device is an artificial intelligence end product.

In the embodiments of the present application, unless otherwise specified or conflicting with respect to logic, terms or descriptions in different embodiments have consistency and may be mutually cited, and technical features in different embodiments may be combined to form a new embodiment according to their inherent logic relationship. In the present application, "at least one" means one or more, "a plurality" means two or more.

It is to be understood that the various numerical references referred to in the embodiments of the present application are merely for descriptive convenience and are not intended to limit the scope of the embodiments of the present application. The sequence numbers of the above-mentioned processes do not mean the execution sequence, and the execution sequence of the processes should be determined by their functions and inherent logic. The microphone assembly and the electronic device provided in the embodiments of the present application are described in detail above, and the principles and embodiments of the present application are described herein by applying specific examples, and the description of the embodiments above is only used to help understand the method and the core idea of the present application; meanwhile, for a person skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.

Claims (16)

1. A microphone assembly, characterized in that the microphone assembly comprises a diaphragm (10), a substrate (20) and a backplate (30), the diaphragm (10) being located between the substrate (20) and the backplate (30);

the vibrating diaphragm (10) is provided with a sound wave sensitive area (110), at least one air release gap (40) penetrating through the vibrating diaphragm (10) in the thickness direction is arranged on the sound wave sensitive area (110), and the air release gap (40) is in a non-closed shape so as to form a suspended part (420) surrounded by the air release gap (40) and a root part (430) fixedly connected with the vibrating diaphragm (10);

the side, facing the diaphragm (10), of the back plate (30) is provided with at least one stop structure (50), at least one part of the at least one stop structure (50) corresponds to the root part (430) formed by the at least one air leakage seam (40) in position, and the projection of the stop structure (50) and the projection of the corresponding root part (430) at least partially overlap on a plane perpendicular to the thickness direction of the substrate (20).

2. Microphone assembly according to claim 1, characterized in that the vent slit (40) is formed by a non-closed annular main section (410).

3. A microphone assembly according to claim 2, characterized in that the stop structure (50) is constituted by a stop pillar (510), wherein a projection of the stop pillar (510) at least partially overlaps a projection of a root (430) formed by the non-closed annular main section (410) of the corresponding relief slit (40) in a plane perpendicular to the thickness direction of the substrate (20).

4. Microphone assembly according to claim 1, characterized in that the vent slit (40) is made up of one non-closed annular main section (410) and at least one rectilinear secondary section (450), wherein the at least one rectilinear secondary section (450) is located within the area surrounded by the non-closed annular section (410).

5. Microphone assembly according to claim 4, characterized in that the stop structure (50) is constituted by one stop pillar (510), wherein, in a plane perpendicular to the thickness direction of the base (20), the projection of the stop pillar (510) at least partially overlaps the projection of the root (430) formed by the non-closed annular main section (410) of the corresponding run-flat slit (40).

6. Microphone assembly according to claim 1, characterized in that the vent slit (40) is formed by one non-closed annular main section (410) and one non-closed annular auxiliary section (440), wherein the non-closed annular auxiliary section (440) is located within the area surrounded by the non-closed annular main section (410).

7. Microphone assembly according to claim 6, characterized in that the stop structure (50) is constituted by two stop studs (510), wherein the projections of the two stop studs (510) at least partially overlap the projection of the root (430) formed by the non-closed annular main section (410) and the projection of the root (430) formed by the non-closed annular auxiliary section (440) of the corresponding run-flat slit (40), respectively, on a plane perpendicular to the thickness direction of the substrate (20).

8. The microphone assembly of claim 7, wherein the non-enclosed annular main section (410) and the non-enclosed annular auxiliary section (440) are identically shaped and nested in parallel, and a spacing between the non-enclosed annular main section (410) and the non-enclosed annular auxiliary section (440) is 1 μm-10 μm.

9. The microphone assembly according to any one of claims 2 to 8, wherein the non-closed ring-shaped main section (410) comprises a main body section (4101) and extension sections (4102) located at both ends of the main body section (4101) and communicating with the main body section (4101), and wherein the extension sections (4102) extend in a direction having a predetermined angle with the extension direction of the main body section (4101).

10. Microphone assembly according to claim 1, characterized in that the height of the stop structure (50) is smaller than the separation of the diaphragm (10) and the backplate (30) in the thickness direction of the substrate (20).

11. The microphone assembly of claim 1, wherein the number of stop structures (50) is greater than or equal to the number of bleed slots (40).

12. The microphone assembly of claim 1, wherein the stop structure (50) has a cross-sectional shape that is circular, elliptical, or polygonal.

13. The microphone assembly of claim 12, wherein the stop structure (50) is comprised of an electrically insulating material.

14. The microphone assembly according to claim 1, wherein the backplate (30) is provided with at least one through hole (310) penetrating the backplate (30) in a thickness direction.

15. The microphone assembly of claim 14, wherein a side of the substrate (20) close to the diaphragm (10) is provided with a first support (60) for supporting the diaphragm (10), and a side of the diaphragm (10) away from the substrate (20) is provided with a second support (70) for supporting the back plate (30);

the first support body (60) is positioned at the edge of the substrate (20) so that the vibrating diaphragm (10) is suspended above the substrate (20);

the second support (70) is positioned at the edge of the vibrating diaphragm (10) so that the back plate (30) is suspended above the vibrating diaphragm (10);

wherein the back plate (30) and the diaphragm (10) form a variable capacitance.

16. An electronic device comprising a microphone assembly as claimed in any one of the preceding claims 1-15.

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