CN217822671U - In-out material inspection bin - Google Patents
In-out material inspection bin Download PDFInfo
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- CN217822671U CN217822671U CN202221344042.3U CN202221344042U CN217822671U CN 217822671 U CN217822671 U CN 217822671U CN 202221344042 U CN202221344042 U CN 202221344042U CN 217822671 U CN217822671 U CN 217822671U
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Abstract
The utility model discloses an in-out material checking bin, which relates to the technical field of wafer material checking and comprises a workbench and an annular track transmission mechanism, wherein the annular track transmission mechanism is arranged on the workbench; the visual detection mechanisms are arranged on the workbench and used for carrying out character recognition on the laser etching information on the wafer; the wafer boat box is used for placing wafers and moves on the annular track transmission mechanism; the wafer manipulator is used for moving the wafer back and forth between the visual detection mechanism and the wafer carrier; a label printer for printing a label; and the material conveying device is in butt joint with the annular track conveying mechanism, and the wafer boat box is conveyed through the material conveying device. After the technical scheme is adopted, the utility model discloses can practice thrift the manual work, raise the efficiency, reduce cost.
Description
Technical Field
The utility model relates to a material technical field is examined to the wafer, concretely relates to feed bin is examined in business turn over.
Background
The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit device structures can be fabricated on a silicon wafer to form an IC product with specific electrical functions.
The laser etching information is pasted on the wafers after the wafers are not processed or are processed so as to distinguish the wafers, before the wafers are put in storage, character recognition needs to be carried out on each wafer, a traditional wafer storage generally adopts a transportation wafer boat box, then character recognition is carried out on the wafers manually, and then the wafers are conveyed and stored manually, so that under long-term labor, the efficiency of transportation and storage can be reduced, the material detection speed of the wafers is prolonged, information recording errors can occur due to fatigue, meanwhile, the labor cost is high, and therefore, a mechanical device is needed to replace the labor.
In view of this, the present invention is designed to overcome many deficiencies and inconveniences caused by the above-mentioned process, and actively research, improve and try to develop and design the present invention.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to prior art's defect with not enough, provide one kind and can practice thrift the manual work, raise the efficiency, reduce cost examine the feed bin.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
an in-out inspection bin comprises
A working table is arranged on the upper portion of the machine body,
the annular track transmission mechanism is arranged on the workbench;
the visual detection mechanisms are arranged on the workbench and used for carrying out character recognition on the laser etching information on the wafer;
the wafer boat comprises a plurality of wafer boat boxes, a plurality of conveying mechanisms and a plurality of conveying mechanisms, wherein the wafer boat boxes are used for placing wafers and move on an annular track conveying mechanism;
the wafer manipulators are used for moving the wafers back and forth between the visual detection mechanism and the wafer carrier;
the label printer is used for printing a label and identifying information of the wafer in the material taking wafer boat box;
the material conveying devices are in butt joint with the annular track conveying mechanism, and the wafer boat boxes are conveyed through the material conveying devices;
the device comprises a plurality of bin outlet and inlet mechanisms, wherein each bin outlet and inlet mechanism comprises a reversing mechanism and a first clamping mechanism, the first clamping mechanism is arranged on a workbench and used for clamping the crystal boat box to move between the annular track transmission mechanism and the reversing mechanism, and the reversing mechanism is used for driving the crystal boat box to rotate.
Further, circular orbit transmission device includes circular orbit, belt, a plurality of belt pulley, a plurality of push pedal and a plurality of material platform, the circular orbit sets up on the workstation, the belt sets up along the circular orbit, the belt pulley sets up on the workstation to drive belt transmission, the push pedal sets up on the belt, material platform sets up on the circular orbit, the relative material platform setting of push pedal, belt transmission drive push pedal transmission, the push pedal removes and drives material platform and remove, material platform is used for placing the wafer boat box.
Further, visual detection mechanism includes fixed plate, baffle, first camera, second camera and light source, the fixed plate sets up on the workstation, be provided with the baffle on the fixed plate, the top of baffle is provided with first camera, and the below of baffle is provided with the second camera, first camera and second camera all set up towards the baffle, all are provided with the light source on first camera and the second camera, be provided with constant head tank and U-shaped groove on the baffle, first camera and second camera can see through radium carving information on the U-shaped groove discernment wafer, and the constant head tank is used for fixing a position the wafer.
Further, the wafer manipulator comprises a control base, a support disc, two first connecting arms, two second connecting arms, two third connecting arms, an upper clamping arm, a lower clamping arm and a sensor, wherein the support disc is arranged on the control base, one ends of the two first connecting arms are arranged on the support disc, the other ends of the two first connecting arms are respectively connected with one end of one second connecting arm, the other ends of the two second connecting arms are respectively connected with one end of the two third connecting arms, one third connecting arm is connected with the upper clamping arm, the other third connecting arm is connected with the lower clamping arm, the upper clamping arm and the lower clamping arm are oppositely arranged up and down for clamping a wafer, and the sensor is arranged on the third connecting arm.
Further, reversing mechanism and first clamp are got the mechanism butt joint, reversing mechanism includes chassis, cylinder fixed plate, revolving cylinder, clamp splice and backing plate, the cylinder fixed plate sets up on the chassis, be provided with revolving cylinder on the cylinder fixed plate, the clamp splice sets up on revolving cylinder, be provided with the backing plate on the clamp splice.
Further, the first clamp is got the mechanism and is included stand, cylinder mounting panel, sliding cylinder, lift cylinder, clamp and get cylinder and clamping jaw, the stand sets up on the workstation, the cylinder mounting panel sets up on the stand, sliding cylinder sets up on the cylinder mounting panel, lift cylinder sets up on sliding cylinder, the clamp is got the cylinder and is set up on lift cylinder, the clamping jaw sets up and gets the both sides of cylinder at the clamp, the clamping jaw is used for pressing from both sides and gets the crystal boat box.
Further, material transfer device includes that support column, conveyer belt, second press from both sides and get mechanism and the automatic closing mechanism of window, the conveyer belt sets up on the support column, the second is got the mechanism and is set up on the conveyer belt, and the second is got the mechanism and is used for getting the crystal boat box from the conveyer belt and gets extremely on the circular orbit conveying mechanism, the automatic closing mechanism of window sets up on the support column for the opening and closing of control material transfer device's material mouth.
After the technical scheme is adopted, the utility model discloses place the wafer boat box on material conveying device, convey to annular transmission mechanism through material conveying device on, then wafer manipulator snatchs wafer on the wafer boat box to visual inspection mechanism on, discern radium carving information on the wafer, after the discernment is accomplished, put back the wafer in situ of wafer boat box, after all wafers are accomplished the discernment on certain wafer boat box, the first clamp that goes out the mechanism of putting in storage gets the mechanism and presss from both sides this wafer boat box and get to reversing mechanism and rotate 90, accomplish the material checking of wafer on the wafer boat box, adopt mechanization to replace the manual work, the manual work has been practiced thrift, and the efficiency is improved, and the labor cost is reduced.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural diagram of the material conveying device of the present invention.
Fig. 3 is a schematic structural diagram of the material platform of the present invention.
Fig. 4 is a schematic structural diagram of the wafer robot according to the present invention.
Fig. 5 is a schematic structural diagram of the middle vision inspection mechanism of the present invention.
Fig. 6 is a schematic structural view of the middle entrance and exit mechanism of the present invention.
Fig. 7 is a schematic view showing the structure of the wafer cassette according to the present invention.
Fig. 8 is a schematic structural diagram of the middle reversing mechanism of the present invention.
Detailed Description
In order to further explain the technical solution of the present invention, the present invention is explained in detail by the following embodiments.
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. In the description of the present invention, "a plurality" means two or more unless otherwise specified.
Referring to fig. 1-8, the present invention discloses an in-out inspection chamber 1, which comprises a worktable 11, a circular track transmission mechanism 12, a plurality of vision inspection mechanisms 13, a plurality of wafer manipulators 15 and label printers 16 for moving wafers back and forth between the vision inspection mechanisms 13 and the wafer boat 6, a plurality of material conveying devices 2, a plurality of in-out chamber mechanisms 3, and a plurality of wafer boat 6 for placing wafers.
The workbench 11 is a rectangular workbench, and an open slot 111 is formed in the middle of the workbench 11.
The annular track transmission mechanism 12 is arranged on the workbench 11, and the wafer boat 6 moves on the annular track transmission mechanism 12; the visual detection mechanism 13 is arranged on the workbench 11 and is used for carrying out character recognition on the laser etching information on the wafer; the label printer 16 is for printing labels;
the circular track transmission mechanism 12 includes a circular track 121, a belt 122, a plurality of belt pulleys 123, a plurality of push plates 124 and a plurality of material platforms 125, the circular track 121 is disposed on the worktable 11, the belt 122 is disposed along the circular track 121, the belt pulleys 123 are disposed on the worktable 11 and drive the belt 122 to transmit, the push plates 124 are disposed on the belt 122, the material platforms 125 are disposed on the circular track 121, the push plates 124 are disposed opposite to the material platforms 125, the belt 122 transmits and drives the push plates 124 to transmit, the push plates 124 move and drive the material platforms 125 to move, and the material platforms 125 are used for placing the pod 6.
The material platform 125 includes movable pulley 1251, bottom plate 1252 and puts thing board 1253, movable pulley 1252 sets up the bottom surface at bottom plate 1252, blocks and is in the both sides of circular orbit 121, movable pulley 1252 can slide on circular orbit 121, be provided with draw-in groove a on the bottom plate 1252, draw-in groove a's position with push pedal 124's position is corresponding, and push pedal 124 card is gone into in the draw-in groove a, it sets up on bottom plate 1252 to put thing board 1253, it is provided with stopper b to put thing board 1253's surface edge, stopper b is used for spacing to wafer boat box 6.
The belt pulley 123 rotates, drives the transmission of belt 122, and during the transmission, the push pedal 124 that sets up on belt 122 can be along with the transmission of belt 122 together to drive material platform 125 and drive together, make the crystal boat box 6 of placing on material platform 125 can remove along with material platform 125, and the quantity of material platform 125 is provided with N, can adjust the quantity of material platform 125 as required.
In this embodiment, the number of the pulleys 123 is four, and the four pulleys are respectively located at four corners of the annular rail 121.
The vision inspection mechanism 13 may be provided in plural, so as to improve the recognition efficiency, in this embodiment, two vision inspection mechanisms 13 are provided, the vision inspection mechanism 13 includes a fixing plate 131, a partition plate 132, a first camera 133, a second camera 134 and a light source 135, the fixing plate 131 is disposed on the worktable 11, the partition plate 132 is disposed on the fixing plate 131, the first camera 133 is disposed above the partition plate 132, the second camera 134 is disposed below the partition plate 132, the first camera 133 and the second camera 134 are both disposed toward the partition plate 132, the light source 135 is disposed on the first camera 133 and the second camera 134, the partition plate 132 is provided with a positioning slot c and a U-shaped slot d, and the first camera 133 and the second camera 134 can recognize laser engraving information on the wafer through the U-shaped slot d.
The wafer manipulator 15 grabs the wafer to the positioning groove c of the partition 132, and then character recognition is performed on the laser etching information on the wafer through the first camera 133 or the second camera 134, so that information of the batch, model, specification and the like of the wafer is obtained.
The wafer boat 6 is provided with an opening with a large side and a small side, the wafer boat 6 is provided with a plurality of strip-shaped clamping grooves 61, each strip-shaped clamping groove 61 is used for placing a wafer, the wafer storage capacity is improved, meanwhile, the wafer manipulator 15 can place the wafer back in the position after grabbing the wafer and performing character recognition, and the opening with one large side and one small side is arranged, so that the wafer boat 6 cannot fall off from the wafer boat 6 after rotation.
In this embodiment, the number of cassettes 6 is designed according to the number of material platforms 125.
The wafer robot 15 may be provided in multiple numbers, where the wafer robot 15 includes a control base 151, a support plate 152, two first connecting arms 153, two second connecting arms 154, two third connecting arms 155, an upper clamping arm 156, a lower clamping arm 157 and a sensor 158, the support plate 152 is disposed on the control base 151, one end of each of the two first connecting arms 153 is movably disposed on the support plate 152, the other end of each of the two first connecting arms 153 is connected to one end of each of the two second connecting arms 154, the other end of each of the two second connecting arms 154 is connected to one end of each of the two third connecting arms 155, one of the third connecting arms 155 is connected to one end of the upper clamping arm 156, the other third connecting arm 155 is connected to one end of the lower clamping arm 157, the upper clamping arm 156 and the lower clamping arm 157 are disposed opposite to each other in an up-down manner for clamping a wafer, the sensor 158 is disposed on the third connecting arm 155, and the sensor 158 is used for detecting whether a wafer is clamped on the wafer robot 15.
The first connecting arm 153 is movably connected to the second connecting arm 154.
The second connecting arm 154 is movably connected to the third connecting arm 155.
The third connecting arm 155 is movably connected with the upper clamping arm 156 or the lower clamping arm 157.
The other ends of the upper and lower clamping arms 156 and 157 are arc-shaped structures, so that the contact surface with the wafer can be reduced when the wafer is clamped, and the wafer is prevented from being damaged.
In this embodiment, the number of the wafer manipulators 15 is two, which corresponds to the number of the visual detection mechanisms 13, each wafer manipulator 15 corresponds to one visual detection mechanism 13, and the two wafer manipulators 15 can simultaneously clamp the wafer to perform character recognition, so that the recognition efficiency is improved.
The wafer robot 15 is movable, and its position can be adjusted according to the position of the cassette 6.
The label printer 16 is used for printing labels, when the materials are taken, the label printer 16 can print out corresponding labels according to the number of the discharged wafers, then the materials are discharged together with the wafer carrier 6, then labeling is carried out, and the labels help to distinguish information of each wafer.
The material conveying device 2 is provided with a material port, the material conveying device 2 comprises a support pillar 21, a conveyor belt 22, a second clamping mechanism 23 and a window automatic opening and closing mechanism (not disclosed in the figure), the conveyor belt 22 is arranged on the support pillar 21, the conveyor belt 22 is a common conveyor belt in the market, the second clamping mechanism 23 is used for clamping the wafer cassette 6 from the conveyor belt 22 to the material platform 125 of the annular track 121, and the window automatic opening and closing mechanism is arranged on the support pillar 21 and used for controlling the opening and closing of the material port of the material conveying device 2.
The automatic opening and closing mechanism of the window is the existing device on the market, if need put or get the crystal boat box 6, start the automatic opening and closing mechanism of the window, if need not to put or get the crystal boat box 6, close the automatic opening and closing mechanism of the window, avoid the dust to enter; in the feeding process, the wafer boat 6 is placed on the conveyor belt 22, conveyed below the second clamping mechanism 23 by the conveyor belt 22, and then the second clamping mechanism 23 clamps the wafer boat 6 onto the material platform 125 on the endless track 121.
The number of the material conveying devices 2 can be multiple, and in the embodiment, the number of the material conveying devices 2 is two, so that the feeding or discharging speed can be increased.
A plurality of the warehouse-in and warehouse-out mechanisms 3 can be arranged, each warehouse-in and warehouse-out mechanism 3 comprises a reversing mechanism 31 and a first clamping mechanism 32, the first clamping mechanism 32 is arranged on the workbench 11 and used for clamping the wafer boat 6 to move between the annular track transmission mechanism 12 and the reversing mechanism 31, and the reversing mechanism 31 is used for driving the wafer boat 6 to rotate;
the reversing mechanism 31 is in butt joint with the first clamping mechanism 32, the reversing mechanism 31 comprises a bottom frame 311, a cylinder fixing plate 312, a rotating cylinder 313, a clamping block 314 and a base plate 315, the cylinder fixing plate 312 is arranged on the bottom frame 311, the rotating cylinder 313 is arranged on the cylinder fixing plate 312, the clamping block 314 is arranged on the rotating cylinder 313, and the base plate 315 is arranged on the clamping block 314.
In order to prevent the wafer from falling off from the larger opening of the wafer boat 6 when the wafer boat 6 is placed on the shelf 5 and to increase the stability of the wafer boat 6, the wafer boat 6 needs to be rotated by 90 ° by the reversing mechanism 31 so that the smaller opening of the wafer boat 6 faces downward.
The first clamping mechanism 32 includes a column 321, a cylinder mounting plate 322, a sliding cylinder 323, a lifting cylinder 324, a clamping cylinder 325 and a clamping jaw 326, the column 321 is disposed on the worktable 11, the cylinder mounting plate 322 is disposed on the column 321, the sliding cylinder 323 is disposed on the cylinder mounting plate 322, the lifting cylinder 324 is disposed on the sliding cylinder 323, the clamping cylinder 325 is disposed on the lifting cylinder 324, the clamping jaw 326 is disposed on both sides of the clamping cylinder 325, and the clamping jaw 326 is used for clamping the wafer boat box 6.
The first gripping mechanism 32 is identical in structure to the second gripping mechanism 23.
The sliding cylinder 323 operates to drive the lifting cylinder 324 to slide, the lifting cylinder 324 operates to drive the clamping cylinder 325 to lift, and the clamping cylinder 325 operates to drive the clamping jaw 326 to move to clamp the wafer cassette 6.
In this embodiment, two in-out mechanism 3 are provided, corresponding to the visual inspection mechanism 13 and the wafer robot 15, and a plurality of in-out mechanism 3 can accelerate the feeding speed or the discharging speed of the wafer cassette 6, thereby improving the efficiency.
The utility model discloses the theory of operation does: the wafer boat 6 is placed on the conveying belt 22 of the material conveying device 2, the second clamping mechanism 23 of the material conveying device 2 is used for clamping the wafer on the material platform 125 on the annular track 121 of the annular conveying mechanism 12, then the wafer manipulator 15 is used for clamping the wafer on the wafer boat 6 onto the visual detection mechanism 13, laser carving information on the wafer is identified, after identification is completed, the wafer is placed back to the original position of the wafer boat 6, after identification of all wafers on a certain wafer boat 6 is completed, the first clamping mechanism 32 of the in-out mechanism 3 is used for clamping the wafer boat 6 onto the reversing mechanism 31 to rotate 90 degrees, the side with the smaller opening of the wafer boat 6 faces downwards, material detection of the wafer on the wafer boat 6 is completed, manual work is replaced by mechanization, manual work is saved, efficiency is improved, and labor cost is reduced.
The above description is only for the purpose of illustrating the technical solutions of the present invention and not for the purpose of limiting the same, and other modifications or equivalent replacements made by those of ordinary skill in the art to the technical solutions of the present invention should be covered within the scope of the claims of the present invention as long as they do not depart from the spirit and scope of the technical solutions of the present invention.
Claims (7)
1. The utility model provides an business turn over examines feed bin which characterized in that: which comprises
A working table is arranged on the upper portion of the machine body,
the annular track transmission mechanism is arranged on the workbench;
the visual detection mechanisms are arranged on the workbench and used for carrying out character recognition on the laser etching information on the wafer;
the wafer boat comprises a plurality of wafer boat boxes, a plurality of conveying mechanisms and a plurality of conveying mechanisms, wherein the wafer boat boxes are used for placing wafers and move on an annular track conveying mechanism;
the wafer manipulators are used for moving the wafers back and forth between the visual detection mechanism and the wafer carrier;
a label printer for printing a label;
the material conveying devices are in butt joint with the annular track conveying mechanism, and the wafer boat box is conveyed through the material conveying devices;
the multiple warehouse in and out mechanisms comprise reversing mechanisms and first clamping mechanisms, the first clamping mechanisms are arranged on the workbench and used for clamping the crystal boat boxes to move between the annular track conveying mechanism and the reversing mechanisms, and the reversing mechanisms are used for driving the crystal boat boxes to rotate.
2. An entry and exit inspection bin according to claim 1, wherein: the circular track transmission mechanism comprises a circular track, a belt, a plurality of belt pulleys, a plurality of push plates and a plurality of material platforms, the circular track is arranged on the workbench, the belt is arranged along the circular track, the belt pulleys are arranged on the workbench and drive the belt to transmit, the push plates are arranged on the belt, the material platforms are arranged on the circular track, the push plates are arranged relative to the material platforms, the belt transmits the push plates to transmit, the push plates move to drive the material platforms to move, and the material platforms are used for placing the crystal boat boxes.
3. An entry and exit inspection bin according to claim 1, wherein: visual detection mechanism includes fixed plate, baffle, first camera, second camera and light source, the fixed plate sets up on the workstation, be provided with the baffle on the fixed plate, the top of baffle is provided with first camera, and the below of baffle is provided with the second camera, first camera and second camera all set up towards the baffle, all are provided with the light source on first camera and the second camera, be provided with constant head tank and U-shaped groove on the baffle, first camera and second camera can see through radium carving information on the U-shaped groove discernment wafer, and the constant head tank is used for fixing a position the wafer.
4. An entry and exit inspection bin according to claim 1, wherein: wafer manipulator includes control base, supporting disk, two first linking arms, two second linking arms, two third linking arms, goes up the arm lock, lower arm lock and sensor, the supporting disk sets up on the control base, the one end setting of two first linking arms is on the supporting disk, and the one end of a second linking arm is respectively connected to the other end of two first linking arms, and the one end of two third linking arms is respectively connected to the other end of two second linking arms, and the arm lock is connected to one of them third linking arm, and arm lock under another third linking arm connection goes up the arm lock and sets up with lower arm lock relatively from top to bottom for press from both sides and get the wafer, the sensor sets up on the third linking arm.
5. An entry and exit inspection bin according to claim 1, wherein: the reversing mechanism is in butt joint with the first clamping mechanism and comprises an underframe, a cylinder fixing plate, a rotary cylinder, a clamping block and a base plate, wherein the cylinder fixing plate is arranged on the underframe, the rotary cylinder is arranged on the cylinder fixing plate, the clamping block is arranged on the rotary cylinder, and the base plate is arranged on the clamping block.
6. An in-and-out inspection silo according to claim 1, characterized in that: the first clamp is got the mechanism and is included stand, cylinder mounting panel, sliding cylinder, lift cylinder, clamp and get cylinder and clamping jaw, the stand sets up on the workstation, the cylinder mounting panel sets up on the stand, sliding cylinder sets up on the cylinder mounting panel, the lift cylinder sets up on sliding cylinder, the clamp is got the cylinder setting on the lift cylinder, the clamping jaw sets up and is getting the both sides of cylinder, the clamping jaw is used for pressing from both sides to get the crystal boat box.
7. An entry and exit inspection bin according to claim 1, wherein: the material conveying device comprises a supporting column, a conveying belt, a second clamping mechanism and an automatic window opening and closing mechanism, wherein the conveying belt is arranged on the supporting column, the second clamping mechanism is arranged on the conveying belt, the second clamping mechanism is used for clamping a wafer cassette from the conveying belt to the annular track conveying mechanism, and the automatic window opening and closing mechanism is arranged on the supporting column and used for controlling opening and closing of a material port of the material conveying device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221344042.3U CN217822671U (en) | 2022-05-31 | 2022-05-31 | In-out material inspection bin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221344042.3U CN217822671U (en) | 2022-05-31 | 2022-05-31 | In-out material inspection bin |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217822671U true CN217822671U (en) | 2022-11-15 |
Family
ID=83986928
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221344042.3U Active CN217822671U (en) | 2022-05-31 | 2022-05-31 | In-out material inspection bin |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217822671U (en) |
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2022
- 2022-05-31 CN CN202221344042.3U patent/CN217822671U/en active Active
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