CN217800207U - Macro-micro composite driving X-Y workbench for high-speed precision positioning - Google Patents

Abstract

The utility model discloses a macro-micro composite driving X-Y workbench for high-speed precision positioning, which belongs to the technical field of precision machining. The device comprises a product base, a chassis clamping seat, an upper bearing seat 1, a motion platform connector 1, a motion platform connector 2, a grating displacement sensor 1, a sleeve, a sliding block 1, a sliding block 2, a shell, a linear bearing base, an upper bearing seat 2, a grating displacement sensor 2, a coaxial integrated macro-micro composite driver, a front linear bearing, a rear end cover and a micro magnetic yoke cylinder. The ampere force borne by the coaxial integrated macro-micro composite driver is changed by adjusting the current of the coaxial integrated macro-micro composite driver, so that the high-speed movement and the precise positioning of the workbench in the X and Y directions are realized. The utility model has the advantages of simple structure and high measurement accuracy.

Description

Macro-micro composite driving X-Y workbench for high-speed precision positioning

Technical Field

The utility model belongs to the technical field of the precision finishing, concretely relates to compound drive X-Y workstation macroscopically little towards high-speed precision positioning.

Background

With the continuous development of the modern industrial level, the high-speed precision positioning workbench plays an increasingly important role as a key device in the fields of precision machining, the microelectronic industry, the medical biotechnology, the laser technology and the like. The current macro-micro composite driving system can rarely meet the use requirements of large stroke, high precision and high speed in the X-Y direction in a plane. The current macro-micro compound driving X-Y workbench is large in size, complex in structure and high in requirement on equipment installation accuracy. For example, in the patent with the granted publication number CN111026166B, four groups of flexible hinges mounted on the Y-axis macro-motion platform need to be driven by piezoelectric ceramics provided on the XY-axis micro-motion platform, and the displacement of the piezoelectric ceramics needs to be measured by a capacitance sensor, so that the device has high requirements on the mounting accuracy of each component and has a complex structure. The arrangement mode that the macro-motion part is separated from the micro-motion part leads to the structural size of the workbench to be increased, and meanwhile, the measurement result is difficult to ensure to be within an error allowable range. In order to meet the requirements of modern industry and solve the problems, the performance of the conventional macro-micro compound drive X-Y workbench needs to be improved, therefore, the utility model discloses use two-way sliders to satisfy the motion of device X-Y direction, and adopt the coaxial integrated macro-micro compound drive structure, provide a macro-micro compound drive X-Y workbench for high-speed precision positioning, make it possess advantages such as simple structure, large stroke, high accuracy and high-speed motion and have great application value.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a macro-micro composite drive X-Y workstation towards high-speed precision positioning, the orientation problem in precision finishing and manufacturing is being solved in the intention.

In order to achieve the above object, the present invention provides the following technical solutions: a macro-micro composite driving X-Y workbench oriented to high-speed precision positioning comprises a product base, a chassis clamping seat, an upper bearing seat 1, a motion platform connector 1, a motion platform connector 2, a grating displacement sensor 1, a sleeve, a sliding block 1, a sliding block 2, a shell, a linear bearing base, an upper bearing seat 2, a grating displacement sensor 2, a coaxial integrated macro-micro composite driver, a front linear bearing, a rear end cover and a micro magnetic yoke cylinder, and is characterized in that 6 threaded holes I at the front end of the coaxial integrated macro-micro composite driver and 6 annular through holes A at the front end surface of the base are fixedly connected through bolts and ensure the coaxiality of the device in a single direction, the chassis clamping seat is fixed with 6 threaded holes A on the base through 6 threaded holes C on the chassis clamping seat, and 2 threaded holes D above the chassis clamping seat are fixed with 2 countersunk head screws of the upper bearing seat 1, the motion platform is connected with the slide block 1 through a groove A, a buckle on the motion platform connector 1 is buckled on the slide block 1, a support leg A of the slide block 1 is buckled on a slide rail of a chassis clamping seat to play the roles of fixing, supporting and moving, the motion platform is connected with the slide block 2 through a groove B, the slide block 2 is buckled on the slide rail of the chassis clamping seat through two support legs B to achieve the purposes of fixing and moving, the motion platform is connected with a groove C on the motion platform connector 2 through an inverted T-shaped boss processed on the motion platform, so that the motion of the device in the X-Y direction can be realized through the sliding of the motion platform on the slide block 1 and the slide block 2 and the relative sliding of the motion platform connector 2 on the inverted T-shaped boss of the motion platform, the linear bearing base is connected with a threaded hole B on a product base through two threaded holes F through screws, the linear bearing base is connected with two threaded holes H of the upper bearing seat 2 through two threaded holes G on the upper portion through screws, and the grating displacement sensor 1 and the grating displacement sensor 2 are installed on the moving platform.

The macro-micro compound driving X-Y workbench for high-speed precise positioning is characterized in that: 6 screw holes K of a big end port B of the rear end cover are connected with 6 through holes B at the front end of the product base through bolts, 6 screw holes L of a small end port B of the rear end cover are connected with 6 screw holes J of a front linear bearing through bolts, 6 screw holes E of a large end port A of the sleeve are connected with 6 screw holes M at the front end of the micromotion magnet yoke barrel through bolts, and the small end port A of the sleeve is inserted into a through hole C at the center of the front linear bearing, so that the coaxiality of the device in a single direction can be better ensured.

The utility model discloses a control method, including following step:

s1: aiming at the large-stroke drive of macro motion in the X-Y direction, designing an optimal motion parameter for each driving direction based on the dynamic characteristic of a macro motion part of a driving device;

s2: obtain the macro moving coil current (I) of each driving direction of X-Y _macro ) Velocity (V) _macro ) And position (X) _macro ) Curve I over time of movement _ma (t)、V _ma (t) and X _ma (t)；

S3: aiming at the high-precision compensation of the micromotion of each driving direction of X-Y, a modern common modeling algorithm of a nonlinear inverse model is compared, and a nonlinear inverse model of a macro-micro composite driving X-Y workbench is established;

s4: a block diagram of a feedforward-feedback control system is made by combining a modern control theory and a feedback control strategy, and a drive control strategy of macro-motion and micro-motion output displacement is realized;

s5: according to the requirements of drive control, a macro-micro composite drive X-Y workbench provides a current source and selects a high-efficiency precise drive power supply developed based on a Field Programmable Gate Array (FPGA) (for short, the FPGA-based drive power supply), and an operation carrier of a program adopts a high-speed digital signal processor TMS320F28335 chip to write and debug operation codes of a drive control strategy;

s6: establishing communication by using a LabVIEW program of an upper computer and a Serial Communication Interface (SCIA) of a TMS320F28335 chip through an RS232 serial port line, and sending an instruction to a FPGA-based driving power supply through an RS232 serial port line by using a Serial Communication Interface (SCIB) on the TMS320F28335 chip to control the current output to a macro-micro compound driving X-Y workbench based on the FPGA driving power supply;

s7: the actual displacement X and Y of the macro-micro compound driving X-Y workbench are monitored in real time through two grating displacement sensors, the actual displacement X and Y are compared with ideal displacement, displacement feedback signals are output to an AD sampling module of a TMS320F28335 chip through a signal conversion circuit, feedback regulation and control are carried out on current input to the macro-micro compound driving X-Y workbench, and macro-micro compound positioning in the X-Y direction is completed.

The utility model relates to a macro and micro compound drive X-Y workstation towards high-speed accurate positioning has: the method for converting the coaxial integrated macro-micro compound driving workbench into the macro-micro compound driving X-Y workbench has the advantages of simple structure, capability of meeting the positioning requirements of high precision and large stroke in the X-Y direction and capability of quickly responding.

Drawings

FIG. 1 is an axonometric view of a macro-micro composite driving X-Y workbench for high-speed precision positioning of the utility model;

FIG. 2 is a sectional view of a coaxial integrated macro-micro composite driver of a product driving part;

FIG. 3 is a schematic view of a product base structure;

FIG. 4 is a schematic view of a chassis card seat structure;

fig. 5 is a schematic structural view of the upper bearing seat 1;

fig. 6 is a schematic structural diagram of the motion platform connector 1;

FIG. 7 is a schematic structural diagram of a motion platform;

fig. 8 is a schematic view of the motion platform connector 2;

FIG. 9 is an assembly view of the motion platform, the slide 1 and the motion platform connector;

FIG. 10 is a schematic view of the sleeve construction;

FIG. 11 is a schematic structural view of the slider 1;

FIG. 12 is a schematic structural view of the slider 2;

FIG. 13 is an assembly view of the motion platform and slide;

FIG. 14 is an assembly view of the chassis clamp and slider;

FIG. 15 is a schematic view of a bearing mount structure;

fig. 16 is a schematic structural view of the upper bearing housing 2;

FIG. 17 is a coaxial integrated macro-micro composite actuator assembly;

FIG. 18 is a schematic view of a front linear bearing configuration;

FIG. 19 is a schematic view of a rear end cap configuration;

FIG. 20 is a schematic view of a micro-motion yoke structure;

FIG. 21 is a block diagram of a feedforward-feedback control system of the macro-micro hybrid driving X-Y worktable of the present invention;

fig. 22 is a communication block diagram of the macro-micro compound driving X-Y worktable for high-speed precision positioning according to the present invention. In the figure: 1-product base; 2-chassis card seat; 3-upper bearing seat 1; 4-a motion platform connector 1; 5-a motion platform; 6-motion platform connector 2; 7-a grating displacement sensor 1; 8-a sleeve; 9-a slide block 1; 10-a slide 2; 11-linear bearing mount; 12-upper bearing block 2; 13-a grating displacement sensor 2; 14-coaxial integrated macro-micro compound driver; 15-front linear bearing; 16-rear end cap; 17-a micromotion magnet yoke cylinder; 101-through hole a; 102-threaded hole a; 103-threaded hole B; 104-via B; 201-threaded hole C; 202-a threaded hole D; 203-a slide rail; 301-counterbore D; 401-buckling; 501-groove A; 502-groove B; 503-boss; 601-groove C; 801-big end port a; 802-threaded hole E; 803-small end port a; 901-leg a; 1001-leg B; 1101-a threaded hole F; 1102-a threaded hole G; 1201-threaded hole H; 1401-a threaded hole I; 1501-threaded hole J; 1502-Via C; 1601-big end port B; 1602-screw hole K; 1603-small end port B; 1604-threaded hole L; 1701-threaded hole M.

Detailed Description

In the following, a technical solution in the embodiments of the present invention will be described completely and systematically according to the drawings in the embodiments of the present invention, and it is obvious that only one of the embodiments can be described based on the current situation, and not all the embodiments can be described completely, so that for the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative mental labor belong to the protection scope of the present invention.

Referring to fig. 1-20, the present invention provides a technical solution: a macro-micro composite drive X-Y workbench facing high-speed precision positioning comprises a product base 1, a chassis clamping seat 2, an upper bearing seat 13, a motion platform connector 14, a motion platform 5, a motion platform connector 26, a grating displacement sensor 17, a sleeve 8, a slide block 19, a slide block 210, a linear bearing base 11, an upper bearing seat 212, a grating displacement sensor 213, a coaxial integrated macro-micro composite drive 14, a front linear bearing 15, a rear end cover 16 and a micro magnetic yoke barrel 17, and is characterized in that 6 threaded holes I1401 at the front end of the coaxial integrated macro-micro composite drive 14 are fixedly connected with 6 annular through holes A101 on the front end surface of the base 1 through bolts and ensure the coaxiality of the device in a single direction, the chassis clamping seat 2 is fixed with 6 threaded holes A102 on the base 1 through 6 threaded holes C201 on the chassis clamping seat, 2 threaded holes D202 on the chassis clamping seat 2 are fixed with 2 countersunk head screws 301 of the upper bearing seat 13, the motion platform 5 is connected with the slide block 19 through a groove A501, a buckle 401 on the motion platform connector 14 is buckled on the slide block 19, a support foot A901 of the slide block 19 is buckled on a slide rail of a chassis clamping seat to play the roles of fixing, supporting and moving, the motion platform 5 is connected with the slide block 210 through a groove B502, the slide block 210 is buckled on a slide rail of a chassis clamping seat 2 through two support feet B1001 to achieve the purposes of fixing and moving, the motion platform 5 is connected with a groove C601 on the motion platform connector 26 through an inverted T-shaped boss 503 processed on the motion platform, so that the motion of the device in the X-Y direction can be realized through the sliding of the motion platform 5 on the slide block 19 and the slide block 210 and the relative sliding of the motion platform connector 26 on the inverted T-shaped boss 503 on the motion platform 5, the linear bearing base 11 is connected with a threaded hole B103 on the product base 1 through two threaded holes F1101 through screws, the linear bearing base 11 is connected to the two threaded holes H1201 of the upper bearing housing 212 through the two upper threaded holes G1102 by screws, and the grating displacement sensor 17 and the grating displacement sensor 213 are mounted on the moving platform 5.

The macro-micro compound driving X-Y workbench for high-speed precision positioning is characterized in that: 6 threaded holes K1602 of a large-end port B1601 of the rear end cover 16 are connected with 6 through holes B104 at the front end of the product base 1 through bolts, 6 threaded holes L1604 of a small-end port B1603 of the rear end cover 16 are connected with 6 threaded holes J1501 of the front linear bearing 15 through bolts, 6 threaded holes E802 of a large-end port A801 of the sleeve 8 are connected with 6 threaded holes M1701 at the front end of the micro-motion yoke barrel 17 through bolts, and a small-end port A803 of the sleeve 8 is partially inserted into a through hole C1502 in the center of the front linear bearing 15, so that coaxiality of the device in a single direction can be better guaranteed.

The implementation process comprises the following steps:

(1): aiming at the large-stroke drive of macro motion in the X-Y direction, designing an optimal motion parameter for each driving direction based on the dynamic characteristic of a macro motion part of a driving device;

(2): obtain the macro coil current (I) of each driving direction of X-Y _macro ) Velocity (V) _macro ) And position (X) _macro ) Curve I over time of movement _ma (t)、V _ma (t) and X _ma (t)；

(3): aiming at the high-precision compensation of the micromotion in each driving direction of X-Y, a modern common modeling algorithm of a nonlinear inverse model is compared, and a nonlinear inverse model of a macro-micro compound driving X-Y workbench 3006 is established;

(4): referring to fig. 22, a block diagram of a feedforward-feedback control system is formulated in combination with a modern control theory and a feedback control strategy to implement a drive control strategy for outputting displacement in macro and micro motion;

(5): referring to fig. 21, according to the requirement of drive control, a macro-micro compound drive X-Y table 3006 provides a current source to select a high-efficiency precise drive power supply 3005 (referred to as an FPGA-based drive power supply for short) developed based on a Field Programmable Gate Array (FPGA), and a running carrier of a program adopts a high-speed digital signal processor TMS320F28335 chip 3003 to write and debug a running code of a drive control strategy;

(6): establishing communication by using a LabVIEW program of an upper computer 3001 and a Serial Communication Interface (SCIA) 3003a of a TMS320F28335 chip 3003 through an RS232 serial port line 3002, and sending an instruction to a FPGA-based driving power supply 3005 by using a Serial Communication Interface (SCIB) 3003b on the TMS320F28335 chip through an RS232 serial port line 3004 to control current output to a macro-micro compound driving X-Y workbench 3006 by the FPGA-based driving power supply 3005;

(7): the actual displacement X and Y of the macro-micro compound driving X-Y workbench 3006 are monitored in real time through the two grating displacement sensors 7 and 14, the actual displacement X and Y are compared with ideal displacement, displacement feedback signals 3007a and 3007b are output to an AD sampling module 3003c of the TMS320F28335 chip 3003 through a signal conversion circuit 3008, feedback regulation and control are carried out on current input to the macro-micro compound driving X-Y workbench 3006, and macro-micro compound positioning in the X-Y direction is completed.

The above embodiments of the present invention are given and described, and it is easy for those skilled in the art to make various changes, modifications and fine adjustments without any inventive mental work, so that the protection scope of the present invention is subject to the protection scope defined by the claims.

Claims (2)

1. A macro-micro compound drive X-Y workbench facing high-speed precision positioning comprises a product base (1), a chassis clamping seat (2), an upper bearing seat 1 (3), a motion platform connector 1 (4), a motion platform (5), a motion platform connector 2 (6), a grating displacement sensor 1 (7), a sleeve (8), a slider 1 (9), a slider 2 (10), a linear bearing base (11), an upper bearing seat 2 (12), a grating displacement sensor 2 (13), a coaxial integrated macro-micro compound driver (14), a front linear bearing (15), a rear end cover (16) and a micro magnetic yoke cylinder (17), and is characterized in that 6 threaded holes I (1401) at the front end of the coaxial integrated macro-micro compound driver (14) are fixedly connected with 6 annular through holes A (101) on the front end surface of the base (1) through bolts and ensure the coaxiality of the device in a single direction, the chassis (2) is fixedly connected with 6 threaded holes A (102) on the product base (1) through 6 threaded holes C (201) on the chassis clamping seat, 2D (202) above the chassis clamping seat (2) is fixedly connected with a slider clamping seat (1) through a sunk head (9) on the motion platform (1), and a slider (9) is connected with a slider (1) through a slider (9), the device comprises a base plate (2), a base plate connector (2), a base plate displacement sensor (13), a base plate (9), a sliding block (5), a base plate (2), a sliding block connector (2), a linear bearing base (11), a grating displacement sensor (11), an upper bearing base (11), a grating displacement sensor (13), a grating displacement sensor (7), a displacement sensor (13), a displacement sensor (7) and a displacement sensor, wherein a support foot A (901) of the sliding block (9) is buckled on a sliding rail (203) of the base plate connector (2) to play fixing, supporting and moving effects, the moving platform (5) is connected with the sliding block (2 (10) through a groove B (502), the sliding block (10) is buckled on the sliding rail (203) of the base plate connector (2) through two support feet B (1001), the sliding block (10) is connected with the sliding block (5), the sliding block (5) is connected with the base plate (6) through an inverted T-shaped boss (503) processed on the moving platform (5), so that the device can move in the X-Y direction through the sliding of the moving platform (5) through the inverted T-shaped boss (503), the sliding platform connector (6), the sliding platform (1201), the sliding platform can move in the X-Y direction, the linear bearing base (11) is connected with a threaded hole B (103) on the product base (1) through two threaded hole (1101), the two threaded hole (1102) and the grating displacement sensor (13), the grating displacement sensor (2) through two threaded hole (2) and the grating displacement sensor (13), and the grating displacement sensor (2) which are connected through two threaded hole (13).

2. The macro-micro compound drive X-Y workbench for high-speed precise positioning according to claim 1, characterized in that: 6 threaded holes K (1602) of a large end port B (1601) of a rear end cover (16) are connected with 6 through holes B (104) at the front end of a product base (1) through bolts, 6 threaded holes L (1604) of a small end port B (1603) of the rear end cover (16) are connected with 6 threaded holes J (1501) of a front linear bearing (15) through bolts, 6 threaded holes E (802) of a large end port A (801) of a sleeve (8) are connected with 6 threaded holes M (1701) at the front end of a micro magnetic yoke cylinder (17) through bolts, and a small end port A (803) of the sleeve (8) is inserted into a through hole C (1502) in the center of the front linear bearing (15), so that coaxiality of the device in a single direction can be better guaranteed.

Images