CN217700464U

CN217700464U - Focused ion beam sample cleaning device

Info

Publication number: CN217700464U
Application number: CN202221929471.7U
Authority: CN
Inventors: 高寒松; 高小寒; 王硕
Original assignee: Huiyi Technology Changchun Co ltd
Current assignee: Huiyi Technology Changchun Co ltd
Priority date: 2022-07-25
Filing date: 2022-07-25
Publication date: 2022-11-01
Anticipated expiration: 2032-07-25

Abstract

The utility model discloses a focusing ion beam sample cleaning device, comprises an operation bench, the welding of the top of operation panel has the riser, and the welding of one side of riser has the diaphragm, and first spout has been seted up to the bottom of diaphragm, and first screw rod has been run through to the inside of first spout, and the one end of first screw rod welds with the output of motor, and first screw rod threaded connection has first slider, and the welding of the bottom of first slider has the spliced pole, and the bottom and the plasma gun of spliced pole are connected, and the below of plasma gun is provided with the sample platform, and clamping mechanism is installed to the both sides of sample platform, the utility model discloses a clamping mechanism of installation can press from both sides tightly fixedly to the sample, can drive first screw rod through the motor and rotate, and first slider, spliced pole and plasma gun move the assigned position, can carry out the ion bombardment sculpture to the sample through the plasma gun and get rid of the pollutant, and then can improve clean efficiency greatly, accomplish clean task fast.

Description

Focused ion beam sample cleaning device

Technical Field

The utility model relates to a cleaning equipment technical field specifically is a focused ion beam sample cleaning device.

Background

Focused Ion Beam (FIB) is a micro-nano machining technology, the basic principle of which is similar to that of a Scanning Electron Microscope (SEM), and the ion beam emitted by an ion source is used as an incident beam after accelerated focusing, and solid atoms can be sputtered and peeled off in the process of collision between high-energy ions and solid surface atoms, so that FIB is more used as a tool for directly machining micro-nano structures. In combination with a Gas Injection System (GIS), the FIB can assist in chemical vapor deposition, positioning, induced deposition and growth of micro-nano materials and structures, or assist in selective enhanced etching of specific materials and structures.

Focused ion beam processing in combination with a gas injection system can achieve assisted chemical vapor deposition, localized growth of specific nanostructures, a method known as focused ion beam induced deposition. However, residual contamination of the reaction gas is a problem that cannot be ignored, and the reaction gas may remain on the surface of the sample to cause contamination.

There is a need for improvement in view of the above problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a focused ion beam sample cleaning device to solve the problem that above-mentioned background art provided.

In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a focus ion beam sample cleaning device, includes the operation panel, the top welding of operation panel has the riser, the welding of one side of riser has the diaphragm, first spout has been seted up to the bottom of diaphragm, the inside of first spout is run through there is first screw rod, the one end of first screw rod through first bearing with the lateral wall of first spout is connected, the other end of first screw rod runs through the lateral wall of first spout, and extends to the outside of riser and the output welding of motor, the motor is installed one side of riser, first screw rod threaded connection has first slider, the bottom welding of first slider has the spliced pole, the bottom and the plasma gun of spliced pole are connected, the below of plasma gun is provided with the sample platform, clamping mechanism is installed to the both sides of sample platform.

Preferably, the clamping mechanism comprises a second sliding groove, a second screw, a second bearing, a crank, a second slider, a support and a clamping block, the second sliding groove is formed in the top of the operating platform, the second screw penetrates through the second sliding groove, one end of the second screw is connected with the side wall of the second sliding groove through the second bearing, the other end of the second screw penetrates through the side wall of the second sliding groove and is welded with one end of the crank, the crank is installed on one side of the operating platform, the second screw is in threaded connection with the second slider, the second slider is in threaded connection with the second slider, the support is welded on the top of the second slider, and the other end of the support is welded with one side of the clamping block.

Preferably, the both sides of second spout are provided with the multiunit support column, the bottom of multiunit support column all with the top welding of operation panel, the multiunit the other end of support column all welds with the bottom of tray, the internally mounted of tray has the second motor, the output of second motor runs through the top of tray, and with the bottom welding of sample platform.

Preferably, the threads of the two sets of second sliders are opposite.

Preferably, rubber pads are bonded on one sides of the two groups of clamping blocks.

Preferably, the bottom of operation panel is installed the base, the base is provided with four groups.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses a starter motor can drive first screw rod and rotate, and first screw rod can drive threaded connection's first slider horizontal migration to first slider can drive spliced pole and plasma gun and remove the assigned position, can carry out the ion bombardment sculpture to the sample through the plasma gun and get rid of the pollutant, because plasma has advantages such as clean fast, the automation of being convenient for, and then can improve clean efficiency greatly, accomplishes clean task fast.

2. The utility model discloses a rotation crank can drive the second screw rod and rotate, and the second screw rod can drive two sets of screw thread opposite second sliders and remove to the centre, and two sets of second sliders drive two sets of supports and two sets of clamp splice and remove to the centre to make two sets of clamp splices press from both sides tight fixedly to the sample, and then can prevent that the sample from taking place the displacement in clean process, cause clean not thorough problem.

Drawings

FIG. 1 is a schematic top view of the overall structure of the present invention;

FIG. 2 is a schematic side view of the overall structure of the present invention;

fig. 3 is a front sectional view of the present invention.

In the figure: 1. the plasma torch comprises an operating table, 2, a base, 3, a vertical plate, 4, a transverse plate, 5, a first sliding groove, 6, a first screw rod, 7, a first bearing, 8, a motor, 9, a first sliding block, 10, a connecting column, 11, a plasma gun, 12, a second sliding groove, 13, a second screw rod, 14, a second bearing, 15, a crank, 16, a second sliding block, 17, a support, 18, a clamping block, 19, a rubber pad, 20, a supporting column, 21, a tray, 22, a second motor, 23 and a sample table.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Example one

Please refer to fig. 1-3, the utility model provides a focused ion beam sample cleaning device, including operation panel 1, the top welding of operation panel 1 has riser 3, the welding of one side of riser 3 has diaphragm 4, first spout 5 has been seted up to the bottom of diaphragm 4, first spout 5's inside has been run through first screw rod 6, the one end of first screw rod 6 is connected with the lateral wall of first spout 5 through first bearing 7, the other end of first screw rod 6 runs through the lateral wall of first spout 5, and extend to the outside of riser 3 and the output welding of motor 8, motor 8 installs the one side at

riser

3, 6 threaded connection of first screw rod has first slider 9, the bottom welding of first slider 9 has spliced pole 10, the bottom and the plasma gun 11 of spliced pole 10 are connected, the below of plasma gun 11 is provided with sample platform 23, clamping mechanism is installed to the both sides of sample platform 23, base 2 is installed to the bottom of operation panel 1, base 2 is provided with four groups.

In this embodiment, through four group bases 2 of installation, can make operation panel 1 more stable, sample platform 23 through setting up, can place the sample on it, then clamping mechanism through the installation, can press from both sides tight fixedly to the sample, treat that the sample is fixed the back, through starter motor 8, motor 8 drives first screw rod 6 and rotates, first screw rod 6 can drive threaded connection's first slider 9 horizontal migration, thereby first slider 9 can drive spliced pole 10 and plasma gun 11 and move to the assigned position, can carry out the ion bombardment sculpture to the sample through plasma gun 11 and get rid of the pollutant, because plasma has cleaning rate fast, be convenient for advantages such as automation, and then can improve cleaning efficiency greatly, accomplish cleaning task fast.

Referring to fig. 1 and 3, the clamping mechanism includes a second sliding groove 12, a second screw 13, a second bearing 14, a crank 15, a second slider 16, a bracket 17 and a clamping block 18, the second sliding groove 12 is formed at the top of the operating platform 1, the second screw 13 penetrates through the second sliding groove 12, one end of the second screw 13 is connected with the side wall of the second sliding groove 12 through the second bearing 14, the other end of the second screw 13 penetrates through the side wall of the second sliding groove 12 and is welded with one end of the crank 15, the crank 15 is installed at one side of the operating platform 1, the second screw 13 is in threaded connection with two groups of second sliders 16, the threads of the two groups of second sliders 16 are opposite, two groups of brackets 17 are welded at the tops of the two groups of second sliders 16, the other ends of the plurality of brackets 17 are welded with one side of the clamping block 18, and a rubber pad 19 is adhered to one side of the two groups of clamping block 18.

In this embodiment, the sample is placed on the sample platform 23, the crank 15 is rotated to drive the second screw 13 to rotate, the second screw 13 can drive the two sets of second sliding blocks 16 with opposite threads to move towards the middle, the two sets of second sliding blocks 16 drive the two sets of brackets 17 and the two sets of clamping blocks 18 to move towards the middle, so that the two sets of clamping blocks 18 clamp and fix the sample, the friction force between the clamping blocks 18 and the sample can be increased through the arranged rubber pads 19, and the sample can be prevented from being displaced in the cleaning process, thereby causing the problem of incomplete cleaning.

Referring to fig. 1 and 3, two sides of the second chute 12 are provided with a plurality of groups of supporting pillars 20, bottoms of the groups of supporting pillars 20 are welded to the top of the operating platform 1, the other ends of the groups of supporting pillars 20 are welded to the bottom of the tray 21, a second motor 22 is installed inside the tray 21, and an output end of the second motor 22 penetrates through the top of the tray 21 and is welded to the bottom of the sample table 23.

In this embodiment, through the multiunit support column 20 that sets up, can hold up tray 21 and sample platform 23, after the local clean completion of sample, can be through starting second motor 22, the second motor drives sample platform 23 and rotates to sample platform 23 drives the sample and rotates the assigned position, then can clean the unclean region of sample through plasma gun 11, has improved the flexibility of device greatly through the setting, has improved clear work efficiency.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims

1. A focused ion beam sample cleaning apparatus comprising a stage (1), characterized by: the top welding of operation panel (1) has riser (3), one side welding of riser (3) has diaphragm (4), first spout (5) have been seted up to the bottom of diaphragm (4), the inside of first spout (5) runs through first screw rod (6), the one end of first screw rod (6) through first bearing (7) with the lateral wall of first spout (5) is connected, the other end of first screw rod (6) runs through the lateral wall of first spout (5), and extends to the outside of riser (3) is welded with the output of motor (8), motor (8) are installed one side of riser (3), first screw rod (6) threaded connection has first slider (9), the bottom welding of first slider (9) has spliced pole (10), the bottom of spliced pole (10) is connected with plasma gun (11), the below of plasma gun (11) is provided with sample platform (23), clamping mechanism is installed to the both sides of platform (23).

2. The focused ion beam sample cleaning apparatus of claim 1, wherein: clamping mechanism includes second spout (12), second screw rod (13), second bearing (14), crank (15), second slider (16), support (17) and clamp splice (18), seted up at the top of operation panel (1) second spout (12), the inside of second spout (12) is run through second screw rod (13), the one end of second screw rod (13) is passed through second bearing (14) with the lateral wall of second spout (12) is connected, the other end of second screw rod (13) runs through the lateral wall of second spout (12), and with the one end welding of crank (15), crank (15) are installed one side of operation panel (1), second screw rod (13) threaded connection has two sets ofly second slider (16), and two sets of all welding has two sets of at the top of second slider (16) support (17), and the other end of multiunit support (17) all with one side welding of clamp splice (18).

3. The focused ion beam sample cleaning apparatus of claim 2, wherein: the two sides of the second sliding groove (12) are provided with multiple groups of supporting columns (20), the bottoms of the multiple groups of supporting columns (20) are welded with the top of the operating platform (1), the other ends of the multiple groups of supporting columns (20) are welded with the bottom of the tray (21), a second motor (22) is installed inside the tray (21), and the output end of the second motor (22) penetrates through the top of the tray (21) and is welded with the bottom of the sample platform (23).

4. The focused ion beam sample cleaning apparatus of claim 2, wherein: the threads of the two groups of second sliding blocks (16) are opposite.

5. The focused ion beam sample cleaning apparatus of claim 2, wherein: rubber pads (19) are bonded on one sides of the two groups of clamping blocks (18).

6. The focused ion beam sample cleaning apparatus of claim 1, wherein: the base (2) is installed to the bottom of operation panel (1), base (2) are provided with four groups.