CN111243932B - Multi-material-box semi-automatic plasma processing device and using method thereof - Google Patents
Multi-material-box semi-automatic plasma processing device and using method thereof Download PDFInfo
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- CN111243932B CN111243932B CN202010056276.7A CN202010056276A CN111243932B CN 111243932 B CN111243932 B CN 111243932B CN 202010056276 A CN202010056276 A CN 202010056276A CN 111243932 B CN111243932 B CN 111243932B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
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Abstract
The invention relates to a multi-material-box semi-automatic plasma processing device and a using method thereof, wherein the multi-material-box semi-automatic plasma processing device comprises a case, a vacuum cavity, a lifting assembly, a translation assembly, a cartridge holder and a clamping plate assembly; a frame is arranged in the case, and the vacuum cavity, the lifting assembly, the translation assembly, the cartridge holder and the clamping plate assembly are all fixed on the frame; the cartridge clip rack is arranged on the lifting assembly, and the clip plate assembly is arranged on the translation assembly; the using method is simple to operate, convenient to use and high in applicability; the invention solves the defects of insufficient plasma treatment strength, low treatment efficiency and limited treatment uniformity of the cartridge clip type product in the prior art, and realizes semi-automatic plasma treatment on the cartridge clip type multi-material box product, thereby improving the treatment efficiency, the plasma treatment strength and the plasma treatment uniformity and further improving the treatment quality of the product.
Description
Technical Field
The invention relates to the technical field of plasma processing equipment, in particular to a multi-material-box semi-automatic plasma processing device and a using method thereof.
Background
The plasma is a fourth state of existence of substances, different from solid, liquid and gas, and is called plasma, which is an ionized gaseous substance consisting of positive and negative ions generated after atoms and atomic groups are ionized after part of electrons are deprived.
The plasma technology has very obvious advantages in various fields, and has the advantages of low cost, no waste, no pollution and the like in the aspect of modifying the surface of a material; the sterilization and disinfection has the advantages of high safety, no drug residue, short sterilization time, no environmental pollution and the like; the method has the advantages of low energy consumption, high efficiency, short treatment flow, wide application range and the like in the aspect of treating various pollutants (waste gas and waste water).
In the plasma processing device in the prior art, on one hand, the problems of high labor cost and low processing efficiency exist in the using process, for example, a cavity door is often required to be opened before each processing by manpower, a material to be processed is placed in a vacuum cavity, the vacuum cavity is closed, then the vacuum is pumped, process gas is filled after the vacuum degree reaches back vacuum, a power supply is turned on to discharge after the balance is reached, the power supply is turned off after the plasma processing is finished, the gas is filled, the vacuum pump is turned off, a vacuum breaking valve is opened, the vacuum cavity is opened after the pressure in the vacuum cavity reaches the atmospheric pressure, a processed product is manually taken out of the vacuum cavity, and the operation is repeated to finish a batch of products to be processed; on the other hand, most of the existing plasma processing devices perform plasma processing on a single product, most of the existing cartridge clip type products adopt U-shaped electrodes, the processing strength of the U-shaped electrodes is insufficient, and most of the existing cartridge clips perform plasma processing on the whole cartridge clip, so that the processing effect on the cartridge clip type products is poor, and the product quality is influenced.
Therefore, how to provide a multi-magazine semi-automatic plasma processing apparatus to achieve automatic plasma processing of the cartridge clip type multi-magazine product, improve processing efficiency, improve plasma processing strength, and improve plasma processing uniformity, thereby improving product processing quality is a technical problem to be solved urgently by those skilled in the art.
Disclosure of Invention
In view of the above, an object of the present invention is to provide a multi-magazine semi-automatic plasma processing apparatus and a method for using the same, so as to achieve automatic plasma processing on a cartridge clip type multi-magazine product, improve processing efficiency, improve plasma processing strength, and improve plasma processing uniformity, thereby improving processing quality of the product.
In order to achieve the above object, the present application provides the following technical solutions.
The first technical scheme is as follows: a multi-material-box semi-automatic plasma processing device comprises a case, a vacuum cavity, a lifting assembly, a translation assembly, a cartridge holder and a clamping plate assembly;
a frame is arranged in the case, and the vacuum cavity, the lifting assembly, the translation assembly, the cartridge holder and the clamping plate assembly are all fixed on the frame;
the cartridge clip rack is arranged on the lifting assembly, and the clip plate assembly is arranged on the translation assembly.
Preferably, the vacuum cavity comprises a cavity body and a cavity cover, and one end of the cavity cover is provided with a sliding assembly so that the cavity cover can move relative to the cavity body;
be provided with the positive plate in the cavity, the positive plate with through insulation board fixed connection between the cavity, the positive plate top is provided with positive electrode cover plate, positive electrode cover plate is used for fixing the positive plate.
The cavity lower extreme is provided with gas vent and electrode post, the electrode post with the positive plate is connected.
Preferably, a guide strip is arranged in the cavity, the guide strip is arranged above the positive plate and fixed above the positive electrode cover plate, a guide groove is formed in the guide strip, and the guide groove is used for placing materials to be processed.
Preferably, the sliding assembly comprises a first substrate, a first sliding frame, a first driving motor and a first screw rod, one end of the first sliding frame is fixedly connected with the cavity cover, the first sliding frame is connected with the first screw rod in a sliding mode, and the first driving motor is connected with the first screw rod in a transmission mode.
Preferably, the lifting component comprises a lifter, a stepping motor, a screw rod and a lifting platform, wherein the stepping motor is connected with the lifter through a coupler, one end of the screw rod is connected with the lifter, the other end of the screw rod is fixedly connected with the lifting platform, and the cartridge clip rack is arranged on the lifting platform.
Preferably, the translation assembly comprises a second base plate, a second sliding frame, a second driving motor, a second screw rod and a moving plate, the moving plate is fixedly connected with the second sliding frame through a connecting plate, and the clamping plate assembly is fixed on the moving plate;
the second sliding frame is connected with the second screw rod in a sliding mode, and the second driving motor is in transmission connection with the second screw rod.
Preferably, the splint component comprises an air claw mounting plate, an upper pressing piece, a lower pressing piece, an upper paper pressing piece and a lower paper pressing piece, wherein the upper pressing piece is connected with the upper paper pressing piece, and the lower pressing piece is connected with the lower paper pressing piece.
Preferably, the apparatus further comprises an overturning guide assembly, the overturning guide assembly being disposed between the vacuum chamber and the magazine holder;
the upset direction subassembly includes guide way, direction fixed plate, upset pivot, upset swing arm, upset cylinder, the upset cylinder with the one end of upset swing arm is connected, the other end of upset swing arm with the one end of upset pivot is connected, the guide way is fixed on the direction fixed plate, the upset pivot is passed the direction fixed plate.
Preferably, the case is provided with the gyro wheel below, still be provided with signal lamp, display screen, material mouth on the case, the material mouth just right cartridge clip work or material rest, case one side is provided with the chamber door.
The second technical scheme is as follows: a use method of a multi-cartridge semi-automatic plasma processing device comprises the following steps: the method comprises the following steps:
101. placing the material to be processed in a cartridge holder, and starting the device; the sliding assembly drives the cavity cover to move upwards, and the vacuum cavity is opened;
102. the translation assembly drives the clamping plate assembly to move towards the direction close to the cartridge holder rack, when the clamping plate assembly moves to the position of the cartridge holder rack, a layer of material on the cartridge holder rack is clamped, meanwhile, the translation assembly moves in the reverse direction, the clamping plate assembly drives the material to move along the guide strip and align to the positive plate, the clamping plate assembly releases the material, and the translation assembly continues to move towards the direction far away from the vacuum cavity;
103. after the step 102, the sliding assembly drives the cavity cover to move downwards to be closed with the cavity, then the vacuum cavity is vacuumized, a plasma discharge area is formed by the positive plate and the cavity cover in the cavity, and plasma treatment is carried out on the material;
104. after the processing in the step 103 is finished, the vacuum cavity is broken, then the sliding assembly drives the cavity cover to move upwards, the vacuum cavity is opened, the translation assembly drives the clamping plate assembly to move towards the direction close to the vacuum cavity, when the clamping plate assembly moves to the position of the vacuum cavity, the clamping plate assembly clamps the material, and the material continues to move until the material is returned to the elastic clamping rack;
105. after step 104, the lifting assembly drives the clip rack to move upwards by one material grid, and step 102 and step 104 are repeated to complete material processing on the whole clip rack.
The beneficial technical effects obtained by the invention are as follows:
1) the invention solves the defects of insufficient plasma processing strength, low processing efficiency and limited processing uniformity of the cartridge clip type product in the prior art, and realizes semi-automatic plasma processing of the cartridge clip type multi-material box product, thereby improving the processing efficiency, the plasma processing strength and the plasma processing uniformity and further improving the processing quality of the product;
2) according to the invention, through the lifting assembly, the translation assembly and the clamping plate assembly, plasma treatment is carried out on the product on the magazine clamping rack in a layered manner, the treatment uniformity is improved, and the flat plate electrode is adopted, so that the treatment strength is high;
3) according to the invention, the overturning guide assembly is used for conveniently realizing the transfer of the product on the cartridge holder to the vacuum cavity, so that the transitional guide effect is realized, the product transfer is convenient, and the sealing vacuum treatment of the vacuum cavity can be met.
The foregoing description is only an overview of the technical solutions of the present application, so that the technical means of the present application can be more clearly understood and the present application can be implemented according to the content of the description, and in order to make the above and other objects, features and advantages of the present application more clearly understood, the following detailed description is made with reference to the preferred embodiments of the present application and the accompanying drawings.
The above and other objects, advantages and features of the present application will become more apparent to those skilled in the art from the following detailed description of specific embodiments thereof, taken in conjunction with the accompanying drawings.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts. Throughout the drawings, like elements or portions are generally identified by like reference numerals. In the drawings, elements or portions are not necessarily drawn to scale.
FIG. 1 is a schematic structural diagram of a multi-pod semi-automatic plasma processing apparatus according to an embodiment of the present disclosure;
FIG. 2 is a schematic diagram illustrating an exemplary embodiment of a multi-pod semi-automatic plasma processing apparatus;
FIG. 3 is a schematic view of a vacuum chamber according to an embodiment of the present disclosure;
FIG. 4 is a schematic structural view of a lift assembly according to an embodiment of the present disclosure;
FIG. 5 is a schematic structural view of a translation assembly in one embodiment of the present disclosure;
FIG. 6 is a schematic structural view of a cleat assembly according to an embodiment of the disclosure;
FIG. 7 is a schematic view of a vacuum chamber and inversion guide assembly according to one embodiment of the disclosure;
fig. 8 is a schematic structural view of a tumble guide assembly in one embodiment of the present disclosure.
In the above drawings: 1. a chassis; 101. a roller; 102. a signal lamp; 103. a display screen; 104. a material port; 105. a box door; 2. a vacuum chamber; 201. a cavity; 202. a chamber cover; 203. a positive plate; 204. a guide bar; 205. a positive electrode plate; 206. a first side insulating plate; 207. a second side insulating plate; 208. a shield case; 3. a sliding assembly; 301. a first substrate; 302. a first carriage; 303. a first drive motor; 4. a lifting assembly; 401. an elevator; 402. a stepping motor; 403. a screw; 404. a lifting platform; 5. a clip rack; 6. a translation assembly; 601. a second substrate; 602. a second carriage; 603. moving the plate; 7. a cleat assembly; 701. a pneumatic claw mounting plate; 702. pressing the mixture into tablets; 703. pressing the mixture downwards; 704. pressing a paper sheet; 705. pressing the paper sheet downwards; 8. a turning guide assembly; 801. a guide groove; 802. a guide fixing plate; 803. turning over the rotating shaft; 804. turning over the swing arm; 805. and (5) turning over the air cylinder.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some embodiments of the present application, but not all embodiments. In the following description, specific details such as specific configurations and components are provided only to help the embodiments of the present application be fully understood. Accordingly, it will be apparent to those skilled in the art that various changes and modifications may be made to the embodiments described herein without departing from the scope and spirit of the present application. In addition, descriptions of well-known functions and constructions are omitted in the embodiments for clarity and conciseness.
Further, the present application may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
The term "and/or" herein is merely an association describing an associated object, meaning that three relationships may exist, e.g., a and/or B, may mean: a exists alone, B exists alone, and A and B exist at the same time, and the term "/and" is used herein to describe another association object relationship, which means that two relationships may exist, for example, A/and B, may mean: a alone, and both a and B alone, and further, the character "/" in this document generally means that the former and latter associated objects are in an "or" relationship.
The term "at least one" herein is merely an association relationship describing an associated object, and means that there may be three relationships, for example, at least one of a and B, may mean: a exists alone, A and B exist simultaneously, and B exists alone.
It is further noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion.
Example 1
Referring to fig. 1 and 2, a multi-magazine semi-automatic plasma processing apparatus includes a cabinet 1, a vacuum chamber 2, a lifting assembly 4, a translation assembly 6, a magazine holder 5, and a clamp assembly 7.
A frame (not marked in the drawing) is arranged in the case 1, and the vacuum cavity 2, the lifting component 4, the translation component 6, the cartridge holder rack 5 and the clamping plate component 7 are all fixed on the frame.
The cartridge clip frame 5 is arranged on the lifting component 4, and the clamping plate component 7 is arranged on the translation component 6.
The roller 101 is arranged below the case 1, so that the device can be moved conveniently.
The machine case 1 is further provided with a signal lamp 102, a display screen 103 and a material opening 104, wherein the signal lamp 102 is arranged above the machine case 1, and the display screen 103 is arranged on one side of the machine case 1.
The material opening 104 is opposite to the magazine rack 5, a box door 105 is arranged on one side of the case 1, and the box door 105 is convenient for maintaining the device.
As shown in fig. 3, the vacuum chamber 2 includes a chamber body 201 and a chamber cover 202, a positive plate 203 is disposed in the chamber body 201, the positive plate 203 is fixedly connected to the chamber body 201 through an insulating plate, an exhaust port and an electrode column are disposed at a lower end of the chamber body 201, and the electrode column is connected to the positive plate 203.
A positive electrode cap 205 is disposed above the positive electrode plate 203, and the positive electrode cap 205 is used for fixing the positive electrode plate 203.
The electrode column (not marked in the drawing) is fixed on the cavity 201 through an electrode insulation sleeve, a shielding cover 208 is arranged around the electrode column, and the shielding cover 208 is fixed on the cavity 201.
The insulating plate comprises a surface insulating plate and a side insulating plate, the surface insulating plate is arranged between the positive plate 203 and the cavity 201, and a positive electrode fixing plate for fixing the positive electrode is arranged between the surface insulating plate and the cavity 201.
The side insulating plates include a first side insulating plate 206 and a second side insulating plate 207, the first side insulating plate 206 is disposed at both sides of the long side of the cavity 201, and the second side insulating plate 207 is disposed at both sides of the short side of the cavity 201.
Be provided with gib block 204 in the cavity 201, gib block 204 sets up positive plate 203 top, and fixes positive electrode cover plate 205 top, be provided with guide way 801 on the gib block 204, guide way 801 is used for placing the material to be treated.
Every two guide strips 204 are oppositely arranged to form a fixed frame for fixing materials; both ends of the guide strip 204 are provided with positioning plates which are aluminum profiles.
The first side insulating plate 206 and the cavity 201 are provided with a fixing frame therebetween, the fixing frame is provided with a fixing groove, and the positioning plate is fixedly connected with the fixing groove through a connecting piece, so that two ends of the guide strip 204 are fixed on the cavity 201.
The two ends of the guide strip 204 are provided with clamping grooves, and the clamping grooves are fixed on the first side insulating plate 206.
The positive plate 203 and the chamber cover 202 form a plasma discharge region for plasma treatment of the material.
One end of the chamber cover 202 is provided with a sliding assembly 3 so that the chamber cover 202 can move relative to the chamber body 201.
The sliding assembly 3 comprises a first substrate 301, a first sliding frame 302, a first driving motor 303 and a first lead screw (not marked in the drawing), wherein one end of the first sliding frame 302 is fixedly connected with the cavity cover 202, the first sliding frame 302 is slidably connected with the first lead screw, and the first driving motor 303 is in transmission connection with the first lead screw.
First driving motor 303 is fixed through first motor mounting panel on the first base plate 301, first driving motor 303 outer end is provided with first motor cover, first motor cover is fixed all around on the first base plate 301.
A first upper cover is arranged on one side of the first substrate 301, and a first channel corresponding to the first upper cover is arranged on the first sliding frame 302, so that the first sliding frame 302 slides relative to the first lead screw.
A bracket is fixedly connected above the cavity cover 202, and the bracket is fixedly connected with the first sliding frame 302, so that the first sliding frame 302 drives the cavity cover 202 to move up and down.
As shown in fig. 4, the lifting assembly 4 includes a lifter 401, a step motor 402, a screw 403, and a lifting platform 404, the step motor 402 is connected to the lifter 401 through a coupling, one end of the screw 403 is connected to the lifter 401, the other end of the screw is fixedly connected to the lifting platform 404, and the magazine holder 5 is disposed on the lifting platform 404.
Optical axes are arranged on two sides of the lifter 401, and one end of each optical axis is fixed on the lifting platform 404 through a horizontal supporting seat.
A section bar is arranged above the lifting platform 404, and the spring clip rack 5 is fixed on the section bar through a limiting block.
And a material groove is formed in the cartridge holder 5 and used for placing materials.
As shown in fig. 5, the translation assembly 6 includes a second base plate 601, a second sliding frame 602, a second driving motor (not labeled in the drawing), a second lead screw, and a moving plate 603, the moving plate 603 is fixedly connected to the second sliding frame 602 through a connecting plate, and the clamp assembly 7 is fixed on the moving plate 603.
The second sliding frame 602 is connected to the second lead screw in a sliding manner, and the second driving motor is connected to the second lead screw in a transmission manner.
An end cover is arranged at one end of the second substrate 601, a second supporting seat is arranged in the end cover and fixed on the second substrate 601, one end of the second lead screw is fixed on the second supporting seat through a bearing, and the other end of the second lead screw is fixed on the second substrate 601 through a second bearing seat.
The second driving motor is fixed on the second substrate 601 through a second motor mounting plate, a second motor cover is arranged at the outer end of the second driving motor, and the periphery of the second motor cover is fixed on the second motor mounting plate.
A second upper cover is arranged on one side of the second substrate 601, and a second channel corresponding to the second upper cover is arranged on the second sliding frame 602, so that the second sliding frame 602 slides relative to the screw rod.
As shown in fig. 6, the clamping plate assembly 7 includes an air claw mounting plate 701, an upper pressing plate 702, a lower pressing plate 703, an upper pressing plate 704, and a lower pressing plate 705, wherein the upper pressing plate 702 is connected to the upper pressing plate 704, and the lower pressing plate 703 is connected to the lower pressing plate 705.
The clamping plate assembly 7 drives the upper pressing plate 702 and/or the lower pressing plate 703 to move through the pneumatic assembly, and further drives the upper pressing plate 704 and/or the lower pressing plate 705 to move so as to realize clamping and releasing operations.
Example 2
Based on the above embodiment 1, the same parts are not described again, except that the apparatus further comprises an overturning guide assembly 8, as shown in fig. 7, wherein the overturning guide assembly 8 is disposed between the vacuum chamber 2 and the clip frame 5.
As shown in fig. 8, the turning guide assembly 8 includes a guide groove 801, a guide fixing plate 802, a turning rotating shaft 803, a turning swing arm 804, and a turning cylinder 805, the turning cylinder 805 is connected to one end of the turning swing arm 804, the other end of the turning swing arm 804 is connected to one end of the turning rotating shaft 803, the guide groove 801 is fixed on the guide fixing plate 802, and the turning rotating shaft 803 passes through the guide fixing plate 802.
Every two guide grooves 801 are oppositely arranged, and the distance between the two guide grooves is equal to that between every two oppositely arranged guide bars 204.
The two ends of the turning rotating shaft 803 are provided with ball joint bearings, and the ball joint bearings are fixed on the vacuum chamber 2 through ball joint bearing seats so as to realize that the guide fixing plate 802 moves back and forth relative to the vacuum chamber 2.
Both ends of the guide fixing plate 802 are provided with end plates, and the end plates are convenient to fix the overturning rotating shaft 803.
This upset direction subassembly 8 is used for the transition guide material to shift, and guide way 801 corresponds with the clip work or material rest 5, drives upset swing arm 804 one end and upwards removes when upset cylinder 805, and direction fixed plate 802 is close to the clip work or material rest 5 and keeps away from vacuum chamber 2, drives upset swing arm 804 one end and downwards removes when upset cylinder 805, and direction fixed plate 802 keeps away from the clip work or material rest 5 and is close to vacuum chamber 2, from this, both the transfer of the material of being convenient for, satisfy the sealed of vacuum chamber 2 again.
Example 3
Based on the embodiment 1, a method for using a multi-magazine semi-automatic plasma processing device comprises the following steps: the method comprises the following steps:
101. placing the material to be processed in a cartridge holder 5, and starting the device; the slide assembly 3 drives the chamber cover 202 upward, opening the vacuum chamber 2.
The materials to be processed are sequentially placed on different layers of the magazine rack 5, the first driving motor 303 drives the first screw rod to rotate, the first sliding frame 302 is driven to slide along the first screw rod, and then the cavity cover 202 is driven to move up and down.
102. The translation subassembly 6 drives splint subassembly 7 and removes to the direction that is close to the clip work or material rest 5, moves the position to clip work or material rest 5 when splint subassembly 7, presss from both sides the material of tight clip work or material rest 5 upper story, and translation subassembly 6 reverse movement simultaneously, splint subassembly 7 drive the material and remove along gib block 204 to aim at positive plate 203, splint subassembly 7 release material, translation subassembly 6 continues to remove to the direction of keeping away from vacuum cavity 2.
The second driving motor drives the second lead screw to rotate, so as to drive the second sliding frame 602 to slide along the second lead screw, further drive the moving plate 603 to move back and forth, and drive the clamping plate assembly 7 to move at the same time.
103. After step 102, the sliding assembly 3 drives the cavity cover 202 to move down to close the cavity 201, then the vacuum cavity 2 is vacuumized, the positive plate 203 and the cavity cover 202 in the cavity 201 form a plasma discharge area, and the material is subjected to plasma treatment.
104. After the processing in step 103 is completed, the vacuum chamber 2 is broken, then the sliding assembly 3 drives the chamber cover 202 to move upwards, the vacuum chamber 2 is opened, the translation assembly 6 drives the clamping plate assembly 7 to move towards the direction close to the vacuum chamber 2, when the clamping plate assembly 7 moves to the position of the vacuum chamber 2, the clamping plate assembly 7 clamps the material, and the material continues to move until the material is restored to the magazine rack 5.
105. After step 104, the lifting assembly 4 drives the clip rack 5 to move up by one material grid, and step 102 and step 104 are repeated to complete the material processing on the whole clip rack 5.
The above description is only a preferred embodiment of the present invention, and it is not intended to limit the scope of the present invention, and it is obvious to those skilled in the art that various modifications and variations can be made in the present invention. Variations, modifications, substitutions, integrations and parameter changes of the embodiments may be made without departing from the principle and spirit of the invention, which may be within the spirit and principle of the invention, by conventional substitution or may realize the same function.
Claims (4)
1. A multi-material-box semi-automatic plasma processing device is characterized by comprising a case (1), a vacuum cavity (2), a lifting assembly (4), a translation assembly (6), a cartridge holder (5) and a clamping plate assembly (7);
a rack is arranged in the case (1), and the vacuum cavity (2), the lifting assembly (4), the translation assembly (6), the cartridge holder rack (5) and the clamping plate assembly (7) are all fixed on the rack;
the magazine clamping frame (5) is arranged on the lifting assembly (4), and the clamping plate assembly (7) is arranged on the translation assembly (6);
the vacuum cavity (2) comprises a cavity body (201) and a cavity cover (202), wherein one end of the cavity cover (202) is provided with a sliding assembly (3) so that the cavity cover (202) can move relative to the cavity body (201);
a positive plate (203) is arranged in the cavity (201), the positive plate (203) is fixedly connected with the cavity (201) through an insulating plate, an exhaust port and an electrode column are arranged at the lower end of the cavity (201), and the electrode column is connected with the positive plate (203);
a guide strip (204) is arranged in the cavity (201), the guide strip (204) is arranged above the positive plate (203), a guide groove (801) is formed in the guide strip (204), and the guide groove (801) is used for placing materials to be processed;
the sliding assembly (3) comprises a first substrate (301), a first sliding frame (302), a first driving motor (303) and a first screw rod, one end of the first sliding frame (302) is fixedly connected with the cavity cover (202), the first sliding frame (302) is in sliding connection with the first screw rod, and the first driving motor (303) is in transmission connection with the first screw rod;
the lifting assembly (4) comprises a lifter (401), a stepping motor (402), a screw rod (403) and a lifting platform (404), the stepping motor (402) is connected with the lifter (401) through a coupler, one end of the screw rod (403) is connected with the lifter (401), the other end of the screw rod is fixedly connected with the lifting platform (404), and the magazine rack (5) is arranged on the lifting platform (404);
the translation assembly (6) comprises a second base plate (601), a second sliding frame (602), a second driving motor, a second screw rod and a moving plate (603), the moving plate (603) is fixedly connected with the second sliding frame (602) through a connecting plate, and the clamping plate assembly (7) is fixed on the moving plate (603);
the second sliding frame (602) is connected with the second screw rod in a sliding mode, and the second driving motor is in transmission connection with the second screw rod;
the clamping plate assembly (7) comprises an air claw mounting plate (701), an upper pressing plate (702), a lower pressing plate (703), an upper pressing plate (704) and a lower pressing plate (705), wherein the upper pressing plate (702) is connected with the upper pressing plate (704), and the lower pressing plate (703) is connected with the lower pressing plate (705).
2. The multi-magazine semi-automatic plasma processing apparatus according to claim 1, further comprising a reverse guide assembly (8), the reverse guide assembly (8) being disposed between the vacuum chamber (2) and the magazine holder (5);
the overturning guide assembly (8) comprises a guide groove (801), a guide fixing plate (802), an overturning rotating shaft (803), an overturning swing arm (804) and an overturning air cylinder (805), wherein the overturning air cylinder (805) is connected with one end of the overturning swing arm (804), the other end of the overturning swing arm (804) is connected with one end of the overturning rotating shaft (803), the guide groove (801) is fixed on the guide fixing plate (802), and the overturning rotating shaft (803) penetrates through the guide fixing plate (802).
3. The multi-magazine semi-automatic plasma processing apparatus according to any of claims 1-2, wherein rollers (101) are provided below the cabinet (1), a signal lamp (102), a display screen (103) and a material port (104) are further provided on the cabinet (1), the material port (104) is directly opposite to the magazine holder (5), and a box door (105) is provided at one side of the cabinet (1).
4. Use of a multi-pod semi-automatic plasma processing apparatus according to any one of claims 1-3, comprising the steps of:
101. placing the material to be processed in a cartridge holder rack (5), and starting the device; the sliding assembly (3) drives the cavity cover (202) to move upwards, and the vacuum cavity (2) is opened;
102. the translation assembly (6) drives the clamping plate assembly (7) to move towards the direction close to the magazine rack (5), when the clamping plate assembly (7) moves to the magazine rack (5), the material on the upper layer of the magazine rack (5) is clamped, meanwhile, the translation assembly (6) moves in the reverse direction, the clamping plate assembly (7) drives the material to move along the guide strip (204) and align with the positive plate (203), the clamping plate assembly (7) releases the material, and the translation assembly (6) continues to move towards the direction far away from the vacuum cavity (2);
103. after the step 102, the sliding assembly (3) drives the cavity cover (202) to move downwards to be closed with the cavity body (201), then the vacuum cavity (2) is vacuumized, a plasma discharge area is formed by the positive plate (203) in the cavity body (201) and the cavity cover (202), and plasma processing is carried out on the material;
104. after the processing in the step 103 is completed, the vacuum cavity (2) is broken, then the sliding assembly (3) drives the cavity cover (202) to move upwards, the vacuum cavity (2) is opened, the horizontal moving assembly (6) drives the clamping plate assembly (7) to move towards the direction close to the vacuum cavity (2), when the clamping plate assembly (7) moves to the position of the vacuum cavity (2), the clamping plate assembly (7) clamps the material, and the material continues to move until the material is returned to the spring clamping rack (5);
105. after the step 104, the lifting assembly (4) drives the clip rack (5) to move upwards for one material grid, and the step 102 and the step 104 are repeated to complete material processing on the whole clip rack (5).
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| DE20108598U1 (en) * | 2001-04-19 | 2001-08-16 | Tsai Yuan Lin | Multifunctional vacuum processing device |
| CN107039324A (en) * | 2017-04-14 | 2017-08-11 | 东莞市启天自动化设备股份有限公司 | A kind of Full-automatic tube-type PECVD charging ＆ discharging machines and method |
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