CN213670900U - Full-automatic plasma cleaning mechanism - Google Patents
Full-automatic plasma cleaning mechanism Download PDFInfo
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- CN213670900U CN213670900U CN202022439049.0U CN202022439049U CN213670900U CN 213670900 U CN213670900 U CN 213670900U CN 202022439049 U CN202022439049 U CN 202022439049U CN 213670900 U CN213670900 U CN 213670900U
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Abstract
The utility model relates to a plasma washs technical field, more specifically relates to a full-automatic plasma wiper mechanism, the on-line screen storage device comprises a base, wiper mechanism include the vacuum cleaning room, set up in plate electrode in the vacuum cleaning room, set up in the blowing subassembly of vacuum cleaning room one side, the vacuum cleaning room is close to one side of blowing subassembly is provided with the opening, the blowing subassembly including slide set up in the case door spare of base, set up in the case door spare is close to the product tool of vacuum cleaning room one side is close to or is kept away from with being used for driving the case door spare the blowing driving piece of vacuum cleaning room. The utility model discloses manual operation intensity is little, and the operation is very convenient.
Description
Technical Field
The utility model relates to a plasma cleaning technical field more specifically relates to a full-automatic plasma wiper mechanism.
Background
Plasma is a state of existence of a substance, usually in three states, solid, liquid, and gaseous, but in some special cases there is a fourth state, such as a substance in the ionosphere in the earth's atmosphere. The following substances are present in the plasma state: electrons in a high-speed motion state; neutral atoms, molecules, radicals (free radicals) in an activated state; ionized atoms, molecules; unreacted molecules, atoms, etc., but the substance as a whole remains in an electrically neutral state.
A plasma cleaner, also called a plasma cleaner, or a plasma surface treatment apparatus, is a brand new high-tech technology, and achieves an effect that cannot be achieved by a conventional cleaning method by using plasma. Plasma is a state of matter, also called the fourth state of matter, and is not common solid, liquid, and gas states. Sufficient energy is applied to the gas to ionize it into a plasma state. The "active" components of the plasma include: ions, electrons, atoms, reactive groups, excited state species (metastable state), photons, and the like. The plasma cleaning machine is used for treating the surface of a sample by utilizing the properties of active components, so as to achieve the purposes of cleaning, coating and the like.
At present, general plasma cleaning machine adopts artifical unloading of going up, needs the manual work to place the product in the purge chamber, then seals the purge chamber again, and working strength is great, and operates very inconveniently.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects of the prior art, the utility model provides a full-automatic plasma cleaning mechanism to solve the technical problem that the existing plasma cleaning machine adopts the manual work to go up and down, the labor intensity is big, and the operation is very inconvenient.
The utility model provides a technical scheme that its technical problem adopted is:
the utility model provides a full-automatic plasma wiper mechanism, includes the base, wiper mechanism include the vacuum cleaning chamber, set up in plate electrode in the vacuum cleaning chamber, set up in the blowing subassembly of vacuum cleaning chamber one side, the vacuum cleaning chamber is close to one side of blowing subassembly is provided with the opening, the blowing subassembly including slide set up in the case door spare of base, set up in the case door spare is close to the product tool of vacuum cleaning chamber one side is close to or is used for driving the case door spare and is kept away from the blowing driving piece of vacuum cleaning chamber.
Preferably, the cleaning mechanism comprises a matcher for controlling the electrode plate to work, and the vacuum cleaning chamber is further provided with a shielding box.
Preferably, the cleaning mechanism further comprises a vacuum pump for vacuumizing the vacuum cleaning chamber, a vacuum breaking valve for breaking vacuum in the vacuum cleaning chamber, and a vacuum gauge for testing pressure in the vacuum cleaning chamber.
Preferably, the box door member is provided with a sealing layer on a side close to the vacuum cleaning chamber.
Preferably, the base is provided with a linear guide rail, and the door piece is slidably arranged on the linear guide rail.
Preferably, the emptying driving piece comprises an air cylinder or a screw rod module.
Preferably, a buffer is arranged at one end of the linear guide rail far away from the vacuum cleaning chamber.
The utility model has the advantages that: during specific work, a product is placed on the product jig, the discharging driving piece drives the box door piece to be close to the vacuum cleaning chamber until the box door piece is tightly abutted against the vacuum cleaning chamber, the product is located in the vacuum cleaning chamber at the moment, the vacuum pump is used for vacuumizing the vacuum cleaning chamber, then the electrode plate works to clean the product, after the cleaning is completed, the electrode plate stops working, the vacuum breaking valve is used for breaking vacuum in the vacuum cleaning chamber, the discharging driving piece reversely drives the box door piece to move, and the product is separated from the vacuum cleaning chamber; the utility model discloses manual operation intensity is little, and the operation is very convenient.
Drawings
The present invention will be further explained with reference to the drawings and examples.
Fig. 1 is a schematic structural diagram of a full-automatic plasma cleaning apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic view of the structure of the washing mechanism of FIG. 1;
FIG. 3 is a schematic view of the cleaning mechanism of FIG. 1 from another perspective.
In the figure, 100, the base; 200. a feeding mechanism; 210. a loading platform; 211. a feeding positioning piece; 221. a first cylinder; 222. a first conveyor belt; 300. a cleaning mechanism; 310. a vacuum cleaning chamber; 320. an electrode plate; 331. a bin door piece; 332. a product jig; 333. discharging a driving piece; 334. a linear guide rail; 335. a buffer; 336. an observation window; 337. a sealing layer; 340. a vacuum pump; 350. breaking a vacuum valve; 360. a vacuum gauge; 370. a matcher; 380. a shield case; 400. a transfer mechanism; 410. a transfer frame; 411. transferring the sliding rail; 420. a transfer seat; 430. a clamping seat; 440. a clamp; 450. a first driving member; 460. a second driving member; 470. A third driving member; 500. a blanking mechanism; 510. a blanking carrying platform; 522. a second conveyor belt;
Detailed Description
The conception, the specific structure, and the technical effects produced by the present invention will be clearly and completely described below in conjunction with the embodiments and the accompanying drawings to fully understand the objects, the features, and the effects of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and other embodiments obtained by those skilled in the art without inventive labor based on the embodiments of the present invention all belong to the protection scope of the present invention. In addition, all the connection/connection relations referred to in the patent do not mean that the components are directly connected, but mean that a better connection structure can be formed by adding or reducing connection auxiliary components according to specific implementation conditions. The utility model discloses each technical feature in the creation can the interactive combination under the prerequisite that does not contradict conflict each other.
Referring to fig. 1 to 3, a full-automatic plasma cleaning apparatus includes a base 100, the base 100 being sequentially provided along a straight line: the feeding mechanism 200 comprises a feeding carrier 210 for carrying materials and a feeding transmission assembly arranged on the feeding carrier 210, and the feeding transmission assembly is used for moving the materials on the feeding carrier 210 to a position close to the cleaning mechanism 300; the cleaning mechanism 300 comprises a vacuum cleaning chamber 310 and an electrode plate 320 arranged in the vacuum cleaning chamber 310; the transfer mechanism 400 comprises a transfer frame 410, a transfer seat 420, a clamping seat 430, a clamp 440, a first driving element 450, a second driving element 460 and a third driving element 470, the transfer frame 410 is provided with a transfer slide rail 411, two ends of the transfer slide rail 411 are respectively positioned above the feeding mechanism 200 and above the discharging mechanism 500, the transfer seat 420 is slidably arranged on the transfer slide rail 411, the first driving element 450 drives the transfer seat 420 to move back and forth on the transfer slide rail 411, the clamping seat 430 is vertically slidably arranged on the transfer seat 420, the second driving element 460 is used for driving the clamping seat 430 to move up and down, the clamp 440 is arranged at the bottom end of the clamping seat 430, and the third driving element 470 is used for driving the clamp 440 to open and close; the blanking mechanism 500 includes a blanking stage 510 for carrying a material, and a blanking transmission component disposed on the feeding stage 210, and the blanking transmission component is configured to move the material on the blanking stage 510 to a position far away from the cleaning mechanism 300. During specific work, the feeding mechanism 200 moves a product to a position close to the cleaning mechanism 300, then the clamp 440 of the transfer mechanism 400 clamps the product, the product is placed in the cleaning chamber for cleaning, and after cleaning is finished, the clamp 440 clamps the cleaned product and moves the product to the discharging mechanism 500; through the utility model discloses, do not need artifical supplementary, can accomplish the automatic unloading of going up of product, greatly improve the processing speed, reduce workman electromagnetic radiation's potential safety hazard.
As shown in fig. 1, the feeding carrier 210 is provided with a feeding positioning piece 211, the feeding carrier 210 is provided with a first receiving groove for receiving the feeding transmission assembly, the feeding transmission assembly includes a feeding frame vertically slidably disposed in the receiving groove, a first cylinder 221 for driving the feeding frame to move up and down, and a first conveyor belt 222 rotatably supported on the feeding frame, and one end of the first conveyor belt 222 is close to the feeding positioning piece 211. Specifically, the feeding positioning member 211 is a fixing plate located at one side of the washing mechanism 300. In the embodiment, two first conveyor belts 222 are provided, where a conveyor belt refers to a conveyor belt mechanism, during feeding, the first air cylinder 221 drives the first conveyor belts 222 to move upwards, the first conveyor belts 222 protrude out of the first accommodating groove, the first conveyor belts 222 jack up products, then the first conveyor belts 222 move and convey the products to the feeding positioning part 211, then the first air cylinder 221 drives the first conveyor belts 222 to move downwards, and the products fall onto the feeding carrier 210. Through material loading positioner 211, can improve the material loading precision.
As shown in fig. 1, the transfer frame 410 may be a gantry frame, and the transfer frame 410 is erected above the feeding mechanism, the cleaning mechanism 300 and the discharging mechanism 500. In this embodiment, the first driving element 450 is a servo motor, and the servo motor can control the transfer base 420 to slide back and forth on the transfer sliding rail 411; the second driving member 460 is a lead screw module, the clamp 440 includes a first clamping piece and a second clamping piece slidably disposed on the clamping seat 430, the third driving member 470 is a clamping cylinder, and the clamping cylinder is used for driving the first clamping piece and the second clamping piece to approach each other or to be away from each other.
As shown in fig. 2 and 3, the cleaning mechanism 300 includes a discharging assembly disposed at one side of the vacuum cleaning chamber 310, and an opening is disposed at one side of the vacuum cleaning chamber 310 close to the discharging assembly. The emptying assembly comprises a box door 331 arranged on the base 100 in a sliding manner, a product jig 332 arranged on one side of the box door 331 close to the vacuum cleaning chamber 310, and an emptying driving member 333 for driving the box door 331 to be close to or far away from the vacuum cleaning chamber 310. Specifically, the base 100 is provided with a linear guide rail 334, the door piece 331 is slidably disposed on the linear guide rail 334, one end of the linear guide rail 334, which is far away from the vacuum cleaning chamber 310, is provided with a buffer 335, the buffer 335 can prevent the door piece 331 from being damaged by impact when moving to the end of the linear guide rail 334, the emptying driving piece 333 can be a cylinder or a screw rod module, in operation, the fixture 440 places a product on the product fixture 332, then the emptying driving piece 333 drives the door piece 331 to be close to the vacuum cleaning chamber 310 until abutting against the vacuum cleaning chamber 310, at this time, the product is located in the vacuum cleaning chamber 310, and then the vacuum cleaning chamber 310 starts to work. After cleaning is complete, the discharge drive 333 reverses the movement of the bin gate 331 and the product exits the vacuum cleaning chamber 310 and is then removed by the transfer mechanism 400.
Preferably, the door 331 is provided with a sealing layer 337 at a side close to the vacuum cleaning chamber 310, and in this embodiment, the sealing layer 337 may be a rubber layer.
In this embodiment, the box door 331 is further provided with a transparent observation window 336, and the observation window 336 can facilitate observation of the conditions inside the vacuum cleaning chamber 310.
Preferably, the cleaning mechanism 300 further includes a vacuum pump 340 for evacuating the vacuum cleaning chamber 310, a vacuum breaking valve 350 for breaking vacuum in the vacuum cleaning chamber 310, and a vacuum gauge 360 for testing the pressure in the vacuum cleaning chamber 310.
Preferably, the cleaning mechanism 300 includes an adapter 370 for controlling the operation of the electrode plate 320, and the vacuum cleaning chamber 310 is further provided with a shielding box 380 for preventing the electrode plate 320 from receiving external magnetic field interference during operation.
As shown in fig. 1, the blanking carrier 510 is provided with a blanking positioning element, the blanking carrier 510 is provided with a second accommodating groove for accommodating the blanking transmission assembly, the blanking transmission assembly includes a blanking frame vertically sliding arranged in the accommodating groove, a second cylinder for driving the blanking frame to move up and down, and a second conveyor belt 522 rotatably supported on the feeding frame, and one end of the second conveyor belt 522 is close to the blanking positioning element. In this embodiment, the blanking mechanism 500 and the loading mechanism 200 have the same structure, and are not described herein again.
The working principle is as follows:
feeding: the first air cylinder 221 drives the first conveyor belt 222 to move upwards, the first conveyor belt 222 protrudes out of the first accommodating groove, the first conveyor belt 222 jacks up the product, then the first conveyor belt 222 moves and conveys the product to the feeding positioning piece 211, then the first air cylinder 221 drives the first conveyor belt 222 to move downwards, and the product falls onto the feeding carrier 210; the first driving member 450 drives the clamp 440 to be above the feeding positioning member 211, and the clamp 440 clamps the product and places the product on the product fixture 332;
cleaning: the discharging driving piece 333 drives the box door piece 331 to be close to the vacuum cleaning chamber 310 until the box door piece is tightly abutted against the vacuum cleaning chamber 310, at the moment, the product is located in the vacuum cleaning chamber 310, the vacuum pump 340 evacuates the vacuum cleaning chamber 310, then the electrode plate 320 works to clean the product, after the cleaning is completed, the electrode plate 320 stops working, the vacuum breaking valve 350 breaks vacuum on the vacuum cleaning chamber 310, the discharging driving piece 333 reversely drives the box door piece 331 to move, and the product is separated from the vacuum cleaning chamber 310;
blanking: the first driving element 450 drives the clamp 440 to be above the product jig 332, the clamp 440 clamps the product and places the product on the blanking carrier 510, the second cylinder drives the second conveyor belt 522 to move upwards, the second conveyor belt 522 protrudes out of the second accommodating groove, the second conveyor belt 522 jacks up the product, and then the second conveyor belt 522 removes the product.
In summary, the following steps: through the utility model discloses, do not need artifical supplementary, can accomplish the automatic unloading of going up of product, manual operation intensity is less, greatly improves processing speed, reduces workman electromagnetic radiation's potential safety hazard.
While the preferred embodiments of the present invention have been described, the present invention is not limited to the above embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present invention, and such equivalent modifications or substitutions are intended to be included within the scope of the present invention as defined by the appended claims.
Claims (7)
1. The utility model provides a full-automatic plasma wiper mechanism, includes the base, its characterized in that: the wiper mechanism includes the vacuum cleaning chamber, set up in plate electrode in the vacuum cleaning chamber, set up in the blowing subassembly of vacuum cleaning chamber one side, the vacuum cleaning chamber is close to one side of blowing subassembly is provided with the opening, the blowing subassembly including slide set up in the case door spare of base, set up in the case door spare is close to the product tool of vacuum cleaning chamber one side is close to or is used for driving the case door spare and is kept away from the blowing driving piece of vacuum cleaning chamber.
2. The full-automatic plasma cleaning mechanism according to claim 1, wherein: the cleaning mechanism comprises a matcher for controlling the electrode plate to work, and a shielding box is further arranged on the vacuum cleaning chamber.
3. The full-automatic plasma cleaning mechanism according to claim 1, wherein: the cleaning mechanism further comprises a vacuum pump for vacuumizing the vacuum cleaning chamber, a vacuum breaking valve for breaking vacuum of the vacuum cleaning chamber, and a vacuum gauge for testing pressure in the vacuum cleaning chamber.
4. The full-automatic plasma cleaning mechanism according to claim 1, wherein: and a sealing layer is arranged on one side of the box door piece close to the vacuum cleaning chamber.
5. The full automatic plasma cleaning mechanism according to any one of claims 1 to 4, wherein: the base is provided with a linear guide rail, and the box door piece is arranged on the linear guide rail in a sliding mode.
6. The full-automatic plasma cleaning mechanism according to claim 5, wherein: the discharging driving piece comprises a cylinder or a screw rod module.
7. The full-automatic plasma cleaning mechanism according to claim 5, wherein: and a buffer is arranged at one end of the linear guide rail, which is far away from the vacuum cleaning chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022439049.0U CN213670900U (en) | 2020-10-28 | 2020-10-28 | Full-automatic plasma cleaning mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022439049.0U CN213670900U (en) | 2020-10-28 | 2020-10-28 | Full-automatic plasma cleaning mechanism |
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| Publication Number | Publication Date |
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| CN213670900U true CN213670900U (en) | 2021-07-13 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202022439049.0U Active CN213670900U (en) | 2020-10-28 | 2020-10-28 | Full-automatic plasma cleaning mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113976546A (en) * | 2021-09-29 | 2022-01-28 | 深圳泰德半导体装备有限公司 | Plasma cleaning method and plasma cleaning machine |
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2020
- 2020-10-28 CN CN202022439049.0U patent/CN213670900U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113976546A (en) * | 2021-09-29 | 2022-01-28 | 深圳泰德半导体装备有限公司 | Plasma cleaning method and plasma cleaning machine |
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