CN217691080U

CN217691080U - Automatic separating and collecting device for various liquid medicines for wafer cleaning

Info

Publication number: CN217691080U
Application number: CN202221347737.7U
Authority: CN
Inventors: 叶家焱; 范亚飞
Original assignee: Yunzhe Semiconductor Technology Zhejiang Co ltd
Current assignee: Yunzhe Semiconductor Technology Zhejiang Co ltd
Priority date: 2022-05-27
Filing date: 2022-05-27
Publication date: 2022-10-28
Anticipated expiration: 2032-05-27

Abstract

The utility model discloses a be used for abluent multiple liquid medicine autosegregation collection device of wafer, including the platform, a plurality of shower nozzle swing arm mechanisms are installed at the top of platform, install the basin cover in the middle of the top of platform, and basin cover elevating system is installed in the outside of basin cover, and the basin cover is hollow cone, and the basin cover includes upper shield and lower cover, and the upper shield can be through the activity from top to bottom of basin cover elevating system, and the mid-mounting of basin cover has the washing dish rotary mechanism. In this a be used for abluent multiple liquid medicine autosegregation collection device of wafer, the centrifugal force that produces through the rotation of wasing the dish during the hydrojet makes the even wafer surface that covers of liquid medicine, collects the waste liquid collecting vat through the basin cover at last in, collect different waste liquid collecting vaths through upper shield and lower cover with different liquid medicines, the washing of different liquid medicines has just been accomplished to a cavity and the separation that realizes the liquid medicine is collected, the space utilization who has saved wafer cleaning's time and mill is collected.

Description

Automatic separating and collecting device for various liquid medicines for wafer cleaning

Technical Field

The utility model relates to a brilliant cleaning equipment technical field of circle, specifically speaking relates to a be used for abluent multiple liquid medicine autosegregation collection device of wafer.

Background

With the rapid development of semiconductor technology, the performance requirements of products are higher and higher, new contamination is generated in each step of a wafer process, and the quality of the next step is affected by a small amount of contamination, so that the cleaning of the wafer is very important in the semiconductor process; in the wafer single-wafer cleaning process, some contaminants cannot be cleaned in a conventional two-fluid water or high-pressure water mode, special chemical liquid is required to be used for chemical cleaning, all the contaminants cannot be completely cleaned by single chemical liquid, and then multiple chemical liquid is required to be selected for cleaning different contaminants. However, a plurality of chemical liquid medicines can generate chemical reaction after being mixed for a long time, and safe or uncontrollable accidents are generated; and the used chemical liquid medicine can not be discharged at will, the environmental protection requirement is to be recycled, and the subsequent environmental protection treatment can be carried out only by recycling alone. This requires separate processing of different cleaning solutions during the single-wafer cleaning process with multiple chemical solutions.

In the prior art, in the process of semiconductor manufacture, wafers need to be cleaned in a time-sharing mode by using various liquid medicines, multi-cavity liquid medicine wafer cleaning machines are adopted, different cleaning cavities use different liquid medicines, and the wafers are conveyed to another cavity to be continuously cleaned by using another liquid medicine after being cleaned by one cavity. And the wafer is dried after being cleaned in different liquid medicine cleaning cavities.

In the prior art, in the process of semiconductor manufacture, wafers need to be cleaned in a time-sharing mode by using various liquid medicines, multi-cavity liquid medicine wafer cleaning machines are adopted, different cleaning cavities use different liquid medicines, and the wafers are conveyed to another cavity to be continuously cleaned by using another liquid medicine after being cleaned by one cavity. And drying after different liquid medicines are cleaned. Although the problem of waste liquid collection among different liquid medicines is solved, the wafer needs to be conveyed among different cleaning cavities, and the cleaning cavities are not operated in the conveying process. This results in the following disadvantages: the wafer cleaning machine needs to be provided with a plurality of cleaning cavities, so that the cost of the machine is increased, the price of the machine is high, and the machine purchasing cost is increased; the wafer cleaning machine needs to be provided with a plurality of cleaning cavities, the occupied area of the machine is large, the manufacturing cost of a dust-free workshop is high, the operation cost is also high, the yield of the dust-free workshop per unit area can be reduced when the machine is large, and the operation cost of a factory is increased; the wafers need to be transferred between different cavities in the machine, reducing the actual utilization rate of the machine. The increased number of transfers also results in an increased probability of failure and reduced wafer safety.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a be used for abluent multiple liquid medicine autosegregation collection device of wafer to solve the problem that proposes among the above-mentioned background art.

In order to realize the above-mentioned purpose, the utility model provides a be used for abluent multiple liquid medicine autosegregation collection device of wafer, the test platform comprises a platform, a plurality of shower nozzle swing arm mechanisms are installed at the top of platform, install the basin cover in the middle of the top of platform, basin cover elevating system is installed in the outside of basin cover, the basin cover is hollow cone, the basin cover includes upper shield and lower cover, the upper shield can be through the activity from top to bottom of basin cover elevating system, the mid-mounting of basin cover has washing dish rotary mechanism.

Preferably, the lower cover is fixed on the base, waste liquid collecting grooves are formed in the inner sides of the upper cover and the lower cover, and liquid discharge pipes are arranged on the outer sides of the upper cover and the lower cover.

Preferably, the spray head swing arm mechanism comprises a rotary motor, the top output end of the rotary motor is connected with a swing arm through a connecting rod, the spray head is installed at the outer end of the swing arm, and a vertical cylinder is installed in the middle of the connecting rod.

Preferably, basin cover elevating system includes the elevating platform, the lift cylinder is installed to the bottom of elevating platform, a plurality of lifter are installed at the top of elevating platform, the locating plate is installed at the top of lifter, and a plurality of in the outside the locating plate can compress tightly fixedly the upper shield.

Preferably, one side of the positioning plate close to the upper cover is of a concave structure.

Preferably, a sleeve is sleeved in the middle of the lifting rod and is installed on the platform.

Preferably, wash a set rotary mechanism including wasing the dish, the mid-mounting that washs the dish has rotary joint, wash the dish and pass through the bearing and install on the platform, the last centre gripping of rotary joint has the round crystal, rotary joint's bottom is passed through the rotating electrical machines drive and is rotated.

Compared with the prior art, the beneficial effects of the utility model are that:

this be used for abluent multiple liquid medicine autosegregation collection device of wafer, the centrifugal force that produces through the rotation of washing dish during the hydrojet makes the even cover of liquid medicine to the wafer surface, collect the waste liquid collecting vat through the basin cover at last in, collect different waste liquid collecting vations through upper shield and lower cover with different liquid medicines, the washing of different liquid medicines has just been accomplished to a cavity and the separation that realizes the liquid medicine is collected, the space utilization who has saved wafer cleaning's time and mill is collected.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic structural view of a swing arm mechanism of a sprinkler head according to the present invention;

FIG. 3 is a schematic structural view of the basin cover of the present invention;

FIG. 4 is a schematic structural view of the lifting mechanism of the basin cover of the present invention;

fig. 5 is a schematic structural view of the middle cleaning disc rotating mechanism of the present invention.

The various reference numbers in the figures mean:

1. a platform; 2. a spray head swing arm mechanism; 21. a rotary motor; 22. a connecting rod; 23. swinging arms; 231. a spray head; 24. a vertical cylinder; 3. a basin cover; 31. an upper cover; 32. a lower cover; 33. a liquid discharge pipe; 34. a waste liquid collecting tank; 4. a basin cover lifting mechanism; 41. a lifting platform; 42. a lifting rod; 43. a sleeve; 44. a lifting cylinder; 45. positioning a plate; 5. a cleaning disc rotating mechanism; 51. cleaning the disc; 52. a rotating electric machine; 53. a bearing; 54. a rotary joint; 55. and (7) carrying out round crystallization.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and for simplicity of description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Example 1

The utility model provides a be used for abluent multiple liquid medicine autosegregation collection device of wafer, as shown in fig. 1-5, including platform 1, a plurality of shower nozzle swing arm mechanisms 2 are installed at platform 1's top, be used for spouting the medicine, install basin cover 3 in the middle of platform 1's the top, be used for the liquid medicine to collect, basin cover elevating system 4 is installed in the outside of basin cover 3, be used for controlling the lift of basin cover 3, basin cover 3 is hollow cone, basin cover 3 includes upper shield 31 and lower cover 32, upper shield 31 can be through basin cover elevating system 4 activity from top to bottom, the mid-mounting of basin cover 3 has washing dish rotary mechanism 5, be used for wasing the rotation of dish.

In this embodiment, lower cover 32 is fixed on the base, the inboard of upper shield 31 and lower cover 32 is provided with waste liquid collecting vat 34, discharge tube 33 is installed in the outside of upper shield 31 and lower cover 32, the waste liquid of being convenient for is discharged, the liquid medicine that flies away gets rid of on the wall of basin cover 3 back just along the waste liquid collecting vat 34 of 3 wall flows to basin cover 3 bottoms portions of basin cover, then flow out in the waste liquid collection device through discharge tube 33, spray different liquid medicines, control the position of upper shield 31, just can control the liquid medicine and flow to the waste liquid collecting vat 34 of upper shield 31 or lower cover 32, basin cover 3 center is hollow, wash plate 51 arranges the center at basin cover 3.

Specifically, shower nozzle swing arm mechanism 2 includes rotary motor 21, and rotary motor 21's top output is connected with swing arm 23 through connecting rod 22, and shower nozzle 231 is installed to swing arm 23's outer end, and connecting rod 22's mid-mounting has vertical cylinder 24, conveniently carries out the multi-angle liquid medicine and sprays the washing.

Further, basin cover elevating system 4 includes elevating platform 41, and lift cylinder 44 is installed to the bottom of elevating platform 41, and a plurality of lifter 42 are installed at the top of elevating platform 41, and locating plate 45 is installed at the top of lifter 42, and a plurality of locating plates 45 in the outside can compress tightly fixedly upper cover 31 for drive upper cover 31 goes up and down.

Further, one side of the positioning plate 45 close to the upper cover 31 is a concave structure for pressing the upper cover 31.

Further, the middle part cover of lifter 42 is equipped with sleeve pipe 43, and sleeve pipe 43 installs on platform 1, the lifter 42 vertical migration of being convenient for.

Example 2

In order to further facilitate the cleaning of the round crystal, on the basis of embodiment 1, the cleaning disc rotating mechanism 5 comprises a cleaning disc 51, the cleaning disc 51 is made of porous ceramics, and is connected with a vacuum pipeline, a rotating joint 54 is installed in the middle of the cleaning disc 51, the cleaning disc 51 is installed on the platform 1 through a bearing 53, the round crystal 55 is clamped on the rotating joint 54, the bottom of the rotating joint 54 is driven to rotate through a rotating motor 52, the round crystal is rotated through the cleaning disc rotating mechanism 5, the centrifugal force generated by the rotation of the cleaning disc 51 enables the liquid medicine to uniformly cover the surface of the wafer, and finally the liquid medicine is collected into the waste liquid collecting tank 34 through a pot cover.

The utility model discloses a be used for abluent multiple liquid medicine autosegregation collection device of wafer when using, at first descend upper shield 31, the washing dish 51 is put to the wafer, the wafer passes through vacuum adsorption on washing dish 51, shower nozzle 231 of liquid medicine 1 is driven by vertical cylinder 24 and is risen, rotary motor 21 drives shower nozzle 231 and rotates to the wafer top, then shower nozzle 231 of liquid medicine 1 descends to the hydrojet position, basin cover elevating system 4 drives upper shield 31 and rises, it is rotatory that washing dish 51 drives the wafer, shower nozzle 231 of liquid medicine 1 begins fan-shaped swing and sprinkles the liquid medicine on the wafer, liquid medicine 1 collects lower cover 32 and discharges to the liquid medicine collection device through fluid-discharge tube 33 through centrifugal force, the injection time of liquid medicine 1 has arrived the back, shower nozzle 231 of liquid medicine 1 rises, upper shield 31 descends, the coincide is hidden in lower cover 32, shower nozzle 231 of liquid medicine 1 swings the original point;

the shower nozzle 231 of liquid medicine 2 is driven by vertical cylinder 24 and rises, rotary motor 21 drives shower nozzle 231 and rotates to the wafer top, then shower nozzle 231 of liquid medicine 2 descends to the hydrojet position, it is rotatory that washing dish 51 drives the wafer, shower nozzle 231 of liquid medicine 2 begins fan-shaped swing and sprinkles the liquid medicine on the wafer, liquid medicine 2 collects upper shield 31 and discharges to another liquid medicine collection device through fluid-discharge tube 33 through centrifugal force, the back has been arrived in the injection time, shower nozzle 231 of liquid medicine 2 rises, the shower nozzle of liquid medicine 1 swings back to the original point, shower nozzle 231 of nitrogen gas swings to the wafer top, jetting nitrogen gas, simultaneously the wafer is rotatory, make the wafer spin-dry, the wafer spin-dry is accomplished, each shower nozzle gets back to the original point position, release vacuum, take away the wafer.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only the preferred embodiments of the present invention, and is not intended to limit the present invention, and that there may be various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall within the scope of the present invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a multiple liquid medicine autosegregation collection device for wafer cleaning, includes platform (1), its characterized in that: a plurality of shower nozzle swing arm mechanism (2) are installed at the top of platform (1), install basin cover (3) in the middle of the top of platform (1), basin cover elevating system (4) are installed in the outside of basin cover (3), basin cover (3) are hollow cone, basin cover (3) include upper shield (31) and lower cover (32), upper shield (31) can be through basin cover elevating system (4) activity from top to bottom, the mid-mounting of basin cover (3) has washing dish rotary mechanism (5).

2. The automatic separating and collecting device for multiple chemical solutions for wafer cleaning according to claim 1, wherein: the lower cover (32) is fixed on the base, a waste liquid collecting tank (34) is arranged on the inner sides of the upper cover (31) and the lower cover (32), and a liquid discharge pipe (33) is installed on the outer sides of the upper cover (31) and the lower cover (32).

3. The automatic separating and collecting device for multiple chemical solutions for wafer cleaning according to claim 1, wherein: shower nozzle swing arm mechanism (2) are including rotating motor (21), the top output of rotating motor (21) is connected with swing arm (23) through connecting rod (22), shower nozzle (231) are installed to the outer end of swing arm (23), the mid-mounting of connecting rod (22) has vertical cylinder (24).

4. The automatic separating and collecting device for multiple chemical solutions for wafer cleaning according to claim 1, wherein: basin cover elevating system (4) are including elevating platform (41), lift cylinder (44) are installed to the bottom of elevating platform (41), a plurality of lifter (42) are installed at the top of elevating platform (41), locating plate (45), a plurality of in the outside are installed at the top of lifter (42) locating plate (45) can compress tightly upper shield (31) fixedly.

5. The automatic separation and collection device for multiple chemical solutions for wafer cleaning according to claim 4, wherein: one side of the positioning plate (45) close to the upper cover (31) is of a concave structure.

6. The automatic separation and collection device for multiple chemical solutions for wafer cleaning according to claim 5, wherein: the middle part of lifter (42) is equipped with sleeve pipe (43) with the cover, sleeve pipe (43) are installed on platform (1).

7. The automatic separating and collecting device for multiple chemical solutions for wafer cleaning according to claim 1, wherein: wash dish rotary mechanism (5) including wasing dish (51), the mid-mounting that washs dish (51) has rotary joint (54), wash dish (51) and install on platform (1) through bearing (53), the centre gripping has round brilliant (55) on rotary joint (54), the bottom of rotary joint (54) is passed through rotating electrical machines (52) drive and is rotated.