CN217677750U

CN217677750U - Optical vacuum cavity for high-quality coating

Info

Publication number: CN217677750U
Application number: CN202221005969.4U
Authority: CN
Inventors: 黄介龙
Original assignee: Jiangyin Mudas Vacuum Equipment Co ltd
Current assignee: Jiangyin Mudas Vacuum Equipment Co ltd
Priority date: 2022-04-28
Filing date: 2022-04-28
Publication date: 2022-10-28
Anticipated expiration: 2032-04-28

Abstract

The utility model discloses a high quality coating film's vacuum cavity for optics relates to vacuum cavity technical field, including vacuum cavity, vacuum cavity's inside is provided with places the cover, places the wall in the cover and has seted up a plurality of mouths of placing, and a plurality of relative one sides of placing a mouthful inner wall have all seted up first recess, and the spout has all been seted up to relative one side of a plurality of first recess inner walls, and the opposite one side of a plurality of corresponding two spout inner walls rotates jointly and is connected with two-way lead screw. The utility model discloses, it blocks to be provided with the material that the baffle will carry out the coating film in placing the cover, and the baffle has the effect that is in the light, hinders heat and high temperature resistance simultaneously, and when the evaporation source of bottom reached required temperature in the heating process, the servo motor in the cover was placed in the function, drives a series of devices and functions for the baffle is opened, can carry out the coating film under required temperature environment to the material that needs carry out the coating film.

Description

Optical vacuum cavity for high-quality coating

Technical Field

The utility model relates to a vacuum cavity technical field, in particular to optics of high quality coating film are with vacuum cavity.

Background

The OLED, namely the organic light emitting diode, is also called as organic electroluminescent display, because of having the characteristics of lightness, thinness, electricity saving and the like, the OLED is widely applied to a display screen of a digital product, and has larger market potential, the application of the OLED in the world is focused on a flat panel display, because the OLED is the only technology which can be compared with a TFT-LCD in application, the OLED is the only display technology which can manufacture a large-size, high-brightness and high-resolution soft screen in all the display technologies at present, and can be manufactured to have the same thickness as paper, wherein in the manufacturing process of the OLED, the vacuum coating process is an important process in the manufacturing process of the OLED, the vacuum coating refers to that a vacuum evaporation source is heated and evaporated in a vacuum cavity or bombarded and sputtered by accelerated ions to be deposited on the surface of a substrate to form a single-layer or multi-layer film, and because the vacuum coating process is one of the most important factors related to the quality, the service life and the service life of the OLED, various devices applied to the vacuum coating process must meet the precision requirement of the vacuum coating process.

When the existing vacuum cavity is used, the evaporation source at the bottom is prevented from being evaporated through the baffle, but in the using process, the temperature difference between the lower part and the upper part in the vacuum cavity is large, when the baffle is opened, the temperature at the bottom rises rapidly, the temperature is easy to lose, the required temperature cannot be reached, the phenomenon that the evaporation source is still uneven when the coating is carried out is caused, and the interference is easy to happen.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a vacuum cavity is used to optics of high quality coating film, in order to solve the current vacuum cavity that proposes in the above-mentioned background art when using, the evaporation source of avoiding the bottom through the baffle is evaporated, but in the use, the temperature of lower part and the temperature of upper part differ great in the vacuum cavity, when the baffle is opened, the temperature of bottom rises rapidly, lead to the loss of temperature easily, can not reach required temperature, lead to still inhomogeneous when carrying out the coating film, receive the problem of interference easily.

In order to achieve the above object, the utility model provides a following technical scheme: a vacuum cavity for optics of high-quality coating comprises a vacuum cavity body, wherein a placing cover is arranged inside the vacuum cavity body, a plurality of placing openings are formed in the wall in the placing cover, first grooves are formed in opposite sides of the inner walls of the placing openings, sliding grooves are formed in opposite sides of the inner walls of the first grooves, opposite sides of the inner walls of the corresponding two sliding grooves are connected with a bidirectional screw rod in a rotating mode, two moving blocks are connected to the left side and the right side of the bidirectional screw rod wall in a threaded mode, baffle plates are fixedly connected to the surfaces of the opposite sides of the two corresponding moving blocks, clamping grooves are formed in one side of the opposite sides of the upper side surfaces of the corresponding baffle plates, and clamping blocks matched with the clamping grooves are fixedly connected to one side of the surfaces of the opposite sides of the corresponding baffle plates;

it all has seted up first cavity, two corresponding sides to place one side that the cover inner wall is located first recess the one end of two-way lead screw all runs through one side of spout inner wall to the inside of first cavity, two corresponding the equal fixedly connected with belt pulley of one end of two-way lead screw, two corresponding the opposite side surface of belt pulley rotates through the belt jointly to be connected, it all has seted up the second cavity, and is a plurality of to place one side that the cover inner wall is located first cavity the equal fixedly connected with servo motor of inner wall of second cavity, and is a plurality of servo motor's output all runs through one side of second cavity inner wall to the inside of first cavity, and is a plurality of servo motor's output all is connected with one side fixed surface of one of them belt pulley.

Preferably, the inner walls of the plurality of placing openings are fixedly connected with clamping devices.

Preferably, the upper side of the inner wall of the vacuum cavity is fixedly connected with an electric telescopic rod, the lower end of the electric telescopic rod is fixedly connected with a placing shell, the inner wall of the placing shell is fixedly connected with a motor, and the output end of the motor is fixedly connected with the upper side surface of the placing cover.

Preferably, a base is fixedly connected to the lower side of the inner wall of the vacuum chamber, and an evaporation source is fixedly connected to the upper surface of the base.

Preferably, the front side surface of the vacuum cavity is rotatably connected with a door body through a hinge, and the right side of the front side surface of the door body is fixedly connected with a handle.

Preferably, four sides of the lower side surface of the vacuum cavity are fixedly connected with supporting legs, and the lower ends of the supporting legs are fixedly connected with foot pads.

Preferably, the baffle comprises a light barrier, a heat insulation plate is fixedly connected to the surface of the lower side of the light barrier, and a heat-resistant plate is fixedly connected to the surface of the lower side of the heat insulation plate.

The utility model discloses a technological effect and advantage:

1. through setting up the vacuum cavity, place the cover, place the mouth, two-way lead screw, movable block, baffle, draw-in groove, fixture block, belt pulley, servo motor, the utility model discloses, it blocks the material that the coating film will need to carry out to be provided with the baffle in placing the cover, the baffle has simultaneously is in the light, hinders heat and high temperature resistance effect, when the evaporation source of bottom in heating process, when reaching required temperature, servo motor in the cover is placed in the function, drives a series of devices and operates for the baffle is opened, can carry out the coating film under required temperature environment to the material that needs carry out the coating film.

2. Placing the mouth through the setting, clamping device, the material that carries out the coating film to needs presss from both sides tightly, avoids the material to fall, through setting up vacuum cavity, electric telescopic handle, place shell, motor, convenient control is placed the cover in the material is carrying out the height of coating film, can make simultaneously to place the cover and rotate, through setting up vacuum cavity, base, evaporation source, the evaporation source will need carry out the material of coating film and evaporate for the material can reach the surface of coating film material along with the heat of evaporation.

3. Through setting up the vacuum cavity, the door body, the handle, the device of convenient in to the vacuum cavity is inspected, and fierce the material that needs carry out the coating film and place in placing the mouth, through setting up the vacuum cavity, the supporting leg, the callus on the sole, wholly support the device, keep the holistic stability of device, through setting up the baffle, the barn door, the heat insulating board, the heat-resisting board, make the baffle more durable, obtain better protection to the material that needs carry out the coating film, can succeed to the disposable coating film of material.

Drawings

Fig. 1 is a schematic view of the overall three-dimensional structure of the present invention.

Fig. 2 is a schematic view of the front planing surface structure of the vacuum chamber of the present invention.

Fig. 3 is a schematic view of the structure of the lower side of the placing cover of the present invention.

Fig. 4 is the schematic view of the cross-sectional structure of the lower side planing surface of the placing cover of the present invention.

Fig. 5 is a schematic view of the cross-sectional structure of the front plane of the baffle of the present invention.

Fig. 6 is the schematic view of the cross-sectional structure of the left planing surface of the baffle of the present invention.

In the figure: 1. a vacuum chamber; 2. placing a cover; 3. placing the mouth; 4. a bidirectional screw rod; 5. a moving block; 6. a baffle plate; 7. a card slot; 8. a clamping block; 9. a belt pulley; 10. a servo motor; 11. a clamping device; 12. an electric telescopic rod; 13. placing the shell; 14. an electric motor; 15. a base; 16. an evaporation source; 17. a door body; 18. a handle; 19. supporting legs; 20. a foot pad; 21. a light barrier; 22. a heat insulation plate; 23. a heat-resistant board.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.

The utility model provides a high quality coated optical vacuum cavity as shown in figures 1-6, including vacuum cavity 1, vacuum cavity 1's inside is provided with places the cover 2, place the wall in the cover 2 and seted up a plurality of mouth 3 of placing, a plurality of mouth 3 of placing relative one side of the inner wall have all seted up first recess, the spout has all been seted up to the relative one side of a plurality of first recess inner walls, the opposite side of a plurality of corresponding two spout inner walls rotates jointly and is connected with two-way lead screw 4, the left and right sides of a plurality of two-way lead screw 4 pole walls all threaded connection has two movable blocks 5, the relative side surface of two corresponding movable blocks 5 is fixed connection with baffle 6 jointly, the draw-in groove 7 has all been seted up to the party of the relative one side of side surface on a plurality of corresponding baffle 6, the relative one side surface of a plurality of corresponding baffle 6 all fixedly connected with the fixture block 8 that matches with draw-in groove 7, conveniently make baffle 6 on the left and right sides can the chucking, make baffle 6 on both sides can seal placing mouth 3;

as shown in fig. 1, a first cavity is formed in one side of the inner wall of the placing cover 2, which is located in the first groove, a first cavity is formed in one side of the two-way screw rod 4, which is located in the first groove, of the two corresponding sides, one end of the two-way screw rod 4 is connected to the first cavity through a belt, the opposite side surfaces of the two corresponding belt pulleys 9 are connected through a belt, a second cavity is formed in one side of the inner wall of the placing cover 2, which is located in the first cavity, a servo motor 10 is fixedly connected to the inner wall of the plurality of second cavities, the output end of the servo motor 10 is connected to one side surface of one belt pulley 9, the baffle 6 is arranged in the placing cover 2, and the baffle has the effects of light blocking, heat blocking and high temperature resistance, when the evaporation source 16 at the bottom reaches a required temperature in the heating process, the servo motor 10 in the placing cover 2 is operated to drive a series of devices to operate, so that the baffle 6 is opened to perform the required coating on the required coating material under the required temperature.

As shown in fig. 2 and 3, a plurality of equal fixedly connected with clamping device 11 of inner wall of placing mouth 3, the material that carries out the coating film presss from both sides tightly, avoid the material to fall, the upside fixedly connected with electric telescopic handle 12 of vacuum cavity 1 inner wall, shell 13 is placed to electric telescopic handle 12's lower extreme fixedly connected with, the inner wall fixedly connected with motor 14 of placing shell 13, motor 14's output and the upside fixed surface who places cover 2 are connected, convenient control is placed the height that the coating film was being carried out to the material in the cover 2, can make simultaneously place cover 2 and rotate.

As shown in fig. 1 and 2, a base 15 is fixedly connected to the lower side of the inner wall of the vacuum chamber 1, an evaporation source 16 is fixedly connected to the upper surface of the base 15, the evaporation source 16 evaporates the material to be coated, so that the material can reach the surface of the coating material along with the heat of evaporation, a door 17 is rotatably connected to the front side surface of the vacuum chamber 1 through a hinge, a handle 18 is fixedly connected to the right side of the front side surface of the door 17, the device in the vacuum chamber 1 can be conveniently inspected, and the material to be coated can be placed in the placing opening 3.

As shown in fig. 1 and 6, the equal fixedly connected with supporting leg 19 in four sides of vacuum chamber 1 downside surface, the equal fixedly connected with callus on the sole 20 of lower extreme of a plurality of supporting legs 19, support the device wholly, keep the holistic stability of device, baffle 6 includes barn door 21, the downside fixed surface of barn door 21 is connected with heat insulating board 22, the downside fixed surface of heat insulating board 22 is connected with heat-resistant plate 23, make baffle 6 more durable, obtain better protection to the material that needs to carry out the coating film, can be to the material once only coating film success.

The utility model discloses the theory of operation: when the device is used, the vacuum cavity 1 is placed at the using position, the vacuum cavity 1 is supported through foot pads 20 below a plurality of supporting legs 19, the door body 17 is opened through a handle 18, materials needing to be coated are placed in the placing opening 3 in the placing cover 2, the materials are clamped under the action of the clamping device 11 in the placing opening 3, the door body 17 is closed, the vacuum cavity 1 is kept sealed, all servo motors 10 are operated to drive one belt pulley 9 to operate, all the belt pulleys 9 are rotated under the driving of the belt, all the bidirectional screw rods 4 are driven to rotate, the two baffles 6 on the bidirectional screw rods 4 are clamped mutually under the action of the movement of the moving block 5, the placing opening 3 is closed, all the clamping blocks 8 are clamped into the corresponding clamping grooves 7, and the baffles 6 comprise the light blocking plates 21, the heat insulation plates 22 and the heat-resistant plates 23, so that the baffles 6 are more durable and the materials can be better protected;

the evaporation source 16 on the base 15 is operated, so that the evaporation source 16 can evaporate, substances to be evaporated are evaporated, when the temperature in the vacuum cavity 1 reaches a certain temperature, the electric telescopic rod 12 is operated to move the placing cover 2 to the using height, meanwhile, the motor 14 in the placing shell 13 is operated to drive the placing cover 2 to rotate, all the servo motors 10 in the placing cover 2 are operated to drive one belt pulley 9 to operate, all the belt pulleys 9 are driven to rotate by a belt, all the bidirectional screw rods 4 are driven to rotate, so that the baffles 6 on the bidirectional screw rods 4 in the left and right directions move in the moving block 5, the two baffles 6 move into the first groove until the placing port 3 is completely opened, and the surface of the material is coated.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims

1. The utility model provides a vacuum chamber for optics of high quality coating film, includes vacuum chamber (1), its characterized in that: a placing cover (2) is arranged in the vacuum cavity (1), a plurality of placing openings (3) are formed in the wall of the placing cover (2), first grooves are formed in the opposite sides of the inner walls of the placing openings (3), sliding grooves are formed in the opposite sides of the inner walls of the first grooves, two corresponding bidirectional screw rods (4) are connected to the opposite sides of the inner walls of the two corresponding sliding grooves in a rotating mode, two moving blocks (5) are connected to the left side and the right side of the rod wall of the two bidirectional screw rods (4) in a threaded mode, a baffle plate (6) is fixedly connected to the surface of the opposite side of each of the two corresponding moving blocks (5), a clamping groove (7) is formed in one side of the opposite side of the upper side surface of each corresponding baffle plate (6), and a clamping block (8) matched with the clamping groove (7) is fixedly connected to one side surface of the corresponding baffle plate (6);

it all has seted up first cavity, two corresponding sides to place cover (2) one side that the inner wall is located first recess the one end of two-way lead screw (4) all runs through one side of spout inner wall to the inside of first cavity, two corresponding the equal fixedly connected with belt pulley (9) of one end of two-way lead screw (4), two corresponding the opposite side surface of belt pulley (9) rotates through the belt jointly and connects, it all has seted up the second cavity, and is a plurality of to place cover (2) one side that the inner wall is located first cavity the equal fixedly connected with servo motor (10) of inner wall of second cavity, it is a plurality of servo motor (10)'s output all runs through one side of second cavity inner wall to the inside of first cavity, and is a plurality of servo motor (10)'s output all is connected with one side fixed surface of one of them belt pulley (9).

2. The vacuum chamber for optical use of high quality coated film according to claim 1, wherein: the inner walls of the placing openings (3) are fixedly connected with clamping devices (11).

3. The vacuum chamber for optical use of high quality coated film according to claim 1, wherein: vacuum chamber (1) inner wall's upside fixedly connected with electric telescopic handle (12), shell (13) are placed to the lower extreme fixedly connected with of electric telescopic handle (12), inner wall fixedly connected with motor (14) of placing shell (13), the output of motor (14) and the upside fixed surface who places cover (2) are connected.

4. The vacuum chamber for optical use of high quality coated film according to claim 1, wherein: the lower side of the inner wall of the vacuum cavity (1) is fixedly connected with a base (15), and the upper side surface of the base (15) is fixedly connected with an evaporation source (16).

5. The vacuum chamber for optical use of high quality coated film according to claim 1, wherein: the front side surface of the vacuum cavity (1) is rotatably connected with a door body (17) through a hinge, and the right side of the front side surface of the door body (17) is fixedly connected with a handle (18).

6. The vacuum chamber for optical use of high quality coated film according to claim 1, wherein: the vacuum chamber is characterized in that supporting legs (19) are fixedly connected to four sides of the lower side surface of the vacuum chamber body (1), and a plurality of foot pads (20) are fixedly connected to the lower ends of the supporting legs (19).

7. The vacuum chamber for optical use of high quality coated film according to claim 1, wherein: the baffle (6) comprises a light barrier (21), the lower side surface of the light barrier (21) is fixedly connected with a heat insulation plate (22), and the lower side surface of the heat insulation plate (22) is fixedly connected with a heat-resistant plate (23).