CN211689213U - Multifunctional nano vacuum coating instrument - Google Patents
Multifunctional nano vacuum coating instrument Download PDFInfo
- Publication number
- CN211689213U CN211689213U CN202020233623.4U CN202020233623U CN211689213U CN 211689213 U CN211689213 U CN 211689213U CN 202020233623 U CN202020233623 U CN 202020233623U CN 211689213 U CN211689213 U CN 211689213U
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- China
- Prior art keywords
- coating
- vaporization source
- sample platform
- baffle
- vacuum
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- Expired - Fee Related
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 16
- 238000000576 coating method Methods 0.000 claims abstract description 38
- 239000011248 coating agent Substances 0.000 claims abstract description 37
- 239000000758 substrate Substances 0.000 claims abstract description 28
- 238000009834 vaporization Methods 0.000 claims abstract description 27
- 230000008016 vaporization Effects 0.000 claims abstract description 27
- 230000007246 mechanism Effects 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 16
- 238000009792 diffusion process Methods 0.000 claims description 13
- 230000008020 evaporation Effects 0.000 claims description 8
- 238000001704 evaporation Methods 0.000 claims description 8
- 230000007306 turnover Effects 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 5
- 230000003287 optical effect Effects 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 208000001491 myopia Diseases 0.000 description 1
- 230000004379 myopia Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- Physical Vapour Deposition (AREA)
Abstract
The utility model relates to a multi-functional nanometer vacuum coating appearance, including the vacuum cavity, be provided with sample platform, coating by vaporization source in the vacuum cavity, the sample platform be located the interior top of vacuum cavity the coating by vaporization source is located the interior below of vacuum cavity, the sample platform is driven its ability upset 180 by tilting mechanism, the coating by vaporization source intussuseption is filled with the coating material, the top in coating by vaporization source is provided with the trompil, the aperture of trompil upper end is less than the aperture of lower extreme, the baffle sets up between sample platform and coating by vaporization source, one side of baffle is provided with translation mechanism, translation mechanism can drive the baffle and keep away from between sample platform, the coating by vaporization source. The utility model discloses can carry out the coating film to the two sides of substrate, increase raw and other materials effective utilization and can keep apart coating by vaporization source and sample platform.
Description
Technical Field
The utility model relates to a multifunctional nanometer vacuum coating instrument.
Background
Optical thin films achieve their effects through interference, which means that one or more layers of dielectric films or metal films or dielectric film stacks or metal film stacks are plated on an optical component or an independent substrate to change the light wave transmission characteristics, and many optical instruments such as sensors, semiconductor lasers, interferometers, spectacles for myopia, optical fiber communication, etc. are currently used. At present, the Physical Vapor Deposition (PVD) is mainly used for manufacturing optical thin films, and the PVD is a method of converting a thin film material from a solid state to a gaseous or ionic state, wherein the gaseous or ionic state material passes through a space from an evaporation source and reaches the surface of glass, and the material is deposited to form a thin film gradually after reaching the surface of the glass. Generally, in order to make the manufactured thin film have high purity, the coating process is performed in a high vacuum environment. Vacuum coating is extended from the substrate, and the substrate is cleaned by an ultrasonic cleaner, cleaned, discharged from a central tool, sent into a coating machine, heated and vacuumized, and then coated after reaching high vacuum. When coating, the coating material is changed into ion state by heating the coating source in electron gun mode or resistance mode, and the coating time is different according to the layer number and program. And after the film coating is finished, taking out the film after the temperature is cooled.
The current multifunctional nano vacuum coating instrument has the following problems: firstly, the substrate can not be coated with films on two sides, and only one side can be coated with a film; secondly, as for the U-shaped crucible of the evaporation source, the scattering surface of the source material during evaporation is larger, the utilization rate of the source material is not high, and the waste of the source material is increased; and thirdly, the evaporation source and the sample stage are not blocked and cannot be isolated.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects, the utility model aims to provide a multifunctional nano vacuum coating instrument which can coat the two surfaces of a substrate, increase the effective utilization rate of raw materials and isolate an evaporation source and a sample stage.
In order to achieve the above purpose, the utility model discloses a technical scheme is: the utility model provides a multi-functional nanometer vacuum coating appearance, includes the vacuum cavity, be provided with sample platform, coating by vaporization source and baffle in the vacuum cavity, the sample platform be located the interior top of vacuum cavity the coating by vaporization source is located the interior below of vacuum cavity, the baffle sets up between sample platform and coating by vaporization source, the sample platform is driven its ability upset 180 by tilting mechanism, the coating by vaporization source intussuseption is filled with the coating material, the top in coating by vaporization source is provided with the trompil, the aperture of trompil upper end is less than the aperture of lower extreme, one side of baffle is provided with translation mechanism, translation mechanism can drive the baffle and keep away from between sample platform, the coating by vaporization source.
The multifunctional nano vacuum coating instrument has the advantages that the sample table can be turned over in the vacuum cavity through the arrangement of the turning mechanism, the positive and negative surfaces of the substrate to be coated can be coated, and the efficiency is improved; the opening at the top of the evaporation source is arranged to form that the aperture at the upper end is smaller than that at the lower end, so that the effective utilization rate of the source material can be improved, and the waste of the source material is reduced; in addition, can keep apart coating by vaporization source and sample platform, be applicable to various service environment.
Preferably, the turnover mechanism comprises a servo motor, the servo motor is fixed on the vacuum cavity, the sample table is fixedly connected with an output shaft of the servo motor, a plurality of groups of substrate through holes are formed in the sample table, and a plated substrate plate group is clamped in each group of substrate through holes. The servo motor controls the turnover plate to rotate 180 degrees, and the turnover angle is controllable. When this application will be plated substrate group and set up the multiunit substrate through-hole at a returning face plate, can control the upset of whole substrate through a servo motor, simple structure.
Preferably, a groove is formed in the periphery of each group of substrate through holes, and the plated substrate plate group is clamped in the groove and adsorbed by a magnet. The groove plays a limiting role, and the magnet adsorbs the plated substrate plate, so that the plated substrate plate can be adsorbed.
Preferably, the top of the evaporation source is arc-shaped, and the opening is formed in the top of the arc-shaped.
Preferably, the translation mechanism comprises a translation cylinder, and the baffle is fixed at the end part of a telescopic shaft of the translation cylinder.
Preferably, the baffle includes diffuser plate, shielding plate, be provided with a plurality of diffusion holes on the diffuser plate, shielding plate is located the top of diffuser plate, and with translation cylinder's telescopic shaft fixed connection. The diffusion holes are used for diffusing gaseous or ionic materials to the lower part of the plated substrate, so that the plating uniformity is ensured.
Preferably, the diffusion holes in the middle are vertical, and the diffusion holes on the periphery are obliquely arranged. The uniformity of the gaseous or ionic material being diffused is ensured.
Drawings
Fig. 1 is a schematic structural diagram of the present embodiment.
Detailed Description
The following detailed description of the preferred embodiments of the present invention will be provided in conjunction with the accompanying drawings, so as to enable those skilled in the art to more easily understand the advantages and features of the present invention, and thereby define the scope of the invention more clearly and clearly.
Referring to fig. 1, a multi-functional nanometer vacuum coating appearance, including vacuum cavity 1, be provided with sample platform 2 in the vacuum cavity 1, the coating by vaporization source 3, sample platform 2 is located the top in vacuum cavity 1, coating by vaporization source 3 is located the below in vacuum cavity 1, sample platform 2 is driven its ability upset 180 by tilting mechanism, coating by vaporization source 3 intussuseption is filled with coating material 4, the top of coating by vaporization source 3 is convex, the convex top of coating by vaporization source 3 is provided with trompil 5, the aperture of trompil 5 upper end is less than the aperture of lower extreme, the baffle setting is between sample platform 2 and coating by vaporization source 3, one side of baffle is provided with translation mechanism, translation mechanism can drive the baffle and keep away from sample platform 2, between the coating by vaporization source.
Tilting mechanism includes servo motor 7, and servo motor 7 can set up on the inner wall of vacuum cavity 1 or on the outer wall, and servo motor 7 is fixed on vacuum cavity 1, and sample platform 2 has seted up multiunit substrate through-hole 8 with servo motor 7's output shaft fixed connection on the sample platform 2, and the centre gripping has plated substrate board group 9 in every group substrate through-hole 8. Specifically, a groove 10 is formed around each group of substrate through holes 8 in this embodiment, and the plated substrate plate group 9 is clamped in the groove 10 and is attracted by a magnet 11.
The translation mechanism comprises a translation cylinder 12, the translation cylinder 12 can be arranged on the inner wall or the outer wall of the vacuum cavity 1, and the baffle is fixed at the end part of a telescopic shaft of the translation cylinder 12. Specifically, the baffle in this embodiment includes a diffusion plate 13 and a shielding plate 6, the diffusion plate 13 is provided with a plurality of diffusion holes 14, the shielding plate 6 is located above the diffusion plate 13, and the shielding plate 6 is fixedly connected to the telescopic shaft of the translation cylinder 12. Wherein, the diffusion holes 14 in the middle are vertical, and the diffusion holes 14 on the periphery are obliquely arranged.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement the present invention, so as not to limit the protection scope of the present invention, and all equivalent changes or modifications made according to the spirit of the present invention should be covered in the protection scope of the present invention.
Claims (7)
1. The utility model provides a multi-functional nanometer vacuum coating appearance, includes vacuum cavity (1), be provided with sample platform (2), coating by vaporization source (3) in vacuum cavity (1), sample platform (2) be located vacuum cavity (1) the top coating by vaporization source (3) are located the below of vacuum cavity (1), its characterized in that: sample platform (2) is driven its ability upset 180 by tilting mechanism, coating material (4) are filled in coating by vaporization source (3), the top of coating by vaporization source (3) is provided with trompil (5), the aperture of trompil (5) upper end is less than the aperture of lower extreme, and the baffle setting is between sample platform (2) and coating by vaporization source (3), one side of baffle is provided with translation mechanism, translation mechanism can drive the baffle and keep away from between sample platform (2), the coating by vaporization source (3).
2. The multifunctional nano vacuum coating instrument according to claim 1, characterized in that: the turnover mechanism comprises a servo motor (7), wherein the servo motor (7) is fixed on the vacuum cavity (1), the sample table (2) is fixedly connected with an output shaft of the servo motor (7), a plurality of groups of substrate through holes (8) are formed in the sample table (2), and a plated substrate plate group (9) is clamped in each group of substrate through holes (8).
3. The multifunctional nano vacuum coating instrument according to claim 2, characterized in that: grooves (10) are formed in the periphery of each group of substrate through holes (8), and the plated substrate plate groups (9) are clamped in the grooves (10) and are adsorbed by magnets (11).
4. The multifunctional nano vacuum coating instrument according to claim 1, characterized in that: the top of the evaporation source (3) is arc-shaped, and the opening (5) is formed in the top of the arc-shaped.
5. The multifunctional nano vacuum coating instrument according to claim 1, characterized in that: the translation mechanism comprises a translation cylinder (12), and the baffle is fixed at the end part of a telescopic shaft of the translation cylinder (12).
6. The multifunctional nano vacuum coater according to claim 5, wherein: the baffle includes diffuser plate (13), shielding plate (6), be provided with a plurality of diffusion holes (14) on diffuser plate (13), shielding plate (6) are located the top of diffuser plate (13), shielding plate (6) with the telescopic shaft fixed connection of translation cylinder (12).
7. The multifunctional nano vacuum coating instrument according to claim 6, wherein: the middle diffusion holes (14) are vertical, and the peripheral diffusion holes (14) are obliquely arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020233623.4U CN211689213U (en) | 2020-02-28 | 2020-02-28 | Multifunctional nano vacuum coating instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020233623.4U CN211689213U (en) | 2020-02-28 | 2020-02-28 | Multifunctional nano vacuum coating instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211689213U true CN211689213U (en) | 2020-10-16 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020233623.4U Expired - Fee Related CN211689213U (en) | 2020-02-28 | 2020-02-28 | Multifunctional nano vacuum coating instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211689213U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116770257A (en) * | 2023-06-25 | 2023-09-19 | 广州市博泰光学科技有限公司 | Optical lens coating film manufacturing system and manufacturing method thereof |
-
2020
- 2020-02-28 CN CN202020233623.4U patent/CN211689213U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116770257A (en) * | 2023-06-25 | 2023-09-19 | 广州市博泰光学科技有限公司 | Optical lens coating film manufacturing system and manufacturing method thereof |
| CN116770257B (en) * | 2023-06-25 | 2024-02-06 | 广州市博泰光学科技有限公司 | Optical lens coating film manufacturing system and manufacturing method thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220222 Address after: 215000 No. 168, Ludang Road, Jiangling street, Wujiang District, Suzhou City, Jiangsu Province (north of Lingyi Road) Patentee after: Inaco (Suzhou) semiconductor technology Co.,Ltd. Address before: Room 8209, No. 88-1, Jincheng Road, Taiping Street, Xiangcheng District, Suzhou, Jiangsu 215000 Patentee before: Suzhou hongyouda Instrument Technology Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20201016 |
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| CF01 | Termination of patent right due to non-payment of annual fee |