CN217589501U - Lower electrode grounding structure and vacuum coating equipment - Google Patents
Lower electrode grounding structure and vacuum coating equipment Download PDFInfo
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- CN217589501U CN217589501U CN202221604106.9U CN202221604106U CN217589501U CN 217589501 U CN217589501 U CN 217589501U CN 202221604106 U CN202221604106 U CN 202221604106U CN 217589501 U CN217589501 U CN 217589501U
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Abstract
The utility model discloses a bottom electrode ground structure and vacuum coating equipment, this bottom electrode ground structure include cavity connecting piece, sliding connection spare and electrically conductive connecting piece, and the cavity connecting piece is installed on the inside wall of the vertical direction of coating film cavity, and the length of cavity connecting piece extends along vertical direction, and sliding connection spare establishes on the cavity connecting piece along vertical direction slidable, and the one end of electrically conductive connecting piece is connected on sliding connection spare, and the other end is connected on the lateral wall of bottom electrode. The lower electrode grounding structure can still keep a grounding state in the process of up-and-down movement of the lower electrode, is not easy to damage and has a long service life.
Description
Technical Field
The utility model relates to a display device manufacture equipment technical field especially relates to a bottom electrode ground structure and vacuum coating equipment.
Background
In order to adjust the distance between the upper electrode assembly and the lower electrode assembly in the vacuum coating apparatus, the lower electrode assembly is generally configured to move up and down in the coating chamber, and the lower electrode assembly needs to be grounded according to the operating principle of the vacuum coating apparatus. As shown in fig. 1, the lower electrode grounding structure in the prior art includes a wire pressing block 1', a wire 2', a connecting bolt 3 'and a bolt baffle 4', the wire pressing block 1 'is fixed on the bottom wall of the lower electrode 5' through the connecting bolt 3', one end of the wire 2' is clamped between the wire pressing block 1 'and the bottom wall of the lower electrode 5', the other end is fixed on the bottom wall of the coating chamber 6', and the bolt baffle 4' is fixed on the upper surface of the lower electrode 5 'through the connecting bolt 3'. The defects of the prior art are as follows: because the lower electrode 5' can move along the vertical direction in the working process, the lead 2' is easy to fatigue and strain and damage in multiple movements, so that the lower electrode 5' is not grounded any more, and the whole vacuum coating equipment can not work normally.
SUMMERY OF THE UTILITY MODEL
The utility model discloses a first aim at: the lower electrode grounding structure can always keep a good grounding state in the up-and-down movement process of the lower electrode, is not easy to damage and has a long service life.
In order to achieve the purpose, the utility model adopts the following technical proposal:
provided is a lower electrode grounding structure, including: the coating device comprises a chamber connecting piece, a coating chamber and a control device, wherein the chamber connecting piece is arranged on the inner side wall of the coating chamber in the vertical direction, and the length of the chamber connecting piece extends in the vertical direction; the sliding connecting piece is arranged on the chamber connecting piece in a sliding mode along the vertical direction; and one end of the conductive connecting piece is connected to the sliding connecting piece, and the other end of the conductive connecting piece is connected to the side wall of the lower electrode.
As a preferable mode of the lower electrode grounding structure, the conductive connecting member is an elastic member.
As a preferred scheme of the lower electrode grounding structure, a guide slide rail extending in the vertical direction is arranged on the cavity connecting piece, and a guide slide block matched with the guide slide rail is arranged on the sliding connecting piece.
As a preferable aspect of the lower electrode grounding structure, the guide rail includes: a fixing part fixed on the chamber connecting piece; the cooperation portion, the cooperation portion is two, two the one end of cooperation portion is all connected on the fixed part, two all be equipped with the spout in the cooperation portion, be equipped with the cooperation on the direction slider and be in sliding part in the spout.
As a preferable scheme of the grounding structure of the lower electrode, the matching portion includes a first horizontal portion, a vertical portion and a second horizontal portion, one end of the first horizontal portion is connected to the fixing portion, the other end of the first horizontal portion is connected to the vertical portion, one end of the second horizontal portion is connected to the vertical portion, the other end of the second horizontal portion is spaced from the side wall of the fixing portion, and the first horizontal portion and the second horizontal portion define the sliding groove.
As a preferred scheme of bottom electrode ground structure, the direction slider still includes the installation department, the installation department be used for with sliding connection spare links to each other, the sliding part is two, every the sliding part all includes connecting portion and slip hook, the one end of connecting portion with the installation department links to each other, the slip hook connection is in connecting portion are kept away from the one end and the cooperation of installation department are in the spout.
As a preferable mode of the lower electrode grounding structure, the mounting portion is connected to the sliding connection member through a first conductive member.
As a preferable embodiment of the lower electrode grounding structure, the fixing portion is connected to the chamber connecting member through a second conductive member.
As a preferable scheme of the lower electrode grounding structure, the chamber connecting piece is connected to the inner side wall of the coating chamber through a plurality of fixing pieces arranged at intervals along the length direction of the chamber connecting piece.
The utility model discloses a beneficial effect of bottom electrode ground structure: because the sliding connecting piece is arranged on the chamber connecting piece in a sliding way along the vertical direction, the sliding connecting piece can also move up and down along the vertical direction in the process that the lower electrode moves up and down along the vertical direction, and the lower electrode can be stably kept in a conduction state with the inner side wall of the film coating chamber due to the existence of the conductive connecting piece, so that the lower electrode can be stably grounded. Because the conductive connecting piece is connected between the sliding connecting piece and the side wall of the lower electrode, the tensile force applied to the conductive connecting piece is relatively small in the up-and-down movement process of the lower electrode, and the probability of fatigue fracture of the conductive connecting piece is relatively small even after the conductive connecting piece is used for a long time, so that the probability of fracture of the conductive connecting piece is reduced, and the service life of the conductive connecting piece is prolonged.
The utility model discloses a second aim at: the vacuum coating equipment is high in reliability and low in failure rate.
In order to achieve the purpose, the utility model adopts the following technical proposal:
there is provided a vacuum coating apparatus, comprising a housing, a lower electrode and the grounding structure of the lower electrode.
The utility model discloses a vacuum coating equipment's beneficial effect: due to the fact that the lower electrode grounding structure is arranged, the conductive connecting piece is connected to the side wall of the lower electrode, external force applied to the conductive connecting piece is relatively small in the up-and-down movement process of the lower electrode, the phenomenon that the conductive connecting piece is damaged is well avoided, the lower electrode is guaranteed to be always in a grounding state in the working process of vacuum coating equipment, accordingly, working reliability of the vacuum coating equipment is improved, and the failure rate of the vacuum coating equipment is reduced.
Drawings
The present invention will be described in further detail with reference to the accompanying drawings and examples.
FIG. 1 is a schematic structural diagram of a prior art bottom electrode grounding structure;
fig. 2 is a schematic view of the lower electrode grounding structure according to the embodiment of the present invention;
fig. 3 is a schematic partial structural diagram of a lower electrode grounding structure according to an embodiment of the present invention.
Reference numerals:
in fig. 1:
1', a wire pressing block; 2', conducting wires; a 3' connecting bolt; 4'; a bolt baffle plate; 5', a lower electrode; 6' and a film coating chamber.
In fig. 2-3:
1. a chamber connection; 2. a sliding connector; 3. a conductive connection member; 4. a guide slide rail; 401. a chute; 41. a fixed part; 42. a fitting portion; 421. a first horizontal portion; 422. a vertical portion; 423. a second horizontal portion; 5. a guide slider; 51. an installation part; 52. a sliding part; 521. a connecting portion; 522. a sliding hook; 6. a fixing member; 7. a housing; 71. a film coating chamber; 8. a lower electrode; 9. a first conductive member; 10. a second conductive member.
Detailed Description
The advantages and features of the present invention and the methods of accomplishing the same will become apparent with reference to the following detailed description of the embodiments taken in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and the embodiments are provided only to accomplish the disclosure of the present invention and to enable those skilled in the art to fully understand the scope of the present invention, and the present invention is limited only by the scope of the claims. Like reference numerals denote like constituent elements throughout the specification.
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.
The utility model discloses a bottom electrode ground structure particularly, as shown in fig. 2, this bottom electrode ground structure includes cavity connecting piece 1, sliding connection spare 2 and electrically conductive connecting piece 3, cavity connecting piece 1 is installed on the inside wall of the vertical direction of coating film cavity 71, the length of cavity connecting piece 1 extends along vertical direction and sets up, sliding connection spare 2 is established on cavity connecting piece 1 along vertical direction slidable, the one end of electrically conductive connecting piece 3 is connected on sliding connection spare 2, the other end is connected on bottom electrode 8's lateral wall.
It can be understood that, in order to ensure the normal operation of the vacuum coating apparatus, the outer side wall of the coating chamber 71 is generally stably grounded, in this embodiment, since the conductive connecting member 3 is slidably disposed on the chamber connecting member 1 in the vertical direction, the sliding connecting member 2 can move up and down in the vertical direction during the up and down movement of the lower electrode 8 in the vertical direction, and due to the existence of the conductive connecting member 3, the lower electrode 8 can be stably kept in a conductive state with the inner side wall of the coating chamber 71, thereby ensuring that the lower electrode 8 can be stably grounded. Meanwhile, because the sliding connection piece 2 is connected between the sliding connection piece 2 and the side wall of the lower electrode 8, compared with the structure that the lead 2 'is connected with the bottom wall of the lower electrode 5' in the prior art, in the up-and-down movement process of the lower electrode 8, the pulling force applied to the conductive connection piece 3 of the embodiment is relatively small, and the probability of fatigue fracture of the conductive connection piece 3 is relatively small even after long-time use, so that the probability of fracture of the conductive connection piece 3 is reduced, the service life of the conductive connection piece 3 is prolonged, the working reliability of the vacuum coating equipment is improved, the failure rate of the vacuum coating equipment is reduced, and the maintenance period of the vacuum coating equipment is prolonged.
In some embodiments, the conductive connecting member 3 is an elastic member. It can be understood that, in the actual working process, the lower electrode 8 may slightly shake, and if the conductive connecting member 3 is set as a rigid member, the conductive connecting member 3 cannot deform in the process of shaking the lower electrode 8, so that the probability of fatigue fracture of the conductive connecting member 3 is improved. In this embodiment, the conductive connecting member 3 is an elastic member, so that even if the lower electrode 8 shakes during the working process, the conductive connecting member 3 can deform accordingly, thereby better reducing the probability of fatigue fracture of the conductive connecting member 3 and further reducing the probability of fracture of the conductive connecting member 3.
It should be additionally noted that, in the embodiment of the present invention, the elastic member may be a spring, may also be a wire structure having elasticity, and may also be another conductive structure having elasticity, and the specific type of the elastic member may be selected according to actual needs, and no limitation is made to the specific structure and material of the elastic member here.
In some embodiments, as shown in fig. 3, the chamber connector 1 is provided with a guide rail 4 extending in a vertical direction, and the slide connector 2 is provided with a guide slider 5 engaged with the guide rail 4. It can be understood that, in the process of the vertical up-and-down movement of the lower electrode 8, if the relative movement of the chamber connector 1 and the sliding connector 2 is deviated, not only the normal movement of the lower electrode 8 is affected, but also a phenomenon that the conductive connector 3 is broken due to a local large external force applied to the conductive connector 3 may occur. In this embodiment, be equipped with direction slide rail 4 on the cavity connecting piece 1, be equipped with on the sliding connection spare 2 with direction slide rail 4 complex direction slider 5, the slip direction of sliding connection spare 2 can be restricted with the cooperation of direction slider 5 to direction slide rail 4, make it only can follow vertical direction up-and-down motion, crooked phenomenon can not appear, thereby ensure that on the one hand electrode 8 can smoothly follow vertical direction up-and-down motion, on the other hand can avoid the too big phenomenon of 3 local atress of electrically conductive connecting piece, thereby furthest reduces the phenomenon that fatigue fracture appears in electrically conductive connecting piece 3.
In some specific embodiments, as shown in fig. 3, the guide rail 4 includes two fixing portions 41 and two matching portions 42, the fixing portion 41 is fixed on the chamber connector 1, one end of each of the two matching portions 42 is connected to the fixing portion 41, each of the two matching portions 42 is provided with a sliding slot 401, and the guide slider 5 is provided with a sliding portion 52 matched in the sliding slot 401. It can be understood that the fixing portion 41 can ensure the stable connection between the guide rail 4 and the chamber connector 1, and avoid the occurrence of the phenomenon that the sliding connector 2 cannot stably slide due to the unstable connection between the guide rail 4 and the chamber connector 1. Cooperation portion 42 is two, and all is equipped with spout 401 on two cooperation portions 42, and two lateral walls that direction slider 5 set up relatively can be injectd simultaneously to direction slide rail 4 like this, can ensure the relative direction slide rail 4 steady motion of direction slider 5 on the one hand, ensures that crooked phenomenon can not appear in direction slider 5, and on the other hand has promoted the cooperation stability of direction slider 5 and direction slide rail 4, avoids the phenomenon that direction slider 5 deviates from on the direction slide rail 4 to take place.
In some more specific embodiments, as shown in fig. 3, the fitting portion 42 includes a first horizontal portion 421, a vertical portion 422, and a second horizontal portion 423, the first horizontal portion 421 has one end connected to the fixing portion 41 and the other end connected to the vertical portion 422, the second horizontal portion 423 has one end connected to the vertical portion 422 and the other end spaced apart from a side wall of the fixing portion 41, and the first horizontal portion 421 and the second horizontal portion 423 define the sliding groove 401. It can be understood that, the other end of the second horizontal portion 423 is spaced apart from the side wall of the fixing portion 41, so that a gap for inserting the sliding portion 52 of the guide sliding block 5 into the sliding slot 401 is reserved, and it is convenient for the worker to fit the guide sliding block 5 on the guide sliding rail 4, thereby improving the assembly efficiency of the lower electrode grounding structure of the embodiment. And the fitting part 42 comprises a first horizontal part 421, a vertical part 422 and a second horizontal part 423, which is convenient to process and has good strength, so that the service life of the guide sliding rail 4 is prolonged.
In some more specific embodiments, as shown in fig. 3, the guide slider 5 further includes a mounting portion 51, the mounting portion 51 is configured to be connected to the slide connecting member 2, the number of the sliding portions 52 is two, each sliding portion 52 includes a connecting portion 521 and a sliding hook 522, one end of the connecting portion 521 is connected to the mounting portion 51, and the sliding hook 522 is connected to one end of the connecting portion 521 away from the mounting portion 51 and is fitted in the sliding slot 401. It can be understood that the installation part 51 ensures the connection stability of the guide sliding block 5 and the sliding connection part 2, avoids the phenomenon of shaking of the installation part 51 relative to the sliding connection part 2, and ensures that the guide sliding block 5 can stably slide relative to the guide sliding rail 4 in the sliding process of the sliding connection part 2, thereby ensuring that the sliding connection part 2 can only move up and down along the vertical direction, and avoiding the phenomenon of shaking of the sliding connection part 2 to the maximum extent. The sliding portion 52 of the guide slider 5 is formed as a sliding hook 522, which ensures that the guide slider 5 can stably slide relative to the guide rail 4, and preferably prevents the guide slider 5 from falling off the guide rail 4.
In some embodiments, the mounting portion 51 is connected to the sliding connector 2 by the first conductive member 9. Thereby, the connection stability of the guide slider 5 and the slide connector 2 can be ensured, and the operation is facilitated. The first conductive member 9 may be a connecting member such as a metal screw, a metal rivet or a metal pin. The specific type of the first conductive member 9 can be selected according to actual needs.
In some embodiments, the fixing part 41 is connected to the chamber connection member 1 through the second conductive member 10. Thereby, the connection stability of the guide rail 4 and the chamber connection member 1 can be ensured, and the operation is facilitated. The second conductive member 10 may be a metal screw, a metal rivet, or a metal pin. The specific type of the second conductive member 10 may be selected according to actual needs.
In some embodiments, the chamber connector 1 is connected to the inner sidewall of the coating chamber 71 by a plurality of fixing members 6 spaced along the length thereof. Therefore, the connection stability of the chamber connecting piece 1 and the inner side wall of the coating chamber 71 can be ensured, and the operation is convenient. The fixing member 6 may be any one of a screw, a rivet, or a pin according to actual needs, and the specific structure of the fixing member 6 is not limited herein. Of course, in other embodiments of the present invention, the chamber connector 1 may also be connected to the inner sidewall of the coating chamber 71 through the conductive connector 3, and is not limited to the connection manner through the fixing member 6 in this embodiment.
The utility model also discloses a vacuum coating equipment, this vacuum coating equipment include casing 7, bottom electrode 8 and foretell bottom electrode ground structure.
The utility model discloses a vacuum coating equipment, owing to have foretell bottom electrode ground structure, because electrically conductive connecting piece 3 is connected on bottom electrode 8's lateral wall, in the bottom electrode 8 up-and-down motion in-process, the external force that electrically conductive connecting piece 3 received is less relatively, avoided electrically conductive connecting piece 3 the phenomenon that damages to appear betterly, ensured that bottom electrode 8 remains ground state throughout in vacuum coating equipment course of operation to vacuum coating equipment's operational reliability has been promoted, vacuum coating equipment's fault rate has been reduced.
Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but may be manufactured in various forms, and those skilled in the art will understand that the present invention may be embodied in other specific forms without changing the technical spirit or essential features of the invention. It is therefore to be understood that the above described embodiments are illustrative and not restrictive in all respects.
Claims (10)
1. A lower electrode grounding structure, comprising:
the coating device comprises a chamber connecting piece, a coating chamber and a control device, wherein the chamber connecting piece is arranged on the inner side wall of the coating chamber in the vertical direction, and the length of the chamber connecting piece extends in the vertical direction;
the sliding connecting piece is arranged on the chamber connecting piece in a sliding mode along the vertical direction;
and one end of the conductive connecting piece is connected to the sliding connecting piece, and the other end of the conductive connecting piece is connected to the side wall of the lower electrode.
2. The lower electrode ground structure according to claim 1, wherein the conductive connecting member is an elastic member.
3. The grounding structure of the lower electrode as set forth in claim 1, wherein the chamber connecting member is provided with a guide rail extending in a vertical direction, and the sliding connecting member is provided with a guide slider engaged with the guide rail.
4. The lower electrode grounding structure according to claim 3, wherein the guide rail includes:
a fixing part fixed on the chamber connecting piece;
the cooperation portion, the cooperation portion is two, two the one end of cooperation portion is all connected on the fixed part, two all be equipped with the spout in the cooperation portion, be equipped with the cooperation on the direction slider and be in sliding part in the spout.
5. The lower electrode ground structure according to claim 4, wherein the fitting portion includes a first horizontal portion, a vertical portion, and a second horizontal portion, one end of the first horizontal portion is connected to the fixing portion, the other end is connected to the vertical portion, one end of the second horizontal portion is connected to the vertical portion, the other end is spaced apart from a side wall of the fixing portion, and the first horizontal portion, the vertical portion, and the second horizontal portion define the chute.
6. The grounding structure of the lower electrode as set forth in claim 4, wherein the guiding slider further comprises two mounting portions for connecting with the sliding connection member, each of the two sliding portions comprises a connecting portion and a sliding hook, one end of the connecting portion is connected with the mounting portion, and the sliding hook is connected with one end of the connecting portion away from the mounting portion and is engaged in the sliding groove.
7. The lower electrode ground structure according to claim 6, wherein the mounting portion is connected to the sliding connection member by a first conductive member.
8. The lower electrode ground structure according to claim 4, wherein the fixing portion is connected to the chamber connection member through a second conductive member.
9. The lower electrode ground structure according to claim 1, wherein the chamber connector is connected to an inner sidewall of the coating chamber by a plurality of fixing members spaced apart along a length direction thereof.
10. A vacuum plating apparatus comprising a housing, a lower electrode, and the lower electrode ground structure according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221604106.9U CN217589501U (en) | 2022-06-24 | 2022-06-24 | Lower electrode grounding structure and vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221604106.9U CN217589501U (en) | 2022-06-24 | 2022-06-24 | Lower electrode grounding structure and vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217589501U true CN217589501U (en) | 2022-10-14 |
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ID=83531929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221604106.9U Active CN217589501U (en) | 2022-06-24 | 2022-06-24 | Lower electrode grounding structure and vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217589501U (en) |
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- 2022-06-24 CN CN202221604106.9U patent/CN217589501U/en active Active
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