CN217466146U

CN217466146U - Vacuum device

Info

Publication number: CN217466146U
Application number: CN202221594189.8U
Authority: CN
Inventors: 汪杰; 杨莉
Original assignee: InfoVision Optoelectronics Kunshan Co Ltd
Current assignee: InfoVision Optoelectronics Kunshan Co Ltd
Priority date: 2022-06-23
Filing date: 2022-06-23
Publication date: 2022-09-20
Anticipated expiration: 2032-06-23

Abstract

The application discloses a vacuum device, comprising a bottom plate; the cover plate is movably connected with the bottom plate, and the bottom plate and the cover plate can surround to form a cavity; the pipeline is communicated with the cavity and consists of a plurality of sections of pipelines; the vacuum device also comprises a light source, and the light source is positioned in the cavity and positioned at the joint of the bottom plate and the cover plate, and/or positioned in the pipeline and positioned at the joint between the adjacent pipelines, and/or positioned at the joint of the pipeline and the cavity. According to the vacuum device, the light source is arranged in the internal environment formed by the cavity and the pipeline, when a joint causing air leakage of the internal environment exists between the connecting parts forming the internal environment, light emitted by the light source can be emitted through the joint, and therefore whether the air tightness of the vacuum device is good or not can be judged through light leakage in the external environment.

Description

Vacuum device

Technical Field

The utility model relates to a vacuum apparatus technical field, more specifically relates to a vacuum apparatus for semiconductor device.

Background

Most of the existing liquid crystal displays in the market are backlight liquid crystal displays (lcds), which include a liquid crystal display panel and a backlight module (backlight module). The liquid crystal display panel forming process generally includes: front Array (Array) process (thin film, yellow light, etching and stripping), middle Cell (TFT substrate and CF substrate bonding), and back module assembly process (driver IC and printed circuit board bonding). Wherein, the front-stage Array process mainly forms a TFT substrate to control the movement of liquid crystal molecules; the middle Cell process is mainly to add liquid crystal between the TFT substrate and the CF substrate; the back module assembly process mainly drives the integration of IC pressing and printed circuit board, and further drives the liquid crystal molecules to rotate and display images.

In the production process, the coating machine is an important RGB (red, green and blue) light resistance film forming device, vacuum drying is needed after coating and film forming, more than 70% of solvent in the light resistance is volatilized in a vacuum environment, and a stable wet film is formed after the solvent is removed so as to carry out subsequent baking/exposure processes. Vacuum equipment such as a vacuum drying device (VCD) and the like needs better air tightness, if the air tightness is not good, the product manufacturing process is influenced, the problems such as light resistance hole breaking and the like are caused, and the product yield is influenced.

In the prior art, when the airtightness of the vacuum chamber of the vacuum equipment is abnormal, the abnormal position is usually found out by helium leakage. As shown in fig. 1, a helium spray gun 22 is connected to a helium tank 21, helium is sprayed along all gaps of the vacuum chamber 10, and a vacuum pump 30 is connected to the chamber 10 to operate the chamber 10, so that once helium is sucked from the gaps of the chamber 10, a helium analyzer 40 can detect that the content of the helium is high, which indicates that the chamber 10 has a problem of poor sealing.

However, the abnormal position is found out in a helium leakage detection mode, the operation time is long, the labor is consumed, if the experience of personnel is insufficient, the position where the abnormality really occurs cannot be found out, the efficiency is low, and the utilization rate of detection equipment is influenced.

SUMMERY OF THE UTILITY MODEL

In view of the above problems, an object of the present invention is to provide a vacuum apparatus for a semiconductor device, in which a light source is disposed in an internal environment formed by a chamber and a pipe, and when a seam causing air leakage in the internal environment exists between connecting members forming the internal environment, light emitted from the light source can be emitted through the seam, so that whether the airtightness of the vacuum apparatus is good or not can be determined through light leakage in the external environment.

According to the utility model discloses the embodiment provides a vacuum apparatus, include: a base plate; the cover plate is movably connected with the bottom plate, and the bottom plate and the cover plate can surround to form a cavity; the pipeline is communicated with the cavity and consists of a plurality of sections of pipelines; the vacuum device also comprises a light source, wherein the light source is positioned in the cavity and positioned at the joint of the bottom plate and the cover plate, and/or positioned in the pipeline and positioned at the joint between adjacent pipelines, and/or positioned at the joint of the pipeline and the cavity.

Optionally, the light source is an LED light source.

Optionally, the light source is a green LED light source.

Optionally, a battery is further included, corresponding to the position of the light source, to supply power to the light source.

Optionally, the method further comprises: a through hole communicating an external environment with an internal environment formed by the chamber and the pipeline, the through hole being adjacent to the light source; and a power supply line electrically connected to the light source through the through hole.

Optionally, the power supply device further comprises a sealing ring filled between the through hole and the power supply line.

Optionally, the device further comprises a sensor located outside the chamber and/or the pipeline and corresponding to the light source.

Optionally, the sensor surrounds the adjacent position of the base plate and the cover plate, and/or the sensor surrounds the abutment of the adjacent pipes, and/or the sensor surrounds the abutment of the pipe and the chamber.

Optionally, the device further comprises an alarm electrically connected with the sensor.

Optionally, a monitor is also included, electrically connected to the sensor.

According to the utility model provides a vacuum apparatus through with the light source setting within the internal environment who comprises cavity, pipeline, exists the seam that leads to internal environment gas leakage between the adapting unit who constitutes internal environment, and the light that this light source sent can jet out through the seam to whether the gas tightness of external environment just accessible light leak judgement vacuum apparatus is good.

Drawings

The above and other objects, features and advantages of the present invention will become more apparent from the following description of the embodiments of the present invention with reference to the accompanying drawings.

FIG. 1 is a schematic view of a prior art chamber leak detection apparatus.

Fig. 2 is a schematic structural diagram of a vacuum apparatus according to an embodiment of the present invention.

Fig. 3 and 4 are schematic position diagrams of the light source and the sensor of the vacuum apparatus according to the embodiment of the present invention.

Detailed Description

The invention will be described in more detail below with reference to the accompanying drawings. Like elements in the various figures are denoted by like reference numerals. For purposes of clarity, the various features in the drawings are not necessarily drawn to scale. Moreover, certain well-known elements may not be shown in the figures.

Numerous specific details of the invention, such as structure, materials, dimensions, processing techniques and techniques of components, are set forth in the following description in order to provide a more thorough understanding of the invention. However, as will be understood by those skilled in the art, the present invention may be practiced without these specific details.

It will be understood that when a layer, region or layer is referred to as being "on" or "over" another layer, region or layer in describing the structure of the component, it can be directly on the other layer, region or layer or intervening layers or regions may also be present. Also, if the component is turned over, one layer or region may be "under" or "beneath" another layer or region.

Fig. 2 shows a schematic structural diagram of a vacuum apparatus according to an embodiment of the present invention.

As shown in fig. 2, the vacuum apparatus according to the embodiment of the present invention includes: a base plate 110, a cover plate 120, piping, a vacuum pump 140, a light source 150, a sensor 160, an alarm 170, a monitor 180, and a plurality of control valves.

In this embodiment, the cover plate 110 is movably connected to the base plate 120, and the base plate 120 and the cover plate 110 can surround to form the chamber 101. The pipeline is communicated with the chamber 101, and the pipeline is composed of a plurality of sections of pipelines, including a pipeline 131, a pipeline 132, a pipeline 133 and a pipeline 134 which are communicated in sequence. The vacuum pump 140 is in communication with the conduit for drawing air from the chamber 101 through the conduit. The control valve includes an on-off valve 210 and a speed regulating valve 220, wherein the on-off valve 210 is connected to the pipe 133, and the speed regulating valve 220 is connected to the pipe 132 and the pipe 131, respectively. The light source 150 is disposed within the interior environment defined by the chamber 101 and the conduit, for example, the light source 150 is located within the chamber 101 at the junction of the base plate 110 and the cover plate 120, and/or the light source 150 is located within the conduit at the junction between adjacent conduits, and/or the light source 150 is located at the junction of the conduit and the chamber 101.

In some specific embodiments, light source 150 is a green LED light source. Human eyes are sensitive to the green light source, when a seam which causes air leakage of the internal environment exists between connecting parts which form the internal environment, light emitted by the green LED light source can be emitted through the seam, and the human eyes can directly judge whether the air tightness of the vacuum device is good or not in the external environment through the light leakage. Of course, the embodiment of the present invention is not limited thereto, and the light source 150 may also use other light sources such as laser, or use other color light sources, such as white light.

The light source 150 may be powered by a battery or by a power cord. If a battery is used for power supply, the battery can be directly fixed in the internal environment, as shown in fig. 3, the light source 150 and the battery 191 are respectively fixed on the inner side walls of the two pipelines at the adjacent positions of the

pipelines

131 and 132, wherein the fixing manner can be screw fixing. When an LED light source is used as the light source 150, the battery 191 can supply power to the light source 150 for a long time, for example, once the battery 191 is replaced a year, because the power consumption of the LED light source is low. In case of supplying power using the power supply line, it is necessary to connect the power supply line to the internal environment, and as shown in fig. 4, a through hole for communicating the external environment and the internal environment is provided in the vacuum apparatus, the through hole is adjacent to the light source 150, one end of the power supply line 192 is connected to the light source 150 through the through hole, and the other end is connected to an external power source, thereby supplying power to the light source 150. Since the through-hole is provided, a seal 193 is required to be provided between the through-hole and the power supply line 192 in order to prevent gas in the internal environment from leaking from the through-hole. The through hole is adjacent to the light source 150, and when the through hole is not sealed properly, light emitted from the light source 150 is emitted from the through hole and is observed in the external environment.

As shown in fig. 3 and 4, in the

adjacent ducts

131 and 132, a circle of light source 150 is respectively disposed along the inner wall of the duct near the duct joint, of course, the light source 150 may also be a point light source, a line light source, etc. near the duct joint, and the number of the light sources 150 may be set according to specific needs. The arrangement of the light source 150 in the chamber 101 or the adjacent place of the pipeline and the chamber 101 and the power supply manner of the light source 150 can be described with reference to fig. 3 or fig. 4, and are not described in detail herein.

In addition to being observed by the human eye, sensors 160 may be disposed outside the chamber 101 and the conduit, each sensor 160 being disposed in correspondence with a respective light source 150. In some embodiments, the sensor 160 is in the form of a band around the bottom plate 110 adjacent to the cover plate 120, and/or around the adjacent tubing, and/or around the conduit to chamber 101.

Both the alarm 170 and the monitor 180 are electrically connected to the sensor 160, and once the sensor 160 detects the intensity of the light generated by the light source 150, the alarm 170 will activate the alarm and the monitor 180 will display the specific leak location.

Compare the helium scheme of leaking hunting among the prior art, the embodiment of the utility model provides a vacuum apparatus can promote the operating efficiency that the vacuum leaks hunting, saves the activity duration, effectively promotes equipment utilization rate. And can in time discover the leakage point, avoid the bad continuation of product to take place, effectively promote the product yield.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.

In accordance with the embodiments of the present invention as set forth above, these embodiments are not exhaustive and do not limit the invention to the precise embodiments described. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical application, to thereby enable others skilled in the art to best utilize the invention and its various embodiments with various modifications as are suited to the particular use contemplated. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A vacuum apparatus, comprising:

a base plate;

the cover plate is movably connected with the bottom plate, and the bottom plate and the cover plate can surround to form a cavity;

the pipeline is communicated with the cavity and consists of a plurality of sections of pipelines; and

a vacuum pump in communication with the conduit,

the vacuum device also comprises a light source, wherein the light source is positioned in the cavity and at the joint of the bottom plate and the cover plate, and/or positioned in the pipeline and at the joint between adjacent pipelines, and/or positioned at the joint of the pipeline and the cavity.

2. The vacuum device of claim 1, wherein the light source is an LED light source.

3. The vacuum device of claim 2, wherein the light source is a green LED light source.

4. The vacuum device of claim 1, further comprising a battery corresponding to a position of the light source to supply power to the light source.

5. The vacuum apparatus of claim 1, further comprising:

a through hole communicating an external environment with an internal environment formed by the chamber and the pipeline, the through hole being adjacent to the light source; and

and a power supply line electrically connected to the light source through the through hole.

6. The vacuum apparatus according to claim 5, further comprising a sealing ring filled between the through hole and the power supply line.

7. The vacuum device according to any one of claims 1 to 6, further comprising a sensor located outside the chamber and/or the conduit and arranged in correspondence with the respective light source.

8. The vacuum device as claimed in claim 7, wherein the sensor surrounds the base plate adjacent to the cover plate,

and/or the sensor surrounds the abutment of the adjacent conduits,

and/or the sensor surrounds the conduit adjacent the chamber.

9. The vacuum device of claim 7, further comprising an alarm electrically connected to the sensor.

10. The vacuum device of claim 7, further comprising a monitor electrically connected to the sensor.