CN217411339U - Carrying device for coating equipment - Google Patents

Abstract

The utility model relates to a bear device for coating equipment, including the base that has first guide portion, second guide portion and third guide portion, and first supporting part and second supporting part, first supporting part has the first installation department that removes along first guide portion, and set up in first installation department and the first base plate that the object was born in the support, second supporting part utensil second installation department, the second base plate, telescopically connect the first connecting portion of second installation department and second base plate, and the second connecting portion, the one end of second connecting portion removes along third guide portion, the other end is connected with the second base plate. Thereby, a carrying device for a coating apparatus capable of improving the conveying efficiency can be obtained.

Description

Carrying device for coating equipment

Technical Field

The utility model relates to a bear device for coating equipment.

Background

At present, with the rapid development of the electronic core industry, a technology for forming a coating film on the surface of a wafer in the process of manufacturing a semiconductor integrated circuit is being developed. For example, in the fields of Wafer-level Packaging (Wafer-level Packaging), coating of a surface film layer of a Wafer sheet, biomedical chips, microfluidic chips, etc., it may be necessary to coat a predetermined solution on the surface of a Wafer to form a coating film and then perform subsequent processing on the Wafer during the production, manufacture, and processing of the chips.

In the prior art, it is often necessary to transport the carrier objects to be coated to the coating station. Specifically, it is necessary to place the carrier object to be coated on the carrier device at the pre-loading station and to carry the carrier object to be coated to the coating station by the carrier device.

However, in the prior art, the carrier device can only carry one carrier object at a time, the carrier device carries the carrier object from the pre-loading station to the coating station, and after coating is completed, the substrate carrying the carrier object which has been coated is returned to the pre-loading station, so that a new carrier object to be coated can be replaced to the substrate for carrying. When the bearing object is replaced, the bearing device is in an idle state, so that the carrying efficiency of the bearing device is low, and the overall working efficiency is low.

Disclosure of Invention

The present invention has been made in view of the above-mentioned state of the art, and an object of the present invention is to provide a carrying device capable of improving carrying efficiency.

To this end, the utility model provides a bear device for coating equipment, including the base that has first guide portion, second guide portion and third guide portion, and first supporting part and second supporting part, the guide track of first guide portion with the guide track of second guide portion is located first plane and the second plane that is parallel to each other respectively, the guide track of third guide portion is the curve form and the guide track of third guide portion have with first component that is parallel to the first plane and with the second component of first plane quadrature, first supporting part have can along first installation department that first guide portion removed and set up in first installation department and the first base plate that supports the bearing object, the second supporting part have can along the second installation department that second guide portion removed, with the second installation department linkage and the second base plate that supports the bearing object, The second installation part is telescopically connected with the first connecting part and the second connecting part of the second substrate, one end of the second connecting part moves along the third guide part, and the other end of the second connecting part is connected with the second substrate.

In the carrier device according to the present disclosure, the first support part and the second support part may alternately convey the carrier object, the carrier object to be conveyed may be placed on the second substrate of the second support part when the first support part conveys the carrier object to the predetermined station, after the first support part finishes conveying the carrier object, the second support part conveys the carrier object to the predetermined station and a new carrier object to be conveyed may be placed on the first substrate of the first support part, thereby alternately conveying to improve the conveying efficiency of the carrier device.

In the carriage device according to the present disclosure, the first support portion and the second support portion may be linked, and the first support portion and the second support portion may be moved in opposite directions. This enables the first support section and the second support section to be alternately conveyed.

In addition, the carriage device according to the present disclosure may further include a drive mechanism that drives the first support portion to move along the first guide portion. Thus, the first support part and the second support part can be automatically and alternately conveyed under the driving of the driving mechanism.

In addition, in the carrying device according to the present disclosure, optionally, the carrying device further includes a control system configured to control opening and closing of the driving mechanism for driving the first supporting portion to move along the first guiding portion. In this case, the first support part can be controlled by the control system to move on the first guide part or to be stationary on the first guide part, so that the automatic alternate conveyance of the first support part and the second support part can be precisely controlled.

In the carriage device according to the present disclosure, a guide locus of the third guide portion may be formed in a V shape, and the guide locus of the third guide portion may be curved in a direction away from the first plane. In this case, when the second connecting portion is located at a position where the third guide portion is bent, the second board is located below the first board at this time, so that the first supporting portion and the second supporting portion can move without interfering with each other.

In the carriage device according to the present disclosure, a first plane on which the guide locus of the first guide portion is located may be located above a second plane on which the guide locus of the second guide portion is located. In this case, the first support portion and the second support portion can be moved at different heights, so that the first support portion and the second support portion can switch the stations without interfering with each other when linked.

In addition, in the carrier device according to the present disclosure, the base may include a bottom plate having an elongated shape, a first side plate and a second side plate provided in parallel on opposite sides of the bottom plate along a longitudinal direction of the bottom plate, and a third side plate and a fourth side plate provided in parallel between the first side plate and the second side plate along the longitudinal direction of the bottom plate. Thereby, the first support portion can be supported by the first side plate and the second support portion can be supported by the third side plate and the fourth side plate.

In the bearing device according to the present disclosure, the first guide portion may include a first slide rail provided on the first side plate along a guide locus of the first guide portion and a second slide rail provided on the second side plate along a guide locus of the first guide portion, and the second guide portion may include a third slide rail provided on the third side plate along a guide locus of the second guide portion and a fourth slide rail provided on the fourth side plate. Thereby, the first substrate can move on the first slide rail and the second slide rail, and the second substrate can move on the third slide rail and the fourth slide rail.

In addition, in the carrying device related to the present disclosure, optionally, the base further includes a guide plate disposed on the bottom plate and disposed between the third side plate and the fourth side plate along a length direction of the bottom plate, and the third guide part is a groove having a predetermined guide track disposed on the guide plate. Thereby, the second connection portion can be moved in the groove to change the position of the second substrate.

In addition, in the carrying device according to the present disclosure, optionally, the first substrate and the second substrate are made of marble, porous ceramic, or stainless steel material. Thus, the materials of the first substrate and the second substrate can be selected as required.

According to this disclosed a bear device for coating equipment, can effectively improve handling efficiency, and then improve coating efficiency.

Drawings

The invention will now be explained in further detail by way of example only with reference to the accompanying drawings, in which:

fig. 1A is a schematic view showing a first support part according to an example of the present embodiment at a first operation station; fig. 1B is a schematic view showing the first support section according to the example of the present embodiment moving toward the first pre-loading station; fig. 1C is a schematic view showing the second support portion according to the example of the present embodiment in the second operation station.

Fig. 2A is a schematic structural view showing a first mounting portion and a second mounting portion according to an example of the present embodiment; fig. 2B is a schematic diagram showing the structure of the transmission belt according to the present embodiment.

Fig. 3A is a schematic view showing a second guide portion, a third guide portion, and a second support portion according to an example of the present embodiment; fig. 3B is a first cross-sectional view schematically illustrating a third guide portion and a second connection portion according to an example of the present embodiment; fig. 3C is a first cross-sectional schematic view illustrating the second support portion according to the example of the present embodiment; fig. 3D is a second schematic cross-sectional view illustrating the second support portion according to the example of the present embodiment.

Description of reference numerals:

1 … carrying device, 11 … base, 12 … first supporting part, 13 … second supporting part, 14 … driving belt, 111 … first guiding part, 112 … second guiding part, 113 … third guiding part, 114 … bottom plate, 115 … first side plate, 116 … second side plate, 117 … third side plate, 118 … fourth side plate, 119 … guiding plate, 121 … first mounting part, 122 … first base plate, 131 … second mounting part, 132 … second base plate, 133 … first connecting part, 134 … second connecting part and 135 … connecting plate.

Detailed Description

Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same components are denoted by the same reference numerals, and redundant description thereof is omitted. The drawings are schematic and the ratio of the dimensions of the components and the shapes of the components may be different from the actual ones.

It is noted that the terms "comprises," "comprising," and "having," and any variations thereof, in this disclosure, for example, a process, method, system, article, or apparatus that comprises or has a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include or have other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

It should be noted that relative positional and relative directional terms such as "above", "upward", "below", "downward", "up-down direction", "left", "right", "left-right", "front", "rear", "front-rear direction" and the like in this document refer to a normal operation posture and should not be considered as restrictive.

Embodiments of the present disclosure relate to a carrier for a coating apparatus, which may be used to transport a carrier object to a target station. In some examples, the destination station may be below a coating head of the coating apparatus. The carrier device according to the present embodiment can contribute to improvement in efficiency of carrying a carrier object.

The coating apparatus according to the present embodiment may also be referred to as a carrier apparatus, a carrier device, a transportation apparatus, or the like, for example. Note that the names are for showing the equipment for conveying the load-bearing object according to the present embodiment, and should not be construed as limiting.

In the present embodiment, the load bearing object may be a sheet material, a block material, a strip material, or the like. The following describes a carrier device according to the present invention, taking a sheet-like carrier as an example.

Fig. 1A is a schematic view showing the first support section 12 according to the example of the present embodiment at a first operation station; fig. 1B is a schematic view showing the first support section 12 according to the example of the present embodiment moving toward the first preliminary loading station; fig. 1C is a schematic view showing the second support portion 13 according to the example of the present embodiment in the second operation station. In fig. 1A, the first support 12 is in a first operating position and the second support 13 is in a second operating position. In fig. 1C, the second support 13 is located at the second operating station and the first support 12 is located at the first pre-loading station.

In the present embodiment, the carrying device 1 may include a base 11, and a first support portion 12 and a second support portion 13 provided on the base 11, see fig. 1A, 1B, and 1C). The first support portion 12 may be interlocked with the second support portion 13. In some examples, the first support 12 may have a first base plate 122. The first substrate 122 may be used to support the supporting object 200. The second support portion 13 may have a second substrate 132. The second substrate 132 may be used to support the supporting object 200.

In some examples, the size of the first substrate 122 may be the same as the size of the second substrate 132. In other examples, the size of the first substrate 122 may be larger than the size of the second substrate 132. In other examples, the size of the first substrate 122 may be smaller than the size of the second substrate 132. Thereby, the coating objects 200 of different sizes can be supported by the first substrate 122 and the second substrate 132.

In some examples, the first substrate 122 and the second substrate 132 may be made of marble, ceramic, aluminum alloy, or stainless steel, among other materials. In some examples, if the first substrate 122 and the second substrate 132 are made of marble, the bearing object 200 borne by the first substrate 122 and the second substrate 132 may be a glass substrate. In some examples, if the first and second substrates 122 and 132 are made of ceramic, the carrying object 200 carried by the first and second substrates 122 and 132 may be UTG, PET, or flexible plastic. In some examples, if the first substrate 122 and the second substrate 132 are made of an aluminum alloy, the first substrate 122 and the second substrate 132 may be designed in the form of a nested wafer or PV wafer. In some examples, if the first and second substrates 122 and 132 are made of a stainless steel material, the first and second substrates 122 and 132 may have a heating rod built therein. In this case, the supporting object 200 can be dried by heating with the heating rod.

In some examples, the upper surface of the first substrate 122 and the upper surface of the second substrate 132 may have suction holes (not shown) for sucking the supporting object 200. The adsorption hole may be connected to the gas passage. In this case, the adsorption hole can suck the gas through the gas passage, whereby the carrying object 200 can be more firmly carried by the adsorption mechanism of the negative pressure. In some examples, first substrate 122 and second substrate 132 may be made of porous ceramic. Adsorption holes for adsorbing the coating object 200 may be located on the surface of the porous ceramic.

In some examples, the first support 12 may have a first operating station and a first pre-loading station. The second support 13 may have a second operating station and a second pre-loading station. In the present embodiment, a predetermined operation can be performed on the mounted object 200 positioned on the first support part 12 of the first operation station and the mounted object 200 positioned on the second support part 13 of the second operation station. In some examples, the predetermined operation may be an operation of coating, assembling a part, or disassembling a part, among others. When the first support part 12 is located at the first pre-loading station, the carrier object 200 having completed the predetermined operation may be removed and the carrier object 200 to be subjected to the predetermined operation may be placed on the first support part 12. When the second support 13 is located at the second pre-loading station, the carrier object 200 having completed the predetermined operation may be removed and the carrier object 200 to be subjected to the predetermined operation may be placed on the second support 13.

Hereinafter, the carrier device 1 according to the present invention will be described by taking, as an example, a predetermined operation performed on the carrier object 200 as coating. In some examples, the coating may be dispensing a slurry on the surface or inside the carrying object 200.

In some examples, the second support 13 may be transferred from the second pre-loading station to the second operating station when the first support 12 is transferred from the first operating station to the first pre-loading station. When the first support 12 is moved from the first pre-loading station to the first operating station, the second support 13 can be moved from the second operating station to the second pre-loading station. In some examples, the slurry may be dispensed to the carrier object 200 carried on the first substrate 122 while the first support 12 is at the first operation station. When the first substrate 122 is located at the first pre-loading station, the carrier object 200 may be placed on the first support 12. In some examples, when the second support 13 is located at the second operation station, the slurry may be dispensed to the supporting object 200 supported on the second substrate 132. When the second support 13 is located at the second pre-loading station, the carrier object 200 may be placed on the second substrate 132. In this case, the first support portion 12 and the second support portion 13 can alternately convey the objects 200, thereby improving the work efficiency of the loading apparatus 1.

In some examples, the upper surface of the first substrate 122 when the first support 12 is at the first operating station is coplanar with the upper surface of the second substrate 132 when the second support 13 is at the second operating station. In other words, when the first support part 12 is located at the first operation station, the upper surface of the supporting object 200 on the first substrate 122 is coplanar with the upper surface of the supporting object 200 on the second substrate 132 when the second support part 13 is located at the second operation station. In this case, the operation plane of the carrier object 200 at the first operation station and the operation plane of the carrier object 200 at the second operation station can be at the same height, thereby facilitating coating of the carrier objects 200 on the first and second substrates 122 and 132.

A process of switching the second support section 13 from the second preset loading station to the second operating station when the first support section 12 according to the present embodiment is switched from the first operating station to the first preset loading station will be described below with reference to fig. 1A, 1B, and 1C.

In some examples, at the start of the transport, the first support 12 may be located at a first operating station and the second support 13 may be located at a first pre-loading station (see fig. 1A). In this case, the carrier object 200 on the first substrate 122 can be coated, and the carrier object 200 to be coated can be placed on the second substrate 132 positioned on the second support 13 of the second pre-loading station. In some examples, after the coating of the supporting object 200 on the first substrate 122 is completed, the first supporting part 12 may move in the direction D1, and the second supporting part 13 may move in the direction D2 (see fig. 1B). In some examples, the carrier object 200 on the second substrate 132 may be coated while the second support 13 is at the second operation station, at which time the carrier object 200 to be coated can be placed on the first substrate 122 at the first pre-loading station (see fig. 1C). In some examples, after coating of the carrier objects 200 on the second substrate 132 is completed, the first support 12 may be moved from the first pre-loading station to the first operating station in the direction D2, and the second support 13 may be moved from the second operating station to the second pre-loading station in the direction D1.

In some examples, D1 and D2 may be in opposite directions. In other words, the first support portion 12 can move in the opposite direction to the second support portion 13.

Fig. 2A is a schematic structural view showing the first mounting part 121 and the second mounting part 131 according to the example of the present embodiment; fig. 2B is a schematic diagram showing the structure of the transmission belt 14 according to the present embodiment. Note that, in fig. 2B, the second substrate 132 and the first connection portion 133 of the second support portion 13 are omitted for convenience of illustration of the structure.

As shown in fig. 2A, in some examples, the base 11 may include a bottom plate 114, and a first side plate 115, a second side plate 116, a third side plate 117, and a fourth side plate 118 disposed on the bottom plate 114. The base plate 114 may be elongated. The first side plate 115 and the second side plate 116 may be disposed on opposite sides of the bottom plate 114 along a length direction of the bottom plate 114. The third and fourth side panels 117 and 118 may be disposed in parallel between the first and second side panels 115 and 116 along the length direction of the bottom panel 114.

In some examples, the base 11 may further include a first guide portion 111 and a second guide portion 112 (see fig. 2A). The first guide portion 111 may be configured to provide a guide track for the first support portion 12. The second guide part 112 may be configured to provide a guide locus for the second support part 13.

In some examples, the carrier 1 may further comprise a drive mechanism. The driving mechanism may be configured to drive the first support part 12 to move along the first guide part 111. In some examples, the first support 12 may be interlocked with the second support 13. In this case, the first support portion 12 and the second support portion 13 can be moved by the driving mechanism, so that the first support portion 12 and the second support portion 13 can be automatically and alternately conveyed.

In some examples, the first guide portion 111 may have a first slide rail 111a disposed on the first side plate 115 and a second slide rail 111b disposed on the second side plate 116. The first and second slide rails 111a and 111b may be arranged in the direction D1. In some examples, the first support part 12 may have a first mounting part 121 (see fig. 2A) that may move along the first guide part 111. The first mounting part 121 may be disposed at a lower surface of the first substrate 122. The first mounting part 121 may have a first slider 121a disposed on the first slide rail 111a and movable along the first slide rail 111a and a second slider 121b disposed on the second slide rail 111b and movable along the second slide rail 111 b. Thus, the first support portion 12 can be moved along the first guide portion 111 by the first attachment portion 121 to switch the work position.

In some examples, the second guide portion 112 may have a third slide rail 112a disposed on the third side plate 117 and a fourth slide rail 112b disposed on the third side plate 117. The third sliding rail 112a and the fourth sliding rail 112b may be arranged along the direction D2. In some examples, the second support portion 13 may have a second mounting portion 131 (see fig. 2A) that may move along the second guide portion 112. The second mounting portion 131 may be interlocked with the second substrate 132. In other words, when the second mounting part 131 moves along the second guide part 112, the second substrate 132 also moves along the second guide part 112. The second mounting portion 131 may have a third slider 131a disposed on the third slide rail 112a and movable along the third slide rail 112a and a fourth slider 131b disposed on the fourth slide rail 112b and movable along the fourth slide rail 112 b. Thereby, the second support portion 13 can be switched by moving the second mounting portion 131 along the second guide portion 112.

In some examples, a first plane formed by the first slide rail 111a and the second slide rail 111b may be parallel to a second plane formed by the third slide rail 112a and the fourth slide rail 112 b. In other words, the guide locus of the first guide portion 111 and the guide locus of the second guide portion 112 may be located on a first plane and a second plane parallel to each other, respectively. In some examples, the first, second, third, and fourth slide rails 111a, 111b, 112a, and 112b may be linear. Thereby, it is facilitated that the first support portion 12 can be smoothly moved along the first guide portion 111 and the second support portion 13 can be smoothly moved along the second guide portion 112.

In some examples, a first plane formed by the first sliding rail 111a and the second sliding rail 111b may be located above a second plane formed by the third sliding rail 112a and the fourth sliding rail 112 b. In this case, the first support portion 12 and the second support portion 13 can be moved at different heights, so that the first support portion 12 and the second support portion 13 can be switched without interfering with each other when linked.

In some examples, the coating apparatus 100 may include a conveyor belt 14 (see fig. 2B). The drive belt 14 may be disposed on a side wall of the first side plate 115. The belt 14 may be configured to link the first support portion 12 and the second support portion 13. In other words, the first support portion 12 can be interlocked with the second support portion 13. In some examples, the drive belt 14 may include a belt 14a and a powered wheel 14 b. The belt 14a may be configured to connect the first support portion 12 and the second support portion 13. The power wheel 14b may be configured to power the linkage between the first support 12 and the second support 13. Thereby, the first support portion 12 and the second support portion 13 can automatically switch the stations.

In some examples, the second support portion 13 may include a connection plate 135 (see fig. 2B). The connection plate 135 may be disposed on an upper surface of the second mounting portion 131. The belt 14a may connect the first base plate 122 of the first support portion 12 and the connection plate 135 of the second support portion 13. Thereby, the first support portion 12 and the second support portion 13 are connected by connecting the first base plate 122 and the connection plate 135 via the belt 14 a.

Fig. 3A is a schematic view showing the second guide portion 112, the third guide portion 113, and the second support portion 13 according to the example of the present embodiment; fig. 3B is a first cross-sectional view schematically illustrating the third guide portion 113 and the second connection portion 134 according to the example of the present embodiment;

fig. 3C is a first cross-sectional view schematically illustrating the third guide portion 113 and the second support portion 13 according to the example of the present embodiment; fig. 3D is a second schematic cross-sectional view illustrating the third guide portion 113 and the second support portion 13 according to the example of the present embodiment. Wherein FIG. 3B is a cross-sectional view along AA 'in FIG. 3A, and FIGS. 3C and 3D are cross-sectional views along BB' in FIG. 3A; note that, for the sake of convenience of illustration of the structure, the second base plate 132 and the second connecting portion 134 of the second support portion 13 are omitted in fig. 3A.

As described above, in the present embodiment, the base 11 may include the third guide portion 113 (see fig. 3A). The third guide portion 113 may be configured such that the second substrate 132 reaches the height of the first plane from the height of the second plane when the second support portion 13 moves from the second pre-loading station to the second operating station.

In some examples, the second support portion 13 may have a second connection portion 134 (see fig. 3A). One end of the second connection part 134 may move along the third guide part 113. The other end of the second connection part 134 may be connected with the second substrate 132. In some examples, the guide locus of the third guide portion 113 may be curved (see fig. 3B). The guide locus of the third guide portion 113 may have a first component parallel to the first plane and a second component orthogonal to the first plane. In other words, when one end of the second connection part 134 moves in the third guide part 113, the second connection part 134 can move in parallel to the second guide part 112 and the height of the other end thereof can be changed. Thereby, while the second connection part 134 moves along the third guide part 113, the second base plate 132 can move parallel to the second guide part 112 and the height thereof can be changed.

Referring to fig. 3C, in some examples, the second support portion 13 may have a first connection portion 133. The first connection part 133 may telescopically connect the second base plate 132 and the connection plate 135. In other words, the first connecting part 133 may telescopically connect the second mounting part 131 and the second substrate 132. Note that the fact that the first connection portion 133 is stretchable does not necessarily mean that the length of the entire first connection portion 133 changes, but the length of a portion of the first connection portion 133 located between the connection plate 135 and the second substrate 132 changes. Thus, the connection plate 135 can move the second connection portion 134 connected to the second substrate 132 along the third guide portion 113 while moving along the second guide portion 112.

In some examples, the base 11 may include a guide plate 119. A guide plate 119 may be disposed between the third and fourth side plates 117 and 118. The third guide part 113 may form a groove having a predetermined guide track on the guide plate 119 (see fig. 3B). One end of the second connection part 134 may have a cam movable along the groove. Thereby, the second connection part 134 can be moved in the groove to change the position of the second substrate 132.

As shown in fig. 3B, in some examples, the guide track of the third guide part 113 may have a V shape. The guide locus of the third guide portion 113 may be curved in a direction away from the second plane. In some examples, when the second connection portion 134 is located at the left end of the guide track of the third guide portion 113, the second support portion 13 may be located at the second operation station. In other words, when the second connection part 134 is located at one end of the guide track of the third guide part 113, the upper surface of the second base plate 132 may be coplanar with the upper surface of the first base plate 122. Thus, when the second connecting portion 134 moves to one end of the guide track of the third guide portion 113, the object 200 placed on the second substrate 132 can be coated.

As shown in fig. 3C, in some examples, when the second connection portion 134 is located at the left end of the guide track of the third guide portion 113, the second support portion 13 may be located at the second operation station at this time. This enables coating of the mount object 200 on the second substrate 132.

As shown in fig. 3B, in some examples, when the second connection part 134 is located at a position D of the guide track of the third guide part 113, the second substrate 132 may be located below the first substrate 122 at this time. Thereby, the first support 12 can be moved from the first pre-loading station to the first operating station.

In the carrier device 1 for a coating apparatus according to the present embodiment, when a predetermined operation is performed on the carrier object 200 carried on the first substrate 122 of the first support part 12, the carrier object 200 to be subjected to the predetermined operation can be placed on the second substrate 132 of the second support part 13, and after the predetermined operation on the carrier object 200 on the first substrate 122 is completed, the first support part 12 and the second support part 13 switch the station, so that the predetermined operation can be performed on the carrier object 200 on the second substrate 132 and a new carrier object 200 to be subjected to the predetermined operation can be placed on the first substrate 122, and thereby the first support part 12 and the second support part 13 alternately perform the loading to improve the work efficiency.

In conclusion, according to the utility model discloses, can provide one kind and can improve the carrying efficiency bear device 1.

While the present invention has been described in detail in connection with the drawings and examples, it is to be understood that the above description is not intended to limit the invention in any way. The present invention may be modified and varied as necessary by those skilled in the art without departing from the true spirit and scope of the invention, and all such modifications and variations are intended to be included within the scope of the invention.

Claims (10)

1. A bearing device for a coating device is characterized by comprising a base, a first supporting part and a second supporting part, wherein the base is provided with a first guiding part, a second guiding part and a third guiding part, a guiding track of the first guiding part and a guiding track of the second guiding part are respectively positioned on a first plane and a second plane which are parallel to each other, a guiding track of the third guiding part is in a curve shape, a guiding track of the third guiding part is provided with a first component which is parallel to the first plane and a second component which is orthogonal to the first plane, the first supporting part is provided with a first mounting part which can move along the first guiding part and a first substrate which is arranged on the first mounting part and supports a bearing object, the second supporting part is provided with a second mounting part which can move along the second guiding part, a second substrate which is linked with the second mounting part and supports the bearing object, and the second substrate, The second installation part is telescopically connected with the first connecting part and the second connecting part of the second substrate, one end of the second connecting part moves along the third guide part, and the other end of the second connecting part is connected with the second substrate.

2. The carrier in accordance with claim 1 wherein the first support is in linkage with the second support and the first support moves in an opposite direction to the second support.

3. The carrier according to claim 2 further comprising a drive mechanism that drives the first support along the first guide.

4. The carrying device as claimed in claim 3, further comprising a control system for controlling the opening and closing of the driving mechanism for driving the first supporting part to move along the first guiding part.

5. The carrying device according to claim 1, wherein the guide locus of the third guide portion is V-shaped, and the guide locus of the third guide portion is curved in a direction away from the second plane.

6. The carrying device according to claim 1, wherein a first plane in which the guide locus of the first guide portion is located above a second plane in which the guide locus of the second guide portion is located.

7. The carrier according to claim 1 wherein the base comprises an elongated base plate, first and second side plates disposed in parallel on opposite sides of the base plate along a length of the base plate, and third and fourth side plates disposed in parallel between the first and second side plates along the length of the base plate.

8. The carrier according to claim 7 wherein the first guide comprises a first track disposed on the first side panel along the guide track of the first guide and a second track disposed on the second side panel along the guide track of the first guide, and wherein the second guide comprises a third track disposed on the third side panel along the guide track of the second guide and a fourth track disposed on the fourth side panel.

9. The carrying device according to claim 7, wherein the base further comprises a guide plate provided on the bottom plate and provided between the third side plate and the fourth side plate along a length direction of the bottom plate, and the third guide is a groove having a predetermined guide track provided on the guide plate.

10. The carrier in accordance with claim 1 wherein the first and second substrates are made of marble, porous ceramic, or stainless steel material.

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