JP3317280B2 - Alignment transfer system for substrate and alignment transfer method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a system and method for aligning and transferring substrates, which aligns and transfers substrates in a stack.

[0002]

2. Description of the Related Art In recent years, in a printed wiring board manufacturing plant, most of operations in each step such as a punching step, a pressing step, a cleaning step, and the like can be performed by an automatic machine. For the transport, a transport method in which a plurality of substrates are stacked in a stack and transported sequentially by a trolley is adopted.

When such a transport method is adopted,
Usually, at the final stage of each process, the substrates are stacked in a stack, and are manually transferred to a carriage and transported.However, in order to smoothly perform the operation in the next process, in order to align the substrates at the time of this reloading work, An operation of holding a plurality of substrates with both hands in a vertical orientation and gently dropping the side edges of the substrates on a flat work surface is performed.

[0004]

The above-described substrate reloading operation needs to be performed every time, for example, 400 substrates are stacked. However, when the substrates are processed by using an automatic machine, one operation is required. Since about 20,000 sheets can be processed per day, it is necessary to carry out such reloading work, for example, every 10 minutes, and it is necessary to arrange one worker alone.

Further, when the substrates are manually aligned as described above, there is another problem that the substrates are displaced and the wiring is damaged. In particular, considering that the wiring density has been increased in recent years, the width of the wiring itself has become narrower and the distance between the wirings has become shorter, and furthermore, the thickness of the wiring, for example, as thin as 18 to 12 μm, is being considered. There is a concern that the damage to the wiring may result in a fatal product defect.

SUMMARY OF THE INVENTION An object of the present invention is to provide a system and method for aligning and transferring substrates which can automate the transfer and alignment operations of the substrate as much as possible.

[0007]

According to a first aspect of the present invention, there is provided a system for aligning and transferring a substrate, comprising: first and second suction holding means capable of holding a substrate by suction; A moving means for moving forward and backward in conjunction with an interval, and a posture adjusting means for adjusting the posture of the substrate in a horizontal plane at a posture adjusting position in the middle of the substrate transfer direction,
Switching means for moving the second suction holding means to the side to switch the substrate transfer direction, wherein the first suction holding means sucks and holds the substrate sequentially transferred to the delivery position by the first suction holding means and moves to the posture adjustment position. After the substrate is placed and the posture of the substrate is adjusted by the posture adjusting means at the posture adjusting position, the transfer position is switched by the switching means to the first transfer position or the second transfer position by suction holding by the second suction holding means. A substrate aligning and transferring apparatus for aligning and transferring in a stack, first and second transfer tables arranged at the first and second transfer positions, and lifting means for lifting and lowering both transfer tables; A substrate receiving device that raises and lowers the first and second transfer tables so that the height of the uppermost position of the substrates aligned and transferred by the substrate aligning and transferring device does not change.

In the substrate aligning / transferring device of this aligning / transferring system, the first and second suction holding means are moved forward and backward by the moving means to move the substrate sequentially transferred in the horizontal posture to the delivery position. The substrate is sucked and held by the suction holding means and transferred to the posture adjustment position, and the posture of the substrate is adjusted in the horizontal plane by the posture adjustment means at the posture adjustment position, and then the substrate is sucked and held by the second suction holding means. The substrate transfer direction is switched to the first transfer table or the second transfer table by the switching means, and the transfer is sequentially performed in a stacked state. Further, in the substrate receiving device, the height of the uppermost position of the substrates aligned and transferred in a stacked manner on the transfer table does not change, that is, the second position.
The mounting table is sequentially lowered by the elevating means so that the substrate transferred by the suction holding means is always transferred at substantially the same height position.

As described above, in this alignment transfer system, the transfer position of the substrate held by the second suction holding means is switched between the first transfer table and the second transfer table by the switching means. After the set number of substrates are aligned and transferred to one transfer table, the transfer of the substrates to the other transfer table can be started immediately, and the substrates can be aligned and transferred in a stacked manner without interruption. In addition, while the substrates are being aligned and transferred to the other transfer table, it is also possible to transfer the substrate on one transfer table to a carrier or the like. Also, the second
Since the falling distance of the substrate during transfer from the suction holding unit to the transfer table can be made substantially constant, it is possible to effectively prevent the posture from changing when the substrate is transferred.

According to a second aspect of the present invention, there is provided an aligning / transferring system, wherein the lifting / lowering means is provided with lifting / lowering means for lifting / lowering the first transfer table and the second transfer table in opposite directions in synchronization with each other. When such an elevating means is provided, the set number of substrates is transferred to the transfer table while sequentially lowering one transfer table, and then the other transfer table that has risen to the transfer start position is moved. Since the substrates can be aligned and transferred immediately, continuous transfer can be performed without stopping the substrate alignment and transfer device.

According to a third aspect of the present invention, there is provided an alignment transfer system, wherein a transfer carriage having a receiving bottom surface at substantially the same height as the upper surface of a transfer table on which a set number of substrates have been transferred is provided on the substrate receiving device in a face-to-face manner. In addition, the substrate receiving device is provided with an extruding means for extruding the substrates transferred on the transfer table in a stacked manner toward the carrier. With this configuration, it is possible to automatically transfer the set number of substrates stacked and transferred to the transfer table to the transfer carriage.

According to a fourth aspect of the present invention, there is provided a method for aligning and transferring substrates, wherein a substrate sequentially transferred to a delivery position in a horizontal posture is suction-held by first suction-holding means, transferred to a posture adjustment position, and moved to a posture adjustment position. After correcting the posture of the substrate in the horizontal plane, the substrate is sucked and held by the second suction holding means, and the transfer table is lowered so that the substrate height at the uppermost position does not change. After being sequentially aligned on the transfer table and transferred in a stacked state, the first
When the number of substrates stacked on the transfer table or the second transfer table reaches the set number, the transfer position of the substrate sucked and held by the second suction holding means is shifted from the first transfer table to the second transfer table or vice versa. And transfer it.

In this alignment transfer method, the posture of the substrate is adjusted at the posture adjustment position provided during the transfer of the substrate from the transfer position to the transfer table. Then, they are aligned and transferred in a stacked manner on the transfer table. When the number of substrates stacked on the first transfer table or the second transfer table reaches the set number, the transfer position of the substrate sucked and held by the second suction holding means is changed from the first transfer table to the second transfer table. Since the transfer is performed by switching to or from the table, the substrates can be aligned and transferred in a stacked manner with respect to the transfer table. In addition, while the substrates are being aligned and transferred to the other transfer table, it is also possible to transfer the substrate on one transfer table to a carrier or the like. In addition, since the substrate can be dropped at a substantially constant distance when the substrate is transferred from the second suction holding unit to the transfer table, it is possible to effectively prevent the posture from changing when the substrate is transferred.

According to a fifth aspect of the present invention, there is provided an alignment transfer method, wherein the first transfer table and the second transfer table are vertically lifted and lowered in synchronization with each other.
In this method, the substrates are sequentially arranged and transferred in a stacked manner on a transfer table. With such a configuration, after the set number of substrates are transferred to the transfer table while one transfer table is sequentially lowered, the substrates are immediately transferred to the other transfer table that has been moved to the transfer start position. Since the substrates can be mounted, continuous transfer can be performed without stopping the substrate alignment and transfer device.

[0015]

Embodiments of the present invention will be described below with reference to the drawings. As shown in FIGS. 1 to 3, the alignment transfer system 1 includes a vertically movable first transfer table 2.
And a substrate receiving device 4 having a second transfer table 3 and a substrate 6 sequentially transferred in a horizontal position by a conveyor 5 are sequentially aligned and transferred in a stacked manner on the first transfer table 2 or the second transfer table 3. And a substrate aligning and transferring device 7. The substrate 6 conveyed by the conveyor 5 is, for example, a printed wiring board 6 in which an unnecessary portion of the outer periphery is punched and formed by a press device. In the alignment and transfer system 1, the press-formed substrate 6 is transferred to a cleaning step. The plurality of press-formed substrates 6 are arranged and arranged in a stacked manner and stored in the transport trolley 70 in order to improve the ease of handling and the handling of the substrates 6 in the cleaning process. However, it is also possible to use this alignment transfer system 1 for transporting the substrate 6 between processes other than transporting the substrate 6 from the press molding process to the cleaning process, or to use a flat plate other than a printed board. The present invention can also be applied to a substrate alignment transfer system in which substrates are aligned and transferred in a stack.

The substrate aligning / transferring device 7 comprises first attitude adjusting means 10 for roughly adjusting the attitude of the substrate 6 conveyed to the delivery position on the conveyor 5, and first and second means for holding the substrate 6 by suction. Suction holding means 11 and 12 and both suction holding means 1
Moving means 13 for moving the substrates 1 and 12 forward and backward at intervals in the substrate transfer direction, and second posture adjusting means for adjusting the posture of the substrate 6 in a horizontal plane at a posture adjustment position in the middle of the substrate transfer direction. 14 and second suction holding means 12
And switching means 15 for moving the substrate sideways to switch the substrate transfer direction. In this embodiment, a description will be given by defining the direction of transport of the substrate 6 by the conveyor 5 as the front-back direction and the direction of transport of the substrate 6 by the moving means 13 as the left-right direction.

The first attitude adjusting means 10 will be described. A delivery position of the substrate 6 is provided at the downstream end of the conveyor 5, and a stop plate 20 extending in the left-right direction and stopping the substrate 6 at the delivery position is provided in front of the delivery position. A long plate-shaped position regulating plate 21 extending in the front-rear direction on both left and right sides of the delivery position;
Pressing means 22 for pressing the substrate 6 against the position regulating plate 21 is provided. The pressing means 22 includes a contact plate 23 that contacts the side edge of the substrate 6, and an actuator 24 such as an air cylinder that drives the contact plate 23 forward and backward. When the substrate 6 is transported to the delivery position by the conveyor 5, the leading edge of the substrate 6 in the transport direction abuts on the stop plate 20, and the posture of the substrate 6 is adjusted. Is detected, the contact plate 23 of the pressing means 22 is moved to the actuator 24.
And the contact plate 23 is pressed against the side edge of the substrate 6, and the posture of the substrate 6 conveyed by the conveyor 5 in the horizontal plane by the stop plate 20, the contact plate 23, and the position regulating plate 21. Is corrected, and the substrate 6 is moved to an appropriate position of the delivery position. In addition, it is preferable that the mounting position and the like of the pressing means 22 can be adjusted according to the size of the substrate conveyed by the conveyor 5.

The first and second suction holding means 11 and 12 are:
Box-shaped main body 25a having an open lower surface and main body 25a
And a suction pad 25 having a pad portion 25b made of soft rubber provided on a lower surface of the main body 25a. Then, while the pad portion 25b is in close contact with the substrate 6, the inside of the main body portion 25a is depressurized to apply a pressure difference between the internal pressure of the main body portion 25a and the atmospheric pressure capable of supporting the substrate weight. Even if outside air enters the suction pad 25 through a through hole or a gap between the substrate 6 and the suction pad 25, the substrate 6 is configured not to fall off, and the inside of the main body 25a is opened to the atmosphere or pressurized into the main body 25a. It is configured such that the substrate 6 sucked and held can be separated by supplying air. However, it is also possible to form a portion having no through hole in a part of the substrate 6 and use suction holding means for suction holding the portion by a vacuum pad.

The moving means 13 will be described. A machine base 30 having an upper surface set at substantially the same height as the conveying surface of the conveyor 5 is provided on the left side of the conveyor 5, and a frame extending in the left-right direction above the machine base 30. 31 is fixedly supported via a pair of pillars 32. The frame 31 is provided with a base plate 33 which moves forward and backward between a forward position shown in FIG. 2 and a retracted position shown in FIG. 3 via a servomotor and a screw shaft (not shown). Means 1
1 and 12 are attached to a base plate 33, the first suction holding means 11 moves forward and backward together with the base plate 33 over a delivery position and a posture adjustment position, and the second suction holding means 12 moves together with the base plate 33 into the posture adjustment position and the second position. 1
Alternatively, it is configured to be able to move forward and backward over the positions above the second transfer tables 2 and 3. However, as a driving unit for moving the base plate 33 forward and backward, a configuration other than the driving unit having the above-described servomotor and screw shaft may be employed. Further, the first and second suction holding means 11 and 12 may be moved forward and backward synchronously by using a driving means of another system.

The attachment structure of the first suction holding means 11 to the base plate 33 will be described in more detail. A first elevating means 34 is provided on the right side of the front surface of the base plate 33, and a lower end of the first elevating means 34 is substantially provided. A first lever member 35 extending horizontally to the right is provided.
Is fixed to the vicinity of the right end of the first lever member 35, and together with the first lever member 35,
Is mounted so as to be able to ascend and descend over an ascending position for transferring the substrate 6 and a descending position where the substrate 6 can be held by suction.

The second suction holding means 12 is attached to the base plate 33 via the switching means 15 and the second elevating means 36 having the following configuration. The switching means 15 will be described. A guide frame 37 extending forward is provided on the left side of the front surface of the base plate 33, and a support 38 that moves back and forth via an actuator such as an air cylinder is provided on the guide frame 37. .

The supporting member 38 of the switching means 15 is provided with a second elevating means 36, and a lower end of the second elevating means 36 is provided with a second lever member 39 extending substantially horizontally to the left. The means 12 is fixed to the vicinity of the left end of the second lever member 39, and is moved by the second lifting / lowering means 36 to the second lever member 39.
At the same time, it is mounted so as to be able to move up and down over an ascending position for transferring the substrate 6 and a descending position at which the substrate 6 can be sucked and held. 3 is mounted so as to be switchable between a forward position shown by a virtual line in FIG. 3 corresponding to FIG. 3 and a retracted position shown by a solid line corresponding to the second transfer table 3.

The distance between the suction holding means 11 and 12 is set to be substantially the same as the moving distance of the moving means 13 by the moving means 13.
When the suction holding unit 11 moves to the delivery position, the second suction holding unit 12 moves to the posture adjustment position, and when the first suction holding unit 11 moves to the posture adjustment position, the second suction holding unit 12 moves to the second position. It is configured to move to a position above the first or second transfer table 2 or 3.

The second attitude adjusting means 14 will be described. A horizontal flat surface 40 is formed at the attitude adjusting position, and the substrate 6 sucked and held by the first suction holding means 11 is transferred onto the flat face 40. Is done. An attitude adjusting plate 41 is provided on the front side and the right side of the flat surface 40, and an actuator 42 such as an air cylinder is provided on the rear side and the left side. A contact plate 43 is provided on both actuators 42 so as to be able to advance and retreat, and the contact plate 43 is pushed out by the two actuators 42 while the substrate 6 is transferred onto the flat surface 40 by the first suction holding means 11. By sandwiching the substrate 6 between the contact plate 43 and the posture adjusting plate 41, the posture of the substrate 6 is adjusted to an appropriate posture in a horizontal plane, and the substrate 6 is moved to an appropriate posture adjustment position. Will be adjusted. In order to adjust the posture and position of the substrate 6 of various sizes, the actuator 4 is adjusted according to the size of the substrate 6.
It is preferable that the mounting position can be changed.

Next, a description will be given of the substrate receiving apparatus 4 having the first transfer table 2 and the second transfer table 3 which can be moved up and down. FIG.
As shown in FIG. 4, a pair of first guide rods 50 and a pair of second guide rods 51 extending vertically are provided at the rear and front portions of the left side surface of the machine base 30, and 2
The first and second transfer tables 2, 3 are provided on the guide rods 50, 51.
Are guided so as to be movable up and down, respectively. First and second sprockets 52 and 53 are rotatably provided on the left side surface of the machine base 30 between the upper part of the first guide rod 50 and the upper part of the second guide rod 51, and the first and second guide rods 50 are provided. , 51, a driving sprocket 54 rotated by a servo motor (not shown) is provided on the left side surface of the machine base 30.
2 to 54, a chain 55 is mounted in a substantially M-shape. One end of the chain 55 is attached to the first transfer table 2,
Is connected to the second transfer table 3 so that when the driving sprocket 54 rotates, the first transfer table 2 and the second transfer table 3 move up and down in the opposite direction in conjunction with each other. ing.

A pair of left and right guide rails 56 extending in the front-rear direction are provided on the upper surfaces of both transfer tables 2 and 3, and a movable partition plate 57 is supported on both guide rails 56 so as to be movable back and forth. L extending in the left-right direction is provided at the front of the upper surfaces of the tables 2 and 3.
A mold support 58 is provided. Guide rollers 59 are provided at regular intervals in the left-right direction below the movable partition plate 57 and above the support body 58, and the substrate 6 sucked and held by the second suction holding means 12 is placed on the first transfer table 2 Or the second
The transfer table 3 is placed on the guide roller 59. An actuator 60 composed of an air cylinder or the like extending in the left-right direction is provided on the movable partition plate 57, and an extruding plate 61 extending upward is provided at the right end of the actuator 60, and is aligned and transferred on a guide roller 59 in a stacked manner. The substrate 6 is sent out into the carriage 70 by driving the push plate 61 to the left by the actuator 60. A fixed partition plate 62 is fixed to the machine base 30 in front of the transfer tables 2 and 3 so that the movable partition plate 57 and the fixed partition plate 62 regulate the movement of the substrate 6 in the front-rear direction. Is configured. still,
In the present embodiment, the first and second transfer tables 2 and 3 are vertically moved up and down by the chain 55, but may be vertically moved up and down by using a cord such as a wire. Alternatively, they may be individually lifted and lowered using driving means such as a servomotor and a screw shaft. When individually moving up and down, before a predetermined number of substrates 6 are stacked on one transfer table,
The other transfer table is raised in advance.

A substantially U-shaped side wall 71 is formed on the upper part of the carriage 70, and a housing bottom 73 in which ball bearings 72 are installed at regular intervals is formed on the lower part of the carriage 70.
Is formed, and the transfer carriage 70 is turned to the right with the opening side of the side wall 71 toward the right side so that the height position of the storage bottom surface 73 is substantially the same as the height of the guide roller 59 of the transfer table. 3 are arranged close to each other.

Next, a method of aligning and transferring the substrate 6 will be described while explaining the operation of the aligning and transferring system 1. In the substrate aligning and transferring apparatus 7, first, as shown in FIG. 3, every time the press-formed substrate 6 is conveyed to the delivery position by the conveyor 5, the posture of the substrate 6 is changed by the first posture adjusting means 10 in a horizontal plane. Adjust roughly within. Next, FIG.
As shown in FIG.
The suction holding units 11 and 12 move to the forward position, and the first suction holding unit 11 is moved down by the first lifting / lowering unit 34 to suck and hold the substrate 6 at the delivery position and rise. At this time, the second suction holding means 12 also descends by the second elevating means 36 and then rises, which will be described later.

Next, as shown in FIG. 5B, the first and second suction holding means 11, 12 are moved to the retreat position by the moving means 13, and the first suction holding means 11 are moved by the first lifting / lowering means 34. Is lowered, the substrate 6 held by suction is transferred to the posture adjustment position, and is raised. At this time, the second suction holding means 12
Is also lowered by the second lifting means 36 and then raised, which will be described later.

Next, the posture of the substrate 6 transferred to the flat surface 40 at the posture adjustment position is adjusted in the horizontal plane by the second posture adjustment means 14, and the first and second substrates are adjusted as shown in FIG. The second suction holding means 11 and 12 are moved to the forward position, and the second suction holding means 1
2 descends and ascends and holds the substrate 6 whose posture has been adjusted. On the other hand, the first suction holding unit 11 is also the first lifting unit 34.
As a result, the substrate 6 conveyed to the delivery position is sucked and held and rises as described above.

Next, as shown in FIGS. 3 and 5D, the first and second suction holding means 12 are moved to the retreat position by the moving means 13, and the second suction holding means are moved by the second lifting / lowering means 36. The substrate 12 is lowered, and the substrate 6 held by suction is transferred onto the guide roller 59 of the first transfer table 2 and is raised. On the other hand, the first suction holding means 11 is also lowered by the first elevating means 34 to transfer the substrate 6 held by suction as described above to the posture adjustment position.

In this way, in the substrate aligning and transferring apparatus 7, each time the substrate 6 is conveyed to the delivery position by the conveyor 5, the moving means 13 moves the first and second suction holding means 11, 12 forward and backward, and is conveyed. 1st transfer table 2 one by one
The posture is adjusted upward and the sheets are transferred in a stacked state. When the set number of substrates 6 is transferred to the first transfer table 2,
From the next time, when the first and second suction holding means 11 and 12 are moved backward by the moving means 13, the second suction holding means 12 is moved along the guide frame 37 by the switching means 15 as shown by a virtual line in FIG. The second suction holding means 12
Is moved to a position above the second transfer table 3, and the substrate 6 sucked and held by the second suction holding means 12 is transferred to the second transfer table 3. When the first and second suction holding means 11 and 12 are moved forward by the moving means 13, the second suction holding means 12 is retracted along the guide frame 37 by the switching means 15 and the second suction holding means 12 is It will be moved above the adjustment position. In this way, the set number of substrates 6 are sequentially aligned and transferred in a stacked manner on the first transfer table 2 and the second transfer table 3.

On the other hand, in the substrate receiving device 4, the first transfer table 2
Each time one or more substrates 6 are transferred, the first transfer table 2 is lowered and the second transfer table 3 is raised so that the uppermost position of the transferred substrate 6 does not change. . When the set number of substrates 6 is transferred to the first transfer table 2,
The actuator 60 pushes the substrate 6 on the first transfer table 2 toward the transport vehicle 70, and the accommodation bottom surface 73 of the transport vehicle 70
From the next time, every time one or more substrates 6 are transferred to the second transfer table 3, the second transfer table 3 is lowered and the first transfer table 2 is raised, and the setting is performed. Each time a number of substrates 6 are transferred, the transferred substrates 6 are sequentially transferred to the transport carriage 70, and the lifting and lowering operations of both transfer tables 2 and 3 are reversed.
When a certain number of substrates 6 are accommodated in the transport trolley 70, the transport trolley 70 is moved to the cleaning device, and a new transport trolley 70 is set on the left side of the substrate receiving device 4.

[0034]

According to the system and method for aligning and transferring substrates according to the present invention, the transfer position of the substrate held by the second suction holding means is changed between the first transfer table and the second transfer table. After the set number of substrates are aligned and transferred to one of the transfer tables, it is possible to immediately start transferring the substrates to the other transfer table. Can be arranged and transferred. In addition, while the substrates are being aligned and transferred to the other transfer table, it is also possible to transfer the substrate on one transfer table to a carrier or the like. Also,
Since the falling distance of the substrate when transferring from the second suction holding means to the transfer table can be made substantially constant, it is possible to effectively prevent the posture from changing when the substrate is transferred.

Further, the first transfer table and the second
If a lifting means is provided for vertically moving the transfer table in the opposite direction, the set number of substrates is transferred to the transfer table while one of the transfer tables is sequentially lowered, and then the transfer table is raised to the transfer start position. The substrate can be immediately aligned and transferred to the other transfer table
Continuous transfer is possible without stopping the substrate transfer means.

Further, a transfer carriage having a receiving bottom at substantially the same height as the upper surface of the transfer table on which the set number of substrates have been transferred is provided on the substrate receiving device in a face-to-face manner. When the substrate receiving device is provided with an extruding means for pushing out the substrate transferred to the transfer carriage side, the set number of substrates stacked and transferred on the transfer stand can be automatically transferred to the transfer carriage.

[Brief description of the drawings]

FIG. 1 is a perspective view of an alignment transfer system.

FIG. 2 is a plan view of an alignment transfer system.

FIG. 3 is an explanatory diagram of the operation of the alignment transfer system.

FIG. 4 is a perspective view of a substrate receiving device.

FIG. 5 is an explanatory view of the operation of the alignment transfer system.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Alignment transfer system 2 1st transfer table 3 2nd transfer table 4 Substrate receiving device 5 Conveyor 6 Substrate 7 Substrate alignment transfer device 10 1st attitude | position adjustment means 11 1st suction holding means 12 2nd suction holding means 13 Moving means 14 Second attitude adjusting means 15 Switching means 20 Stop plate 21 Position regulating plate 22 Pressing means 23 Contact plate 24 Actuator 25a Main unit 25b Pad unit 25 Suction pad 30 Machine base 31 Frame 32 Leg 33 Base plate 34 First lifting / lowering Means 35 First lever member 36 Second lifting / lowering means 37 Guide frame 38 Support body 39 Second lever member 40 Flat surface 41 Attitude adjustment plate 42 Actuator 43 Contact plate 50 First guide rod 51 Second guide rod 52 First sprocket 53 Second sprocket 54 Drive sprocket 55 Chain 56 Doreru 57 movable partition plate 58 support 59 guide roller 60 the actuator 61 pushing plate 62 fixed partition plates 70 transport carriage 71 side wall 72 ball bearing 73 accommodated bottom

──────────────────────────────────────────────────続 き Continued on the front page (56) References JP-A-3-267220 (JP, A) JP-A-10-297710 (JP, A) JP-A 6-35980 (JP, U) JP-A 50- 115886 (JP, U) (58) Fields investigated (Int. Cl. ⁷ , DB name) B65G 1/00-1/20 B65G 47/91 B65G 57/00-57/32 B65G 60/00-61/00 B23P 19/00 302

Claims (5)

(57) [Claims] 1. A first and a second suction holding means capable of holding a substrate by suction, a moving means for moving the two suction and holding means at an interval in the substrate transfer direction in an interlocked manner, and a middle part in the substrate transfer direction. In the position adjustment position, there is provided a position adjustment means for adjusting the posture of the substrate in a horizontal plane, and a switching means for switching the substrate transfer direction by moving the second suction holding means to the side, and sequentially at the delivery position in a horizontal posture. The transferred substrate is sucked and held by the first suction holding means and transferred to the posture adjustment position. At the posture adjustment position, the posture of the substrate is adjusted by the posture adjustment means, and the second suction holding means sucks and holds the substrate. 1
A substrate aligning / transferring device that switches a transfer position to a transfer position or a second transfer position by switching means and aligns and transfers in a stacked manner; and first and second devices arranged at the first and second transfer positions. A transfer table, and lifting means for lifting and lowering both transfer tables, and the first and the second substrates are arranged so that the height of the uppermost position of the substrates aligned and transferred by the substrate alignment transfer apparatus does not change. (2) A substrate receiving apparatus that moves up and down a transfer table. 2. A first transfer table and a second transfer table as the elevating means.
2. The system according to claim 1, further comprising a lifting means for vertically moving the transfer table in a reverse direction. 3. A transfer vehicle having a receiving bottom surface at a height substantially equal to the upper surface of a transfer table on which a set number of substrates have been transferred, is provided on the substrate receiving device in a face-to-face manner, and is stacked on the transfer table. 3. The system for aligning and transferring substrates according to claim 1, wherein the substrate receiving device is provided with an extruding means for extruding the substrates transferred on the carrier cart side. 4. A substrate sequentially transferred in a horizontal posture to a delivery position is sucked and held by a first suction holding means, transferred to a posture adjustment position, and after correcting the posture of the substrate in a horizontal plane at the posture adjustment position. While the suction table is held by the second suction holding means and the transfer table is lowered so that the height of the substrate at the uppermost position does not change, the transfer table is sequentially aligned with the first transfer table or the second transfer table and stacked. When the number of substrates transferred and stacked on the first transfer table or the second transfer table reaches the set number, the transfer position of the substrate sucked and held by the second suction holding means is shifted from the first transfer table to the second position. A method for aligning and transferring substrates, wherein the transfer is performed by switching to or from a transfer table. 5. The substrate according to claim 4, wherein the first transfer table and the second transfer table are synchronously moved up and down in opposite directions, and the substrates are sequentially stacked and transferred on the transfer table. Alignment transfer method.