CN217404768U

CN217404768U - Alignment equipment

Info

Publication number: CN217404768U
Application number: CN202220768274.5U
Authority: CN
Inventors: 黄进昌; 吕峻杰; 陈士骏
Original assignee: Mirle Automation Corp
Current assignee: Mirle Automation Corp
Priority date: 2022-03-28
Filing date: 2022-04-01
Publication date: 2022-09-09
Anticipated expiration: 2032-04-01
Also published as: TWM629920U

Abstract

The utility model discloses an alignment device, it includes a first microscope carrier, a second microscope carrier, and a camera lens module. The first carrying platform is provided with a first carrying surface and an observation window formed from the first carrying surface. The first bearing surface is used for placing a first object thereon, and the position of a first alignment mark of the first object corresponds to the observation window. The second carrying platform is provided with a second carrying surface for placing a second object thereon, and the position of a second alignment mark of the second object corresponds to the observation window. The first carrying table and the second carrying table can relatively move, so that the first alignment mark and the second alignment mark fall within a depth of field range of the lens module. Therefore, the first object and the second object can be aligned at relative positions with small intervals, and subsequent operation can be accurately performed.

Description

Alignment equipment

Technical Field

The utility model relates to an alignment equipment especially relates to an alignment equipment that does benefit to and dwindles counterpoint error.

Background

In the conventional alignment apparatus, a reading unit is moved between two objects to be aligned, so as to read alignment marks of the two objects to be aligned, respectively, thereby implementing alignment of the two objects. However, with the existing alignment equipment, the separation distance between the two objects is large, which is not beneficial to perform subsequent other operations on the two objects after the alignment operation.

The present inventors have considered that the above-mentioned drawbacks can be improved, and have made intensive studies and use of scientific principles, and finally have proposed a novel and effective method for improving the above-mentioned drawbacks.

SUMMERY OF THE UTILITY MODEL

An embodiment of the present invention provides an alignment apparatus and an alignment method, which can improve the defects possibly generated by the existing alignment apparatus.

The embodiment of the utility model discloses counterpoint equipment, it includes: the first carrying platform is provided with a first carrying surface, and an observation window is formed on the first carrying surface along a preset direction; the first bearing surface of the first carrying platform is used for placing a first object thereon, and the position of a first alignment mark of the first object corresponds to the observation window; the second carrying platform is provided with a second carrying surface and is used for placing a second object on the second carrying platform, and the position of a second alignment mark of the second object corresponds to the observation window; the lens module is arranged along a preset direction and corresponds to the observation window of the first carrying platform, and the lens module has a field depth range; the first microscope stage and the second microscope stage can move relatively, so that the first alignment mark and the second alignment mark fall within the field depth range of the lens module, and the lens module can observe through the observation window and along the preset direction.

Optionally, the alignment apparatus further includes a compensation mechanism, which is installed on at least one of the first stage and the second stage; the compensation mechanism can correspondingly adjust the relative position of the first carrying platform and the second carrying platform according to the observation result of the lens module.

Optionally, the compensation mechanism includes a plurality of compensation units with different compensation precisions.

Optionally, the alignment apparatus further includes: the first cavity is internally provided with a first carrying platform; the second cavity is internally provided with a second carrying platform, and the first cavity and the second cavity can be closed to form a working cavity together; and an air exhaust module, which is communicated with at least one of the first cavity and the second cavity and is used for exhausting the operation chamber.

Optionally, the lens module selectively moves into the first cavity and faces the viewing window along a preset direction.

Optionally, the lens module is fixed inside the first cavity and faces the observation window along a preset direction.

Optionally, the first cavity and the second cavity are not provided with any observation window.

Optionally, the observation window includes a plurality of through holes that are located on different sides of the first carrier and are hollow.

Optionally, the observation window comprises a plurality of through holes located on different sides of the first carrier, and a transparent body is embedded in each through hole.

Optionally, the depth of field range of the lens module is less than 100 micrometers.

To sum up, the alignment apparatus disclosed in the embodiments of the present invention can form the observation window on the first stage, so that the lens module can observe the first alignment mark and the second alignment mark located in the depth of field range through the observation window, and complete alignment of the first object and the second object under the relative position with a small interval, thereby facilitating the first object and the second object to accurately implement subsequent operations.

For a further understanding of the features and technical content of the present invention, reference should be made to the following detailed description and accompanying drawings, which are only intended to illustrate the present invention, and not to limit the scope of the present invention.

Drawings

Fig. 1 is a schematic view of alignment equipment according to a first embodiment of the present invention.

Fig. 2 is a schematic step flow diagram of an alignment method according to a first embodiment of the present invention.

Fig. 3 is a schematic diagram of a setting step of an alignment method according to a first embodiment of the present invention.

Fig. 4 is a schematic view of the distance adjusting step of the alignment method according to the first embodiment of the present invention.

Fig. 5 is a schematic diagram of an alignment step of an alignment method according to a first embodiment of the present invention.

Fig. 6 is a schematic view of the air pumping step of the alignment method according to the first embodiment of the present invention.

Fig. 7 is a schematic diagram illustrating a connection step of an alignment method according to a first embodiment of the present invention.

Fig. 8 is a schematic view of alignment equipment according to a second embodiment of the present invention.

Detailed Description

The following is a description of the embodiments of the present invention relating to the "alignment device" with specific embodiments, and those skilled in the art can understand the advantages and effects of the present invention from the disclosure of the present invention. The present invention may be practiced or carried out in other different embodiments, and various modifications and changes may be made in the details of this description based on the different points of view and applications without departing from the spirit of the present invention. The drawings of the present invention are merely schematic illustrations, and are not drawn to scale, but are described in advance. The following embodiments will further explain the related art of the present invention in detail, but the disclosure is not intended to limit the scope of the present invention.

It will be understood that, although the terms "first," "second," "third," etc. may be used herein to describe various components or signals, these components or signals should not be limited by these terms. These terms are used primarily to distinguish one element from another element or from one signal to another signal. In addition, the term "or" as used herein should be taken to include any one or combination of more of the associated listed items as the case may be.

Example one

Please refer to fig. 1 to 7, which illustrate a first embodiment of the present invention. As shown in fig. 1 and fig. 2, the present embodiment discloses an alignment apparatus 100 and an alignment method S100, and for easy understanding, the alignment method S100 is implemented by using the alignment apparatus 100 in the present embodiment, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the alignment method S100 can also be implemented by other devices.

As shown in fig. 3 to fig. 6, the alignment apparatus 100 in this embodiment includes a first cavity 1, a second cavity 2 collocated with the first cavity 1, an air-extracting module 3, a first carrying stage 4 installed inside the first cavity 1, a second carrying stage 5 installed inside the second cavity 2, a lens module 6, and a compensating mechanism 7, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the first chamber 1, the second chamber 2, the pumping module 3, and the compensation mechanism 7 may be omitted or replaced by other components according to design requirements.

In the present embodiment, the first chamber 1 and the second chamber 2 can be moved relatively to form a working chamber P (see fig. 6). Preferably, the first cavity 1 and the second cavity 2 are not provided with any observation window, so as to reduce the manufacturing cost of the first cavity 1 and the second cavity 2, but the present invention is not limited thereto.

Furthermore, the pumping module 3 may be connected to at least one of the first chamber 1 and the second chamber 2 (e.g., the pumping module 3 is installed in the embodiment and connected to the first chamber 1) for pumping the working chamber P. In this embodiment, the operation chamber P is preferably evacuated by the evacuation module 3 until reaching a vacuum environment with a predetermined pressure value, and the predetermined pressure value is, for example, less than 50 torr (torr), but the invention is not limited thereto.

In this embodiment, the first carrier 4 is movably mounted in the first cavity 1 along a predetermined direction D, and the first carrier 4 has a first carrying surface 41 and an observation window 42 formed along the predetermined direction D from the first carrying surface 41. The first carrying surface 41 of the first carrying stage 4 is used for placing a first object O1 thereon, and the position of the first alignment mark O11 of the first object O1 corresponds to the observation window 42.

It should be noted that the first carrying surface 41 faces the second stage 5 in this embodiment, and the observation window 42 refers to a structure through which a light source can pass through the first stage 4, for example: the observation window 42 may include a plurality of through holes 421 located at different sides of the first carrier 4 and having a hollow shape, or a transparent body 422 (such as glass) is further embedded in each of the through holes 421, or other structures, and the lens module 6 may include a number of lenses corresponding to the through holes 421.

The second stage 5 is movably mounted to the second cavity 2 along the predetermined direction D in this embodiment, and the second stage 5 has a second carrying surface 51 (facing the first stage 4) for placing a second object O2 thereon, and the position of the second alignment mark O21 of the second object O2 corresponds to the viewing window 42. That is, the first and second alignment marks O11 and O21 correspond to the viewing window 42 substantially along the preset direction D.

The lens module 6 has a depth of field range, and the lens module 6 is disposed along the predetermined direction D corresponding to the observation window 42 of the first stage 4. In this embodiment, the lens module 6 is not installed in the first cavity 1 or the second cavity 2, and the lens module 6 is selectively moved into the first cavity 1 and faces the observation window 42 along the predetermined direction D, but the invention is not limited thereto.

Accordingly, the first stage 4 and the second stage 5 can relatively move (along the preset direction D) so that the first alignment mark O11 and the second alignment mark O21 fall within the depth of field range of the lens module 6, so that the lens module 6 can observe along the preset direction D through the observation window 42.

When the first alignment mark O11 and the second alignment mark O21 fall within the depth of field range of the lens module 6, the first object O1 and the second object O2 are preferably not in contact with each other but are spaced apart from each other by a small distance (i.e., the distance is smaller than the depth of field range), so that the first object O1 and the second object O2 can perform other subsequent operations more accurately after the lens module 6 is observed.

Moreover, the first object O1 and the second object O2 may be made of a material that can be penetrated by a light source, so as to facilitate the lens module 6 to read the first alignment mark O11 and the second alignment mark O21, but the invention is not limited thereto. For example, in other embodiments not shown in the present disclosure, one of the first alignment mark O11 and the second alignment mark O21 may be a through hole, and the other one corresponds to the configuration of the through hole.

In addition, the compensation mechanism 7 is mounted on at least one of the first stage 4 and the second stage 5 (for example, the compensation mechanism 7 is mounted on the first stage 4 in this embodiment), and the compensation mechanism 7 can correspondingly adjust the relative positions of the first stage 4 and the second stage 5 according to the observation result of the lens module 6, so that the first alignment mark O11 and the second alignment mark O21 can accurately fall within the depth of field range of the lens module 6.

It should be noted that the compensation mechanism 7 in this embodiment may include a plurality of compensation units with different compensation precisions (for example, the compensation mechanism 7 includes a two-dimensional moving platform 71 with a lower precision and a piezoelectric platform 72 with a higher precision than the two-dimensional moving platform), so as to effectively adjust the first alignment mark O11 and the second alignment mark O21 to predetermined positions.

Above, the structure of the alignment apparatus 100 of the present embodiment is described, and the alignment method S100 using the alignment apparatus 100 is described next. As shown in fig. 2, the alignment method S100 in this embodiment sequentially includes a setting step S110, an adjusting step S130, an alignment step S150, an air-extracting step S170, and a connecting step S190.

The following describes specific embodiments of the steps S110 to S190 of the alignment method S100 according to the present embodiment, but the present invention is not limited thereto. For example, in other embodiments not shown in the present invention, the implementation of each of the steps S110 to S190 can be adjusted and changed according to design requirements, and at least one of the air-extracting step S170 and the connecting step S190 can be omitted or replaced by other steps.

The setting step S110: as shown in fig. 2 and fig. 3, the first object O1 and the second object O2 are respectively disposed on the first stage 4 (e.g., the first carrying surface 41) and the second stage 5 (e.g., the second carrying surface 51), so that the positions of the first alignment mark O11 of the first object O1 and the second alignment mark O21 of the second object O2 both correspond to the observation window 42 of the first stage 4 along the predetermined direction D for the lens module 6 to observe. Further, in the setting step S110, the first cavity 1 and the second cavity 2 are located at positions separated from each other, and the lens module 6 may be located outside the first cavity 1 and the second cavity 2.

The distance adjusting step S130: as shown in fig. 2 and 4, the first stage 4 and the second stage 5 are relatively moved close to each other, and a predetermined distance D0 is left between the first alignment mark O11 and the second alignment mark O21, which is smaller than the depth of field range of the lens module 6. It should be noted that the lens module 6 may employ at least one lens with high resolution and the depth of field range is, for example, less than 100 micrometers (μm), so that the first object O1 and the second object O2 may not contact each other but be spaced apart a little (for example, the predetermined distance D0 is, for example, 50 μm), but the invention is not limited thereto.

The alignment step S150: as shown in fig. 2 and 5, the lens module 6 is used for simultaneously reading the first alignment mark O11 and the second alignment mark O21 along the predetermined direction D through the viewing window 42 and confirming a relative position between the first alignment mark O11 and the second alignment mark O21. In this embodiment, the lens module 6 is moved to face the observation window 42 along the predetermined direction D in the alignment step S150. In addition, in other embodiments not shown in the present invention, the lens module 6 may also move into the first cavity 1 in the setting step S110 or the distance adjusting step S130.

In the alignment step S150, when the lens module 6 reads only one of the first alignment mark O11 and the second alignment mark O21 (or when the lens module 6 does not read any one of the first alignment mark O11 and the second alignment mark O21), the compensation mechanism 7 moves the first stage 4 and the second stage 5 relatively until the lens module 6 reads the first alignment mark O11 and the second alignment mark O21 at the same time.

In the alignment step S150, when the first alignment mark O11 and the second alignment mark O21 are read simultaneously by the lens module 6, but the relative position therebetween is different from a predetermined position, the compensation mechanism 7 moves the first stage 4 and the second stage 5 relatively until the difference is smaller than a predetermined error tolerance. That is, the alignment (or superposition) precision between the first alignment mark O11 and the second alignment mark O21 must meet a preset error tolerance, and the preset error tolerance may be at least up to a sub-micron level, but the invention is not limited thereto.

The air extraction step S170: as shown in fig. 2 and 6, the first cavity 1 and the second cavity 2 are closed to form the working chamber P, and the working chamber P is evacuated until the vacuum environment with the preset pressure value is reached. In more detail, after the lens module 6 completes the alignment step S150, the lens module 6 moves away from the first cavity 1, so that the first cavity 1 and the second cavity 2 can be closed to form the working chamber P (i.e., the lens module 6 moves away from the working chamber P before the air-extracting step S170).

The connecting step S190: as shown in fig. 2 and 7, the first stage 4 and the second stage 5 are relatively moved to connect the first object O1 and the second object O2. In the present embodiment, the first stage 4 and the second stage 5 move relatively under the vacuum environment, but the present invention is not limited thereto. It should be noted that the specific "connection" between the first object O1 and the second object O2 may be adjusted according to design requirements, for example: compression, adhesive, interlocking, or other various types of connection.

Example two

Please refer to fig. 8, which illustrates a second embodiment of the present invention. Since this embodiment is similar to the first embodiment, the same parts of the two embodiments are not described again, and the difference between this embodiment and the first embodiment mainly lies in: the lens module 6 is disposed in the alignment apparatus 100.

In this embodiment, the lens module 6 is fixed inside the first cavity 1 and faces the observation window 42 along the predetermined direction D. That is, in the alignment step S150, the lens module 6 can read the first alignment mark O11 and the second alignment mark O21 simultaneously along the predetermined direction D and through the observation window 42 without moving.

The embodiment of the utility model provides a technological effect

In summary, the alignment apparatus and the alignment method disclosed in the embodiments of the present invention can make the lens module simultaneously read the first alignment mark and the second alignment mark located in the depth of field range through the observation window (in a single direction) by forming the observation window on the first stage, so that the first object and the second object complete alignment at a relative position with a small interval (e.g. smaller than the depth of field range), thereby facilitating the first object and the second object to accurately perform subsequent operations (e.g. reducing errors caused by a moving stroke when the first object or the second object performs subsequent operations).

The above disclosure is only a preferred and practical embodiment of the present invention, and is not intended to limit the scope of the present invention, so that all the modifications made by the equivalent techniques described in the specification and drawings are included in the scope of the present invention.

Claims

1. An alignment apparatus, comprising:

the first carrying platform is provided with a first carrying surface, and an observation window is formed on the first carrying platform along a preset direction from the first carrying surface; the first bearing surface of the first carrying platform is used for placing a first object thereon, and the position of a first alignment mark of the first object corresponds to the observation window;

the second carrying platform is provided with a second carrying surface and is used for placing a second object on the second carrying platform, and the position of a second alignment mark of the second object corresponds to the observation window; and

the lens module is arranged along the preset direction and corresponds to the observation window of the first carrying platform, and the lens module has a field depth range;

the first microscope stage and the second microscope stage can move relatively, so that the first alignment mark and the second alignment mark fall within the depth of field range of the lens module, and the lens module can observe through the observation window and along the preset direction.

2. The alignment apparatus of claim 1, further comprising a compensation mechanism mounted to at least one of the first stage and the second stage; the compensation mechanism can correspondingly adjust the relative position of the first carrying platform and the second carrying platform according to the observation result of the lens module.

3. The alignment apparatus as claimed in claim 2, wherein the compensation mechanism comprises a plurality of compensation units with different compensation accuracy.

4. The alignment apparatus as claimed in claim 1, further comprising:

the first cavity is internally provided with the first carrying platform;

the second cavity is internally provided with the second carrying platform, and the first cavity and the second cavity can be closed to form a working chamber together; and

and the air exhaust module is communicated with at least one of the first cavity and the second cavity and is used for exhausting the working chamber.

5. The alignment apparatus as claimed in claim 4, wherein the lens module selectively moves into the first cavity and faces the viewing window along the predetermined direction.

6. The alignment apparatus as claimed in claim 4, wherein the lens module is fixed inside the first cavity and faces the viewing window along the predetermined direction.

7. The alignment apparatus as claimed in claim 4, wherein the first and second cavities are not provided with any viewing windows.

8. The alignment apparatus as claimed in claim 1, wherein the observation window comprises a plurality of through holes that are disposed on different sides of the first stage and are hollowed out.

9. The alignment apparatus as claimed in claim 1, wherein the viewing window comprises a plurality of through holes located at different sides of the first stage, and a transparent body is embedded in each through hole.

10. The alignment apparatus as claimed in claim 1, wherein the depth of field of the lens module is less than 100 μm.